CN1208596C - Method for measuring thickness of dielectric layer and its device - Google Patents
Method for measuring thickness of dielectric layer and its device Download PDFInfo
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- CN1208596C CN1208596C CN 03101056 CN03101056A CN1208596C CN 1208596 C CN1208596 C CN 1208596C CN 03101056 CN03101056 CN 03101056 CN 03101056 A CN03101056 A CN 03101056A CN 1208596 C CN1208596 C CN 1208596C
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Abstract
The present invention provides a method and a device for measuring the thickness of a dielectric layer. The device mainly comprises a measuring tank, a second strip-shaped electrode and a gas inlet, wherein a panel to be measured can be placed on the top of the measuring tank; the second strip-shaped electrode is parallelly arranged at the bottom of the measuring tank and is mutually perpendicular to the electrode of the panel to be measured; the gas inlet is used for leading in inert gases to a discharge space; a discharge unit is formed at the place where the electrode of the panel to be measured and the electrode of the measuring device are crossed. Through regulating the voltage of each discharge unit, the luminous brightness of the discharge units is consistent, and the thickness of the dielectric layer of the panel to be measured at each discharge unit point can be calculated by utilizing different voltage values.
Description
Technical field
The present invention is about a kind of plasma planar display (plasma display panel; PDP), and particularly relevant for the header board of a kind of PDP and the method for measurement and the device thereof of the medium thickness of back plate.
Background technology
After plasma planar display (PDP) is a kind of ultraviolet ray excited color phosphor that is produced when utilizing noble gas discharge, convert the large tracts of land screen display of the acceptable visible light of human eye again to.According to current limliting working method difference, can be divided into once-through type (DC) and two kinds of AC types (AC), product is many based on AC type at present.
AC plasma body plane display (PDP) mainly can be divided into for three megastages:
(1) the header board leading portion stage: comprise that transparency electrode manufacturing, auxiliary electrode (bus electrode) make, lure four parts such as electric body (dielectric layer) manufacturing, the manufacturing of MgO diaphragm.
(2) the back plate leading portion stage: comprise that data electrode (data electrode) (or claims addressing electrode, addresselectrode) four parts such as manufacturing, barrier rib (rib) manufacturing, fluorophor (phosphor) coating, encapsulating material coating.
(3) back segment is assembled the stage: comprise after header board and back plate contraposition and temporary transient the fixing, put into vacuum pumping hardware and carry out the exhaust vacuumizing phase, enclose discharge and uses mixed gas, be about 670 (hPa) until pressure.Enter aging (aging) stage at last, see through each discharge space stability of photoluminescence of long-time discharge examination.
Every section processing procedure all must carefully be controlled, and just can keep the yield of product.Wherein, less demanding for the position precision of dielectric layer in the manufacture process, but the insulativity of dielectric layer will guarantee to discharge the time, and medium thickness must be quite even, just can make the luminous intensity of panel have homogeneity.
The method of the thickness of known measurement PDP dielectric layer is as follows:
One, micro-imaging analytic approach: utilize sweep electron microscope (scanning electrodemicroscpoy; SEM) observe the transversal section (cross section) of dielectric layer, directly measure the thickness of dielectric layer.Yet the micro-imaging analytic approach is to belong to destructive to measure, and needs to make in addition specimen, and this is not only consuming time and can't be in carrying out synchronously in technology.
Two, surface record (surface record): utilize a film thickness gauge probe can learn the thickness difference of dielectric layer edge and substrate.Yet the method and the medium thickness that is applicable to face plate edge but have no way of learning the medium thickness of panel zone inside.
Three, oval thicknessmeter:, extrapolate the thickness of dielectric layer by the refractive index of measured silicon substrate and dielectric layer.Yet the method needs to make in addition specimen, and is not only consuming time and can't carry out synchronously in technology.And in case dielectric layer is not when being made of single material, the method is just inapplicable.
Four, laser focusing (laser focus): utilize a laser beam (beam) beat respectively exposed substrate with have the substrate portion of dielectric layer, can extrapolate the thickness of dielectric layer by the difference that focuses on.Yet the method also only is applicable to the medium thickness of face plate edge, but has no way of learning the medium thickness of panel zone inside.It is when if substrate has warpage, just inapplicable.And the reflection problems of substrate tends to cause focus on difficult.
The method of the thickness of known various measurement PDP dielectric layers all has its shortcoming, therefore, needs a kind of better measuring method at present badly, to overcome the problems referred to above.
Summary of the invention
In view of this, in order to address the above problem, fundamental purpose of the present invention is to provide a kind of measuring method and device thereof of medium thickness, applicable to the header board of measuring PDP and back plate.
First purpose of the present invention is to provide a kind of measuring method and device thereof of medium thickness of PDP panel, and this measurement belongs to non-destroyed measurement.
Second purpose of the present invention is to provide a kind of measuring method and device thereof of medium thickness of PDP panel, not only applicable to the medium thickness at the edge of measuring the PDP panel, also applicable to the medium thickness of measuring PDP panel inside.
Non-destroyed measurement method and device thereof that the 3rd purpose of the present invention is to provide a kind of medium thickness of PDP panel can carry out synchronously with technology, and robotization.
The big or small principle that is directly proportional with this regional medium thickness of magnitude of voltage that principal character of the present invention system is applied when utilizing each the regional luminous intensity when the PDP panel consistent; a kind of measurement mechanism of medium thickness is provided; to measure each regional medium thickness of measured panel; its simple structure and similar in appearance to the PDP panel can directly be utilized to form behind the dielectric layer and do not form the header board of protective seam or form behind the dielectric layer and the back plate that do not form barrier rib is made measurement mechanism.
The invention provides a kind of measurement mechanism of medium thickness, be applicable to the medium thickness of the measured panel of measuring plasma planar display (PDP).This panel system by a transparency carrier, be arranged at the dielectric layer on this transparency carrier surface and one group of (plural number) first strip shaped electric poles being parallel in the dielectric layer on this transparent substrates surface is constituted.The structure description of measurement mechanism of the present invention is as follows.One measuring flume makes this measured panel be arranged at this measuring flume top, and this this dielectric layer to be measured is relative with this measuring flume bottom, forms a discharge space.And one group of (plural number) second strip shaped electric poles is set in parallel in this measuring flume bottom, and vertical mutually with first electrode.In addition, a gas access is in order to import an inert gas to this discharge space.
As previously mentioned, this measuring flume mainly comprises: a substrate and be arranged at a bracing or strutting arrangement around the above-mentioned substrate.
As previously mentioned, these first strip shaped electric poles and these second strip shaped electric poles can be made of the electrically conducting transparent material and the metal material that pile up respectively, perhaps also can only be made of metal material.This electrically conducting transparent material comprises tin indium oxide (indium tin oxide; ITO) or tin ash (SnO
2), and this metal material comprises chromium-copper chromium (Cr/Cu/Cr), silver (Ag), aluminium (Al) or nickel (Ni).
As previously mentioned, measurement mechanism of the present invention more can comprise a gas vent, in order to get rid of this inert gas.This inert gas comprises helium (He), neon (Ne) and both combinations thereof.
The present invention proposes a kind of by the method for aforementioned measurement mechanism with the measurement medium thickness, and the method mainly may further comprise the steps:
At first, this panel is placed on the measurement mechanism top; Wherein, the infall of second strip shaped electric poles of first strip shaped electric poles of this measured panel and this measurement mechanism forms a plurality of discharge cells respectively.Then, apply a plurality of magnitudes of voltage respectively, make described discharge cell send the light of brightness unanimity respectively to first strip shaped electric poles of this measured panel and second strip shaped electric poles of this measurement mechanism.At last, by the magnitude of voltage separately of described discharge cell, extrapolate the thickness of the dielectric layer region of the corresponding described discharge cell of difference position on this measured panel, when wherein luminosity was identical, those magnitudes of voltage sizes were directly proportional with this medium thickness.
For above-mentioned purpose of the present invention, feature and advantage can be become apparent, preferred embodiment cited below particularly, and conjunction with figs. are described in detail below:
Description of drawings
Fig. 1 is the section of structure that shows known PDP;
Fig. 2 is the vertical view that shows according to the preferred embodiment of medium thickness measurement mechanism of the present invention;
Fig. 3 is the section of structure that shows according to the preferred embodiment of medium thickness measuring equipment of the present invention.
Embodiment
Usually plasma planar display (PDP) is to be combined by header board 10 and 30 encapsulation of back plate.With plasma planar display (PDP) structure shown in the 1st figure is example; header board 10 is by glass substrate 14, electrode 16 (comprising: transparency electrode 22, auxiliary electrode 24), lures electrics layer (claiming dielectric layer again) 18 and MgO protective seam 20 to be constituted, and wherein transparency electrode 22 and auxiliary electrode 24 formations are kept electrode X and scan electrode Y.30 of back plates are made of glass substrate 12, information electrode (or claiming addressing electrode) 32, dielectric layer 33, barrier rib 34.Wherein barrier rib 34 inboards are coated with the fluorophor 36 of redness (R), green (G) and blue (B) successively, inject gases such as helium, neon respectively and promptly constitute plasma planar display (PDP) after combination.
The preparation technology of the header board of plasma planar display (PDP) comprises successively: the making of the making of the making of transparency electrode 22, auxiliary electrode 24, the making of dielectric layer 33 and protective seam 20.Wherein, in the function that covers one dielectric layer 18 on electrode X and the scan electrode Y of keeping that is made of transparency electrode 22 and auxiliary electrode 24 is that store charge is to reach the memory effect that image is preserved, less demanding to the position precision of dielectric layer 18 in the manufacture process, but the homogeneity of thickness is very important, and the insulativity will guarantee to discharge the time.
The present invention measures the medium thickness of plasma planar display (PDP) header board, be when dielectric layer 18 be covered in keep electrode X and scan electrode Y after and form diaphragm 20 before carry out.Will be as for its measuring method in doing detailed description hereinafter.
The preparation technology of the back plate of plasma planar display (PDP) comprises successively: the coating of the making of the making of information electrode 32, dielectric layer 33, the making of barrier rib 34, fluorophor 36 and encapsulating material coating.
The present invention measures the medium thickness of plasma planar display (PDP) back plate, is to carry out after dielectric layer 33 is covered in data electrode 32 and before forming barrier rib 34.Will be as for its measuring method in doing detailed description hereinafter.
Measure the device of the medium thickness of PDP header board and back plate
Describe a kind of dielectric layer measurement mechanism 100 that is applicable to the medium thickness of measuring plasma planar display (PDP) header board and back plate in detail below with reference to the vertical view of the 2nd figure and the section of structure of the 3rd figure.Wherein the 2nd figure is the vertical view of medium thickness measurement mechanism.The 3rd figure measures the sectional view of the dielectric layer of PDP header board and back plate with the medium thickness measurement mechanism, and is the a-a ' sectional view of the 2nd figure.
At first, see also the 3rd figure, medium thickness measurement mechanism 100 of the present invention is applicable to dielectric layer 18,33 thickness of measuring PDP header board 10 and back plate 30.Below for simplicity, be referred to as this header board 10 and be measured panel, and the data electrode 32 of keeping electrode X and scan electrode Y and this back plate 30 of this header board all is referred to as first strip shaped electric poles 50 that is parallel on the measured panel with this back plate 30.Section of structure when the 3rd figure can show with a kind of measurement mechanism measurement PDP header board 10 and back plate 30 simultaneously.
Medium thickness measurement mechanism 100 of the present invention mainly comprises: a plurality of second strip shaped electric poles 104 on a measuring flume that is made of a substrate 102 and a supporting construction 106, substrate 102 surfaces that are set in parallel in this measuring flume, in order to import a gas access 108 of inert gas.Medium thickness measurement mechanism 100 of the present invention more can comprise a gas vent 110, in order to discharge the inert gas of these discharge space 200 inside.This substrate 102 is oppositely arranged with the dielectric layer 18,33 of measured panel 10,30.This supporting construction 106, erectly be arranged at this substrate 102 around, in order to support this measured panel 10,30, these supporting construction 106 two ends engage with this measured panel 10,30 and this substrate 102 respectively.This tested panel 10,30, this substrate 102 constitute a discharge space 200 with this supporting construction 106.
The simple structure of medium thickness measurement mechanism 100 of the present invention and similar in appearance to PDP header board 10 or back plate 30 can directly be utilized to form dielectric layer 18 backs and do not form the header board 10 of protective seam 20 or the back plate 30 that forms dielectric layer 33 backs and do not form barrier rib 34 is made measurement mechanisms 100.
The number of second strip shaped electric poles 104 of this medium thickness measurement mechanism 100 is at least one.The material of this electrode 104 can be transparent conductive material and cooperates the good metal wire of electric conductivity, the structure of keeping electrode X and scan electrode Y of its structure example such as plasma planar display (PDP), employed transparent conductive material can be tin indium oxide (indium tin oxide; ITO) or tin ash (SnO
2), the material of employed metal wire can be chromium/copper/chromium (Cr/Cu/Cr), silver (Ag), aluminium (Al) or nickel (Ni) etc.In addition, the material of this second strip shaped electric poles 104 also can only be made of metal wire.
Then, see also the 2nd figure, second strip shaped electric poles 104 of this measurement mechanism 100 is arranged in parallel respectively, and forms a plurality of discharge cells 300 with first strip shaped electric poles 50 of this measured panel 10,30 in infall.When applying voltage and measure medium thickness, the electric charge that accumulates on these discharge cell 300 places can disengage exciting the inert gas of these discharge space 200 inside, thus the luminous generation bright spot in discharge cell 300 positions that is being applied in voltage.
Utilize the medium thickness measurement mechanism to measure the dielectric layer of PDP header board and back plate
At first, this measured panel 10,30 is positioned over supporting construction 106 tops of this measurement mechanism.Must make first strip shaped electric poles 50 of this measured panel 10,30 vertical mutually with second strip shaped electric poles 104 of this measurement mechanism.
Then, apply a voltage to this first strip shaped electric poles 50 and this second strip shaped electric poles 104 of dielectric layer 18,33 positions of corresponding measured zone, make the discharge cell 300 luminous generation bright spots of measured zone, make each discharge cell 300 shinny in the same manner, and, make the luminous intensity unanimity of each discharge cell 300 by adjusting the magnitude of voltage size applied.
In this measuring method, the uniformity coefficient of glass substrate 10,12 of supposing this measured panel 10,30 is quite high, the error of its uneven thickness can be ignored, thus, be excited and discharge light time when inert gas this moment, the dielectric layer 18,33 of the zones of different that penetrated, its thickness is also inequality, so cause the light intensity difference of sending.Dielectric layer 18,33 is thicker, a little less than then luminous intensity heals.If desire to make each regional luminous intensity unanimity, must adjust and put on each regional magnitude of voltage size.Dielectric layer 18, the 33 thick zone of healing, the required magnitude of voltage that applies are bigger.Therefore, when each regional luminous intensity was all identical, each regional magnitude of voltage was directly proportional with this regional medium thickness.
At last, note down the magnitude of voltage of each discharge cell 300, because magnitude of voltage is directly proportional with this regional medium thickness, so that can extrapolate on this measured panel 10,30 thickness in dielectric layer 18,33 zones of respectively corresponding those discharge cell 300 positions by the magnitude of voltage separately of these discharge cells 300.This non-destroyed measurement method not only can be measured the fringe region that is subjected to measured panel, also can measure its fringe region, and is not limited.
Invent concrete following advantage:
1. medium thickness measurement mechanism of the present invention can provide a kind of non-destroyed measurement method.
2. the present invention is not only applicable to the medium thickness at the edge of measuring the PDP panel, also applicable to the medium thickness of measuring PDP panel inside.
3. medium thickness of the present invention is measured, can carry out synchronously with preparation technology, and robotization.
4. medium thickness measurement mechanism of the present invention can directly utilize and form dielectric layer 1 back and do not form the header board of protective seam or form behind the dielectric layer and the back plate that do not form barrier rib is made.
Though the present invention describes as above with preferred embodiment; right its is not in order to limiting scope of the present invention, those of ordinary skills, without departing from the spirit and scope of the present invention; when can doing various changes and retouching, so protection scope of the present invention is as the criterion with appended claim scope.
The symbol description of accompanying drawing
10～header board; 30～rear plate;
12,14～glass substrate; 16～electrode;
22～transparency electrode; 24～auxiliary electrode;
18,33～dielectric layer; 20～protective seam;
32～information electrode; 34～barrier rib;
36～fluorophor; 100～measuring equipment;
102～substrate; 104～the second strip shaped electric poles;
106～supporting construction; 108～gas access;
110～gas vent; 50～the first strip shaped electric poles;
200～discharge space; 300～discharge cell.
Claims (39)
1. the measurement mechanism of a medium thickness, be applicable to the medium thickness of the measured panel of measuring plasma planar display, wherein this panel by transparency carrier, be arranged at the dielectric layer on this transparency carrier surface and many first strip shaped electric poles being parallel in the dielectric layer on this transparent substrates surface are constituted, this measurement mechanism comprises:
Measuring flume, in order to support this measured panel in this measuring flume top, with the formation discharge space, and this this dielectric layer to be measured is relative with this measuring flume bottom;
Many second strip shaped electric poles are set in parallel in this measuring flume bottom, and vertical mutually with described first electrode;
The gas access is arranged at this measuring flume, in order to import inert gas to this discharge space; And
Gas vent is in order to get rid of this inert gas.
2. the measurement mechanism of medium thickness as claimed in claim 1, wherein said first strip shaped electric poles is made of the electrically conducting transparent material and the metal material of storehouse.
3. the measurement mechanism of medium thickness as claimed in claim 2, wherein this electrically conducting transparent material comprises tin indium oxide or tin ash.
4. the measurement mechanism of medium thickness as claimed in claim 2, wherein this metal material comprises chromium-copper chromium, silver, aluminium or nickel.
5. the measurement mechanism of medium thickness as claimed in claim 1, wherein said first strip shaped electric poles is made of metal material.
6. the measurement mechanism of medium thickness as claimed in claim 5, wherein this metal material comprises chromium-copper chromium, silver, aluminium or nickel.
7. the measurement mechanism of medium thickness as claimed in claim 1, wherein said second strip shaped electric poles is made of the electrically conducting transparent material and the metal material of storehouse.
8. the measurement mechanism of medium thickness as claimed in claim 7, wherein this electrically conducting transparent material comprises tin indium oxide or tin ash.
9. the measurement mechanism of medium thickness as claimed in claim 7, wherein this metal material comprises chromium-copper chromium, silver, aluminium or nickel.
10. the measurement mechanism of medium thickness as claimed in claim 1, the wherein said second strip electrode system is made of metal material.
11. the measurement mechanism of medium thickness as claimed in claim 10, wherein this metal material comprises chromium-copper chromium, silver, aluminium or nickel.
12. the measurement mechanism of medium thickness as claimed in claim 1, wherein this inert gas comprises helium, neon and both combinations thereof.
13. the measurement mechanism of medium thickness as claimed in claim 1, wherein this measuring flume comprises:
Substrate; And
Supporting construction erectly is arranged at around the above-mentioned substrate, in order to support this measured panel.
14. the measuring equipment of a medium thickness, be applicable to the medium thickness of the measured panel of measuring flat plasma display, wherein this panel system by transparency carrier, be arranged at the dielectric layer on this transparency carrier surface and many first strip shaped electric poles being parallel in the dielectric layer on this transparent substrates surface are constituted, it comprises:
Substrate is oppositely arranged with this dielectric layer of this measured panel;
Supporting construction erectly is arranged at around the above-mentioned substrate, and in order to support this measured panel, these supporting construction two ends engage with this measured panel, this substrate respectively, and wherein this measured panel, this substrate and this supporting construction constitute discharge space;
Many second strip shaped electric poles are set in parallel in this substrate surface, and vertical mutually with those first electrodes of this measured panel;
The gas access is in order to import inert gas to this discharge space; And
Gas vent is in order to get rid of this inert gas.
15. the measurement mechanism of medium thickness as claimed in claim 14, wherein said first strip shaped electric poles is made of the electrically conducting transparent material and the metal material of storehouse.
16. the measurement mechanism of medium thickness as claimed in claim 15, wherein this electrically conducting transparent material comprises tin indium oxide or tin ash.
17. the measurement mechanism of medium thickness as claimed in claim 15, wherein this metal material comprises chromium-copper chromium, silver, aluminium or nickel.
18. the measurement mechanism of medium thickness as claimed in claim 14, wherein said first strip shaped electric poles is made of metal material.
19. the measurement mechanism of medium thickness as claimed in claim 18, wherein this metal material comprises chromium-copper chromium, silver, aluminium or nickel.
20. the measurement mechanism of medium thickness as claimed in claim 14, wherein said second strip shaped electric poles is made of the electrically conducting transparent material and the metal material of storehouse.
21. the measurement mechanism of medium thickness as claimed in claim 20, wherein this electrically conducting transparent material comprises tin indium oxide or tin ash.
22. the measurement mechanism of medium thickness as claimed in claim 20, wherein this metal material comprises chromium-copper chromium, silver, aluminium or nickel.
23. the measurement mechanism of medium thickness as claimed in claim 14, wherein said second strip shaped electric poles is made of metal material.
24. the measurement mechanism of medium thickness as claimed in claim 23, wherein this metal material comprises chromium-copper chromium, silver, aluminium or nickel.
25. the measurement mechanism of medium thickness as claimed in claim 14, wherein this inert gas comprises helium, neon and both combinations thereof.
26. the measuring method of a medium thickness, be applicable to the medium thickness of the measured panel of measuring plasma planar display, wherein this panel by transparency carrier, be arranged at the dielectric layer on this transparency carrier surface and many first strip shaped electric poles being parallel in the dielectric layer on this transparent substrates surface are constituted, this method comprises:
This panel is positioned over the measuring equipment top, and this measuring equipment comprises:
Measuring flume, this dielectric layer of this measured panel is relative with this measurement trench bottom, forms discharge space;
Many second strip shaped electric poles are set in parallel in this measurement trench bottom, and vertical mutually with described first electrode;
The gas access is in order to import inert gas to this discharge space; And
Gas vent is in order to get rid of this inert gas.
Wherein the infall of described second strip shaped electric poles of described first strip shaped electric poles of this measured panel and this measurement mechanism forms a plurality of discharge cells respectively,
Apply a plurality of magnitudes of voltage respectively to described first strip shaped electric poles of this measured panel and those second strip shaped electric poles of this measurement mechanism, make described discharge cell send the light of brightness unanimity respectively; And
By the magnitude of voltage separately of described discharge cell, extrapolate the thickness of the dielectric layer region of respectively corresponding those discharge cell positions on this measured panel,
When wherein luminosity was identical, described magnitude of voltage size was directly proportional with this medium thickness.
27. the measuring method of medium thickness as claimed in claim 26, wherein this measured panel is a header board.
28. the measuring method of medium thickness as claimed in claim 26, wherein this measured panel is the back plate.
29. the measuring method of the medium thickness of stating as claim 26, wherein those first strip shaped electric poles are made of the electrically conducting transparent material and the metal material of storehouse.
30. the measuring method of the medium thickness of stating as claim 29, wherein this electrically conducting transparent material comprises tin indium oxide or tin ash.
31. the measuring method of the medium thickness of stating as claim 29, wherein this metal material comprises chromium-copper chromium, silver, aluminium or nickel.
32. the measuring method of the medium thickness of stating as claim 26, wherein those first strip shaped electric poles are made of metal material.
33. the measuring method of the medium thickness of stating as claim 32, wherein this metal material comprises chromium-copper chromium, silver, aluminium or nickel.
34. the measuring method of the medium thickness of stating as claim 26, the wherein said second strip electrode system is made of the electrically conducting transparent material and the metal material of storehouse.
35. the measuring method of the medium thickness of stating as claim 34, wherein this electrically conducting transparent material comprises tin indium oxide or tin ash.
The measuring method of 36 medium thicknesses of stating as claim 34, wherein this metal material comprises chromium-copper chromium, silver, aluminium or nickel.
The measuring method of 37 medium thicknesses of stating as claim 26, wherein said second strip shaped electric poles is made of metal material.
38 measuring methods as the medium thickness of claim 37, wherein this metal material comprises chromium-copper chromium, silver, aluminium or nickel.
The measuring method of 39 medium thicknesses of stating as claim 26, wherein this inert gas comprises helium, neon and both combinations thereof.
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|---|---|---|---|
| CN 03101056 CN1208596C (en) | 2003-01-08 | 2003-01-08 | Method for measuring thickness of dielectric layer and its device |
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|---|---|---|---|
| CN 03101056 CN1208596C (en) | 2003-01-08 | 2003-01-08 | Method for measuring thickness of dielectric layer and its device |
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| CN1515871A CN1515871A (en) | 2004-07-28 |
| CN1208596C true CN1208596C (en) | 2005-06-29 |
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| CN 03101056 Expired - Fee Related CN1208596C (en) | 2003-01-08 | 2003-01-08 | Method for measuring thickness of dielectric layer and its device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101718541B (en) * | 2008-12-30 | 2011-07-27 | 四川虹欧显示器件有限公司 | Automatic measuring device and method of coating layer ND direction film thickness |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102543628A (en) * | 2012-02-13 | 2012-07-04 | 安徽鑫昊等离子显示器件有限公司 | Process for manufacturing line body |
| CN114763984B (en) * | 2021-01-14 | 2024-04-19 | 欣兴电子股份有限公司 | Device and method for measuring thickness of dielectric layer in circuit board |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101718541B (en) * | 2008-12-30 | 2011-07-27 | 四川虹欧显示器件有限公司 | Automatic measuring device and method of coating layer ND direction film thickness |
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