CN1298670C - Sodium bismuth phthalate-barium zirconium phthalate leadless piezoelectric ceramic and its preparation method - Google Patents
Sodium bismuth phthalate-barium zirconium phthalate leadless piezoelectric ceramic and its preparation method Download PDFInfo
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- 239000000919 ceramic Substances 0.000 title claims abstract description 56
- 238000002360 preparation method Methods 0.000 title claims abstract description 9
- PATCGGIXNSOMLL-UHFFFAOYSA-J bismuth sodium barium(2+) phthalate zirconium(4+) Chemical compound C(C=1C(C(=O)[O-])=CC=CC1)(=O)[O-].[Zr+4].[Ba+2].C(C=1C(C(=O)[O-])=CC=CC1)(=O)[O-].[Bi+3].[Na+] PATCGGIXNSOMLL-UHFFFAOYSA-J 0.000 title claims description 10
- 239000011734 sodium Substances 0.000 claims abstract description 20
- 230000010287 polarization Effects 0.000 claims abstract description 19
- 238000005245 sintering Methods 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims abstract description 15
- FSAJRXGMUISOIW-UHFFFAOYSA-N bismuth sodium Chemical compound [Na].[Bi] FSAJRXGMUISOIW-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910002113 barium titanate Inorganic materials 0.000 claims abstract description 4
- 239000000843 powder Substances 0.000 claims description 19
- 239000000126 substance Substances 0.000 claims description 14
- 239000002994 raw material Substances 0.000 claims description 13
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 9
- 229910052709 silver Inorganic materials 0.000 claims description 9
- 239000004332 silver Substances 0.000 claims description 9
- 235000003283 Pachira macrocarpa Nutrition 0.000 claims description 6
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 6
- 235000014364 Trapa natans Nutrition 0.000 claims description 6
- 235000009165 saligot Nutrition 0.000 claims description 6
- 239000006104 solid solution Substances 0.000 claims description 6
- 238000001238 wet grinding Methods 0.000 claims description 5
- 230000005684 electric field Effects 0.000 claims description 4
- 238000000227 grinding Methods 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims description 4
- 244000137852 Petrea volubilis Species 0.000 claims description 3
- YIMPFANPVKETMG-UHFFFAOYSA-N barium zirconium Chemical compound [Zr].[Ba] YIMPFANPVKETMG-UHFFFAOYSA-N 0.000 claims description 3
- 229920002545 silicone oil Polymers 0.000 claims description 3
- 239000002002 slurry Substances 0.000 claims description 3
- 230000018199 S phase Effects 0.000 claims description 2
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 claims description 2
- 238000000465 moulding Methods 0.000 claims description 2
- 238000007873 sieving Methods 0.000 claims description 2
- 240000001085 Trapa natans Species 0.000 claims 1
- 239000013078 crystal Substances 0.000 abstract description 2
- 229910052726 zirconium Inorganic materials 0.000 abstract description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 2
- 230000002349 favourable effect Effects 0.000 abstract 2
- 229910002115 bismuth titanate Inorganic materials 0.000 abstract 1
- 230000007613 environmental effect Effects 0.000 abstract 1
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- 241001083492 Trapa Species 0.000 description 5
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- 238000005498 polishing Methods 0.000 description 3
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- 230000005621 ferroelectricity Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
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- 229910002056 binary alloy Inorganic materials 0.000 description 1
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- 238000010168 coupling process Methods 0.000 description 1
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- 229960000935 dehydrated alcohol Drugs 0.000 description 1
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Abstract
The present invention discloses sodium bismuth titanate-barium zirconium titanate leadless piezoelectric ceramics and a preparing method thereof, which belongs to the technical field of the preparation of functional ceramics. The sodium bismuth titanate-barium zirconium titanate leadless piezoelectric ceramics are favorable to environmental protection. The provided sodium bismuth titanate leadless piezoelectric ceramics have the compositions of (Bi<0.5>Na<0.5>)TiO3-xBa(Ti<1-y>Zr<y>)O3, wherein x is the molar content of BZT in the ceramic system, y is the atomic number of Ti atoms replaced by Zr atoms in BaTiO3, x is from 0 to 0.12, and y is from 0 to 0.10. The BNT-BZT leadless piezoelectric ceramics prepared by a two-step sintering method have high density and uniform crystal particles, and simultaneously, leakage current in a polarization process is lowered; the polarization of the ceramics is easy. The piezoelectric ceramics do not contain lead, and have favorable piezoelectric properties and ferroelectric properties.
Description
Technical field
The invention belongs to the function ceramics preparing technical field, particularly help a kind of sodium bismuth phthalate-barium zirconium phthalate leadless piezoelectric ceramic of environment protection and preparation method thereof.
Background technology
Piezoelectric ceramics is the important informational function stupalith of a class, but the extensive now piezoelectric ceramics that uses mainly is the lead base piezoelectric ceramics.The lead base piezoelectric produce, use and discarded last handling process in bring serious harm all can for the mankind and ecotope.It is inevitable to use leadless piezoelectric ceramics to replace the lead base piezoelectric ceramics to become.
Bismuth-sodium titanate (Bi
0.5Na
0.5) TiO
3(BNT) (A ', A ") BO that to be nineteen sixty found by people such as Smolensky
3Type composite perofskite ferroelectrics belongs to trigonal system during room temperature, Curie temperature is 320 ℃.BNT has strong (the room temperature remnant polarization P of ferroelectricity
r=38 μ C/cm
2), piezo-electric modulus is big, and specific inductivity is little, and acoustical behavior waits good characteristic well, and sintering temperature is low, is considered to one of the most attractive lead-free piezoceramic material system.Yet, the coercive field height (E of BNT
c=73kV/cm),, thereby be difficult to polarization at the specific conductivity height of ferroelectric phase region.Na in addition
2The easy moisture absorption of O, the sintering range of pottery is narrow, causes the stable chemical performance of system relatively poor.
At present the research and development of bismuth-sodium titanate base lead-free piezoelectric ceramic are mainly concentrated on the substituting modification to A, B position.The polynary system performance of piezoelectric ceramics has bigger variation with the variation of component, especially near accurate homotype phase boundary (MPB), dielectric, the ferroelectric and piezoelectric properties of pottery all have the raising of mutagenicity, are to improve the key of low tension performance so seek the accurate homotype phase boundary of polynary ceramic systems.The dielectric that obtains at present, the ferroelectric and all bismuth sodium titanate based preferably binary pottery of piezoelectric properties mainly contain following several: (1-a) (Bi
0.5Na
0.5) TiO
3-aBaTiO
3The abbreviation of [abbreviation: BNBT-100a] system, at room temperature MPB is present in a=0.06-0.07, all has bigger remnant polarization P in the very wide compositing range near MPB
r=20C/cm
2, Curie temperature T
c=288 ℃.(1-b) (Bi
0.5Na
0.5) TiO
3-bNaNbO
3[abbreviation: BNTN-100b] system, its accurate homotype phase boundary MPB is present in b=0.03, the piezoelectric stress constant d of BNTN
33=71pC/N.(1-c) (Bi
0.5Na
0.5) TiO
3-c1/2 (Bi
2O
3Sc
2O
3) [abbreviation: BNST-100c] system, BNSN-2 has maximum electromechanical coupling constant k
33=0.42 and maximum piezoelectric stress constant d
33=92pC/N, relative permittivity is with 1/2 (Bi
2O
3Sc
2O
3) content increase and increase Curie temperature T
c=358 ℃.(1-d) (Bi
0.5Na
0.5) TiO
3-d (Bi
0.5K
0.5) TiO
3[BNKT-100d] system, accurate homotype phase boundary MPB is present in d=0.16-0.20, maximum piezoelectric stress constant d
33=151pC/N, Curie temperature T
c=317 ℃.About BNT is that the report of piezoelectric property has T.Takenaka and K.Maruyama:Jpn.J.Appl.Phys. near the accurate homotype phase boundary of multielement piezoelectric pottery, 30 (1991) 2236, Y.Hosono and K.Harada, Jpn.J.Appl.Phys., 40 (2001) 5722, H.Nagata and T.Takenake:J.Appl.Phys., 36 (1997) 2115, H.Nagata and T.Takenake:J.Appl.Phys., 36 (1997) 6055, A.Sasaki and T.Chiba:J.Appl.Phys., 38 (1999) 5564, H.Nagataand M.Toshiba:J.Appl.Phys., 42 (2003) 7401, H.Ishii and H.Nagata:J.Appl.Phys., 40 (2001) 5660; D.-M.Lin, D.-Q.Xiao, J.-G.Zhu, P.-Y.Yu, H.-J.Yan, L.-Z.Li and W.Zhang:Cryst.Res., 39 (2004) 30 etc.Recently, at J.Appl.Phys., in 92 (2002) 1489 reports, Z.Yu, C.Ang, R.Guo, people such as A.S.Bhalla prepare Ba (Ti, Zr) O
3Pottery is found Ba (Ti
0.95Zr
0.05) O
3The pottery of component has maximum piezoelectric constant d
33=236pC/N, remnant polarization P
r=13-18 μ C/cm
2, coercive field E
c<35kV/cm.But preparation and the performance about BNT-BZT binary system leadless piezoelectric ceramics yet there are no report at present.
Summary of the invention
The object of the present invention is to provide a kind of sodium bismuth phthalate-barium zirconium phthalate leadless piezoelectric ceramic and preparation method thereof, it is characterized in that: described sodium bismuth phthalate-barium zirconium phthalate leadless piezoelectric ceramic is by the zirconium barium titanate Ba (Ti with tetragonal phase structure
1-yZr
y) O
3Solid solution is in the bismuth-sodium titanate (Bi with water chestnut side's phase structure
0.5Na
0.5) TiO
3In, form (Bi with accurate homotype phase boundary
0.5Na
0.5) TiO
3-xBa (Ti
1-yZr
y) O
3, wherein x is the molar weight of BZT in the ceramic systems, and x is 0.03,0.06,0.09,0.12, and y is BaTiO
3In the Ti atom by Zr metathetical molar weight, y=0.058.
The preparation of described sodium bismuth phthalate-barium zirconium phthalate leadless piezoelectric ceramic is to adopt two-step sintering method; Concrete technical process is:
1) with Bi
2O
3, Na
2CO
3, TiO
2Be raw material, according to chemical formula (Bi
0.5Na
0.5) TiO
3Prepare burden, pre-burning in 600-1000 ℃ of air, obtaining chemical formula after grinding is sieved is (Bi
0.5Na
0.5) TiO
3Abbreviation BNT solid-solution powder;
2) with BaCO
3, ZrO
2, TiO
2Be raw material, according to chemical formula Ba (Ti
1-yZr
y) O
3After preparing burden, wherein, BaTiO
3In the Ti atom by Zr metathetical molar weight y=0.058.Pre-burning in 800-1200 ℃ of air, obtaining chemical formula after grinding is sieved is Ba (Ti
1-yZr
y) O
3Abbreviation BZT solid-solution powder;
3) BNT, the BZT powder with pre-burning is raw material powder, and BNT-xBZT prepares burden according to chemical formula, through wet-milling and oven dry and dry-pressing formed; Wherein x is the molar content of BZT in the ceramic systems, and x is 0.03,0.06,0.09,0.12;
4), obtain fine and close piezoelectric ceramic piece with molding blank sintering in 1100-1250 ℃ of air;
5) to be milled to 1.00 ± 0.02mm with sand paper thick for the ceramic plate of densified sintering product, and the two-sided roasting silver of silver slurry that brushes roastingly polarizes after going up silver electrode, polarization process carries out in the silicone oil medium, the polarization temperature is 60-120 ℃, and polarized electric field is 3-5kV/mm, and the polarization time is 10-60min.
The invention has the beneficial effects as follows: compared with prior art, the invention has the advantages that: (1) obtains a kind of BNT-BZT series lead-free piezoelectric ceramic with better piezoelectric property, and finds optimal components point to form; (2) two-step sintering method can obtain the high-compactness stupalith; (3) reduce the leakage current in the polarization process, be easy to polarization.
Description of drawings
Fig. 1 is the XRD spectral line of the BNT powder that insulation pre-burning in 3 hours obtains in 850 ℃ of air.
Fig. 2. be the XRD spectral line of the BZT powder that insulation pre-burning in 3 hours obtains in 1200 ℃ of air.
Fig. 3 is the XRD spectral line of the BNT-BZT ceramic plate that insulation pre-burning in 3 hours obtains in 1180 ℃ of air.
Fig. 4 is scanning electron microscope (SEM) photo on the BNT-BZT9 ceramic plate surface after thermal etching.
Fig. 5 is the ferroelectric hysteresis loop of the BNT-BZT piezoelectric ceramics that measures under the room temperature 100Hz.
Fig. 6 is piezoelectric constant d
33, room temperature dielectric constant ε
33 T/ ε
0(test frequency 1kHz) is with the relation curve of BZT content.
Fig. 7 is BNT-BZT6, BNT-BZT9, and the curve that the dielectric constant with temperature of BNT-BZT12 pottery changes (temperature that is situated between spectrum), test frequency is 1MHz:(a) BNT-BZT6, (b) BNT-BZT9, (c) BNT-BZT12.
Fig. 8 is BNT-BZT6, BNT-BZT9, and the temperature variant curve of dielectric loss tan δ of BNT-BZT12 pottery, test frequency is 1MHz:(a) BNT-BZT6, (b) BNT-BZT9, (c) BNT-BZT12.
Embodiment
Exemplifying following embodiment is specified the present invention.Embodiment: with Bi
2O
3, Na
2CO
3, TiO
2Be raw material, according to chemical formula (Bi
0.5Na
0.5) TiO
3Prepare burden; With BaCO
3, ZrO
2, TiO
2Be raw material, according to chemical formula Ba (Ti
0.942Zr
0.058) O
3Prepare burden.Use dehydrated alcohol to be the medium wet-milling respectively, oven dry in wet-milling 2-3 hour obtains dry powder.The BNT raw material powder is incubated pre-burning in 3 hours in 850 ℃ of air, grind the BNT raw material powder that obtains having the composite perofskite phase after sieve (200 order); The BZT raw material powder is incubated pre-burning in 3 hours in 1200 ℃ of air, grind the BZT raw material powder that the back (200 order) of sieving obtains having the uhligite phase.BNT, BZT powder with pre-burning are raw material powder, according to chemical formula (Bi
0.5Na
0.5) TiO
3-x Ba (Ti
0.942Zr
0.058) O
3Preparing burden in [BNT-BZT100x] (x=0.03,0.06,0.09,0.12), obtains dry powder through same wet-milling drying course.Dry-pressing formed, forming mould is internal diameter 10mm, and applying pressure is 2-5MPa, pressurize 1 minute, matrix band thickness 1-2mm.Matrix band is incubated 3 hours sintering in 1180 ℃ of air, obtain fine and close piezoelectric ceramic piece, measures the density of ceramic plate.It is thick that the ceramic plate of densified sintering product is milled to 1.00 ± 0.02mm with sand paper, the two-sided roasting silver of silver slurry that brushes.The roasting silver electrode that goes up polarizes afterwards.Polarization process carries out in the silicone oil medium, and the polarization temperature is 60 ℃, and polarized electric field is 4kV/mm, and the polarization time is 30min.
Determine the ceramic powder sample after the pre-burning and the crystalline structure of the ceramic plate sample behind the sintering with x-ray diffraction analysis (XRD).The microscopic appearance of stupalith uses scanning electronic microscope (SEM) analysis behind the sintering, the SEM sample need pass through thermal etching, after the thermal etching process is the polishing of ceramic plate process, use the diamond polishing agent polishing of granularity, then in 1080 ℃ of insulations thermal etching in 30 minutes as 1m.The ceramics sample of thermal etching can be seen ceramic crystalline grain of uniform size down in scanning electronic microscope (SEM).The silver-plated polarization of ceramics sample and place for some time after, measure ferroelectric, the piezoelectricity and the dielectric properties of ceramics sample.The ferroelectric hysteresis loop of measure sample is the P-E curve under room temperature 100Hz frequency, with the ferroelectric properties of research stupalith.Use type quasistatic d
33Survey meter is at room temperature measured the piezoelectric constant d of ceramic plate
33DIELECTRIC CONSTANT
33 T/ ε
0Measuring condition be room temperature 1kHz.Piezoelectric has Curie temperature T
c, more than Curie temperature, be paraelectric phase, when being lower than Curie temperature, temperature just has ferroelectricity.Near Curie point, the dielectric properties generation obvious variation of material comprises DIELECTRIC CONSTANT
sWith dielectric loss tan δ, so the DIELECTRIC CONSTANT of measure sample
sWith dielectric loss tan δ with the variation of temperature curve, can obtain the Curie temperature T of stupalith
c
1.XRD experiment and density measurement interpretation of result: on Fig. 1 and Fig. 2 as can be seen, insulation pre-burning in 3 hours can access the bismuth-sodium titanate BNT with water chestnut side's symmetrical property perovskite structure in 850 ℃ of air, is incubated the zirconium barium titanate BZT that pre-burning in 3 hours can obtain to have cubic symmetrical property perovskite structure simultaneously in 1200 ℃ of air.Water chestnut side is that with the difference of cubic perovskite structure mutually (200) peak of water chestnut side phase perovskite structure XRD is unimodal mutually, and (200) peak of cubic phase perovskite structure XRD is split into (200) and (002) two peak.Fig. 3 is the XRD spectral line of ceramic plate behind the ceramic systems BNT-BZT100x sintering, and as can be seen from the figure (200) peak of BNT-BZT0 is unimodal, and (200) peak of BNT-BZT12 significantly is split into (200) and (002) two peak.Along with the increase of BZT content, the division at (200) peak is more and more obvious, shows that the content of cubic phase is more and more.The BNT-BZT ceramic systems has the accurate homotype phase boundary of water chestnut side's phase-cubic phase, and its position is positioned near the BNT-BZT9.It can also be seen that simultaneously along with the increase of Zr content, the peak position of XRD spectral line moves towards low-angle direction, this explanation Zr enters lattice, because the Zr atomic radius is big than the Ti atom, thereby has finally influenced lattice parameter.The density measurement result is as shown in table 1, and ceramic plates all behind the sintering have 5.69-5.82g/cm
3High-compactness, be equivalent to 97% of theoretical density.
Piezoelectric constant, room temperature dielectric constant, dielectric loss, Curie temperature and the density of table 1.BNT-BZT100x pottery
d 33 (pC/N) | T c (℃) | ρ (g/cm 3) | ε 33 T/ε 0 | tanδ (%) | |
BNT-BZT3 BNT-BZT6 BNT-BZT9 BNT-BZT12 | 79 107 147 112 | N/A 235 240 250 | 5.76 5.72 5.82 5.69 | 345.6 844.6 881.4 788.7 | 1.765 2.185 2.636 2.980 |
2.SEM experimental analysis: Fig. 4 is the typical pattern (BNT-BZT9) of ceramic crystalline grain after the thermal etching, and crystal grain is tightly packed, does not have tangible gross blow hole, and the void content of sample is low, and this result with the front density measurement conforms to.The ceramic crystalline grain size distribution is in the scope of 1-5um simultaneously.
3. ferroelectric properties test and analyzing: Fig. 5 has provided BNT-BZT3, the ferroelectric hysteresis loop of 6,9,12 samples, the ferroelectric hysteresis loop of BNT-BZT3 is almost linearity, analyze reason and may be since the coercive field of BNT-BZT3 greater than the excitation electrical field of using in the experimentation.BNT-BZT9 has saturated ferroelectric hysteresis loop, remnant polarization P under the same measuring condition
rSample than other moiety is big.Find out that in conjunction with the XRD spectral line BNT-BZT9 is positioned near the zone of the cubic phase of accurate homotype phase boundary.
4. test of piezoelectric property and dielectric properties and interpretation of result: as can be seen from Figure 6 piezoelectric constant d
33With room temperature dielectric constant ε
33 T/ ε
0Variation with BZT content has identical trend.When the content of BZT is lower than 9mol%, piezoelectric constant d
33With room temperature dielectric constant ε
33 T/ ε
0Increase with BZT content increases, but along with the further rising of BZT content, piezoelectric constant d
33And DIELECTRIC CONSTANT
33 T/ ε
0Value descends.BNT-BZT9 has maximum piezoelectric constant d
33=147pC/N and room temperature dielectric constant ε
33 T/ ε
0=881.4, this analytical results with accurate homotype phase boundary in front and ferroelectric properties conforms to.
5. provided BNT-BZT6 among the test of Curie temperature and interpretation of result: Fig. 7 and Fig. 8, the DIELECTRIC CONSTANT of 9,12 samples
sWith dielectric loss tan δ with the variation of temperature curve, as can be seen from the figure, along with the increase of BZT content, Curie temperature moves towards the high-temperature zone, the Curie temperature of BNT-BZT9 is positioned at T
cNear=240 ℃.
Claims (2)
1. sodium bismuth phthalate-barium zirconium phthalate leadless piezoelectric ceramic, it is characterized in that: described sodium bismuth phthalate-barium zirconium phthalate leadless piezoelectric ceramic is by the zirconium barium titanate Ba (Ti with tetragonal phase structure
1-yZr
y) O
3Solid solution is in the bismuth-sodium titanate (Bi with water chestnut side's phase structure
0.5Na
0.5) TiO
3In, form (Bi with accurate homotype phase boundary
0.5Na
0.5) TiO
3-xBa (Ti
1-yZr
y) O
3, wherein x is the molar weight of BZT in the ceramic systems, and x is 0.03,0.06,0.09,0.12, and y is BaTiO
3In the Ti atom by Zr metathetical molar weight y=0.058.
2. preparation method of sodium bismuth phthalate-barium zirconium phthalate leadless piezoelectric ceramic according to claim 1, it is characterized in that: the preparation of described sodium bismuth phthalate-barium zirconium phthalate leadless piezoelectric ceramic is to adopt two-step sintering method; Concrete technical process is:
1) with Bi
2O
3, Na
2CO
3, TiO
2Be raw material, according to chemical formula (Bi
0.5Na
0.5) TiO
3Prepare burden, pre-burning in 600-1000 ℃ of air, obtaining chemical formula after grinding is sieved is (Bi
0.5Na
0.5) TiO
3Abbreviation BNT solid-solution powder;
2) with BaCO
3, ZrO
2, TiO
2Be raw material, according to chemical formula Ba (Ti
1-yZr
y) O
3After preparing burden, wherein, BaTiO
3In the Ti atom by Zr metathetical molar weight y=0.058, pre-burning in 800-1200 ℃ of air, grinding and obtaining chemical formula after sieving is Ba (Ti
1-yZr
y) O
3Abbreviation BZT solid-solution powder;
3) BNT, the BZT powder with pre-burning is raw material powder, and BNT-xBZT prepares burden according to chemical formula, through wet-milling and oven dry and dry-pressing formed; Wherein molar weight x is 0.03,0.06,0.09,0.12;
4), obtain fine and close piezoelectric ceramic piece with molding blank sintering in 1100-1250 ℃ of air;
5) to be milled to 1.00 ± 0.02mm with sand paper thick for the ceramic plate of densified sintering product, and the two-sided roasting silver of silver slurry that brushes roastingly polarizes after going up silver electrode, polarization process carries out in the silicone oil medium, the polarization temperature is 60-120 ℃, and polarized electric field is 3-5kV/mm, and the polarization time is 10-60min.
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CN1298672C (en) * | 2005-07-19 | 2007-02-07 | 清华大学 | Bismuth-sodium titanate-bismuth potassium titanate barium zirconate titanate lead free piezoelectric ceramics |
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CN1381425A (en) * | 2001-04-18 | 2002-11-27 | 日本特殊陶业株式会社 | Piezoelectric ceramic material |
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