CN1286162C - Method for forming contact window - Google Patents
Method for forming contact window Download PDFInfo
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- CN1286162C CN1286162C CN 02140776 CN02140776A CN1286162C CN 1286162 C CN1286162 C CN 1286162C CN 02140776 CN02140776 CN 02140776 CN 02140776 A CN02140776 A CN 02140776A CN 1286162 C CN1286162 C CN 1286162C
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- lining
- opening
- contact hole
- dielectric layer
- hole according
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Abstract
The present invention discloses a method for forming a contact window, which comprises the following steps: firstly, forming a dielectric layer on a substrate, and forming a patterned photoresistive layer on the dielectric layer; secondly, using the photoresistive layer as an etching mask to remove part of thickness of the dielectric layer to form a first opening; thirdly, forming a first lining on the surface of the photoresistive layer, and using the first lining as an etching mask to remove part of thickness of the dielectric layer below the first opening to form a second opening of which the range is larger than that of the first opening; fourthly, forming a second lining covering the first lining on the photoresistive layer, and using the second lining as an etching mask to remove the dielectric layer below the second opening to form a third opening for exposing the substrate, wherein the range of the third opening is larger than that of the second opening; finally, after removing the second lining, the first lining and the photoresistive layer, filling a conducting layer into the third opening to form the contact window.
Description
Technical field
The present invention relates to a kind of method that forms semiconductor element, and be particularly related to a kind of utilization repeatedly etching step to form the method for small size contact hole (Contact or Via).
Background technology
Along with the progress of semiconductor technology, size of component is also constantly dwindled.Yet, in entering the field of deep-sub-micrometer, when the integrated level of integrated circuit increases, will make the surface of chip can't provide enough areas to make required intraconnections (Interconnects).Therefore for co-operating member dwindles the intraconnections demand that the back is increased, the design of two-layer above multiple layer metal intraconnections just becomes the mode that very lagre scale integrated circuit (VLSIC) (VLSI) technology institute must employing.In addition, if want conducting, then must dig an opening at the insulating barrier between two metal levels and insert electric conducting material between the different metal layer, to form the contact structure of conducting two metal levels.
The method of known formation contact structure, be in the substrate that is formed with one first metal interconnecting layer, to form a dielectric layer, afterwards, this dielectric layer of patterning is to form an opening, and expose the first metal interconnecting layer, then, in this opening, insert a metal level, to form a Metal Contact window.Follow-up, on the Metal Contact window, form one second metal interconnecting layer again, but so that the first metal interconnecting layer of lower floor and the second metal interconnecting layer consecutive get up.
Yet under the prerequisite that requires to improve gradually in the integrated level of integrated circuit, not only component size is dwindled, and also relative the dwindling of size of metal interconnecting and Metal Contact window.Yet owing to be subject to the restriction of developing process and etch process at present, it is quite difficult forming the contact hole with small size bottom.And for the small size contact window with high-aspect-ratio, it also is very very difficult inserting metal conductive materials therein.
Summary of the invention
Purpose of the present invention is exactly to be to provide a kind of method that forms contact hole, solving in the known method because of being subject to the restriction of developing process and etch process, and can't form the problem with the contact hole bottom the small size.
Another object of the present invention provides a kind of method that forms contact hole, for the small size contact window with high-aspect-ratio the problem that is difficult for inserting metal conducting layer is arranged to solve in the known method.
The present invention proposes a kind of method that forms contact hole, and the method at first forms a dielectric layer in a substrate, and forms the photoresist layer of a patterning on dielectric layer.Then, be the segment thickness that an etching mask removes dielectric layer with photoresist layer, and form one first opening.Afterwards, on the surface of photoresist layer, form one first lining, wherein have an etching selectivity between first lining and the dielectric layer.In the present invention, the material of first lining for example is a macromolecular material, and the method that forms first lining for example is plasma enhanced chemical vapor deposition method (PECVD).Afterwards, be an etching mask with first lining and photoresist layer, remove the segment thickness of the dielectric layer under first open bottom, and form one second opening, its scope contains first opening.Then, on photoresist layer, form one second lining, cover first lining, wherein have an etching selectivity between second lining and the dielectric layer.In the present invention, the material of second lining for example is a macromolecular material, and the method that forms second lining for example is the plasma enhanced chemical vapor deposition method.Then, be an etching mask with second lining and photoresist layer, remove the dielectric layer under second open bottom, and form the 3rd opening exposing substrate, and scope contains second opening.Then, after second lining, first lining and photoresist layer are removed, in the 3rd opening, insert a conductive layer again, and form a contact hole.Utilize the formed contact structure of repeatedly etching step of the present invention, the width of its bottom can be less than the width at its top.
The present invention proposes a kind of method that forms contact hole, and the method at first forms a dielectric layer in a substrate, and forms the photoresist layer of a patterning on dielectric layer.Afterwards, be that the segment thickness that an etching mask removes dielectric layer forms one first opening with photoresist layer.Then, after photoresist layer is removed, on dielectric layer with in first opening, form one first lining.Wherein, has an etching selectivity between first lining and the dielectric layer.In the present invention, preferably a silicon nitride or a metal material of the material of first lining.Afterwards, be an etching mask with first lining, remove the segment thickness of the dielectric layer under first open bottom, and form one second opening, its scope contains first opening.Then, on dielectric layer with in second opening, form one second lining, cover first lining.Wherein, has an etching selectivity between second lining and the dielectric layer.In the present invention, preferably a silicon nitride or a metal material of the material of second lining.Then, be an etching mask with second lining, remove the dielectric layer under second open bottom, forming one the 3rd opening exposing substrate, and scope contains second opening.Continue it, after second lining and first lining are removed, in the 3rd opening, insert a conductive layer again, to form a contact hole.And utilizing the formed contact structure of repeatedly etching step of the present invention, the width of its bottom can be less than the width at its top.In addition, in the present invention, also first lining and second lining of silicon nitride material or metal material can be removed, and directly in the 3rd opening, insert conductive layer to form contact hole.This is because if first lining and second lining are to use the silicon nitride material, then first lining and second lining can be considered as the part of dielectric layer.If first lining and second lining are to use metal conductive materials, then first lining and second lining can be considered as the part of contact hole.
The method of formation contact hole of the present invention because it utilizes repeatedly etching step to have the contact hole of small size bottom with formation, therefore can overcome the restriction of developing process and etch process now.
The method of formation contact hole of the present invention, because the top of formed contact window is wide than its bottom, so metal conducting layer can be inserted in this contact window easily.
The method of formation contact hole of the present invention is because the top broad of formed contact hole therefore for whole contact hole, can reduce its resistance.
Description of drawings
For purpose of the present invention, feature and advantage can be become apparent, conjunction with figs. hereinafter elaborates:
Figure 1A to Fig. 1 G is the flow process generalized section of the formation contact hole of first embodiment of the invention;
Fig. 2 A to Fig. 2 H is the flow process generalized section of the formation contact hole of second embodiment of the invention.
The figure acceptance of the bid is kept the score and is not:
100,200: substrate
102,202: dielectric layer
104,204: photoresist layer
106,206: the first openings
108,208: the first linings
110,210: the second openings
112,212: the second linings
114,214: the three openings
116,216: conductive layer
Embodiment
First embodiment:
Figure 1A to Fig. 1 G, it is the flow process generalized section of the formation contact hole of first embodiment of the invention.
Please refer to Figure 1A, a substrate 100 at first is provided.Then, in substrate 100, form a dielectric layer 102.Wherein, the material of dielectric layer 102 for example is a silica.Afterwards, on dielectric layer 102, form the photoresist layer 104 of a patterning.
Afterwards, please refer to Figure 1B, is that an etching mask carries out an anisotropic etching process with photoresist layer 104, removing the segment thickness of dielectric layer 102, and forms one first opening 106.
Then, please refer to Fig. 1 C, on the surface of photoresist layer 104, form one first lining 108, and formed first lining 108 also may be formed on dielectric layer 102 surfaces that first opening 106 is exposed.Wherein, has an etching selectivity between first lining 108 and the dielectric layer 102.In the present embodiment, the material of first lining 108 for example is a macromolecular material, and the method that forms first lining 108 for example is the plasma enhanced chemical vapor deposition method.One reacting gas principal component of this plasma enhanced chemical vapor deposition method for example is difluoromethane (CH
2F
2), or difluoromethane (CH
2F
2) and octafluoro butylene (C
4F
8) mist, or difluoromethane (CH
2F
2) and fluoroform (CHF
3) mist.In addition, a pressure that carries out this plasma enhanced chemical vapor deposition method for example is between 1 to 100 milli torr.And its power for example is between 500 to 2000W.Moreover the self-bias value that carries out this plasma enhanced chemical vapor deposition method is for example between 0 to-400V, and deposition rate for example be between 600 to 6000 dusts/minute between.In addition, still optionally add argon gas (Ar), carbon monoxide (CO), oxygen (O in the reacting gas of this plasma enhanced chemical vapor deposition method
2) and nitrogen (N
2) or the like.
Then, please refer to Fig. 1 D, utilizing first lining 108 is that an etching mask carries out a non-grade to etch process with photoresist layer 104, segment thickness with the dielectric layer 102 under first lining 108 that removes first opening, 106 bottoms and first opening 106, and forming one second opening 110, its scope contains first opening 106.In this non-grade in etch process, first lining 108 of first opening, 106 sidewalls can remain, and first lining 108 at photoresist layer 104 tops may be removed simultaneously, but owing to still have photoresist layer 104 as the event of etching mask, second opening 110 still can form smoothly.
What is particularly worth mentioning is that, the present invention can be in the step of above-mentioned formation first lining 108, technological parameter adjusted to be formed on the thickness of first lining 108 of first opening, 106 bottoms thick so that be formed on the thickness of first lining 108 at photoresist layer 104 tops, even make first lining 108 can not be deposited on dielectric layer 102 surfaces that first opening 106 is exposed.So, in etch process, first lining 108 at photoresist layer 104 tops just can not removed fully in above-mentioned non-grade, and can continue the usefulness as etching mask.
Then, please refer to Fig. 1 E, on the surface of photoresist layer 104, form one second lining 112 and cover first lining 108.Same, formed second lining 112 also may be formed on dielectric layer 102 surfaces that second opening 110 is exposed.Wherein, has an etching selectivity between second lining 112 and the dielectric layer 102.In the present embodiment, the material of second lining 112 for example is a macromolecular material, and the method that forms second lining 112 for example is plasma enhanced chemical vapor deposition method (PECVD), and identical about the detailed description that forms second lining 112 with the mode of previous formation first lining 108, do not repeat them here.
Afterwards, please refer to Fig. 1 F, utilizing second lining 112 is that an etching mask carries out a non-grade to etch process with photoresist layer 104, with the dielectric layer 102 under second lining 112 that removes second opening, 110 bottoms and second opening 110, and form one the 3rd opening 114 exposing substrate 100, and scope contains second opening 110.In this non-grade in etch process, second lining 112 of second opening, 110 sidewalls can remain, and second lining 112 at photoresist layer 104 tops may be removed simultaneously, but owing to still have photoresist layer 104 as the event of etching mask, the 3rd opening 114 still can form smoothly.
Equally, if in the step of above-mentioned formation second lining 112, technological parameter is adjusted the thickness that can make second lining 112 that is formed on photoresist layer 104 tops, and to be formed on the thickness of second lining 112 of second opening, 110 bottoms thick, even make second lining 112 can not be deposited on dielectric layer 102 surfaces that second opening 110 is exposed.So, in etch process, second lining 112 at photoresist layer 104 tops just can not removed fully in above-mentioned non-grade, and can continue the usefulness as etching mask.
Then, please refer to Fig. 1 G, second lining 112, first lining 108 are removed with photoresist layer 104.Then, in the 3rd opening 114, insert a conductive layer 116, to form a contact hole.Wherein, the method of inserting a conductive layer 116 in the 3rd opening 114 for example is first formation one conductive material layer (not illustrating) comprehensive in substrate 100 and fills up the 3rd opening 114, utilize an etch back process or a chemical mechanical milling tech to remove the partially conductive material layers afterwards again, come out up to dielectric layer 102.
Because the method for formation contact hole of the present invention, be to utilize repeatedly etching step and form contact window (the 3rd opening 114), therefore can overcome known restriction because of developing process and etch process has the problem that is difficult for formation small size contact hole.In addition, because formed the 3rd opening 114 of the present invention, the width at its top is greater than the width of its bottom, so conductive layer 116 can insert in the 3rd opening 114 easily, for the small size contact hole with high-aspect-ratio the problem that is difficult for inserting metal conducting layer is arranged and solve in the known method.Moreover, because the top broad of the formed contact hole of the present invention therefore for whole contact hole, can reduce its resistance.
Second embodiment:
Fig. 2 A to Fig. 2 H, it is the flow process generalized section of the formation contact hole of second embodiment of the invention.
Please refer to Fig. 2 A, a substrate 200 at first is provided.Then, in substrate 200, form a dielectric layer 202.Wherein, the material of dielectric layer 202 for example is a silica.Afterwards, on dielectric layer 202, form the photoresist layer 204 of a patterning.
Afterwards, please refer to Fig. 2 B, is that an etching mask carries out an etch process with photoresist layer 204, removing the segment thickness of dielectric layer 202, and forms one first opening 206.
Then, please refer to Fig. 2 C, photoresist layer 204 is removed.Afterwards, on dielectric layer 202 with in first opening 206, form one first lining 208.Wherein, has an etching selectivity between first lining 208 and the dielectric layer 202.In the present embodiment, the material of first lining 208 is a silicon nitride or a metal material preferably, and the method that forms first lining 208 can be utilized any known deposition technique.What is particularly worth mentioning is that, in the step that forms first lining 208, can utilize adjusting process parameter or alternate manner, the thickness of first lining 208 that is formed on first opening, 206 bottoms with control is less than the thickness of first lining 208 that is formed on dielectric layer 202 tops.
Then, please refer to Fig. 2 D, utilizing first lining 208 is that an etching mask carries out a non-grade to etch process, segment thickness with the dielectric layer 202 under first lining 208 that removes first opening, 206 bottoms and first opening 206, and forming one second opening 210, its scope contains first opening 206.Formerly form in the step of first lining 208, because at the thickness of formed first lining 208 in first opening, 206 bottoms thin thickness than first lining 208 above the dielectric layer 202.Therefore, after first lining 208 with first opening, 206 bottoms removed, the top of dielectric layer 202 still had first lining 208 that is not removed to this non-grade to etch process, and can continue the usefulness as etching mask, so that second opening 210 can form smoothly.And after etch process, first lining 208 of first opening, 206 sidewalls can remain in this non-grade.
Then, please refer to Fig. 2 E, above dielectric layer 202 with in second opening 210, form one second lining 212.Wherein, has an etching selectivity between second lining 212 and the dielectric layer 202.In the present embodiment, the material of second lining 212 is a silicon nitride or a metal material preferably, and the method that forms second lining 212 can be utilized any known deposition technique.What is particularly worth mentioning is that, in the step that forms second lining 212, can utilize adjusting process parameter or alternate manner, the thickness of second lining 212 that is formed on second opening, 210 bottoms with control is less than the thickness of second lining 212 that is formed on dielectric layer 202 tops.
Then, please refer to Fig. 2 F, utilizing second lining 212 is that an etching mask carries out a non-grade to etch process, with the dielectric layer 202 under second lining 212 that removes second opening, 210 bottoms and second opening 210, and form one the 3rd opening 214 exposing substrate 200, and scope contains second opening 210.In the step of above-mentioned formation second lining 212, because at the thickness of formed second lining 212 in second opening, 210 bottoms thin thickness than second lining 212 above the dielectric layer 202.Therefore, after second lining 212 with second opening, 210 bottoms removed, dielectric layer 202 tops still had second lining 212 that is not removed to this non-grade to etch process, and can continue the usefulness as etching mask, so that the 3rd opening 214 can form smoothly.And after etch process, second lining 212 of second opening, 210 sidewalls can remain in this non-grade.
Then, please refer to Fig. 2 G, directly in the 3rd opening 214, insert a conductive layer 216, to form a contact hole.Wherein, the method of inserting a conductive layer 216 in the 3rd opening 214 for example is first formation one conductive material layer (not illustrating) comprehensive in substrate 200 and fills up the 3rd opening 214, utilize an etch back process or a chemical mechanical milling tech to remove the partially conductive material layers afterwards again, come out up to dielectric layer 202.In the present invention, because the material of first lining 208 and second lining 212 is metal material or silicon nitride, so the present invention can not need first lining 208 and second lining 212 are removed, and directly inserts conductive layer 216 in the 3rd opening 214.If first lining 208 and second lining 212 are metal materials, then can be with its part as contact hole.And if first lining 208 and second lining 212 are silicon nitride materials, it can be with its part as dielectric layer 202, and as the usefulness of insulation isolation.
Certainly, the present invention also can be shown in Fig. 2 H, after earlier second lining 212 and first lining 208 being removed, inserts a conductive layer 216 again in the 3rd opening 214, and the formation contact hole.
Because the method for formation contact hole of the present invention, be to utilize repeatedly etching step and form contact window (the 3rd opening 214), therefore can overcome known restriction because of developing process and etch process has the problem that is difficult for formation small size contact hole.In addition, because formed the 3rd opening 214 of the present invention, the width at its top is greater than the width of its bottom, so conductive layer 216 can insert in this 3rd opening 214 easily, for the small size contact hole with high-aspect-ratio the problem that is difficult for inserting metal conducting layer is arranged and solve in the known method.Moreover, because the top broad of the formed contact hole of the present invention therefore for whole contact hole, can reduce its resistance.
In an embodiment of the present invention, be with carry out three etching steps in the mode that forms contact window to describe it in detail.Yet the present invention does not limit and only can utilize three etch processs to form contact window.The present invention also comprises and utilizes secondary or the etching step more than three times to form contact window.
Comprehensive the above, the present invention has following advantage:
1. the method for formation contact hole of the present invention can overcome the restriction of developing process and etch process now and forms the contact hole with small size bottom.
2. the method for formation contact hole of the present invention, can solve has the problem that is difficult for metal conducting layer is inserted the small size contact window in the perception method.
3. the method for formation contact hole of the present invention can reduce the resistance value of small size contact hole.
Though the present invention is with preferred embodiment openly as above, it is not in order to qualification the present invention, any personnel that are familiar with this technology, and without departing from the spirit and scope of the present invention, various changes and the retouching done all belong to protection scope of the present invention.
Claims (20)
1. method that forms contact hole is characterized in that: comprising:
In a substrate, form a dielectric layer;
On this dielectric layer, form the photoresist layer of a patterning;
Utilizing this photoresist layer is the segment thickness that an etching mask removes this dielectric layer, to form one first opening;
On the surface of this photoresist layer, form one first lining;
Utilize this first lining and this photoresist layer be an etching mask to remove the segment thickness of this dielectric layer under this first open bottom, to form one second opening, the scope of this second opening contains this first opening;
On this photoresist layer, form one second lining, cover this first lining;
Utilize this second lining and this photoresist layer be an etching mask to remove this dielectric layer under this second open bottom, to form one the 3rd opening, expose this substrate, the scope of the 3rd opening contains this second opening;
Remove this second lining, this first lining and this photoresist layer;
In the 3rd opening, insert a conductive layer, to form a contact hole.
2. the method for formation contact hole according to claim 1 is characterized in that: have an etching selectivity between this first lining and this second lining and this dielectric layer.
3. the method for formation contact hole according to claim 1 is characterized in that: this first lining and this second lining are respectively a polymer material layer.
4. the method for formation contact hole according to claim 1 is characterized in that: the material of this dielectric layer comprises silica.
5. the method for formation contact hole according to claim 1 is characterized in that: the method that forms this first lining and this second lining comprises a plasma enhanced chemical vapor deposition method.
6. the method for formation contact hole according to claim 5 is characterized in that: the main component of the employed reacting gas of this plasma enhanced chemical vapor deposition method comprises CH
2F
2Or CH
2F
2/ C
4F
8Mist or CH
2F
2/ CHF
3Mist.
7. the method for formation contact hole according to claim 5 is characterized in that: the employed selectivity of this plasma enhanced chemical vapor deposition method is added gas and is comprised argon gas, carbon monoxide, oxygen and nitrogen.
8. the method for formation contact hole according to claim 5 is characterized in that: a reaction pressure of this plasma enhanced chemical vapor deposition method is between 1 to 100 milli torr.
9. the method for formation contact hole according to claim 5 is characterized in that: the power of this plasma chemical vapour deposition technique is between 500 to 2000W.
10. method that forms contact hole is characterized in that: comprising:
In a substrate, form a dielectric layer;
On this dielectric layer, form the photoresist layer of a patterning;
Utilizing this photoresist layer is the segment thickness that an etching mask removes this dielectric layer, to form one first opening;
Remove this photoresist layer;
On this dielectric layer with in this first opening, form one first lining;
Utilize this first lining be an etching mask to remove the segment thickness of this dielectric layer under this first open bottom, to form one second opening, the scope of this second opening contains this first opening;
On this dielectric layer, form one second lining, cover this first lining;
Utilize this second lining be an etching mask to remove this dielectric layer under this second open bottom, to form one the 3rd opening, expose this substrate, the scope of the 3rd opening contains this second opening;
In the 3rd opening, insert a conductive layer, to form a contact hole.
11. the method for formation contact hole according to claim 10 is characterized in that: before in the 3rd opening, inserting conductive layer, comprise that further one removes the step of this second lining and this first lining.
12. the method for formation contact hole according to claim 10 is characterized in that: have an etching selectivity between this first lining and this second lining and this dielectric layer.
13. the method for formation contact hole according to claim 10 is characterized in that: the material of this first lining and this second lining comprises silicon nitride.
14. the method for formation contact hole according to claim 10 is characterized in that: the material of this first lining and this second lining comprises a metal.
15. the method for formation contact hole according to claim 10 is characterized in that: the material of this dielectric layer comprises silica.
16. the method for formation contact hole according to claim 10 is characterized in that:
Directly in the 3rd opening, insert a conductive layer, to form a contact hole.
17. the method for formation contact hole according to claim 16 is characterized in that: have an etching selectivity between this first lining and this second lining and this dielectric layer.
18. the method for formation contact hole according to claim 16 is characterized in that: the material of this first lining and this second lining comprises silicon nitride.
19. the method for formation contact hole according to claim 16 is characterized in that: the material of this first lining and this second lining comprises a metal.
20. the method for formation contact hole according to claim 16 is characterized in that: the material of this dielectric layer comprises silica.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02140776 CN1286162C (en) | 2002-07-24 | 2002-07-24 | Method for forming contact window |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02140776 CN1286162C (en) | 2002-07-24 | 2002-07-24 | Method for forming contact window |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1471152A CN1471152A (en) | 2004-01-28 |
| CN1286162C true CN1286162C (en) | 2006-11-22 |
Family
ID=34147653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02140776 Expired - Fee Related CN1286162C (en) | 2002-07-24 | 2002-07-24 | Method for forming contact window |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1286162C (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4211674B2 (en) * | 2004-05-12 | 2009-01-21 | セイコーエプソン株式会社 | Semiconductor device and manufacturing method thereof, electro-optical device and manufacturing method thereof, and electronic apparatus |
| CN108257934B (en) * | 2016-12-29 | 2021-02-19 | 联华电子股份有限公司 | Method for manufacturing welding pad opening and fuse welding opening and welding pad opening structure |
-
2002
- 2002-07-24 CN CN 02140776 patent/CN1286162C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1471152A (en) | 2004-01-28 |
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Granted publication date: 20061122 Termination date: 20190724 |