CN1267279C - Liquid jet device - Google Patents

Liquid jet device Download PDF

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Publication number
CN1267279C
CN1267279C CN 200310101366 CN200310101366A CN1267279C CN 1267279 C CN1267279 C CN 1267279C CN 200310101366 CN200310101366 CN 200310101366 CN 200310101366 A CN200310101366 A CN 200310101366A CN 1267279 C CN1267279 C CN 1267279C
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CN
China
Prior art keywords
aqueous
ejecting head
mentioned
nozzle
parts
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Expired - Fee Related
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CN 200310101366
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Chinese (zh)
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CN1496840A (en
Inventor
臼井隆宽
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2002302989 priority Critical
Priority to JP2002302989 priority
Priority to JP2003301296 priority
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN1496840A publication Critical patent/CN1496840A/en
Application granted granted Critical
Publication of CN1267279C publication Critical patent/CN1267279C/en
Expired - Fee Related legal-status Critical Current
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Abstract

A liquid member ejecting device comprises an ejecting head and a liquid member tank for storing a liquid member and supplying the liquid member to the ejecting head. The liquid member ejecting device further comprises an attracting member for covering nozzles, a first decompressing section which is connected to the first attracting section for decompressing inside of the ejecting head via the first attracting member, a second attracting member for covering the nozzles, and a second decompressing section which is connected to the second attracting member so as to decompress inside of the ejecting head via the second attracting member and inside of the liquid member tank while communicating the liquid member tank. By doing this, it is possible to provide a liquid member ejecting device and method therefor, an electro-optic device, and manufacturing method therefor, and an electronic apparatus which can prevent the manufacturing cost from increasing due to the wasteful use of the liquid member so as to remove bubbles from the ejecting head while realizing a smaller nozzle diameter and finer flow paths.

Description

Liquid jet device and jet method thereof, electro-optical device and manufacture method thereof
Technical field
The present invention relates to spray the blowoff of aqueous body, at length relate to liquid jet device, liquid ejection method, electron-optical arrangement and manufacture method thereof and the electronic equipment that can well aqueous body be filled to ejecting head and remove bubble from the aqueous body of filling.
Background technology
So far, as the blowoff of the ejecting head that sprays aqueous body material, the ink-jet printer that has ink gun is well-known.
The ink gun that ink-jet printer has usually, has the blowoff that has cavity, the nozzle that is communicated with this cavity of storing aqueous body and be used for being stored in by the said nozzle ejection the aqueous body in the above-mentioned cavity and constitutes.Again, the aqueous body jar of storing aqueous body is connected with this ejecting head, supplies with aqueous body to ejecting head from aqueous body jar.
Again, above-mentioned ink gun in recent years as ejecting head, not only can be used for civilian ink-jet printer and can be used as industrial blowoff, promptly is used to form the device of the inscape of various devices.For example, about organic EL (Electro-Luminnescence: electroluminescent) metal wiring of luminescent layer in the device and the colour filter in hole injection layer, the liquid-crystal apparatus etc., further various devices, lenticule etc., in order to form them, also can enough ejecting heads.
, in above-mentioned ink gun, the aqueous body placement method when for example using to start with has following such placement method (for example, with reference to patent documentation 1).
At first, will press the nozzle that is attached to ejecting head to form on the face by the coating member that the flexible material constitutes, covering nozzles forms face airtightly.Secondly, make the decompressor work reduction coating member that is connected with coating member and the pressure between the nozzle formation face.
So,, in ejecting head, supply with aqueous body, aqueous body is filled in the ink gun from the aqueous body jar that is connected with it by reducing the pressure in the ink gun.And, further, proceed above-mentioned decompression, by attracting the aqueous body of filling, be discharged to coating member one side from ink gun, meanwhile, also make the air in this ejecting head and the bubble attraction that further remains in the stream is discharged to coating member one side.
Here, remain in the bubble in the ejecting head, press etc., apply ill effect, become the deterioration and the instable big major reason of the discharge performance that causes ejecting head to the mobile of aqueous body with from the ejection of nozzle by absorbing ejection when the aqueous body of ejection.
Patent documentation 1: the 2000-108383 patent gazette that Japan announced in 2000
, when blowoff is used for industry as described above, be accompanied by the variation of purposes, to use high price as the aqueous body of ejection with the aqueous body of rareness, perhaps full-bodied aqueous body.For example, in resolving gene structure etc., considering the technology of above-mentioned blowoff (ink-jet printer) is applied to this tested making of having a medical check-up in recent years, but it is very expensive, very rare again to be used for majorities such as the reagent of this tested making of having a medical check-up and a corpse or other object for laboratory examination and chemical testing.To use full-bodied aqueous body as the aqueous body that is used to form the luminescent layer in the organic El device again.
But, when bringing into use during the aqueous body of filling, when for above-mentioned when removing bubble like that and will be filled in aqueous body in the ejecting head and be discharged to outside the ejecting head, when aqueous body very your the time because a lot of institutes of waste so that cost rise significantly.Again, it is very inconvenient to carry out a spot of ejection as purpose when aqueous body is very rare.
Again, in the situation of full-bodied aqueous body, because bubble is difficult to flow in aqueous body, aqueous again body self also is difficult to move, so need be by attracting to discharge in large quantities aqueous body, also because the waste of aqueous body causes cost to rise.
Further, in recent years, because the high precision int of requirement ejection etc., so spraying the miniaturization of aqueous body, the diameter of nozzle and the also more and more miniaturization of stream of aqueous body together therewith.But when carrying out this miniaturization, it is big that capillary force becomes, and it is difficult attracting to discharge bubble by decompression.
Summary of the invention
The present invention proposes in view of the above problems, the purpose of this invention is to provide and can prevent because the cost that the waste of aqueous body causes rises, and with the nozzle diameter of the miniaturization that is accompanied by aqueous body and corresponding easy liquid jet device and liquid ejection method, electron-optical arrangement and manufacture method thereof and the electronic equipment of removing bubble from ejecting head of miniaturization of stream.
In order to achieve the above object, liquid jet device of the present invention, have ejecting head and storage and supply with the aqueous body jar of the aqueous body of this ejecting head, above-mentioned ejecting head has cavity, the nozzle that is communicated with this cavity of storing aqueous body and is used for being stored in the blowoff of the aqueous body in the above-mentioned cavity by the said nozzle ejection, and has: cover the 1st of said nozzle and attract parts; The 1st decompressor, it attracts parts to be connected with the 1st, by the 1st pressure that attracts in the parts reduction ejecting head; Cover the 2nd of said nozzle and attract parts; With the 2nd decompressor, it attracts parts to be connected with the 2nd, by the 2nd pressure that attracts in the parts reduction ejecting head, thereby and with above-mentioned aqueous body jar in be communicated with the pressure that reduces in this aqueous body jar.
If according to this liquid jet device, the aqueous body filling when then bringing into use as follows.
At first, in the state of the nozzle that covers above-mentioned ejecting head, form face with the above-mentioned the 1st nozzle that attracts parts to cover above-mentioned ejecting head.And,, by the above-mentioned the 1st pressure that attracts in the parts reduction ejecting head aqueous body is filled in this ejecting head by above-mentioned the 1st decompressor.
Like this, after being filled to aqueous body in the above-mentioned ejecting head, taking off the 1st from ejecting head and attract parts, then in the state of the nozzle that covers above-mentioned ejecting head, form face with the above-mentioned the 2nd nozzle that attracts parts to cover this ejecting head.And, reduce pressure in the above-mentioned aqueous body jar by the 2nd decompressor, and attract parts to reduce pressure in the ejecting head by the above-mentioned the 2nd.
So, because reduce in the aqueous body jar simultaneously and the pressure in the ejecting head, so in these aqueous body jars and between in the ejecting head, produce pressure differential hardly, therefore aqueous body can not take place to flow in the ejecting head and from ejecting head in the aqueous body jar and flow out aqueous body, thus particularly by only selectively attract to remain in the ejecting head bubble and in aqueous body the molten gas of depositing can remove them in the 2nd decompressor one side.Therefore, can invalidly not flow out aqueous body from ejecting head, can be easily and positively remove bubble etc., therefore can reach the purpose that reduces the cost.
After positively removing bubble etc. in this wise,, then can carry out well because the formation of the various inscapes of this ejection generation etc. if spray aqueous body from ejecting head again.
Again, in above-mentioned liquid jet device, be preferably in an opposite side that attracts the ejecting head of parts with the above-mentioned the 1st, the aqueous body detecting sensor of the aqueous body that detection flows out from said nozzle is set.
If do like this, then when passed through the 1st pressure that attracts in the parts reduction ejecting head by the 1st decompressor, when being filled in aqueous body in this ejecting head, remaining aqueous body flows out from the nozzle of ejecting head.At this moment, by detecting the aqueous body that flows out, can detect aqueous body and whether fully be filled in the ejecting head by aqueous body detecting sensor.So, detecting the decompression of back by being undertaken by the 1st decompressor, can prevent by flowing out superfluous aqueous body from ejecting head.
In above-mentioned liquid jet device, be preferably in the heater that the aqueous body that adds heat-storage is set in the above-mentioned aqueous body jar again.
If do like this, then by heating the viscosity that aqueous body can reduce it, so can make aqueous body flow into ejecting head from aqueous body jar easily.Again, can promote molten gas vaporization of depositing in aqueous body, by can easily removing bubble when the decompression undertaken by the 2nd decompressor etc.
Again, in above-mentioned liquid jet device, above-mentioned the 2nd attraction parts are the containers that can hold above-mentioned ejecting head at least.Again, at this moment, above-mentioned the 2nd decompressor preferably has to be made in the container that becomes above-mentioned the 2nd attraction parts and the formation of the uniform pressure that reduces pressure in the above-mentioned aqueous body jar.
Like this, ejecting head is positioned at chamber simply, by making the 2nd decompressor action that is connected with chamber, easily attract and remove to remain in the bubble in the ejecting head and be dissolved in the interior gas of aqueous body, promptly by with the same pressure that reduces pressure in the chamber and between in the aqueous body jar, between aqueous body jar and ejecting head, produce pressure differential hardly, like this, can not take place from the inflow and the outflow of the aqueous body in the ejecting head in the aqueous body jar from ejecting head to aqueous body.
In the blowoff of above-mentioned aqueous body, the above-mentioned the 1st attracts parts and the 2nd to attract parts to constitute with same attraction parts, and above-mentioned the 1st decompression member and the 2nd decompression member constitute with same decompression member.
If do like this, then by making in the aqueous body jar and the decompressor connection, can open and close the formation of this connected state with the switching device shifter of switch valve etc., can reduce pressure from reducing pressure to switch to by enough this switching device shifters, so can make device constitute summary by the 2nd decompressor by the 1st decompressor.
Liquid ejection method of the present invention, spray aqueous body by blowoff, above-mentioned blowoff has: ejecting head, and it has cavity, the nozzle that is communicated with this cavity of storing aqueous body and is used for being stored in by the said nozzle ejection blowoff of the aqueous body in the above-mentioned cavity; With the aqueous body jar of storing the aqueous body of supplying with this ejecting head, and have: the 1st attracts parts, and it is that nozzle carries out airtight covering to the formation of the nozzle in above-mentioned ejecting head face at least; The 1st decompressor, it attracts parts to be connected with the 1st, by the 1st pressure that attracts in the parts reduction ejecting head; The 2nd attracts parts, and it is that nozzle carries out airtight covering to the formation of the nozzle in above-mentioned ejecting head face at least; With the 2nd decompressor, it attracts parts to be connected with the 2nd, attracts parts to reduce pressure in the ejecting head by the 2nd, and with above-mentioned aqueous body jar in be communicated with pressure in this aqueous body jar of reduction.This liquid ejection method has: adopt the above-mentioned the 1st nozzle that attracts parts to cover above-mentioned ejecting head to form the operation of the nozzle of face and this nozzle formation face, pass through the above-mentioned the 1st pressure that attracts in the parts reduction ejecting head by the 1st decompressor, aqueous body is filled to operation in this ejecting head, after being filled to aqueous body in the above-mentioned ejecting head, adopt the above-mentioned the 2nd nozzle that attracts parts to cover above-mentioned ejecting head to form the operation of the nozzle of face and this nozzle formation face, reduce pressure in the above-mentioned aqueous body jar by the 2nd decompressor, and attract parts to reduce the operation of the pressure in the ejecting head by the above-mentioned the 2nd, behind pressure in reducing ejecting head, spray the operation of aqueous body from this ejecting head.
If according to this liquid ejection method, then because when the pressure that reduces by the 2nd decompressor in the above-mentioned aqueous body jar, and during by the pressure in the 2nd attraction parts reduction ejecting head, can reduce in the aqueous body jar simultaneously and the pressure in the ejecting head, so in these aqueous body jars and between in the ejecting head, produce pressure differential hardly, therefore aqueous body can not take place to be flow in the ejecting head and from ejecting head in the aqueous body jar and flow out aqueous body, thus particularly by only selectively attract to remain in the ejecting head bubble and in aqueous body the molten gas of depositing can remove them in the 2nd decompressor one side.Therefore, can invalidly not flow out aqueous body from ejecting head, can be easily and positively remove bubble etc., therefore can reach the purpose that reduces the cost.Again, after positively removing bubble etc. in this wise, because spray aqueous body, so can carry out well because the formation of the various inscapes of this ejection generation etc. from ejecting head.
Electro-optical device of the present invention, adopt liquid jet device to form at least a portion of described electro-optical device, above-mentioned liquid jet device has: ejecting head, and it has cavity, the nozzle that is communicated with this cavity of storing aqueous body and is used for being stored in by the said nozzle ejection blowoff of the aqueous body in the above-mentioned cavity; With the aqueous body jar of storing the aqueous body of supplying with this ejecting head, and have: the 1st attracts parts, and it is that nozzle carries out airtight covering to the formation of the nozzle in above-mentioned ejecting head face at least; The 1st decompressor, it attracts parts to be connected with the 1st, by the 1st pressure that attracts in the parts reduction ejecting head; The 2nd attracts parts, and it is that nozzle carries out airtight covering to the formation of the nozzle in above-mentioned ejecting head face at least; With the 2nd decompressor, it attracts parts to be connected with the 2nd, by the 2nd pressure that attracts in the parts reduction ejecting head, and with above-mentioned aqueous body jar in be communicated with the pressure that reduces in this aqueous body jar.
If according to this electro-optical device, then because can form the blowoff of various inscapes etc. as described above well, form at least a portion of this inscape, so can access the high good result of reliability, can reach the purpose that reduces cost owing to can invalidly not flow out aqueous body again.
The invention provides a kind of manufacture method of electro-optical device, at least a portion of this electro-optical device adopts blowoff to form, above-mentioned blowoff has: ejecting head, and it has cavity, the nozzle that is communicated with this cavity of storing aqueous body and is used for being stored in by the said nozzle ejection blowoff of the aqueous body in the above-mentioned cavity; With the aqueous body jar of storing the aqueous body of supplying with this ejecting head, and have: the 1st attracts parts, and it is that nozzle carries out airtight covering to the formation of the nozzle in above-mentioned ejecting head face at least; The 1st decompressor, it attracts parts to be connected with the 1st, by the 1st pressure that attracts in the parts reduction ejecting head; The 2nd attracts parts, and it is that nozzle carries out airtight covering to the formation of the nozzle in above-mentioned ejecting head face at least; With the 2nd decompressor, it attracts parts to be connected with the 2nd, by the 2nd pressure that attracts in the parts reduction ejecting head, and with above-mentioned aqueous body jar in be communicated with the pressure that reduces in this aqueous body jar.This manufacture method has: adopt the above-mentioned the 1st nozzle that attracts parts to cover above-mentioned ejecting head to form the operation of the nozzle of face and this nozzle formation face, pass through the above-mentioned the 1st pressure that attracts in the parts reduction ejecting head by the 1st decompressor, aqueous body is filled to operation in this ejecting head, after being filled to aqueous body in the above-mentioned ejecting head, adopt the above-mentioned the 2nd nozzle that attracts parts to cover above-mentioned ejecting head to form the operation of the nozzle of face and this nozzle formation face, reduce pressure in the above-mentioned aqueous body jar by the 2nd decompressor, and attract parts to reduce the operation of the pressure in the ejecting head by the above-mentioned the 2nd, behind pressure in reducing ejecting head, spray the operation of aqueous body from this ejecting head.
If manufacture method according to this electro-optical device, then because use the jet method that can form various inscapes as described above well, form at least a portion of this inscape, so can the high good electro-optical device of fabrication reliability, can reach the purpose that reduces cost owing to can invalidly not flow out aqueous body again.
The feature of electronic equipment of the present invention is with above-mentioned liquid jet device, or above-mentioned liquid ejection method forms the part of inscape.
If according to this electronic equipment, then because at least a portion that forms this inscape with blowoff that can form various inscapes etc. well or jet method, so can access the high good result of reliability, can reach the purpose that reduces cost owing to can invalidly not flow out aqueous body again.
Description of drawings
Fig. 1 is the summary pie graph of blowoff of the present invention.
Fig. 2 A, 2B are the summary pie graphs of ejecting head.
Fig. 3 is the figure that is used to illustrate the major part of blowoff shown in Figure 1.
Fig. 4 is the figure that is used to illustrate the major part of other blowoff.
Fig. 5 is the side cross-sectional view of organic El device.
Fig. 6 is the exploded perspective view of plasma scope.
Fig. 7 A~7F is the formation method key diagram of colour filter.
Fig. 8 is the flow diagram that is used to illustrate pattern formation method.
Fig. 9 A, 9B are the ideographs of an example of expression pattern formation method.
Figure 10 A, 10B are the ideographs of an example of expression pattern formation method.
Figure 11 A, 11B are the ideographs of an example of expression pattern formation method.
Figure 12 A~12D is the specification figure of method for manufacturing micro-lens.
Figure 13 A, 13B are the ideographs of the electron source base board of image display apparatus.
Figure 14 A~14C is manufacturing process's key diagram of image display apparatus.
Figure 15 is the oblique view of an example of expression electronic equipment.
The specific embodiment
Below, we describe the present invention in detail.
Fig. 1 is the figure of the 1st example of expression liquid jet device of the present invention (below be designated as blowoff).Label 30 is blowoffs in Fig. 1.This blowoff 30 has substrate 31, substrate mobile device 32, ejecting head mobile device 33, ejecting head 34, aqueous body jar 35 and container 38 etc. and constitutes.
Aforesaid substrate mobile device 32 and ejecting head mobile device 33 are set in substrate 31.
Substrate mobile device 32 is arranged in the substrate 31, has along the guide rail 36 of Y direction configuration.This substrate mobile device 32 for example has by linear motor along 37 such the constituting of guide rail 36 moving slide boards.On slide plate 37, have the motor (not drawing among the figure) of θ axle usefulness.This motor for example is made of direct CD-ROM drive motor, and its rotor (not drawing among the figure) is fixed on the platen 39.According to such formation, when making the motor energising, rotor and platen 39 add high scale (calculating rotation) along the rotation of θ direction on platen 39.
Platen 39 decisions and the position that keeps substrate S.That is, this platen 39 has well-known sticking and holding apparatus (not drawing among the figure), by making this sticking and holding apparatus work, substrate S absorption is remained on the platen 39.Determining positions pin (not drawing among the figure) by platen 39 correctly determines and keeps the assigned position of substrate S in substrate 31.On platen 39, be provided with ejecting head 34 give up ink or be used to try to spray give up zone 41.This is given up zone 41 and extends to form in X-direction, is arranged on rearward end one side of platen 39.
Ejecting head mobile device 33 has a pair of stand 33a, the 33a of rear portion one side that is built up in substrate 31 and is arranged on walking path 33b on these stands 33a, the 33a, this walking path 33b along X-direction, promptly with the direction configuration of the Y direction quadrature of aforesaid substrate mobile device 32.Walking path 33b has across the holding plate 33c between stand 33a, the 33a and the pair of guide rails 33d, the 33d that are arranged on this holding plate 33c and forms, and can move slide plate 42 ground of holding ejecting head 34 and keep slide plate 42 on the length direction of guide rail 33d, 33d.Because the work that linear motor (not drawing among the figure) waits is walked slide plate 42 on guide rail 33d, 33d, so ejecting head 34 is constituted movably along X-direction.
Be connected with ejecting head 34 as the motor 43,44,45,46 that shakes the determining positions device.And, when making motor 43 work, ejecting head 34 is moved up and down along the Z axle, can determine its position on the Z axle.In addition, this Z axle be respectively with the direction (above-below direction) of X-axis, Y-axis quadrature.Again, when making motor 44 work, ejecting head 34 shakes along the β direction among Fig. 1, can determine its position, when making motor 45 work, ejecting head 34 shakes along the γ direction, can determine its position, when making motor 46 work, ejecting head 34 shakes along the α direction, can determine its position.
Ejecting head 34 moves the position that can determine it at the Z-direction straight line on slide plate 42 like this, and, shake along α, β, γ, can determine its position.So, can correctly control position or the posture of the ink ejection face of ejecting head 34 in the face of the substrate S of platen 39 1 sides.
Here, ejecting head 2 has as illustrated in fig. 2 for example nozzle plate 12 and the oscillating plate 13 of Stainless Steel system, and both are glued together by distance member (holder plate) 14.Between nozzle plate 12 and oscillating plate 13, because distance member 14 forms a plurality of cavity 15.... and holder 16, these cavitys 15.... and holder 16 are communicated with by stream 17.
Here, the inside of each cavity 15 and holder 16 is full of aqueous body, and the stream 17 between them plays a part to supply with to cavity 15 from holder 16 supply port of aqueous body.On nozzle plate 12, form many poroid nozzles 18 that are used for spraying aqueous body from cavity 15 with the state of arranging in length and breadth again.On the other hand, on oscillating plate 13, form, be connected with this hole 19 by the aqueous body jar 35 of pipe 124 (please refer to Fig. 1) to the hole 19 of holder 16 inner openings.
Again, oscillating plate 13 with on the face of the opposite side of face of cavity 15, shown in Fig. 2 B, be bonding with piezoelectricity (English piez) element 20.This piezoelectric element 20, because have between the pair of electrodes of being clamped in 21,21, crooked such formation works as the blowoff among the present invention because energising is outstanding laterally.
Crooked laterally simultaneously according to bonding oscillating plate 13 of this formation and piezoelectric element 20 and piezoelectric element 20 ground that becomes one, therefore, the volume of cavity 15 is increased.So, when being communicated with in the cavity 15 with in the holder 16, and when aqueous body in filling in holder 16, the aqueous body suitable with the volume that increases flow in the cavity 15 from holder 16 by stream 17.
And when energising from this state to piezoelectric element 20 that remove from, piezoelectric element 20 and oscillating plate 13 are got back to original shape together.Thereby,,, spray the drop 22 of aqueous body from nozzle 18 so the aqueous body pressure of cavity 15 inside rises because cavity 15 is also got back to original volume.
In addition, blowoff as ejecting head, except electromechanical conversion body with above-mentioned piezoelectric element 20, for example, also can adopt as the energy generating device with the mode of electrothermal transformationer, the continuation mode that is called charged control type, heating vibration type, electrostatic attraction mode, the further electromagnetic wave heating by irradiating laser etc., because the effect that this heating causes sprays the mode of aqueous body.
Aqueous body jar 35 is configured on above-mentioned stand 33a, 33a one, and its inside is connected with vavuum pump 40 by pipe arrangement (not drawing among the figure).Again, on this aqueous body jar 35, at its inside or its arranged outside heater (not drawing among the figure).This heater is used to add the aqueous body of heat-storage, particularly when aqueous height viscosity etc., reduces viscosity by heating, can make aqueous body flow into ejecting head 34 from aqueous body jar 35 easily.Again, molten gas vaporization of depositing in aqueous body can be promoted, when the decompression undertaken by the 2nd decompressor described later, bubble etc. can be easily removed.
In addition, because stand 33a supports walking path 33b, so be in and 340 fens approaching positions of ejecting head of on this walking path 33b, walking.So the pipe 124 that is used for aqueous body is sent to ejecting head 34 from aqueous body jar 35 is with existing shorter, promptly its length roughly with the equal in length of walking path 33b.
Again, on another of above-mentioned stand 33a, 33a, configuration said vesse 38.This container 38 constitutes the 2nd among the present invention and attracts parts, by ejecting head 34 being collected in airtightly its inside, can cover the nozzle 18 of ejecting head 34 airtightly as described later.Again, above-mentioned vavuum pump 40 is connected with this container 38, the 2nd decompressor that this vavuum pump 40 constitutes among the present invention.That is, this vavuum pump 40 also is connected with aqueous body jar 35 by pipe arrangement (not drawing among the figure) as mentioned above, according to such formation, can reduce the pressure in the container 38 interior and aqueous body jars 35 simultaneously and make them be reduced to identical pressure.
In addition, a door (not drawing among the figure) is set on container 38, above-mentioned ejecting head 34 enters in the container 38 from this door because ejecting head mobile device 33 is walked on directions X and moved to container 38 1 sides.By closing this door, ejecting head 34 can be collected in this container 38 airtightly again.
In this container 38, attraction pad 50, suction pump 51 that is connected with this attraction pad 50 and the waste liquid tank 52 that is connected with this suction pump 51 of face (the nozzle formation face) 34a that covers the nozzle 18 that forms ejecting head 34 airtightly is set as shown in Figure 3.Attract pad 50 to attract parts to work as the 1st among the present invention, have to have to form face 34a butt joint and cover its pad, the flexible pipe arrangement (not drawing among the figure) that is communicated with the bore portion that on this pad, forms (not drawing among the figure) and be used to make pad to move with ejecting head 34 and dock, further from the formation of the travel mechanism that ejecting head 34 leaves to ejecting head 34 with the nozzle of ejecting head 34.In addition, pad is formed by rubber and soft synthetic resin etc.
Suction pump 51 works as the 1st decompressor among the present invention, and the pad of above-mentioned attraction pad 50 forms with the nozzle of ejecting head 34 and carries out decompression work after face 34a docks, by the pressure that attracts pad 50 to reduce in the ejecting head 34.
In addition, between this suction pump 51 and above-mentioned attraction pad 50, the aqueous body detecting sensor 53 that detects aqueous body is set.Can correspondingly suitably select and use well-known so far sensor with the kind of aqueous body as this aqueous body detecting sensor 53.For example, when aqueous body is non-light transmittance, can use the sensor that has light-emitting component and photo detector formation.
That is, in the pipe arrangement that is connected between suction pump 51 and the above-mentioned attraction pad 50, transparent part is set, disposes above-mentioned light-emitting component and photo detector in the both sides of this transparent part.If do like this, when aqueous body does not pass through transparent part, accept the light of self-emission device by photo detector, can not detect aqueous body, when aqueous body passes through transparent part, come the light of self-emission device to be covered by aqueous body, owing to can not being subjected to light, photo detector detects aqueous body.
Waste liquid tank 52 is used for storing the aqueous body of residue that flows out from ejecting head 34 when passing through to attract pad 50 by the pressure in the above-mentioned suction pump 51 reduction ejecting heads 34.Here, in this example, attracting between pad 50 and the suction pump 51 aqueous body detecting sensor 53 to be set as mentioned above, but also can in this waste liquid tank 52, aqueous body detecting sensor be set according to the kind of aqueous body.At this moment, for example also can detect from ejecting head 34 as remaining a certain amount of that aqueous body flows out by detecting the liquid level that is stored in the aqueous body in the waste liquid tank 52 with horizontal plane sensor.
Again, above-mentioned attraction pad 50, suction pump 51, aqueous body detecting sensor 53, vavuum pump 40 are connected with control device 54 respectively.Respectively their work is controlled by this control device 54.
Secondly, we illustrate that according to the work of the blowoff 30 of this formation aqueous body of the present invention passes an example of jet method.In addition, in this explanation, there is no particular limitation as the kind of aqueous body, can be with any aqueous body.
At first, before substrate S sprays aqueous body, aqueous body is filled in the ejecting head 34, and should removes and remain in inner bubble etc., mobile ejecting head 34 is collected in the container 38 this ejecting head 34.
Secondly,, move and attract pad 50, make the nozzle of ejecting head 34 form face 34a and dock with this pad 50 by control device 54 is controlled, cover airtightly it above.Then, make suction pump 51 work, by the pressure in the above-mentioned attraction pad 50 reduction ejecting heads 34.So, because at this moment above-mentioned vavuum pump 40 is not worked, thereby in aqueous body jar 35, become atmospheric pressure, so in this aqueous body jar 35 be connected the ejecting head 34 that attracts pad 50 between produce pressure differential, therefore, aqueous body in the aqueous body jar 35 flow in the ejecting head 34, and aqueous body is filled in the ejecting head 34.In addition, also can before making suction pump 51 work, make heater (not drawing among the figure) energising that is arranged in the aqueous body jar 35, add the aqueous body of heat-storage.
And, continue to make aqueous body to be filled in the ejecting head 34 by suction pump 51, in ejecting head 34, be full of enough aqueous bodies after, remaining aqueous body flows out from the nozzle 18 of ejecting head 34.So, by detect the aqueous body of these outflows by aqueous body detecting sensor 53, enough aqueous bodies that can detect in ejecting head 34 filling.And when this detection signal was sent to control device 54, the control device 54 that receives this signal quit work suction pump 51, and aqueous body is stopped from aqueous body jar 35 1 side inflows to ejecting head 34 1 sides.
If confirm so aqueous body is filled in the ejecting head 34, further flow out aqueous body from ejecting head 34, then after the air-tightness in confirming container 38, make vavuum pump 40 work by control device 54.
So, by ejecting head 34 is collected in the container 38, the result, its nozzle forms face 34a by container 38, i.e. and the 2nd among the present invention attracts parts to cover airtightly, so attracted to reduce pressure by vavuum pump 40 by this container 38 (the 2nd attracts parts).
Again, because reduce the pressure in the container 38 interior and aqueous body jars 35 simultaneously and make them be reduced to identical pressure, therefore so in these aqueous body jars 35 and between in the above-mentioned ejecting head 34, produce pressure differential hardly, the situation that aqueous body flow in the ejecting head 34 in the aqueous body jar 35 and flows out aqueous body from ejecting head 34 can not take place.So, particularly by only selectively attract to remain in the ejecting head 34 bubble and in aqueous body the molten gas of depositing, can remove them in container 38 1 sides.
If so selectively removed the bubble that remains in the ejecting head 34 and the molten gas of depositing in aqueous body, then vavuum pump 40 is quit work by control device 54, and open the atmos-valve (not drawing among the figure) that is arranged on the container 38, make in the container 38 and in the aqueous body jar 35 and get back to atmospheric pressure.
Here, though about reducing in the container 38 and the pressure in the aqueous body jar 35 by vavuum pump 40, there is no particular limitation, from productivity, preferably makes this reduced pressure treatment time about 1 minute~3 minutes.Again, remove bubble etc. effectively in order to handle by the time in this scope, even if though because of the kind of aqueous body is different, preferably also making decompression degree (vacuum) is about 0.1Pa~0.5Pa.This is because at the pressure higher than 0.5Pa, and it is difficult fully removing bubble etc. in the above-mentioned time, even if again at the pressure lower than 0.1Pa, also unlikely expectation improves the effect of removing of bubble etc.
After this, ejecting head 34 is come out in container 38, get back to the regular position that is used to spray, spray aqueous body to substrate S.
In liquid ejection method according to this blowoff 30, because after being filled to aqueous body in the ejecting head 34, reduce in the aqueous body jar 35 together and the pressure in the ejecting head 34 by vavuum pump 40, so can not take place that aqueous body flows in the aqueous body jar 35 in the ejecting head 34 and flow out the situation of aqueous body, can remove the bubble that remains in the ejecting head 34 etc. from ejecting head 34.Therefore, can be invalidly flow out aqueous body from ejecting head 34, can be easily and positively remove bubble etc., therefore can reach the purpose that reduces the cost.Again, because after so positively removing bubble etc., spray aqueous body, so can form the various inscapes that produce by this ejection etc. well from ejecting head.
Secondly, we illustrate the 2nd example of blowoff of the present invention.The 2nd example and above-mentioned the 1st example difference are not distinguish the 1st and attract parts (attracting pad 50) and the 2nd to attract parts (container 38), and constitute by same attraction parts, further do not distinguish the 1st decompressor (suction pump 51) and the 2nd decompressor (vavuum pump 40), and constitute this point by same decompressor.
That is, in the 2nd example, said vesse 38 is not set, sets attraction pad 60 as shown in Figure 4 on the position that sets container 38, further, vavuum pump 63 is connected with this attraction pad 60 by pipe arrangement 61, branched pipe 62.Because attract the 1st among pad 60 double as the present invention to attract parts and the 2nd to attract parts, so be identical with attraction pad 50 in above-mentioned the 1st example.Promptly, have as described above to have to form face 34a butt joint and cover its pad, the flexible pipe arrangement (not drawing among the figure) that is communicated with the bore portion that on this pad, forms (not drawing among the figure) and be used to make pad to move with ejecting head 34 and dock, further from the formation of the travel mechanism that ejecting head 34 leaves to ejecting head 34 with the nozzle of ejecting head 34.
Again, vavuum pump 63 double as the 1st decompressor and the 2nd decompressor are identical with vavuum pump 40 in above-mentioned the 1st example.That is, be connected, and be connected with aqueous body jar 35 by pipe arrangement 64 with above-mentioned attraction pad 60.
With this vavuum pump 63 and pipe arrangement 61 that above-mentioned attraction pad 60 is connected on aqueous body detecting sensor 53 and waste liquid tank 52 are set.Identical in these aqueous body detecting sensors 53 and waste liquid tank 52 and the 1st example, according to this formation, when flowing out remaining aqueous body from ejecting head 34, aqueous body detecting sensor 53 can detect the remaining aqueous body of outflow.
Again, in the path at it triple valve 65 is being set on this pipe arrangement 61, so pipe arrangement 61 is told branched pipe 62 in the position from triple valve 65 to attraction pad 60.
On the other hand, also with vavuum pump 63 and pipe arrangement 64 that aqueous body jar 35 is connected on, triple valve 65 is set in its path, therefore make aqueous body jar 35 switch to branched pipe 67, to atmosphere opening to atmosphere opening from the state that is connected with vavuum pump 63.
In addition, above-mentioned attraction pad 60, vavuum pump 63, aqueous body detecting sensor 53, triple valve 65 and triple valve 66 are connected with control device 68 respectively, respectively their work are controlled by this control device 68.
Secondly, we illustrate other example of liquid ejection method of the present invention according to the work of the blowoff of this formation.In addition, even if in this explanation, also there is no particular limitation as the kind of aqueous body, can be with aqueous body arbitrarily.
At first,, aqueous body is filled in the ejecting head 34, and should removes and remain in inner bubble etc., ejecting head 34 is moved to attract pad 60 1 sides before substrate S sprays aqueous body.
Again, in order to make the path that will attract pad 60 and vavuum pump 63 to couple together become path by aqueous body detecting sensor 53, and control by 68 pairs of triple valves 65 of control device, further for aqueous body jar 35 is communicated with to atmosphere opening with branched pipe 67, and triple valve 66 is controlled.
Secondly,, move and attract pad 60, this pad is docked with the nozzle formation face 34a of ejecting head 34 by control device 68 is controlled, cover airtightly it above.Then, make vavuum pump 63 work, by the pressure in the above-mentioned attraction pad 60 reduction ejecting heads 34.So, because at this moment in above-mentioned aqueous body jar 35, become atmospheric pressure, thus in this aqueous body jar 35 with attract generation pressure differential in the ejecting head 34 that pad 60 connects with being connected, therefore, aqueous body in the aqueous body jar 35 flow in the ejecting head 34, and aqueous body is filled in the ejecting head 34.
And, continue to make aqueous body to be filled in the ejecting head 34 by suction pump 63, in ejecting head 34, be full of enough aqueous bodies after, remaining aqueous body flows out from the nozzle 18 of ejecting head 34.So, by detect the aqueous body of these outflows by aqueous body detecting sensor 53, enough aqueous bodies that can detect in ejecting head 34 filling.And, when this detection signal is sent to control device 68, receive the control device 68 difference switch three-way valves 65,66 of this signal, make the path that connects attraction pad 60 and vavuum pump 63 by branched pipe 62, aqueous body jar 35 is communicated with vavuum pump 63.
Like this because when switch three-way valve 65,66, make in the ejecting head 34 with in the aqueous body jar 35 by same vavuum pump 63 and to be reduced to identical pressure, therefore so in these ejecting heads 34 and between in the aqueous body jar 35, produce pressure differential hardly, the situation that aqueous body flow in the ejecting head 34 in the aqueous body jar 35 and flows out aqueous body from ejecting head 34 can not take place.So, identical with the 1st example, particularly by only selectively attract to remain in the ejecting head 34 bubble and in aqueous body the molten gas of depositing, can remove them in vavuum pump 63 1 sides by attracting pad 60.
If so selectively remove the bubble that remains in the ejecting head 34 and in aqueous body the molten gas of depositing, then can vavuum pump 63 be quit work, and make and attract pad 60 to leave ejecting head 34 by control device 68.
Here, about reducing in the ejecting head 34 and the pressure in the aqueous body jar 35, can use and identical processing time and the processing pressure of above-mentioned the 1st example situation by vavuum pump 63.
The regular position that ejecting head 34 is got back to be used to spray sprays aqueous body to substrate S.
Even if in this liquid ejection method, because after being filled to aqueous body in the ejecting head 34, reduce in the aqueous body jar 35 together and the pressure in the ejecting head 34 by vavuum pump 63, so can not take place that aqueous body flows in the aqueous body jar 35 in the ejecting head 34 yet and flow out the situation of aqueous body, can remove the bubble that remains in the ejecting head 34 etc. from ejecting head 34.Therefore, can be invalidly flow out aqueous body from ejecting head 34, can be easily and positively remove bubble etc., therefore can reach the purpose that reduces the cost.Again, because after so positively removing bubble etc., spray aqueous body, so can form the various inscapes that produce by this ejection etc. well from ejecting head.
In addition, the present invention is not limited to above-mentioned example, only otherwise break away from and just can be carried out all changes by main idea of the present invention.For example, in above-mentioned the 1st example, also aqueous body jar 35 can be configured in the container 38, further in container 38, open aqueous body jar 35.If do like this, then when making vavuum pump 40 work, can make in the ejecting head 34 with in the aqueous body jar 35 by container 38 and be reduced to identical pressure.Also can not make the ejecting head 34 container 38 ground collections ejecting head 34 of can coming in and going out, but blowoff all is collected in the big container again.
Again, even if in the 2nd example, the attraction pad that for example also can be ready to become the attraction pad of the 1st attraction parts respectively and become the 2nd attraction parts, and/or the vavuum pump that is ready to become the vavuum pump of the 1st decompressor respectively and becomes the 2nd decompressor, by they are switched, carry out removing of the filling of aqueous body and bubble etc. respectively.
Again, even if in which kind of example, aqueous body detecting sensor 53 also can be set constitute blowoff no matter.At this moment, the parts abundant condition of time of the aqueous body of filling etc. ejecting head 34 in that can the enough the 1st attracts is tried to achieve in experiment that can be by in advance etc., attracts the parts attraction of reducing pressure according to this condition by the 1st, after this, is reduced pressure by the 2nd attraction parts.
In above-mentioned blowoff,, can form the inscape arbitrarily of electro-optical device by suitably selecting aqueous body again.For example, the metallic colloid of the formation material by will becoming organic EL and the material of metal wiring, further the various materials of microlens material and color filter materials, liquid crystal material etc. can form all key elements that constitute electro-optical device as aqueous body.Again, even if when forming the inscape of SED (Surface-Conduction Electron-Emitter Display (surface conductance electron emitter display)), also can use above-mentioned blowoff.
Secondly, we illustrate the manufacture method of electro-optical device of the present invention.
At first, as the formation example of the inscape of electro-optical device, we illustrate the manufacture method of organic El device.
Fig. 5 is a side cross-sectional view of being made the organic El device of a part of inscape by above-mentioned blowoff, and at first, we illustrate that the summary of this organic El device constitutes.In addition, the organic El device that forms here becomes an example of the electro-optical device among the present invention.
As shown in Figure 5, organic El device 301 is distributions of making general substrate (not drawing among the figure) and drive IC (not drawing among the figure) and the device that is connected with organic EL (electroluminescent) element 302 of substrate 371 formations by substrate 311, component unit 321, pixel electrode 331, unit 341, light-emitting component 351, negative electrode 361 (electrode of relative configuration) and sealing.On substrate 311, form component unit 321, on component unit 321, arrange a plurality of pixel electrodes 331.And, make memory bank (the Japanese original text is: パ Application Network, corresponding English can be bank) unit 341 (パ Application Network) between each pixel electrode 331, form clathrate.In the recess opening 344 that produces by memory bank unit 341, form light-emitting component 351.Form negative electrode 361 on whole on the top of memory bank unit 341 and light-emitting component 351, on negative electrode 361, the lamination sealing is with substrate 371.
The manufacture process that comprises the organic El device 301 of organic EL has that the memory bank unit that forms memory bank unit 341 forms operation, is used for correctly forming the plasma treatment operation of light-emitting component 351, the light-emitting component that forms light-emitting component 351 forms operation, form negative electrode 361 relative configuration electrode forming process and at negative electrode 361, the sealing process that the lamination sealing seals with substrate 371.
It is by at recess opening 344 that light-emitting component forms operation, promptly forms hole injection layer 352 and luminescent layer 353 on the pixel electrode 331, forms the operation of light-emitting component 351, possesses hole injection layer and forms operation and luminescent layer formation operation.And hole injection layer forms operation to have the 1st constituent (aqueous body) that will be used to form hole injection layer 352 and is ejected into the ejection operation of the 1st on each pixel electrode 331 and forms that operation has that the 2nd constituent (aqueous body) that will be used to form luminescent layer 353 is ejected into the ejection operation of the 2nd on the hole injection layer 352 and by dry the 2nd drying process that forms luminescent layer 353 of the 2nd constituent that makes ejection by dry the 1st drying process, the luminescent layer that forms hole injection layer 352 of the 1st constituent that makes ejection.
Form in the operation at this light-emitting component, use above-mentioned blowoff in the 2nd ejection operation in the 1st ejection operation in hole injection layer formation operation and the luminescent layer formation operation.
In making this organic El device 301, by before the ejection that is used to form each inscape, in ejecting head 34, remove bubble etc. in advance, can spray the formation material of hole injection layer and the formation material of luminescent layer respectively well from ejecting head 34, thereby can improve the reliability of the organic El device 301 that obtains.
Secondly, as the formation example of above-mentioned inscape, we illustrate the manufacture method of plasma scope.
Fig. 6 is a part of inscape that expression is made by above-mentioned blowoff, i.e. the exploded perspective view of the plasma scope of address electrode 511 and bus electrode 512a, and label 500 is plasma scopes among Fig. 6.This plasma display 500 roughly is made of the glass substrate 501 of mutually relatively configuration ground configuration and glass substrate 502 and the discharge display cells 510 that forms between them.
The a plurality of arc chambers 516 of discharge display cells 510 set in a plurality of arc chambers 516, make red arc chamber 516 (R), green arc chamber 516 (G), and such 3 arc chambers 516 of blue arc chamber 516 (B) are paired, constitute 1 pixel and are configured.
On above-mentioned (glass) substrate 501, form address electrode 511 with predetermined distance bandedly, form dielectric layer 519 in order to cover the top of these address electrodes 511 and substrate 501, further between address electrode 511,511, forming next door 515 on the dielectric layer 519 along each address electrode 511 ground.In addition, also separate (not drawing among the figure) in its assigned position upper edge of length direction and the direction of address electrode 511 quadratures on the next door 515 with predetermined distance, form basically by with the next door of the cross direction left and right sides adjacency of address electrode 511 with along extending the rectangular zone that the next door that is provided with separates with the direction of address electrode 511 quadratures, form arc chamber 516 accordingly with these rectangular zones, these rectangular zones form 3 pairs and constitute 1 pixel.Again, the inboard configuration in the rectangular zone fluorophor of dividing by next door 515 517.Fluorophor 517 sends any fluorescence in the red, green, blue, respectively at the bottom of red arc chamber 516 (R) configuration red-emitting phosphors 517 (R), at the bottom of green arc chamber 516 (G) configuration green-emitting phosphor 517 (G), at the bottom of blue arc chamber 516 (B) configuration blue emitting phophor 517 (B).
Secondly, in above-mentioned glass substrate 502 1 sides, along form a plurality of with predetermined distance bandedly by ITO (Indium Tin Oxide: the transparent display electrode 512 of Gou Chenging indium tin oxide), and in order to compensate the bus electrode 512a that high-resistance ITO formation is made of metal with the direction of previous address electrode 511 quadratures.Form to cover their dielectric layer 513 again, further form the diaphragm 514 that constitutes by MgO etc.
And; in order to make the mutually orthogonal ground of above-mentioned address electrode 511..... and show electrode 512..... the substrate 2 relative configurations of aforesaid substrate 501 and glass substrate 502 also are glued together mutually; by the space segment that is surrounded by the diaphragm 514 that forms in substrate 501, next door 515 and glass substrate 502 1 sides is carried out exhaust and encloses rare gas, form arc chamber 516.In addition, for each arc chamber 516 2 show electrode 512 of configuration is formed on the show electrode 512 that glass substrate 502 1 sides form.
Above-mentioned address electrode 511 is connected with unillustrated AC power among the figure with show electrode 512, makes it luminous by activating fluorescent body 517 on the discharge display cells 510 of each electrifying electrodes in want position, can carry out colour and show.
And, in this example,, be to form with above-mentioned blowoff 30 respectively particularly about above-mentioned address electrode 511, bus electrode 512a and fluorophor 517.Promptly, about these address electrodes 511 and bus electrode 512a, form pattern from helping them especially, be the fluent material (aqueous body) that has disperseed metallic colloid material (for example gold colloid and silver colloid) and conductive particle (for example metal microparticle) by ejection, carry out that drying and sintering forms.Again, about fluorophor 517, be to be dissolved in fluorescent material in the solvent or to be dispersed in liquid material (aqueous body) in the dispersant by ejection, carry out that drying and sintering forms.
Even if in making this plasma scope 500, by before being used to form address electrode 511, bus electrode 512a and forming the ejection of fluorophor 517, in ejecting head 34, remove bubble etc. in advance, also can spray the formation material (liquid material) of each electrode 511,512a and the formation material (liquid material) of fluorophor 517 respectively well, thereby can improve the reliability of the plasma scope 500 that obtains from ejecting head 34.
Secondly, as the formation example of above-mentioned inscape, our explanation is used for the manufacturing method of color filter of aqueous display unit.
For by above-mentioned blowoff 30, on substrate S, spray ink and make colour filter, substrate S at first is set on the assigned position on the platen 39.Here,, use to have suitable mechanical strength as substrate S, and the high transparency carrier of photopermeability.Specifically, can use transparent glass substrate, acrylic glass, plastic base, plastic foil and their surface treatment product etc.
In this example, for example on the substrate S of rectangular shape, form a plurality of color filter regions from improving productive viewpoint again, bandedly.These color filter regions, by later cut-out substrate S, can be as the colour filter that is suitable for liquid crystal indicator.In addition, respectively with the pattern of regulation, be to form and the ink of configuration R, the ink of G, the ink of B in this example, as color filter regions with well-known banding pattern so far.In addition, as the pattern of this formation, except banding pattern, also can use mosaic type and δ type or pattern etc.
In order to form this color filter regions, at first be shown in and form black matrix 152 on the face of transparency carrier S as Fig. 7 A.As the method that forms this black matrix 152, there is not the resin (preferably black) of photopermeability with specific thickness (for example about 2im) coating with methods such as spin coateds.The minimum of being surrounded by the grid of this black matrix 152 shows key element, and promptly about color filter unit 153, for example the width of X-direction is that the length of 30im, Y direction is 100im.
Secondly, shown in Fig. 7 B,, make their impacts on color filter unit 153 from above-mentioned ink gun 34 ejection ink droplets (drop) 154.About the amount of ink droplet 154 of ejection, be enough amounts of considering that heating process ink inside volume reduces.
If like this on all color filter unit 153 on the substrate S filling ink droplet 154, then for substrate S being heated to set point of temperature (for example about 70 degree) and carrying out heat treated with heater.By this heat treated, the ink solvent evaporation, the volume of ink reduces.When this volume reduces when rapid, repeat ink ejection operation and heating process, till the thickness that obtains enough ink films as colour filter.By this processing, make to be included in solvent evaporation in the ink, the final only residual solid formation branch that is included in the ink is carried out to membranization, forms the colour filter 55 shown in Fig. 7 C.
Secondly, make substrate S planarization, and, be shown in substrate S as Fig. 7 D and go up formation diaphragm 56 covering colour filter 55 and black matrix 152 in order to protect colour filter 55.In order to form this diaphragm 56, can adopt the method for whirl coating, roller coating method, longitudinal cutting method etc., but identical with the situation of colour filter 55, also can enough blowoffs shown in Figure 1 30.
Secondly, be shown in as Fig. 7 E on whole of this diaphragm 56, with formation nesa coatings 57 such as sputtering method and vacuum evaporation methods.After this, make nesa coating 57 form pattern, make pixel electrode 58 form pattern accordingly with above-mentioned color filter unit 153.
Make in the manufacture process of colour filter by blowoff 30 this, by before the ejection that is used to form each colour filter 55, in ejecting head 34, remove bubble etc. in advance, the formation material (ink droplet 154) of each colour filter 55 can be sprayed from ejecting head 34 well, thereby the reliability of the colour filter that obtains can be improved.
Secondly, as the formation example of above-mentioned inscape, we illustrate the formation method of conducting film Wiring pattern (metal wiring pattern).Fig. 8 is the flow diagram of an example of the formation method of expression conducting film Wiring pattern.
In Fig. 8, the pattern formation method relevant with this example has the operation (step S1) with the substrate of the drop of clean configuration fluent materials such as regulation solvent, the preventing hydration treatment process (step S2) of the part of the surface treatment procedure of formation substrate, constitute the water proofing property control treatment process (step S3) of adjustment through the part of the surface treatment procedure of the water proofing property of the substrate surface of preventing hydration processing, configuration comprises the drop that the conducting film distribution forms the fluent material of using material according to drop ejection method on surface treated substrate, describes the material arrangement step (step S4) of (formation) film figure, the dry treatment process in centre (step S5) that comprises the hot light processing of removing a part that is configured in the solvent composition of fluent material on the substrate at least, described the sintering circuit (step S7) of the substrate of predetermined pattern with sintering.In addition, after the dry treatment process in centre, judge whether describe (the step S6) of predetermined pattern that be through with, if be through with pattern plotter then carry out sintering circuit, on the other hand, if do not finish pattern plotter then carry out material arrangement step.
Secondly, our explanation sprays the material arrangement step (step S4) of method according to the drop that carries out with above-mentioned blowoff 30.
This routine material arrangement step is to dispose on substrate S by the droplet jetting head 34 by above-mentioned blowoff 30 to comprise the drop that the conducting film distribution forms the fluent material of using material, forms the operation of the film figure (Wiring pattern) of a plurality of wire on substrate S abreast.Fluent material is to be dispersed in aqueous body in the dispersant with form electrically conductive microparticle with the metal of material etc. as the conducting film distribution.In the following description, the situation of we explanation 3 the 1st of formation, the 2nd and the 3rd film figure (linear pattern) W1, W2 and W3 on substrate S.
Fig. 9 A, 9B, 10 and 11 are figure of an example of the order of configuration drop on the substrate S that is used to illustrate in this example.In these figure, on substrate S, set the bitmap have as the pixel sub-district of cancellate a plurality of unit areas of the drop that has disposed fluent material.Here, with 1 pixel cell setting be square.And, for corresponding, form region R 1, R2, R3 and set the 1st, the 2nd and the 3rd pattern that forms the 1st, the 2nd and the 3rd film figure W1, W2 and W3 with the regulation pixel sub-district in these a plurality of pixels sub-districts.Set these a plurality of patterns abreast in X-direction and form region R 1, R2, R3.In addition, in Fig. 9 A~Figure 11, pattern forms region R 1, R2, R3 are the zones that draws oblique line.
Set by the drop of the fluent material of the ejection of the 1st nozzle 34A in a plurality of nozzles in the ejecting head 34 that is arranged on droplet ejection apparatus for configuration in the formation of the 1st pattern on the substrate S region R 1 again.Equally, set by the drop of the fluent material of the 2nd, the 3rd nozzle 34B, 34C in a plurality of nozzles in the ejecting head 10 that is arranged on droplet ejection apparatus ejection for configuration among the formation of the 2nd, the 3rd pattern on substrate S region R 2, the R3.That is,, and nozzle (ejection unit) 34A, 34B, 34C are set for to form among region R 1, R2, the R3 each corresponding with the 1st, the 2nd and the 3rd pattern.And ejecting head 34 forms a plurality of droplet configuration among region R 1, R2, the R3 on each a plurality of pixel locations at a plurality of patterns of setting in turn.
Further, in order to form at the 1st, the 2nd and the 3rd pattern in each of region R 1, R2, R3, form and to form the 1st, the 2nd and the 3rd film figure W1, W2, the W3 that region R 1, R2, R3 form at these patterns from the 1st sidepiece pattern Wa as the side (X one side) of live width direction, secondly, formation is as the 2nd sidepiece pattern Wb of opposite side (+X one side), after forming the 1st, the 2nd sidepiece pattern Wa, Wb, form central pattern Wc, and set as live width direction middle body.
In this example, each among each film figure (linear pattern) W1~W3, and then each pattern forms among region R 1~R3 each and have identical live width L is set in this live width L on the size suitable with 3 pixel sub-districts.Again, also in the space segment between each pattern each is set on the identical width S, also this width S is set on the size suitable with 3 pixel sub-districts.And, will be set at interval as the nozzle at the interval of nozzle 34A~34C on the size suitable with 6 pixel sub-districts.
In the following description, the ejecting head 34 1 with nozzle 34A, 34B, 34C in the face of substrate S carry out Y-axis to scanning simultaneously spray drop.And, in explanation, when scanning for the 1st time, add on the drop of configuration " 1 " with Fig. 9 A~Figure 11, at the 2nd time, the 3rd time ... add " 2 ", " 3 " ... " n " on the drop of configuration during the n time scanning.
Shown in Fig. 9 A, when the 1st scanning, form the 1st sidepiece pattern Wa in order to form among region R 1, R2, the R3 each about the 1st, the 2nd and the 3rd pattern, one side forms presumptive area at the 1st sidepiece pattern and vacates 1 pixel sub-district one side and dispose drop simultaneously by the 1st, the 2nd and the 3rd nozzle 34A, 34B, 34C.In addition, when from each nozzle 34A, 34B, 34C ejection drop, before this ejection, in ejecting head 34, remove bubble etc. in advance.Here, the drop that is configured on the substrate S passes through impact on substrate S, moistening expansion on substrate S.That is, shown in the circle among Fig. 9 A, the drop of impact on substrate S has than 1 big diameter C in pixel sub-district and carries out moistening expansion like that.(1 pixel sub-district) is configured because drop is opened predetermined distance in the Y direction sky, so in order not make the drop that is configured on the substrate S overlapping and set.By doing like this, can prevent from fluent material to be set superfluously on substrate S in Y direction, prevent protuberance.
In addition, in Fig. 9 A in order not make drop when being configured on the substrate S overlapping and be configured, but also can be overlapping a little and be configured in order to make drop.Again, sky is opened ground, 1 pixel sub-district configuration drop here, but also can only emptyly open the suitable arranged spaced drop in pixel sub-district with any number more than 2.At this moment, the scanning work of 34 couples of substrate S of ejecting head and configuration effort (ejection work) increase, and preferably interpolation is between the drop on the substrate.
Because desired water proofing property is processed on the surface of substrate S in advance, can suppress to be configured in the undue expansion of the drop on the substrate S by step S2 and S3 again.Therefore, can positively pattern form be controlled in the good state and easily and carry out thick filmization.
Fig. 9 B be when by the 2nd scanning from ejecting head 34 with droplet configuration the ideograph on substrate S the time.In addition, in Fig. 9 B, when the 2nd scanning, add " 2 " on the drop of configuration.The 2nd when scanning, between the drop " 1 " of interpolation configuration when the 1st scanning and dispose drop simultaneously by each nozzle 34A, 34B, 34C.And drop is continuous in the 1st time and the 2nd time scanning and configuration effort, forms formation the 1st sidepiece pattern Wa in each of region R 1, R2, R3 at the 1st, the 2nd and the 3rd pattern.Here, drop " 2 " is also played moistening expansion on substrate S, and the part of drop " 2 " overlaps with the part of drop " 1 " on before being configured in substrate S.Specifically, the part of drop " 2 " overlaps on drop " 1 ".In addition, in the 2nd scanning, when from each nozzle 34A, 34B, 34C ejection drop, before this ejection, in ejecting head 34, remove bubble etc. in advance.
Here, after having disposed the drop that is used to form the 1st sidepiece pattern Wa on the substrate S,, can carry out dry handle (the step S5) in centre with corresponding for the needs of removing dispersant.Middle drying is handled except the general heat treatment of the heater of for example using heating plate, electric furnace and air-heater etc., also can be to handle with the light of bulb ageing.
Secondly, ejecting head 34 and the substrate S sizable distance with 2 pixel sub-districts that on X-direction, only relatively moves.Here ejecting head 34 moves and 2 distances that the pixel sub-district is suitable in+directions X on stage for substrate S.Accompany therewith, nozzle 34A, 34B, 34C also move.And ejecting head 34 carries out the 3rd scanning.Therefore, shown in Figure 10 A, the 1st sidepiece pattern Wa is vacated the drop " 3 " that compartment of terrain configuration simultaneously on substrate S is used to form the 2nd sidepiece pattern Wb of a part that constitutes each film figure W1, W2, W3 in X-direction by each nozzle 34A, 34B, 34C.Here, drop " 3 " also is configured in Y direction with vacating 1 pixel sub-district.In addition, in the 3rd scanning, when from each nozzle 34A, 34B, 34C ejection drop, before this ejection, also in ejecting head 34, remove bubble etc. in advance.
Figure 10 B be when by the 4th scanning from ejecting head 34 with droplet configuration the ideograph on substrate S the time.In addition, in Figure 10 B, when scanning, the 4th adds on the drop of configuration " 4 ".When the 4th scans, for interpolation between the drop " 3 " of the 3rd when scanning configuration and dispose drop simultaneously by each nozzle 34A, 34B, 34C.And drop is continuous in scanning of the 3rd time and the 4th and configuration effort, forms formation the 2nd sidepiece pattern Wb in each of region R 1, R2, R3 at pattern.Here, the part of drop " 4 " overlaps with the part of drop " 3 " on before being configured in substrate S.Specifically, the part of drop " 4 " overlaps on drop " 3 ".In addition, in this 4th scanning, when from each nozzle 34A, 34B, 34C ejection drop, before this ejection, also in ejecting head 34, remove bubble etc. in advance.
Here, after having disposed the drop that is used to form the 2nd sidepiece pattern Wb on the substrate S,, can carry out the dry processing in centre with corresponding for the needs of removing dispersant.
Secondly, ejecting head 34 only moves and 1 distance that the pixel sub-district is suitable on-X-direction for substrate S.Together nozzle 10A, 10B, 10C also only move and 1 distance that the pixel sub-district is suitable on-X-direction therewith.And ejecting head 34 carries out the 5th scanning.Therefore, shown in Figure 10 A, configuration simultaneously is used to form the drop " 5 " of the central pattern Wc of a part that constitutes each film figure W1, W2, W3 on substrate.Here, drop " 5 " also is configured in Y direction with vacating 1 pixel sub-district.Here, the part of drop " 5 " overlaps with drop " 1 ", the part of " 3 " on before being configured in substrate S.Specifically, the part of drop " 5 " overlaps on drop " 1 ", " 3 ".In addition, in this 5th scanning, when from each nozzle 34A, 34B, 34C ejection drop, before this ejection, also in ejecting head 34, remove bubble etc. in advance.
Figure 10 B be when by the 6th scanning from ejecting head 34 with droplet configuration the ideograph on substrate S the time.In addition, in Figure 10 B, when the 6th scanning, add " 6 " on the drop of configuration.The 6th when scanning, between the drop " 5 " that when the 5th scans, disposes for interpolation and dispose drop simultaneously by each nozzle 10A, 10B, 10C.And drop is continuous in the 5th and the 6th time scanning and configuration effort, forms the central pattern Wc of formation in each of region R 1, R2, R3 at pattern.Here, the part of drop " 6 " overlaps with the part of drop " 5 " on before being configured in substrate S.Specifically, the part of drop " 6 " overlaps on drop " 5 ".Further, the part of drop " 6 " overlaps on the drop " 2 " formerly be configured on the substrate S, " 4 ".In addition, in the 6th scanning, when from each nozzle 34A, 34B, 34C ejection drop, before this ejection, also in ejecting head 34, remove bubble etc. in advance.
According to above explanation, in forming each of region R 1, R2, R3, each pattern forms film figure W1, W2, W3.
As described above, when forming the film figure W1, the W2 that dispose a plurality of drops among region R 1, R2, the R3 in turn and form mutually same shape roughly, W3 at pattern, because set the configuration sequence that each pattern is formed each a plurality of EDF cell configuration drops among region R 1, R2, the R3 in the same manner, even if so in the situation that is configured for a part that makes each drop " 1 "~" 6 " overlaps, because the form of this coincidence is identical in each film figure W1, W2, W3, so can make the outward appearance of each film figure W1, W2, W3 identical.Thereby, can suppress to take place between each film figure W1, W2, the W3 apparent inhomogeneous.
And, because about each film figure W1, W2, W3, the configuration sequence of drop is identical, and because be identical about the droplet configuration (the coincidence form between the drop) of each film figure W1, W2, W3, so can suppress to take place apparent inhomogeneous.
Further because will be in each film figure W1, W2, W3 the coincidence status between the drop be set at identical, so can make the film thickness distribution of each film figure roughly the same.Thereby when this film figure is during in the repeat patterns that the face direction of substrate repeats, specifically, for example when with the pixel of display unit is corresponding a plurality of pattern being set, each pixel has identical film thickness distribution.Thereby, can bring into play same function in each position of the face direction of substrate.
Again, because after forming the 1st, the 2nd sidepiece pattern Wa, Wb, configuration is used to imbed drop " 5 ", " 6 " that form central pattern Wc between them, so can roughly be formed uniformly the live width of each film figure W1, W2, W3.Promptly, when after forming central pattern Wc on the substrate S, configuration is used to form sidepiece pattern Wa, the drop of Wb " 1 ", " 2 ", " 3 ", when " 4 ", because the phenomenon of the central pattern Wc that before forms on substrate S takes place these drops are moved to, so control each film figure W1, W2, the live width of W3 is difficult, but as this example, because on substrate S, form sidepiece pattern Wa earlier, behind the Wb, configuration is used to imbed the drop " 5 " that forms central pattern Wc between them, " 6 " are so can control each film figure W1 accurately, W2, the live width of W3.
In addition, also can after forming central pattern Wc, form sidepiece pattern Wa, Wb.At this moment,, implement identical droplet configuration order, can suppress to take place between each pattern apparent inhomogeneous by about each film figure W1~W3.
Even if in the situation that forms this conducting film Wiring pattern (metal wiring pattern),, in ejecting head 34, remove bubble etc. in advance, also can spray drop well, thereby can improve the reliability of the conducting film Wiring pattern that obtains by before ejection.
Secondly, as the formation example of above-mentioned inscape, we illustrate method for manufacturing micro-lens.
In this example, at first shown in 12A, on substrate S, spray the drop 22a that constitutes by the photopermeability resin, apply them by the ejecting head 34 of above-mentioned blowoff 30.In addition, when from each ejecting head 34 ejection drop 22a, before this ejection, in ejecting head 34, remove bubble etc. in advance.
As substrate S, when the microlens application that will obtain during in blooming that for example screen is used, photopermeability sheet or the photopermeability film that can use the transparent resin (photopermeability resin) by the cellulose-based resin of cellulose acetate and propyl cellulose etc., polyvinyl chloride, polyethylene, polypropylene, polyester etc. to constitute.As substrate, also can use the substrate of sucking transparent materials (photopermeability material) formations such as sulfone, amorphous polyene, mylar's fat, poly methyl methacrylate by glass, polycarbonate, polyarylate, polyethers again.
As the photopermeability resin, can enumerate poly methyl methacrylate, poly-hydroxyethyl methacrylate, the allyl resin of poly-cyclohexyl methyl acrylate etc., poly-diethylene glycol bis-allyl carbonate, the allyl base system resin of Merlon etc., methacryl resin, polyurethane is a resin, polyester is a resin, the polyvinyl chloride resin, polyvinyl acetate is a resin, cellulose-based resin, polyamide, fluorine resin, acrylic resin, the thermoplasticity of polystyrene resin etc. or thermosetting resin can mix use with a kind of in them or with multiple.
But, in this example,, can use the resin of radiation exposure constrictive type particularly as the photopermeability resin.The resin of this radiation exposure constrictive type is to allocate the resin that the photopolymerization of diimidazole quinoline based compound etc. begins agent in above-mentioned photopermeability resin into, begins agent by allocating this photopolymerization into, is endowed the radiation exposure hardening.Radioactive ray are luminous ray, ultraviolet ray, the general name of far ultraviolet, X ray, electron ray etc., particularly general use ultraviolet ray.
With the corresponding drop 22a that on substrate S, sprays the photopermeability resin of one or more this radiation exposure constrictive types of desired single lenticule size.So, the photopermeability resin 23 that is made of this drop 22 is because its surface tension becomes the convex (roughly hemispherical) shown in Figure 12 A.Therefore, if to the single lenticule ejection that will form and the photopermeability resin of coating ormal weight, further considerably carrying out this coating with desired lenticule number handles, then use these photopermeability resins 23 of radiation exposure of ultraviolet ray etc., shown in Figure 12 B, make their sclerosis become hardenite 23a.In addition, though also different with the suitable capacity of the drop 22a that sprays from ejecting head 34 because of the ink material of ejecting head 34 and ejection, be about 1pL~20pL usually.
Secondly, from ejecting head 34, a plurality of drop 22b that disperse light diffusing particulate 26 of the ejection number of wanting on each of these hardenites 23a are on surface attached to hardenite 23a shown in Figure 12 C.As light diffusing particulate 26, can enumerate the particulate of silica, oxidation Al, titanium dioxide, calcium carbonate, hydroxide Al, allyl resin, organic siliconresin, polystyrene, urea resin and formaldehyde condensation product etc., can mix use with a kind of in them or with multiple.But,, when this particulate has photopermeability, need make its refractive index different fully with the refractive index of above-mentioned photopermeability resin for light diffusing particulate 26 is given full play to light diffusing.So, when light diffusing particulate 26 has photopermeability, in order to satisfy this condition, corresponding suitably selected and use light diffusing particulate with the photopermeability resin that uses.
This light diffusing particulate 26 is by being dispersed in appropriate solvent (solvent that for example can be used for the photopermeability resin) in advance, and adjustment can be from the ink of ejecting head 34 ejections.At this moment, with interfacial agent the surface of light diffusing particulate 26 is covered processing, perhaps processing by carrying out covering with melting resin, improve the dispersiveness of light diffusing particulate 26 to solvent, be gratifying, by this processing, can good flowability is additional to light diffusing particulate 26 from the ejection of ejecting head 34.In addition, as being used to carry out the surface-treated interfacial agent, can spread that the kind of particulate 24 is corresponding suitably selects and use cation system, anion system, nonionic system, both sexes, silicon system, fluororesin system etc. with light.
Again, as this light diffusing particulate 26, the most handy its particle diameter more than 200nm, the particulate that 500nm is following.If in such scope, then since particle diameter more than 200nm, can guarantee its light diffusing well, again since particle diameter below 500nm, can spray well from the nozzle of ejecting head 34.
In addition,, both can use the ejecting head identical with the ejecting head 34 of the drop 22a that sprays the photopermeability resin about the ejection of the drop 22b of dispersed light diffusivity particulate 26, also can be with different ejecting heads.When identical ejecting head, the device that comprises ejecting head 34 is constituted simplify.On the other hand, when with different ejecting head, because for every kind of ink (ink that constitutes by the photopermeability resin and the ink that constitutes by photopermeability particulate 24) can enough special uses ejecting head, so when switching the ink of coating, do not need cleaning of carrying out ejecting head etc., can improve productivity.
After this, by carrying out heat treated, reduced pressure treatment or heating reduced pressure treatment, make the solvent evaporation among the drop 22b of dispersed light diffusivity particulate 24.So, by surface by the softening hardenite 23a of the solvent among the drop 22b, adhere to light diffusing particulate 26 there, be accompanied by the solvent evaporation, rehardening in the surface of hardenite 23a, makes light diffusing particulate 24 be fixed on the surface of photopermeability hardening of resin body 23a.And, shown in Figure 12 D, make light diffusing particulate 24 be dispersed in the lenticule of the present invention 25 of its surface portion by light diffusing particulate 24 being fixed on the surface of hardenite 23a, can accessing like this.
Even if in the manufacture method of this lenticule 25, also, in ejecting head 34, remove bubble etc. in advance by before this ejection, drop 22a, drop 22b can be sprayed well, thereby the reliability of the lenticule 25 that obtains can be improved.
Again, because form convex (roughly hemispherical) lenticule 25 that constitutes by photopermeability resin 23 and light diffusing particulate 24 with ink-jet method, so not needing does not almost have the loss of material again as the shaping dies in the situation of die forming method and injection molding method yet.Therefore, can reach the purpose that reduces manufacturing cost.Again, because 25 one-tenth convexs of the lenticule that obtains (roughly hemispherical), so can make this lenticule for example in 360 ° vast angular range (direction), roughly carry out the light diffusion equably, and, can give the lenticule that obtains high diffusion by light diffusing particulate 26 is implemented compoundization.
Secondly, as the formation example of above-mentioned inscape, our explanation has the manufacture method of the image display apparatus of electronic emission element.
Matrix 70A shown in Figure 13 A and the 13B is through the processing of being undertaken by above-mentioned blowoff 30, becomes the substrate of electron source base board 70B of the image display apparatus of a part that forms inscape.Matrix 70A has a plurality of unit 78 that are ejected of rectangular configuration.
Specifically, matrix 70A has substrate 72, is positioned at preventing sodium diffusion layer 74, be positioned at a plurality of element electrode 76A, the 76B that prevent on the sodium diffusion layer 74, be positioned at a plurality of metal wiring 79A on a plurality of element electrode 76A and be positioned at a plurality of metal wiring 79B on a plurality of element electrode 76B on the substrate 72.Among a plurality of metal wiring 79A each has the shape of extending in Y direction.Among a plurality of metal wiring 79B each has the shape of extending in X-direction.Because between metal wiring 79A and metal wiring 79B, form dielectric film 75, so metal wiring 79A and metal wiring 79B are electric insulations.
The part that comprises 1 couple of element electrode 76A and element electrode 76B is corresponding with 1 image region.1 couple of element electrode 76A only leaves predetermined distance mutually with element electrode 76B and is preventing relative configuration on the sodium diffusion layer 74.Be electrically connected with corresponding metal wiring 79A with certain image region corresponding elements electrode 76A.Be electrically connected with corresponding metal wiring 79B with this image region corresponding elements electrode 76B again.In addition, in this manual, also with substrate 72 with prevent that the part souvenir that sodium diffusion layer 74 lumps together from being support substrate.
In each image region of matrix 70A, expose between the part of the part of element electrode 76A, element electrode 76B and element electrode 76A and the element electrode 76B prevent sodium diffusion layer 74A and to be ejected unit 78 corresponding.More particularly, being ejected unit 78 is the zones that will form conductive membrane 411F (please refer to Figure 14 B), and conductive membrane 411F forms for the part of cladding element electrode 76A, the part of element electrode 76B and the gap between element electrode 76A, the 76B.Shown in dotted line among Figure 13 B, the shape that is ejected unit 78 in this example is circular.
Matrix 70A shown in Figure 13 B disposes abreast with the imaginary plane of being stipulated by X-direction and Y direction.And a plurality of line directions that are ejected the matrix of unit 78 formation are parallel with Y direction with X-direction respectively directions with column direction.In matrix 70A, it is arranged side by side with its sequence period ground in X-direction to be ejected unit 78.Further, be ejected unit 78 and line up 1 row with predetermined distance in Y direction.
Be ejected that the interval LX along X-direction is about 190im between the unit 78.Be ejected above-mentioned interval and the above-mentioned size that is ejected the unit between the unit 78, in the high visible TV of about 40 inches sizes, corresponding with the interval between the image region.
Above-mentioned blowoff 30 is to be ejected the device of unit 78 ejections as the conductive membrane material 411 of liquid material (aqueous body) to each of the matrix 70A of Figure 13 A, 13B.As this conductive membrane material 411, for example can use organic palladium solution.
In the process with blowoff 30 shop drawings image display devices, at first, on the substrate 72 that is formed by soda-lime glass etc., formation is with silica (SiO 2) prevent sodium diffusion layer 74 as main component.Specifically, on substrate 72, form the SiO of thickness 1im with sputtering method 2Film is prevented sodium diffusion layer 74.Secondly, preventing on the sodium diffusion layer 74, forming the titanium layer of thickness 5nm with sputtering method or vacuum evaporation method.And, with photoetching technique and lithographic technique,, form many to the mutual 1 couple of element electrode 76A and the element electrode 76B that only leaves predetermined distance from this titanium layer.After this, use fabrography, prevent on the sodium diffusion layer 74 and a plurality of element electrode 76A on silver coating (Ag) cream carry out sintering, be formed on many strip metals distribution 79A that Y direction is extended.Secondly, use fabrography, the coating glass cream carries out sintering on the part of each metal wiring 79A, forms dielectric film 75.And, use fabrography, prevent on the sodium diffusion layer 74 and a plurality of element electrode 76B on silver coating (Ag) cream carry out sintering, be formed on many strip metals distribution 79B that X-direction is extended.In addition, when making metal wiring 79B, for by dielectric film 75, metal wiring 79B intersects with metal wiring 79A and applies Ag cream.By above such operation, obtain the matrix 70A shown in Figure 13 A, the 13B.
Secondly, the oxygen plasma treatment by under atmospheric pressure makes matrix 70 lyophilyizations.By this processing, make the surperficial lyophilyization of the support substrate that exposes between the part on surface of a part, element electrode 76B on the surface of element electrode 76A and element electrode 76A and the element electrode 76B.And these surfaces become and are ejected unit 78.In addition, relevant with material, even if do not carry out surface treatment as described above, also can access the surface that presents desired lyophily.In this case, even if do not implement above-mentioned surface treatment, the surface that prevents sodium diffusion layer 74 of exposing between the part on surface of a part, element electrode 76B on the surface of element electrode 76A and element electrode 76A and the element electrode 76B is become be ejected unit 78.
Formation is ejected the matrix 70A of unit 78, by Handling device 470, is transported on the stand 106 of blowoff 30.And, shown in Figure 14 A, blowoff 30, in order to form conductive membrane 411F being ejected on unit 78 all, and from ejecting head 34 ejection conductive membrane materials 411.In addition, when this conductive membrane material 411 of ejection, before ejection, in ejecting head 34, remove bubble etc. in advance.
In this example, for make impact the liquid-drop diameter that is ejected the conductive membrane material 411 on the unit 78 at 6im in the scope of 80im, and spray from ejecting head 34.When being ejected of matrix 70A forms the layer of conductive membrane material 411 on unit 78 all, Handling device 470 makes matrix 70A be positioned at drying device 450.And, after making conductive membrane material 411 bone dries that are ejected on the unit 78, obtain on the unit 78 the conductive membrane material 411F of palladium oxide being ejected as main component.So, in each pixel region, the conductive membrane 411F that prevents sodium diffusion layer 74 that exposes between the part of formation cladding element electrode 76A, the part of element electrode 76B and element electrode 76A and the element electrode 76B.
Secondly, between element electrode 76A and element electrode 76B, add the assigned voltage of pulse type, on the part of conductive membrane 411F, form electron emission unit 411D.In addition, be preferably under the organic matter atmosphere and between element electrode 76A and element electrode 76B, add voltage respectively under the vacuum condition.This is because if do like this, then can make from the electronic transmitting efficiency of electron emission unit 411D higher.Element electrode 76A, corresponding elements electrode 76B and the conductive membrane 411F that is provided with electron emission unit 411D are electronic emission elements.Again, each electronic emission element is corresponding with each pixel region.
By above operation, as shown in Figure 14B, matrix 70A becomes electron source base board 70B.
Secondly, shown in Figure 14 C,, obtain having the image display apparatus 170 of electronic emission element by electron source base board 70B and aforesaid substrate 70C being glued together with well-known method.Aforesaid substrate 70C has glass substrate 82, a plurality of unit and fluorescence units 84 of rectangular configuration on glass substrate 82 and cover the sheet metal 86 of a plurality of unit and fluorescence units 84.Sheet metal 86 works as the electrode that is used to quicken from the electron beam of electron emission unit 411D.For make in a plurality of electron emission unit each with a plurality of unit and fluorescence units 84 in each relative configuration, and electron source base board 70B is overlapped with aforesaid substrate 70C position.Make between electron source base board 70B and the aforesaid substrate 70C and keep vacuum again.
Even if in the manufacture method of the image display apparatus that has this electronic emission element, by before ejection, in ejecting head 34, remove bubble etc. in advance, also can spray conductive membrane material 411 well, so can improve the reliability of the image display apparatus that obtains.
Secondly, our explanation is formed an example of the electronic equipment of a part of inscape by above-mentioned blowoff.
Figure 15 is the oblique view of expression as the portable phone of an example of this electronic equipment.Label 1000 expression portable phone bodies in Figure 15, the expression unit that label 1001 is represented with above-mentioned organic EL (organic El device 301).
Because electronic equipment shown in Figure 15 (portable phone) has the expression unit 1001 that is made of above-mentioned organic EL,, again, can form the inscape of expression unit 1001 well so can reach the purpose that reduces cost.

Claims (9)

1, a kind of liquid jet device, have ejecting head and storage and supply with the aqueous body jar of the aqueous body of this ejecting head, above-mentioned ejecting head has cavity, the nozzle that is communicated with this cavity of storing aqueous body and is used for being stored in by the said nozzle ejection blowoff of the aqueous body in the above-mentioned cavity, it is characterized in that: have
Cover the 1st of said nozzle and attract parts;
The 1st decompressor, it attracts parts to be connected with the 1st, by the 1st pressure that attracts in the parts reduction ejecting head;
Cover the 2nd of said nozzle and attract parts; With
The 2nd decompressor, it attracts parts to be connected with the 2nd, by the 2nd pressure that attracts in the parts reduction ejecting head, thereby and with above-mentioned aqueous body jar in be communicated with the pressure that reduces in this aqueous body jar.
2, the described liquid jet device of claim 1 is characterized in that: with the above-mentioned the 1st an opposite side that attracts the ejecting head of parts, the aqueous body detecting sensor of the aqueous body that detection flows out from said nozzle is set.
3, claim 1 or 2 described liquid jet devices is characterized in that: the heater that the aqueous body that adds heat-storage is set in the above-mentioned aqueous body jar.
4, the described liquid jet device of claim 1 is characterized in that: above-mentioned the 2nd attraction parts are the containers that can hold above-mentioned ejecting head at least.
5, power requires 4 a described liquid jet device, it is characterized in that: above-mentioned the 2nd decompressor has in the container that becomes above-mentioned the 2nd attraction parts and is reduced to the formation of uniform pressure in the above-mentioned aqueous body jar.
6, the described liquid jet device of claim 1 is characterized in that: the above-mentioned the 1st attracts parts and the 2nd to attract parts to be made of same attraction parts, and above-mentioned the 1st decompressor and the 2nd decompressor are made of same decompressor.
7, a kind of liquid ejection method sprays aqueous body by blowoff,
Above-mentioned blowoff has: ejecting head, and it has cavity, the nozzle that is communicated with this cavity of storing aqueous body and is used for being stored in by the said nozzle ejection blowoff of the aqueous body in the above-mentioned cavity; With the aqueous body jar of storing the aqueous body of supplying with this ejecting head,
And have:
The 1st attracts parts, and it is that nozzle carries out airtight covering to the formation of the nozzle in above-mentioned ejecting head face at least; The 1st decompressor, it attracts parts to be connected with the 1st, by the 1st pressure that attracts in the parts reduction ejecting head; The 2nd attracts parts, and it is that nozzle carries out airtight covering to the formation of the nozzle in above-mentioned ejecting head face at least; With the 2nd decompressor, it attracts parts to be connected with the 2nd, attracts parts to reduce pressure in the ejecting head by the 2nd, and with above-mentioned aqueous body jar in be communicated with pressure in this aqueous body jar of reduction,
It is characterized in that: this liquid ejection method has:
Adopt the above-mentioned the 1st to attract parts to cover the nozzle formation face of above-mentioned ejecting head and the operation that this nozzle forms the nozzle of face,
Attract parts to reduce pressure in the ejecting head by the 1st decompressor by the above-mentioned the 1st, aqueous body be filled to operation in this ejecting head,
After being filled to aqueous body in the above-mentioned ejecting head, adopt the above-mentioned the 2nd to attract parts to cover the nozzle formation face of above-mentioned ejecting head and the operation that this nozzle forms the nozzle of face,
Reduce pressure in the above-mentioned aqueous body jar by the 2nd decompressor, and by the above-mentioned the 2nd attract parts reduce the pressure in the ejecting head operation and
Behind the pressure in reducing ejecting head, spray the operation of aqueous body from this ejecting head.
8, a kind of electro-optical device, it is characterized in that: adopt liquid jet device to form at least a portion of described electro-optical device, above-mentioned liquid jet device has: ejecting head, and it has cavity, the nozzle that is communicated with this cavity of storing aqueous body and is used for being stored in by the said nozzle ejection blowoff of the aqueous body in the above-mentioned cavity; With the aqueous body jar of storing the aqueous body of supplying with this ejecting head,
And have: the 1st attracts parts, and it is that nozzle carries out airtight covering to the formation of the nozzle in above-mentioned ejecting head face at least; The 1st decompressor, it attracts parts to be connected with the 1st, by the 1st pressure that attracts in the parts reduction ejecting head; The 2nd attracts parts, and it is that nozzle carries out airtight covering to the formation of the nozzle in above-mentioned ejecting head face at least; With the 2nd decompressor, it attracts parts to be connected with the 2nd, by the 2nd pressure that attracts in the parts reduction ejecting head, and with above-mentioned aqueous body jar in be communicated with the pressure that reduces in this aqueous body jar.
9, a kind of manufacture method of electro-optical device, at least a portion of this electro-optical device adopts blowoff to form, above-mentioned blowoff has: ejecting head, and it has cavity, the nozzle that is communicated with this cavity of storing aqueous body and is used for being stored in by the said nozzle ejection blowoff of the aqueous body in the above-mentioned cavity; With the aqueous body jar of storing the aqueous body of supplying with this ejecting head,
And have: the 1st attracts parts, and it is that nozzle carries out airtight covering to the formation of the nozzle in above-mentioned ejecting head face at least; The 1st decompressor, it attracts parts to be connected with the 1st, by the 1st pressure that attracts in the parts reduction ejecting head; The 2nd attracts parts, and it is that nozzle carries out airtight covering to the formation of the nozzle in above-mentioned ejecting head face at least; With the 2nd decompressor, it attracts parts to be connected with the 2nd, by the 2nd pressure that attracts in the parts reduction ejecting head, and with above-mentioned aqueous body jar in be communicated with the pressure that reduces in this aqueous body jar,
This manufacture method has:
Adopt the above-mentioned the 1st to attract parts to cover the nozzle formation face of above-mentioned ejecting head and the operation that this nozzle forms the nozzle of face,
Attract parts to reduce pressure in the ejecting head by the 1st decompressor by the above-mentioned the 1st, aqueous body be filled to operation in this ejecting head,
After being filled to aqueous body in the above-mentioned ejecting head, adopt the above-mentioned the 2nd to attract parts to cover the nozzle formation face of above-mentioned ejecting head and the operation that this nozzle forms the nozzle of face,
Reduce pressure in the above-mentioned aqueous body jar by the 2nd decompressor, and by the above-mentioned the 2nd attract parts reduce the pressure in the ejecting head operation and
Behind the pressure in reducing ejecting head, spray the operation of aqueous body from this ejecting head.
CN 200310101366 2002-10-17 2003-10-15 Liquid jet device Expired - Fee Related CN1267279C (en)

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US8459786B2 (en) 2008-08-29 2013-06-11 Seiko Epson Corporation Liquid ejecting apparatus for eliminating and suppressing generation of air bubbles
CN105437772A (en) * 2015-12-17 2016-03-30 重庆宏劲印务有限责任公司 Inkjet printer nozzle cleaning device

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EP1938906B1 (en) * 2005-10-20 2016-12-07 Tokuyama Corporation Method for removing mixed air in coating liquid
JP2010076413A (en) * 2007-12-11 2010-04-08 Seiko Epson Corp Liquid supply device and liquid jetting apparatus
US8827392B2 (en) * 2011-12-28 2014-09-09 Seiko Epson Corporation Liquid ejecting apparatus and maintenance method thereof
KR102288108B1 (en) * 2013-10-05 2021-08-09 무사시 엔지니어링 가부시키가이샤 Method and device for filling of liquid material

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8459786B2 (en) 2008-08-29 2013-06-11 Seiko Epson Corporation Liquid ejecting apparatus for eliminating and suppressing generation of air bubbles
CN105437772A (en) * 2015-12-17 2016-03-30 重庆宏劲印务有限责任公司 Inkjet printer nozzle cleaning device

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