CN1267644A - Self-cleaning glass and its production - Google Patents

Self-cleaning glass and its production Download PDF

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Publication number
CN1267644A
CN1267644A CN 00115361 CN00115361A CN1267644A CN 1267644 A CN1267644 A CN 1267644A CN 00115361 CN00115361 CN 00115361 CN 00115361 A CN00115361 A CN 00115361A CN 1267644 A CN1267644 A CN 1267644A
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China
Prior art keywords
glass
self
substrate
cleaning
cleaning glass
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CN 00115361
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Chinese (zh)
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CN1101353C (en
Inventor
杨锡良
章壮健
沈杰
陈华仙
张永熙
董昊
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Fudan University
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Fudan University
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Priority to CN00115361A priority Critical patent/CN1101353C/en
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23Oxides
    • C03C17/245Oxides by deposition from the vapour phase
    • C03C17/2456Coating containing TiO2
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/20Materials for coating a single layer on glass
    • C03C2217/21Oxides
    • C03C2217/212TiO2
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/15Deposition methods from the vapour phase
    • C03C2218/154Deposition methods from the vapour phase by sputtering
    • C03C2218/156Deposition methods from the vapour phase by sputtering by magnetron sputtering

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

Self-cleaning glass is produced by magnetically controlled sputtering process to plating one layer of titanium dioxide film onto substrate of common glass. It has excellent hydrophilicity and organic matter decomposing capability, so that it has powerful self-cleaning function. It has a service life over 10 years. It may be used widely in building and automobile.

Description

A kind of self-cleaning glass and preparation method thereof
The present invention relates to a kind of glass and preparation method thereof with self-cleaning function.
Glass exposure time in air that common building construction, automobile etc. use is long slightly, just has contamination by dust, and the transmission performance of glass is reduced.In addition, can not tumble, but adhere on glassly, can influence people's sight like this when little water droplet (as rainwater, fog etc.) amasss when on glass.Therefore, this glass needs frequent wiping, just can keep clean.
The objective of the invention is to propose a kind of glass and preparation method thereof with self-cleaning function.
The self-cleaning glass that the present invention proposes is a substrate with common glass, is coated with layer of titanium dioxide (TiO by magnetron sputtering method on it 2) film, the thickness of this titanium oxide film layer is 100nm-1000nm.
Existing studies show that, titanium deoxid film have hydrophilic, lipophilic parents' characteristic under uviolizing, the film with this specific character has effects such as sterilization, antifouling, antifog, deodorization.Therefore, the present invention is plated in titanium dioxide usually with magnetron sputtering method on glass, has increased one deck TiO 2Rete makes it to have self-cleaning function.Its structure as shown in Figure 1.
The invention allows for the preparation method-magnetron sputtering method of this self-cleaning glass.It is a substrate with common glass, plates the titanium oxide film layer of 100nm-1000nm, and concrete steps are as follows:
1. it is indoor to put into vacuum plating after glass substrate being cleaned up, and the distance of glass substrate and magnetron sputtering target is 3-15cm, and the Surface field intensity of sputtering target titanium plate is 200-500 Gauss.Wherein target titanium plate purity is better than 99.5% for well.
2. coating chamber vacuumizes, base vacuum to 2.66 * 10 -3Below the pa, charge into argon gas and oxygen, the throughput ratio of control oxygen argon is 1: 9 to 1: 0, and makes maintenance 10 in the coating chamber -2The running balance pressure of the pa order of magnitude.
3. the adjusting main valve makes to reach the required total pressure of sputter in the coating chamber, and its scope is 1.33 * 10 -1Pa~13.3pa.
4. during sputter coating, regulate sputtering voltage and be-500V~-800V, sputtering current is 100mA~600mA, and substrate temperature is room temperature to 500 a ℃ scope, and the sedimentation rate of film generally can be controlled in 1nm/min to 30nm/min.The control sputtering time just can plate the titanium dioxide layer of desired thickness, thereby make self-cleaning glass.
Through the test proof,, have the ability of good hydrophilicity energy and decomposing organic matter by the self-cleaning glass that the present invention makes:
1. at 300 μ w/cm 2, wavelength is (far below the power density of UV-light under the sunlight) under the 365nm UV-irradiation, the film surface water contact angle of test self-cleaning glass is variation relation in time, sees shown in Figure 2.Through 30 minutes, contact angle just reached 5 °, presented good hydrophilicity.
2. on simple glass and this self-cleaning glass, be coated with the organic dye rhodamine respectively, under the xenon lamp irradiation, test its transmission change.Transmittance graph as shown in Figure 3.Curve shows that this self-cleaning glass presents the ability of good decomposing organic matter matter.
3. four these self-cleaning glass are placed outdoorly with four common glass, be exposed in the atmosphere, the time is on March 15,25 days~2000 February in 2000, the secondary that rained during this time is through observing four self-cleaning glass cleaning surfaces lights, and four simple glasses are long-pending dust is arranged, messy.
In addition, the self-cleaning glass that the present invention proposes has the characteristics of long service life, can reach more than 10 years under state of nature.
The self-cleaning glass that the present invention makes can be widely used as building construction windowpane and automobile window glass etc.
Fig. 1 is the structure iron of this self-cleaning glass.
Fig. 2 is this self-cleaning glass water droplet contact angle variation diagram under uviolizing.
Fig. 3 is the comparison diagram that this self-cleaning glass and simple glass decompose the organic dye rhodamine.
Number in the figure: 1 is glass substrate, and 2 is titanium dioxide coating.
Embodiment 1: oxygen argon ratio is 1: 2, and sputtering pressure is 2.66Pa, and the distance of target and substrate is 5cm, and substrate temperature is 250 ℃, and sedimentation rate is 11.2nm/min, TiO 2Film thickness is 500nm, and the average transmittance in the 380nm-680nm wavelength region is 82%, and the self-cleaning glass that makes thus is that 365nm, power are 280 μ w/cm at wavelength 2UV-irradiation 1 hour, contact angle drops to 3.6 degree by 10.4 degree, has significantly anti-fog effect.Under the irradiation of indoor light source, can keep good self-cleaning function.
Embodiment 2: oxygen argon ratio is 1: 2, and sputtering pressure is 5.32 * 10 -1Pa, the distance of target and substrate is 5cm, and substrate temperature is 200 ℃, and sedimentation rate is 5.7nm/min, TiO 2Film thickness is 340nm.Transmissivity in the 380nm-680nm wavelength region is 72%.The self-cleaning glass that makes thus is that 254nm, power are 20 μ w/cm at wavelength 2Ultra violet lamp 1 time, contact angle by 36 the degree drop to 8 the degree, have self-cleaning function preferably.

Claims (2)

1. a self-cleaning glass is a substrate with common glass, it is characterized in that directly being coated with the titanium oxide film layer that thickness is 100nm-1000nm by magnetron sputtering method on this glass substrate.
2. the preparation method of a self-cleaning glass is a substrate with common glass, plates the titanium oxide film layer of 100nm-1000nm, and concrete steps are as follows:
(1) it is indoor to put into vacuum plating after glass substrate is cleaned up, and the distance of glass substrate and magnetron sputtering target is 3-15cm, and the Surface field intensity of sputtering target titanium plate is 200-500 Gauss;
(2) background of coating chamber vacuumizes, to 2.66 * 10 -3Below the Pa, charge into argon gas and oxygen, the throughput ratio of control oxygen, argon is 1: 9 to 1: 0, and makes maintenance 10 in the film coated type -2The running balance pressure of the Pa order of magnitude.
(3) regulate main valve, make to reach the required total pressure of sputter in the coating chamber, its scope is 1.33 * 10 -1Pa~13.3Pa.
(4) during sputter coating, regulate sputtering voltage and be-500V~-800V, sputtering current is 100mA~600mA, and substrate temperature is room temperature to 500 a ℃ scope, and the sedimentation rate of film is controlled at 1nm/min to 30nm/min.
CN00115361A 2000-04-11 2000-04-11 Self-cleaning glass and its production Expired - Fee Related CN1101353C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN00115361A CN1101353C (en) 2000-04-11 2000-04-11 Self-cleaning glass and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN00115361A CN1101353C (en) 2000-04-11 2000-04-11 Self-cleaning glass and its production

Publications (2)

Publication Number Publication Date
CN1267644A true CN1267644A (en) 2000-09-27
CN1101353C CN1101353C (en) 2003-02-12

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CN00115361A Expired - Fee Related CN1101353C (en) 2000-04-11 2000-04-11 Self-cleaning glass and its production

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100345599C (en) * 2005-08-11 2007-10-31 上海交通大学 Prepn process of biomedical active TiO2 film
CN100465332C (en) * 2006-12-14 2009-03-04 上海交通大学 Method for preparing anatase crystal phase titanium dioxide film at low temperature
CN102334784A (en) * 2010-07-27 2012-02-01 张康 Preparation method of pearl with high luster and high transparency
CN102582137A (en) * 2012-01-13 2012-07-18 苏州羿日新能源有限公司 Self-cleaning anti-fog element and manufacturing method thereof
CN104831887A (en) * 2015-05-21 2015-08-12 济南大学 Self-cleaning fireproof wall body material

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200920796A (en) 2007-11-12 2009-05-16 Onid Technology Corp Transparent aqueous nanometer sol-gel paint composition without reducing visible light and sunlight transmittance of transparent substrates and coating method thereof

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6268019B1 (en) * 1998-06-04 2001-07-31 Atofina Chemicals, Inc. Preparation of fluorine modified, low haze, titanium dioxide films

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100345599C (en) * 2005-08-11 2007-10-31 上海交通大学 Prepn process of biomedical active TiO2 film
CN100465332C (en) * 2006-12-14 2009-03-04 上海交通大学 Method for preparing anatase crystal phase titanium dioxide film at low temperature
CN102334784A (en) * 2010-07-27 2012-02-01 张康 Preparation method of pearl with high luster and high transparency
CN102582137A (en) * 2012-01-13 2012-07-18 苏州羿日新能源有限公司 Self-cleaning anti-fog element and manufacturing method thereof
CN102582137B (en) * 2012-01-13 2015-10-21 苏州力合光电薄膜科技有限公司 Self-cleaning anti-fog element and manufacture method thereof
CN104831887A (en) * 2015-05-21 2015-08-12 济南大学 Self-cleaning fireproof wall body material

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