CN1238681C - Vapor collection method and apparatus - Google Patents
Vapor collection method and apparatus Download PDFInfo
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- CN1238681C CN1238681C CNB018161480A CN01816148A CN1238681C CN 1238681 C CN1238681 C CN 1238681C CN B018161480 A CNB018161480 A CN B018161480A CN 01816148 A CN01816148 A CN 01816148A CN 1238681 C CN1238681 C CN 1238681C
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- air chamber
- gap
- zone
- gas phase
- mass flow
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
- F26B25/005—Treatment of dryer exhaust gases
- F26B25/006—Separating volatiles, e.g. recovering solvents from dryer exhaust gases
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B13/00—Machines and apparatus for drying fabrics, fibres, yarns, or other materials in long lengths, with progressive movement
- F26B13/005—Seals, locks, e.g. gas barriers for web drying enclosures
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- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Drying Of Solid Materials (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
A vapor collection method and apparatus capable of capturing vapor compositions without substantial dilution. The method and apparatus utilize a material (12) that has a surface (14) with an adjacent gas phase. A chamber (16) is positioned in close proximity to a surface (14) of the material (12). The position of the chamber (16) creates a relatively small gap (H) between the surface of the material (14) and the chamber (16). The adjacent gas phase between the chamber and the surface define a region possessing an amount of mass. At least a portion of the mass is drawn through the region by induced flow. The utilization of a small gap (H) limits the flow of mass that is external to the chamber (16) from being swept through the chamber by induced flow.
Description
Technical field
The present invention requires to be filed in the U.S. Provisional Application Serial No.60/235 on September 24th, 2000,214, be filed in the No.60/235 on September 24th, 2000,221 and the No.60/274 that is filed in March 7 calendar year 2001,050 priority, with their full content with reference to being incorporated into this.The present invention relates to vapor collection method and equipment, more particularly, relate to the method and apparatus that to collect the gaseous component that does not have dilution basically.
Background technology
In the process of dry coating material, remove and reclaim the conventional method of component and utilize drying equipment or baker usually.Collecting hood or mouth are used for the drying system of closure and opening, to collect the solvent vapo(u)r that sends from substrate or material.Conventional opening steam collecting system utilizes air treatment system usually, they can not be only the optionally required gaseous component of sucking-off and not sucking-off ambiance.Closed steam collecting system is generally introduced the inert gas circulatory system to help to clean the steam of enclosed volume.In arbitrary system, the concentration of gaseous component has been diluted in the introducing of ambiance or inert gas.So just make become difficulty and poor efficiency of separate vapour from the vapor stream of dilution subsequently.
In addition, the thermodynamics relevant with conventional steam collecting system allows at substrate or material or near their parts unwanted steam condensation is arranged usually.Then, condensate drops on substrate or the material, to the outward appearance or the aspect of performance generation adverse influence of material.In commercial plant, can comprise exogenous impurity around the environmental condition of this method and treating apparatus.In the drying equipment of big volume, exogenous impurity can be brought in the gathering system by the big volume flow of conventional drying system.
It is desirable to collect the gaseous component of ambiance of no use basically or inert gas dilution.In addition, it is favourable collecting gaseous component in commercial plant in low volume flow, can prevent to be mingled with exogenous impurity like this.
Summary of the invention
The invention provides the method and apparatus of carrying and capturing the gaseous component that does not have dilution basically.The air chamber of the close substrate surface of this method and apparatus utilization is can collect the gaseous component near substrate surface.
In the methods of the invention, provide at least a material with first type surface of at least one contiguous gas phase.Then, air chamber is arranged near the material surface part with the gap between regulation air chamber and the material.This gap preferably is no more than 3cm.Contiguous gas phase between air chamber and the material surface has stipulated to have the zone of measured quantity of material.At least a portion is passed through air chamber from the material of contiguous gas phase by flowing to carry through inducing of zone.The flow of this gas phase is expressed from the next:
M1+M2+M3=M4 (equation I)
In the formula, M1 passes through total clean average time of the mass flow that the gap enters the per unit width of zone and the above-mentioned substance by air chamber by what barometric gradient caused, M2 is per unit width mass flow average time that at least one first type surface from material enters described zone and the above-mentioned substance by air chamber, M3 passes through total clean average time of the mass flow that the gap enters the per unit width of zone and the above-mentioned substance by air chamber by what material movement caused, and M4 is mass flow average time of per unit width of leaving the above-mentioned substance in described zone from the air chamber outlet.For the size of purpose Rack of the present invention is the length in the gap on the direction vertical with the material movement direction and on material plane.
The inventive method and equipment are designed to a large amount of amounts of carrying by the diluent gas of air chamber that reduce.Use near the air chamber of material surface and little negative pressure gradient and can obviously reduce diluent gas, i.e. M1.Barometric gradient Δ p is defined as pressure p o poor of the pressure p c of air chamber bottom periphery and air chamber outside, wherein Δ p=pc-po.The value of M1 is usually greater than 0 but be no more than 0.25kg/ second/rice, better is greater than 0 but is no more than 0.1kg/ second/rice, preferably greater than 0 but be no more than 0.01kg/ second/rice.
In another expression way, the average speed that derives from M1 can be used to represent enter the flow of the carrier gas phase component of air chamber.Use near the air chamber of material surface and little negative pressure gradient can obviously reduce by the gap total clean average gas phase velocity (v).For the purpose of the present invention, (value v) is usually greater than 0 but be no more than 0.5 meter per second.
The purpose of the inventive method is the dilution that reduces gaseous component in the contiguous gas phase by the M1 among a large amount of minimizing equation I significantly.M1 represents to enter total pure qi (oxygen) phase dilution flow in the zone by what barometric gradient caused.The dilution meeting of material produces adverse influence to the efficient of gas phase gathering system and lock out operation subsequently in the contiguous gas phase.For the inventive method, M1 is greater than 0 but be no more than 0.25kg/ second/rice.In addition, because the gap between air chamber and the material surface is less, be no more than 0.5 meter per second usually by the volumetric flow rate of the gaseous component that passes through the gap of inducing conductance to cause.
This method is applicable to the application that need collect the steam component with effective and efficient manner ideally preferably.Organic and inorganic solvent is through being commonly used for carrier so that required composition is deposited on the example of the component on substrate or the material.These components are removed by providing enough energy to make solvent evaporate from substrate or material usually.Usually in order to meet the reason of health, safety and environment needs, require to remove recovered steam component afterwards from substrate or material at them.The present invention can collect the diluent stream that does not need to introduce big volume with the delivering vapor component.
In a better embodiment, the inventive method comprises uses the material that contains at least a evaporated components.Air chamber is arranged on next-door neighbour's material surface part.Then, thus material is applied energy evaporates at least a evaporated components to form the steam component.At least a portion steam component is trapped in the air chamber.The steam component is captured under high concentration usually, makes processing subsequently, becomes more effective as separation.
The inventive system comprises and be used for the supporting device of supporting material.This material has at least one first type surface that contiguous gas phase is arranged.Air chamber near the surface of material to stipulate the gap between surface and the collection air chamber.Contiguous gas phase between air chamber and the material has stipulated to contain the zone of measured quantity of material.The mechanism that is connected with air chamber causes in the contiguous gas phase at least a portion material to be carried by the zone.Material is conveyed into the flow of air chamber and is represented by equation I by the zone.Steam in the air chamber can optionally be transported to otherwise processed in the separating mechanism.
Method and apparatus of the present invention is applicable to preferably carries and collects solvent from the fabric of motion.In operation, air chamber places above the fabric of continuous motion to collect the steam of high concentration.The pollution problem that the efficient and having eliminated basically that the low volume flow of steam and high concentration have improved solvent recovery produces when using conventional component gathering-device.
Method and apparatus of the present invention preferably is used in combination with the gap drying system of routine.The gap drying system is generally carried material by gap narrow and small between hot plate and the cold plate, in order to evaporation and the evaporated components in the condensed material subsequently.The structure of this device can make each position of gap drying system further be captured in to enter before the drying equipment of gap or is present in gaseous component in the contiguous gas phase on the material surface when leaving usually.
To achieve the object of the present invention, the following term definition that uses among the application is as follows:
" mass flow average time " is by equation
Expression, in the formula, MI is mass flow average time (kg/ second), and t is time (second), and mi is instantaneous mass flow (kg/ second);
" barometric gradient " is meant the pressure differential between air chamber and the external environment condition;
" induce stream " and be meant the flow that produces by barometric gradient usually.
Further feature and advantage will be clearer from the description to following embodiment and claim.
Description of drawings
With reference to accompanying drawing, from the following detailed description, above-mentioned and other advantage of the present invention to those skilled in the art will be clearer:
Fig. 1 is a schematic diagram of the present invention;
Fig. 2 is the schematic diagram of a better embodiment of gas phase gathering-device of the present invention;
Fig. 3 is the schematic cross-section of a better embodiment of gas phase gathering-device of the present invention;
Fig. 4 is the isometric drawing of a better embodiment of gas phase gathering-device of the present invention;
Fig. 5 a is the schematic diagram of the better embodiment of the present invention that combines with the gap drying system;
Fig. 5 b is the schematic diagram of a better embodiment combining with optional mechanical seal;
Fig. 6 is the schematic diagram of a better embodiment combining with optional contractile mechanical seal;
Fig. 7 is the schematic diagram of another better embodiment of the described gas phase gathering system of embodiment that provides herein and device.
The specific embodiment
Method and apparatus 10 of the present invention briefly is described in Fig. 1.This method comprises provides the material 12 with at least one first type surface that contiguous gas phase (not shown) is arranged 14.Air chamber 16 with exhaust outlet 18 is near the gap between the surface 14 of the bottom periphery 19 of sentencing regulation air chamber 16 and material 12.The height H in gap is 3cm or littler preferably.Contiguous gas phase between the bottom periphery 19 of air chamber 16 and the surface 14 of material 12 has stipulated to have the zone of a certain amount of material.Material in this zone is gas phase usually., those skilled in the art thinks that this zone also can contain the material that is liquid phase or solid phase, perhaps the material of all three kinds of phase state combinations.
At least a portion is induced stream to carry by air chamber 16 from this regional material.Fluid can be introduced by the common known conventional of those skilled in the art mechanism.Enter and the mass flow of the per unit width by air chamber is represented by following equation I:
M1+M2+M3=M4 (equation I)
Fig. 1 has described the various fluid streams that run into when implementing the inventive method.M1 passes through total clean average time of the mass flow that the gap enters zone and the per unit width by air chamber by what barometric gradient caused.To achieve the object of the present invention, M1 represents diluent stream in fact.M2 is per unit width mass flow average time that at least one first type surface from material enters described zone and the above-mentioned substance by air chamber.M3 passes through total clean average time of the mass flow that the gap enters the per unit width of zone and the above-mentioned substance by air chamber by what material movement caused.M3 is construed to mechanical traction thing and covering usually, and it comprises the material by the motion traction of material under the air chamber, and along with the material of material by under air chamber, drawing.Under situation static under the air chamber, M3 will be 0 at material.At gap H is that M3 is 0 under uniform (that is, the gap of the entrance and exit of air chamber equates) situation.When the inlet with the outlet gap inhomogeneous (promptly unequal) time, M3 is not 0.M4 is mass flow average time that exports the per unit width transportation of substances of the above-mentioned substance that leaves described zone from air chamber.Known substance can deliver in the zone rather than by air chamber by the gap and carry.These flows are not included in the total net flow that comprises among the equation I.For the size of purpose Rack of the present invention is in gap length vertical with the material movement direction and on material plane.
The inventive method and equipment are designed to a large amount of amounts that reduce the diluent gas of carrying by air chamber.Use near the air chamber of material surface and minimum negative pressure gradient and can obviously reduce diluent gas, i.e. M1.Barometric gradient Δ p is defined as pressure p o poor of the pressure p c of air chamber bottom periphery and air chamber outside, wherein Δ p=pc-po.The value of M1 is usually greater than 0 but be no more than 0.25kg/ second/rice.Preferably, M1 is greater than 0 but be no more than 0.1kg/ second/rice, preferably greater than 0 but be no more than 0.01kg/ second/rice.
In another expression way, the average speed that derives from M1 can be used to represent the flow velocity by the carrier gas phase component of air chamber.Near the air chamber of material surface and little negative pressure gradient can obviously reduce by the gap total clean average gas phase velocity (v).The average gas phase velocity that derives from M1 is defined as: (v)=M1/ ρ A.In the formula, M1 such as above-mentioned, ρ are current density (kg/m
3), A is the sectional area (m in the zone that enters of fluid
2).In the formula, A=H (2w+2l), H such as above-mentioned wherein, w is the length in the gap on the direction vertical with the direction of motion of material, the 1st, the length in the gap on the material movement direction.For the purpose of the present invention, (value v) is usually greater than 0 but be no more than 0.5 meter per second.
Air chamber and less barometric gradient near the surface make the material in contiguous gas phase pass through air chamber with the dilution conveying of minimum.Like this, can under higher concentration, carry and collect with low flow velocity.This method also is applicable to carries and collects more a spot of material that is arranged in contiguous gas phase.Clearance height is generally 3cm or lower, better is 1.5cm or lower, preferably 0.75cm or lower.In addition, in a better embodiment, the gap that centers on the air chamber periphery is uniform basically.But the gap can change, and perhaps for special purposes, the gap can be uneven.In a better embodiment, the periphery of air chamber is than material, and perhaps the fabric of carrying under air chamber is wide.In this case, this air chamber can be designed to seal each limit with the average time mass flow (M1) of further minimizing from the per unit width of barometric gradient.This air chamber also can be designed to be fit to difform material surface.For example, this air chamber can have the bottom periphery that is cut into circular arc to be fit to cylindrical surface.
The material that uses can comprise any material that can place near the air chamber part.Preferable material is a fabric.Fabric can comprise that one or more layers is applied to suprabasil material or coating.
Suitably to air chamber sizing and operation to be provided under the undiluted basically situation abundant collection, to such an extent as to perhaps there is not the excessive loss of gaseous component they can not be sucked in the air chamber to gaseous component.Those skilled in the art can design and operate this air chamber and be used for suitably reclaiming gaseous component with evaporation rate and the required rate of flow of fluid that given material is provided.For flammable gaseous component, for safety, preferably when being higher than upper limit of flammability, concentration captures steam.In addition, the gap can remain on the major part of fabric.Some air chambers also can place along operating on the each point in the path that fabric passes through.Each independent air chamber can be operated under different pressure, temperature and gap with different materials various processes.
Material from the zone conveying by air chamber finish by introducing barometric gradient.Barometric gradient is usually by mechanical device, and for example pump, blower and fan produce.The mechanical device of introducing barometric gradient contacts with air chamber.Therefore, barometric gradient will cause that mass flow is by the exhaust outlet in air chamber and the air chamber.Those skilled in the art thinks that also barometric gradient also can derive from the density gradient of gaseous component.
Air chamber also can comprise the phase that one or more mechanisms carry the material that passes through air chamber with control, controls the phase transformation of component in the material thus.For example, the temperature control equipment of routine can be packed in the air chamber to prevent on the inside of air chamber, forming condensation.The non-limitative example of conventional temperature control equipment comprises heat(ing) coil, electric heater and external heat source.Heat(ing) coil provides the enough condensation of heat to prevent that steam group from dividing in air chamber.Conventional heat(ing) coil and heat-transfer fluid are applicable to the present invention.
According to concrete vapor composition, this air chamber can optionally comprise fire extinguisher.Place the extinguishing device of air chamber inside to allow gas by still having stopped that flame is to prevent fire or blast.Flame is the volume of gas that the chemical reaction of heat release (producing heat) spontaneously takes place to continue.When operating environment comprises oxygen, high temperature and mixed oxygen in the proper ratio when generating the imflammable gas of flammable mixture, need extinguishing device usually.Extinguishing device assigns to work by removing a kind of described one-tenth.In a better embodiment, the close gap of gaseous component by adjoining with the heat absorption material.The size of gap and material is decided according to concrete vapor composition.For example, but the metal heat-absorbing material of this air chamber filling expansion, aluminium for example, it uses the refined net metallic screen according to the mesh size of " NFA association criterion " to be contained in the bottom.
Be used for optional separator of the present invention and conveying equipment and also can comprise fire extinguisher.Routine techniques well known by persons skilled in the art is applicable to the present invention.Extinguishing device is used for air chamber and process equipment subsequently and does not need to introduce inert gas.Like this, the concentration of vapor stream can be carried out lock out operation usually with remaining valid.
This method is applicable to collects vapor composition continuously.This vapor composition is not dilution preferably, usually from air chamber inflow operating procedure subsequently.Operating procedure subsequently can comprise following optional step, for example separates or disappears and ruin one or more components in the gas phase.Lock out operation can controllably occur in air chamber inside, and perhaps it can occur in the outside.Preferably, vapor stream uses conventional separation method, for example absorbs, absorption, film separate or condensation separates.The high concentration of vapor composition and low volume flow have strengthened the gross efficiency of conventional lock out operation.Preferably at least a portion steam component is high enough to allow being separated in when carrying out under 0 ℃ or the higher temperature of steam component subsequently to capture in concentration.This temperature has prevented frosting in the separation process with equipment and method advantage.
Vapor stream from air chamber can contain steam or steam and mixtures of liquids.Vapor stream also can be included in the granular materials of the preceding elimination of separation process.Suitable separation method can comprise, for example Chang Gui separation method is as the vapor composition in the concentrated air-flow; The direct condensation of the vapor composition that dilutes in the air-flow; The direct condensation of the vapor composition that concentrates in the air-flow; Two sections direct condensations; Use the vapor composition that dilutes in activated carbon or the synthetic adsorbing medium adsorption gas flow; Use the vapor composition that concentrates in activated carbon or the synthetic adsorbing medium adsorption gas flow; Use has the vapor phase component of diluting in the medium adsorption gas flow of high absorption property; And use has the vapor phase component that concentrates in the medium adsorption gas flow of high absorption property.The destroying device that disappears comprises conventional device, as thermal oxidation apparatus.According to the composition of gaseous component, air-flow can optionally discharge or leach and emptying after leaving air chamber.
A preferred implementation of the present invention is described among Fig. 2-4.Device 20 of the present invention comprises the fabric of carrying by the fabric induction system (not shown) between heater block 24 and air chamber 26 22.Fabric 22 comprises the material that contains at least a evaporated components (not shown).Air chamber 26 comprises bottom periphery 28.Air chamber 26 makes the bottom periphery 28 of air chamber 26 stipulate the gap H between air chamber and the fabric 22 sentencing near fabric 22.Air chamber 26 randomly comprises the headroom 39 on heat(ing) coil 30, fire extinguishing parts 32 and the fire extinguishing parts 32.Manifold 34 provides and being connected of pressure control mechanism (not shown).Manifold 34 finally provides and has exported 36 to deliver a vapor in the treatment step subsequently.
In operating process, heater block 24 mainly provides conduction heat energy with the evaporated components in the evaporation fabric to the bottom of fabric 22.Air chamber 26 usefulness barometric gradients operations makes steam when fabric 22 is emitted, and wherein at least a portion steam is conveyed in the air chamber 26 by down suction H.The steam conveying that sucks in the air chamber 26 is used for further processing by manifold 34 and outlet 36.Gap H and barometric gradient allow under the situation that does not have dilution basically steam to be captured in the air chamber 26.
This better embodiment relates to the evaporated components in conveying and the collection material.Evaporated components can be in the material, on the material surface or in the contiguous gas phase.These materials comprise, for example Tu Bu substrate, polymer, pigment, pottery, thickener, fabric, non-woven fabric, fiber, powder, paper, food, medicine or their combination.Preferably, provide fabric as material.Then, also can utilize the separating part of material or the sheet material of material.
This material comprises at least a evaporated components.Evaporated components is can evaporate from material and any liquid or solid composition that separates.Non-limitative example includes organic compounds and inorganic compound or their combination, as water or ethanol.In general, originally evaporated components can be used as the solvent that begins to produce this material.The present invention is applicable to removing of solvent subsequently preferably.
According to the present invention, apply enough energy to evaporate at least a evaporated components to this material.The energy that need be used for evaporating evaporated components can apply by radiation, conduction, convection current or their combination.For example, hot conduction can comprise material by close flat heating plate, curved surface heating plate, or partly material is coated on heated cylinder around.The example of thermal convection current can comprise by nozzle, spout or forced air-ventilating system and imports hot-air to material.But electromagnetic radiation such as radio frequency, microwave energy or infrared energy guide material are also absorbed by material, cause the inside heating of material.Energy can be applied on any or all surfaces of material.In addition, can provide enough internal energies, for example occur in preheating or heat-producing chemical reaction in the material to this material.Energy applies technology and can be used singly or in combination.
The energy that those skilled in the art become known for heating can be provided by the source of routine.For example, enough energy can provide by burning or other thermal source of electricity, fuel.Energy can directly change into heat at point of application, perhaps indirectly by heating liquid such as water or oil, heated air such as air or inert gas or heating steam such as air-flow or conventional heat-transfer fluid.
Air chamber of the present invention near the material part between the bottom periphery of air chamber and material, to form the gap.This gap is the uniform basically space length between the bottom of material surface and air chamber preferably.Clearance distance better is below the 3cm, is more preferably below the 1.5cm, preferably below the 0.75cm.This air chamber is operated under barometric gradient and is made steam suck in the air chamber.When steam sucked air chamber, the air chamber of close material reduced to minimum with the dilute strength of steam.Except the gap, the dilution of steam component also can be attached to mechanical component in the air chamber by use, reduces to minimum as the extension among Fig. 2-4 35,37.When extending beyond fabric and contacting with heating platen 24, the extension also provides the sealing of side.
According to the present invention, preferably select the generation speed of total mass flow rate with gaseous component in the matching materials closely.This will help to prevent the dilution or the loss of steam component.Total volumetric flow in the air chamber preferably be at least the steam component volume flow 100%.In addition, the present invention can realize uniform flow rate basically in the inlet surface of passing air chamber.Can realize when having headroom on one deck porous media in air chamber.In described situation, the pressure of side falls to fall with the pressure by porous media and ignores in headroom.Those skilled in the art will know that the aperture that can regulate headroom and porous media is to regulate the flow velocity by the inlet surface of air chamber.
In another better embodiment, the configurable gap drying system that routine is arranged of air chamber of the present invention.The gap drying system uses direct solvent condenses and the heat conduction combination for main heat transfer, does not therefore need to apply compulsory convection current with evaporation with take away the solvent evaporant.The gap drier is made of hot plate that is separated by little gap and cold drawing.The uncoated side of the contiguous fabric of hot plate provides energy with evaporation coating solvent.The contiguous coated side of cold drawing provides the driving force of condensation and the conveying of solvent evaporant to pass the gap.Cold drawing with surface configuration is provided, and it has prevented that liquid from dripping back on the surface of coating.Along with the substrate feed of coating by the gap between the two boards, recovery dry and solvent is carried out simultaneously.The gap drying system is described in U.S. Patent No. 6,047 fully, in 151,4,980,697,5,813,133,5,694,701,6,134,808 and 5,581,905, with them all with reference to being incorporated into this.
Air chamber can be arranged on the some optional points of gap drying system.For example, air chamber can place opposing ends, gap drier inside or their combination of gap drier.Fig. 5 a shows the air chamber 40 on the trailing edge 44 that is positioned at gap drying system 42.
In the configuration of the gap of routine drying type, some gaseous component is carried by suck out the back from the fabric of motion.Gaseous component in the gap between fabric and top board may be vital, because its common available evaporated components is saturated.This component (solvent or other component) may be vital, at this moment because of the reason of considering from environment, health or secure context.When this gap enough hour, the volume of this extraction flow Q can be easy to from fabric speed V
Fabric, maximal clearance height h
uAnd film/fabric width W calculates:
Q=(1/2) (V
Fabric) (W) (h
u)
For example, for the fabric speed of 0.508 meter per second, width is 1.53m, and the gap is 0.0492cm, this means that flow is 0.00123m
3/ second.This be one less and be considered to than with the more manageable flow of other conventional drying means (the present invention of gas phase flow-rate ratio exceeds the several number magnitude).
Like this, air chamber of the present invention is suitable for carrying and collecting the material of less volume in the contiguous gas phase of fabric.Its basic embodiment is shown in Fig. 5 a.Gap drying system 42 comprises the fabric 46 between cold plate 48 and hot plate 50.Spacing is that the gap of H is formed between the upper surface and cold plate 48 of fabric 46.Cold plate 48 comprises that capillary surface 52 is to carry the material of condensation from condensing surface 54.Air chamber 40 is configured in fabric 46 and leaves the gap part is left gap drying system 42 with collection gaseous component.
Applying sealing to the trailing edge of air chamber can help mass flow to pass through this air chamber.Sealing plays the cleaning effect to be left from the trailing edge of air chamber to prevent gas, so just forces it to enter in the air chamber.Sealing can comprise and is forced to gas or mechanical seal.Fig. 5 a has described along the optional air that is forced to of the downward direction of arrow on the exterior portion 41 of air chamber and has flowed F.Be forced to gas barrier by any gaseous component of fabric 46 carrying of motion.This gas can be air, nitrogen, carbon dioxide or other inert gas system of cleaning.
Mechanical seal also can be used to force gaseous component to enter in the air chamber.Fig. 5 b shows in the outside 41 of air chamber 40 and uses flexible seal parts 56 to reduce the amount of carrying by the diluent gas of air chamber 40.Flexible seal 56 can be pulled on fabric 46 or be placed the little gap location of fabric 46.In this case, the gap is uneven, is approximately 0 at the exit H near sealing.
Mechanical seal also can comprise contractile sealing mechanism shown in Figure 6.Show among the figure,, dispose contractile sealing mechanism 76, also comprise cold plate 68 and hot plate 70 together with air chamber 60 and gap drying system 62 for guaranteeing normal continued operation.In this configuration, contractile sealing mechanism 76 can be arranged on the littler gap location than the surface that is mechanically sealed to fabric 66 of other form.This less clearance more effectively is used for removing the gaseous component in boundary layer and can not scratch or damage coating or fabric face when capturing gaseous component from the fabric 66 of motion.Gap to fabric 66 surfaces can be 0.00508-0.0508cm or bigger.The gap is more little, and the efficient of gaseous component of removing the boundary layer is high more.The efficient of contractile sealing mechanism 76 is improved by the thickness that increases sealing, will be maintained in sealing surfaces corresponding with fabric on the seal point 78 simultaneously.Use dummy roll 80 shown in Figure 6, then contractile sealing mechanism 76 has the shape that be cut into circular arc corresponding with the radius of dummy roll 80.The thickness of collapsible sealing mechanism can be that 1.5cm is extremely greater than 3cm.Plate is thick more, and sealing area is big more, and is so just more effective.Actual thickness is determined as dummy roll radius and dummy roll cornerite according to following factor.Sealing can be shifted to the position of contraction by using actuator 82 or other mechanical device.The configuration of holding up prevented to the pollution of sealing mechanism 76 with to the destruction of fabric 66, and allows ultra high build coating to pass through, and perhaps allows splicing thing or other thickening thing to pass through.But the contraction automation of the known collapsible sealing mechanism 76 of those skilled in the art also can be to known thickening thing, as the splicing or ultra high build coating control, perhaps, even can be connected the contraction that never reckons with situation to allow to run into sensor (as pritch, laser detector etc.) (not shown) for the thickening thing.
Equipment utilization of the present invention be used for material is fixed on the gap of material supporting device to guarantee to suit near the air chamber part.Conventional material handling system and device are applicable to the present invention.
This equipment comprises aforesaid air chamber, is placed on the material with the gap between the bottom periphery of prescribed material surface and air chamber.This air chamber is made of conventional material also can be designed to satisfy special use standard.This air chamber can be used as the environment that there is or can be placed on sealing in independent device, during for example baker surrounds.In addition, randomly place the extinguishing device of air chamber and heat(ing) coil can comprise conventional known devices and material.
The above-mentioned energy is used for providing enough energy with at least a evaporated components in the evaporating materials to this material.Common known heating and heat transfer unit (HTU) is applicable to the present invention in this area.
The vapor stream that concentrates that is collected in the air chamber can further separate as absorption, absorption, film separation or condensation with the separator and the method for common described routine.Those skilled in the art can select concrete lock out operation and device based on vapor composition and required separative efficiency.
In operating process, the present invention need not dilution basically, also need not to make the steam components condense, just can capture at least a portion steam component in drying system.Under high concentration, collect steam component salvage material effectively.Need not condensation in drying system has just reduced condensate and has dropped on the first-class product quality problem of product.The present invention also uses lower air velocity, and it has reduced foreign material significantly and has entered drying system, has so just prevented the product quality problem of manufactured goods.
Embodiment
Embodiment 1
With reference to Fig. 7, the baker 100 with direct fired heater case 102 is used for the present invention.Baker 100 has disposed the supply gas pressure ventilating system 104 with a plurality of high speed nozzles 106.These high speed convection nozzles 106 place in base material 1082.5cm.This material 108 is the fabrics with the plastic foil that is coated on lip-deep semi-rigid vinyl dispersion.High speed nozzle 106 provides high heat to material 108.Under oven drying temperature, the gas velocity that jet expansion is discharged is the 20-30 meter per second.The heater case has circulating fan 110 and the direct flame burner 112 of modulation.The air 116 of heater case mixing circulation air 114 and fresh supply, and make them pass through heater case 102.The temperature that direct flame burner 112 is modulated to control discharge air is 150-200 ℃.The required operating pressure of baker keeps by control baker exhaust 118 and auxiliary air 116.Air chamber 120 is the long structures of 10cm * 10cm * 200cm that made by stainless steel.Multiple air chamber (not shown) is installed in the 1.5cm of the material 108 that runs through baker 100.The outlet that has three 1.2cm on the top of each air chamber 120.These three outlets are to engage in the manifold 122 of 2cm at diameter.The diameter of manifold 122 is 2cm, and passes the outside of the shell of baker to baker 100.The manifold of baker external body is connected with condenser 124.Condenser 124 has the pipe of tubular construction in being, is made by stainless steel.The diameter of interior pipe is 2cm, and the diameter of outer tube is 3.5cm.It is the coolant outlet 128 of 2cm that condenser 124 has device cooling water inlet 126 and the diameter that diameter is 2cm.Device cooling water at cooling water inlet 126 is 5-10 ℃.The steam component that derives from material 108 is collected in the air chamber 120, and condensation in condenser 124 subsequently regathers in separator 130.The clean air stream that derives from separator 130 is that the pvc pipe of 2cm is gone to vavuum pump 132 by diameter.Control vavuum pump 132 remains under the barometric gradient relevant with the baker operating pressure with the pressure with air chamber 120.The effluent of vavuum pump 132 turns back to the baker body.This method need not to dilute the component of just collecting a large amount of evaporations from material 108 basically.After having operated 4000 hours, observe the material of generation at the interior zone of baker 100.This compares with conventional system and has improved about 100%.
Embodiment 2-5
The following table of comparisons 1 provides the example of the calculating of different system under concrete apparatus structure and operating condition.The definition of M1, M2, M3 and M4 as above.M5 is provided by mass flow average time (for example, auxiliary air stream in convection furnace) (units/second/rice) of the per unit width of any additional diluent stream that provides to air chamber.The width of this material (" w ") (cm of unit) is the measured value in the gap on the direction vertical with the direction of motion of this material.Average time gas phase velocity (v) as above-mentioned definition, unit is a meter per second.Pressure differential (" Δ P ") is the bottom periphery and the barometric gradient between the air chamber outside (Pa of unit) of air chamber.The speed of material (" V ") is measured with meter per second.
The average speed of the gaseous component by the gap (but v) operating speed meter such as hot wire anemometer, with known to system's gap sectional area calculate mensuration from equation 1, perhaps use following formula to estimate
Pass between volume flow Q and the flow mass M is M=ρ Q, and in the formula, ρ is the density (units/m of gaseous component
3).The gas phase temperature relational expression can with perfect gas law replace into, be expressed as
In the formula, MW is the molecular weight of gas phase, and p is a pressure, and R is a gas constant, and T is a gas phase temperature.If have only dilution flow rate M1 the unknown, but user's formula 1 is calculated dilution flow rate M1, perhaps calculates with following formula
M1=ρ H (v) (equation 4)
Comparative example 2
A typical air convection drying system is made of a huge fully sheathed case that disposes the high speed convection nozzle.The material that is form of fabric enters by the import gap of wide 76.2cm, high 10.2cm.This material is discharged by the outlet gap identical with the import gap size.This material is carried center by the gap with the speed of about 1 meter per second.This material is that the polyester textile of coating constitutes by having organic solvent, and in its drying during through this fully sheathed case.The operating condition of dryer system is as follows.Global cycle flow in the air chamber is 18.6kg/ second/rice, and the pressure of fully sheathed case (air chamber) is set at-5Pa.Extraction flow M4 by air chamber is 7.43kg/ second/rice.Cause by the barometric gradient of-5Pa, be 0.71kg/ second/rice by go forward side by side flow M1 in the air inlet chamber of import and outlet gap.M1 calculates with equation 4.The flow M2 that is caused by the evaporation (promptly dry) of the solvent of coating fluid is 0.022kg/ second/rice.The calculating of the value of M2 be supposition by fluid stream M4, for the solvent of LFL with 1.5 volume of solvent concentration %, remain on 20% than low combustible restriction (LFL).Is 0 by material movement by the net flow M3 that enters the gap that air chamber causes.The flow M5 that enters the auxiliary air in the air chamber is 6.7kg/ second/rice.Calculating with equation 2 by the total clean average gas phase velocity of asking the crack, (v) is 2.9m/sec.The value of calculating is verified by the measured value of using hot wire anemometer.
Comparative example 3
A typical inert gas countercurrent system is made of a huge fully sheathed case that disposes the high speed convection nozzle.Material enters by the import gap of wide 76.2cm, high 2.54cm.This material is discharged by the outlet gap identical with the import gap size.This material is carried center by the gap with the speed of about 1 meter per second.This material is that the polyester textile of coating constitutes by having organic solvent, and in its drying during through this fully sheathed case.The operating condition of dryer system is as follows.Global cycle flow in the air chamber is 5.66kg/ second/rice, and the pressure of fully sheathed case is set at 2.5Pa.Extraction flow M4 by air chamber is 1.48kg/ second/rice.The flow M1 of import that caused by the barometric gradient of+2.5Pa, by air chamber and outlet gap is 0.12kg/ second/rice.M1 calculates with equation 4.The flow M2 that is caused by the evaporation (promptly dry) of the solvent of coating fluid is 0.03kg/ second/rice.The value of M2 is determined by the solvent (separator) as the part of dilution flow rate M5 that reclaims from M4 that returns 2 volume % before the drier.Is 0 by material movement by the net flow M3 that enters the gap that air chamber causes.Extra dilution flow rate M5 is 1.57kg/ second/rice.M5 is that the flow by flow that returns from separator and inert gas supply constitutes.Total clean average gas phase velocity by the gap calculates with equation 2, (v) is 2m/sec.
Embodiment 4
In the present embodiment, the vapor collection device combines with the gap drying system of routine and captures and collect the gaseous component that leaves the gap drier.Fabric is carried by device of the present invention by induction system.This fabric constitutes by being coated with the polyester film that is dispersed in the inorganic material in the second alcohol and water.This fabric is that 30.5cm, height H are that the import gap of 0.32cm enters by width w.This material is discharged by the outlet gap identical with the import gap size.This fabric is carried below gap and air chamber with the speed of 0.015 meter per second.Record exhaust stream M4 and be 0.0066kg/ second/rice.The import of passing through air chamber that is caused by the barometric gradient of introducing and the flow M1 and the M4 approximately equal of outlet gap are 0.0066kg/ second/rice.M1 calculates with equation 1.One is cut to practical purpose, and fabric and coating are done when leaving the gap drier, and M2 is 0 like this.This can use the standard redrying to measure and prove, wherein, when fabric be coated with material samples when at high temperature dry again, does not finally demonstrate the loss in weight.Is 0 by material movement by the net flow M3 that enters the gap that air chamber causes, does not have extra dilution flow rate M5.Average gas phase velocity by the gap is calculated by equation 1 and 4, (v)=0.086m/sec.Calculating barometric gradient with equation 2 is 0.0045Pa.
Embodiment 5
In the present embodiment, fabric by induction system carry by basically to similar device shown in Fig. 2-4.This fabric comprises the polyester film that has been coated with the material that is made of 10% SB solution in the toluene.This fabric forms the gap thus between the exposed surface of the bottom periphery of air chamber and material below air chamber.The width w in this gap is that 15cm, height H are 0.32cm.This material gap location identical with the import gap size below air chamber leaves.This fabric is carried below gap and air chamber with the speed of 0.0254 meter per second.The operating condition of dryer system is as follows.Heater block remains on 87C, and air chamber remains on 50C.Record exhaust stream M4 and be 0.00155kg/ second/rice.By passing through of causing of the barometric gradient of the introducing flow M1 that import and outlet gap leave air chamber is 0.00094kh/ second/rice.M1 calculates with equation 1.The flow M2 that is caused by the evaporation of toluene is 0.00061kg/ second/rice.Is 0 by material movement by the net flow M3 that enters the gap that air chamber causes.There is not extra dilution flow rate M5.Total pure qi (oxygen) phase average speed by the gap is calculated by equation 1,3 and 4, (v)=0.123m/sec.
Table 1
Embodiment | M4 kg/ses/m | M3 kg/sec/m | M2 kg/sec/m | M1 kg/sec/m | M5 kg/sec/m | H cm | w cm | (v) m/sec | Δp Pa | V m/sec |
2. air convection drying system | 7.43 | 0 | 0.022 | 0.71 | 6.7 | 10.2 | 76.2 | 2.9 | -5 | 1 |
3. inert gas countercurrent system | 1.48 | 0 | 0.03 | -0.12 | 1.57 | 2.54 | 76.2 | 2 | 2.5 | 1 |
4. exhaust outlet | 0.0066 | 0 | ≈0 | ≈0.0066 | 0 | 0.32 | 30.5 | 0.086 | ≈-0.0045 | 0.015 |
5. drying system | 0.00155 | 0 | 0.00061 | 0.00094 | 0 | 0.32 | 15 | 0.123 | ≈-0.009 | 0.0254 |
From above disclosed basic principle of the present invention and preceding detailed description, those skilled in the art will readily appreciate that the present invention is allowed to carry out various modifications.Therefore, scope of the present invention should not only be confined to following claim and content of equal value thereof.
Claims (34)
1. vapor collection method, it comprises:
(a) provide at least a material with first type surface of at least one contiguous gas phase;
(b) air chamber is arranged on surface near described material, stipulates the gap between described air chamber and the surface, wherein, the contiguous gas phase between described air chamber and the surface has stipulated to have the zone of measured quantity of material;
(c) impel at least a portion to carry and pass through air chamber from the material in described zone, wherein, M1 is meant by what barometric gradient caused and passes through total clean average time of the mass flow that described gap enters zone and the above-mentioned substance by air chamber, M2 is meant mass flow average time that enters the above-mentioned substance in described zone from least one first type surface of described material, M3 is meant total clean average time of the mass flow that is entered the above-mentioned substance in described zone by described material kinetic by the gap, M4 is meant mass flow average time of leaving the above-mentioned substance in described zone from the air chamber outlet, M1+M2+M3=M4; The value of M1 is greater than 0 but be no more than 0.25kg/ second/rice.
2. method according to claim 1 is characterized in that: the controlled temperature system in the described air chamber prevents the phase transformation of component in the described material.
3. method according to claim 1 is characterized in that: described material is a fabric.
4. method according to claim 1 is characterized in that: it also comprises from described conveying by separate vapour component the material of air chamber.
5. method according to claim 4 is characterized in that: described separation method comprises that absorption, absorption, film separate or condensation.
6. method according to claim 4 is characterized in that: the controlled temperature system of described steam component prevents steam condensation before separating.
7. method according to claim 1 is characterized in that: it also comprises the destroying device that disappears that is connected with air chamber that is used to accept described material.
8. method according to claim 1 is characterized in that: described gap is 3cm or littler.
9. method according to claim 1 is characterized in that: described air chamber comprises at least a extinguishing device.
10. method according to claim 1 is characterized in that: described M1 is not more than 0.1kg/ second/rice.
11. method according to claim 1 is characterized in that: the total clean average speed of described M1 is not more than 0.5 meter per second.
12. method according to claim 1 is characterized in that: described one or more air chambers are used to capture the described steam component of at least a portion.
13. method according to claim 12 is characterized in that: described one or more air chambers are controlled independently of one another.
14. method according to claim 12 is characterized in that: the described steam component of at least a portion is high enough to allow be 0 ℃ or carry out when higher capturing from air chamber under the condition of separation of steam component subsequently in temperature in concentration.
15. method according to claim 1 is characterized in that: the average time mass flow of described conveying by the zone be at least from least one first type surface of described material enter the zone average time mass flow 100%.
16. method according to claim 1 is characterized in that: described air chamber is in the environment of sealing.
17. method according to claim 1 is characterized in that: described material comprises at least a evaporated components, provides energy to evaporate described at least a evaporated components, thereby forms the steam component in the material of contiguous gas phase.
18. method according to claim 17 is characterized in that: described steam component is flammable, and is captured when being the concentration of upper limit of flammability at least.
19. method according to claim 17 is characterized in that: described air chamber is arranged on one or two opposite end of gap drying equipment.
20. method according to claim 17 is characterized in that: described air chamber is arranged in the drying equipment of gap.
21. method according to claim 17 is characterized in that: described material is a fabric.
22. method according to claim 17 is characterized in that: it also comprises an end that seals described air chamber, forces contiguous gas phase to enter in the described zone.
23. method according to claim 22 is characterized in that: described sealing realizes by forced gas or mechanical seal.
24. method according to claim 23 is characterized in that: described mechanical seal is movably.
25. a vapor collection setup, it comprises:
(a) be used for the bracket institution of supporting material, described material has first type surface of at least one contiguous gas phase;
(b) air chamber is arranged on surface near described material, the gap between regulation air chamber and the surface, wherein, the contiguous gas phase between described air chamber and the surface has stipulated to have the zone of measured quantity of material;
(c) a kind of mechanism is connected with described air chamber, impel at least a portion to carry by described zone from the material of described gas phase, wherein, M1 is meant by what barometric gradient caused and passes through total clean average time of the mass flow that described gap enters the above-mentioned substance in zone, M2 is meant mass flow average time that enters the above-mentioned substance in described zone from least one first type surface of described material, M3 is meant total clean average time of the mass flow that is entered the above-mentioned substance in described zone by described material kinetic by the gap, M4 is mass flow average time of leaving the above-mentioned substance in described zone from the air chamber outlet, M1+M2+M3=M4; The value of M1 is greater than 0 but be no more than 0.25kg/ second/rice.
26. equipment according to claim 25 is characterized in that: it also comprises the separator that is connected with described air chamber, and described separator is used to separate the individual components from carrying by the material of air chamber.
27. equipment according to claim 26 is characterized in that: described separation comprises that absorption, absorption, film separate or condensation.
28. equipment according to claim 25, it is characterized in that: described material comprises at least a evaporated components, described equipment comprises the energy, and the described energy can provide enough energy to evaporate described at least a evaporated components, thereby forms the steam component in described contiguous gas phase.
29. equipment according to claim 28 is characterized in that: described air chamber comprises the heater that is used for preventing described steam components condense.
30. equipment according to claim 28 is characterized in that: described energy was given it before described material is near air chamber.
31. equipment according to claim 25 is characterized in that: described material is a fabric, and described fabric is carried continuously and passed through air chamber.
32. equipment according to claim 25 is characterized in that: described air chamber comprises extinguishing device.
33. equipment according to claim 25 is characterized in that: it also is included in the sealing mechanism on the end of described air chamber, forces described contiguous gas phase to enter in the described zone.
34. equipment according to claim 25 is characterized in that: described air chamber is positioned at least one opposing ends of gap drying system or is positioned at the inside of gap drying system.
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
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US23422100P | 2000-09-21 | 2000-09-21 | |
US23521400P | 2000-09-24 | 2000-09-24 | |
US60/235,214 | 2000-09-24 | ||
US60/234,221 | 2000-09-24 | ||
US27405001P | 2001-03-07 | 2001-03-07 | |
US60/274,050 | 2001-03-07 |
Related Child Applications (1)
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CNB2005100794878A Division CN100404990C (en) | 2000-09-24 | 2001-09-21 | Vapor collection method |
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CN1464966A CN1464966A (en) | 2003-12-31 |
CN1238681C true CN1238681C (en) | 2006-01-25 |
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CNB018161480A Expired - Fee Related CN1238681C (en) | 2000-09-21 | 2001-09-21 | Vapor collection method and apparatus |
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EP (1) | EP1337799B1 (en) |
JP (1) | JP2004509315A (en) |
KR (1) | KR100808732B1 (en) |
CN (1) | CN1238681C (en) |
AT (1) | ATE355500T1 (en) |
AU (1) | AU2001296888A1 (en) |
BR (1) | BR0114083B1 (en) |
CA (1) | CA2423125A1 (en) |
MX (1) | MXPA03002499A (en) |
WO (1) | WO2002025193A1 (en) |
Families Citing this family (7)
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DE60131758T2 (en) * | 2000-09-24 | 2008-11-06 | 3M Innovative Properties Co., St. Paul | METHOD AND DEVICE FOR EXTRUDING MICROPOROUS FILMS |
US7032324B2 (en) | 2000-09-24 | 2006-04-25 | 3M Innovative Properties Company | Coating process and apparatus |
US7143528B2 (en) | 2000-09-24 | 2006-12-05 | 3M Innovative Properties Company | Dry converting process and apparatus |
US20030230003A1 (en) * | 2000-09-24 | 2003-12-18 | 3M Innovative Properties Company | Vapor collection method and apparatus |
IT201700077770A1 (en) * | 2017-07-11 | 2019-01-11 | Unitech Ind S R L | DRYING FURNACE FOR FABRICS AND DRYING METHOD FOR FABRICS |
EP3640034A1 (en) * | 2017-10-30 | 2020-04-22 | HP Scitex Ltd | Print agent drying |
EP3962752A4 (en) * | 2019-04-30 | 2022-12-07 | HP Scitex Ltd. | Print agent drying apparatus |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
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US602352A (en) | 1898-04-12 | Musical instrument | ||
US602740A (en) | 1898-04-19 | Fence-post | ||
DE499308C (en) * | 1927-06-29 | 1930-06-05 | Hermann Und Alfred Escher Akt | Device for the recovery of volatile solvents in machines and dryers working with conveyor belts |
GB713612A (en) * | 1951-10-29 | 1954-08-11 | Petrus Vial | Process and apparatus for the recovery of solvents on long webs |
US4012847A (en) * | 1975-11-24 | 1977-03-22 | Autosonics Inc. | Solvent recovery system |
US4053990A (en) * | 1976-03-03 | 1977-10-18 | Sav-Sol Drying Systems, Inc. | Differential pressure drying and solvent recovery unit |
US4462169A (en) * | 1982-02-19 | 1984-07-31 | W. R. Grace & Company | Web dryer solvent vapor control means |
SE458065B (en) | 1986-10-16 | 1989-02-20 | Tore Eklund | PARABOLAN TEST PARTS WHICH ARE MOVABLE FOR ADJUSTMENT AS WELL AS EXTENDING IN THE PLANET WHICH MAKES AN ANGLE ADJUSTMENT IN THE PLANET |
JP2552929B2 (en) * | 1990-02-20 | 1996-11-13 | 富士写真フイルム株式会社 | Gas seal device for the web penetration part of the processing chamber wall |
DE4009797A1 (en) * | 1990-03-27 | 1991-10-02 | Pagendarm Gmbh | METHOD AND ARRANGEMENT FOR CONDENSING VAPOROUS SUBSTANCES |
US5581905A (en) | 1995-09-18 | 1996-12-10 | Minnesota Mining And Manufacturing Company | Coated substrate drying system |
US5694701A (en) | 1996-09-04 | 1997-12-09 | Minnesota Mining And Manufacturing Company | Coated substrate drying system |
US5813133A (en) | 1996-09-04 | 1998-09-29 | Minnesota Mining And Manufacturing Company | Coated substrate drying system with magnetic particle orientation |
US6047151A (en) | 1998-05-06 | 2000-04-04 | Imation Corp. | Drying system and method for an electrophotographic imaging system |
US6134808A (en) | 1998-05-18 | 2000-10-24 | Minnesota Mining And Manufacturing Company | Gap drying with insulation layer between substrate and heated platen |
JP4429995B2 (en) * | 2005-09-29 | 2010-03-10 | 信越半導体株式会社 | Manufacturing method of semiconductor wafer |
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2001
- 2001-09-21 MX MXPA03002499A patent/MXPA03002499A/en not_active Application Discontinuation
- 2001-09-21 AT AT01977798T patent/ATE355500T1/en not_active IP Right Cessation
- 2001-09-21 AU AU2001296888A patent/AU2001296888A1/en not_active Abandoned
- 2001-09-21 JP JP2002528753A patent/JP2004509315A/en active Pending
- 2001-09-21 WO PCT/US2001/042247 patent/WO2002025193A1/en active IP Right Grant
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- 2001-09-21 CA CA002423125A patent/CA2423125A1/en not_active Abandoned
- 2001-09-21 EP EP01977798A patent/EP1337799B1/en not_active Expired - Lifetime
- 2001-09-21 KR KR1020037004175A patent/KR100808732B1/en active IP Right Grant
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BR0114083A (en) | 2004-07-06 |
BR0114083B1 (en) | 2010-07-27 |
EP1337799A1 (en) | 2003-08-27 |
CA2423125A1 (en) | 2002-03-28 |
MXPA03002499A (en) | 2004-05-24 |
EP1337799B1 (en) | 2007-02-28 |
JP2004509315A (en) | 2004-03-25 |
KR20030033079A (en) | 2003-04-26 |
WO2002025193A1 (en) | 2002-03-28 |
CN1464966A (en) | 2003-12-31 |
AU2001296888A1 (en) | 2002-04-02 |
ATE355500T1 (en) | 2006-03-15 |
KR100808732B1 (en) | 2008-02-29 |
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