CN1209609C - 固态压阻式耐高温压力传感器及其制备方法 - Google Patents
固态压阻式耐高温压力传感器及其制备方法 Download PDFInfo
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- CN1209609C CN1209609C CN 03134447 CN03134447A CN1209609C CN 1209609 C CN1209609 C CN 1209609C CN 03134447 CN03134447 CN 03134447 CN 03134447 A CN03134447 A CN 03134447A CN 1209609 C CN1209609 C CN 1209609C
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CN 03134447 CN1209609C (zh) | 2003-07-31 | 2003-07-31 | 固态压阻式耐高温压力传感器及其制备方法 |
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CN 03134447 CN1209609C (zh) | 2003-07-31 | 2003-07-31 | 固态压阻式耐高温压力传感器及其制备方法 |
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CN1514219A CN1514219A (zh) | 2004-07-21 |
CN1209609C true CN1209609C (zh) | 2005-07-06 |
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Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100335879C (zh) * | 2005-03-11 | 2007-09-05 | 江苏大学 | 一种改良耐高温微型低成本压力传感器的方法 |
CN100394154C (zh) * | 2005-03-14 | 2008-06-11 | 昆山双桥传感器测控技术有限公司 | 压阻式高频动态低压传感器 |
CN100465599C (zh) * | 2005-12-23 | 2009-03-04 | 昆山双桥传感器测控技术有限公司 | 压阻式土应力传感器 |
KR101050334B1 (ko) | 2006-10-02 | 2011-07-19 | 파나소닉 전공 주식회사 | 압력센서 |
CN100561156C (zh) * | 2008-01-16 | 2009-11-18 | 西安维纳信息测控有限公司 | Soi全硅结构充硅油耐高温压力传感器 |
CN102435380A (zh) * | 2011-10-28 | 2012-05-02 | 芜湖通和汽车管路系统有限公司 | 一种高量程液压传感器及其制造方法 |
CN102445301A (zh) * | 2011-11-23 | 2012-05-09 | 无锡芯感智半导体有限公司 | 温漂自补偿soi压力传感器 |
CN102539063B (zh) * | 2011-12-16 | 2013-10-16 | 西安交通大学 | 一种soi矩形膜结构高压传感器芯片 |
CN102980692B (zh) * | 2012-11-19 | 2015-08-19 | 西安微纳传感器研究所有限公司 | 一种高温耐冲击压力传感器及其制备方法 |
US9772242B2 (en) | 2013-12-06 | 2017-09-26 | Nagano Keiki Co., Ltd. | Physical quantity measuring sensor including an O-ring between a cylindrical portion and a cylindrical projection |
JP6301230B2 (ja) * | 2014-09-30 | 2018-03-28 | 長野計器株式会社 | 物理量測定装置 |
CN104535253B (zh) * | 2015-01-19 | 2018-05-25 | 北京大学 | 一种高温压力传感器及其加工方法 |
CN104748905A (zh) * | 2015-03-27 | 2015-07-01 | 武汉飞恩微电子有限公司 | 同时检测空调制冷剂温度和压力的传感器装置 |
CN107941384A (zh) * | 2017-12-26 | 2018-04-20 | 苏州康姆普机械有限公司 | 一种电子式压力传感器 |
DE102018000221A1 (de) * | 2018-01-12 | 2019-07-18 | Knorr-Bremse Systeme für Nutzfahrzeuge GmbH | Geschwindigkeitssensor mit isolierenden inneren und äußeren Ausnehmungen |
CN109764998A (zh) * | 2018-12-27 | 2019-05-17 | 西安交通大学 | 一种膜片式石墨烯mems微压传感器芯片及其制备方法 |
CN113483941A (zh) * | 2021-06-29 | 2021-10-08 | 苏州源森特科技有限公司 | 一种集成asic芯片的无引线封装动态压力传感器 |
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2003
- 2003-07-31 CN CN 03134447 patent/CN1209609C/zh not_active Expired - Fee Related
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Publication number | Publication date |
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CN1514219A (zh) | 2004-07-21 |
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Owner name: XI AN WEIBA INFORMATION MEASUREMENT AND CONTROL C Free format text: FORMER OWNER: XI AN COMMUNICATION UNIV. Effective date: 20071214 |
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Effective date of registration: 20071214 Address after: Shaanxi city of Xi'an province Yan Cheung Road No. 99 Boyuan building Patentee after: Xi'an Winner Information Control Co., Ltd. Address before: No. 28, Xianning Road, Xi'an, Shaanxi Patentee before: Xi'an Jiaotong University |
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