CN1289903C - Instant infrared chemical image spectral device - Google Patents
Instant infrared chemical image spectral device Download PDFInfo
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- CN1289903C CN1289903C CN 02160821 CN02160821A CN1289903C CN 1289903 C CN1289903 C CN 1289903C CN 02160821 CN02160821 CN 02160821 CN 02160821 A CN02160821 A CN 02160821A CN 1289903 C CN1289903 C CN 1289903C
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- 230000003595 spectral effect Effects 0.000 title claims abstract description 26
- 230000005855 radiation Effects 0.000 claims abstract description 15
- 238000003384 imaging method Methods 0.000 claims description 7
- 239000011159 matrix material Substances 0.000 claims description 6
- 238000010521 absorption reaction Methods 0.000 claims description 4
- 238000004364 calculation method Methods 0.000 abstract description 4
- 238000012360 testing method Methods 0.000 description 6
- 238000013461 design Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000008520 organization Effects 0.000 description 2
- 239000012620 biological material Substances 0.000 description 1
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- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012113 quantitative test Methods 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
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Abstract
The present invention relates to an instant infrared chemical image spectral device, which has the technical scheme that a light source is used for generating infrared light; the infrared light is processed into narrow-frequency infrared light by light splitting through a single-light device, and the narrow-frequency infrared light is absorbed by an object to be measured; heat radiation is sent out; the heat radiation is received by a heat image surface detector and is imaged. The present invention has the advantages that the object to be measured can be instantly measured, a large amount of complicated calculation is not needed, measuring speed can be effectively raised, the whole structure is simple, and the traditional problems of large volume, high price, etc., are solved.
Description
Technical field
The invention relates to a kind of instant nir chemical image spectral device, refer to a kind of instant nir chemical image spectral device that is applicable to the qualitative measurement of chemical constitution of the micro-structure thing that carries out contactless and non-damage type especially.
Background technology
Infrared absorption spectrum is for confirming one of chemical composition analysis method and since the implantation of fourier tranformation make infrared absorption spectrum oneself be widely used in the qualitative and quantitative test of molecule.No matter but be traditional infrared absorption spectrometer or fourier transform infrared absorption spectrometer, all need expend the chemical composition that plenty of time and complicated computer computing just can be learnt testing sample.
Foregoing is an example with business-like fourier transform infrared absorption spectrometer at present, it is with a light splitting piece one parallel beam to be divided into two bundles to be close to the light beam that intensity equates, one light beam penetrate light splitting piece reach fixed mirror, another light beam then by light splitting piece reflex to one with the moving lens of the parallel movement at the uniform velocity of optical axis direction, this twice light beam via different optical paths mixes on light splitting piece, and penetrated testing sample together, focus to detecting device by the optical frames group again, again the fourier transform of the light signal utilization complexity of gained just can be obtained the chemical composition of testing sample.Therefore, it not only must expend time in complex calculations, and simultaneously its contexture is also because need and cooperate the McKesson interferometer signal to carry out the hardware or the software of complex calculation, and is undue complicated and cause overall volume huge and cost an arm and a leg.
Summary of the invention
Fundamental purpose of the present invention is that a kind of instant nir chemical image spectral device is being provided, and can directly detect and reduces a large amount of complex calculation, to save the time that rope needs of detecting, simplifies and detects step, promotes the speed that detects.
Another object of the present invention is that a kind of instant nir chemical image spectral device is being provided, and the structural design that can simplify detection improves portability and space and uses elasticity, and reduce cost to reduce overall volume.
For reaching above-mentioned purpose, the instant nir chemical image of the present invention spectral device, be to cooperate a matrix, mainly include a light source, a single light apparatus, two condenser groups, a reflective infrared objective group, a thermal imagery face detector, and one can put the specimen holder of matrix to be measured (being sample).Wherein, light source is to produce an infrared light, this infrared light is also focused on by the first condenser group of received, infrared light after focusing on then enters single light apparatus to carry out beam split, narrow frequency infrared light through the tool specific wavelength after the beam split is then received and converts to parallel narrow infrared light frequently by the second condenser group, and this parallel narrow is when infrared light is through specimen holder frequently, can penetrate the testing sample that places on the specimen holder, make testing sample absorb this parallel narrow infrared light and radiate a heat radiation frequently, afterwards, reflective infrared objective group is promptly collected this heat radiation and is imported thermal imagery face detector, by thermal imagery face detector collected heat radiation is given imaging at last.
Described instant nir chemical image spectral device, it more includes a paraboloidal mirror is to make the infrared light of this light source inject this first condenser group with parallel, and this paraboloidal mirror is between this first condenser group and this light source.
The infrared light of the instant nir chemical image of the present invention spectral device can use a wavelength between 2.5～25.0 microns infrared light, and the mirror group that the first condenser group can be this infrared light of any reception and focused on, be preferably the mirror group of using a cylindrical lens (cylindrical lens), the second condenser group to can be this narrow frequency infrared light of any reception and converting parallel narrow frequency infrared light to, be preferably and use a spherical lens.In addition, group is provided with the narrow frequency infrared light that a grating pair infrared light carries out beam split and formed a tool specific wavelength in the single light apparatus of the instant nir chemical image of the present invention spectral device.
Moreover the thermal imagery face detector of the instant nir chemical image of the present invention spectral device is to can be any mechanism that receives through the collected thermal radiation signal of this reflective infrared objective group, is preferably an infrared image detecting device.Be more preferred from and use an infrared confocal array thermal image instrument (IRFPA-Infrared Focal Plane Array), and this thermal imagery face detector can connect and establishes a screen so that the imaging of thermal imagery face detector can be shown on this screen.
Therefore, the design of the instant nir chemical image of the present invention spectral device can directly detect and complexity (Fourier) computing that need not be a large amount of, can effectively promote the speed of detection, simultaneously if one-piece construction is also traditional type complicated or take vast space, thereby can reach and simplify the purpose of structural design to reduce overall volume and to reduce cost that detects.
The matrix of the instant nir chemical image of the present invention spectral device can be any known sample, is preferably biomaterial, biological tissue, semiconductor material, photoelectric material.In addition, the instant nir chemical image of the present invention spectral device is except that can immediately providing the infrared image, the chemical analysis information of instant infrared image still can be provided, and provide the instant chemical analysis face picture of surveyed area sooner and exactly, general nir chemical image spectral device, have more obvious advantage, and can be applied to of detection or the research of instant chemical constitution in the sample face.
Description of drawings
Fig. 1 is an Organization Chart of the present invention.
Embodiment
For technology contents of the present invention can more be described, be described as follows especially exemplified by a preferred embodiment.
See also the Organization Chart of this creation of Fig. 1, it shows a light source 11, and can produce an infrared light 111, in present embodiment, this light source 11 is to utilize an additional power source (figure do not show) heating carbon silicide and is light source with the infrared light of its radiation that this infrared light 111 is to be the infrared light of a wavelength between 2.5～25.0 microns simultaneously.Afterwards, the infrared light 111 of light source 11 forms source of parallel light by a paraboloidal mirror 2 with its conversion and injects in one first condenser 12, this first condenser 12 is to use a cylindrical lens in present embodiment and in order to receive above-mentioned infrared light 111 and to be focused on, the infrared light 111 after focusing on then enters in the single light apparatus 13.By in graphic as can be known, organize separately in the single light apparatus 13 and be provided with a grating 132, this grating 132 can carry out beam split to the infrared light after the above-mentioned focusing 111, make it form the narrow frequency infrared light 131 of a tool specific wavelength simultaneously, this narrow frequency infrared light 131 then penetrates to one second condenser 14 again, in present embodiment, this second condenser 14 is to use a spherical lens and can be in order to above-mentioned narrow frequency infrared light 131 is converted to parallel narrow infrared light 141 frequently.Afterwards, parallel narrow frequently infrared light 141 can be injected one and puts on sample the is arranged specimen holder 15 of (figure does not show) and shine this sample simultaneously, this sample then absorbs parallel narrow infrared light 141 frequently, and because this sample is to receive with face, thereby radiate a heat radiation 151,151 of the heat radiations of being radiated are collected by a reflective infrared objective 16 again, and 151 of last collected heat radiations are by an imaging that thermal imagery face detector 17 receives and gives.The employed thermal imagery face of present embodiment detector 17 is meant an infrared image detecting device, for example infrared confocal array thermal image instrument (IRFPA-InfraredFocal Plane Array) etc., and it can be circumscribed with a screen (figure does not show) and its imaging is shown on this screen.
From the above, testing sample is to absorb specific parallel narrow frequency infrared light 141 and radiate a heat radiation 151, this heat radiation 151 is then directly received and imaging by thermal imagery face detector 17, do not need fully through excessive complexity (Fourier) computing in the middle of it, so can effectively promote the speed of detection; In addition, one-piece construction has been because exempted the machine and the transmission line of traditional cooperation computing, thus structure also not if traditional type complicated huge, simplify the structural design that detects relatively and can reduce overall volume, the raising portability, minimizing takes up room, and reduces cost.
The foregoing description only is to give an example for convenience of description, and the interest field that the present invention advocated should be as the criterion so that claim is described certainly, but not only limits to the foregoing description.
Claims (10)
1. an instant nir chemical image spectral device is to cooperate a matrix, it is characterized in that: mainly include:
One light source produces an infrared light;
One first condenser group receives this infrared light and is also focused on;
One single light apparatus, receive the infrared light after this first condenser group focuses on and carry out beam split, to form the narrow frequency infrared light of a tool specific wavelength;
One second condenser group receives this narrow frequency infrared light and converts parallel narrow infrared light frequently to;
One specimen holder, receive this parallel narrow frequently infrared light so that this parallel narrow frequently infrared light penetrate this matrix of placing this specimen holder, make this parallel narrow of this matrix absorption infrared light and radiate a heat radiation frequently;
One reflective infrared objective group is collected this heat radiation;
One thermal imagery face detector receives this collected heat radiation of this reflective infrared objective group of warp and gives imaging.
2, instant nir chemical image spectral device according to claim 1, it is characterized in that: wherein this infrared light is meant a near infrared light.
3, instant nir chemical image spectral device according to claim 1, it is characterized in that: wherein this infrared light wavelength is between 2.5～25.0 microns.
4, instant nir chemical image spectral device according to claim 1, it is characterized in that: wherein this first condenser group is a cylindrical lens.
5, instant nir chemical image spectral device according to claim 1, it is characterized in that: wherein this second condenser group is a spherical lens.
6, instant nir chemical image spectral device according to claim 1 is characterized in that: wherein group is provided with a grating this infrared light is carried out beam split to form the narrow frequency infrared light of a tool specific wavelength in this single light apparatus.
7, instant nir chemical image spectral device according to claim 1, it is characterized in that: wherein this thermal imagery face detector is meant an infrared image detecting device.
8, instant nir chemical image spectral device according to claim 7 is characterized in that: wherein this infrared image detecting device is meant an infrared confocal array thermal image plane detector.
9, instant nir chemical image spectral device according to claim 1, it is characterized in that: it more includes a paraboloidal mirror is to make the infrared light of this light source inject this first condenser group with parallel, and this paraboloidal mirror is between this first condenser group and this light source.
10, instant nir chemical image spectral device according to claim 1 is characterized in that: it comprises that more a screen is to be arranged in this thermal imagery face detector, so that the imaging of this thermal imagery face detector is shown on this screen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02160821 CN1289903C (en) | 2002-12-30 | 2002-12-30 | Instant infrared chemical image spectral device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02160821 CN1289903C (en) | 2002-12-30 | 2002-12-30 | Instant infrared chemical image spectral device |
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| Publication Number | Publication Date |
|---|---|
| CN1512167A CN1512167A (en) | 2004-07-14 |
| CN1289903C true CN1289903C (en) | 2006-12-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 02160821 Expired - Fee Related CN1289903C (en) | 2002-12-30 | 2002-12-30 | Instant infrared chemical image spectral device |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101241231B (en) * | 2007-02-07 | 2010-04-07 | 中国科学院微电子研究所 | Infra red optical imaging device |
| CN102680120B (en) * | 2012-05-24 | 2014-10-22 | 哈尔滨工业大学 | Detection system for extreme ultraviolet lithography light source in Xe10+ ionic condition |
| CN103030094B (en) * | 2012-12-18 | 2015-04-29 | 哈尔滨理工大学 | Infrared emission and split integrated chip and preparation method thereof |
| CN103630545A (en) * | 2013-11-20 | 2014-03-12 | 江苏大学 | Injection-molded blade on-line monitoring device and method based on near-infrared optical wave array |
| TWI723877B (en) * | 2020-05-13 | 2021-04-01 | 國家中山科學研究院 | Plug-in coaxial thermal radiation image measurement system |
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