CN1205649C - Micropattern manufacturing process with multiexposing steps - Google Patents

Micropattern manufacturing process with multiexposing steps Download PDF

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Publication number
CN1205649C
CN1205649C CNB021433224A CN02143322A CN1205649C CN 1205649 C CN1205649 C CN 1205649C CN B021433224 A CNB021433224 A CN B021433224A CN 02143322 A CN02143322 A CN 02143322A CN 1205649 C CN1205649 C CN 1205649C
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China
Prior art keywords
micro
photographing process
illuminate condition
irradiating step
irradiation unit
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CN1430244A (en
Inventor
严永松
黄义雄
黄俊仁
洪圭钧
张景旭
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United Microelectronics Corp
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United Microelectronics Corp
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70141—Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G03F7/70466—Multiple exposures, e.g. combination of fine and coarse exposures, double patterning or multiple exposures for printing a single feature

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

The present invention relates to a microimage manufacturing process with steps of irradiation for many times. A light cover is placed on a predefined position which is provided with a light resistor which is formed on the upper part of a wafer on the predefined position. The steps of irradiation for many times are orderly executed on the light resistor by the light cover. Each irradiation step has the separate irradiation condition that the duty ratio on the corresponding light cover is optimal. The optimal through-pitch pattern transfer from the light cover to the light resistor can be obtained by the steps of irradiation for many times. Finally, a development step is applied to the light resistor.

Description

The micro-photographing process that has repeatedly irradiating step
(1) technical field
The relevant a kind of micro-photographing process of the present invention; Particularly relevant a kind of micro-photographing process that uses the projection illumination method.
(2) background technology
Micro-photographing process is a kind of known processing procedure that geometry on the light shield is transferred to a silicon wafer surface.In integrated circuit micro-photographing process field, a photoactivate macromolecule membrane that is often referred to as photoresistance is to be formed on the silicon wafer, and drying.One irradiation unit be through a light shield with a suitable geometrical pattern with a light source or radiation source irradiates on this silicon wafer.After irradiation, wafer through development treatment with the design transfer on the light shield so far on the photoactivate macromolecule membrane.This mask pattern is in order to produce the element live width on the integrated circuit.
Fig. 1 is the rough schematic of a traditional irradiation unit.As seen from Figure 1, light source 100 is the aperture 102 projection light waves 108 through a diaphragm 101.Focus lamp 105 collects to focus on the light shield 106 from the light beam in aperture 102 and with it, so that light beam is radiated on the light shield 106 equably.When illumination beam 103 passes through light shield 106, produce an image beam (imaging beam) 109.Image beam 109 is through projection lens's 107 projections, so that the pattern on the light shield 106 focuses on the silicon wafer 110.As shown in Figure 1, aperture 102 is the centers that are positioned at diaphragm 101.Therefore, illumination beam 103 is 102 to be projected to focus lamp 105 and light shield 106 along optical axis (dotted line 104) from the aperture.This kind radiation modality is called axially luminous, and meaning luminous beam is on optical axis.
One key property of any irradiation unit is its resolution (resolution).But the resolution of an irradiation unit is defined as the minimum feature of this irradiation unit reirradiation on wafer, and it approaches the critical size (critical dimension) of many designs of integrated circuit layout now.
Another key property of irradiation unit be its depth of focus (depth of focus) (DOF).The depth of focus of irradiation unit is defined as the spatial image scope that rests on the focal length.In micro-photographing process, image is to be transferred to a photoresist layer, therefore needs the depth of focus of a minimum.The depth of focus of this minimum still keeps resting on the focal length in the time of can really making image pass through photoresist layer.Therefore, the minimum depth of focus is normally more than or equal to the thickness of photoresist layer.
The resolution of irradiation unit and the depth of focus be the numerical aperture (numerical aperture) that is proportional to illumination wavelength lambda and is inversely proportional to the optical projection system of irradiation unit (NAlens), both are expressed as follows with formula (1) and formula (2) respectively:
R = K 1 λ NAlens - - - ( 1 )
DOF = K 2 λ ( NAlens ) 2 - - - ( 2 )
The depth of focus of irradiation unit determines this irradiation unit can use the setting of resolution.For example, if an irradiation unit can be resolved the live width size of 0.4 μ m, but the depth of focus then can't use this 0.4 μ m resolution to set less than this live width size is clearly focused on needed focal range on the whole photoresistance.If can reduce the spendable resolution of irradiation unit, then littler image can be transferred on the photoresistance.
With reference to Fig. 1, in traditional micro-photographing process, be with a fixing illuminate condition comprise numerical aperture (NAlens), degree of interfering with or disturb each other (sigma value) (σ) and the irradiation energy irradiation have photoresist layer wafer formed thereon 10, on critical size, to produce enough light acid.
Degree of interfering with or disturb each other (Sigma value) (Sigma value) (σ) is meant the ratio of numerical aperture (NAlens) of optical projection system of numerical aperture (NAill) the relative exposure device of the luminescent system of irradiation unit, is to be expressed as follows with formula (3):
σ = NAill NAlens - - - ( 3 )
With reference to Fig. 2 A to Fig. 2 C, curve A 1, A2 and A3 are that to represent illuminate condition be in the optical projection system certain numerical value aperture (NA) of irradiation unit 0.68 time, its sigma value is from low paramount (0.35,0.6,0.85), the graph of a relation of the focal range of the corresponding irradiation unit of critical size of the intensive line pattern that is obtained respectively (dense pattern).Curve B 1, B2 and B3 are that to represent illuminate condition be in the optical projection system certain numerical value aperture (NA) of irradiation unit 0.68 time, its sigma value is from low paramount (0.35,0.6,0.85), the focal range of the corresponding irradiation unit of critical size of the isolated line pattern that is obtained respectively (isolated pattern).Significantly, when the sigma value increased, the corresponding irradiation unit depth of focus of intensive line pattern increased.On the contrary, the depth of focus of the corresponding irradiation unit of isolated line pattern is to shoal ".
Use traditional micro-photographing process of fixed single illuminate condition, intensive line pattern and isolated line pattern are to be transferred to photoresist layer simultaneously from identical light shield.Yet the result of Fig. 2 A to Fig. 2 C shows, it is optimizations all for the transfer of intensive line pattern and isolated line pattern that an illuminate condition is not arranged.In addition, for same light shield, the gap on light shield (pitch) more hour, the diffraction phenomenon makes critical size become big, and when the gap increases, optical effect makes critical dimension reduction.At this, the gap is meant that a live width size (linewidth) adds a spacing (space).In addition, light shield partial factor (mask error factor) (MEF) also has a strong impact on the control of the critical size size of corresponding all spacings on the light shield.The light shield partial factor is meant the ratio of the deviation (Δ CDmask) of critical size on the relative light shield of the deviation (Δ CDwafer) of the critical size on the wafer.Therefore, must obtain one on intensive line pattern transfer effect and isolated line design transfer effect trades off.
Traditionally, also use two light shields to carry out the micro-photographing process of twice irradiation to overcome above-mentioned problem.But this method faces the problem of the alignment accuracy of two light shields.Moreover the quantum of output of micro-photographing process also is lowered.
Use traditional micro-photographing process of the once irradiating step of single illuminate condition can't satisfy the optimization illuminate condition of corresponding gapped design transfer.Therefore, demand developing the improved micro-photographing process of the repeatedly irradiating step of the illuminate condition that a kind of use can mate urgently.
(3) summary of the invention
Main purpose of the present invention provides a kind of micro-photographing process that has repeatedly irradiating step, wherein the duty ratio (duty ratio) on the corresponding light shield of indivedual illuminate conditions of each irradiating step is an optimization, the present invention can be in conjunction with the advantage of different illuminate conditions by this, obtain corresponding gapped preferable processing procedure ability, comprise the depth of focus (DOF), proximity effect (proximity) and light shield partial factor (MEF), and then increase process volume of the present invention.
Another object of the present invention provides a kind of micro-photographing process that has repeatedly irradiating step, and it is to use single light shield to carry out repeatedly irradiating step, need not be written into/carry the step that alignment through light shield, can obtain preferable overlay accuracy.
Another purpose of the present invention provides a kind of micro-photographing process that has repeatedly irradiating step, it is applicable to different wavelength, comprises I-line, deep UV (ultraviolet light) (deep UV ray), extremely short ultraviolet light (extreme UV ray), the little shadow of X-ray and ion projection (ion projection lithography) etc.
The micro-photographing process that has repeatedly irradiating step of the present invention is characterized in, comprising: a wafer is provided, and wherein a photoresistance is to be formed on this wafer; Put a light shield alignedly on a precalculated position of this wafer top, wherein this light shield has a plurality of duty ratios; Via this light shield, carry out repeatedly irradiating step in regular turn on this photoresistance, an other illuminate condition of this each irradiating step is to be decided by arbitrary duty ratio (dutyratio), obtains the full gap of an optimization (through-pitch) design transfer that is transferred to this photoresistance from this light shield by this; And carry out a development step on this photoresistance.
For clearer understanding purpose of the present invention, characteristics and advantage, below conjunction with figs. is elaborated to preferred embodiment of the present invention.
(4) description of drawings
Fig. 1 is the rough schematic of a traditional projection irradiation unit;
Fig. 2 A to Fig. 2 C is that illuminate condition is respectively low sigma value, middle sigma value and high sigma value down, uses traditional micro-photographing process to obtain to distinguish the graph of a relation of focal length of the critical size relative exposure device of corresponding intensive line pattern and isolated line pattern;
Fig. 3 is the flow chart of micro-photographing process of the present invention;
Fig. 4 A is the graph of a relation of the focal length of critical size relative exposure device in the present invention's first preferred embodiment; And
Fig. 4 B is the graph of a relation of the focal length of critical size relative exposure device in the present invention's second preferred embodiment.
(5) embodiment
The invention provides a kind of micro-photographing process that has repeatedly irradiating step, it is to carry out design transfer via a light shield with irradiating step repeatedly on the photoresistance of a wafer.Indivedual illuminate conditions of each irradiating step are provided with radiation parameters and comprise and be used in this repeatedly numerical aperture of the irradiation unit of irradiating step (NA), sigma value (σ), irradiation energy, focal position and pupil kenel (pupil type).At this, numerical aperture (NA) is meant the numerical aperture of the optical projection system (projection optical system) of irradiation unit, and the sigma value is meant the sigma value of the luminescent system (illuminating optical system) of irradiation unit.Above-mentioned all radiation parameters can obtain by the setting of adjusting irradiation unit.A specific duty ratio (duty ratio) is an optimization on the corresponding light shield of indivedual illuminate conditions of each irradiating step.Duty ratio is meant the ratio of the relative critical size (critical dimension) in gap (pitch) on the light shield.In view of the above, the present invention can be in conjunction with these indivedual design transfer results of irradiating step repeatedly, and obtain corresponding gapped (through pitch) good design transfer.
Fig. 3 is the flow chart that the present invention has repeatedly the micro-photographing process of irradiating step.In step 31, a photoresistance is to be formed at earlier on the wafer.Form the method for photoresistance on wafer and comprise the spin application photoresistance.Then, a light shield is placed in alignedly wafer top one suitable distance.Having a pattern on the light shield is in order to be transferred on the photoresistance.This pattern has one group of specific duty ratio (duty ratio), i.e. the ratio of the corresponding critical size in one group of gap (pitch) (critical dimension).
Next, in step 32,, carry out first irradiating step to the n irradiating step in regular turn in having on photoresistance this wafer formed thereon through this light shield.The number of times of irradiating step is to determine according to this group duty ratio on the light shield.Carry out one first irradiating step, its illuminate condition is that a duty ratio of corresponding light shield is an optimization.This illuminate condition can obtain by the setting of adjusting irradiation unit.Then, carry out one second irradiating step with one second illuminate condition, another duty ratio of the corresponding light shield of this second illuminate condition is best.Repeat irradiating step with different illuminate conditions, until satisfying duty ratios all on the light shield.By this, can obtain in conjunction with this final design transfer of indivedual design transfer results of irradiating step repeatedly.Because indivedual illuminate conditions of each irradiating step are that a duty ratio is an optimization on the corresponding light shield, thus mat the inventive method can obtain on the corresponding light shield gapped good design transfer.
In step 33, a development step be continue this repeatedly irradiating step be performed on the photoresistance.This photoresistance development step can prior art method for example dry process development or wet developing are carried out.
Repeatedly irradiating step of the present invention comprises I-line, deep UV (ultraviolet light) (deep UVray), extremely short ultraviolet light (extreme UV ray), the little shadow of X-ray and ion projection (ion projectionlithography) etc. applicable to different wavelength.
Mentioned as the background technology part, if the depth of focus (depth of focus) of an irradiation unit (DOF) can increase deeply, then can dwindle the resolution (resolution) of this irradiation unit, and littler image can be transferred on the photoresistance.In addition, when the sigma of irradiation unit value increases, the depth of focus of the irradiation unit of its corresponding intensive line pattern (densepattern) (its duty ratio is little) can increase deeply, and the depth of focus of the irradiation unit of corresponding isolated line pattern (isolated pattern) (its duty ratio is for big) can shoal.
In one first preferred embodiment of the present invention, illuminate condition is that one first irradiating step of sigma value about 0.85 and numerical aperture about 0.68 is to be executed in through the light shield with an intensive line pattern and an isolated line pattern to have on the photoresistance wafer formed thereon.The illuminate condition of this first irradiating step is to shift favourable to intensive line pattern.Illuminate condition is that one second irradiating step of sigma value about 0.35 and numerical aperture about 0.68 then is executed on this wafer through this light shield.The illuminate condition of this second irradiating step is favourable to the isolated line design transfer.By this, obtain a final design transfer in conjunction with first irradiating step and second irradiating step.The result that combines of first irradiating step that Fig. 4 A shows first preferred embodiment and indivedual design transfer of second irradiating step, it is the focal length graph of a relation of the critical size correspondence irradiation unit that is used in this two irradiating step.Than the traditional micro-photographing process that uses single illuminate condition, significantly, the depth of focus of irradiation unit of the present invention is increased deeply.
First irradiating step in above-mentioned first preferred embodiment and the execution order of second irradiating step can be exchanged mutually.
Can use the other method of resolution (resolution) with the depth of focus that increases dark irradiation unit (DOF) to dwindle irradiation unit, be to use off-axis illumination mode (off-axis illumination).The off-axis illumination mode is an angle direction projection one luminous beam with a skew optical axis, by this to increase the depth of focus of dark irradiation unit.The off-axis illumination mode can be four utmost point illumination modes (quadruple typeillumination), annular illumination mode (annular type illumination) and two utmost point illumination modes (dipole type illumination) etc.Yet for intensive line pattern, the off-axis illumination mode can increase the depth of focus of dark irradiation unit significantly, but for the isolated line pattern, does not obviously increase the depth of focus of dark irradiation unit.In one second preferred embodiment of the present invention, be for the advantage of intensive pattern and low sigma value advantage for the isolated line pattern in conjunction with the off-axis illumination mode.
In second preferred embodiment, one first irradiating step that adopts off-axis illumination mode and numerical aperture about 0.68 is to be executed in one through the light shield with an intensive line pattern and an isolated line pattern to have on the photoresistance wafer formed thereon.This first irradiating step shifts more favourable for intensive line pattern.The off-axis illumination mode can decide with the pupil type (pupil type) that change is used in the luminescent system (illuminating optical system) of an irradiation unit of second preferred embodiment.One second irradiating step with sigma value about 0.35 and numerical aperture about 0.64 is then to be executed on this wafer through this light shield.This second irradiating step is more favourable for the isolated line design transfer.By this, obtain in conjunction with first irradiating step and the second final design transfer of shining indivedual design transfer results of step.The result that combines of first irradiating step that Fig. 4 B shows second preferred embodiment and indivedual design transfer of second irradiating step, it is the focal length graph of a relation of the critical size correspondence irradiation unit that is used in this two irradiating step.Than the traditional micro-photographing process that uses single illuminate condition, significantly, the depth of focus of irradiation unit of the present invention is increased deeply.
First irradiating step in above-mentioned second preferred embodiment and the execution order of second irradiating step can be exchanged mutually.
The repeatedly irradiating step of micro-photographing process of the present invention is to use single light shield and different illuminate conditions, and it can be in conjunction with the advantage of different illuminate conditions, to obtain preferable design transfer effect.Micro-photographing process of the present invention need not be written into/carry the alignment step that through light shield, so can obtain preferable overlay accuracy.In addition, the inventive method can increase the depth of focus of dark institute use irradiation unit, so can increase the process volume (process window) of micro-photographing process of the present invention.
The above is preferred embodiment of the present invention only, is not to limit scope of the present invention; All other do not break away from the equivalence finished under the disclosed spirit and changes or replace, and all should be included in the scope of patent protection that claim limits.

Claims (29)

1. a micro-photographing process that has repeatedly irradiating step is characterized in that, comprising:
One wafer is provided, and wherein a photoresistance is to be formed on this wafer;
Put a light shield alignedly on a precalculated position of this wafer top, wherein this light shield has a plurality of duty ratios;
Via this light shield, carry out repeatedly irradiating step in regular turn on this photoresistance, an other illuminate condition of this each irradiating step is to be decided by arbitrary duty ratio, obtains the full gap of the optimization design transfer that is transferred to this photoresistance from this light shield by this; And
Carry out a development step on this photoresistance.
2. micro-photographing process as claimed in claim 1 is characterized in that, described repeatedly irradiating step is to carry out with an irradiation unit.
3. micro-photographing process as claimed in claim 2 is characterized in that, the radiation parameters of described indivedual illuminate conditions is numerical aperture, the value of interfering with or disturb each other, focal length and the pupil kenels that comprise this irradiation unit.
4. micro-photographing process as claimed in claim 1 is characterized in that, the illumination wavelength of described repeatedly irradiating step is to be selected from: I-line, deep UV (ultraviolet light), extremely short ultraviolet light, the little shadow of X-ray and ion projection.
5. micro-photographing process as claimed in claim 2 is characterized in that, the illumination wavelength of described repeatedly irradiating step is to be selected from: I-line, deep UV (ultraviolet light), extremely short ultraviolet light, the little shadow of X-ray and ion projection.
6. the micro-photographing process with after-sun step is characterized in that, comprising:
One wafer is provided, and wherein, a photoresistance is to be formed on this wafer;
Put a light shield alignedly on a precalculated position of this wafer top, this light shield has an intensive line pattern and an isolated line pattern and a duty ratio separately with respect to this intensive line pattern and this isolated line pattern;
Via this light shield, carry out one first irradiating step on this photoresistance with one first illuminate condition, this first illuminate condition be decided by mutually should intensive line pattern this duty ratio;
Via this light shield, carry out one second irradiating step on this photoresistance with one second illuminate condition, this second illuminate condition be decided by mutually should the isolated line pattern this duty ratio; And
Carry out a development step on this photoresistance.
7. micro-photographing process as claimed in claim 6 is characterized in that, described first irradiating step and second irradiating step are to carry out with an irradiation unit.
8. micro-photographing process as claimed in claim 7 is characterized in that, the radiation parameters of described first illuminate condition is numerical aperture, the value of interfering with or disturb each other, focal length and the pupil kenel that comprises this irradiation unit.
9. micro-photographing process as claimed in claim 7 is characterized in that, the radiation parameters of described second illuminate condition is numerical aperture, the value of interfering with or disturb each other, focal length and the pupil kenel that comprises this irradiation unit.
10. micro-photographing process as claimed in claim 6 is characterized in that, described first illuminate condition comprises the off-axis illumination mode.
11. micro-photographing process as claimed in claim 7 is characterized in that, described first illuminate condition comprises the off-axis illumination mode.
12. micro-photographing process as claimed in claim 7 is characterized in that, described first illuminate condition comprises that value of interfering with or disturb each other of this irradiation unit is not less than 0.85.
13. micro-photographing process as claimed in claim 7 is characterized in that, described second illuminate condition comprises that value of interfering with or disturb each other of this irradiation unit is not more than 0.35.
14. micro-photographing process as claimed in claim 7 is characterized in that, described first illuminate condition comprises that off-axis illumination mode and this second illuminate condition comprise that value of interfering with or disturb each other of this irradiation unit is not more than 0.35.
15. micro-photographing process as claimed in claim 7 is characterized in that, described first illuminate condition comprise value of interfering with or disturb each other of this irradiation unit be not less than 0.85 and this second illuminate condition comprise that value of interfering with or disturb each other of this irradiation unit is not more than 0.35.
16. micro-photographing process as claimed in claim 6 is characterized in that, the illumination wavelength of described first irradiating step and second irradiating step is to be selected from: I-line, deep UV (ultraviolet light), extremely short ultraviolet light, the little shadow of X-ray and ion projection.
17. micro-photographing process as claimed in claim 7 is characterized in that, the illumination wavelength of described first irradiating step and second irradiating step is to be selected from: I-line, deep UV (ultraviolet light), extremely short ultraviolet light, the little shadow of X-ray and ion projection.
18. the micro-photographing process with after-sun step is characterized in that, comprising:
One wafer is provided, and wherein, a photoresistance is to be formed on this wafer;
Put a light shield alignedly on one precalculated position, this wafer top, this light shield has an intensive line pattern and an isolated line pattern and a duty ratio separately with respect to this intensive line pattern and this isolated line pattern;
Via this light shield, carry out one first irradiating step on this photoresistance with one first illuminate condition, this first illuminate condition be decided by mutually should the isolated line pattern this duty ratio;
Via this light shield, carry out one second irradiating step on this photoresistance with one second illuminate condition, this second illuminate condition be decided by mutually should intensive line pattern this duty ratio; And
Carry out a development step on this photoresistance.
19. micro-photographing process as claimed in claim 18 is characterized in that, described first irradiating step and second irradiating step are to carry out with an irradiation unit.
20. micro-photographing process as claimed in claim 19 is characterized in that, the radiation parameters of described first illuminate condition is numerical aperture, the value of interfering with or disturb each other, focal length and the pupil kenel that comprises this irradiation unit.
21. micro-photographing process as claimed in claim 19 is characterized in that, the radiation parameters of described second illuminate condition is numerical aperture, the value of interfering with or disturb each other, focal length and the pupil kenel that comprises this irradiation unit.
22. micro-photographing process as claimed in claim 18 is characterized in that, described second illuminate condition comprises the off-axis illumination mode.
23. micro-photographing process as claimed in claim 19 is characterized in that, described second illuminate condition comprises the off-axis illumination mode.
24. micro-photographing process as claimed in claim 19 is characterized in that, described second illuminate condition comprises that value of interfering with or disturb each other of this irradiation unit is not less than 0.85.
25. micro-photographing process as claimed in claim 19 is characterized in that, described first illuminate condition comprises that value of interfering with or disturb each other of this irradiation unit is not more than 0.35.
26. micro-photographing process as claimed in claim 19 is characterized in that, described first illuminate condition comprise value of interfering with or disturb each other of this irradiation unit be not more than 0.35 and this second illuminate condition comprise the off-axis illumination mode.
27. micro-photographing process as claimed in claim 19 is characterized in that, described first illuminate condition comprise value of interfering with or disturb each other of this irradiation unit be not more than 0.35 and this second illuminate condition comprise that value of interfering with or disturb each other of this irradiation unit is not less than 0.85.
28. micro-photographing process as claimed in claim 18 is characterized in that, the illumination wavelength of described first irradiating step and second irradiating step is to be selected from: I-line, deep UV (ultraviolet light), extremely short ultraviolet light, the little shadow of X-ray and ion projection.
29. micro-photographing process as claimed in claim 19 is characterized in that, the illumination wavelength of described first irradiating step and second irradiating step is to be selected from: I-line, deep UV (ultraviolet light), extremely short ultraviolet light, the little shadow of X-ray and ion projection.
CNB021433224A 2002-01-03 2002-09-23 Micropattern manufacturing process with multiexposing steps Expired - Lifetime CN1205649C (en)

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US10/033,891 2002-01-03
US10/033,891 US6839126B2 (en) 2002-01-03 2002-01-03 Photolithography process with multiple exposures

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CN1205649C true CN1205649C (en) 2005-06-08

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