CN1199794C - Ink jet printing method for preparing metal film - Google Patents
Ink jet printing method for preparing metal film Download PDFInfo
- Publication number
- CN1199794C CN1199794C CN 01128004 CN01128004A CN1199794C CN 1199794 C CN1199794 C CN 1199794C CN 01128004 CN01128004 CN 01128004 CN 01128004 A CN01128004 A CN 01128004A CN 1199794 C CN1199794 C CN 1199794C
- Authority
- CN
- China
- Prior art keywords
- solvent
- ink
- raw material
- film
- metallic film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 13
- 239000002184 metal Substances 0.000 title claims abstract description 13
- 238000000034 method Methods 0.000 title claims abstract description 12
- 238000007641 inkjet printing Methods 0.000 title abstract description 4
- 238000005516 engineering process Methods 0.000 claims abstract description 19
- 239000002994 raw material Substances 0.000 claims abstract description 15
- 239000002904 solvent Substances 0.000 claims abstract description 14
- 239000000654 additive Substances 0.000 claims abstract description 5
- 230000000996 additive effect Effects 0.000 claims abstract description 5
- 150000001875 compounds Chemical class 0.000 claims abstract description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 10
- 239000004094 surface-active agent Substances 0.000 claims description 10
- 239000003960 organic solvent Substances 0.000 claims description 9
- 238000007639 printing Methods 0.000 claims description 7
- 239000008367 deionised water Substances 0.000 claims description 6
- 229910021641 deionized water Inorganic materials 0.000 claims description 6
- 239000007921 spray Substances 0.000 claims description 6
- 230000015556 catabolic process Effects 0.000 claims description 5
- 238000006731 degradation reaction Methods 0.000 claims description 5
- 238000007669 thermal treatment Methods 0.000 claims description 5
- 150000001298 alcohols Chemical class 0.000 claims description 2
- 239000003093 cationic surfactant Substances 0.000 claims description 2
- 150000002148 esters Chemical class 0.000 claims description 2
- 239000002082 metal nanoparticle Substances 0.000 claims description 2
- 230000008569 process Effects 0.000 abstract description 4
- 230000008901 benefit Effects 0.000 abstract description 2
- 238000001035 drying Methods 0.000 abstract description 2
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 25
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- NKFNBVMJTSYZDV-UHFFFAOYSA-N 2-[dodecyl(2-hydroxyethyl)amino]ethanol Chemical compound CCCCCCCCCCCCN(CCO)CCO NKFNBVMJTSYZDV-UHFFFAOYSA-N 0.000 description 2
- LZZYPRNAOMGNLH-UHFFFAOYSA-M Cetrimonium bromide Chemical compound [Br-].CCCCCCCCCCCCCCCC[N+](C)(C)C LZZYPRNAOMGNLH-UHFFFAOYSA-M 0.000 description 2
- SNRUBQQJIBEYMU-UHFFFAOYSA-N Dodecane Natural products CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- DBMJMQXJHONAFJ-UHFFFAOYSA-M Sodium laurylsulphate Chemical compound [Na+].CCCCCCCCCCCCOS([O-])(=O)=O DBMJMQXJHONAFJ-UHFFFAOYSA-M 0.000 description 2
- 239000004141 Sodium laurylsulphate Substances 0.000 description 2
- 125000002252 acyl group Chemical group 0.000 description 2
- 229960000935 dehydrated alcohol Drugs 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 2
- GVGUFUZHNYFZLC-UHFFFAOYSA-N dodecyl benzenesulfonate;sodium Chemical compound [Na].CCCCCCCCCCCCOS(=O)(=O)C1=CC=CC=C1 GVGUFUZHNYFZLC-UHFFFAOYSA-N 0.000 description 2
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052745 lead Inorganic materials 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920001495 poly(sodium acrylate) polymer Polymers 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 229940080264 sodium dodecylbenzenesulfonate Drugs 0.000 description 2
- 235000019333 sodium laurylsulphate Nutrition 0.000 description 2
- RYYKJJJTJZKILX-UHFFFAOYSA-M sodium octadecanoate Chemical compound [Na+].CCCCCCCCCCCCCCCCCC([O-])=O RYYKJJJTJZKILX-UHFFFAOYSA-M 0.000 description 2
- NNMHYFLPFNGQFZ-UHFFFAOYSA-M sodium polyacrylate Chemical compound [Na+].[O-]C(=O)C=C NNMHYFLPFNGQFZ-UHFFFAOYSA-M 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000002322 conducting polymer Substances 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Landscapes
- Inks, Pencil-Leads, Or Crayons (AREA)
- Chemically Coating (AREA)
- Ink Jet (AREA)
Abstract
The present invention relates to an ink jet printing method for preparing a metal film, which comprises the following operation procedures: 1) compounds which can be heated and decomposed to generate metal are taken as raw materials, and are dissolved in a solvent, and the weight ratio of the raw materials and the solvent is 1 to 20: 100; 2) an additive is added for regulating performance, such as viscosity, surface tension, drying speed, etc., the addition quantity is 0.1% to 5% of the weight of the solvent, the viscosity of the solvent is controlled from 20mPa. s to 60mPa. s, the surface tension is controlled from 20 mNm <-1> to 50 mNm <-1>, and jet ink is prepared; 3) the ink in injected into an ink box and is deposited onto a base sheet according to a predetermined picture by adopting a conventional ink jet printing technology; 4) the film which is deposited onto the base sheet is heated with 200 DEG C to 600 DEG C so as to form a metal film. The present invention has the advantages of simple process and low cost, and can control pictures and components point after point.
Description
Technical field
The present invention relates to the metallic film technology of preparing, specifically a kind of spray ink Printing prepares the method for metallic film.
Background technology
Metallic film is widely used, and especially the metallic film that has certain figure and a physical and chemical performance at microelectronic has constituted the basis of nearly all microelectronic device.Metallic film not only is used to connect lead, contact, and can be used for finishing multiple functions such as sensing, catalysis, electromagnetic shielding.Conventional now metallic film preparation technology generally needs technologies such as plated film and etching, the preparation process complexity, and cost is higher.
Inkjet technology is one of major technique that generally adopts in the modern handle official bussiness printing, is divided into continous way and random mode two classes according to ink-jetting style.The continous inkjet technology utilizes Piexoelectric actuator that the shower nozzle ink inside is applied fixation pressure, makes its continuous injection, utilizes the heading of deflection electrode change ink droplet and forms pattern.The only ink-jet when needed of random mode ink-jet technology, it mainly contains two kinds of bubble type and piezoelectric types.Bubble type is provided with well heater on the tube wall of shower nozzle, under the electricimpulse effect, form very little bubble on the well heater, and the bubble expanded by heating produces pressure-driven ink droplet jetting nozzle.Piezoelectric type utilizes the minute-pressure electric device to make transverter, produces pressure wave and drive the ink droplet jetting nozzle under the pulsed voltage effect.The a plurality of ink-jet systems of configuration in the general printer, each ink-jet system connects with the print cartridge that the different colours ink is housed, and can print colourful pattern.In recent years, the researchist begins to attempt it is used for the preparation of plane function material, and obtain some preliminary results, as prepare conducting polymer film (D.Pede, G.erra, andDe Rossi, Mater.Sci.Eng.C.5 (1998) 289), preparation color organic light emitting diode (Adv.Mater.11 (1999) 734 for S.-C.Chang, et al), prepare function nano structure graph (H.Y.Fan by the self organizing function ink that has that contains tensio-active agent, et al, Nature, 405 (2000) 56).Inkjet technology is as the functional materials preparation means of plane function material particularly because it has and is easy to prepare complex figure, but and the characteristics of pointwise control composition, be expected under a stable condition, to be used to replace plated film, the photoetching process of existing complexity.But utilize inkjet technology to prepare metallic film and yet there are no report.
Summary of the invention
The purpose of this invention is to provide the method that a kind of technology is simple, cost is low spray ink Printing prepares metallic film.
To achieve these goals, technical scheme of the present invention is: operation as follows: 1) but to get the compound that thermal degradation generates metal be raw material, it is dissolved in the solvent, the weight ratio of described raw material and solvent is 1-20: 100; 2) add additive and regulate performances such as viscosity, surface tension and rate of drying, add-on is the 0.1-5% of weight of solvent, and the control soltion viscosity is that 20-60mPas, surface tension are 20-50mNm
-1, be made into ink for ink-jet print; 3) described ink is injected in the print cartridge, adopts conventional inkjet technology spray deposited to substrate by predetermined pattern; 4) deposit to on-chip rete through 200-600 ℃ thermal treatment with described, form metallic film;
In addition, raw material described in the step 1) is a metal nanoparticle, and it is dispersed in water or the organic solvent;
Also have, after the step 4), the substrate that forms metallic film is put into chemical plating fluid, technology is carried out the plated film of required metal routinely;
Described solvent can be deionized water; Described solvent can be organic solvents such as alcohols, ester class; Described additive is aniorfic surfactant such as sodium stearate, sodium lauryl sulphate, Sodium dodecylbenzene sulfonate, cationic surfactant such as cetyl trimethylammonium bromide, nonionic surface active agent such as dodecyl diethanolamine, dodecyl acyl diethanolamine, amphoterics, polymeric surface active agent such as polyvinyl alcohol, sodium polyacrylate etc.
The present invention has following advantage:
1. the present invention utilizes the printing high precision characteristics of inkjet technology, and the figure and the composition of the control of pointwise simply and easily rete make pattern precision higher, and sharpness of border is evenly distributed, and need not plated film and etching and other complex processes.
2. adopt the present invention to make ink by oneself, adapt to the little requirement of nozzle bore, can prepare multiple metallic film and multiple layer metal film, as monobasic and multi-element metal thin-film materials such as Fe, Au, Cu, Ag, Pb, Pt; Cycle is short, and cost is low, can be widely used in the preparation process of electron device.
3. the present invention not only can directly prepare metallic film, and can be applied to depositing noble metal film activation substrate and induce next step electroless plating process.
Embodiment
Below in conjunction with embodiment the present invention being made further detail describes.
Embodiment 1
Prepare golden lead
Operation as follows: 1) but get the compd A uCl that the 1g thermal degradation generates metallic gold Au
3Be raw material, it be dissolved in the 50ml deionized water that the weight ratio of described raw material and deionized water is 2: 100; 2) add sodium lauryl sulphate 0.1g, add-on is 0.2% of a deionized water weight, is that 50mPas (room temperature), surface tension are 30mNm with the viscosity of controlling ink
-1Be made into golden ink; 3) described ink is injected in the print cartridge, adopts conventional inkjet technology to deposit on the substrate by predetermined pattern; 4) deposit to on-chip rete through 250 ℃ thermal treatment with described, reaction forms has the gold thin film of predetermined pattern.
Embodiment 2
Prepare silver-colored lead
Operation as follows: 1) but get the compd A gNO that the 2g thermal degradation generates metal A g
3Be raw material, it be dissolved in the 50ml organic solvent dehydrated alcohol that the weight ratio of described raw material and organic solvent is 4: 100; 2) add cetyl trimethylammonium bromide 0.1g, add-on is 0.2% of an organic solvent weight, is that 40mPas (room temperature), surface tension are 40mNm with the viscosity of controlling ink
-1Be made into silver-colored ink; 3) described ink is injected in the print cartridge, adopts conventional inkjet technology to deposit on the substrate by predetermined pattern; 4) deposit to on-chip rete through 500 ℃ thermal treatment with described, reaction forms the silver-colored film with predetermined pattern.
Embodiment 3
Spray ink Printing assisted chemical plating prepared copper conductor:
Operation as follows: 1) but get the compd A uCl that the 1g thermal degradation generates metal
3Be raw material, it be dissolved in the 50ml deionized water that the weight ratio of described raw material and water or organic solvent is 2: 100; 2) add nonionic surface active agent dodecyl diethanolamine 0.2g, add-on is 0.4% of water or an organic solvent weight, is that 30mPas (room temperature), surface tension are 30mNm with the viscosity of controlling ink
-1Be made into golden ink; 3) described ink is injected in the print cartridge, adopts conventional inkjet technology to deposit on the substrate by predetermined pattern; 4) deposit to on-chip rete through 250 ℃ thermal treatment with described, reaction forms gold thin film.
Described substrate is put into the conventional chemical copper plating solution, under 60 ℃ of temperature,,, on substrate, form the copper film of predetermined pattern at the surface deposition copper of golden film through 10 minutes.
In addition, as another embodiment, difference from Example 1 is: raw material described in the step 1) of the present invention also is bronze, and it is dispersed in water or the dehydrated alcohol.
The present invention also can adopt the dodecyl acyl diethanolamine in sodium stearate in the aniorfic surfactant, Sodium dodecylbenzene sulfonate, the nonionic surface active agent, polyvinyl alcohol, sodium polyacrylate or the amphoterics etc. in the polymeric surface active agent.
Adopt the present invention can prepare as multiple metallic film and multiple layer metal films such as Fe, Au, Cu, Ag, Pb, Pt.
Claims (1)
1. a spray ink Printing prepares the method for metallic film, it is characterized in that operating as follows: 1) but to get the compound that thermal degradation generates metal be raw material, it is dissolved in the solvent, the weight ratio of described raw material and solvent is 1-20: 100; 2) add additive, add-on is the 0.1-5% of weight of solvent, and the control soltion viscosity is that 20-60mPas, surface tension are 20-50mNm
-1, be made into ink for ink-jet print; 3) described ink is injected in the print cartridge, adopts conventional inkjet technology to deposit on the substrate by predetermined pattern; 4) deposit to on-chip rete through 200-600 ℃ thermal treatment with described, form metallic film; Raw material described in the step 1) is a metal nanoparticle, and it is dispersed in water or the organic solvent; After the described step 4), with the substrate that forms metallic film routinely technology carry out the plated film of required metal; Described solvent is a deionized water; Described solvent is alcohols, ester class organic solvent; Described additive is aniorfic surfactant, cationic surfactant, nonionic surface active agent, polymeric surface active agent or amphoterics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01128004 CN1199794C (en) | 2001-08-03 | 2001-08-03 | Ink jet printing method for preparing metal film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01128004 CN1199794C (en) | 2001-08-03 | 2001-08-03 | Ink jet printing method for preparing metal film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1400106A CN1400106A (en) | 2003-03-05 |
| CN1199794C true CN1199794C (en) | 2005-05-04 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01128004 Expired - Fee Related CN1199794C (en) | 2001-08-03 | 2001-08-03 | Ink jet printing method for preparing metal film |
Country Status (1)
| Country | Link |
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| CN (1) | CN1199794C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101754859B (en) * | 2007-06-14 | 2012-05-30 | 麻省理工学院 | Method and apparatus for depositing films |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP3823981B2 (en) * | 2003-05-12 | 2006-09-20 | セイコーエプソン株式会社 | PATTERN AND WIRING PATTERN FORMING METHOD, DEVICE AND ITS MANUFACTURING METHOD, ELECTRO-OPTICAL DEVICE, ELECTRONIC DEVICE, AND ACTIVE MATRIX SUBSTRATE MANUFACTURING METHOD |
| KR101082146B1 (en) * | 2006-09-29 | 2011-11-09 | 주식회사 엘지화학 | Ink for inkjet printing and method for preparing metal nano particle used therein |
| CN101993032B (en) | 2009-08-14 | 2013-03-27 | 京东方科技集团股份有限公司 | Method for manufacturing microstructural film pattern and TFT-LCD array substrate |
| CN102529479B (en) * | 2011-12-23 | 2014-10-08 | 中国科学院苏州纳米技术与纳米仿生研究所 | Post-treatment method for improving printing evenness of electronic material |
| CN103753995B (en) * | 2014-01-09 | 2016-01-20 | 湖南大学 | A kind of based on the color ink jet printed method preparing graded index anti-reflection film |
| CN106274110B (en) * | 2015-05-13 | 2018-11-06 | 广东聚华印刷显示技术有限公司 | A kind of method of low temperature ink jet printing nano metal pattern |
| CN106335298B (en) * | 2015-07-09 | 2018-08-10 | 广东聚华印刷显示技术有限公司 | Ink jet printing metal pattern and preparation method thereof |
| CN106098545A (en) * | 2016-08-12 | 2016-11-09 | 京东方科技集团股份有限公司 | A kind of display base plate and preparation method thereof, display device |
| CN107690269A (en) * | 2016-08-31 | 2018-02-13 | 江苏汉印机电科技股份有限公司 | The inkjet printing manufacture method of electro-magnetic screen layer |
| US10505154B2 (en) | 2017-05-27 | 2019-12-10 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Manufacturing method of organic light emitting diode display panel and organic light emitting diode display panel |
| CN107230747A (en) * | 2017-05-27 | 2017-10-03 | 深圳市华星光电技术有限公司 | The preparation method and OLED display panel of OLED display panel |
| CN106972115B (en) | 2017-05-27 | 2019-03-12 | 深圳市华星光电技术有限公司 | The production method and OLED display panel of OLED display panel |
-
2001
- 2001-08-03 CN CN 01128004 patent/CN1199794C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101754859B (en) * | 2007-06-14 | 2012-05-30 | 麻省理工学院 | Method and apparatus for depositing films |
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| Publication number | Publication date |
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| CN1400106A (en) | 2003-03-05 |
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