CN1241262A - Reflective coupling array for optical waveguide - Google Patents
Reflective coupling array for optical waveguide Download PDFInfo
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- CN1241262A CN1241262A CN 97180890 CN97180890A CN1241262A CN 1241262 A CN1241262 A CN 1241262A CN 97180890 CN97180890 CN 97180890 CN 97180890 A CN97180890 A CN 97180890A CN 1241262 A CN1241262 A CN 1241262A
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Abstract
A coupling for an optical device that disperses wavelengths along a focal line includes reflective surfaces that fold light out of a plane propagation and into alignment with an array of inputs or outputs. Some of the reflective surfaces are offset from the focal line so that the inputs or outputs can be spaced closer together in a dimension along the focal line.
Description
Technical field
The present invention relates to optical communication, relate in particular to the optical devices of separate wavelengths.
Background technology
Input and output are coupled to the end of slab guide usually, align with the direction of light by duct propagation.For example, the optical fiber input and output are aimed at the sandwich layer of slab guide by the core layer that makes each optical fiber usually and are coupled.The covering of wound fiber fibre core is along the end separating fibre core of waveguide.The number that can be coupled to the optical fiber of an end of waveguide is by the diameter restrictions of optical fiber.
Although the feature in the slab guide obtains further miniaturization,, for the coupling of giving input and output optical fiber provides enough spaces, the size of waveguide usually obviously increases.Fibre diameter records usually and is about 125 microns, it can be reduced to only 70 to 75 microns, and structure or function can not produce obvious deterioration.Similar problem appears in the input and output to such as other type of LASER Light Source and photodetector, and LASER Light Source and photodetector are all bigger than optical fiber usually at lateral dimension (that is diameter).
Between each and shared inputing or outputing (for example optical fiber), transmit in the slab guide multiplexer/demultiplexer device of optical signalling and especially this problem can occur.In many this slab guides, the signal that makes different wave length such as the chromatic dispersion mechanism of diffraction grating is the signal that separates on the space such as the convergence mechanism of lens with the conversion of signals of separating on the angle from angle separately.Inputing or outputing array aims at the signal that the space separates along an end of slab guide.
Closely combine inputing or outputing and more need than the much bigger slab guide of not combining together to realize its function.Chromatic dispersion mechanism still is that convergence mechanism all must increased in size, so that signal is spatially separated, and the interval between inputing or outputing is complementary, perhaps must increase by one in the middle of coupling, with the separation of spread signal, be complementary with inputing or outputing at interval.Middle coupling has increased to the length of slab guide and has reduced coupling efficiency.
Utilize out-of-plane catoptron also realized intercoupling of slab guide and with coupling such as external devices such as laser instrument and photodetectors, catoptron is reflected light on the direction of propagating in slab guide perpendicular to light.For example, authorize the 4th, 750, No. 799 United States Patent (USP)s of people such as Kawachi the catoptron of a little reflection is installed between the target seeker of slab guide, light is turned back with the right angle be installed in the external devices on slab guide top.The catoptron of little reflection be make separately by coated glass or plastics and be installed between the target seeker, make the orientation of the reflecting surface of catoptron be 45 and spend with optical propagation direction.
Authorize the 5th, 182, No. 787 of people such as Blonder and authorize people such as Nurse the 5th, 263, No. 111 patent specification with the slab guide general structure in the preparation of similar planar external mirror.These two patents all relate to the etch chamber in the slab guide and apply the sloped sidewall of cavity with reflecting material.The subvertical relative sidewall of people's etchings such as Blonder makes the diffraction that is radiated the optics in the cavity reduce to minimum.People such as Nurse also apply a part of cavity bottom and shelf except sloped sidewall, to improve the homogeneity of reflecting surface.
Yet neither one is born any suggestion that reduces a plurality of space requirements that input or output in the arrangement of external devices or other slab guide being coupled to the slab guide upper and lower surface that it was suggested.
Brief summary of the invention
The present invention is useful especially for the size of dwindling optical devices, and these optical devices relate to the coupling of signal or by wavelength zone sub-signal each several part.Do not change the external dimensions that inputs or outputs of these devices, make effectively to input or output more closely to be positioned at together, to reduce the wavelength requirement that scatter in the space in device.
According to the direction that light is propagated in optical devices, the function that identical coupling element can play input usually can play the function of output again.Because the present invention is relevant with the coupling that improves a plurality of wavelength,, the direction that light is propagated is used to indicate these elements that can play input, output or the two function no matter how, exporting " I/O ".
An example of the present invention comprises a wavelength separator in the waveguide, and it is mapped to different wave length to be positioned at the duct propagation plane along on each focus of focal line.The reflecting surface that also is positioned at waveguide makes wavelength turn back outside the propagation plane and align with the I/O array.At least some depart from focal line in the reflecting surface, so that isolated I/O is along can more closely being close together on the direction of focal line.
Preferably, reflecting surface is positioned at an angle on the center line that intersects with focal line.I/O is arranged and can be as on one group of surface that is installed in waveguide along corresponding center line.I/O is by the restriction of the external dimensions of I/O along center line at interval, and they are reduced to the multiple of the cosine of angle between center line and the focal line along the significant interval of focal line.
The depth of focus that different wave length focuses at least with reflecting surface depart from the value of focal line the same big be preferable, therefore, bias produces very little influence to the mould field size of assembling wavelength or to the coupling efficiency that produces.Yet the change of shape by reflecting surface focuses in the required size wavelength again can hold bigger bias.In addition, each reflecting surface is tilted, to strengthen coupling efficiency respectively with respect to their common centreline.
Can adopt the whole bag of tricks, comprise the whole bag of tricks that holds integrated, mixing and global design, can make reflecting surface.For example, by cavity of etching, its sidewall and propagation plane can be integrated in reflecting surface in the slab guide by a public angle tilt.Cavity can be empty, and to support the total reflection from an inclined side, perhaps, another side can apply one deck reflecting surface, and cavity can be filled index-matching material, supports the external reflection from coated side.
In slab guide, also can form a kind of more common cavity and fill a kind of different material, form reflecting surface.For example, can fill organic material in the cavity, it can be ablated, stay next inclined surface by irradiating ultraviolet light.Also can adopt photochromics to come filled chamber.Employing can produce similar inclined surface to the selectable exposure of photochromics and the development of then carrying out.Other photochromics and interfering beam can produce a holographic grating in by the cavity of a plurality of partial reflection surface compositions.Holographic grating works to have the interference filter of the passband that reflects required wavelength.
Reflecting surface also can form separately and be inserted in the cavity or groove that forms in slab guide as one or more reflected light tools.For example, the glimmer fibre with triangle section can be installed in the groove that forms in the waveguide.A side surface of optical fiber can be coated, forms a continuous reflection surface, is directed towards to make wavelength turn back outside the propagation plane and align with each I/O.A similar optical fiber also can be installed, the inner total reflection between propagation plane and the I/O array is provided.
In most situations, wish that I/O is an optical fiber, can form reflecting surface on the inner end of these optical fiber.For example, the inner end of I/O optical fiber can be cut into the miter angle degree and apply into reflecting surface.Shared installation block support optical fiber with respect to wavelength separator the angle end arranged, to dwindle at interval along the requisite space between the separation vessel focal line wavelength.
The accompanying drawing summary
Fig. 1 is the floor map according to the mixing demultiplexer of the present invention's arrangement.
Fig. 2 is the sectional view along the demultiplexer of Fig. 1 line 2-2 intercepting.
Fig. 2 A-2B is the amplification sectional view that can be coupled to two kinds of different fiber on the demultiplexer of Fig. 1 and 2.
Fig. 3 is the part amplification plan view of demultiplexer, and expression is along the various relations between the input and output optical fiber of drawing normal direction extension.
Fig. 4 is similar to Fig. 3, but input and output optical fiber is removed, and is embedded in reflector array in the slab guide with displaying.
Fig. 5 A-5C is the part amplification sectional view of a similar slab guide, is illustrated in two kinds of reflecting surface patterns that form on the opposite flank of etched cavity.
Fig. 6 A-6D is the similar figure of another waveguide, is filled with further processed usually in the chamber and the material of formation reflecting surface.
Fig. 7 A-7C is the similar figure of slab guide, is filled with 3 D grating in the cavity, and Fig. 7 D is the further enlarged drawing of this grating.
Fig. 8 is the floor map according to another mixed multiplex resolver of the present invention's arrangement.
Fig. 9 is the sectional view along another demultiplexer of Fig. 8 line 9-9 intercepting.
Figure 10 A-10C is the part enlarged drawing of the groove that forms in the slab guide of another demultiplexer of supporting triangular-section optical fiber.
Figure 11 is the floor map according to the block demultiplexer of the present invention's arrangement.
Figure 12 is the sectional view along the block demultiplexer of Figure 11 line 12-12 intercepting.
Describe in detail
Fig. 1-4 illustrates first embodiment of the invention, is a wavelength demultiplexer 10.By making the direction reversing of beam Propagation between input optical fibre 12 and the output optical fibre array 14a-14e, same device also can be taken as a multiplexer.In this embodiment, input optical fibre 12 is transported to demultiplexer with the signal (being also referred to as passage) of a plurality of different wave lengths; Each output optical fibre 14a-14e transfers out one of different wave length signal from demultiplexer 10.
Demultiplexer 10 is constructed as the hybrid optical device, has reflective diffraction gratings 16, is connected to an end of slab guide 18, and slab guide contains all the other elements of device.Diffraction grating 16 comprises the reflectance signature that can form easily with an independent optical element.For example, can mechanical etching, embossment etching or duplicate or utilize the feature that can form diffraction grating 16 perpendicular to its surperficial photolithographic exposure.
Diffraction grating 16 and planar lens 26 play the wavelength separation vessel altogether.The different wave length signal that diffraction grating 16 disperses input optical fibre 12 to inject from angle, planar lens 26 by scatter on each angle signal focus on the diverse location of focal line 30 from the space different wave length signal separately.More particularly, planar lens 26 premiere features are as a collimating apparatus, are the signal transition before one group of spherical wave of performance point source (input optical fibre 12) outgoing one group of parallel plane wavefront.Diffraction grating 16 makes according to their wavelength and one group of plane wave front of relative tilt returns.Then, planar lens 26 with single angle with each wavelength focus on the diverse location of focal line 30.
The overall dimensions size of diffraction grating 16 and lens 26 mainly is definite by the required interval " S " between the wavelength signals on the focal line 30, and in the present embodiment, it is reduced to less than the overall diameter of output optical fibre 14a-14e " D ".Why this may be because the tradition directed of output optical fibre 14a-14e has been done two kinds of variations if reducing.At first, output optical fibre 14a-14e extends to outside the propagation plane 25, preferably perpendicular to this propagation plane.Secondly, the inner end of output optical fibre 14a-14e is in line along center line 32, this center line 32 in propagation plane 25 with respect to focal line 30 angles " α " that tilt.According to following mathematic(al) representation, reduce required interval " S " between the different wave length signal with respect to diameter " D ":
S＝D?cosα
Therefore, at interval " S " to reduce only be the function at the pitch angle " α " in the propagation plane 25.Output optical fibre 14a-14e extends to and makes this angle variation become possibility outside the propagation plane 25.Yet, arriving output optical fibre 14a-14e from propagation plane 25, signal is coming out from propagation plane and is entering the new orientation that output optical fibre must be folded to output optical fibre 14a-14e to align.
This is to realize by the output reflection surface array 34a-34e that forms among each cavity 36a-36e in slab guide 18.14a-14e is similar with output optical fibre, and output reflection surface 34a-34e is in line along center line 32.Yet each output reflection surface 34a-34e also with respect to the about miter angle degree of propagation plane 25 inclinations, preferably tilts with respect to center line 32 with variable-angle " β " in propagation plane 25.The size of angle " β " changes with the distance of the optical axis 38 that leaves planar lens 26, makes the center 40 of reflecting surface 34a-34e towards lens 26.
Have only reflecting surface 34c to be positioned on the focal line 30 among the 34a-34e of output reflection surface.Other all output reflection surface 34a, 34b, 34d depart from focal line 30 different values with 34e on the direction of optical axis 38.Preferably, maximum offset " Om " is within the depth of focus of planar lens 26, so that the subtle change of different wave length signal spot size only occurs by offset distance.In addition, cavity 36a-36e and 44 size preferably keep little as much as possible, and the spread length with between restriction slab guide 18 and optical fiber 14a-14e and 12 by it further signals diverging can take place.
For given focal length, reduce to minimum by the numerical aperture that makes planar lens 26, can increasing depth of focus, thus the numerical aperture of planar lens must enough be collected whole light beams that input optical fibre 12 is launched greatly basically.The numerical aperture of optical fiber 12 and 14a-14e can be regulated by controlling optical fiber 12 and the sandwich layer of 14a-14e and the refringence between covering 46 and 48.Increase sandwich layer 46 at optical fiber end and also can be used in the raising transfer efficiency with respect to the size of covering 48.Utilize the divergence of reflecting surface as the enough further control signal of the second converging light prodigiosin.For example, can form concave surface to reflecting surface 34a-34e and 42, signal is carried out posterior focal distance again.
Also can improve, the focusing of control signal divergence is provided the inner end of optical fiber 12 and 14a-14e.Fig. 2 A and 2B illustrate two examples.The optical fiber 13 of Fig. 2 A is terminated at optical fiber GRIN (graded index) lens 15, regulates its length so that required focusing to be provided.Usually, the length of optical fiber grin lens 15 is about 1/4th pitches, but preferably slightly longer, thereby divergent beams are converged in the optical fiber 13.Be " analysis of gradient index fiber lens and evaluation " at exercise question, be published in " Journal of LightwaveTechnology " Vol.LT-5, No.9, has disclosed the more detailed information of relevant optical fiber grin lens design in the article incorporated by reference here at September 1987.
The optical fiber 17 of Fig. 2 B is terminated at lenticule 19, so that similar focusing to be provided.Preferably, the lenticule 19 of convex shape is to form by the end that is etched in optical fiber 17.Be " being formed on the lenticule on the VAD single-mode fiber end " at exercise question, be published in " Electronics Letters " Vol.18, January 1982, the 71-72 page or leaf, disclosed the further details of the chemical etching/precise polished technology that forms this lens in the article incorporated by reference here.
Get back to Fig. 1 and 2, the inner end of output optical fibre 14a-14e preferably collimates in common mounting piece 50, and common mounting piece 50 is attached on the surface 52 of slab guide 18.Can utilize various any means known, comprise laser bonding, adopt epoxy resin gummed or frit-sealed, piece 50 is attached in the slab guide 18.This itself can contain the V-shaped groove that limits optical fiber, and it is well-known on general orientation optical fiber being installed.
Also can be with the various distinct methods structure demultiplexers 10 that comprise that similar size reduces.For example, can input optical fibre 12 be installed as with more common mode and collimate mutually with propagation plane 25 or collimate mutually with output optical fibre 14a-14e in the same mounting blocks 50.Also can be with various patterns, as output optical fibre 14a-14e is offset with respect to focal line 30 according to curve or zigzag pattern.In interlaced pattern, all output optical fibres can produce smallest offset with the same distance of leaving focal line.Diffraction grating 16 can be formed as an integrated morphology in the slab guide 18 on the other hand, in propagation plane 25, form curve, also carry out the part or all of convergence function of planar lens 26.
Fig. 5 A-7D is illustrated in the plane reflective outer surface is integrated into the whole bag of tricks in the similar slab guide.In Fig. 5 A, slab guide 60 favours the normal direction of illumination beam 62 with angle " σ ", forms cavity 64, and cavity has relative side 66 and 68, and they favour propagation plane 65 equally.Light beam 62 can be formed by ionic plasma, and it is radiated between two electrode (not shown), forms cavity 64 by reactive ion etching.The remainder of covering slab guide 60 such as the material removed 70 of chromium is not subjected to light beam 62 irradiations.
In Fig. 5 C, side 68 has been coated with the reflectance coating of reflecting surface effect.Adopt the material 84 (as epoxy resin) of refractive index match to fill vacant cavity 64, to stop the reflection that causes by refringence between sandwich layer 74 and the cavity 64 from side 66.Moving fiber 78 makes its sandwich layer 76 communicate with the sandwich layer 74 of slab guide by the reflectance coating on the side 68 82.Interval between the side 66 and 68 preferably as far as possible little (for example 10-30 micron), the path of restriction optical signalling 72 can exceed dispersing of sandwich layer 74 and 76 on this path.
In Fig. 6 A-6D, in slab guide 90, form more generally cavity 88 and packing material 92, material 92 and illumination beam 94 interactions of tilting with similar angle " σ " with respect to propagation plane 95.The cavity 88 that comprises opposite flank 96 and 97 preferably forms a square-section, makes side 96 extend perpendicular to propagation plane 95, so that reduce to minimum from the undesirable reflection or the refraction on its surface.
The material 92 of illumination beam and filled chamber 88 interacts, and forms an inclined surface 98, and this surface then can apply reflecting material 100, forms a reflecting surface that exceeds the plane.For example, material 92 can be an organic material, as acrylic acid or polyimide; Illumination beam 94 can be the high-intensity ultraviolet light light beam that is for example produced by excimer laser, the undesired part material 92 of photic ablation from cavity 88.The other parts of slab guide 90 are to be formed by the different materials such as glass or silicate, can be not ablated in same energy range.
On the other hand, material 92 can be the photochromics such as positive photoresist, and is soluble by to its exposure it being become.Shipley 1400 serial photoresists or other thick film photoresist are preferable.Developer solution can be removed the material 92 of exposure region, stays similar inclined surface 98.Ultraviolet light still can be used for material 92 exposure, and still, required energy density is than used much lower of photic ablation.
The reflection of coating 100 makes signal 102 redirect to sandwich layer 106 collimations with optical fiber 108 from the propagation plane 95 in slab guide 90 sandwich layers 104 from the inclined surface 98.Similar to the embodiment of front, cavity 88 is preferably as far as possible little, with dispersing of restricting signal 102; Can adopt the remainder of index-matching material (not shown) filled chamber 88, eliminate surface effect from side 96.
In Fig. 7 A-7D, the general cavity 112 in the slab guide 110 also is filled with photochromics 114.Yet the photochromics 114 of present embodiment is to produce interactional by changing its refractive index to light.This material production holographic grating is well-known.
Two light beams 116 and 118 combines on partial reflection surface 120, produces interfering beam 122 with the standing wave form with plane wave front.Interfering beam 122 also favours propagation plane 125 with angle " σ ", and the planar section 124 of the space interval of its irradiation photochromics 114 changes plane of illumination part 124 refractive indexes with respect to all the other planar sections 126.Make planar section 124 and 126 alternately have " height " and " low " refractive index, form a 3 D grating 130, it has a series of partial reflection surface 128 that spatially separates with the grating cycle " ∧ ".3 D grating 130 can play a broad band pass filter as the reverberator that substitutes the mirror-type among the embodiment of front, reflects the signal wavelength " λ " of required wave band.
The pass of grating cycle " ∧ " with signal wavelength " λ " is:
" n in the formula
Effectively" be the refractive index of grating medium diffraction, " θ " drops on incident angle on the reflecting surface 132 of 3 D grating 130 along the signal 132 that propagation plane 125 is propagated.Angle " θ " also equals the angle " σ " that interference light 122 favours propagation plane 125.It is preferable that these angles equal 45 degree, and at this moment, the expression formula in above-mentioned grating cycle " ∧ " can be reduced to:
For required coupling efficiency between the optical fiber 134 of realizing slab guide 110 and extending outside propagation plane 125,3 D grating 130 preferably comprises about 15 to 20 about reflecting surfaces of 0.1 to 0.2 128 of variations in refractive index that formed by plane layer 124 and 126.Difference can be raised the efficiency between more layer and bigger " height " and " low " refractive index.Yet, show that again the size of cavity 112 should be as much as possible little, with the wavelength dispersion between restriction slab guide 110 and the optical fiber 134.
Although 3 D grating 130 preferably is produced in the appropriate location in the cavity 112,, 3 D grating also can be used as independent light tool and makes and then be inserted in the appropriate location in the slab guide 110.Also can adopt the grating of other type, comprise being parallel to the plane grating that propagation plane 125 is extended.
Fig. 8-10C illustrates another kind of demultiplexer 140, and wherein input/input optical fibre array 142a-142e is coupled perpendicular to slab guide 144.Reflecting diffraction grating 146 is installed in an end of waveguide 144, and planar lens 148 is integrated among the waveguide 144.In sectional view, waveguide 144 comprises common substrate 150, sandwich layer 152 and surrounding layer 154.
Yet, not to form each cavity that reflected light tool array is installed, but in waveguide, form a continuous groove 158, support optical fiber 160 with single reflecting surface 162.The inner end of I/O optical fiber 142a-142e is arranged in the position that receives the different wave length signal along optical fiber 160, and the different wave length signal scatters along the focal line 164 of lens 148.Optical fiber 160 can be arranged in along the dimension of focal line 164 inner end of optical fiber 142a-142e with respect to focal line 164 angles of inclination " α " more thick and fast.
The groove l58 of can etching in slab guide 144 or cutting out has the square-section; Optical fiber 160 has the triangular-section.Reflecting surface 162 is positioned on the right angle trigonometry hypotenuse of triangular-section and contains reflectance coating 163.Before coating, can adopt calendering or polishing to come smooth reflective surface 162.Remaining right- angle side 166 and 168 strictly is oriented in the rectangular channel 158 optical fiber 160.Can adopt epoxy resin or colloid that optical fiber 160 is fixed in the position.
Not to cover reflecting surface 162, but shown in Figure 10 B, make optical fiber 160 around its Rotate 180 degree and reload in the groove 158 reflected signal by inner total reflection with the reflectance coating shown in Figure 10 A.Also can adopt other cross sectional shape, as long as an end of optical fiber plays required reflecting surface.In addition, optical fiber 160 can be contained in the another kind of groove with longitudinal bending shape, signal between slab guide 144 and the I/O optical fiber 142a-142e more effectively is coupled.
Shown in Figure 10 C, another kind of optical fiber 160a can replace the focus characteristics that provides auxiliary.The reflecting surface 162a that forms has bending sections that is inhaled among the optical fiber 160a and the reflectance coating 163a that is deposited on the optical fiber 160a.On the reflecting surface of other array implement example, similar curvature can be set.
The block optical devices of the block demultiplexer 170 shown in Figure 11 and 12 also can be benefited from the present invention.Reflection grating 172, collimation lens 174 and I/O fiber array 176a-176e are contained in the public supporting 178.Middle block 180 and optical fiber 176a-176e that refractive index and optical fiber 176a-176e covering (not shown) are complementary align direct join they are installed in this public supporting 178.
Similar to the aforementioned embodiment, optical fiber is positioned on the center line 186, and center line is with respect to focal line 188 angles of inclination " α " of collimation lens 174.Yet, be not to utilize independent reflected light tool that the signal and the optical fiber 176a-176e that scatter along focal line 188 are coupled, but the inner end 192a-192e of cutting optical fibre 176a-176e also applies the reflectance coating of carrying out similar functions at an angle.
Preferably inner end 192a-192e is polished strengthening reflectivity, the reflecting surface that inner end 192a-192e can similar Fig. 1-4 is directed respectively and be shaped, to improve coupling efficiency.Be not to utilize reflectance coating, inner end 192a-192e can be exposed to the media (preferably being air) with low refractive index, to support inner total reflection.
Signal along the optical axis 194 of lens 174 different wave length that each focus is propagated on focal line 188 is directly reflexed among the I/O optical fiber 176a-176e by inner end 192a-192e.The theta alignment of inner end 192a-192e has reduced along required dispersion measure between focal line 188 different wave lengths.Because focal line 188 is substantially perpendicular to optical axis 194, therefore, device 170 sizes perpendicular to optical axis 194 are subjected to having the greatest impact of this variation.
Although the invention has been described in the embodiment that only relates to demultiplexer,, other optical design also can be benefited from the present invention.For example, the present invention is coupled to spectrograph for raising and Wavelength dispersion compensation device is useful, and they need this coupling to launch a part of continuous spectrum.In addition, the various features of different embodiment can mutual alternative or combination.For example, the optical fiber with beveled end can be inserted in the interior cavity of slab guide.
Claims (66)
1. optical devices that transmit a plurality of different wave lengths is characterized in that described device comprises:
Planar propagate the waveguide of different wave length;
Different wave length is mapped to along the wavelength separator on each focus that is positioned at described plane focal line;
The a plurality of reflecting surface parts that make wavelength turn back outside the described plane and collimate mutually with the I/O array; And
At least some depart from the described focal line in the described plane in the described reflecting surface part, thereby the space interval that makes described I/O is along drawing closer together on the dimension of focal line.
2. device as claimed in claim 1 is characterized in that: described reflecting surface partly is positioned at an angle on the center line that intersects with described focal line.
3. device as claimed in claim 2 is characterized in that: the multiple of included angle cosine between more close center line in the location of I/O and the focal line.
4. device as claimed in claim 2 is characterized in that: described reflecting surface part with a common angle with respect to the common inclination in described plane with tilt respectively with respect to described center line with different angles.
5. device as claimed in claim 1 is characterized in that: described reflecting surface partly is crooked, and different wave length is focused on again, mates better with the required mould field size of I/O.
6. device as claimed in claim 1 is characterized in that: described waveguide is slab guide, has one deck by the sandwich layer of encompasses.
7. device as claimed in claim 6 is characterized in that: at least one cavity is that the described sandwich layer by waveguide forms, and is used to install described reflecting surface part.
8. device as claimed in claim 7 is characterized in that: described cavity comprises towards first and second surfaces by slab guide wavelengths travel direction.
9. device as claimed in claim 8 is characterized in that: described first and second surfaces by common angle with respect to described plane and orientation.
10. device as claimed in claim 9 is characterized in that: described first surface has a border surface, by the internal reflection from described first surface wavelength is turned back outside this plane.
11. device as claimed in claim 9 is characterized in that: described second surface comprises one deck reflectance coating, is used for wavelength is turned back outside this plane.
12. device as claimed in claim 11 is characterized in that: be filled with the material of refractive index match in the described cavity, to stop internal reflection from described first surface.
13. device as claimed in claim 7 is characterized in that: described reflecting surface partly is to be formed by a jointed fiber that is contained in the described cavity, has a side surface that wavelength is reflexed to the plane outside the plane.
14. device as claimed in claim 13 is characterized in that: described jointed fiber has the triangular-section.
15. device as claimed in claim 7 is characterized in that: described cavity comprises a reflection grating, rises the turn back function of at least one the described reflecting surface part outside the plane of wavelength.
16. device as claimed in claim 15 is characterized in that: described reflection grating is a 3 D grating, and the layer with a plurality of variations in refractive index produces a series of partial reflections.
17. device as claimed in claim 16 is characterized in that: described multilayer with a common angle with respect to described plane orientation.
18. device as claimed in claim 15 is characterized in that: described reflection grating also plays an optical filter, reflects the wavelength of limited wave band.
19. device as claimed in claim 7 is characterized in that: be filled with first kind of material of slope form in the described cavity and be coated with the second kind of material that strengthens reflectivity.
20. device as claimed in claim 19 is characterized in that: described first kind of material is different from the material that is used to form described sandwich layer and covering.
21. device as claimed in claim 20 is characterized in that: described first kind of material is the organic material that is easy to be subjected to the photic ablation of UV radiation to influence.
22. device as claimed in claim 20 is characterized in that: described first kind of material is the photochromics that can remove selectively by developing.
23. device as claimed in claim 1 is characterized in that: described I/O is the optical fiber with inner end of aiming at described a plurality of reflecting surfaces.
24. device as claimed in claim 23 is characterized in that: pack into and improve the converging light tool of coupling efficiency between described optical fiber and the described reflecting surface in the inner end of described optical fiber.
25. device as claimed in claim 24 is characterized in that: described converging light tool is the fiber grin lens.
26. device as claimed in claim 24 is characterized in that: described converging light tool is a lenticule.
27. one kind is separated the optical devices of a plurality of wavelength with respect to optical axis, it is characterized in that described device comprises:
In propagation plane, distinguish the wavelength separator of different wave length and optical axis from the space;
The I/O array that outside described propagation plane, extends;
The reflector array that makes different wave length turn back and collimate mutually with described I/O array; And
Described reflector array is included in each reverberator that departs from the described propagation plane perpendicular to the straight line of optical axis, makes the space interval of described I/O draw closer together on the dimension perpendicular to optical axis.
28. device as claimed in claim 27 is characterized in that: described I/O is an optical fiber.
29. device as claimed in claim 28 is characterized in that: described reflector array is that the beveled end by described optical fiber forms.
30. device as claimed in claim 29 is characterized in that: described beveled end has a reflecting surface, make different wave length in described propagation plane and contain produce between another plane of described optical fiber folding.
31. device as claimed in claim 30 is characterized in that: described beveled end is installed in the public optics support.
32. device as claimed in claim 27 is characterized in that: described I/O is arranged along single straight line, and this straight line favours the described line perpendicular to described optical axis in described propagation plane.
33. device as claimed in claim 32 is characterized in that: described I/O is installed in the public optics support.
34. device as claimed in claim 33 is characterized in that comprising a slab guide along described propagation plane guide wavelength.
35. device as claimed in claim 34 is characterized in that: described slab guide comprises upper and lower surface, and described public optics supports and is attached on the described upper surface of described slab guide.
36. device as claimed in claim 27 is characterized in that: described reflector array is arranged for the wavelength on the whole continuous spectrum scope is sent to described I/O array.
37. device as claimed in claim 36 is characterized in that: described I/O enough closely is positioned at together on the dimension of vertical optical axis, to transmit continuous spectrum.
38. device as claimed in claim 37 is characterized in that: described optical devices are dispersion compensators.
39. device as claimed in claim 27 is characterized in that: described each reverberator of described reflector array is that the different piece by the continuous reflection surface forms.
40. device as claimed in claim 39 is characterized in that: described continuous reflection surface is to be formed by the optical fiber with catoptrical plane surface.
41. device as claimed in claim 27 is characterized in that: described reflector array is formed by at least one reflection grating.
42. device as claimed in claim 41 is characterized in that: described reflection grating is a Volume Grating of alternately being made up of the material layer of different refractivity.
43. device as claimed in claim 27 is characterized in that: described reflector array is formed by at least one border surface in waveguide, and this surface provides the inner total reflection of wavelength between described propagation plane and described I/O array.
44. device as claimed in claim 43 is characterized in that: described border surface is formed by the undercut surface of the cavity that forms in the waveguide.
45. device as claimed in claim 27 is characterized in that: described reflector array is to form at least one cavity of waveguide, and described waveguide has the apparent surface who favours described propagation plane with about miter angle degree jointly.
46. device as claimed in claim 45 is characterized in that: the material that is reflected covers among the described apparent surface, and the remainder of described cavity is filled with the material of refractive index match.
47. device as claimed in claim 27 is characterized in that: described reflector array forms at least one cavity of waveguide, and described cavity is partially filled the material that is different from waveguide on every side.
48. device as claimed in claim 47 is characterized in that: described material is the organic material that is easy to by the photic ablation of UV radiation.
49. device as claimed in claim 47 is characterized in that: described material is the photochromics that can remove selectively by developing.
50. a method that produces optical coupled in slab guide, slab guide have one spatially to distinguish the mechanism of different wave length along focal line, described method comprises step:
Make slab guide with respect to directional beam relative orientation, make this directional beam with illegally to incident angle favour the surface of slab guide;
From slab guide, remove a block of material, expose the sandwich layer of slab guide;
Sandwich layer by slab guide forms the inclined surface part of aiming at directional beam;
The I/O array is installed on the surface of slab guide, makes the wavelength of in the sandwich layer of slab guide, propagating and be tilted the surface portion reflection be coupled to the I/O array; And
Make the orientation of at least some in the described reflecting surface part depart from described focal line in the described plane, make the space interval of described I/O along drawing closer together on the dimension of focal line.
51. method as claimed in claim 50 is characterized in that: described removal step comprises a plurality of cavitys of etching, and they have the opposite flank with the common inclination in nonnormal incidence angle.
52. method as claimed in claim 51 is characterized in that: described inclined surface partly is by forming with one in the oblique opposite flank of nonnormal incidence angle lapping.
53. method as claimed in claim 52 is characterized in that further comprising mask is applied on the surface of slab guide, stays the step of exposing the perforate in a plurality of zones on the slab guide surface.
54. method as claimed in claim 53 is characterized in that: described removal step comprise with illegally to incident angle a branch of plasma is penetrated on the surface in slab guide.
55. method as claimed in claim 52 is characterized in that: the surface of a undercutting slab guide in the opposite flank also forms the inclined surface part.
56. method as claimed in claim 52 is characterized in that further comprising step:
One deck reflectance coating is applied to one of the opposite flank to be gone up to form the inclined surface part; And
With the material filled chamber that refractive index and sandwich layer are complementary, avoid from another internal reflection in the opposite flank.
57. method as claimed in claim 50 is characterized in that: described removal step is included in the described rapid preceding a plurality of cavitys of etching of the step that makes slab guide relative orientation.
58. method as claimed in claim 57 is characterized in that further comprising the step with the organic material filled chamber.
59. method as claimed in claim 58 is characterized in that: directional beam is made up of ultraviolet light, the described step that forms the inclined surface part comprises utilizes directional beam to remove a part of organic material.
60. method as claimed in claim 57 is characterized in that comprising the further step with the photochromics filled chamber.
61. method as claimed in claim 60 is characterized in that: the described step that forms the inclined surface part comprises utilizes directional beam that a part of photochromics is developed, and then removes the part after developing.
62. a method that forms out-of-plane mirrors in slab guide, described method comprises step:
Mask is applied on the surface of slab guide, stays the perforate of exposing a plurality of zones on the slab guide surface;
Make the directional beam relative orientation of slab guide with respect to plasma, make directional beam with illegally to the exposing surface of incident angle opposite planar waveguide tilt;
Utilize directional beam cavity of etching in slab guide, this slab guide has the relative side with the common inclination of nonnormal incidence angle; And
Make at least one orientation in the described opposite flank, be supported in the inner total reflection of the light of propagating in the slab guide.
63. method as claimed in claim 62 is characterized in that: have at least one to form out-of-plane mirrors in the described opposite flank.
64., it is characterized in that: the surface of a undercutting slab guide is arranged in the opposite flank and form out-of-plane mirrors as the described method of claim 63.
65., it is characterized in that further being included in and apply reflectance coating in the opposite flank to form the step of out-of-plane mirrors as the described method of claim 63.
66., it is characterized in that further comprising that material filled chamber that the sandwich layer with refractive index and slab guide is complementary is to avoid the step from another internal reflection in the opposite flank as the described method of claim 65.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 97180890 CN1241262A (en) | 1996-12-20 | 1997-12-04 | Reflective coupling array for optical waveguide |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US60/033,696 | 1996-12-20 | ||
| CN 97180890 CN1241262A (en) | 1996-12-20 | 1997-12-04 | Reflective coupling array for optical waveguide |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1241262A true CN1241262A (en) | 2000-01-12 |
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ID=5177942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 97180890 Pending CN1241262A (en) | 1996-12-20 | 1997-12-04 | Reflective coupling array for optical waveguide |
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| Country | Link |
|---|---|
| CN (1) | CN1241262A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102122743A (en) * | 2010-01-04 | 2011-07-13 | 索尼公司 | A waveguide |
| CN110208908A (en) * | 2019-05-24 | 2019-09-06 | 宁波东立创芯光电科技有限公司 | A kind of two-dimension focusing deviation mirror on optical waveguide loop |
-
1997
- 1997-12-04 CN CN 97180890 patent/CN1241262A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102122743A (en) * | 2010-01-04 | 2011-07-13 | 索尼公司 | A waveguide |
| CN110208908A (en) * | 2019-05-24 | 2019-09-06 | 宁波东立创芯光电科技有限公司 | A kind of two-dimension focusing deviation mirror on optical waveguide loop |
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