CN1195234C - Method for preparing optical fiber grating with freely cutting any toe part as well as the system - Google Patents
Method for preparing optical fiber grating with freely cutting any toe part as well as the system Download PDFInfo
- Publication number
- CN1195234C CN1195234C CNB021460191A CN02146019A CN1195234C CN 1195234 C CN1195234 C CN 1195234C CN B021460191 A CNB021460191 A CN B021460191A CN 02146019 A CN02146019 A CN 02146019A CN 1195234 C CN1195234 C CN 1195234C
- Authority
- CN
- China
- Prior art keywords
- toe
- cutting
- grating
- diaphragm
- toe part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The present invention relates to a method for preparing an optical fiber optical grating with freely cutting any toe part as well as a system. The present invention belongs to the technical field for preparing an optical fiber optical grating. The method is characterized in that firstly, an optical stop and a thin iron sheet respectively stand for mould plates for cutting a toe part and inversely cutting a toe part; a microcomputer is used for simultaneously controlling a quasi molecule pulse ultraviolet laser and a rotation movement table which fixes the optical stop (1); simultaneously, a software is used for controlling the movement of the rotation movement table and the number of laser pulses, which leads the rotation movement table to move according to a function curved line for cutting a toe part which is set in advance and drive the optical stop (1) to rotate for scanning the optical fiber; the amount of exposure of each point of the optical fiber in the axial direction is distributed according to the function curved line for cutting a toe part; the required optical grating for cutting a toe part is obtained; secondly, the thin iron sheet is used for replacing the optical stop (1); simultaneously, a phase mould plate which abuts on the optical fiber for cutting a toe part is removed; a function parameter for inversely cutting a toe part corresponding to the function for cutting a toe part is inputted. The operation is carried out according to the same steps, the mean refractive index at both ends of the optical grating is filled, and the optical fiber is carried out for inversely cutting a toe part. If the other optical stop (2) is adjustable, different software parameters which are suitable for the change requirement for the length of the optical grating can be set to be used for an arbitrary toe part cutting shape. The present invention has the advantages of strong applicability and simple technology.
Description
Technical field
The method for making and the system thereof of cutting the fiber grating of toe arbitrarily belong to the fiber grating manufacture technology field.
Background technology
The invention belongs to photoelectron technology and technical field of optical fiber communication.Be particularly related to the fiber grating manufacturing technology.
Since fiber grating comes out, experienced the course of two more than ten years.The manufacturing technology of fiber grating has also experienced several times and has changed.People such as K.Hill at first invented wrting method in the fiber grating in 1978, write light inlet and were introduced by the end face of optical fiber, form standing wave and realize that grating writes in optical fiber.1989, people such as G.Meltz invented the outer wrting method of optical fiber Bragg raster, promptly holographic wrting method, and light writes from the side of optical fiber, utilizes the coherence of light directly to form interference fringe on optical fiber.After 1993, people such as K.O.Hill have proposed phase mask method (Phase mask) in succession, point-to-point writing method (Point-by-point) and scanning wrting method.The manufacture difficulty of fiber grating has been simplified in the proposition of phase mask method greatly, has improved development efficient.The precision and the homogeneity of grating mainly guarantee by phase mask, all do not have very high requirement to the coherence of light source with to the stability of experimental provision.This just makes excimer laser can be used for the making of grating.The energy height of excimer laser, hot spot is more suitable for large-scale production greatly.
Generally, there is more secondary lobe in the reflectance spectrum of fiber grating, and can forms significant ripple (ripple) on the group velocity delay profile of chirped fiber grating.For reducing the vibration in these group delays and the secondary lobe of reflectance spectrum, " cutting toe " of doing the modulate intensity gradual change at the two ends of grating (apodization) handled and can be improved reflection and time lag curve, makes the reflectance spectrum top more smooth, and the edge is more precipitous.The profile of cutting toe is that the Grating Modulation intensity at two ends is very little, increases gradually then, reaches maximum at core.The concrete toe mode of cutting has functions such as Gauss, raised cosine.Carry out the toe of cutting of grating, can be by two mutually conjugate amplitude templates (Fig. 1)---cut toe template and traditional method of indicating the pronunciation of a Chinese character toe template.First step ultraviolet light through cutting toe template, condenser lens and phase mask, produces grating successively on optical fiber; Second step was cut the toe template in order to fill up the inhomogeneous of mean refractive index with the replacement of traditional method of indicating the pronunciation of a Chinese character toe template, removed phase mask simultaneously, made the time of the optical fiber and first step exposure identical.This key of cutting the method for toe is the making of the amplitude template of two conjugation, and traditional line cutting is difficult to guarantee its precision, especially can not guarantee two template phase conjugates.At the different gratings of cutting toe shape and different length, will make corresponding template of cutting toe shape and respective length simultaneously, this has just improved cost greatly, and dirigibility is poor.The toe technology of applying for a patent of cutting, as Fig. 2, the method for utilizing scanning to write, the frequency multiplication argon ion continuous wave laser 8 of 244nm passes through scanning reflection border 9 successively, and post lens 11 and phase mask 20 produce grating on optical fiber 6.Order about scanning reflection mirror 9 by scanning translation stage 13 and move, by the residence time of computer programming gated sweep translation stage, control the time shutter of optical fiber diverse location, promptly the two ends time shutter lacks, and the intermediate exposures time is long, thereby realizes the toe of cutting of grating.Its key of this method is the control of time shutter, owing to itself just deposit just response time between scanning translation stage and the software, is difficult to the accurate time shutter that guarantees.
The objective of the invention is to overcome the weak point of prior art, proposed a kind of arbitrary shape of can realizing and cut the making of method for making and system thereof, particularly small-sized grating of the fiber grating of toe.The present invention adopts the phase mask method, with excimer laser as ultraviolet source, pass through computer programming, control rotation transfer table is dynamically adjusted has the size of certain thickness diaphragm, control the umber of pulse of laser simultaneously by the A/D transition card, can on the standard single-mode fiber that hydrogen carries, produce and have high reflectance, high side mode suppression ratio, the grating of reflectance spectrum flat-top band broad, with the different apodizing function of setting of software input, can make different gratings, make the present invention simpler, economical, practical, be easy to realize having good repeatability and dirigibility.Be convenient to business enterprise expand application at home.
Among the present invention the secondary lobe that suppresses the fiber grating reflectance spectrum, the apodization of employing, its principle is as follows:
With optical grating reflection rate ρ=σ e
J (2 δ z-), the substitution Riccati differential equation:
ρ '=j (ρ+j κ (the 1+ ρ of 2 δ-)
2) can obtain:
Wherein: σ is a reflectivity amplitude, and δ is the off resonance amount, and is a raster phase, and k is a coupling coefficient.To antiradar reflectivity grating, σ
2Item can be ignored, and has
This shows, does not consider phase factor, and in fact amplitude reflectivity is exactly the Fourier conversion of coupling coefficient distribution function.If the just suffered exposure of the coupling coefficient of grating gradually changes along the length direction of grating, make to level off to zero gradually at the two ends of grating, just can improve the characteristic of grating.Coupling coefficient can be selected Blackman, Hamming, Gauss, Tanh, Sinc, functions such as Cauchy for use.
The present invention is based on when the Spin Control platform anglec of rotation or velocity variations, and the umber of pulse of optical fiber diverse location changes, and promptly suffered exposure also changes.As shown in Figure 3, when the anglec of rotation of turntable not simultaneously, the actual effectively exposure length of optical fiber also can change.So is along a certain curvilinear motion if make optical fiber in axial exposure, the umber of pulse that must make laser instrument so is along with the anglec of rotation or the speed of Spin Control platform change accordingly.For example, shown in Figure 4 is Gauss's apodizing function curve, the x axle is the length (mm) of grating, Y-axis is that will to make optical fiber be by this curvilinear motion in axial exposure to normalized intensity (a.u), the umber of pulse of corresponding laser instrument is to change curve such as Fig. 5 (a) of the anglec of rotation, X-axis is the anglec of rotation (degree), and Y-axis is corresponding umber of pulse.Simultaneously in order to compensate the inhomogeneous of mean refractive index, corresponding change curve such as Fig. 5 (b).Certainly will make optical fiber is to change along other different function curve in axial exposure, and umber of pulse is got final product with rotational speed or corresponding variation of angle.The present invention adopts in the enterprising line program design of microcomputer, uses micro-processor controlled rotation transfer table of software-driven, a diaphragm is arranged on this platform, by online input apodizing function parameter, thereby by the umber of pulse that system controlled by computer is dynamically adjusted rotational speed or angle and laser instrument change fiber axis to exposure, obtain the different fiber gratings of location shape of cutting at last.
The invention is characterized in: at first, it replaces two mutually conjugate toe template and traditional method of indicating the pronunciation of a Chinese character toe templates of cutting with a diaphragm and a tagger, control quasi-molecule pulsed ultraviolet laser device and fixing rotation transfer table by one of servo control mechanism control simultaneously by the A/D transition card respectively with a microcomputer with certain thickness diaphragm (1), again light-sensitive optical fibre is fixed on the position that can receive the hot spot that sees through from diaphragm (1) and near the optical fiber front phase mask is set, apodizing function parameter by online input setting, control the anglec of rotation of rotation transfer table or the umber of pulse of speed and Ultra-Violet Laser simultaneously with the software that is stored in the microcomputer, the umber of pulse that makes laser instrument along with the motion state of rotation transfer table according to this apodizing function curvilinear motion, and drive diaphragm (1) rotation, then the actual effectively exposure length of optical fiber can change along with the anglec of rotation difference of rotation turntable, fiber axis to the exposure of each point be the umber of pulse of diverse location by the apodizing function curve distribution, obtain the required toe fiber grating of cutting; Secondly, with the diaphragm (1) on the tagger replacement rotation transfer table, remove phase mask simultaneously, import the traditional method of indicating the pronunciation of a Chinese character toe function of corresponding apodizing function, control the motion state of rotation transfer table and the umber of pulse of ultraviolet source simultaneously with the software in the microcomputer, make them according to the motion of traditional method of indicating the pronunciation of a Chinese character toe function curve, fill and lead up the mean refractive index at grating two ends, realize the traditional method of indicating the pronunciation of a Chinese character toe of grating; It is characterized in that: another diaphragm (2) near laser instrument in the light path is an adjustable diaphragm, and it has determined the length of the grating that will make; The invention is characterized in: when fiber grating is cut toe, it contains: the light-sensitive optical fibre of fixing, phase mask near fiber grating, accept laser pulse that ultraviolet source sends and perpendicular to the post lens of optical axis setting, fixing the rotation transfer table of diaphragm (1), the diaphragm (2) of decision grating length, and, controlling the microcomputer of above-mentioned rotation transfer table and laser instrument respectively through servo control mechanism and A/D transition card as the excimer laser of ultraviolet source.To the fiber grating traditional method of indicating the pronunciation of a Chinese character toe time, it includes fixing light-sensitive optical fibre, accept laser pulse that ultraviolet source sends and the post lens that are provided with perpendicular to optical axis, the rotation transfer table that is fixed with tagger along the optical axis setting, the diaphragm (2) of decision grating length and as the continuous excimer laser of ultraviolet source is being controlled the microcomputer of above-mentioned rotation transfer table and laser instrument respectively through servo control mechanism and A/D transition card.
Facts have proved that it has reached intended purposes.
Description of drawings
Fig. 1 is two mutually conjugate amplitude templates: a. cuts the toe template, b. traditional method of indicating the pronunciation of a Chinese character toe template.
Fig. 2 carries out the Experimental equipment that fiber grating is cut toe for existing phasescan method.
Fig. 3 is incoming laser beam and rotation transfer table relative dynamic graph of a relation.
Fig. 4 is existing Gauss's apodizing function curve.
Fig. 5 is the change curve of rotational speed of the present invention or angle.
Fig. 6 has a certain thickness adjustable diaphragm and a thin iron plate.
The Experimental equipment that Fig. 7 cuts toe for fiber grating of the present invention.
Fig. 8 is a reflectance spectrum curve map 1:a. tangent toe of the present invention, b. traditional method of indicating the pronunciation of a Chinese character toe.
Fig. 9 is a reflectance spectrum curve map 2:a. tangent toe of the present invention, b. traditional method of indicating the pronunciation of a Chinese character toe.
Figure 10 is a reflectance spectrum curve map 3:a. tangent toe of the present invention, b. traditional method of indicating the pronunciation of a Chinese character toe.
Figure 11 is the toe fiber grating point by point scanning Control Software process flow diagram of cutting of the present invention.
Embodiment
The device of present embodiment preparing grating method as shown in Figure 7.Wherein, ultraviolet source adopts is 248nmBraggstar 20 excimer lasers 21 (German Tuilaser company produce).The seam of diaphragm (2) 41 is wide to be adjustable, and how many its sizes is, the grating of making is with regard to how long.At first, diaphragm (1) 22 is fixed on the rotation transfer table (Chinese light company of standing upright produces) 23 of RSA100, and rotation transfer table kinematic accuracy is 0.00125 degree.Post lens 37 have the function of focusing and the ultraviolet light of laser instrument 21 output are shone on the even phase mask 24 through adjustable diaphragm 22, this phase mask length is 25mm, and ultraviolet light is radiated at carrying on the standard single-mode fiber 25 of processing through hydrogen under it through phase mask 24.RSA100 rotation transfer table 23 links to each other with the com port of microcomputer 19 by a servomechanism 33, and the external trigger mouth of while excimer laser 21 links to each other with the A/D transition card on the microcomputer 19.By the drive software that operation on microcomputer designs in advance, change the rotational angle of rotation transfer table and the output umber of pulse of laser instrument, it is moved according to a certain characteristics of motion, just can obtain the fiber grating that difference is cut the toe shape.Secondly, with the adjustable diaphragm on the alternative Spin Control platform of thin iron plate, remove phase mask simultaneously, again by the software on the microcomputer, regulate the motion state of Spin Control platform and the output umber of pulse of laser instrument, make it, realize the traditional method of indicating the pronunciation of a Chinese character toe of grating according to another characteristics of motion operation.
In the whole process of making, adopt spectrum width be 25nm wide spectrum light source 27, can obtain the grating reflection response by circulator 26, while one precision is that the AQ-6317B spectrometer 28 of 0.01nm carries out the test of grating performance, reflectance spectrum and transmitted spectrum to fiber grating are analyzed, and can obtain the performance parameter of fiber grating.
The main technique flow process of present embodiment is as follows:
1. optical fiber is carried hydrogen and handle and peel off coat long about about 30mm;
2. after optical fiber being fixed on phase mask plate, making it to try one's best but do not stick;
3. the external trigger mouth of laser instrument is linked to each other with A/D transition card on the microcomputer, adjust laser instrument, make the light pulse of the about 12mJ of its output;
4. according to the size of the length adjustment diaphragm (2) that will make grating;
5. will have certain thickness diaphragm (1) and be fixed on the RSA100 rotation transfer table, adjust light path, and make laser successively through diaphragm
(2), the hot spot of diaphragm (1) and post lens is radiated on the fibre core of optical fiber;
6. open the RSA100 system of microcomputer, enter the working interface of software, and RSA100 is carried out initialization;
7. start rotation and move, make it can free movement;
8. start the external trigger of laser instrument, making it pass through software can control;
9. the umber of pulse and the frequency of various rotational parameters and laser instrument are set, drive and rotate transfer table and laser instrument follow procedure control operation;
10. with the adjustable diaphragm on the thin iron plate replacement rotation transfer table, remove phase mask simultaneously;
¤ resets relevant parameters, drives rotation transfer table and laser instrument by new parameter operation.
Wherein, the software programming that transfer table motion state and laser instrument are rotated in control is: adopt Visual Basic 6.0 programming languages, on the basis of the hardware driving instruction that RSA100 system and A/D transition card provide, worked out the software that grating is cut toe that carries out based on Windows98 operating system.
Fig. 8,9,10th, typical transmission spectrum and reflectance spectrum that the typical optical fiber grating that utilizes present embodiment to make provides.In Figure 11, description be to cut toe processes and procedures FB(flow block), traditional method of indicating the pronunciation of a Chinese character toe process is similar to it, omits.
Evidence: the present invention is applicable to any apodizing function, and the adjustable diaphragm of employing (2) just can adapt to the needs of the length that changes fiber grating, and for making the miniature fiber grating, adaptability is strong, and technology is also simple.
Claims (3)
1, cut the method for making of the fiber grating of toe arbitrarily, it is characterized in that, it contains successively with incision toe and two steps of traditional method of indicating the pronunciation of a Chinese character toe:
Cut toe:
(1), cuts the toe template with the conduct of first diaphragm; Simultaneously, the length adjustment of making grating as required in light path near the length of second diaphragm of laser instrument;
(2), control quasi-molecule pulsed ultraviolet laser device and control a rotation transfer table of fixing to have certain thickness first diaphragm by servo control mechanism simultaneously by the A/D transition card respectively with a microcomputer;
(3), again light-sensitive optical fibre is fixed on the position that can receive the hot spot that sees through from first diaphragm;
(4), near the optical fiber front phase mask is set along the optic fibre extension direction;
(5), the apodizing function parameter of setting by online input, control the anglec of rotation of rotation transfer table or the umber of pulse of speed and Ultra-Violet Laser simultaneously with the software that is stored in the microcomputer, the umber of pulse that makes laser instrument along with the motion state of rotation transfer table according to this apodizing function curvilinear motion, and drive first diaphragm rotation, then the actual effectively exposure length of optical fiber can change along with the anglec of rotation difference of rotation turntable, fiber axis to the exposure of each point be the umber of pulse of diverse location by the apodizing function curve distribution, obtain the required toe fiber grating of cutting;
Traditional method of indicating the pronunciation of a Chinese character toe:
(1), replace first diaphragm on the rotation transfer table, remove phase mask simultaneously with tagger;
(2), the traditional method of indicating the pronunciation of a Chinese character toe function of the corresponding apodizing function of input, control the rotation motion state of transfer table and the umber of pulse of ultraviolet source simultaneously with the software in the microcomputer, they are moved according to traditional method of indicating the pronunciation of a Chinese character toe function curve, fill and lead up the mean refractive index at grating two ends.
2, method for making of cutting the fiber grating of toe arbitrarily according to claim 1 is characterized in that: second diaphragm near laser instrument in the light path is an adjustable diaphragm, and it has determined the length of the grating that will make.
3, the designed system of method for making of cutting the fiber grating of toe arbitrarily according to claim 1 is characterized in that:
When fiber grating is cut toe, it contains: the light-sensitive optical fibre of fixing, with the phase mask of optic fibre extension direction near fiber grating, accept laser pulse that ultraviolet source sends and perpendicular to the post lens of optical axis setting, fixing the rotation transfer table of first diaphragm, second diaphragm of decision grating length, and, controlling the microcomputer of above-mentioned rotation transfer table and laser instrument respectively through servo control mechanism and A/D transition card as the excimer laser of ultraviolet source.To the fiber grating traditional method of indicating the pronunciation of a Chinese character toe time, it includes fixing light-sensitive optical fibre, accept laser pulse that ultraviolet source sends and the post lens that are provided with perpendicular to optical axis, the rotation transfer table that is fixed with tagger along the optical axis setting, second diaphragm of decision grating length and as the continuous excimer laser of ultraviolet source is being controlled the microcomputer of above-mentioned rotation transfer table and laser instrument respectively through servo control mechanism and A/D transition card.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021460191A CN1195234C (en) | 2002-10-25 | 2002-10-25 | Method for preparing optical fiber grating with freely cutting any toe part as well as the system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021460191A CN1195234C (en) | 2002-10-25 | 2002-10-25 | Method for preparing optical fiber grating with freely cutting any toe part as well as the system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1415981A CN1415981A (en) | 2003-05-07 |
| CN1195234C true CN1195234C (en) | 2005-03-30 |
Family
ID=4750991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021460191A Expired - Fee Related CN1195234C (en) | 2002-10-25 | 2002-10-25 | Method for preparing optical fiber grating with freely cutting any toe part as well as the system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1195234C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101625435B (en) * | 2008-07-09 | 2011-03-30 | 中国科学院半导体研究所 | Adjustable triangular conjugated amplitude mould plate and method for realizing apodizing of optical fiber grating |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100371751C (en) * | 2006-03-03 | 2008-02-27 | 清华大学 | Method for producing non-linear chirp optical fibre grating for 40 Gb/S optical communication system |
| CN102621609B (en) * | 2012-04-11 | 2014-05-07 | 中国科学院上海光学精密机械研究所 | Etching device and etching method for any apodised fiber bragg grating |
| CN106249348B (en) * | 2016-09-13 | 2017-10-03 | 中国人民解放军国防科学技术大学 | A kind of apodization fiber grating carving and writing method |
| CN108051887B (en) * | 2017-12-27 | 2024-04-09 | 中央民族大学 | Apodization grating secondary exposure manufacturing system and method based on dynamic optical shielding plate |
| CN111856644B (en) * | 2020-07-28 | 2023-10-03 | 中国人民解放军国防科技大学 | Apodized long-period fiber bragg grating inscription device, inscription method and laser system |
-
2002
- 2002-10-25 CN CNB021460191A patent/CN1195234C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101625435B (en) * | 2008-07-09 | 2011-03-30 | 中国科学院半导体研究所 | Adjustable triangular conjugated amplitude mould plate and method for realizing apodizing of optical fiber grating |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1415981A (en) | 2003-05-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0722387B1 (en) | Organic optical components and preparation thereof | |
| CN104765099B (en) | A kind of device and method for inscribing cycle adjustable optic fibre grating | |
| CN106249348B (en) | A kind of apodization fiber grating carving and writing method | |
| US8017193B1 (en) | Monomeric formulation for making polymer waveguides | |
| EP0402797B1 (en) | Planar optical coupler | |
| CN1280677A (en) | Fabrication of optical waveguide gratings | |
| US9488960B2 (en) | Methods and apparatuses for manufacturing ultralong fiber Bragg gratings with arbitrary reflection wavelength | |
| JPH0541411B2 (en) | ||
| CN110632689B (en) | Method for manufacturing surface relief grating structure | |
| CN1195234C (en) | Method for preparing optical fiber grating with freely cutting any toe part as well as the system | |
| CN201654269U (en) | Making device of arbitrary chirp optical fiber grating | |
| US6236509B1 (en) | Diffractive optical system with synthetic opening and laser cutting device incorporating this system | |
| CN104199144A (en) | Device and method for writing gratings on lithium niobate waveguides by aid of femtosecond laser device | |
| CN109387901B (en) | Laser writing device and method for nanoscale precision grating pitch of long-period fiber grating | |
| CN101625435B (en) | Adjustable triangular conjugated amplitude mould plate and method for realizing apodizing of optical fiber grating | |
| JP2001083337A (en) | Apodization method for optical writing bragg grating | |
| CN110007394B (en) | Method for preparing phase-shift fiber Bragg grating | |
| CN116430514A (en) | Femtosecond laser direct-writing fiber grating preparation device and method | |
| CN1105924C (en) | Optical fiber grating mfg. method with chirp and apodization function adjustment | |
| CN1181363C (en) | A method for making long period optical fibre grating | |
| US7099537B2 (en) | System and method for fabricating Bragg gratings | |
| CN109682256B (en) | Laser moving target simulator | |
| CN1191480C (en) | Variable duty cycle sampling optical fiber grating and its apodization | |
| CN108051887B (en) | Apodization grating secondary exposure manufacturing system and method based on dynamic optical shielding plate | |
| JP4477893B2 (en) | LASER PROCESSING METHOD AND DEVICE, AND STRUCTURE MANUFACTURING METHOD USING LASER PROCESSING METHOD |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |