CN1285760C - PLasma enhanced chemical deposition method of low vapor-prossure compound - Google Patents
PLasma enhanced chemical deposition method of low vapor-prossure compound Download PDFInfo
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- CN1285760C CN1285760C CN 200310102841 CN200310102841A CN1285760C CN 1285760 C CN1285760 C CN 1285760C CN 200310102841 CN200310102841 CN 200310102841 CN 200310102841 A CN200310102841 A CN 200310102841A CN 1285760 C CN1285760 C CN 1285760C
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Abstract
Generally, the apparatus of the present invention is (a) a flash evaporation housing (116) with a monomer atomizer (120) for making monomer particles (122), heated evaporation surface (124) for making an evaporate from the monomer particles, and an evaporate outlet (128), connected to (b) a glow discharge electrode (204) creating a glow discharge plasma from the evaporate, wherein (c) the substrate (104) is proximate the glow discharge plasma for receiving and cryocondensing the glow discharge plasma thereon. The method of the present invention has the steps of (a) flash evaporating a liquid monomer an evaporate outlet forming an evaporate; (b) passing the evaporate to a glow discharge electrode creating a glow discharge monomer plasma from the evaporate; and (c) cryocondensing the glow discharge monomer plasma on a substrate and cross-linking the glow discharge plasma thereon, wherein the cross-linking results from radicals created in the glow discharge plasma and achieves self curing.
Description
The application is what submitted on September 29th, 1998, and application number is 98809599.8, and denomination of invention is divided an application for the application of " plasma enhanced chemical deposition of low vapor pressure compounds ".
Invention field
The present invention relates generally to a kind of method of making plasma polymerization film.Particularly, the present invention relates to raw material source with the low vapor pressure compounds of flash distillation through the plasma enhanced chemical deposition to make plasma polymerization film.Term used herein " (methyl) is acrylic acid " means " acrylic acid or methacrylic acid ".Term used herein " cryogenic condensation " and form thereof mean that when the surface that gas and temperature are lower than gas dew point contacts gas phase changes the phase transformation physical phenomenon of liquid phase into.
Background of invention
The basic skills of plasma enhanced chemical vapor deposition (PECVD) is described in " thin-film process ", and by J.L.Vossen, W.Kern compiles, Academie Press, 1978, part IV, chapter IV-1 mineral compound plasma-deposited, chapter IV-2 glow-discharge polymerization, this paper are drawn and are reference.In general, glow discharge plasma is created on the electrode level and smooth or that sharp projecture is arranged.According to tradition, plasma slab is introduced with the high-vapor-pressure monomer gas in the gas inlet, forms free radical therein, causes it to clash into substrate subsequently, and chemical bonding or crosslinked (curing) take place on substrate some free radicals in the monomer.The high-vapor-pressure monomer gas comprises CH
4, SiH
4, C
2H
6, C
2H
2Or the gas that from high vapor-pressure liquids, produces, vinylbenzene (under 87.4 (30.8 ℃) is 10 torrs) for example, hexamethylene ring (under 60.4 (15.8 ℃) is 100 torrs), tetramethyl disiloxane (1 under 82.9 (28.3 ℃), 3 dichloro tetramethyl disiloxanes are 10 torrs) and their combination, they can be with gentle controlled heating evaporation.Because these high-vapor-pressure monomer gas are difficult in room temperature or cryogenic condensation under heating up, rely on the chemical bonding of radical pair relevant surfaces to replace cryogenic condensation can make sedimentation velocity low (maximum have only zero point several microns/minutes).Because associated substrate is made it and can compete mutually with cryogenic condensation by the alleviation of plasma etching to this problem.Can not be used for PECVD than the low-steam pressure material, because can induce reaction before evaporation usually when the monomer of higher molecular weight is heated to the temperature that is enough to make its evaporation or make the metering of gas restive, these two all is infeasible.
Flash evaporation is described in United States Patent (USP) 4,954, and in 371, this paper draws and is reference.This basic skills also is called polymer multi-layer (PML) flash distillation.Substantially, a kind of radiation polymerizable and/or variable material infeed under the temperature of decomposition temperature that is lower than this material and polymerization temperature.This atomising material is a droplet, and this droplet size circle is in the 1-50 micron.Usually adopt ultrasonic atomizer.Droplet is higher than this material boiling point with its temperature then under vacuum but its temperature is lower than again and causes that the pyrolytic heating surface contacts to be flashed.Steam low-temperature is condensate on the substrate, then radio polymerization or crosslinked be very thin polymer layer.
This material can comprise basic monomer or its mixture, linking agent and/or initiator.The shortcoming of flash distillation is to require two continuous steps, be right after curing or crosslinked behind the cryogenic condensation, and both separates on room and time.
According to the state of the art that plasma polymerization film is made, PECVD and flash distillation or glow discharge plasma deposition and flash distillation all are not used in combination.But according to J.D.Affinito, M.E.Gross, C.A.Coronado and the P.M.Martin report in " vacuum moulding machine of polymer dielectric on flexible substrate ", mineral compound glow discharge plasma producer with low pressure atmosphere under the flash distillation combination of (vacuum) be used for the plasma process of substrate.Article is published in the plenary session report of " the 9th international vacuum silk screen coated proceeding ", and 1995.11.R.Baskin compiles, Baskin press 1995, and the 20-36 page or leaf, and be shown in Fig. 1.In this system, plasma generator 100 is used for the surface 102 that substrate 104 is moved in etching, so that accept monomer gas effluent from flash distillation 106, monomer gas is cryogenic condensation on etched surperficial 102, then through the first solidification equipment (not shown), for example electron beam or uv-radiation are to cause crosslinked and to solidify.Plasma generator 100 has housing 108, gas inlet 110.Gas can be oxygen, nitrogen, water or rare gas element such as argon or their combination.Portion within it, electrode 112 is level and smooth or has one or more sharp projectures 114 that electrode 112 produces glow discharges also makes gas form plasma body, plasma etching surface 102.Flasher 106 has housing 116, monomer inlet 118 and atomizing nozzle 120, for example ultrasonic atomizer.The logistics of nozzle 120 of flowing through is atomized and is particle or droplet 122, and they clash into heating surface 124, and particle or droplet 122 flash distillation thereon are gas, this gas stream through a series of baffle plates 126 (can choose usefulness wantonly) to export 128 and on surface 102 cryogenic condensation.Though adopted other airflow distribution device, found that baffle plate 126 can provide suitable air-flow to distribute or uniformity coefficient, can make surface 102 be easy to amplify simultaneously.The solidification equipment (not shown) is positioned at the downstream of flasher 106.
Therefore, need a kind of equipment and method of making plasma polymerization layer here, the fast and energy self cure of its speed need not solidification equipment.This equipment and method will be particularly conducive to makes the PML polymer layer.
The invention summary
The present invention can be from two aspects, and its (1) low-steam pressure monomer material is made self-curing polymer layer, the particularly equipment of self cure PML polymer layer and method with the equipment and the method for plasma enhanced chemical vapor deposition on substrate, its (2).From two aspects, the present invention is the combination of flash distillation and plasma enhanced chemical vapor deposition (PECVD), this combination provides some beat all advantages, it can use the low-steam pressure monomer material in the PECVD method, and self cure from flash evaporation is provided, its sedimentation rate is surprisingly faster than the sedimentation rate of standard P ECVD.
In general, equipment of the present invention is (a) flash distillation housing, its inside is useful on the monomer spraying gun of preparation monomer particle, be used for monomer particle is made the heating evaporation surface and the evaporant outlet of steam, (b) glow-discharge electrode is positioned at evaporant outlet downstream, be used for preparing glow discharge plasma from evaporant, (c) substrate wherein, its is used to accept glow discharge plasma and makes cryogenic condensation on its substrate near glow discharge plasma.All parts should place low pressure (vacuum) chamber.
Method of the present invention has following steps: (a) flashed liquid monomer goes out the interruption-forming evaporant at evaporant; (b) make evaporant pass to glow-discharge electrode, evaporant is made the glow discharge monomer plasma; (c) glow discharge monomer plasma cryogenic condensation on substrate, and make glow discharge plasma crosslinked thereon, wherein the free radical that produces in the glow discharge plasma causes crosslinkedly, and reaches self cure.
One object of the present invention is to provide a kind of combination flash distillation and sedimentary equipment of glow discharge plasma and method.
One object of the present invention is to provide a kind of equipment and method for preparing the self-curing polymer layer.
Another object of the present invention is to provide a kind of equipment and method for preparing self cure PML polymer layer.
An also purpose of the present invention is to provide sedimentary equipment of the monomeric PECVD of a kind of low-steam pressure and method.
The invention has the advantages that it is insensitive to the travel direction of substrate, because sedimentary monomer layer is a self cure.In the prior art, sedimentary monomer layer needs radiation curing equipment, so that moving of substrate should be shifted to radiation device from deposition position.Another advantage of the present invention is, multilayer material capable of being combined, for example, the United States Patent (USP) 5 that this paper is incorporated by reference, 547,508 and 5,396, the alternating layer of 644,5,260,095 listed heteropolymer layer-polymkeric substance and metal and other all available the present invention of layer prepare in vacuum environment.
This specification sheets conclusion part is concrete and clearly theme of the present invention has been proposed claim, but operation and method of combination and other advantage thereof and purpose are preferably consulted following being described in detail in conjunction with the accompanying drawings and are understood, and wherein similar code means like.
Accompanying drawing is described
Fig. 1 is mineral compound aura generating plasma generator and the combined sectional view of flash distillation in the prior art.
Fig. 2 is the sectional view of the equipment of flash evaporation of the present invention and the combination of glow discharge plasma sediment-filled phase.
Fig. 2 a is the section end view of equipment of the present invention.
Fig. 3 is a sectional view of making electrode with substrate of the present invention.
Preferred embodiment is described
Equipment of the present invention is shown in Fig. 2.Equipment of the present invention and method are suitable in low pressure (vacuum) environment or chamber to be implemented.Pressure Yi Jie is in 10
-1Torr-10
-6Torr.Flasher 106 has housing 116, monomer inlet 118 and atomizing nozzle 120.Logistics atomizing through nozzle 120 is particle or droplet 122; particle or droplet 122 bump heating surface 124; and particle or droplet flash distillation thereon be gas or evaporant, the latter flow through a series of baffle plates 126 to evaporant outlet 128 and cryogenic condensation on surface 102.The measure at baffle plate 126 and the lip-deep cryogenic condensation of other internals of preventing is that baffle plate 126 and other internals surface are heated to cryogenic condensation temperature or its dew point above evaporant.Though adopted other airflow distribution device, found that baffle plate 126 can provide suitable air-flow to distribute and uniformity coefficient, easily made surface 102 amplify simultaneously.Evaporant outlet 128 makes evaporant generate glow discharge plasma gas channeling glow-discharge electrode 204.In embodiment shown in Figure 2, glow-discharge electrode 204 places among the glow discharge housing 200, and housing has evaporant inlet 202, and it is near evaporant outlet 128.In this embodiment, the temperature of glow discharge housing 200 and glow-discharge electrode 204 remains on more than the evaporant dew point.Glow discharge plasma flows out glow discharge housing 200 and cryogenic condensation on the surface 102 of substrate 104.The temperature of substrate 104 should remain on below the evaporant dew point, is preferably room temperature or is cooled to below the room temperature, so that improve cryogenic condensation speed.In this embodiment, substrate 104 is to move, and can be nonconducting, conduction or add bias voltage through impressed voltage, so that charged particle is drawn from glow discharge plasma.If substrate 104 band bias voltages, it in addition can replace electrode 204, itself become the electrode that makes monomer gas form glow discharge plasma.Essentially no bias voltage means and do not apply external voltage, though can owing to static or since with the interaction meeting stored charge of plasma body.
A kind of preferable shape of glow-discharge electrode is shown in Fig. 2 a.In this embodiment, glow-discharge electrode 204 is what to separate with substrate 104, and its shape makes from the logistics of evaporant inlet 202 electrode opening 206 of flowing through basically.Any electrode shape all can be used for forming glow discharge, but the preferable shape of electrode 204 is not blocked from exporting the plasma body that 202 effusive evaporants form, and it is provided at the homogeneity of evaporant vapour stream article on plasma body on the substrate width with respect to the symmetric relation of monomer outlet seam 202 and substrate 104, and the transverse width homogeneity is obtained by moving of substrate simultaneously.
A kind of equipment that is suitable for periodical operation is shown in Fig. 3.In this embodiment, glow-discharge electrode 204 and parts 300 (substrate) close enough so that 300 one-tenth of parts the extension or the integral part of electrode 204.In addition, this part temperatures is lower than dew point, so that glow discharge plasma cryogenic condensation on parts 300, thereby is polymer layer with monomer condensate coated parts 300 and self cure.Close enough can be attached thereto, by directly contact or with gap that can make the plasma strike substrate or distance thereon.Plasma body will depend on material, electrode 204/ ground 104 how much of evaporation, voltage and frequency and pressure from extended this segment distance of electrode, its standard manner is described in " discharge in the gas ", F.M.Penning, Cordon and Breach press, 1965, this paper draws and is reference.Substrate 300 in the cryogenic condensation process, can be in static or mobile in.Rotate and translation mobile comprising, and can be used to control the thickness and the uniformity coefficient of the monomer layer of cryogenic condensation on it.Because it is very fast that cryogenic condensation takes place, take place at millisecond with between second, parts can draw off after coated and before surpassing the coated temperature limit.
In the operation, no matter be as the plasma enhanced chemical vapor deposition process of on substrate, carrying out the low-steam pressure monomer material, or as forming self-curing polymer layer (particularly PML) method, method of the present invention has the following step: (a) flashed liquid monomer goes out the interruption-forming evaporant at evaporant; (b) make evaporant make evaporant form the glow discharge monomer plasma by glow-discharge electrode; (c) with glow discharge monomer plasma cryogenic condensation on substrate, and glow discharge plasma is crosslinked on it.The free radical that produces in the glow discharge plasma causes crosslinked, thereby can realize self cure.
Flash distillation has the following step: monomer liquid flows into inlet; Monomer liquid is through nozzle atomization; Monomer particle with a large amount of monomer liquid of spraying formation.Spraying is towards the heating evaporation surface of evaporation thereon, and flows out by evaporant outlet.
This liquid monomer can be any liquid monomer.But preferred monomer material or liquid at room temperature have low-steam pressure, so that it is easy to cryogenic condensation.The vapour pressure of monomer material should preferably be lower than 1 torr less than 10 torrs down at 83 (28.3 ℃) under 83 (28.3 ℃), most preferably be lower than 10 milli torrs under 83 (28.3 ℃).For the monomer of same chemical race, the monomer of low-steam pressure also has higher molecular weight usually, and is easy to cryogenic condensation than the monomer of higher vapor pressure, lower molecular weight.Liquid monomer includes but not limited to Acrylic Acid Monomer for example tripropylene glycol diacrylate, Viscoat 335HP, tripropylene glycol mono acrylic ester, caprolactone acrylate and combination thereof; Methacrylic acid monomer; And combination.(methyl) Acrylic Acid Monomer is particularly suitable for making molecular dopant polymkeric substance (MDP), light emission polymkeric substance (LEP) and light emission electrochemical cell (LEC).
By means of adopting flash distillation, the very fast evaporation of monomer is consequently no longer taking place to the reaction that takes place the vaporization temperature from the heating liquid monomer usually.In addition, the evaporant delivery rate is strictly used the feeding rate control of the liquid monomer of the import 118 that enters flasher 106.
Except the evaporant that produces from liquid monomer, in flasher 106, can add additional gas, this gas adds by the gas inlet 130 that evaporant exports 128 upstreams, preferably adds between first baffle plate 126 of heating surface 124 and the most close heating surface 124.Additional gas can be organic or inorganic, and its purpose includes but not limited to ballast, reaction and combination thereof.Ballast means the molecule that provides enough, so that keep plasma igniting under low evaporation flow.Reaction means the chemical reaction that generates the compound that is different from evaporant.Ballasting gas includes but not limited to periodictable VIII family element, and hydrogen, oxygen, nitrogen, chlorine, bromine, polyatomic gas comprise for example dihydro carbon, carbon monoxide, water vapour and their combination.An exemplary reaction is that oxygen is added in the hexamethyldisiloxane to obtain silicon-dioxide.
Embodiment 1
Once carried out an experiment, be shown in Fig. 2 and the present invention recited above with demonstration.Adopt Viscoat 335HP to make liquid monomer.The temperature of heating surface is set in about 650 (343 ℃).Liquid monomer is 0.032 inch kapillary introducing inlet through internal diameter.The internal diameter of ultrasonic atomizer nozzle is 0.051 inch.The sedimentation rate of polymer layer is 0.5m/min to 25 micron thickness polymer layers, and the polymer layer of 1 micron thickness is 100m/min.Visual inspection cured polymer layer is not found any pin hole or slight crack.
Conclusion
Although provide and narrated the preferred embodiments of the invention, concerning those skilled in the art, under the prerequisite of the scope that does not depart from broad of the present invention, can do a lot of changes and modification.Therefore the claim of appendix attempts to summarize all such changes and modifications within the spirit and scope of the present invention.
Claims (16)
1. being used in vacuum chamber makes the low-steam pressure monomer material carry out the equipment of plasma enhanced chemical vapor deposition on substrate, comprising:
(a) flasher housing, this housing have the monomer spraying gun for preparing monomer particle, prepare the heating evaporation surface and the vapour outlet of evaporant from this monomer particle; With
(b) glow-discharge electrode, this electrode exports the downstream at evaporant, prepares glow discharge plasma from evaporant; And
(c) substrate, accept and with this glow discharge plasma cryogenic condensation on this substrate.
2. the equipment of claim 1, wherein substrate is near glow-discharge electrode, and applies bias voltage by impressed voltage.
3. the equipment of claim 1, wherein this glow-discharge electrode places in the glow discharge housing, and this housing has the evaporant inlet of evaporant outlet, and the temperature of this glow discharge housing and this glow-discharge electrode remains on more than the dew point of this evaporant.
4. the equipment of claim 1, wherein this flash distillation housing has the baffle plate that places the opposition between heating surface and the evaporant outlet to put.
5. the equipment of claim 1 comprises that also this evaporant exports the gas inlet of upstream.
6. a method that is used for carrying out on substrate in vacuum environment the plasma enhanced chemical vapor deposition of low-steam pressure monomer material comprises the following steps:
(a) preparation evaporant, it is by accepting when a large amount of low-steam pressure monomer materials spray into the particle of the low-steam pressure monomer material of gained in the flash distillation housing, this spraying of evaporation and discharge evaporant and make through the evaporant outlet on water surface of evaporation; With
(b) prepare monomer plasma from described evaporant, it is that this evaporant is passed through near glow-discharge electrode and generation glow discharge, thereby prepares this plasma body by evaporant; And
(c) make this monomer plasma cryogenic condensation on substrate.
7. the method for claim 6, wherein substrate is near glow-discharge electrode, and applies bias voltage by impressed voltage, accepts the monomer plasma of condensation on it.
8. the method for claim 6, wherein this glow-discharge electrode places the glow discharge enclosure interior, the evaporant inlet of this housing is near the evaporant outlet, the temperature of this glow discharge housing and this glow-discharge electrode remains on the dew point of this evaporant, substrate is positioned at the downstream of monomer plasma, basically do not apply bias voltage with impressed voltage, it accepts the monomer plasma of condensation on it.
9. the method for claim 6, wherein said monomer are selected from Acrylic Acid Monomer, methacrylic acid monomer and combination thereof.
10. the method for claim 9, wherein said Acrylic Acid Monomer is selected from tripropylene glycol diacrylate, Viscoat 335HP, tripropylene glycol mono acrylic ester, caprolactone acrylate and combination thereof.
11. the method for claim 6, wherein said substrate is through refrigerative.
12. the method for claim 6 also is included in evaporant outlet upstream and adds additional gas.
13. the method for claim 12, wherein said additional gas are a kind of ballasting gas.
14. the method for claim 12, wherein said gas are a kind of reactant gasess.
15. the method for claim 14, wherein said reactant gases is an oxygen, and described evaporant comprises hexamethyldisiloxane.
16. the method for claim 6, wherein glow-discharge electrode is arranged in housing, and substrate is positioned at the downstream of monomer plasma.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/939,594 US6224948B1 (en) | 1997-09-29 | 1997-09-29 | Plasma enhanced chemical deposition with low vapor pressure compounds |
| US08/939594 | 1997-09-29 | ||
| US09/811,874 US6656537B2 (en) | 1997-09-29 | 2001-03-19 | Plasma enhanced chemical deposition with low vapor pressure compounds |
| US09/853,906 US6627267B2 (en) | 1997-09-29 | 2001-05-11 | Plasma enhanced chemical deposition with low vapor pressure compounds |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN98809599.8A Division CN1130472C (en) | 1997-09-29 | 1998-09-29 | Plasma enhanced chemical deposition with low vapor pressure compounds |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1495286A CN1495286A (en) | 2004-05-12 |
| CN1285760C true CN1285760C (en) | 2006-11-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200310102841 Expired - Lifetime CN1285760C (en) | 1997-09-29 | 1998-09-29 | PLasma enhanced chemical deposition method of low vapor-prossure compound |
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| FR2874606B1 (en) * | 2004-08-26 | 2006-10-13 | Saint Gobain | METHOD FOR TRANSFERRING A FUNCTIONAL ORGANIC MOLECULE TO A TRANSPARENT SUBSTRATE |
| CN105148552B (en) * | 2015-09-02 | 2017-05-24 | 南通江海电容器股份有限公司 | Impregnation and vacuum filter barrel |
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| CN1495286A (en) | 2004-05-12 |
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