CN1209769C - Adjustable continuous focus varying supertength aligning and focusing system for synchronous radiation space posture - Google Patents
Adjustable continuous focus varying supertength aligning and focusing system for synchronous radiation space posture Download PDFInfo
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- CN1209769C CN1209769C CN 03129391 CN03129391A CN1209769C CN 1209769 C CN1209769 C CN 1209769C CN 03129391 CN03129391 CN 03129391 CN 03129391 A CN03129391 A CN 03129391A CN 1209769 C CN1209769 C CN 1209769C
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Abstract
The present invention relates to an adjustable continuous zooming ultralong collimation and focusing system for a synchronous radiation space posture, which belongs to the field of synchronous radiation. A mirror space posture adjustment system of the present invention is connected with a mirror box vacuum system by a loose sleeve flange corrugated pipe of a mirror box vacuum system. A double-mode zooming mirror bending system with self weight balance is connected with the mirror box vacuum system by the loose sleeve flange corrugated pipe of the mirror box vacuum system, and is connected with the mirror space posture adjustment system by a supporting column installation seat, a supporting column and a supporting platform of the double-mode zooming mirror bending system. A mirror cooling water circulation system is connected with a mirror of the double-mode zooming mirror bending system with self weight balance by long strip type oxygen free copper, a press block and a stainless steel rod of the mirror cooling water circulation system, and is connected with a box body of the mirror box vacuum system by the double-knife edge flange type of the mirror cooling water circulation system. The structure of the present invention is simple, and the mirror has two working modes. Curvature is continuous and adjustable. The present invention can be automatically locked at the curvature radius of a required mirror. The space four-freedom degree orientation adjustment of the mirror can be realized, and vacuum installation and debugging difficulty are lowered.
Description
Technical field
What the present invention relates to is a kind of synchrotron radiation overlength collimation, focusing system, and continuous vari-focus overlength that particularly a kind of synchrotron radiation spatial attitude is adjustable collimates and focusing system, belongs to the instrument field of physics class.
Background technology
The mirror shape of synchrotron radiation overlength collimation, focusing system can grind and bend and obtain by mirror.The mirror surface figure accuracy height that grinds, in case but moulding, its radius-of-curvature is difficult to change.Mirror bends, and to be mechanism bend into required shape by mechanical force with the mirror of definite shape.The press-bending mirror has that curvature can be regulated, surface accuracy is high and be easy to advantage such as manufacturing.The development of the press-bending system of zoom overlength collimation, focusing system plays an important role for the development of synchrotron radiation.
Find by literature search, N.Kamachi, people such as K.Endo are 2
NdDelivered one piece on the International Workshop onMechanical Engineering Design of Synchrotron Radiation Equipment andInstrumentation (113 pages-121 pages of " second international Synchrotron Radiation and the meeting of instrument Mechanical Engineering Design " collections of thesis) and be entitled as the article of " Characteristics of Mechanically-Bent-ShapedMirror " (characteristics of mechanical press-bending mirror), this article is mentioned Toyama Co., a kind of bending mechanism of LTD company design, be referred to as " arm method (arm method) ", the mirror two ends are had the device of holding tightly of rotational freedom and are embraced, each is held device tightly and links to each other with an arm axle (arm shaft) that can apply press-bending power, thereby press-bending power is directly rotated downwards and held device tightly mirror is curved spill.This arm axle can be twitched in holding device tightly.Its shortcoming is that two arm axles are acted on by respectively in two application of force sources, very easily cause stressed unbalanced, thereby make the mirror distortion inhomogeneous.In the process that mirror bends, arm axle, the sliding pair contact area of holding device tightly are big, and two ends friction force is difficult to be consistent, and so also causes the mirror distortion inhomogeneous, simultaneously, has also reduced the efficient of system.In the light beam line process of construction of reality, " point, groove, face " supported at three point mechanism is adopted widely.The shortcoming of this mechanism is that three support bar ball joint heads are to be pressed on " point ", " groove ", " face " by weight, and there is the possibility of overturning in total system.And in the process that the mirror body position is adjusted, the motion of " point ", " groove ", " face " intercouples, and this has brought inconvenience for the adjustment of mirror attitude.
In addition, as the collimation that uses on the synchrotron radiation, focus on this class optical devices, vacuum tightness requires very high, generally 1 * 10
-8More than the holder, the final performance of debugging of vacuum design against vacuum and even whole device is important influence all.How according to particular problem, integrated or innovation is unique, easily, practical vacuum seal and connected mode become the problem of pendulum in the previous reality of engineering technical personnel's face.And synchrotron radiation luminous energy height, as the optical devices that are used under this specific condition, need the unloading thermal load.Existing water-cooling system water inlet pipe and water outlet pipe generally coils complicated spiral pipe pattern in mirrored cabinet, the cabling complexity is processed waywardly, very easily scraps.Installing also makes troubles.
Summary of the invention
The present invention is directed to the deficiencies in the prior art and defective, adjustable continuous vari-focus overlength collimation of a kind of synchrotron radiation spatial attitude and focusing system are proposed, make it simple in structure, curvature is adjustable continuously, and can lock in needed mirror radius-of-curvature certainly, can realize the space four-degree-of-freedom orientation adjustment of mirror, reduce the difficulty that vacuum is installed and debugged.
The present invention is achieved by the following technical solutions, the present invention includes: mirror spatial attitude Adjustment System, mirrored cabinet vacuum system, have dead-weight balanced double mode varifocal mirror press-bending system, mirror cooling water recirculation system, its connected mode is: mirror spatial attitude Adjustment System links to each other with the mirrored cabinet vacuum system by the loose flange corrugated tube () of mirrored cabinet vacuum system; Have dead-weight balanced double mode varifocal mirror press-bending system and then link to each other with the mirrored cabinet vacuum system by the loose flange corrugated tube (two) of mirrored cabinet vacuum system, and pass through its support column mount pad, support column links to each other with mirror spatial attitude Adjustment System; The mirror cooling water recirculation system links to each other by its long strip type oxygen-free copper, briquetting, stainless steel and the mirror that has a dead-weight balanced double mode varifocal mirror press-bending system, and links to each other with the casing of mirrored cabinet vacuum system by its double-pole mouth flange pattern.
Having dead-weight balanced double mode varifocal mirror press-bending system and mirror spatial attitude Adjustment System is an integral body, and this whole force application mechanism is arranged in atmosphere, realizes vacuum insulation by loose flange corrugated tube (), (two); Mirror cooling water recirculation system and mirror directly bundle, and its intake-outlet is realized vacuum insulating by double-pole mouth flange pattern on the mirrored cabinet base plate.
Band comprises with dead-weight balanced double mode varifocal mirror press-bending system: brace table, support column mount pad, support column, big frame, bearing revolute pair, small frame, balance nut, lever, stay cord, rectangular plate, mirror, the T-shape frame force application apparatus that has the guide rail of " waist " type groove short beam structure, T-shape frame, T-shape frame mount pad, linear bearing and axle composition, is made of stepper motor worm and gear and helical motion pair, its connected mode is: the mirror small frame links to each other with big frame by the bearing revolute pair, can rotate.The support column mount pad is contained on the brace table.Support column is contained on the support column mount pad, and its interphase is near mirrored cabinet flange place.Like this, when carrying out the vacuum debugging, the device in the vacuum chamber of then can resetting, and change copper band etc., bring great convenience.Big frame is installed on the support column, and balance nut and lever are by being threaded, and lever links to each other with rectangular plate, can rotate.Rectangular plate is supported on the big frame.Stay cord one end links to each other with lever, and an end links to each other with mirror.Mirror is through in the middle of the small frame, and tightens up.The T-shape frame on the one hand by bearing with have " waist " type groove short beam structure and link to each other, one side is installed in the T-shape frame mount pad by securing member.The linear bearing of the guide rail that linear bearing and axle are formed is installed on the brace table, and its axle is installed in the T-shape frame mount pad.The T-shape frame force application apparatus that is made of stepper motor worm and gear and helical motion pair is installed on the brace table, and links to each other with T-shape frame mount pad by screw pair.
Dead-weight balanced lever one end of mirror is the balance nut, and the other end is offset the deadweight of mirror by stay cord.So just reduced the influence of deadweight, guaranteed that mirror only is subjected to the moment of flexure effect, made that minute surface is easier to be pressed into needed shape mirror face type.
The mirror small frame links to each other with big frame by the bearing revolute pair, goes back one on the small frame and has processed enough the having of rigidity " waist " type groove short beam structure.The horizontal beam two ends of T type frame are installed with bearing, and bearing can be free to slide in having " waist " type groove short beam structure.When T type frame vertical beam was stressed, T type frame horizontal beam was applied to upper surface or the lower surface that small frame has " waist " type groove of " waist " type groove short beam structure with power by bearing, thereby produced the moment of flexure that makes the mirror distortion.T type frame force application apparatus is made up of motor, worm and gear, worm drive pair, in order to guarantee the frame vertical movement of T type and to prevent its rotation, has also assembled guide rail.But this force application structure has the lead angle and the worm screw lead angle of self-locking, thereby can make mirror remain on arbitrary radius-of-curvature place.This press-bending system has following two kinds of mode of operations, and when moving upward as T type frame, mirror bending under the moment of flexure effect is convex; When T type frame moved downward, mirror bending under the effect of moment of flexure was concavity.
Mirror spatial attitude Adjustment System comprises: the drive unit that is made of stepper motor worm and gear helical motion pair, two pairs of double-slider guide rails that move up and down along the z axle, two pairs of double-slider guide rails that move along the x axle, by axle and bearing form around the x revolute pair, be positioned under the brace table two along y to the double-slider guide rail that moves, Connection Block, arc-shaped guide rail around the rotation of z axle, by the drive unit that stepper motor helical motion pair constitutes, mirror form regulation system chassis, four screw rods and coarse positioning plate.Its connected mode is: mirror form regulation system chassis, four screw rods are housed on this chassis, and four screw rods then link to each other by the big base plate of coarse positioning plate and total system; The drive unit that is made of stepper motor worm and gear helical motion pair is contained on the chassis; The slide block of two pairs of double-slider guide rails that move up and down along the z axle is contained on the drive unit that is made of stepper motor worm and gear helical motion pair, and its slide rail is fixed on the mirror form regulation system chassis; The slide rail of two pairs of double-slider guide rails that move along the x axle links to each other with the drive unit that is made of stepper motor worm and gear helical motion pair, and its slide block links to each other with the arc-shaped guide rail that rotates around the z axle; By below the x revolute pair, linking to each other that axle and bearing are formed, link to each other with the double-slider guide rail above with the arc-shaped guide rail that rotates around the z axle; Connection Block links to each other with brace table on the one hand, one side with link to each other around the x revolute pair; The drive unit that is made of stepper motor helical motion pair is installed on the drive unit that is made of stepper motor worm and gear helical motion pair, and links to each other with one of two pairs of double-slider guide rails that move along the x axle respectively by the worm drive pair.Brace table has certain density and volume, can balance vacuum load.
In this mirror spatial attitude Adjustment System structure, the locus of mirror has then been represented in the locus of brace table, therefore, as long as adjust the position of brace table outside the casing vacuum chamber, just can adjust the attitude of the mirror in the casing vacuum chamber.Along z about moving two cover double-slider slide rails under the drive unit that is made of stepper motor worm and gear helical motion pair drives, promoting two ends, the brace table left and right sides moves up and down, thereby realize that the mirror elevation angle is adjusted and along the lifting of z axle, at this moment, the axial guide rail of y will compensate the change in displacement of bringing because of the lifting of z axle.X drives lower edge x to guide rail at the drive unit that is made of stepper motor helical motion pair and moves forwards, backwards, promoting two ends, the mirror body brace table left and right sides seesaws along the x axle, thereby make the rotation of mirror generation around the z axle, realize the adjustment of mirror pivot angle, its revolute pair is an arc-shaped guide rail.Realize that mirror rotates to an angle around the y direction of principal axis, the angle of rolling of promptly adjusting mirror then can reach by the position that adjustment is installed in four screw rod top nuts on the base.The self-locking of the mechanism of entire mechanism is then by selecting lead angle and worm screw lead angle to realize.
The mirror cooling water recirculation system comprises: the six roots of sensation is passed the stainless steel of mirror, two block length stripe shape oxygen-free coppers, five briquettings, cooling water pipe, mounting flange, inner flange, double-pole choma shape flange, its connected mode is: two block length bar shaped oxygen-free coppers simultaneously are the very low planes of roughness, alongst have the circular arc less than 1/2 garden identical with the cooling water pipe external diameter on the one side.This two block lengths stripe shape oxygen-free copper is after wrapping indium potassium sheet, passing the stainless steel of mirror and screw-nut and mirror by the six roots of sensation fits tightly, the parallel place of cooling water pipe then is pressed in water pipe in the circular arc of strip oxygen-free copper by five briquettings and screw packing ring, owing to wrapping indium potassium in the oxygen-free copper circular arc, so heat-transfer effect is better.Mounting flange and casing welding, inner flange and water pipe welding, double-pole choma shape flange links to each other with inner flange, mounting flange by copper band, securing member.
Adopt " single folding " pattern at the water inlet pipe and water outlet pipe place, simple in structure, be easy to realize.In order to make cooling water pipe be easily mounted on the mirror both sides, two fold-type formulas are adopted in cooling water pipe " U " type crook, increase the elasticity of its opening.In order to guarantee the sealing effectiveness in the vacuum chamber, cooling water pipe adopts a pipe to curve, middle no solder joint.To guarantee that synchrotron radiation focuses on, colimated light system can either unload thermal load, the not temperature distortion influence again of minute surface face shape.
The mirrored cabinet vacuum system comprises: casing, and big support, big base plate, loose flange corrugated tube (), (two), double-pole mouth form of flanges comprises mounting flange, inner flange, double-pole choma shape flange.Its connected mode is: big support is fixed with big base plate, casing is installed on the big support, loose flange corrugated tube (one), (two) one side are connected with casing by loose flange, another side links to each other with isolated atmosphere with the mechanical part that mirror spatial attitude Adjustment System is exposed to atmosphere with mirror press-bending system by corrugated tube, and water-cooling system and casing are realized vacuum insulating by double-pole mouth form of flanges.
Since mirrored cabinet with have dead-weight balanced double mode varifocal mirror press-bending system, mirror form regulation system respectively by different supported on shelves, thereby the vacuum connection inevitably can produce location dislocation between them, this has just caused extremely difficult aligning the when tightening the flange of corrugated tube, has adopted loose flange corrugated tube () and (two) to address this problem.The vacuum sealing system of water-cooling system then adopts double-pole mouth form of flanges, water-cooling system does not directly link to each other with mirrored cabinet mouth mounting flange, thereby in the vacuum debugging of changing copper band, flange, can not influence water-cooling system, when having avoided vacuum generation problem, water-cooling system also will be reformed, reset, thereby the risk of the components of system as directed refitting that causes bending.
The present invention has substantial characteristics and marked improvement, mirror press-bending system authority is simple, can unload the mirror deadweight, stressed relation is clear, moment applies symmetry, a machine has two kinds of mode of operations, and mirror curvature is adjustable continuously, and can lock in needed mirror radius-of-curvature certainly.The subsides of mirror water-cooling system and minute surface and mode structure uniqueness, it is convenient to implement; Mirror spatial attitude Adjustment System utilizes brace table can represent these characteristics of spatial attitude of mirror, by adjust brace table outside vacuum chamber, just can realize the space four-degree-of-freedom orientation adjustment of mirror easily; Mirror is really to be linked as by securing member, guide rail etc. with mirror spatial attitude Adjustment System, and mishap such as can avoid toppling takes place; The spatial attitude Adjustment System adopts from lock technology, can reliably keep current mirror orientation state; Utilized the weight unloading vacuum loading of brace table dexterously, simple and practical; Vacuum system adopts the loose flange corrugated tube to link to each other with airborne mechanical part, and all electrical equipment, the parts that need to lubricate all are designed to outside vacuum chamber, easilier reaches the vacuum tightness requirement; Corrugated tube adopts the loose flange pattern, and during the vacuum debugging, flange is aimed at convenient, has reduced the difficulty of vacuum installation and debugging; Water-cooling system adopts the double-pole mouth flange pattern of innovating with being connected of mirrored cabinet, has both made things convenient for the recopper circle, has changed flange equal vacuum debugging work, can avoid water-cooling system to scrap because of the vacuum debugging again.The cooling water pipe cabling adopts " list " fold-type formula at the intake-outlet place, adopt the two-fold pattern in U type crook, has made things convenient for processing, installation; Whole water cooling tube is that a pipe is made, and the centre does not have solder joint, more to guarantee vacuum tightness; Adopt support column mount pad, support column transition connected mode, can carry out the vacuum debugging and not influence entire system in the part.
Description of drawings
Fig. 1 general structure synoptic diagram of the present invention
Fig. 2 the present invention has dead-weight balanced varifocal double mode mirror press-bending system architecture synoptic diagram
Fig. 3 mirror spatial attitude of the present invention Adjustment System structural representation
Fig. 4 mirror cooling water recirculation system of the present invention structural representation
Fig. 5 mirrored cabinet vacuum system of the present invention structural representation
Embodiment
As shown in Figure 1, comprise: mirror spatial attitude Adjustment System 1, mirrored cabinet vacuum system 2, have dead-weight balanced double mode varifocal mirror press-bending system 3, mirror cooling water recirculation system 4, its connected mode is: mirror spatial attitude Adjustment System 1 links to each other with mirrored cabinet vacuum system 2 by the loose flange corrugated tube 45 of mirrored cabinet vacuum system 2, having dead-weight balanced 3 loose flange corrugated tubes 47 by mirrored cabinet vacuum system 2 of double mode varifocal mirror press-bending system links to each other with mirrored cabinet vacuum system 2, and by its support column mount pad 6, support column 7, brace table 5 links to each other with mirror spatial attitude Adjustment System 1, mirror cooling water recirculation system 4 is by its long strip type oxygen-free copper 34, briquetting 35, stainless steel 33 links to each other with the mirror 15 that has dead-weight balanced double mode varifocal mirror press-bending system 3, and links to each other with the casing 44 of mirrored cabinet vacuum system 2 by its double-pole mouth flange pattern 46.
Having dead-weight balanced double mode varifocal mirror press-bending system 3 and mirror spatial attitude Adjustment System 1 is an integral body, and this whole force application mechanism is arranged in atmosphere, realizes vacuum insulation by loose flange corrugated tube 45,47; Mirror cooling water recirculation system 4 directly bundlees with mirror 15, and its intake-outlet is realized vacuum insulating by double-pole mouth flange pattern 46 on mirrored cabinet 44 base plates.
As shown in Figure 2, having dead-weight balanced double mode varifocal mirror press-bending system 3 comprises: brace table 5, support column mount pad 6, support column 7, big frame 8, bearing revolute pair 9, small frame 10, balance nut 11, lever 12, stay cord 13, rectangular plate 14, mirror 15, have " waist " type groove short beam structure 16, T-shape frame 17, T-shape frame mount pad 18, the guide rail 19 that linear bearing and axle are formed, the T-shape frame force application apparatus 20 that constitutes by stepper motor worm and gear and helical motion pair, its connected mode is: mirror small frame 10 links to each other with big frame 8 by bearing revolute pair 9, support column 7 is arranged on the support column mount pad 6, its interphase is near mirrored cabinet flange place, big frame 8 is arranged on the support column 7, balance nut 11 and lever 12 are by being threaded, lever 12 links to each other with rectangular plate 14, rectangular plate 14 is supported on the big frame 8, stay cord 13 1 ends link to each other with lever 12, one end links to each other with mirror 15, mirror 15 is through in the middle of the small frame 10, and tighten up, T-shape frame 17 on the one hand by bearing with have " waist " type groove short beam structure 16 and link to each other, be arranged in the T-shape frame mount pad 18 by securing member on the one hand, the linear bearing of the guide rail 19 that linear bearing and axle are formed is arranged on the brace table 5, its axle is arranged in the T-shape frame mount pad 18, the T-shape frame force application apparatus 20 that is made of stepper motor worm and gear and helical motion pair is arranged on the brace table 5, and links to each other with T-shape frame mount pad 18 by screw pair.
As shown in Figure 3, mirror spatial attitude Adjustment System 1 comprises: the drive unit 21 that is made of stepper motor worm and gear helical motion pair, two pairs of double-slider guide rails 22 that move up and down along the z axle, two pairs of double-slider guide rails 23 that move along the x axle, by axle and bearing form around x revolute pair 24, be positioned under the brace table 5 two along y to the double-slider guide rail 25 that moves, Connection Block 26, arc-shaped guide rail 27 around the rotation of z axle, the drive unit 28 that constitutes by stepper motor helical motion pair, 29, four screw rods 30 in mirror form regulation system chassis and coarse positioning plate 31.Its connected mode is: mirror form regulation system chassis 29 is provided with four screw rods 30,30 of four screw rods link to each other by the big base plate 42 of coarse positioning plate 31 and total system, the drive unit 21 that is made of stepper motor worm and gear helical motion pair is arranged on the mirror form regulation system chassis 29, on the drive unit 21 that the slide block setting of two pairs of double-slider guide rails 22 that move up and down along the z axle is made of stepper motor worm and gear helical motion pair, its slide rail is fixed on the mirror form regulation system chassis 29, the guide rail of two pairs of double-slider guide rails 23 that move along the x axle links to each other with the drive unit 21 that is made of stepper motor worm and gear helical motion pair, its slide block links to each other with the arc-shaped guide rail 27 that rotates around the z axle, by below x revolute pair 24, linking to each other that axle and bearing are formed, link to each other with double-slider guide rail 25 above with the arc-shaped guide rail 27 that rotates around the z axle; Connection Block 26 links to each other with brace table 5 on the one hand, on the one hand with link to each other around x revolute pair 24, the drive unit 28 that is made of stepper motor helical motion pair is arranged on the drive unit 21 that is made of stepper motor worm and gear helical motion pair, and links to each other with double-slider guide rail 23 by the worm drive pair.
As shown in Figure 4, mirror cooling water recirculation system 4 comprises: the six roots of sensation is passed the stainless steel 33 of mirror, two block length stripe shape oxygen-free coppers 34, five briquettings 35, cooling water pipe 41, mounting flange 39, inner flange 38, double-pole choma shape flange 40 is formed, its connected mode is: two block length bar shaped oxygen-free coppers, 34 one sides are the very low planes of roughness, alongst have the circular arc less than 1/2 circle identical on the one side with cooling water pipe 41 external diameters, this two block lengths stripe shape oxygen-free copper 34 is after wrapping indium potassium sheet, passing the stainless steel 33 of mirror and screw-nut and mirror 15 by the six roots of sensation fits tightly, 37 at the parallel place of cooling water pipe is pressed in water pipe in the circular arc of strip oxygen-free copper 34 by five briquettings 35 and screw packing ring, mounting flange 39 and casing 44 welding, inner flange 38 and cooling water pipe 41 welding, double-pole choma shape flange 40 passes through copper band, securing member and inner flange 38, mounting flange 39 links to each other.
Adopt " single folding " pattern at water inlet pipe and water outlet pipe 32 places, two fold-type formulas are adopted in cooling water pipe 41 " U " type crook 36, and cooling water pipe 41 adopts a pipe to curve, middle no solder joint.
As shown in Figure 5, mirrored cabinet vacuum system 2 comprises: casing 44, and big support 43, big base plate 42, loose flange corrugated tube 45,47, double-pole mouth form of flanges 46, double-pole mouth form of flanges 46 comprises mounting flange 39, inner flange 38, double-pole choma shape flange 40.Its connected mode is: big support 43 is fixed with big base plate 42, casing 44 is installed on the big support 43, loose flange corrugated tube 45,47, be connected with casing 44 by loose flange above, another side links to each other with isolated atmosphere water-cooling system 4 and casing 44 vacuum insulating by double-pole mouth form of flanges 46 with mirror press-bending system 3 with the mechanical part that mirror spatial attitude Adjustment System 1 is exposed to atmosphere by corrugated tube.
Claims (7)
1, continuous vari-focus overlength that a kind of synchrotron radiation spatial attitude is adjustable collimation and focusing system, comprise: mirror spatial attitude Adjustment System (1), mirrored cabinet vacuum system (2), have dead-weight balanced double mode varifocal mirror press-bending system (3), mirror cooling water recirculation system (4), it is characterized in that, mirror spatial attitude Adjustment System (1) links to each other with mirrored cabinet vacuum system (2) by the loose flange corrugated tube (45) of mirrored cabinet vacuum system (2), having dead-weight balanced double mode varifocal mirror press-bending system (3) then links to each other with mirrored cabinet vacuum system (2) by the loose flange corrugated tube (47) of mirrored cabinet vacuum system (2), and by its support column mount pad (6), support column (7), brace table (5) links to each other with mirror spatial attitude Adjustment System (1), mirror cooling water recirculation system (4) is by its long strip type oxygen-free copper (34), briquetting (35), stainless steel (33) links to each other with the mirror (15) that has dead-weight balanced double mode varifocal mirror press-bending system (3), and links to each other with the casing (44) of mirrored cabinet vacuum system (2) by its double-pole mouth flange pattern (46).
2, adjustable continuous vari-focus overlength collimation of synchrotron radiation spatial attitude according to claim 1 and focusing system, it is characterized in that, having dead-weight balanced double mode varifocal mirror press-bending system (3) is an integral body with mirror spatial attitude Adjustment System (1), this whole force application mechanism is arranged in atmosphere, realize vacuum insulation by loose flange corrugated tube (45), (47), mirror cooling water recirculation system (4) directly bundlees with mirror (15), and its intake-outlet is realized vacuum insulating by double-pole mouth flange pattern (46) on mirrored cabinet (44) base plate.
3, continuous vari-focus overlength that synchrotron radiation spatial attitude according to claim 1 is adjustable collimation and focusing system, it is characterized in that, having dead-weight balanced double mode varifocal mirror press-bending system (3) comprising: brace table (5), support column mount pad (6), support column (7), big frame (8), bearing revolute pair (9), small frame (10), balance nut (11), lever (12), stay cord (13), rectangular plate (14), mirror (15), have " waist " type groove short beam structure (16), T-shape frame (17), T-shape frame mount pad (18), the guide rail (19) that linear bearing and axle are formed, the T-shape frame force application apparatus (20) that constitutes by stepper motor worm and gear and helical motion pair, its connected mode is: mirror small frame (10) links to each other with big frame (8) by bearing revolute pair (9), support column (7) is arranged on the support column mount pad (6), its interphase is near mirrored cabinet flange place, big frame (8) is arranged on the support column (7), balance nut (11) and lever (12) are by being threaded, lever (12) links to each other with rectangular plate (14), rectangular plate (14) is supported on the big frame (8), stay cord (13) one ends link to each other with lever (12), one end links to each other with mirror (15), mirror (15) is through in the middle of the small frame (10), and tighten up, T-shape frame (17) on the one hand by bearing with have " waist " type groove short beam structure (16) and link to each other, be arranged in the T-shape frame mount pad (18) by securing member on the one hand, the linear bearing of the guide rail (19) that linear bearing and axle are formed is arranged on the brace table (5), its axle is arranged in the T-shape frame mount pad (18), the T-shape frame force application apparatus (20) that is made of stepper motor worm and gear and helical motion pair is arranged on the brace table (5), and links to each other with T-shape frame mount pad (18) by screw pair.
4, continuous vari-focus overlength that synchrotron radiation spatial attitude according to claim 1 is adjustable collimation and focusing system, it is characterized in that, mirror spatial attitude Adjustment System (1) comprising: the drive unit (21) that is made of stepper motor worm and gear helical motion pair, the two pairs of double-slider guide rails (22) that move up and down along the z axle, the two pairs of double-slider guide rails (23) that move along the x axle, by axle and bearing form around x revolute pair (24), be positioned under the brace table (5) two along y to the double-slider guide rail (25) that moves, Connection Block (26), arc-shaped guide rail (27) around the rotation of z axle, the drive unit (28) that constitutes by stepper motor helical motion pair, mirror form regulation system chassis (29), four screw rods (30) and coarse positioning plate (31), its connected mode is: mirror form regulation system chassis (29) is provided with four screw rods (30), four screw rods (30) then link to each other with the big base plate of total system (42) by coarse positioning plate (31), the drive unit (21) that is made of stepper motor worm and gear helical motion pair is arranged on the mirror form regulation system chassis (29), the slide block of the two pairs of double-slider guide rails (22) that move up and down along the z axle is arranged on the drive unit (21) that is made of stepper motor worm and gear helical motion pair, its slide rail is fixed on the mirror form regulation system chassis (29), the slide rail of the two pairs of double-slider guide rails (23) that move along the x axle links to each other with the drive unit (21) that is made of stepper motor worm and gear helical motion pair, its slide block links to each other with the arc-shaped guide rail (27) that rotates around the z axle, by below x revolute pair (24), linking to each other that axle and bearing are formed, link to each other with double-slider guide rail (25) above with the arc-shaped guide rail (27) that rotates around the z axle; Connection Block (26) links to each other with brace table (5) on the one hand, on the one hand with link to each other around x revolute pair (24), the drive unit (28) that is made of stepper motor helical motion pair is arranged on the drive unit (21) that is made of stepper motor worm and gear helical motion pair, and links to each other with double-slider guide rail (23) by worm drive are secondary.
5, continuous vari-focus overlength that synchrotron radiation spatial attitude according to claim 1 is adjustable collimation and focusing system, it is characterized in that, mirror cooling water recirculation system (4) comprising: the six roots of sensation is passed the stainless steel (33) of mirror, two block length stripe shape oxygen-free coppers (34), five briquettings (35), cooling water pipe (41), mounting flange (39), inner flange (38), double-pole choma shape flange (40), its connected mode is: two block length bar shaped oxygen-free coppers (34) one side is the very low plane of roughness, alongst have the circular arc less than 1/2 circle identical on the one side with cooling water pipe (41) external diameter, this two block lengths stripe shape oxygen-free copper (34) is after wrapping indium potassium sheet, passing the stainless steel (33) of mirror and screw-nut and mirror (15) by the six roots of sensation fits tightly, the parallel place of cooling water pipe (37) then is pressed in water pipe in the circular arc of strip oxygen-free copper (34) by five briquettings (35) and screw packing ring, mounting flange (39) and casing (44) welding, inner flange (38) and cooling water pipe (41) welding, double-pole choma shape flange (40) passes through copper band, securing member and inner flange (38), mounting flange (39) links to each other.
6, adjustable continuous vari-focus overlength collimation of synchrotron radiation spatial attitude according to claim 5 and focusing system, it is characterized in that, locate to adopt " single folding " pattern at water inlet pipe and water outlet pipe (32), two fold-type formulas are adopted in cooling water pipe (41) " U " type crook (36), cooling water pipe (41) adopts a pipe to curve, middle no solder joint.
7, continuous vari-focus overlength that synchrotron radiation spatial attitude according to claim 1 is adjustable collimation and focusing system, it is characterized in that, mirrored cabinet vacuum system (2) comprising: casing (44), big support (43), big base plate (42), loose flange corrugated tube (45), (47), double-pole mouth form of flanges (46) comprises mounting flange (39), inner flange (38), double-pole choma shape flange (40), its connected mode is: big support (43) is fixed with big base plate (42), casing (44) is arranged on the big support (43), loose flange corrugated tube (45), (47) one side is connected with casing (44) by loose flange, another side links to each other with isolated atmosphere water-cooling system (4) and casing (44) vacuum insulating by double-pole mouth form of flanges (46) with mirror press-bending system (3) with the mechanical part that mirror spatial attitude Adjustment System (1) is exposed to atmosphere by corrugated tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03129391 CN1209769C (en) | 2003-06-19 | 2003-06-19 | Adjustable continuous focus varying supertength aligning and focusing system for synchronous radiation space posture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03129391 CN1209769C (en) | 2003-06-19 | 2003-06-19 | Adjustable continuous focus varying supertength aligning and focusing system for synchronous radiation space posture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1472749A CN1472749A (en) | 2004-02-04 |
| CN1209769C true CN1209769C (en) | 2005-07-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03129391 Expired - Fee Related CN1209769C (en) | 2003-06-19 | 2003-06-19 | Adjustable continuous focus varying supertength aligning and focusing system for synchronous radiation space posture |
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| Country | Link |
|---|---|
| CN (1) | CN1209769C (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104765290B (en) * | 2015-02-10 | 2017-09-26 | 中国科学院上海应用物理研究所 | A kind of bending press |
| CN104900293A (en) * | 2015-06-04 | 2015-09-09 | 中国科学院上海应用物理研究所 | Double-drive pressure roller type bending device |
| CN109839400A (en) * | 2019-01-23 | 2019-06-04 | 中国科学院上海应用物理研究所 | A kind of synchrotron radiation confocal fluorescent experimental provision focused based on KB mirror |
| CN113450939B (en) * | 2021-07-02 | 2022-05-17 | 中国科学院高能物理研究所 | X-ray zoom lens system and zooming method thereof |
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2003
- 2003-06-19 CN CN 03129391 patent/CN1209769C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1472749A (en) | 2004-02-04 |
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