CN1307227A - Error correcting method in circular grating angle measurement - Google Patents

Error correcting method in circular grating angle measurement Download PDF

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Publication number
CN1307227A
CN1307227A CN 00112652 CN00112652A CN1307227A CN 1307227 A CN1307227 A CN 1307227A CN 00112652 CN00112652 CN 00112652 CN 00112652 A CN00112652 A CN 00112652A CN 1307227 A CN1307227 A CN 1307227A
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China
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frequency division
code
phase
cos
sin
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CN1138128C (en
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叶盛祥
魏爱敏
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Institute of Optics and Electronics of CAS
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Institute of Optics and Electronics of CAS
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Priority to CNB001126520A priority Critical patent/CN1138128C/en
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Publication of CN1138128C publication Critical patent/CN1138128C/en
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Abstract

Primary output signals of two circular grating with 90 deg phase difference are frequency division successively, one of the primary signal and its frequency division signal are taken as absolute periodic code and the other as the enclosed code and one error correcting area is set in one optional position. Compared with available method, the said one needs no expensive code wheel, is simple and reliable and may be used in correcting the error of circular grating caused by manufacture, installation and shafting shake.

Description

Error correcting method in circular grating angle measurement
The present invention is a kind of round grating angular measure error calibration method, the round grating measurement error correcting method that belongs to a kind of correction zone of step-up error at an arbitrary position and have maximum value error correction scope.
In the existing angular measure, when adopting the stored count of circle grating, to some error, the error that causes such as rock as grating manufacturing, setting-up eccentricity, axle system, particularly surpass one when counting equivalent when the margin of error, error can't be proofreaied and correct.Adopt the absolute cycle of code-wheel during sign indicating number method measuring angle, though can proofread and correct the error that above-mentioned factor causes by on code-wheel, scribing a sealing sign indicating number code channel step-up error correction zone, the code-wheel that this method need adopt, manufacturing cost height, volume are big; And the code figure place of measuring angle is many more, also corresponding the increasing of sealing sign indicating number code channel number of code channel on the code-wheel and correction error, and manufacturing cost is higher, volume is bigger.Another distinct disadvantage of this method is when error surpasses intrinsic correcting range, needs to change the bigger correction zone position of correcting range, and must scribe the sealing code channel this moment again on code-wheel, and all there are very big waste cost and time like this.
The objective of the invention is to overcome above-mentioned the deficiencies in the prior art, and a kind of round grating angular measure error calibration method that adopts low cost of manufacture, round grating that volume is little to make the angle measurement element is provided.
In order to achieve the above object, justifying grating angular measure error calibration method comprises the steps:
By cuing open phase slit (indication grating) or adjusting the photoelectric apparatus position, obtain the sin of two groups of quadratures, cos ,-sin and-four output signals of cos;
To sin, cos ,-sin and-four signals of cos carry out difference and amplify shaping, obtain the original output square-wave signal S of 90 ° of two phase phasic differences 0And S 90
To square-wave signal S 90Carry out signal level frequency division one by one, obtain two serial frequencies reduce at double successively 90 ° of phase phasic differences output signal;
Get S 0With to S 90The most significant digit of a series of zero phase output signals of frequency division acquisition and 90 ° of phase place output signals is as every code of the absolute cycle sign indicating number of measuring angle value one by one;
Get S 90With to S 9090 ° of phase place output signals of another series of obtaining of frequency division are as the sealing sign indicating number one by one, in the optional position step-up error correction zone of the absolute cycle sign indicating number of measuring angle value.
The present invention compared with prior art has following advantage: the output signal of two quadratures by taking out round grating is carried out frequency division one by one, and each that can make absolute cycle sign indicating number in the round grating angular measure all has a sealing sign indicating number.Like this, as long as, do not need to scribe again code-wheel by revising just step-up error correction zone or change intrinsic correction zone position at an arbitrary position of software or a small amount of hardware.Therefore this method is simple, cost is low.And adopt error correction of the present invention and use that the very high code-wheel of manufacturing cost is the same to have a very high reliability.And this method correcting range is big, and maximum can reach maximum value ± 22.5 °.
The invention will be further described below in conjunction with drawings and Examples.
Fig. 1 is the output signal and the output square wave behind the frequency division one by one thereof of the round grating of embodiment
Fig. 2 is the error correction schematic diagram of the absolute cycle coding of circle grating
Fig. 3 is a maximum value error correction scope synoptic diagram
Adopt the circle grating as the angle measurement element, by cuing open phase slit (indication grating) or adjusting the photoelectric apparatus position, when it relatively rotates with the circle grating, obtain the sin of two groups of quadratures, cos and-sin, four output signals of-cos, these four signals are carried out difference amplify the shaping processing, the picked up signal quality preferably, two master reference square-wave signals of quadrature, and to its carry out signal level one by one frequency division obtain the fractional frequency signal that two serial frequencies reduce successively at double, and the fractional frequency signal of a series of 90 ° of phase places wherein is sealing sign indicating numbers of a row zero phase fractional frequency signal.Because each all has the sealing sign indicating number, can go up the step-up error correction zone at an arbitrary position by revising software and a small amount of hardware.Perhaps big inadequately at the correcting range of finding certain correction zone, be modified on the bigger bit level of correcting range and carry out error correction.Figure 1 shows that two master reference square-wave signal S of the garden grating output of embodiment 0And S 90Fig. 1 has listed S 0And S 908 cycles, S 0And S 9090 ° of phase phasic differences.To S 90Front and back carry out frequency division one by one along triggering, have only the square wave of one-period in the circle one week of grating (360 °) until frequency division, obtain the output signal that two serial frequencies reduce successively at double, C 0, B 0, A 0C 90, B 90, A 90C 0And C 90, B 0And B 90, A 0And A 90Phase place differ 90 ° respectively.Get round grating original signal S 0With to S 90Carry out one by one frequency division and obtain a row zero phase fractional frequency signal C 0, B 0, A 0With to S 90The most significant digit A of 90 ° of phase place output signals of another row of obtaining of frequency division one by one 90(A 0The sealing coded signal) form every code of the absolute cycle sign indicating number of scale-of-two, the tested angle value of this group coded representation.Get round grating original signal S 90With to S 90Carry out one by one frequency division and obtain 90 ° of phase place fractional frequency signals of another row C 90, B 90, A 90As the sealing sign indicating number of above-mentioned every code, step-up error correction zone.
Fig. 2 is circle code error correction principle figure of absolute cycle of grating, among the figure Expression circle grating original signal A 7And A 7(envelope), and to A 7(envelope) carries out the level diagram that 7 frequency divisions of signal level obtain, as A 2, A 3, A 4, A 5, A 6, A 7 The sealing sign indicating number level of representing a certain position is as A 2(envelope) (is A 1), A 7(envelope); 90 ° of phase signal A obtaining of frequency division wherein 6(envelope), A 5(envelope), A 4(envelope), A 3(envelope) do not show in the drawings.--the natural binary code that the absolute cycle sign indicating number of-expression is translated into, as X 1, X 2, X 3, X 4, X 5, X 6, X 7The minimum resolution of the angle value that this group code is represented is 2.8125 °.Shown in Figure 2, gauge position when the I district, A 4, A 5, A 6, A 7The right value code be 0010 (corresponding angle value is 8.4375 °), when the II district, the right value code is 0110 (corresponding angle value is 11.25 °).If the level end points has error, as shown in Figure 2, A 5Forward terminal is changed in advance, and this moment is at I district, A 4, A 5, A 6, A 7Code value become 0110, compare the error of generation+2.8125 ° with former correct code value 0010; If A 5Forward terminal postpones conversion, this moment when the II district, A 4, A 5, A 6, A 7Code value become 0010, compare with former correct code value 0110, produce-2.8125 ° error.By the sealing sign indicating number, as A among Fig. 2 7(envelope) uses A 7, A 7(envelope), A 6Proofread and correct A 5The error of end points is used A 7The radix-minus-one complement of code channel does to proofread and correct the control zone, could proofread and correct (in I, II district) when promptly only measuring in this is interval, when I ', need not proofread and correct during the II district.At I district, A 5, A 6, A 7(envelope) is that even number is not then proofreaied and correct, and is that odd number is then proofreaied and correct; In the II district, same A 5, A 6, A 7(envelope) is that even number is not proofreaied and correct, and is that odd number is proofreaied and correct.The correcting range of this moment is promptly 2.8125 ° of positive and negative resolution, is A 71/4 angle value of code channel.If A 5End point error when surpassing 2.8125 °, correction at this moment is inoperative, needs by revising software and a small amount of hardware correction zone is arranged on A 6On, and the like.
Fig. 3 is the level diagram of every code among Fig. 1, A 5, A 5(envelope) is respectively the original output signal S of round grating 0And S 90Level diagram, 90 ° of phase phasic differences, A 4, A 3, A 2And A 4(envelope), A 3(envelope), A 2(envelope) (is A 1) be respectively circle grating original signal level A 5(envelope) carries out one by one the two serial fractional frequency signals that frequency division obtains, A 4And A 4(envelope), A 3And A 3(envelope), A 2And A 2(envelope) phase place differs 90 ° respectively, and dash area is represented A among Fig. 3 4, A 4(envelope), A 3To code most significant digit A 1With inferior high-order A 2The error correction scope of level end points, correcting range have at this moment reached maximum value ± 22.5 °.

Claims (1)

1. an error correcting method in circular grating angle measurement comprises the steps:
By cuing open phase slit (indication grating) or adjusting the photoelectric apparatus position, obtain the sin of two groups of quadratures, cos ,-sin and-four output signals of cos;
To sin, cos ,-sin and-four signals of cos carry out difference and amplify shaping, obtain the original output square-wave signal S of 90 ° of two phase phasic differences 0And S 90
To square-wave signal S 90Carry out signal level frequency division one by one, obtain the output signal that two serial frequencies reduce 90 ° of phase phasic differences successively at double;
Get S 0With to S 90Carry out one by one the every code of the most significant digit of a series of zero phase output signals that frequency division obtains and 90 ° of phase place output signals as the absolute cycle sign indicating number of measuring angle value;
Get S 90With to S 90Carry out one by one 90 ° of phase place output signals of another series that frequency division obtains as the sealing sign indicating number, in the optional position step-up error correction zone of the absolute cycle sign indicating number of measuring angle value.
CNB001126520A 2000-01-25 2000-01-25 Error correcting method in circular grating angle measurement Expired - Fee Related CN1138128C (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103162712A (en) * 2013-03-21 2013-06-19 中国人民解放军63908部队 Method for treating errors of angle measurement of circular grating and compensating skew of shafting
CN103759660A (en) * 2014-01-28 2014-04-30 广东工业大学 Method for auxiliary installation and error compensation of absolute optical grating ruler
CN106500631A (en) * 2016-10-21 2017-03-15 北京信息科技大学 Circular gratings eccentric error parameter identification and compensation method
CN106705894A (en) * 2017-01-25 2017-05-24 天津大学 Error calibration and compensation method for double-circular grating angle displacement detection system
CN106871821A (en) * 2016-12-28 2017-06-20 中国科学院长春光学精密机械与物理研究所 A kind of Circular gratings process alignment error calibration and modification method based on single reading head

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109631976A (en) * 2019-01-07 2019-04-16 武汉海达数云技术有限公司 The compensation method of Circular gratings angular error and device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103162712A (en) * 2013-03-21 2013-06-19 中国人民解放军63908部队 Method for treating errors of angle measurement of circular grating and compensating skew of shafting
CN103759660A (en) * 2014-01-28 2014-04-30 广东工业大学 Method for auxiliary installation and error compensation of absolute optical grating ruler
CN103759660B (en) * 2014-01-28 2016-03-23 广东工业大学 A kind of absolute grating ruler is auxiliary to be installed and error compensating method
CN106500631A (en) * 2016-10-21 2017-03-15 北京信息科技大学 Circular gratings eccentric error parameter identification and compensation method
CN106500631B (en) * 2016-10-21 2018-11-23 北京信息科技大学 Circular gratings eccentric error parameter identification and compensation method
CN106871821A (en) * 2016-12-28 2017-06-20 中国科学院长春光学精密机械与物理研究所 A kind of Circular gratings process alignment error calibration and modification method based on single reading head
CN106705894A (en) * 2017-01-25 2017-05-24 天津大学 Error calibration and compensation method for double-circular grating angle displacement detection system
CN106705894B (en) * 2017-01-25 2019-03-26 天津大学 The error calibration of double Circular gratings Angular Displacement Detecting Systems and compensation method

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