CN1209488C - Heating temperature controller and method for preparing method - Google Patents
Heating temperature controller and method for preparing method Download PDFInfo
- Publication number
- CN1209488C CN1209488C CN 03134334 CN03134334A CN1209488C CN 1209488 C CN1209488 C CN 1209488C CN 03134334 CN03134334 CN 03134334 CN 03134334 A CN03134334 A CN 03134334A CN 1209488 C CN1209488 C CN 1209488C
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- heating
- graphite
- temperature
- digital display
- display meter
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 56
- 238000000034 method Methods 0.000 title claims abstract description 16
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 33
- 239000010439 graphite Substances 0.000 claims abstract description 33
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 28
- 239000000919 ceramic Substances 0.000 claims abstract 6
- 239000011159 matrix material Substances 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 10
- 238000002360 preparation method Methods 0.000 abstract description 6
- 238000009529 body temperature measurement Methods 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007323 disproportionation reaction Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- PXXKQOPKNFECSZ-UHFFFAOYSA-N platinum rhodium Chemical compound [Rh].[Pt] PXXKQOPKNFECSZ-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000004549 pulsed laser deposition Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
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- Control Of Resistance Heating (AREA)
- Resistance Heating (AREA)
Abstract
The present invention discloses a heating temperature controlling device and a method for film preparation. The heating temperature controlling device comprises a heating control circuit and a graphite heating body (1), wherein the graphite heating body (1) is flat cubic blocky graphite; a plurality of ceramic pipes (2) with a plurality of through holes are distributed on the cross section of the graphite heating body in an equidistant way; a hot wire (3) can penetrate and wind every two through holes. A method of the heating temperature controlling device is that a proper basal body namely the graphite heating body (1) is selected according to the size of a film to be prepared; the ceramic pipes (2) are fixed according to requirements; the hot wires (3) are penetrated according to a design temperature requirement; the hot wires (3) are connected in parallel to be connected to a heating circuit; one end of each hot wire (3) is connected to a negative pole on a supplying end with low voltage and heavy current, and the other end is connected to a positive pole on the supplying end with low voltage and heavy current through a load resistor (4) and a contact point at the normally closed end of a relay (6). Circuit work can obtain the purpose of temperature measurement and control. The temperature distribution on a basal body can be uniform and the film quality is enhanced.
Description
Technical field
The present invention relates to the film preparation field, especially the automatic heating and temperature controlling device in the pld (pulsed laser deposition) process.
Background technology
As everyone knows, in the film preparation process, obtain membrane structure preferably, must heat matrix.The height of substrate temperature and homogeneity are all influential to structure, the growth velocity of film.Result of study shows the substrate temperature difference, and the grain orientation of film will be different.After optimum temps was determined, if substrate temperature departs from about 10 ℃ of optimum tempss, considerable change will take place in film quality.Too high as substrate temperature, can cause the revaporization of film, thereby reduce sedimentation rate.
It is to adopt the tinsel well heater that matrix is heated the simplest method.The Heating element of tinsel well heater is to make with resistance to oxidation tinsels such as stainless steel or platinum, and its thickness is generally 0.1～0.2mm.When a certain size electric current flow through tinsel, tinsel will heating up, and matrix is heated.The advantage of this tinsel well heater is simple in structure, and is cheap.But shortcoming is that sheet deformation is bigger in the heat temperature raising process, and this just causes on the matrix temperature distributing disproportionation even easily, thereby influences the quality of film.
Matrix heated also have a kind of noncontact heating means to adopt halogen lamp heater exactly.The advantage of halogen lamp heater is to obtain bigger heating-surface area easily, and shortcoming is that the flat-temperature zone temperature fluctuation is bigger, and temperature distributing disproportionation is even on the matrix, thereby influences the quality of film.
The method that matrix is heated also has silicon single crystal contact-type matrix well heater and silicon single crystal radial pattern matrix well heater.These two kinds of heating appliances have the constant temperature area big, and temperature fluctuation is little in the flat-temperature zone, the Heating temperature advantages of higher, but cost is also higher.
Patent of invention " a kind of heating means that prepare metal substrate ", the patent No.: ZL01110150.4 has introduced and has reached the purpose of even heating directly for the alive method of metal substrate (being matrix).But this method can only heat long narrow metal strip, and heating-surface area is little, and must carry out the contracted payment paper tinsel to the long band of metal substrate two ends at every turn, and complicated operation is loaded down with trivial details.
Summary of the invention
In order to overcome the deficiencies in the prior art, the invention provides a kind of simple in structure, cheap, uniformity of temperature profile, automatic heating and temperature controlling device that the constant temperature area is big.
Technical scheme of the present invention is: a kind of heating and temperature controlling device, comprise heating control circuit, graphite heating body 1, it is characterized in that: described graphite heating body 1 is flat cubes blocky graphite, the transverse section of blocky graphite is equidistantly distributing several vitrified pipes 2, each vitrified pipe 2 has several through holes, and per two through holes can be worn around a resistance wire 3.
The length of described vitrified pipe 2 is equal to or slightly is shorter than the length direction of blocky graphite, and evenly is fixed in the blocky graphite.
The resistance of described resistance wire 3 is 2～3 Ω.
A kind of using method of heating and temperature controlling device is characterized in that:
(1) selects suitable matrix---graphite heating body 1 according to the size that will prepare film, fix vitrified pipe 2 as requested, require to penetrate resistance wire 3 according to design temperature;
(2) heating circuit is inserted in resistance wire 3 backs in parallel, make the negative pole of resistance wire 3 one termination low-voltage and high-currents for end, the other end of resistance wire 3 connects the positive pole of low-voltage and high-current for end by the normal-closed end contact of pull-up resistor 4 and rly. 6;
(3) thermopair 5 is connected with digital display meter 7;
(4) digital display meter 7 and rly. 6 coils series connection back are inserted the 220V circuit;
(5) heating control circuit work, because the normally closed contact of rly. 6 is in closure state, resistance wire 3 begins to add hot basal body;
(6) digital display meter 7 work, the temperature value of setting digital display meter 7, at this moment the contact of digital display meter 7 is in normally open;
(7) thermopair 5 thermometrics, and give digital display meter 7 with Temperature Feedback, when temperature reaches set(ting)value, the contact of digital display meter 7 transfers closure state to, connects and inserts 220V circuit, the coil electricity of rly. 6, the normally closed contact of rly. 6 is opened, and resistance wire 3 outages are no longer heated matrix.
The present invention's advantage compared to existing technology is: since matrix adopting graphite heating body, utilize graphite good heat transfer characteristic, make that the matrix heating-surface area is big and constant temperature good, especially substrate temperature is evenly distributed.Also make the present invention simple in structure, cheap, economical and practical.
Description of drawings
The present invention is further described below in conjunction with drawings and Examples.
Fig. 1 is an electrical block diagram of the present invention
Fig. 2 is the graphite heating body synoptic diagram
Among the figure, 1-graphite cubes, 2-vitrified pipe, 3-resistance wire, 4-resistance, 5-thermopair, 6-rly., 7-digital display meter
Embodiment
With reference to Fig. 1 and Fig. 2: in the embodiment shown in the figures, the present invention includes matrix---graphite heating body and add the thermal control road.Graphite heating body 1 is flat cubes blocky graphite, the size of graphite heating body 1 is 65 * 55 * 20mm, the transverse section of graphite heating body 1 equidistantly distributes two vitrified pipes 2, each vitrified pipe 2 has four holes, can penetrate two resistance wires 3 of heating usefulness respectively, the resistance of resistance wire 3 is 2.5 Ω, and the length of vitrified pipe 2 is equal to or slightly is shorter than the length direction of graphite heating body 1, and evenly is fixed in graphite heating body 1 inside.In order to obtain bigger heating-surface area, also can suitably increase the quantity of vitrified pipe 2.The temperature of control graphite heating body 1 except setting with digital display meter 7, can also increase or reduce the distribution in hole on the vitrified pipe 2, so that increase or reduce the resistance wire that passes vitrified pipe 2.One highest wisdom will be worn n root resistance wire 3, and the hole on the vitrified pipe 2 is 2n just.
Heating control circuit comprises electromagnetic type relay 6, resistance 4, digital display meter 7, resistance wire 3 and thermopair 5, the output termination thermopair 5 of digital display meter 7, and its input terminus inserts the 220V civil power by the coil of rly. 6.Resistance wire 3 backs in parallel are electrically connected with the contact of rly. 6 by current-limiting resistance 4, insert the low-voltage and high-current loop then, and its voltage is+15V that electric current is 60A.Resistance wire 3 parallel connections are just in order to adapt to the character in low-voltage and high-current loop, to reduce resistance.What digital display meter 7 was selected for use is XM series digit display instrument, and it can show the temperature of graphite heating body 1, and the temperature in the film preparation process also can be set simultaneously, the temperature in the process of control film preparation in real time.Thermopair 5 is an armouring platinum rhodium thermopair.Because common thermocouple wire is drawn the Heating temperature that end can not bear vacuum target chamber, thermopair 5 of the present invention is for removing terminal directly lead-in wire thermopair, lead-in wire directly can be connected with digital display meter 7 outside the vacuum target chamber by the approaching channel of vacuum target chamber the inside, thereby reach the purpose of controlled temperature.The resistance of current-limiting resistance 4 is 500 Ω, and its main purpose is to increase load, the restriction electric current, and protective relay 6 is not burnt out.
Rly. 6 is an electromagnetic type relay, and it is to utilize electromagnetic induction principle, and when passing through direct current in the coil of rly. 6, coil produces magnetic field, and moving iron core is inhaled, drives contact spring, makes rest contact separately, the movable contact closure.After solenoid current was cut off, iron core had lost magnetic, and moving iron core resets under the effect of spring force, and movable contact is opened, the rest contact closure.Play on-off action in rly. 6 heating control circuits.
Method embodiment: (one) selects suitable matrix---graphite heating body 1 according to the size that will prepare film, requirement according to device embodiment, such as the big size of heating-surface area, the homogeneity that substrate temperature distributes etc. fixes vitrified pipe 2, requires to penetrate resistance wire 3 according to design temperature.
(2) heating control circuit is inserted in resistance wire 3 backs in parallel, make the negative pole of resistance wire 3 one termination low-voltage and high-currents for end, the other end of resistance wire 3 is by the normal-closed end contact of pull-up resistor 4 and rly. 6, to guarantee that heating system does not open circuit under the normal circumstances.
(3) thermopair 5 is connected with digital display meter 7.
(4) digital display meter 7 and rly. 6 coils series connection back are inserted the 220V circuit.
(5) heating control circuit work, because the normally closed contact of rly. 6 is in closure state, resistance wire 3 begins to add hot basal body;
(6) digital display meter 7 work, the temperature value of setting digital display meter 7, at this moment the contact of digital display meter 7 is in normally open;
(7) thermopair 5 thermometrics, and give digital display meter 7 with Temperature Feedback, when temperature reaches set(ting)value, the contact of digital display meter 7 transfers closure state to, connects and inserts 220V circuit, the coil electricity of rly. 6, the normally closed contact of rly. 6 is opened, and resistance wire 3 outages are no longer heated matrix.Like this, just reached the purpose of thermometric, temperature control.This method can make matrix be heated and remain a running balance, thereby makes on the matrix temperature distribution more even, improves the quality of film.
Claims (4)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03134334 CN1209488C (en) | 2003-06-27 | 2003-06-27 | Heating temperature controller and method for preparing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03134334 CN1209488C (en) | 2003-06-27 | 2003-06-27 | Heating temperature controller and method for preparing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1472359A CN1472359A (en) | 2004-02-04 |
| CN1209488C true CN1209488C (en) | 2005-07-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03134334 Expired - Fee Related CN1209488C (en) | 2003-06-27 | 2003-06-27 | Heating temperature controller and method for preparing method |
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| CN (1) | CN1209488C (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102400111B (en) * | 2011-11-21 | 2016-06-15 | 汉能太阳能光伏科技有限公司 | A kind of LPCVD process cavity heating system |
| CN103076822B (en) * | 2012-12-27 | 2015-09-09 | 烟台睿创微纳技术有限公司 | Regulate control method and the implement device thereof for the treatment of device temperature processed in vacuum equipment |
| TWI724283B (en) * | 2017-03-29 | 2021-04-11 | 日商住友重機械工業股份有限公司 | Film forming device and film forming method |
| CN109698097A (en) * | 2018-12-29 | 2019-04-30 | 宁波市鄞州顺和自动化设备有限公司 | A kind of relay air hole hot-melting sealed automatic machine |
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- 2003-06-27 CN CN 03134334 patent/CN1209488C/en not_active Expired - Fee Related
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| CN1472359A (en) | 2004-02-04 |
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