CN1305209C

CN1305209C - Linear motor

Info

Publication number: CN1305209C
Application number: CNB021405247A
Authority: CN
Inventors: 金容日
Original assignee: Gater Science & Tech Co Ltd
Current assignee: Gater Science & Tech Co Ltd
Priority date: 2001-07-11
Filing date: 2002-07-08
Publication date: 2007-03-14
Anticipated expiration: 2022-07-08
Also published as: KR100377783B1; DE10231190A1; CN1396693A; KR20030006165A

Abstract

The present invention relates to a arrangement of a linear motor. The arrangement has opposing first and second magnet arrangements, an elongated first yoke adapted to accommodate the first magnet arrangement, an elongated second yoke adapted to accommodate the second magnet arrangement and an intermediate magnet arrangement. The magnet arrangements are adapted to accommodate first and second coils on both sides of the intermediate magnet arrangement.

Description

Linear motor

Technical field

The present invention relates to a kind of linear motor.

Background technology

Linear motor has many advantages, reaches submicron order such as anti-overload (up to 10g) and positioning accuracy, is the ideal equipment of novel machine or modified model machine.Other advantages comprise having only a movable part, thereby parts are simple, reliable operation, and non-recoil power need not high rigidity.Contactless operation can also reduce abrasion, increases useful life, reduces maintenance workload.Having wide range of applications of linear motor.For example, semiconductor manufacturing facility, factory automation machinery, microlithography instrument, and other are used for the accurate telecontrol equipment of position of precise control device and instrument, these all adopt linear motor.

Common synchronous linear motor comprises that one group produces the magnet of electromagnetism mutual effect with coil groups.Under group of magnets cooperates, produce electromagnetic force (being called as Lorentz force) on the coil groups, the electromagnetic force on the coil groups makes group of magnets propelling coil group, and vice versa.Therefore, linear motor can have a fixing group of magnets (propelling coil group) or a fixing coil groups (promotion group of magnets).Be fixed on to the coil groups common mechanical on the switching stage (or support) with one group of track slip joint.

Common moving-coil type linear motor generally all has permanent magnet in the both sides of movable coil group.These permanent magnets are fixed on the inner surface of two tracks, and face-to-face.The magnet serial connection is installed, and the utmost point orientation of the magnet in the utmost point orientation of the magnet in back and front is reverse.

The coil groups of being made by many coils is encapsulated in the epoxy resin board.Each coil contains the lead that is wrapped on the rectangular frame, and there is a perforate in framework central authorities.The lead winding direction is vertical with the magnetic line of force in the magnetic field that is produced by permanent magnet.With the placement adjacent to one another of a series of coils, and place between two opposed permanent magnet groups.Be wrapped in the lead on the coil, and the magnetic line of force between two blocks of opposed permanent magnets intersects, when the lead energising, produce Lorentz force, the propelling coil motion.

Fig. 1 illustrates a kind of common linear motor 10.Motor 10 comprises a yoke that takes the shape of the letter U basically 14, and two blocks of opposed magnet 16 are installed on the inner surface of this yoke.Yoke 14 and magnet 16 are formed stator 17.Coil 18 places between the opposed magnet 16 of two blocks of stator 17 slidably.One end of coil 18 is fixed on the movable body bearing 20, and bearing 20 is connected with movable body 22 again.Yoke 14 is securely fixed on the bearing 12.A linear movement guide device 24 is positioned at the high-end of bearing 12.Can provide one second stator and coil groups (not shown) on the right side of linear movement guide device 24, to increase motoricity to movable body 22.Get up by lid 26 whole component protections linear motor 10.The bottom of coil 18 is placed on the top, bottom of yoke 14, and the distance bottom yoke is H1.Because the twofold of yoke 14, H1 generally equals the twice of yoke thickness.Magnet 16 is placed on the top of yoke 14, and the distance bottom yoke is H2.

Fig. 2 shows second kind of common linear motor 10 '.Linear motor 10 ' is basic identical with linear motor 10 shown in Figure 1, unique be not both it one second linear movement guide device is arranged, and two linear movement guide device 24R ' and 24L ' are positioned at the outside of two stator 17L ' and 17R '.One little space D 1 is arranged between stator 17R ' and the stator 17L '.Because the assembly of stator 17L ' and 17R ' is identical, so only need one of them is discussed.Stator 17L ' comprises a yoke 14L ' who takes the shape of the letter U basically, and side is equipped with two opposed magnet 16L ' within it.Coil 18L ' is slidably located between two opposed magnet 16L ' of stator 17L '.The end of coil 18R ' and 18L ' is fixed on the movable body bearing 20 ', and this bearing is connected on the movable body 22 ' again.Yoke 14R ' and 14L ' are securely fixed on the bearing 12 '.Lid 26 ' protects whole linear motor 10 '.The bottom of coil 18R ' and 18L ' is positioned at yoke 14R ' and top, 14L ' bottom, and the distance bottom yoke 14R ' and 14L ' is H1 '.The bottom of magnet 16R ' and 16L ' is positioned at yoke 14R ' and top, 14L ' bottom, and the distance bottom yoke 14R ' and 14L ' is H2 '.

Summary of the invention

A kind of linear electrical thermomechanical components comprises opposed first and second group of magnets; The first elongated yoke that can lay first group of magnets; The second elongated yoke that can lay second group of magnets; Middle group of magnets between the first and second elongated yokes; With one with first, second base plate that is connected with the intermediate elongated yoke.The both sides of group of magnets in the middle of first, second and middle magnet are placed and first and second yokes can be placed in slidably.

The composition of linear electrical thermomechanical components can comprise following one or more modes.This assembly can comprise an elongated middle yoke, between the first and second elongated yokes.Middle group of magnets is positioned at the first surface of elongated middle yoke, and this first surface is towards first group of magnets.Adopt methods such as bolt or epoxy resin that middle group of magnets is fixed on the first surface.The magnet combination is positioned on the second surface of elongated middle yoke suitablely in the middle of second, and this second surface is towards second group of magnets.A base plate is connected with the first and second elongated yokes, and elongated middle yoke and base plate are fixed.The magnet unit that first and second group of magnets are staggeredly placed by marshalling, by magnetic polarity orientation is formed.A movable body can be connected with first and second coils.Base plate can be connected with the first and second elongated yokes.First supporting-seat-arm is connected with base plate, and this bearing has a groove, admits the first elongated yoke slidably.Equally, second supporting-seat-arm is connected with base plate, and this bearing has a groove, admits the second elongated yoke slidably.The groove on the bearing and the first elongated yoke can be the irregular quadrilateral of interlocking.One end of this groove has perforate.A plate can cover this opening slot, and by one this plate and this groove stationary device is fixed on first yoke on first supporting-seat-arm.Fixture is fixed this plate with horizontal direction or vertical direction.In addition, also can dispose one or more auxiliary middle yokes in motor, yoke can be fixed with the third and fourth middle group of magnets in the middle of each.The magnet group comprises eight blocks of magnet at least, and magnetic line of force path wherein passes eight blocks of magnet in the single loop.

This system has following one or more advantage.The linear motor volume is little and solid.Cancelled the twofold yoke, the width of motor reduces.In addition, owing to had supporting-seat-arm, yoke to need not to be rigidity, therefore, the thickness of yoke can reduce, and the width of motor also just can reduce.Among the embodiment of yoke, the width of motor also can further reduce in the middle of cancellation.

The two stator module configurations of integral type allow the magnetic line of force to pass whole yoke, enter and leave the side surface of yoke, and pass all group of magnets.This point is different with common linear motor.In common linear motor, the magnetic line of force enters and leaves opposed group of magnets as one group of magnetic line of force, and enters and leave opposed group of magnets as another group magnetic line of force.Therefore, as described, the magnetic line of force passes eight blocks of magnet.And in common linear motor, the magnetic line of force only passes four blocks of magnet.The two yoke design of integral type must allow opposed group of magnets mutually between near motion, thereby shortened magnetic line of force path.The distance of this shortening has improved magnetic flux density, thereby can make the more powerful of linear motor.Because the variation of magnetic line of force passage shape, the distance of this shortening also can allow to adopt thin magnet.

Another advantage of this kind linear motor is that its size allows to use in the application scenario that size is restricted.For requiring more powerful application scenario, motor can be amplified in proportion stacked two above stator modules.In the case, the thickness of magnet is thinner than the magnet of above-mentioned double motor group use.The efficient height of motor, operating cost with low, can satisfy multiple instructions for use.

According to following description and accompanying drawing and claims, can more be well understood to other advantages and characteristics.

Description of drawings

Fig. 1 illustrates a kind of common linear motor.

Fig. 2 illustrates another kind of common linear motor.

Fig. 3 illustrates according to a kind of linear motor embodiment of the present invention.

Fig. 4 illustrates the perspective view of yoke/magnet assemblies shown in Figure 3.

Fig. 5 illustrates another embodiment of linear motor.

Fig. 6 illustrates another embodiment of linear motor.

Embodiment

Now consult accompanying drawing in more detail, described a kind of structure of linear motor among the figure.Can know that motor is to improve power by the coil block that is stacked to by a plurality of coils.The thickness of coil block configuration is the thickness that is positioned at a coil of coil block and permanent magnet group interaction point.More can easily know by research, take the method for stacked electric motor assembly in the integral type yoke, also can improve power of electric motor accompanying drawing.

Fig. 3 illustrates an embodiment of linear motor 30.Motor 30 has the two stator modules of an integral type, and this assembly comprises a left yoke 44L, a middle yoke 48 and a right yoke 44R.Magnet 52L is installed in the side of left yoke 44L, a side of yoke 48 in the middle of an opposed magnet 52L ' is installed in.The opposite side of yoke 48 in the middle of magnet 52R ' is installed in is in the face of opposed magnet 52R.The 48 bottom 48z that middle yoke has an expansion lay screw or bolt 50, so that middle yoke 48 and pedestal 38 is physically fixing.From the extended first upper bracket arm 40 of pedestal 38 1 sides a perforate is arranged, for construction bolt 46L.Equally, a perforate is arranged, for construction bolt 46R from the extended second upper bracket arm 42 of pedestal 38 opposite sides.Yoke 44L, 44R and 48, corresponding magnet 52R, 52R ', 52L and 52L ' constitute stator 32 with framework 36.Bolt 46L and 46R tighten the left yoke 44L and the right yoke 44R of the two stator modules of integral type respectively, yoke 48 in the middle of bolt 50 chuckings, thus yoke 44L, the 44R and 48 of the two stator modules of integral type is fixed on the framework 36.Different with discrete stator 17,17L and the 17L ' of linear motor 10 and 10 ', between the adjacent stators assembly, there is not the gap.The profile of linear motor 30 is little.Unlike common motor, have the twofold yoke, thereby the width of motor reduces.In addition, because supporting-seat-arm has been arranged, each yoke need not to be rigidity, thereby can reduce the thickness of yoke, and the width of motor just reduces.

The first coil 58L is between

yoke

44L and 48, and the second coil 58R is between yoke 48 and 44R.Coil 58R and 58L are fixed on the coil brace 56.Coil brace 56 is connected with movable body 34 again.The first linear movement guide device 60L and the second linear movement guide device 60R lay respectively at the top of supporting-seat-arm 40 and 42, and are connected with movable body 34.Linear movement guide device or bearing 60L and 60R play the guide rail effect of linear motor 30.Bearing 60L and 60R lay respectively at the top of the elongated board at supporting-seat-arm 40 and 42 tops.Bearing 60L and 60R can be sliding bearings, allow the support even load to utilize linear motor 30 traversing segment distances.In one embodiment, movable body 34 takes the shape of the letter U, and a lid places between the supporting-seat-arm of U-shaped movable body 34.

Linear motor 30 contains a linear scaled device or encoder 66 and a narrow limit transducer 68 that is installed in motor 30 1 sides.By lid 62 whole electric motor assembly protected.The position that the responsive linear movable body of encoder 66 34 is current.The all places transducer be can adopt, optic position sensor, resistance (current potential) position transducer and magnetic position sensor (induction synchro) comprised.In optical sensor, movable sign indicating number plate is made by glass plate, the chromium that adopted vapor deposition on the glass plate, or make by stainless steel, nickel, copper or other metallic plates, the light emitter region adopts luminescence unit (light-emitting diode) the scanning etching annulus of light source to be made.All there are light source and light receiving area in both sides at movable sign indicating number plate.Light source and light receiving area are made by the luminescence unit (omitting among the figure) and the photoreceptor unit of specified quantity respectively.When the luminous zone is positioned at the place ahead of photoreceptor unit, that light emitted goes out, as to project movable sign indicating number plate light is through the emission of light emitter region, and enters corresponding photoreception unit, receive light after, the photoreceptor unit sends output signal.Potentiometric sensor is a voltage divider basically, has a sliding contact, engages with carbon film bar or other resistance units that is connected with power supply.The output voltage of this transducer equals the voltage on the sliding contact, or the part voltage on the sliding contact.Therefore position influence, can utilize the output voltage values of this transducer to the position of sliding contact with respect to resistance unit, position that indication detects or the position that measures.Magnetic position sensor adopt many be installed in the lip-deep square wave winding of fixed cell with one be installed in active unit on the coil that is connected of AC power.Each square wave winding all has many " high pressure " part and " low pressure " part, and has the different cycles.System changes by the mutual inductance between search coil and many square wave windings, measures active unit with respect to the position between the fixed cell.Work as coil electricity, if coil near the high-pressure section of square wave winding, the big electric current of square wave winding internal induction.Have only when coil during, just respond to little electric current in the winding near the low-pressure section of square wave winding.Therefore, according to the signal that winding sends, just can measure the position of active unit along fixed cell length.

The structure of linear motor shown in Figure 3 is better than the typical existing linear motor of Fig. 1-2 following aspect several.The first, stator 17R ' and 17L ' discrete shown in Fig. 2 are absolute construction, and small interval is arranged each other.Discrete stator requires bigger space.The second, discrete stator illustrated in figures 1 and 2 has two discrete flux loop.When the thickness of each common stator wall reduces, opposed magnet will be attracted each other, and will change the shape of stator, influence performance.In contrast, structure shown in Figure 3 is experienced the reaction magnetic force of four group of magnets, can not change the shape of stator.The 3rd, magnetic line of force loop paths contraction in length.Owing to shortened magnetic line of force path, magnetic field intensity improves, and power of electric motor increases.In addition, owing to improved magnetic field intensity, group of magnets 52L, 52L ', 52R and 52R ' can make thinlyyer.

Fig. 4 shows the integral type yoke shown in Figure 3 and the perspective view of magnet assemblies.In this example, yoke 44 and magnet 52 constitute an integral body.Two yokes of this integral type and magnet assemblies comprise

yoke

44R, 48 and 44L.The permanent magnet group 524 that is made of magnet strip is installed on the surface of yoke 44L, and the arctic/South Pole, end of magnet strip is interconnected.The permanent magnet group 523 that is made of magnet strip is installed on the surface with group of magnets 524 opposed yokes 48, and the arctic/South Pole, end of magnet strip is interconnected.In addition, the permanent magnet group 522 that is made of magnet strip is installed on another surface of yoke 48, and the arctic/South Pole, end is interconnected.The permanent magnet group 521 that is made of magnet strip is installed on the surface with group of magnets 522 opposed yoke 44L, and the arctic/South Pole, end is interconnected.

Yoke can be had the material of high magnetic permeability by permalloy or supermalloy etc.Permanent magnet group 521-524 can comprise the permanent magnetic strip of any amount, and interconnected permanent magnetic strip has staggered polarity.In one embodiment, the width of the every bar magnet in the permanent magnetism iron bar equates basically.Any permanent magnetic material such as available neodymium iron boron (NdFeB) is made the permanent magnetism iron bar.Can adopt any way, comprise silica gel or epoxy resin, the permanent magnetism iron bar is fixed on

yoke

44R, 44L and 48.Other mechanism that the permanent magnetism iron bar is fixed on

yoke

44R, 44L and 48 comprise machinery chucking and magnetic attachment.The thickness of group of magnets is even, and its surface equates with the distance on the coil block surface of armature assembly (not shown).Design group of magnets to such an extent that produce a magnetic flux distribution that is generally rectangle, with the magnetic field mutual effect that produces with coil block along kinematic axis.

Consult Fig. 3 back, be elongated coil 58R and 58L basically and be positioned at vestibule.The winding direction of coil 58R and 58L is perpendicular to the magnetic line of force in the magnetic field of permanent magnet generation.When the coil groups energising, just produce Lorentz force, promote movable body 34 motions.The more detailed content that the specific embodiment of yoke and coil is arranged in following file, that is, Application No. is 09/968,468, the applying date is September 29 calendar year 2001,, " linear motor " of inventor Yong-yil Kim; Chinese patent application number is 0113030.X, and the applying date is November 28 calendar year 2001, and name is called " linear motor "; With German patent application number be 101 58 562.4, the applying date is November 29 calendar year 2001, name is called " linear motor ".It is only for reference to quote its content at this.Also can adopt other common coil and yokes.

Fig. 4 shows and to pass

yoke

44L, 48 and the typical magnetic line of

force

497 and 499 of two magnetic alternating compenents of 44R.When the magnetic line of

force

497 and 499 mutually near the time, magnetic flux flow equates.The magnetic line of

force

497 and 499 passes

yoke

44L, 48 and 44R, enters and

leaves yoke

44L, 48 and 44R, and pass all group of magnets 521-524.For each stationary part, pass the single magnetic line of force of all group of magnets 521-524, shortened magnetic line of force path.Because cancelled two thick yoke covers of sub-common electric thermomechanical components, magnetic line of force path can further be shortened.Common linear motor is opposite, because two discrete engine casing (Eng Cas)s are stacked, and owing to have many group magnetic lines of force, magnetic line of force path is longer.In addition, the flux loop path shortens.For example, in magnetic line of force path 497,

broad way footpath

496a and 496b have been cancelled (dotting among the figure), and just shorten in the path 497 after synthesizing.Because magnetic line of force path contraction, magnetic field intensity improves, and power of electric motor increases.In addition, because magnetic field intensity improves, group of magnets 521-524 can make thinlyyer.Therefore, magnetic line of force path contraction, magnetic flux density improves, and power of electric motor is bigger.

The combination of yoke and coil provides high magnetic flux density, for linear motor produces bigger power.In addition, typical linear motor 30 configurations have only two stators, and have two side yoke assembly 33R and 33L, and yoke-magnet assemblies in the middle of.Can be stacked any (N) stator, and, improve power of electric motor by increasing one or more central yokes-magnet iron component.In the stacked configuration of a this N stator, because magnetic line of force path shape shortens, the thickness of magnet just can reduce.

Fig. 5 shows a kind of embodiment of linear motor, wherein is provided with perforate on the first upper bracket arm 40a, also just need not corresponding bolt (the bolt 46L among Fig. 3).In the embodiment show in figure 5, adopt wedge shape section yoke 44a.The width of the 45a of first of this yoke is less than the width of second portion 45b.Side 45c and 45d tilt to second portion 45b from the 45a of first.In one embodiment, the cross section of yoke 44a is irregular quadrilateral.Also can adopt the yoke section shape opposite with this embodiment, promptly the width of the 45a of first is greater than the width of second portion 45b.Adopt suitable epoxy resin or silica gel that magnet 52a is fixed on the 45a of first of yoke, make it in the face of coil.Yoke 44a and corresponding groove 41a wedge bond are on upper bracket arm 40a.In assembling process, magnet and yoke 441 are installed together, and the assembly that forms is inserted in the groove.

Fig. 6 illustrates the embodiment of another kind of linear motor, and it need not bolt 46L shown in Figure 3.In this embodiment, the friction that occurs when reducing that as much as possible magnet and yoke 44b sub-assembly inserted upper bracket arm 40b, upper bracket arm 40b has an opening slot 41b.In assembling process, magnet and yoke sub-assembly are inserted in the opening slot 41b, and place a plate 43b at the perforate end of opening slot 41b.Adopt bolt or screw 430, plate 43b and supporting-seat-arm 40b are fixed.Also screw can be placed a little 431, vertically plate 43b and yoke 44b be fixed.Screw can be placed a little 432, flatly plate 43b and yoke 44b be fixed.

In another embodiment of linear motor, linear motor has the two stator modules of an integral type, and it comprises a left yoke and a right yoke, but does not have middle yoke.

A magnet is installed in a side of left yoke, and a magnet is installed in the opposite side of right yoke, and a middle magnet is arranged between two blocks of magnet.First supporting-seat-arm that extends out from pedestal one side has a perforate, to admit bolt.Equally, second support arm that extends out from the pedestal opposite side has a perforate, to admit bolt.Two side yokes, corresponding side magnet and middle magnet bases constitute stator together.Bolt 46L and 45R block the left yoke 44L and the right yoke 44R of the two stator modules of integral type respectively.The intermediate magnetic ferropexy is on pedestal.Therefore, the foregoing description and difference embodiment illustrated in fig. 3 are there is not middle yoke, thereby volume, the institute that can further reduce motor take up space and weight.

For meeting the requirement of patent statute, this paper has done to describe in detail to the present invention, and adopts this new principle, makes on request and use such particular component that required information is provided for those skilled in the art.Yet, can think, adopt different equipment and parts also can implement the present invention, and, can carry out various changes to the details and the method for operation of parts, and can not exceed scope of the present invention.

Claims

1. linear electrical thermomechanical components, it comprises:

Opposed first and second group of magnets,

One first elongated yoke is used to admit first group of magnets,

One second elongated yoke is used to admit second group of magnets,

Group of magnets in the middle of one, between the first and second elongated yokes,

An elongated middle yoke places between the first and second elongated yokes, and group of magnets in the middle of being used to admit,

A base plate is connected with the intermediate elongated yoke with first, second, and

Wherein, first, second places to such an extent that can admit first and second coils slidably in the both sides of middle group of magnets with middle group of magnets.

2. linear electrical thermomechanical components according to claim 1, group of magnets is positioned on the first surface of elongated middle yoke in the middle of it is characterized in that, and this first surface is towards first group of magnets.

3. linear electrical thermomechanical components according to claim 2 further comprises the device on the yoke first surface in the middle of middle group of magnets is fixed on.

4. linear electrical thermomechanical components according to claim 2 further comprises one second middle group of magnets, places on the second surface of elongated middle yoke, and this second surface is towards second group of magnets.

5. linear electrical thermomechanical components according to claim 4 further comprises the device on the yoke second surface in the middle of middle group of magnets is fixed on.

6. linear electrical thermomechanical components according to claim 1 is characterized in that the magnet unit that each described first and second group of magnets comprises is in line, and is in the magnetic polarity orientation of alternation.

7. linear electrical thermomechanical components according to claim 1 further comprises a movable body that is connected with first and second coils.

8. linear electrical thermomechanical components according to claim 1 further comprises one or more auxiliary middle yokes, and yoke all can be fixed with group of magnets in the middle of each was auxiliary.

9. linear electrical thermomechanical components according to claim 1 is characterized in that described first, second comprises eight blocks of magnet at least with middle group of magnets, and wherein eight blocks of magnet in the single loop are crossed in magnetic line of force path.

10. linear electrical thermomechanical components, it comprises:

Opposed first and second group of magnets,

One first elongated yoke is used to admit first group of magnets,

One second elongated yoke,

A base plate is connected with the first and second elongated yokes, and

Wherein, first, second places to such an extent that can admit first and second coils with sliding type in the both sides of middle group of magnets with middle group of magnets.

11. linear electrical thermomechanical components according to claim 10 further comprises one first supporting-seat-arm, is connected with base plate, this supporting-seat-arm has a groove, lays the first elongated yoke.

12. linear electrical thermomechanical components according to claim 11 further comprises one second supporting-seat-arm, is connected with base plate, this supporting-seat-arm has a groove, lays the second elongated yoke.

13. linear electrical thermomechanical components according to claim 11 is characterized in that the groove of described first supporting-seat-arm and the irregular quadrilateral that the first elongated yoke is interlocking.

14. linear electrical thermomechanical components according to claim 11 is characterized in that an end of the groove of described first supporting-seat-arm has perforate.

15. linear electrical thermomechanical components according to claim 14 further comprises a plate, covers the opening slot be located on first supporting-seat-arm and first yoke is fixed to first supporting-seat-arm.

16. linear electrical thermomechanical components according to claim 15 further comprises the device that plate is fixed to described opening slot.

17. linear electrical thermomechanical components according to claim 16 is characterized in that fixture in the horizontal direction or the vertical direction fixed head.

18. a linear motor, it comprises:

First and second coil blocks, each coil block constitutes by a plurality of coils,

Opposed first and second group of magnets,

One first elongated yoke is used to admit first group of magnets,

One second elongated yoke is used to admit second group of magnets,

Wherein, second and middle group of magnets place to such an extent that can admit first and second coils slidably in the both sides of intermediate magnetic group.