CN1230041C

CN1230041C - State eliminator

Info

Publication number: CN1230041C
Application number: CN 02159708
Authority: CN
Inventors: 卢聪林; 陈盈吉
Original assignee: AU Optronics Corp
Current assignee: AU Optronics Corp
Priority date: 2002-12-30
Filing date: 2002-12-30
Publication date: 2005-11-30
Anticipated expiration: 2022-12-30
Also published as: CN1512832A

Abstract

The present invention discloses an electrostatic eliminator which is suitable for the electrostatic elimination of glass substrates of large sizes. The electrostatic eliminator comprises a rod body and a plurality of discharge needle sets, wherein a power supply line is arranged in the rod body in a penetrating mode, and the discharge needle sets are installed on the rod body at intervals. Each of the discharge needle sets comprises a plurality of discharge needles and a plurality of spray nozzles, wherein the discharge needles are electrically connected with the power supply line, and the spray nozzles are installed on the peripheries of the discharge needles and spray ions generated by the discharge needles onto a glass substrate under a certain spraying angle.

Description

Xelminator

Technical field

The present invention relates to a kind of Xelminator, more particularly, relate to a kind of Xelminator that is used to eliminate large-size glass substrate surface static.

Background technology

Static tend to by means of the contact or the friction and be formed on the object surfaces.And the static that is present in body surface can attract charged corpuscle all around, makes it be adsorbed in this object surfaces, pollutes; Therefore, for the various processing procedures of clean level strict demand, as: little shadow, manufacture of semiconductor such as etching must be avoided the generation of static as far as possible; In addition, regular meeting produces huge voltage in the discharge process after buildup of static electricity, causes the damage of semiconductor element easily.

The common method that is used at present to solve buildup of static electricity in manufacturing industry has: (1) is with equipment ground and adjust the relative humidity of environment, around the static of body surface is derived; (2) in the shielding of object added metal, this body surface is exerted an influence to avoid external power supply.But except the method for above-mentioned elimination static, also can utilize Xelminator to spray ion to the static of body surface with the corrective surface.

And employed Xelminator in the present manufacturing industry, eliminate principle and whether fed gases at high pressure according to static and distinguish, can be divided into active, passive type, air blowing type and non-air blowing type, wherein active Xelminator, difference according to its external power supply can be divided into straight flow and AC system again.

As shown in Figure 1, traditional interchange air blowing type Xelminator includes a body of rod 10 and a plurality of spray point group 20; In the body of rod 10, be connected with gases at high pressure; And there is a power line 11 that is connected with alternating current to be installed in the body of rod 10; And each spray point group 20 is located on the body of rod 10 with 5 to 10 centimetres spacing.

As shown in Figure 2, the spray point group 20 in the conventional electrostatic arrester includes a spray point 21 and a nozzle 22; Spray point 21 electrically connects with power line 11; Nozzle 22 is located at the periphery of above-mentioned spray point 21, is used to define the ion spray angle; The ion spray angle of said nozzle 22 is 35 degree, and this angle is a spray angle commonly used in the general manufacturing.

This conventional electrostatic arrester is when carrying out the static elimination, and power line 11 electrically connects with spray point 21 and also feeds alternating current, makes spray point 21 continue point discharges and produce ion; The electrical electrical veer and haul of this ion with alternating current; In addition, the gases at high pressure that feed in the body of rod 10 are sprayed to glass baseplate surface via the ion that nozzle 22 carries above-mentioned spray point 21 generations.

Yet, under the situation that the glass substrate size continues to increase now, do not terminated in effective removal static for the requirement of Xelminator, more require the reduction of cost and the saving of time simultaneously; Therefore, above-mentioned traditional Xelminator has following shortcoming:

1. Xelminator contains the angle deficiency.As shown in Figure 3, the angle that contains of this Xelminator is 35 degree, and the vertical range of itself and glass substrate is D, and the elimination area of Xelminator is F with this understanding; The length of this glass substrate is L, and width is W, and it alongst moves with respect to Xelminator with certain speed V.Because the angle that contains of above-mentioned Xelminator is fixed, therefore eliminate area and be restricted.

2. as shown in Figure 4, when the length of glass substrate when doubling, utilizing traditional Xelminator to carry out static eliminates, if do not changing under the situation of glass substrate with respect to Xelminator translational speed V, this glass substrate is finished static and is eliminated the required time and then increase to 2L/V by L/V, thereby has increased time cost; Finish the required time of static elimination to L/V if wish to reduce this glass substrate, then need relative moving speed is increased to 2V, thereby the ionic weight that causes the glass substrate unit are to receive has only original half, thereby causes the static of glass baseplate surface to be neutralized fully.

3. as shown in Figure 5,, utilize this Xelminator to carry out static when eliminating again if traditional Xelminator to the vertical range of glass substrate is increased to 2D by D; Because the angle that contains of Xelminator is fixed, the elimination area that the increase of this vertical range can increase Xelminator simultaneously to F ' (F '＞F).But, being accompanied by the increase of this vertical range, the ion concentration that spray point 21 produces also can reduce with duplicate ratio with the increase of above-mentioned distance; Simultaneously, the chance of the electrical neutralization of this ion is also along with reduction; Thereby the ion concentration deficiency that causes glass substrate to receive, cause static to eliminate the reduction of efficient.

4. as shown in Figure 5, after Xelminator to the vertical range of glass substrate increases to 2D, increased this static relatively and eliminated the required device space of processing procedure, thereby increased space cost.

Summary of the invention

The main purpose of Xelminator is the problem that is produced when eliminating large-size glass substrate static in order to solve among the present invention, such as: Xelminator is contained the angle deficiency; Xelminator and glass substrate cause glass substrate static to eliminate the efficient reduction apart from increase to be increased with the device space; Xelminator and the increase of glass substrate relative moving speed cause glass baseplate surface static to be neutralized fully.

Xelminator among the present invention comprises a body of rod and a plurality of spray point group; And having a power line to be installed in the above-mentioned body of rod, this spray point group is installed on the above-mentioned body of rod with a determining deviation (5 to 10 centimetres), and each spray point group includes a plurality of spray points.This spray point and said power electrically connect; Nationality is promoted the spray angle of spray point group by the needle point direction of adjusting above-mentioned spray point; Therefore, the Xelminator among the present invention can obtain the bigger angle that contains, and can effectively make the static of large-size glass substrate surface.

In addition, the angle between adjacent two spray points is 10 to 60 degree in the described same spray point group.

Description of drawings

Below in conjunction with accompanying drawing the specific embodiment among the present invention is described in further detail.

Fig. 1 is the structural representation of conventional AC air blowing type Xelminator;

Fig. 2 is the structural representation of spray point group in the conventional electrostatic arrester;

To be the conventional electrostatic arrester carrying out the schematic diagram of static when doing to Fig. 3;

Fig. 4 utilizes the conventional electrostatic arrester to carry out the schematic diagram of static cancel job when the length of glass substrate doubles;

Fig. 5 utilizes this Xelminator to carry out the schematic diagram of static cancel job when the distance of conventional electrostatic arrester and glass substrate doubles;

Fig. 6 A and Fig. 6 B are the structural representations of Xelminator among the present invention;

Fig. 7 is the schematic diagram of intermediate ion spray angle of the present invention;

Fig. 8 is the schematic diagram of Xelminator when carrying out the static cancel job among the present invention;

Fig. 9 A and Fig. 9 B are enforcement illustrations of Xelminator among the present invention;

Figure 10 A and Figure 10 B are the another enforcement illustrations of Xelminator among the present invention;

Figure 11 A and Figure 11 B are another enforcement illustrations of Xelminator among the present invention.

Embodiment

Xelminator among the present invention is to be equiped with a plurality of spray points in each spray point group, increasing the ion spray angle of this spray point group, thereby can improve the angle that contains of Xelminator.

Shown in Fig. 6 A and Fig. 6 B, the Xelminator in the first embodiment of the invention contains a body of rod 30 and a plurality of spray point group 40; In the body of rod 30, be connected with gases at high pressure, and have a power line 31 that is connected with alternating current to be installed in the body of rod 30; Spray point group 40 (5 to 10 centimetres) at certain intervals is installed on the body of rod 30, and each spray point group 40 includes two spray points 41 and a nozzle 42, and accompanies certain angle between adjacent two spray points 41 of same spray point group, and this angle is 10 to 60 degree.

Shown in Fig. 6 B, the figure shows the structure of the vertical body of rod 30 axis directions; Wherein the pattern of the spray point 21 of spray point 41 and nozzle 42 and conventional art shown in Fig. 2 and nozzle 22 is identical; Spray point 41 electrically connects with power line 31, and feeds alternating current, causes this spray point 41 to have high voltage, and sustainable discharge generation ion; Above-mentioned ion electrically be electrically to carry out veer and haul with above-mentioned alternating current; Nozzle 42 is installed in the periphery of spray point 41, is used to define the ion spray angle; Gases at high pressure in the feeding body of rod 30 carry spray point 41 generations via nozzle 42 ion is sprayed to glass substrate.

As shown in Figure 7, the spray angle of intermediate ion of the present invention shown in this figure, the above-mentioned spray point group 40 wherein spray angle of two nozzles 42 is adjacent one another are and not overlapping; Only have the ion spray angle of 35 degree to compare with conventional art spray point group 20 among Fig. 2, the spray point group of present embodiment can produce the ion spray angle that is about 70 degree.

As shown in Figure 8, the angle that contains of Xelminator is 70 degree, with the vertical range of glass substrate be D, the elimination area of above-mentioned Xelminator is F with this understanding ".Compare with the Xelminator of conventional art shown in Fig. 3, increase, eliminate the also corresponding increase of area F thereby make owing to contain angle among the present invention "＞F.

Shown in Fig. 9 A and Fig. 9 B, the Xelminator of another embodiment of the present invention includes a body of rod 30 and a plurality of spray point group 40, is connected with gases at high pressure in the body of rod 30; And there is a power line 31 that is connected with alternating current to be installed in its inside; Spray point group 40 (5 to 10 centimetres) at certain intervals is installed on the body of rod 30, and each spray point group 40 has included three spray points 41 and three nozzles 42; If increase the number of this spray point 41 again, above-mentioned Xelminator can obtain the bigger angle that contains.

Shown in Figure 10 A and Figure 10 B, the Xelminator of further embodiment of this invention includes a body of rod 30 and a plurality of spray point group 40; In this body of rod 30, be connected with gases at high pressure; And have one to be connected with in galvanic power line 31 is installed in; Spray point group 40 (5 to 10 centimetres) at certain intervals is installed on this body of rod 30; And each spray point group 40 includes two spray points 41 and two nozzles 42, and the charged ion that this spray point 41 produces and this DC power supply have identical electrical.

Shown in Figure 11 A and 11B, the Xelminator of yet another embodiment of the invention includes a body of rod 30 and a plurality of spray point group 40; And have in a power line 31 that is connected with alternating current is installed in: this spray point group 40 (5 to 10 centimetres) at certain intervals is installed on the body of rod 30; And this spray point group 40 includes a spray point 41.Present embodiment is a non-air blowing type Xelminator, do not add in the body of rod 30 therein gases at high pressure are arranged, also remove the nozzle 42 that is installed in each spray point 41 periphery simultaneously, thereby nationality is increased the angle that contains of Xelminator by the number that increases spray point group 40 spray points 41.

In addition; above-mentionedly only the preferred embodiment among the present invention is described; but can not be as protection scope of the present invention; because of as those skilled in the art it being made corresponding modification and modification is fine; therefore; the equivalence that designs spirit and make of the present invention of every foundation changes or modifies, and all should think to fall into protection scope of the present invention.

Claims

1. Xelminator is particularly useful for the Xelminator of large-size glass substrate, and it includes:

One body of rod is connected with a power line in this body of rod;

A plurality of spray point groups, these a plurality of spray point groups are installed on the described body of rod with a determining deviation; It is characterized in that: described each spray point group includes a plurality of spray points, and these a plurality of spray points are perpendicular to the axis direction of the described body of rod, and adjacent two spray points of same spray point group accompany certain angle; Described spray point and described power line join, and are used to produce ion, and this ion is sprayed to and is used to neutralize its surperficial static behind the glass baseplate surface.

2. according to the Xelminator described in the claim 1, it is characterized in that: the angle between adjacent two spray points of described same spray point group is 10 to 60 degree.

3. according to the Xelminator described in the claim 1, it is characterized in that: described power line passes to alternating current, and for this reason, the ion that described spray point produces is electrically electrically made veer and haul with above-mentioned power supply.

4. according to the Xelminator described in the claim 1, it is characterized in that: described power line passes to direct current, and for this reason, the ion that described spray point produces is electrically electrically identical with DC power supply.

5. according to the Xelminator described in the claim 1, it is characterized in that: the distance of described adjacent two spray point groups is 5 to 10 centimetres.

6. according to the Xelminator described in the claim 1, it is characterized in that: be provided with a nozzle at described each spray point peripheral equipment, and nozzle is sprayed to glass baseplate surface with certain spray angle with the ion that this spray point was produced.

7. according to the Xelminator described in the claim 6, it is characterized in that: the described body of rod is connected with gases at high pressure, and these gases at high pressure are sprayed to glass baseplate surface via described nozzle with the ion of discharge generation.

8. according to the Xelminator described in the claim 7, it is characterized in that: the spray angle of described nozzle is 35 degree.

9. according to the Xelminator described in the claim 1, it is characterized in that: described each spray point is not installed nozzle, and does not feed gases at high pressure in the body of rod therein.