CN1303443C - Array waveguide raster type comb filter - Google Patents
Array waveguide raster type comb filter Download PDFInfo
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- CN1303443C CN1303443C CNB031594778A CN03159477A CN1303443C CN 1303443 C CN1303443 C CN 1303443C CN B031594778 A CNB031594778 A CN B031594778A CN 03159477 A CN03159477 A CN 03159477A CN 1303443 C CN1303443 C CN 1303443C
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Abstract
The present invention relates to an array waveguide grating type comb filter which has the function of alternately dividing a column of optical wave signals with equidistant frequency into an odd sequence and an even sequence to output from two channels. The optical transmission is formed by a surface optical waveguide which comprises a base, a lower covering layer, a core layer and an upper covering layer, wherein the lower covering layer is mainly made of silicon dioxide material, and the material of the lower covering layer is arranged on the surface of the base. The core layer is mainly made of germanium-doped silicon dioxide material or silicon material, and is arranged on the lower covering layer of the silicon dioxide. A stripe-shaped rectangular waveguide or a ridge waveguide for optical transmission is etched on the core layer, and the surface of the etched core layer is covered with the silicon dioxide material as the upper covering layer. The functions of the upper covering layer and the lower covering layer are to bind optical waves, and the function of the core layer is to transmit the optical waves.
Description
Technical field
The invention belongs to technical field of semiconductors, be meant a kind of arrayed waveguide grating type comb filter especially.
Background technology
Along with the internet being surging forward of the whole world, the information conveying capacity of the communications field is just in accelerated growth.Increase purpose for reaching this, three kinds of multiplexing methods are arranged usually, i.e. space division multiplexing, time division multiplex and wavelength-division multiplex.Space division multiplexing is to increase the number of channel by laying new optical fiber, and its cost is the highest; Time division multiplex is to increase the number of channel by the division to the time, and the potentiality that can dig are then very limited; And wavelength-division multiplex is to increase the number of channel by the principle that different wave length can transmit in same optical fiber, and the transmission of signal is increased exponentially.For this reason, under limited optical fiber cable bar number, most of communication systems have all been used the technology of time division multiplex and wavelength-division multiplex.At present, regulation according to International Telecommunications Union (ITU), the channel spacing of channel is all at 100GHz or 200GHz, if want original system is carried out the low price dilatation, the first-selected optical interleaver (Interleaver) of people is because it can be undertaken by the method that channel spacing reduces by half on the basis that does not change existing equipment and system, that is: be the original system of 200GHz to channel spacing, use the Interleaver of 100GHz; To channel spacing is the original system of 100GHz, uses the Interleaver of 50GHz, or the like.The function of this wave filter is that the equally spaced lightwave signal of row alternately is divided into odd and even number channel two column signals by enlarging channel spacing, i.e. demultiplexing; Or two column signals are multiplexed with row by dwindling channel spacing.Because Interleaver can carry out dilatation on the basis of not changing existing equipment, saved spending.Therefore, Interleaver has crucial effect to the upgrading of existing optical communication wavelength-division multiplex system, is containing huge market simultaneously.The optics Interleaver that has in the market is: grating type optical fiber [1,2], birefringece crystal type [3,4], Mach-Zehnder (Mach Zahdner) interfere type [5,6], resonant cavity type [7] etc. give brief introduction to all kinds below.
The grating type optical fiber comb filter is will have the template content of specific cycle by ultraviolet light to be carved into optical fiber, causes refractive index to produce periodic disturbance along axle, has formed fiber grating, thereby transmission and reflected light are adjusted, and reaches the effect of comb filtering.
Birefringece crystal type comb filter is to utilize the birefringence effect of aeolotropic crystal, to spatially being distinguished by thereafter ordinary light (o) and extraordinary ray (e), through specific distance but different light path (being caused by different refractivity n (o) and n (e)) is compound more afterwards, reach the purpose of the different wave length signal being carried out comb filtering by the interference between o light and the e light.
Mach-Zehnder (Mach Zahdner) interfere type comb filter has the multiple form of expression, but they all are to form by the arm of two 3dB couplings and two different lengths.When light signal during by first 3dB coupling, be divided into two equal bundles, form phase differential behind the different length arm of respectively hanging oneself, in second 3dB coupling, interfere mutually again, thereby reach the purpose of comb filtering.
Resonant cavity type comb filter is to utilize dried the penetrating of multiple beam of resonant cavity to carry out the frequency selection, and its selected wavelength satisfies 2d * sin θ=m λ condition (wherein d is that resonant cavity spacing, θ are that incident angle in the chamber, m are positive integer).For example Michelson (Michelson) is interfered, Fabry Perot (Fabry-Perot) is interfered etc.
Though more than these methods each has something to recommend him, one of not enough is can't be integrated with silica-based microelectronics, two of deficiency be to future 1 * N comb filtering have only by a plurality of cascades and could form, certainly will cause too much insertion loss like this.At this problem, related comb filter is based on the preparation of array waveguide grating (AWG) principle in the present patent application, it is a kind of planar light waveguide loop device, therefore can be integrated with silica-based microelectronics, and also can be integrated with other planar light waveguide loop device.Moreover, AWG itself is exactly the wavelength division multiplex device of N * N, utilize its periodically (one of four characteristics), it is designed to 1 * N (N=2,3 ...) Interleaver, form the advantage that a filtering puts in place, as: crosstalk for a short time and uniform various advantages such as output signal strength, and further develop the AWG cascade that can form cyclophysis.
Summary of the invention
One of purpose of the present invention provides a kind of arrayed waveguide grating type comb filter, and it can be by changing shape and the parameter of AWG, satisfies (this path length difference 〉=0.8mm) of big path length difference and the undersized requirement of device between the adjacent array waveguide.For this reason, increase Waveguide array bending curvature (promptly reducing bending radius r), make bending radius r≤10mm; Two Rowland circle planar waveguides are merged into one, constitute the Waveguide array of closed-loop path formula; The planar waveguide periphery is made of four different circular arcs, and the both sides circular arc ab and the gh that connect the input and output waveguide are the Rowland circle circular arc, and its radius-of-curvature is half of this planar waveguide diameter; The both sides circular arc cd and the ef that connect Waveguide array are concave grating, and its radius-of-curvature is the diameter of this planar waveguide; The angle of two central axis is between 10 to 170 degree.
Two of purpose of the present invention is to slow down big angular dispersion in the planar waveguide by adjusting the Rowland circle size.Because the angular dispersion of the angular dispersion (Δ θ/Δ λ) in this device in the common AWG (≤0.5 degree/nm), for this reason, widen slab waveguide with the spacing of planar waveguide junction, make them between 6～30 μ m; Increase the Rowland circle diameter, make it between 1～4mm; Can make angular dispersion drop to 1.0 degree/nm like this from 5.0 degree/nm.For the sequence signal of Δ λ=0.4nm, on the Rowland circle adjacent waveguide to the subtended angle Δ θ of grating circle center point between 0.4～2.0 degree, Δ θ/Δ λ 〉=1.0 degree/nm).
Three of purpose of the present invention is to emphasize the odd even characteristic of input and output and Waveguide array.According to the requirement of two outputs of one of Interleaver input, input waveguide is decided to be odd number bars such as 1,3,5,7, output waveguide is even number bars such as 2,4,6,8, Waveguide array is the odd number bar between 7～25.
Technical scheme of the present invention is:
A kind of arrayed waveguide grating type comb filter, its function are with the equally spaced lightwave signal of a row frequency, alternately are divided into odd number preface and even number preface two row, alternately are divided into odd number preface and even number preface two row, and from two channel outputs; It is characterized in that, comprising:
Two overlapping and Rowland circle planar waveguides that intersect;
Waveguide array, the infall of this Waveguide array is described two overlapping and Rowland circle planar waveguides that intersect, the input end of this Waveguide array and the concave grating output terminal Rowland circle planar waveguide that intersect overlapping with two is connected, and the output terminal of this Waveguide array and concave grating input end Rowland circle planar waveguide of crossing overlapping with two is connected;
Input waveguide, the input end of this input waveguide are the input port of entire device, and the output terminal of this input waveguide and the Rowland circle input end Rowland circle planar waveguide that intersect overlapping with two links to each other;
Output waveguide, the input end of this output waveguide and the Rowland circle output terminal Rowland circle planar waveguide that intersect overlapping with two links to each other, and the output terminal of this output waveguide is the output port of entire device.
Wherein this Waveguide array is the odd number bar, and overlapping with two respectively and concave grating Rowland circle planar waveguide that intersect is connected.
Wherein input waveguide is the odd number bar, and overlapping with two respectively and Rowland circle input end Rowland circle planar waveguide that intersect is connected.
Wherein output waveguide is that overlapping with two the respectively and Rowland circle output terminal Rowland circle planar waveguide that intersects of even number bar is connected.
Description of drawings
For further specifying technology contents of the present invention, below in conjunction with embodiment and accompanying drawing describes in detail as after, wherein:
Fig. 1 is the functional diagram of AWG type comb filter.
Fig. 2 is silica-based two oxygen silicon strip shape wave guide process cross-sectional views, and wherein A, B, C are three technological processs.
Fig. 3 is that the silicon-on-insulator ridge waveguide prepares cross-sectional view, and wherein A, B, C are three technological processs.
Fig. 4 A is the vertical view of AWG type comb filter, and right side " 1 " is input end, middle " 2 " be planar waveguide as the diffraction zone, last " 3 " are curved Waveguide array, left side " 4 " are output terminal;
Fig. 4 B is the part " 2 " of Fig. 4 A central box, and two planar waveguides are to overlap in same aspect.
Fig. 5 is the schematic diagram of array waveguide grating.
Fig. 6 is the numerical simulation figure after the light signal of 50GHz frequency interval passes through AWG type comb filter (Fig. 4).
Embodiment
See also Fig. 1 and Fig. 2, a kind of arrayed waveguide grating type comb filter of the present invention, its function are with the equally spaced lightwave signal of a row frequency, alternately are divided into odd number preface and even number preface two row, and from two channel outputs; Its light transmission is to be made of the surface light waveguide, comprising:
One substrate 10;
One under-clad layer 11 mainly is an earth silicon material, and this layer material preparation is on substrate 10 surfaces;
One sandwich layer 12 mainly is germanium-doped silica material or silicon materials, and this core layer prepared is on the under-clad layer of silicon dioxide;
On sandwich layer, etch the rectangular waveguide 13 or the ridge waveguide of light transmission strip, wherein being shaped as by input and output slab waveguide, two Rowland circle planar waveguides 1,4 and curved Waveguide array 3 of light transmission slab waveguide 13 is connected to form, two Rowland circle planar waveguides 1,4 overlap and intersect, constitute the Waveguide array of closed-loop path shape, as shown in Figure 4, reduce bending radius r≤10mm; Its input waveguide is that odd number, output waveguide are that even number, Waveguide array are odd number;
Cover earth silicon material again in etched core layer surface, as top covering 14;
The effect that should go up under-clad layer 11,14 is a constraint light wave and sandwich layer 12 is transmission light waves.
Seeing also Fig. 2 is that the silicon-on-insulator ridge waveguide prepares cross-sectional view, and itself and Fig. 1 are basic identical, comprising:
One substrate 20;
One under-clad layer 21 mainly is an earth silicon material, and this layer material preparation is on substrate 20 surfaces;
One sandwich layer 22, main silicon materials, these sandwich layer 22 preparations are on the under-clad layer 21 of silicon dioxide;
One top covering 14 is earth silicon material, is produced on the sandwich layer 22.
Its difference is that the rectangular waveguide 13 that etches the light transmission strip on sandwich layer 12 shown in Figure 1 is to etch into under-clad layer 11.And the rectangular waveguide 23 that etches the light transmission strip on sandwich layer 22 shown in Figure 2 is the parts that etch into sandwich layer 22, covers top covering 14 again.
1, merges the Rowland circle planar waveguide to form closed Waveguide array
Because AWG type Interleaver has path length difference (〉=0.8mm between bigger adjacent array waveguide, the path length difference of common AWG≤0.1mm), and the planar optics loop does not allow very big size, so we (reduce bending radius r by increasing the Waveguide array bending curvature, and r≤10mm), under the sufficiently long situation of this waveguide, two Rowland circle planar waveguides are intersected overlap (angle of cut is between 10～170 degree), the closed-loop path of forming array waveguide.
By said method, both can satisfy the requirement of big path length difference between the adjacent array waveguide, can reduce the device surface area again; Simultaneously, be placed on the both sides (bilateral) of chip with reducing the input and output waveguide, so that operating personnel accurately measure and encapsulate nude film independently respectively with two debuggers.
2, slow down big angular dispersion in the planar waveguide
The spacing of slab waveguide on Rowland circle and grating circle is adjusted between 6～30 μ m, and the diameter of planar waveguide is adjusted between 1～4mm, and then the angular dispersion Δ θ/Δ λ in the planar waveguide is between 1.0～5.0 degree/nm; For the sequence signal of Δ λ=0.4nm, the subtended angle Δ θ of the corresponding concave grating point of (or output) waveguide of adjacent input on the Rowland circle is between 0.4～5.0 degree.The diameter of planar waveguide is big more, the waveguide spacing is wide more, and angular dispersion and subtended angle are just more little.
3, the odd even setting of input waveguide, output waveguide and Waveguide array
Input waveguide is decided to be odd number bars such as 1,3,5,7, and output waveguide is even number bars such as 2,4,6,8, and Waveguide array is the odd number bar between 7～25.
The principle explanation
1, array waveguide grating (AWG)
The structure of AWG as shown in Figure 5, it is made up of N input waveguide, a N output waveguide, two planar waveguides (slab) and waveguide array, all is integrated on the same substrate.Wherein the end that is connected with the input and output waveguide of planar waveguide is Rowland circle circular arc (representing with pecked line), and the other end that planar waveguide is connected with Waveguide array is concave grating (representing with long dotted line).The circle at concave grating place is referred to as the grating circle.Entire device is to be the center with the Waveguide array, and two planar waveguides and input and output waveguide distribute respectively symmetrically.
The radius-of-curvature of grating circle is exactly the rowland diameter of a circle, can prove, the light that any point comes from the Rowland circle will be reflexed to circle by the grating circle approx and go up another point, be diffracted into circle simultaneously and go up other focuses.Array waveguide grating operates according to this principle.At first, light enters the input planar waveguide from input waveguide, and produces diffraction; Then, these diffracted waves are absorbed by Waveguide array by concave grating, and by the path length difference between adjacent waveguide its phase place are periodically modulated; After the light wave of these modulated mistakes enters the output planar waveguide, they will focus on different channel wavelengths on the diverse location of output Rowland circle circumference, and export through output waveguide therefrom.Thereby, realize can carrying out multiplexing to the light wave of different wave length again conversely to containing the demultiplexing process of different wave length light signal.
2, the single planar waveguide among the AWG type Interleaver
Because the path length difference (Δ L) among the AWG between the adjacent array waveguide is inversely proportional to free spectrum width (FSR), promptly FSR is more little, and path length difference Δ L is big more.For example, for FSR=200GHz, its Δ L ≈ 0.4mm; For FSR=100GHz, its Δ L ≈ 0.8mm; For FSR=50GHz, its Δ L ≈ 1.6mm.Therefore, under same signal resolution, the Interleaver of two outputs has maximum Δ L.And along with the reducing of signal resolution, Δ L then can be increasing.
The increase of path length difference between the adjacent array waveguide (Δ L) must strengthen the area of Interleaver device.For this reason, we (promptly reduce bending radius r, and r≤10mm), satisfy the double requirements of big path length difference and small size by increasing the Waveguide array bending curvature.When bending proceeds to a big angle, and under the sufficiently long situation of this Waveguide array, will intersect between input and output waveguide or the Waveguide array.The intersection of slab waveguide phase produces disturbance to the mould field of light, thereby causes the loss of energy, so plotted point is determined at the Rowland circle planar waveguide, angle of cut is between 10～170 degree, as shown in Figure 4.This selection because the transmission of the intersection of light wave can not change self amplitude and mutually, and in a planar waveguide, do not have the restriction of horizontal mould field, so can not produce any influence to input/output signal.On the other hand, two Rowland circle planar waveguides intersect coincidence, can form the input and output waveguide chip both sides (bilateral), and this helps the measurement and the encapsulation of chip.
3, the optimization of angular dispersion among the AWG type Interleaver
Angular dispersion in the planar waveguide (Δ θ/Δ λ) is directly proportional with Δ L/d (d is the spacing of waveguide on the grating circle), so after Δ L has determined, improve the d value and can slow down big angular dispersion.On the other hand, the d value can not be excessive.This is not only can increase the planar waveguide diameter with quadratic relationship because improve the d value, and improves the d value and must open hydraucone, does not have fixing mould field in the hydraucone, inserts loss (IL) so excessive hydraucone also can increase.Therefore, under specific process conditions, the spacing d of Waveguide array on the grating circle has an optimum value in the comb filter.
4, the setting of waveguide odevity among the AWG type Interleaver
Because what optics Interleaver required is an input, two outputs, input waveguide should be placed on the zero level position of input Rowland circle so, promptly imports on the axis of Rowland circle; Output waveguide should be placed on input Rowland circle ± 1 grade of position (no zero level), i.e. on the symmetria bilateralis position of next-door neighbour's output Rowland circle axis.Consider from the error of processes, need finely tune system by the conversion input waveguide; Consider from the stability of processes, need the slab waveguide both sides to increase some auxiliary waveguides, be not damaged with the protection central waveguide; So the incoming wave derivative should be increased to odd number bar (as: 3,5,7 etc.); Also this correspondingly increases to even number bar (as: 4,6,8 etc.) to output optical waveguide, and promptly remaining to have on waveguide and output Rowland circle ± 1 position on the input Rowland circle zero level position has waveguide.In addition, because Rowland circle planar waveguide diameter is less, diffracted signal focuses mostly in the central authorities of grating circle, is corresponding zero level input waveguide, so the Waveguide array number is defined as odd number.
Fig. 6 shows is the light signal of the 50GHz frequency interval numerical simulation figure after through AWG type comb filter (Fig. 4), from the zero level input end input of input planar waveguide, from the output planar waveguide ± 1 grade of output terminal output.
Claims (4)
1, a kind of arrayed waveguide grating type comb filter, its function are with the equally spaced lightwave signal of a row frequency, alternately are divided into odd number preface and even number preface two row, alternately are divided into odd number preface and even number preface two row, and from two channel outputs; It is characterized in that, comprising:
Two overlapping and Rowland circle planar waveguides that intersect;
Waveguide array, the infall of this Waveguide array is described two overlapping and Rowland circle planar waveguides that intersect, the input end of this Waveguide array and the concave grating output terminal Rowland circle planar waveguide that intersect overlapping with two is connected, and the output terminal of this Waveguide array and concave grating input end Rowland circle planar waveguide of crossing overlapping with two is connected;
Input waveguide, the input end of this input waveguide are the input port of entire device, and the output terminal of this input waveguide and the Rowland circle input end Rowland circle planar waveguide that intersect overlapping with two links to each other;
Output waveguide, the input end of this output waveguide and the Rowland circle output terminal Rowland circle planar waveguide that intersect overlapping with two links to each other, and the output terminal of this output waveguide is the output port of entire device.
2, arrayed waveguide grating type comb filter according to claim 1 is characterized in that, wherein this Waveguide array is the odd number bar, and overlapping with two respectively and concave grating Rowland circle planar waveguide that intersect is connected.
3, arrayed waveguide grating type comb filter according to claim 1 is characterized in that, wherein input waveguide is the odd number bar, and overlapping with two respectively and Rowland circle input end Rowland circle planar waveguide that intersect is connected.
4, arrayed waveguide grating type comb filter according to claim 1 is characterized in that, wherein output waveguide is that overlapping with two the respectively and Rowland circle output terminal Rowland circle planar waveguide that intersects of even number bar is connected.
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| CNB031594778A CN1303443C (en) | 2003-09-25 | 2003-09-25 | Array waveguide raster type comb filter |
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| CNB031594778A CN1303443C (en) | 2003-09-25 | 2003-09-25 | Array waveguide raster type comb filter |
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| CN1303443C true CN1303443C (en) | 2007-03-07 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN100359349C (en) * | 2005-07-18 | 2008-01-02 | 吉林大学 | Method of realizing dispersion control using atomic coberent |
| CN100406934C (en) * | 2005-08-04 | 2008-07-30 | 浙江大学 | Deep-etched SiO2 ridge waveguide and its preparing process |
| CN102662218B (en) * | 2012-05-31 | 2013-10-30 | 东南大学 | Wrinkle type apodization waveguide Bragg grating filter and manufacturing method thereof |
| CN110989079B (en) * | 2019-12-23 | 2021-01-01 | 湖北工业大学 | Air cladding SU8 array waveguide grating |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1111416A1 (en) * | 1999-12-23 | 2001-06-27 | Nortel Networks Limited | Optical comb filter |
| US6374013B1 (en) * | 1999-12-23 | 2002-04-16 | Nortel Networks Limited | Optical arrayed waveguide grating devices |
| CN1411197A (en) * | 2002-11-15 | 2003-04-16 | 中国科学院上海微系统与信息技术研究所 | Plane oprical waveguide segmented Bragg optical grating interleaving apparatus/de-interleaving apparatus |
| US20030147588A1 (en) * | 2002-02-04 | 2003-08-07 | Lightwaves 2020, Inc. | Step-chirped, sampled optical waveguide gratings for WDM channel operations and method of manufacture therefor |
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2003
- 2003-09-25 CN CNB031594778A patent/CN1303443C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1111416A1 (en) * | 1999-12-23 | 2001-06-27 | Nortel Networks Limited | Optical comb filter |
| US6374013B1 (en) * | 1999-12-23 | 2002-04-16 | Nortel Networks Limited | Optical arrayed waveguide grating devices |
| US20030147588A1 (en) * | 2002-02-04 | 2003-08-07 | Lightwaves 2020, Inc. | Step-chirped, sampled optical waveguide gratings for WDM channel operations and method of manufacture therefor |
| CN1411197A (en) * | 2002-11-15 | 2003-04-16 | 中国科学院上海微系统与信息技术研究所 | Plane oprical waveguide segmented Bragg optical grating interleaving apparatus/de-interleaving apparatus |
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