CN1188538A - Oscillation gyro sensor, composite sensor and process of producing oscillation sensor - Google Patents

Abstract

A vibration gyro sensor is constructed as follows. Namely, a detecting piezoelectric/electrostrictive element 12, which detects displacement generated in a direction perpendicular to a direction of vibration of a vibrator 2 when the vibrator is rotated, is provided on a detecting section. The detecting section is constructed by an integrated fired product made of ceramics together with the vibrator 2 and a support base 4. The detecting section is constructed by a first plate-shaped section 6 which is more thin-walled than the vibrator 2 and which has its principal surface extending in the direction of vibration. The piezoelectric/electrostrictive element 12 is formed in an integrated manner on the first plate-shaped section 6 in accordance with a film formation method.

Description

Vibrating gyrosensor, the method for compound sensor and manufacturing vibration transducer

The present invention relates to a kind of vibrating gyrosensor.Specifically, the present invention relates to the vibrating gyrosensor (gyroscope) that a kind of Coriolis force that utilizes the Vib. vibration time to be rotated and produce detects angular velocity of rotation, and a kind of method of making vibrating gyrosensor.The invention still further relates to a kind of compound sensor of involving vibrations gyrosensor.

Gyrosensor (gyroscope), it is a kind of sensor that is used to detect angular velocity of rotation, is used to so far, for example the inertial navigation system of aircraft and ship.Recently, the gyrosensor attitude control system that is used to onboard navigation system and is used for the self-navigation automatic driving vehicle.In addition, gyrosensor also is used to, and for example, the image blurring of video tape recorder gamma camera is prevented locking system.In these environment, require a kind of small-sized gyrosensor, this gyrosensor is applied to aforesaid various field rightly.Thereby vibrating gyrosensor has attracted people's notice.

As everyone knows, the basic structure of such vibrating gyrosensor (gyroscope) comprises that a drive pressure electric device and one detect piezoelectric element, and these piezoelectric elements adhere to a permanent bullet by the iron-nickel-chromium representative and give birth on the Vib. that metal forms.At x, y, in the rectangular coordinate system of z axle, when Vib. around z axle rotation, when using the drive pressure electric device that Vib. is applied the axial flexural vibrations of x, Coriolis force acts on Vib. along the y direction of principal axis simultaneously.Thereby, detect the flexural vibrations that in Vib., produce by Coriolis force along the y direction of principal axis by means of detecting the form of piezoelectric element with voltage.Determine angular velocity according to measured voltage.

But, in aforesaid common vibrating gyrosensor, less based on the displacement of the Vib. of the vibration of inducing generation by the drive pressure electric device.Thereby it is less to detect the detected voltage of piezoelectric element (electromotive force).Therefore, common vibrating gyrosensor sensitivity is lower.

In addition, drive pressure electric device and detection piezoelectric element are adhered to bonding agent and are fixed on the Vib..Thereby bonding agent is between Vib. and piezoelectric element.Therefore, stress is absorbed by bonding agent.Reach other factor for this reason, if other factors is arranged, the problem that is produced is that detection sensitivity is lowered.

When Vib. comprised the element of being made up of iron-nickel-chromium sound sheet or tuning fork, the performance of Vib. can be subjected to the influence of environmental magnetic field, because iron-nickel-chromium is a ferrimagnet.In addition, because when adjusting the resonant frequency of Vib., there are the problem of processing or machining difficulty in the shape or the material of aforesaid Vib..

The present invention finishes under the background of above-mentioned situation, its objective is to solve above-mentioned all problems and provide a kind of sensitivity fabulous vibrating gyrosensor.Another object of the present invention provides a kind of ceramic vibrating gyrosensor, and the performance of Vib. is subjected to the influence of environmental magnetic field hardly therein, and processing or machining are easy to finish, and can adjust electrical property expediently.

The invention provides a kind of any magnetic material that do not use, entirely by the vibrating gyrosensor of the integral roasting product slate of pottery.So, be subjected to the influence of environmental magnetic field hardly according to vibrating gyrosensor of the present invention.In addition, this vibrating gyrosensor comprises the first plate shape part and the second plate shape part that is respectively thin-wall part, and they are easy to crooked part in driving and detection side to being used as, and are respectively applied for the displacement that produces Vib..Thereby, detecting and the either direction of driving direction can obtain big displacement, provide the big electromotive force (voltage) that depends on the detected displacement of piezoelectric/electrostrictive film element and produce like this, and can increase detection sensitivity effectively.Especially, the test section has the structure of concentrated stress.Thereby can obtain big output.

In addition, vibrating gyrosensor according to the present invention comprises the detection piezoelectric/electrostrictive film element, and this element is formed on the first plate shape part according to film formation method with integral way, is used to provide the test section by the integral roasting product slate of pottery.Piezoelectric/electrostrictive film element directly partly contacts with the first plate shape, and is middle without any adhesive linkage.Thereby, can avoid the absorption of any counter stress effectively, otherwise because the existence of adhesive linkage will cause the absorption of stress.Thereby, when Vib. rotates, induce the displacement (flexural vibrations) of the Vib. that the Coriolis force of generation causes to detect effectively, thereby help the improvement of sensitivity by piezoelectric/electrostrictive film element.

In vibrating gyrosensor according to the present invention, for example, by using appropriate removal means, for example laser can easily change the electrode area that is formed at the piezoelectric/electrostrictive film element on the test section.Thereby vibrating gyrosensor also has the feature that electrical property is easy to regulate.

In a most preferred embodiment of the present invention, but Vib. has the terminal thin-walled cut-out that stretches out before the Vib., but regulates the resonant frequency of Vib. according to the excision amount of cut-out.But the thin-walled cut-out that is formed at the Vib. end is one to be easy to the part of handling or processing.By but such cut-out that is used for repairing in advance is provided, and by means of appropriate cutting method, for example Laser Processing and ultrasonic machining can be easily be adjusted to desired value with the resonant frequency of Vib..

In the most preferred embodiment that another constitutes as mentioned above of the present invention, two in the Vib. are supported by the seat base in parallel with each other, and these two Vib. driven devices vibrate on direction relative to each other in the mode of excitation.In this embodiment, vibrating gyrosensor is so constructed, make drive unit comprise one the 3rd plate shape part, the 3rd plate shape part ratio vibrator is much thin, and and Vib. is together by the integral roasting product slate of pottery, and one is formed at driving piezoelectric/electrostrictive film element on the 3rd plate shape part with integral way according to film formation method.

In another most preferred embodiment that constitutes as mentioned above of the present invention, support bar is arranged between two Vib.s, and separates with Vib., and support bar is supported by the seat base together with integral way and these two Vib.s.

In the most preferred embodiment that another constitutes as mentioned above of the present invention, seat base makes that by placing the Vib. outside and constituting apart from the fixed frame of Vib. preset distance Vib. is centered on.The providing of fixed frame make can be tightly fixing vibrating gyrosensor, thereby the space that can more freely select to install vibrating gyrosensor.

The following examples can be used to the position of drive unit.That is, drive unit can be formed between two Vib.s with integral way.Otherwise, also can be formed between the second plate shape part with integral way.

When vibrating gyrosensor comprised support bar, drive unit can be formed at respectively between support bar and the Vib. with integral way, perhaps was formed at respectively between support bar and the second plate shape part with integral way.

When vibrating gyrosensor comprised fixed frame, drive unit can be formed at respectively between fixed frame and the Vib. with integral way, perhaps was formed at respectively between fixed frame and the second plate shape part with integral way.

According to another kind of situation, according to the vibrating gyrosensor that the invention provides second type, one of them second plate shape partly is formed at the relative zone of the framework of two Vib.s of supporting with integral way with one the 3rd plate shape part, and a driving piezoelectric/electrostrictive film element is formed at the 3rd plate shape part with integral way, thereby two Vib.s can be vibrated in the mode of excitation according to the deformation vibration of the framework that is caused by the driving piezoelectric/electrostrictive film element.

The vibrating gyrosensor that produces the deformation vibration of aforesaid framework adopts such structure useful, wherein, on the outside surface in a zone that forms second plate shape framework partly, form the fixed part of fixing this framework with integral way in order to fix this framework.Otherwise, just adopt such structure, wherein fixed part comprises with integral way and places this framework outside, and the fixed frame of distance one preset distance, makes that this framework is centered on.Such fixed frame has been fixed vibrating gyrosensor tightly.

According to another situation, the vibrating gyrosensor according to the third type of the present invention is provided, it is different from aforementioned two types vibrating gyrosensor.That is, by means of driving piezoelectric/electrostrictive film element, the seat base section that supports two Vib.s respectively is subjected to deformation vibration respectively by oneself, and described driving piezoelectric/electrostrictive film element is formed on the 3rd plate shape part that is used for being connected with the fixed frame that places the outside.So, by that two Vib.s each self-excited oscillation in identical plane respectively of separately seat base section supporting.

The vibrating gyrosensor of the 3rd type is also advantageously constituted in the mode identical with the vibrating gyrosensor of second type, but makes each Vib. have terminal thin-walled cut-out that stretches out before it.But regulate the resonant frequency of Vib. according to the excision amount of cut-out.Thereby, by means of the excision means, for example Laser Processing and ultrasonic machining, but can easily realize the finishing of cut-out.Can easily regulate the resonance dynamic frequency like this.

According to another situation, provide according to vibrating gyrosensor of the present invention the 4th type.At first, under the situation of Vib. vibration, when winding axle perpendicular to the plane of the direction of extension that comprises a certain direction and seat base and apply an angular velocity, in Vib., produce the Coriolis force that points to described a certain direction with interlace mode according to this vibration.Therefore, in the test section, and the test section is by this force vibration along described a certain directive effect for power.That is, produce whirling vibration around turning axle in the part that comprises Vib. and seat base.The piezoelectric/electrostrictive film element of the detected part of vibration that is produced detects with the form of electromotive force (voltage).

According to the present invention, all Vib.s, the seat base, and the test section all is the integral roasting product slate by pottery.Thereby, in the material that constitutes vibrating gyrosensor, there is not magnetic material, for example traditional iron-nickel-chromium.Consequently, the performance of this sensor can not be subjected to the influence of any environmental magnetic field.

The test section is much thin that the first plate shape partly constitutes by ratio vibrator on its short transverse, thereby the rigidity of the structure of test section is low.So, when the angular velocity that applies produces vibration around turning axle, can obtain big strain or distortion in the test section, like this, can greatly improve the detection sensitivity of piezoelectric/electrostrictive film element.

Especially, vibrating gyrosensor according to the present invention is had an effect, and makes when applying angular velocity, only produces vibration in the test section.So, under the situation that does not apply angular velocity, very little from the output (no-voltage) that piezoelectric/electrostrictive film element obtains.In addition, the possibility that produces fatigue break owing to vibrate in the test section also reduces, thereby sensor has long serviceable life.

Vibrating gyrosensor according to the present invention has the angular velocity that is not to be used to measure around the Vib. main shaft, but is used to measure the structure of winding perpendicular to the angular velocity of the axle on the plane of the direction of extension that comprises described a certain direction and seat base.So, Vib., seat base and frame height can be less.Can make size sensor little, in light weight like this.

Vib. has and comprises non-thin-walled test section, and only by the structure of high-intensity seat base supporting.So Vib. self has big quality.Thereby the Coriolis force that produces in Vib. (Fc=2mv Ω) is increased, thereby can realize detecting the high sensitivity of the strain that is produced by the test section.

For vibrating gyrosensor according to the present invention preferably, the test section is made of the annulus spare that is formed between a base and the framework, and first plate shape part is in the mode of bridge joint, and the direction of extension that is parallel to the seat base is formed in this annulus spare.

In this embodiment, under the situation that Vib. is vibrated, when winding axle perpendicular to the plane of the direction of extension that comprises described a certain direction and seat base and apply angular velocity, this power along described a certain directive effect in the test section.When the effect of this power makes this annulus spare become major axis or minor axis to point to the elliptical shape of described a certain direction, produce vibration.Circular piece is detected by the form of piezoelectric/electrostrictive film element with electromotive force (voltage) along the vibration of described a certain direction.

For vibrating gyrosensor according to the present invention preferably, at least two in the Vib. are supported by the seat base in parallel with each other, and each Vib. is placed between these two Vib.s at the drive unit that vibrates on the direction relative to each other in the mode of excitation.In the present embodiment, these at least two Vib.s vibrate on direction relative to each other, promptly (are comprising in the plane of the direction of extension that described a certain direction and seat are basic) causing on the disconnected from each other and approaching direction in a plane.Drive unit preferably includes, for example, one the 3rd plate shape part, the 3rd plate shape part ratio vibrator on short transverse is much thin, and and Vib. is together by the integral roasting product slate of pottery, a driving piezoelectric/electrostrictive film element that is formed on the 3rd plate shape part.

For by the vibrating gyrosensor that constitutes as mentioned above preferably, drive unit is formed between two Vib.s with integral way.Be more preferably, drive arrangement is being connected on the line of two Vib. centers of gravity.Since these at least two Vib.s can be near each other effectively with separate, thereby the advantage of this layout is to improve the sensitivity of test section.Otherwise drive unit also can be formed between each Vib. and the seat base with integral way.

The vibrating gyrosensor of Gou Chenging comprises also that is preferably realized a FEEDBACK CONTROL as mentioned above, makes the constant reference unit of vibration of drive unit.This reference unit comprises one the 4th plate shape part and a reference piezoelectric/electrostrictive film element that is formed on the 4th plate shape part, the 4th plate shape part is much thin at the short transverse ratio vibrator, and and Vib. together by the integral roasting product slate of pottery.

Reference unit can be formed between each Vib. with integral way.Otherwise reference unit also can be formed between each Vib. and the seat base with integral way.

The vibrating gyrosensor of Gou Chenging comprises also that preferably being formed at each Vib. and seat with integral way executes the part of shaking between the base as mentioned above.This execute shake the part can comprise one be arranged in Vib. and the seat base between, the 5th plate shape part along the direction stretching, extension that is parallel to the basic longitudinal direction of seat, the 6th plate shape part of Connection Block base and the 5th plate shape part, and connect Vib. and the 5th plate shape the 7th plate shape part partly.In this embodiment, drive unit with integral way be formed at each execute shake the part between.Otherwise, drive unit with integral way be formed at each execute shake the part and the seat base between.

The vibrating gyrosensor of Gou Chenging preferably also comprises and is positioned at the Vib. free end as mentioned above, regulate thin-walled first projection of driving resonance frequencies, and be positioned at the seat basic longitudinal direction two ends, regulate thin-walled second projection that detects resonant frequency, wherein first and second projection and Vib. and seat base-an integral roasting product slate by pottery.

In this embodiment, handle (excision processing) scalable driving resonance frequencies by first projection being applied finishing, handle (excision is handled) scalable detection resonant frequency by second projection being applied finishing.That is, can regulate the resonant frequency that drives and detect independently respectively.So, for example, can avoid regulating driving resonance frequencies and have influence on the detection resonant frequency.When regulating resonant frequency, preferably regulate driving resonance frequencies earlier, regulate again subsequently and detect resonant frequency.

For example, first and second projections can be slab structure, and its height is thinner with respect to Vib..Otherwise first and second projections are divided into slab structure, and with respect to Vib., the direction of extension basic along seat is thin wall shape.The advantage of last structure is, by means of, for example laser beam flying on surface thereon, can realize easily that finishing handles.The advantage of back one structure is, the zone that be subjected to repairing processing is placed in the whole surface perpendicular to the Vib. direction of vibration, thereby can obtain fabulous mass balance.In this case, impact by adopting, for example the ultrasound wave after the laser emission is realized the finishing processing, thus the excision unnecessary portions.

For the vibrating gyrosensor that constitutes as mentioned above be, the 3rd plate shape part of drive unit also is used as the controlled plant that is used for driving resonance frequencies, and first plate shape part also is used as the controlled plant that is used to detect resonant frequency.Particularly, by broad ways the 3rd plate shape of drive unit is partly repaired to handle and regulate driving resonance frequencies, by broad ways the first plate shape of test section is partly repaired to handle and regulate the detection resonant frequency.That is, this embodiment depends on such method, wherein regulates the resonant frequency that drives and detect by the elastic constant that changes the first and the 3rd plate shape part, rather than regulates the resonant frequency that drives and detect by the quality that changes Vib. and seat base.

In this embodiment, need not form first and second projections respectively at the free end of Vib. and two ends of the basic longitudinal direction of seat.Thereby, can simplify manufacturing step.In addition, be thin-walled owing to will be subjected to repairing the zone of processing, thereby can easily regulate resonant frequency.Do not resemble by changing the method that quality is regulated resonant frequency, this embodiment can regulate driving resonance frequencies fully independently and detect resonant frequency.

According to another kind of situation, provide according to the 5th kind of vibrating gyrosensor of the present invention, wherein Vib. partly is made of the first wide and long plate shape respectively.So the quality and the momentum of Vib. all are increased.Consequently, the speed (∝ amplitude) that is caused by the driving vibration is increased.Thereby, can further improve sensitivity.

The best detection piezoelectric/electrostrictive film element is formed on the almost whole plane of first plate shape part with integral way.Present embodiment is favourable under the situation of current detecting system, because can accumulate a large amount of electric charges.

For the vibrating gyrosensor that constitutes as mentioned above preferably, the back side in first plate shape part has a plurality of grooves, and the detection piezoelectric/electrostrictive film element that is defined as above is formed on the first plate shape part front surface on the position corresponding to these a plurality of grooves with the form of row's island.In this embodiment, on first plate shape part, form the part of groove, intensity is lowered.Thereby, when first plate shape part during, to compare with the other parts that do not form groove by the Coriolis force deformation, the strain that produces on the part that forms groove is big.Thereby when on corresponding to the part of these grooves, forming the detection piezoelectric/electrostrictive film element, can obtain big detection output, and can further improve sensitivity.

Be between first plate shape part and second plate shape part, to form a heavy wall bulk portion for the vibrating gyrosensor that constitutes as mentioned above with integral way.In this embodiment, because the existence of this bulk portion, can increase the intensity of the marginal portion between first plate shape part and the second plate shape part, be favourable from the aspect of improving of reliability.

The seat base can be by placing Vib. outside, and constitute apart from the framework of Vib. certain distance, thus make Vib. by round.When the seat base adopts the form of framework, can obtain big fixedly degree of freedom, and stability is also fine.Thereby from the viewpoint of practical application, this embodiment is best.

Drive unit is formed between each second plate shape part with integral way.Otherwise drive unit is formed between each bulk portion with integral way.In addition, drive unit also can be formed between bulk portion and the framework with integral way.

The vibrating gyrosensor of the above formation preferably also comprises the reference unit that is used to realize FEEDBACK CONTROL, makes that the vibration of drive unit is constant.Reference unit can be formed between each second plate shape part with integral way.

In yet another embodiment, drive unit can be formed on the plate shape part in the corresponding second plate shape part with integral way, and reference unit can be formed on another plate shape part.

In this embodiment, can take such structure, one of them has a free-ended center section, is formed at the nearly middle body of a basal plane to the side of oscillating component with integral way.Drive unit is formed between one second plate shape part and this center section with integral way, and reference unit is formed between another second plate shape part and this center section with integral way.

Also can take such structure, wherein all have free-ended a plurality of center sections, be formed at a basal plane to oscillating component with integral way, on two ends in a lateral direction.Drive unit is formed between one second plate shape part and the center section with integral way, and reference unit is formed between another second plate shape part and another center section with integral way.

For the vibrating gyrosensor that constitutes as mentioned above preferably, the fixed part of holder base is formed on the surface that forms second plate shape surface partly thereon of seat base with integral way, being formed between a base and the fixed part with integral way for the 5th plate shape part of thin-walled in a lateral direction of present base, tuning fork is made of seat base and Vib. at least.In this embodiment, the 5th plate shape is partly played the strut of supporting tuning fork.So, can improve accuracy of detection easily with differentiating for the oscillation mode of vibrating gyrosensor needs and unnecessary oscillation mode.

For the vibrating gyrosensor that constitutes as mentioned above preferably, fixed part is by placing the tuning fork outside, and constitutes apart from the fixed frame of tuning fork certain distance, thus make tuning fork by round.In this embodiment, can improve accuracy of detection.In addition, owing to the form of fixed part with fixed frame provides, thereby from fixing degree of freedom and stable aspect, this enforcement is best.

In the aforesaid embodiment that has a fixed frame, can adopt such structure, wherein form a supporting part with whole and bridge joint mode, make that metope is by this supporting part bridge joint in the face of Vib. in the fixed frame that stretches along the Vib. direction of extension a pair of, Vib. places this supporting part top, and the 5th plate shape part is formed between supporting part and the seat base with integral way.

In this embodiment, be extended even work as the length of the 5th plate shape part, in certain scope, the whole length of sensor can not change yet.Thereby, can prolong the 5th plate shape length partly, improve accuracy of detection thereby can improve.

Under another situation, the present invention can be by adopting the aforesaid vibrating gyrosensor that these have fixed frame to constitute and realizing compound sensor, contiguous this fixed frame of second fixed frame that its this fixed frame that neutralizes combines, and another sensor with the function that is different from vibrating gyrosensor is supported with integral way in second fixed frame.

Especially, common vibrating gyrosensor only realizes that a member has a kind of function.But, when when adopting aforesaid fixed frame to provide to have the additional sensor of another function, a kind of compound sensor or a kind of integrated sensor can easily be provided, and they not only play the vibration gyrosensor, and can realize another function simultaneously.

Under another situation, a kind of method of making vibrating gyrosensor is depended in the present invention, comprise following steps: pile up and an integrated at least one base layer and a thin plate layer that constitutes by sintered plate not, roasting subsequently is to produce the product of roasting, this product comprises the Vib. that at least one or a plurality of main shaft all stretch along a certain direction with integral way, stretch perpendicular to the direction of this a certain direction on edge, be used for seat base at Vib. one end bearing Vib., its frame plane is parallel to the framework on the plane that comprises this a certain direction and the basic direction of extension of seat, this framework is used for around described Vib. and described seat base, and at least one or a plurality of test section that is attached between described seat base and the described framework; At least on the test section, form one or more at least piezoelectric/electrostrictive film elements according to film formation method; Regulate driving resonance frequencies by the part of Vib. being repaired handle; Regulate the detection resonant frequency by the part of seat base being repaired handle.

According to this method, can be easily and produce very reliably and have such structural vibrations gyrosensor, wherein seat base and Vib. by framework round, and seat is basic links to each other with framework by the test section.Can easily regulate driving and detect resonant frequency by the part of Vib. is repaired processing respectively with the part of seat base.Thereby this method can reduce manufacturing step.

As vibrating gyrosensor, preferably use such vibrating gyrosensor, at least two in the involving vibrations device are supported by the seat base in parallel with each other, and a drive unit is formed between these two Vib.s, be used to make these two Vib.s on direction relative to each other, to vibrate in the mode of excitation, wherein drive unit comprises one the 3rd plate shape part, the 3rd plate shape part in height ratio vibrator is much thin, and and Vib. reaches a driving piezoelectric/electrostrictive film element that is formed on described the 3rd plate shape part together by the integral roasting product slate of pottery.

Preferably the adjusting of driving resonance frequencies is finished by thin-walled first projection that stretches out from the Vib. free end with integral way being repaired handle, the adjusting that detects resonant frequency is finished by thin-walled second projection that stretches out from seat base longitudinal direction two ends with integral way being repaired handle.In this embodiment, can regulate driving resonance frequencies by first projection being repaired processing (excision is handled), can regulate the detection resonant frequency by second projection being repaired processing (excision is handled).That is, can distinguish adjusting independently and drive and detect resonant frequency.Thereby, for example, can avoid having influence on the detection resonant frequency because of regulating driving resonance frequencies.

Preferably the adjusting of driving resonance frequencies is finished by the 3rd plate shape part is repaired to handle along its horizontal direction, the adjusting that detects resonant frequency is finished by the first plate shape part of test section is repaired to handle along its horizontal direction.

This embodiment depends on such method, wherein regulates driving and the detection resonant frequency by the elastic constant that changes the first and the 3rd plate shape part, rather than regulates driving and detect resonant frequency by the quality that changes Vib. and seat base.Thereby, need not form first and second projections respectively at the free end of Vib. and two ends of the basic longitudinal direction of seat.So, can simplify manufacturing step.In addition, be thin-walled owing to will be subjected to repairing the zone of processing, thereby can easily regulate resonant frequency.Do not resemble by changing the method that quality is regulated resonant frequency, this method can be regulated driving resonance frequencies fully independently and be detected resonant frequency.

Regulate the detection resonant frequency again after preferably regulating driving resonance frequencies.

Fig. 1 has schematically represented the skeleton view of graphic extension according to the 1st most preferred embodiment of vibrating gyrosensor of the present invention.

Fig. 2 has schematically represented the decomposition diagram of the vibrating gyrosensor that graphic extension is shown in Figure 1.

Fig. 3 has schematically represented the fragmentary, perspective view of the first plate shape part partly of the vibrating gyrosensor that graphic extension is shown in Figure 1.

Fig. 4 has schematically represented the skeleton view of graphic extension according to the 2nd most preferred embodiment of vibrating gyrosensor of the present invention.

Fig. 5 has schematically represented the skeleton view of graphic extension according to the 3rd most preferred embodiment of vibrating gyrosensor of the present invention.

Fig. 6 has schematically represented the skeleton view of graphic extension according to the 4th most preferred embodiment of vibrating gyrosensor of the present invention.

Fig. 7 has schematically represented the skeleton view of graphic extension according to the 5th most preferred embodiment of vibrating gyrosensor of the present invention.

Fig. 8 has schematically represented the skeleton view of graphic extension according to the 6th most preferred embodiment of vibrating gyrosensor of the present invention.

Fig. 9 has schematically represented the skeleton view of graphic extension according to the 7th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 10 has schematically represented the skeleton view of graphic extension according to the 8th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 11 has schematically represented the skeleton view of graphic extension according to the 9th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 12 has schematically represented the skeleton view of graphic extension according to the 10th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 13 has schematically represented the skeleton view of graphic extension according to the 11st most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 14 has schematically represented the skeleton view of graphic extension according to the 12nd most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 15 has schematically represented the skeleton view of graphic extension according to a most preferred embodiment of compound sensor of the present invention.

Figure 16 has schematically represented the skeleton view of graphic extension according to another most preferred embodiment of compound sensor of the present invention.

Figure 17 has schematically represented the manufacturing step directly perceived according to the vibrating gyrosensor of the 1st embodiment shown in Figure 1.

Figure 18 has schematically represented the manufacturing step directly perceived according to the vibrating gyrosensor of the 5th embodiment shown in Figure 7.

Figure 19 has represented that graphic extension is based on utilizing electric field to induce the electrode structure of amplification of electrode type of the longitudinal effect of distortion.

Figure 20 has schematically represented the skeleton view of graphic extension according to the 13rd most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 21 has schematically represented the skeleton view of graphic extension according to the 14th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 22 has schematically represented the skeleton view of graphic extension according to the 15th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 23 has schematically represented the skeleton view of graphic extension according to the 16th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 24 has represented that schematically graphic extension is used for regulating the skeleton view according to a typical structure of the teat of the resonant frequency of the vibrating gyrosensor of the 15th embodiment.

Figure 25 has represented that schematically graphic extension is used for regulating the skeleton view according to another typical structure of the teat of the resonant frequency of the vibrating gyrosensor of the 15th embodiment.

Figure 26 has schematically represented the skeleton view of graphic extension according to the 17th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 27 has represented that schematically graphic extension is used for the skeleton view of regulating a kind of typical structure that is used to the resonant frequency that drives and detect according to the elastic constant of the driving of the vibrating gyrosensor of the 17th embodiment and test section by changing.

Figure 28 has schematically represented the skeleton view of graphic extension according to the 18th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 29 has schematically represented the skeleton view of graphic extension according to the 19th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 30 has schematically represented the skeleton view of graphic extension according to the 20th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 31 has schematically represented the skeleton view of graphic extension according to the 21st most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 32 has schematically represented the skeleton view of graphic extension according to the 22nd most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 33 has schematically represented the skeleton view of graphic extension according to the 23rd most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 34 has schematically represented the skeleton view of graphic extension according to the 24th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 35 has schematically represented the skeleton view of graphic extension according to the 25th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 36 has schematically represented the skeleton view of graphic extension according to the 26th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 37 has represented that schematically graphic extension forms the skeleton view of model from a kind of typical wiring of drawing according to the electrode pair of the piezoelectric/electrostrictive film element of the vibrating gyrosensor of the 17th embodiment.

Figure 38 has schematically represented the skeleton view of graphic extension according to the 27th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 39 has schematically represented the skeleton view of graphic extension according to the 28th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 40 has schematically represented the skeleton view of graphic extension according to the 29th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 41 has schematically represented the skeleton view of graphic extension according to the 30th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 42 has schematically represented the skeleton view of graphic extension according to the 31st most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 43 has represented along the cross-sectional view that is shown in the A-A line among Figure 42.

Figure 44 has schematically represented the skeleton view of graphic extension according to the 32nd most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 45 has schematically represented the skeleton view of graphic extension according to the 33rd most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 46 has schematically represented the skeleton view of graphic extension according to the 34th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 47 has schematically represented the skeleton view of graphic extension according to the 35th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 48 has represented along the cross-sectional view that is shown in the B-B line among Figure 47.

Figure 49 has schematically represented the skeleton view of graphic extension according to the 36th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 50 has schematically represented the skeleton view of graphic extension according to the 37th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 51 has schematically represented the skeleton view of graphic extension according to the 38th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 52 has schematically represented the skeleton view of graphic extension according to the 39th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 53 has represented that graphic extension depends on the family curve of variation of the resonant angular frequency ratio of the strut length that supports tuning fork.

Figure 54 has schematically represented the skeleton view of graphic extension according to the 40th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 55 has schematically represented the skeleton view of graphic extension according to the 41st most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 56 has schematically represented the skeleton view of graphic extension according to the 42nd most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 57 has schematically represented the skeleton view of graphic extension according to the 43rd most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 58 has schematically represented the skeleton view of graphic extension according to the 44th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 59 has schematically represented the skeleton view of graphic extension according to the 45th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 60 has schematically represented the skeleton view of graphic extension according to the 46th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 61 has schematically represented the skeleton view of graphic extension according to the 47th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 62 has represented the structure of the amplification of a part, in this part lead-in wire is introduced into vibrating gyrosensor according to the 47th embodiment.

Figure 63 has schematically represented the skeleton view of graphic extension according to the 48th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 64 has represented the structure of the amplification of a part, in this part lead-in wire is introduced into vibrating gyrosensor according to the 48th embodiment.

Figure 65 has schematically represented the skeleton view of graphic extension according to the 49th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 66 has schematically represented the skeleton view of graphic extension according to the 50th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 67 has schematically represented the skeleton view of graphic extension according to the 51st most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 68 has schematically represented the skeleton view of graphic extension according to the 52nd most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 69 has schematically represented the skeleton view of graphic extension according to the 53rd most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 70 A has represented along the cross-sectional view that is shown in the C-C line among Figure 69.

Figure 70 B has represented along the cross-sectional view that is shown in the D-D line among Figure 69.

Figure 70 C has represented along the cross-sectional view that is shown in the E-E line among Figure 69.

Figure 71 has schematically represented the skeleton view of graphic extension according to the 54th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 72 has schematically represented the skeleton view of graphic extension according to the 55th most preferred embodiment of vibrating gyrosensor of the present invention.

Figure 73 has schematically represented the skeleton view of graphic extension according to another structure of the vibrating gyrosensor of the 1st embodiment shown in Figure 1.

Figure 74 has schematically represented the decomposition diagram of graphic extension according to the vibrating gyrosensor of the 33rd embodiment shown in Figure 45.

Figure 75 has schematically represented the decomposition diagram of graphic extension according to the vibrating gyrosensor of the 34th embodiment shown in Figure 46.

Figure 76 has schematically represented the decomposition diagram of graphic extension according to the vibrating gyrosensor of the 35th embodiment shown in Figure 47.

The various embodiment of the vibrating gyrosensor of middle graphic extension illustrate feature of the present invention below with reference to the accompanying drawings, so that further specifically clearly describe the present invention.

At first, the embodiment (the 1st embodiment) according to vibrating gyrosensor of the present invention is shown in Fig. 1.In this embodiment, the column Vib. 2,2 that corner angle are arranged that two roasted products by pottery constitute is arranged to parallel to each other and the predetermined spacing of being separated by each other, and each Vib. has rectangular cross section and extends longitudinally.This two Vib. 2,2 is sentenced on the cylindricality seat base 4 that corner angle are arranged that holistic approach is connected respectively to a rectangle that is made of the roasted product of pottery at their proximal end, thereby Vib. 2,2 is by 4 supportings of seat base.Each Vib. 2,2 comprises the first plate shape part 6 as the test section, and it forms with integral way, its tenuity is placed be in close proximity to pedestal 4, and its main surface is along the arranged direction stretching, extension of Vib. 2,2.Each Vib. 2,2 its adjacent end district is the thin-walled second plate shape part 8, and the width of this part is less than the width of Vib. 2, and stretch along the direction perpendicular to the first plate shape part 6 on its main surface.Vib. 2,2 is connected on the pedestal 4 with integral way by the second plate shape part 8,8.These two Vib.s 2,2 by the lay respectively at first plate shape part 6 of the 3rd plate shape part 10 at them, 6 and the second plate shape part 8, zone between 8 is interconnected with integral way, the 3rd plate shape part 10 ratio vibrators 2,2 are much thin, and its main surface is parallel to the first plate shape part 6,6, main surface.Be these two Vib.s 2,2, pedestal 4, the first plate shape parts 6,6, the second plate shape part the 8,8, the 3rd plate shape part 10 is the integral roasting product slate by pottery, thereby has holistic structure.

Promptly, as shown in Figure 2, the vibrating gyrosensor of aforesaid integral roasting product slate by pottery can be used as and comprise thin plate layer 22, the integrated overlaying structure of base layer 24 and interlayer 26, thereby the first plate shape part 6,6 and the 3rd plate portion 10 are provided by thin plate layer 22, and Vib. 2,2 and the second plate shape part 8,8 is provided by the integrated thin plate layer 22 and the base layer 24 of stack.In addition, seat base 4 integrated thin plate layers 22 by stack, base layer 24 and interlayer 26 provide.

Detecting piezoelectric/ electrostrictive film element 12,12 forms on the thin-walled first plate shape part 6,6 that is formed on each Vib. 2,2 respectively with integral way according to known film formation method.Shown in Figure 3 as what amplify, detect piezoelectric/electrostrictive film element 12 and directly be formed on the first plate shape part 6 with a kind of like this form, even following film shape bottom electrode 12a, piezoelectric layer 12b and top electrode 12c stack mutually are integrated.Detecting piezoelectric/ electrostrictive film element 12,12 detects in the Vib. 2,2 perpendicular to vibration of inducing generation or displacement on the plane of arrangement direction of these two Vib.s 2,2.Piezoelectric/electrostrictive film element 14 as drive unit also is formed on the 3rd plate shape part 10 with integral way according to known film formation method, constitutes to constitute the same manner that detects piezoelectric/electrostrictive film element 12,12.When driving piezoelectric/electrostrictive film element 14 work, two Vib.s 2,2 promptly make on their near each other and directions of separating at the x direction of principal axis and are subjected to flexural vibrations in their layout plane mutually in opposite directions the direction.

But thin plate cut- out 16,16 is positioned on each Vib. 2,2 and the preceding end for the opposite side in the coupling part of seat base 4, but and cut- out 16,16 stretch with integral way therefrom.But cut- out 16,16 can by means of, for example laser treatment and ultrasonic Treatment are easily repaired.The upper surface of seat base 4 and the upper surface flush of Vib. 2,2, and the thickness of seat base 4 is greater than the thickness of Vib. 2,2.Thereby the lower surface of seat base 4 is positioned on the position that is lower than Vib. 2,2.That is, seat base 4 comprises compartment 18 corresponding to interlayer shown in Figure 2 26 with integral way.The thickness of the thickness ratio vibrator 2,2 of seat base 4 is big, and its difference is the thickness of compartment 18.When the parts by means of the present base 4 of bolt 20 were fixed on vibrating gyrosensor in the flat fixed pan of vertical direction, because the existence of aforesaid compartment 18, Vib. 2,2 can not be subjected to connecting the interference on plane.

Thereby, have as mentioned above the structural vibrations gyrosensor and operate as described below.That is, drive piezoelectric/electrostrictive film element 14 and make 10 distortion of the 3rd plate shape part by operation.Thereby in opposite directions direction mutually, in other words, at x shown in Figure 1, y makes in the z rectangular coordinate system on their near each other and directions of separating and is subjected to excited vibrational (flexural vibrations) along the x direction of principal axis for two Vib.s 2,2.In this case, when the revolving force around the z axle acted on Vib. at 2,2 o'clock, Coriolis force around the basic upper edge y directive effect of the angular velocity of z axle on Vib. 2,2.Thereby Coriolis force makes Vib. 2,2 vibrate on opposite mutually direction along the y direction of principal axis.Detect aforesaid Vib. 2,2 in the axial flexural vibrations of y by means of detecting the form of piezoelectric/ electrostrictive film element 12,12 with electromotive force (voltage).

As mentioned above, vibrating gyrosensor entirely is made of the integral roasting product of pottery.Thereby, in the material that constitutes vibrating gyrosensor, do not have magnetic material, for example traditional iron-nickel-chromium.Like this, produce with regard to not having problem, that is, the performance of sensor can not be subjected to the influence of any environmental magnetic field.Detect piezoelectric/ electrostrictive film element 12,12 and drive piezoelectric/electrostrictive film element 14 and directly be formed on the first plate shape part 6,6 and the 3rd plate shape part 10 with integral way according to film formation method.Between all elements and plate shape part, there is not adhesive linkage.Thereby the problem that the sensitivity that the stress absorption that is caused by such adhesive linkage causes reduces is solved effectively.

Because the driving piezoelectric/electrostrictive film element 14 as driver is formed on thin-walled the 3rd plate shape part 10 with integral way, thereby can cause distortion expediently by the operation that drives piezoelectric/electrostrictive film element 14 certainly.In addition, each Vib. 2,2 is by the thin-walled second plate shape part 8,8 are connected on the seat base 4 with integral way, and the second plate shape part 8,8th, edge, main surface is perpendicular to the sheet section of direction (y direction of principal axis) stretching, extension of the direction of vibration (x direction of principal axis) of Vib. 2,2.Thereby the rigidity of direction of vibration is reduced effectively, makes vibration easily to produce.Thereby the driving operation that acts on Vib. 2,2 by driving piezoelectric/electrostrictive film element 14 can obtain big displacement.Especially, when the ratio of the width (thickness) of the second plate shape part 8 and height hour, can restrain the vibration at vertical direction (y direction of principal axis), the axial vibration of y is a factor of desensitization.In addition, as arranging the zone of detecting piezoelectric/electrostrictive film element 12, the first plate shape part 6, form piezoelectric/electrostrictive film element 12 with integral way thereon, ratio vibrator 2 is much thin, thereby its main more surperficial direction of vibration along Vib. 2 (x direction of principal axis) stretches, and in other words, main surface is positioned at the plane of oscillation of Vib. 2.Thereby, when flexural vibrations when producing perpendicular to the axial y direction of principal axis of x, can obtain big displacement.

As mentioned above, be easy to crooked zone and be present on direction (y direction of principal axis) that detects vibration and the either direction that drives the direction of vibrating (x direction of principal axis), thereby arbitrary driving and detecting operation all can obtain big displacement.So the sensitivity of vibrating gyrosensor is greatly strengthened.Especially, forming thereon and detecting piezoelectric/electrostrictive film element 12 is thin-walleds with the first plate shape part 6 that provides the test section, so that such structure to be provided, makes that stress is concentrated.Can obtain big output like this.

In aforesaid embodiment, but provide a thin-walled cut-out 16, this part is with preceding terminal stretch of integral way from Vib. 2.Thereby, handle or machining but be easy to cut-out 16 repaired, for example laser treatment and ultrasonic Treatment, thus be easy to regulate the resonant frequency of Vib. 2.The electrode district that detects piezoelectric/electrostrictive film element 12 and drive piezoelectric/electrostrictive film element 14 can be easily changed by laser or analog, thereby their electrical property can be easily regulated.

In addition, the vibrating gyrosensor of present embodiment has such structure, and wherein the 3rd plate shape part 10 provides driving piezoelectric/electrostrictive film element 14 thereon, form with integral way, thereby two Vib.s 2,2 is bridged at their proximal end place.So by the 3rd plate shape part 10, vibrating gyrosensor can be eliminated the vibration limiting of Vib. 2,2 effectively.

Vibrating gyrosensor according to the present invention also can comprise various structures in the scope that does not break away from main idea of the present invention or essential characteristic except that above-mentioned structure.Representational embodiment is shown in Fig. 4 and the accompanying drawing subsequently.Below the characteristic of subsequent embodiment will only be described.Represent with same reference is digital with identical or suitable parts or the part of part described in the 1st embodiment, with the detailed description of saving them.

At first, the 2nd embodiment that is shown in Fig. 4 has following structure.That is, Vib. 2,2 is connected to the preceding end of the U-shaped part of U type seat base 4 with integral way by the thin-walled first plate shape part 6,6.The second plate shape part 8,8 is positioned at the preceding end of Vib. 2,2.Be formed for connecting thin-walled the 3rd plate shape part 10 of two Vib.s 2,2 with integral way in the position of comparing more approaching preceding end with the second plate shape part 8,8 with integral way.

In the 2nd embodiment, the position that the 3rd plate shape part 10 is arranged in than the more approaching preceding end of the 1st embodiment.Thereby even now can cause the vibration of the 3rd plate shape part 10 constrained vibration devices 2,2, but still may obtain the big displacement of displacement than common vibrating gyrosensor acquisition.

Being shown in the 3rd of Fig. 5 and Fig. 6 respectively compares with the 2nd embodiment with the 4th embodiment and the aforesaid the 1st and to have following feature.That is, have such structure by the vibrating gyrosensor of the integral roasting product slate of pottery, wherein, the cylindrical support rod member 28 that corner angle are arranged with rectangular cross section is placed between two Vib.s 2,2 and is parallel to Vib. 2,2.

That is, support bar 28 is placed between two Vib.s 2,2, apart from Vib. 2,2 one preset distances, and integrally is connected on the seat base 4 and by 4 supportings of seat base.Thin-walled the 3rd plate shape part 10 is formed at support bar 28 in the mode of integral body and places between the Vib. 2,2 on the support bar the right and the left side.Driving piezoelectric/ electrostrictive film element 14,14 is formed at respectively on the 3rd plate shape part 10,10.Driving piezoelectricity/electrostrictive operation causes the Vib. 2,2 on the right and the left side to make excited vibration in direction relative to each other respectively.

Fig. 7 and Fig. 8 have represented to have the 5th and the 6th embodiment of following structure respectively.That is, the integral roasting structure of employed pottery is in a kind of like this state, and seat base 4 fixed mounts 30 by rectangular shape that wherein are used for supporting at the proximal end place of Vib. 2,2 two Vib.s 2,2 constitute.Two Vib.s 2,2 are included in the fixed mount 30, and form predetermined gap between Vib. 2,2 and fixed mount.

Independently drive unit (driver) lays respectively at two Vib.s 2,2 and centers between the fixed mount of these two Vib.s 2,2.That is, between two Vib.s 2,2 and side, form thin-walled the 3rd plate shape part 10,10 in the face of the fixed mount 30 of Vib. in the mode of integral body.On the 3rd plate shape part 10,10, form driving piezoelectric/ electrostrictive film element 14,14 respectively according to film formation method.

In having as mentioned above the structural vibrations gyrosensor,, can be fixed in a flat fixed pan tightly by compartment 18 fixed mounts 30 by means of bolt 20 or analog.Thereby the degrees of freedom of this vibrating gyrosensor installing space are big.

About seat base 4, be shown in Fig. 9 and Figure 10 the 7th with the 8th embodiment have with the 1st with the 2nd embodiment in the similar structure described.But seat base 4 is to provide with the integral roasting structure of the pottery form with fixed mount with rectangular shape, thereby around living two Vib.s.

That is, each vibrating gyrosensor of the 7th and the 8th embodiment comprises that one is formed at drive unit 10,14 between two Vib.s 2,2 with integral way, and described two Vib.s are arranged in the fixed mount 30 with rectangular frame structure.In these embodiments, fixed mount 30 can be fixed with the same quadrat method described in the 5th and the 6th embodiment tightly by compartment 18.The degrees of freedom that are used to the space of installing in these embodiments are also big.

Figure 11 has represented the 9th embodiment according to vibrating gyrosensor of the present invention.Vibrating gyrosensor is made of the integral roasting product structure of pottery, wherein has rectangular shape, is provided as the framework 32 of the seat base that is used for supporting at Vib. proximal end place two Vib.s 2,2, thereby makes two Vib.s by around living.Thin-walled second plate shape part 8 is with the mode of integral body two Vib.s 2 that are positioned at framework 32, form on the part between 2 the supporting area, it is used to reduce Vib. 2,2 in the rigidity of direction of vibration and make vibration easily, thereby stretch along the direction perpendicular to direction of vibration (plane of arrangement of Vib. 2,2) on the main surface of the second plate shape part 8.Much thinner that the 3rd plate shape part 10 part that forms the zone of the second plate shape part 8 on framework 32 vis-a-vis forms than framework 32, thus the main surface of the 3rd plate shape part 10 is parallel to the main surface of the first plate shape part 6,6.Driving piezoelectric/electrostrictive film element 14 forms on the 3rd plate shape part 10 according to film formation method with integral way.

Thereby, in having as mentioned above the structural vibrations gyrosensor, the operation that drives piezoelectric/electrostrictive film element 14 causes the distortion of the 3rd plate shape part 10, and this distortion is induced the generation flexural vibrations by the zone that utilizes the second plate shape part 8 as the center in framework 32.Based on these flexural vibrations, those two Vib.s 2,2 are vibrated in the mode of excitation.

Figure 12 and Figure 13 have represented the 10th and the 11st embodiment respectively, and each embodiment has utilized ceramic integral roasting product structure, as the illustrative structures that makes vibrating gyrosensor shown in Figure 11 be convenient to fix.

The embodiment that is shown in the 10th and the 11st embodiment of Figure 12 comprises a fixed part 34 that is used for fixing framework 32, it is to form on the outside surface corresponding to the zone that forms the second plate shape part 8 in the mode of integral body, and the second plate shape part 8 is formed in the rectangular frame 32.Especially, fixed part 34 has the shape of triangle, and is connected on the outside surface of the second plate shape part 8 by the mode with integral body at place, a leg-of-mutton summit.Owing to following reason coupling part, be connected on the second plate shape part 8 at this place's fixed part 34, width (horizontal direction among Figure 12) less than the width (horizontal direction among Figure 12) of the second plate shape part 8.That is, preferably eliminate the restriction that the second plate shape partly is out of shape, as far as possible little, this distortion is caused by the connection of fixed part 34.Vibrating gyrosensor is fixed like this, promptly makes fixed part 34 fixing by means of bolt 20 or analog by compartment 18.

Embodiment shown in Figure 13 has illustrated the modification embodiment of the fixed part 34 of embodiment description as shown in figure 12.That is, this embodiment has a mode with integral body to comprise the structure of a fixed frame 36, and this framework 36 places framework 32 outsides, and the distance predetermined apart from framework 32 1, thereby around the framework 32 that provides vibrating gyrosensor.Can realize a tightly fixing structure by the fixed frame 36 that uses bolt 20 fixedly to have rectangular frame shape.

The 12nd embodiment according to vibrating gyrosensor of the present invention is shown in Figure 14, and it is based on the use of the integral roasting product structure of pottery.In the present embodiment, be used for supporting the U-shaped that is shaped as corner angle of the seat base 4 of two Vib.s 2,2 at the proximal end of two Vib.s 2,2.The part of the second plate shape part 8 between the supporting area of the seat base 4 that is positioned at two Vib.s 2,2 forms.One is used for fixing a fixed part 34 of base 4 is connected to the second plate shape part 8 according to the same quadrat method in embodiment illustrated in fig. 13 in the mode of integral body outside surface.Have rectangular frame shape, the fixed frame 36 that together forms with integral way and fixed part 34 is placed in outside two Vib.s 2,2 and the seat base 4, and the predetermined distance of distance one, thus two Vib.s 2,2 and seat base 4 by around.

Than fixed frame 36 and seat base 4 thin the 3rd plate shape part 10 of Duoing, 10 form with integral way, make its main surface be parallel to the first plate shape part 6,6 main surface, thereby the 3rd plate shape part 10,10 makes fixed frame 36 and seat base 4 be positioned at the part bridge joint of the second plate shape part, 8 both sides respectively.Driving piezoelectric/ electrostrictive film element 14,14 forms on the 3rd plate shape part 10,10 according to film formation method with integral way.

In having as above-mentioned structural vibrations gyrosensor, by between the part of fixed part 36 and seat base 4, as the operation of the driving piezoelectric/ electrostrictive film element 14,14 of drive unit, seat base 4 parts that are positioned at the second plate shape part, 8 both sides are vibrated.Based on this vibration, Vib. 2,2 is vibrated.

Use aforesaid according to vibrating gyrosensor structure of the present invention can be easily with this vibrating gyrosensor and other sensor combination.Particularly, Fig. 7 can be used to provide one second fixed frame to Figure 10 and Figure 13 and fixed frame 30,36 shown in Figure 14, this framework and original framework adjacency, and combine as the integral roasting product structure of pottery and original framework.The sensor that another function is different from vibrating gyrosensor is supported in second fixed frame with integral way.Thereby may provide a compound sensor.The explanation of such compound sensor is given birth to embodiment and is shown among Figure 15.

In the compound sensor of Figure 15 graphic extension and second fixed frame 38 of fixed frame 36 combinations be provided fixed frame 36 adjacency of this second fixed frame 38 and vibrating gyrosensor shown in Figure 13 with the integral roasting product structure of pottery.The acceleration transducer that function is different from this vibrating gyrosensor is provided in second fixed frame with integral way.In Figure 15, one is used to detect around the angular velocity of z axle, and the acceleration transducer part 40 that constitutes vibrating gyrosensor is positioned at the left side of this system.An acceleration transducer part 42 is formed in second fixed frame 38 on this system right side.That is, acceleration transducer part 42 comprises a first sensor 44A and second a sensor 44B who is used to detect y direction of principal axis acceleration, and one the 3rd sensor 44C and a four-sensor 44D who is used to detect x direction of principal axis acceleration.

The first and second sensor 44A, 44B comprises a Vib. 46a as inertial mass respectively, 46b, one is used for integral way Vib. 46a, and 46b is connected to the plate-shaped test section 48a of fixed frame 38,48b, and with integral way according to the film method of formationing at test section 48a, the last formation of 48b, have that (original text is 14 with detecting piezoelectric/electrostrictive film element 12 as described above, mistake) the detection piezoelectric/electrostrictive film element 50a of identical or suitable structure, 50b.Thereby, when axial acceleration of y of input, test section 48a, 48b is out of shape respectively.Based on this distortion, a predetermined electromotive force (voltage) is from detecting piezoelectric/electrostrictive film element 50a, 50b output.The first and second sensor 44A, 44B also detect the axial acceleration of x.When they were as above operated, these two sensors were out of shape on direction relative to each other, and displacement is different from the displacement that produces in the same direction when applying the axial acceleration of y.So, can realize Signal Separation.

The third and fourth sensor 44C, 44D also comprises a Vib. 46c as inertial mass respectively, 46d, one is used for integral way Vib. 46c, 46d is connected and fixed the plate-shaped test section 48c of framework 38,48d, one with integral way according to film formation method at test section 48c, the last formation of 48d, have and the detection piezoelectric/electrostrictive film element 50c that detects the identical or suitable structure of piezoelectric/electrostrictive film element 12 as described above, 50d reaches one and is used for Vib. 46c, and 46d is connected on the fixed frame 38 with a kind of like this state support Vib. 46c, 46d, make Vib. 46c, 46d is at the plate-shaped coupling part 46c ' that the x direction of principal axis is easy to replace, 46d '.So when axial acceleration of x of input, one the predetermined electromotive force (voltage) of the distortion of 48d is from detecting piezoelectric/electrostrictive film element 50c based on two test section 48c, 50d exports.

Figure 16 has represented to have another embodiment of the compound sensor of different structure.The disclosed compound sensor of Figure 16 has the integral roasting product structure of a pottery, wherein with integral way, provides an angular-rate sensor 40 and an acceleration transducer 42 in the mode identical with the compound sensor of Figure 15 graphic representation.But this embodiment is at the first and second sensor 44A, and the configuration aspects of 44B is different from last embodiment.

That is, be used for integral way the first and second sensor 44A, the Vib. 46a of 44B as inertial mass, 46b is connected respectively to the coupling part 46a ' on the fixed frame 38, and 46b ' has thin sheet form, and this thin sheet form is easily deformable at the z direction of principal axis.So, when input one z direction of principal axis acceleration, because easily deformable coupling part 46a ', the existence of 46b ', as the Vib. 46a of inertial mass, 46b provides big displacement, on this basis, detect piezoelectric/electrostrictive film element 50a, 50b output one predetermined electromotive force (voltage).

Removing piezoelectric/ electrostrictive film element 12,14 and 50a according to arbitrary vibrating gyrosensor of the present invention and compound sensor all is integral roasting product slate by pottery outside 50d.Particularly, they are produced as follows.

At first, in the present invention, comprise, for example Vib. 2, and the sensor main body of seat base 4, the first to the 3rd plate shape parts 6,8,10 and compartment 18 is provided by the ceramic integral roasted product.Those can be used as the material of the integral roasting product that forms the pottery that constitutes sensor main body without any problem, comprise any stupalith and any stupalith of forming by oxide of forming by material except that oxide, as long as this material is electrically insulating material or the dielectric substance that has than great machinery intensity, they want to stand thermal treatment described below about 1400 ℃, and they are wanted can be under the situation of not using any bonding agent or analog and piezoelectric/electrostrictive film element 12,14 and other element stack and integrated.Especially, in order to obtain good operating performance, promptly big displacement, big generative power, and fast response speed, these the most available materials comprise that principal ingredient is an aluminium oxide, magnesium oxide, zirconia, at least a material in aluminium nitride and the silicon nitride.Especially, suggestion uses principal ingredient to be aluminium oxide and/or zirconic stupalith.More particularly, those use favourable material to comprise principal ingredient for using yttria, ytterbium oxide, cerium oxide, calcium oxide, at least a stable zirconic material in the magnesium oxide, even this is because plate thickness is when very little, these material lists reveal and resemble high tenacity and the such feature of high mechanical properties.

For stabilizing zirconia, aforementioned composition optimal addn is 1 mole of % to 30 mole of % for yttria and ytterbium oxide, is 6 moles of % to 50 mole of % to cerium oxide, is 5 moles of % to 40 mole of % for calcium oxide and magnesium oxide perhaps.Feature ground most desirably is to use yttria as stabilizing agent.In this case, the addition of yttria is 1.5 moles of % to 6 mole of % preferably, are more preferably 2 moles to 4 moles.When yttria joined in the zirconia with aforesaid adding scope, crystalline phase was by partially stabilized, thereby sensor main body is provided good performance.

When the zirconium dioxide that is stabilized or part is stabilized is used to thin plate layer, preferably contain the auxiliary element shown in the following table.Even when piezoelectric/electrostrictive film element contains following auxiliary element, also can obtain identical effect.

Table

Auxiliary element	Optimum content (percentage by weight)	Better content (percentage by weight)	Effect	Applicable electric field-induce strain
					Aluminium oxide	?????0.1～5.0	?????0.2～2.0	???#1	Transversal effect
Titania	?????0.1～5.0	?????0.2～2.0	???#2	Longitudinal effect

#1: by the adhesion (welding) of avoiding thin plate layer and piezoelectric layer, piezoelectric layer stress self or stress distribution are reduced.

#2: guarantee that between thin plate layer and piezoelectric layer enough combinations are to obtain high reliability.

As shown in Figure 2, constitute as mentioned above that the ceramic integral roasted product of sensor main body includes thin plate layer 22, base layer 24 if necessary also has interlayer 26.At least in the material that provides thin plate layer 22, contain Si oxide (SiO, SiO ₂) be useful.The content of Si oxide preferably is not less than 0.5wt% and is not more than 5wt%, it is desirable to be not less than 1wt% especially and is not more than 3wt%.The ratio of aforesaid Si oxide content is to being formed at the piezoelectric/electrostrictive film element 12 on the thin plate layer 22, can avoid any overreaction with piezoelectric/electrostrictive material during 14 thermal treatments effectively, thereby can obtain good excitation behavior or detect performance.

In addition, in order to obtain response and big displacement fast at vibrating gyrosensor with in including according to the compound sensor of same vibrating gyrosensor of the present invention, form the thickness of the thin plate layer 22 of piezoelectric/electrostrictive film element thereon with integral way, promptly, the thickness of the first plate shape part 6 and the 3rd plate shape part 10 is not more than 50 microns usually, preferably be not more than 30 microns, better be not more than 15 microns.On the other hand, determine the thickness of base layer 24 suitably.Yet the thickness of base layer 24 generally is not less than 30 microns, preferably is not less than 50 microns, better is not less than 100 microns.In order to obtain big displacement and big generative power in driver or test section, the mean grain size of the crystal of thin plate layer 22 is preferably 0.1 to 2 micron at least.Be more preferably, thin plate layer 22 preferably is not more than 1 micron stupalith by mean grain size and constitutes.

Those methods of integral roasting product that can be used for obtaining to provide the pottery of the sensor main body that comprises aforesaid thin plate layer 22 and base layer 24 (and interlayer 26) comprise: for example, a kind of under sintering state not stack thin plate layer 22, the not sintered plate stacking method of base layer 24 and interlayer 26, and based on the various molding methods that use a model, pressure moulding for example, the casting molding, and injection-molded, and by means of machining processes ultrasound wave for example, cutting, and grinding processing method forms, for example Vib. 2, seat base 4, and first to the 3rd plate shape part 6,8,10 processing or machining process.Especially, preferably use not sintered plate stacking method, residual process stress not, and the precision height of the thickness of thin plate layer 22 in the method.Not the sintered plate stacking method be preferably based on to the first, the second and the 3rd not the use of sintered plate provide thin plate layer 22 respectively, base layer 24 and interlayer 26.Adopted a kind of method, therein, the first, the second, the 3rd not sintered plate under pressure, be applied by means of hot sticky, they are combined togather by roasting subsequently.When roasting with in conjunction with the time preferably use the not sintered plate that has identical roasting shrinkage factor at least as first to the 3rd sintered plate not.

Aforesaid not sintered plate stacking method specifically comprises following three kinds of methods.In first method, formation first to the 3rd not sintered plate have corresponding to thin plate layer shown in Figure 2 22 shape of base layer 24 and interlayer 26 respectively.They are superposeed mutually and are combined, subsequently by roasting to produce the integral roasting product.Afterwards, form piezoelectric/electrostrictive film element 12,14 according to film formation method with the presumptive area of integral way on thin plate layer 22.In the second approach, will not have first sintered plate and have the second and the 3rd not sintered plate stack and combination not of thin plate layer 22 shapes corresponding to base layer 24 and interlayer 26 shapes, and roasting they to obtain the integral roasting product.Afterwards, by means of, for example Laser Processing and ultrasonic machining realize the shape of thin plate layer 22, the presumptive area at thin plate layer 22 forms piezoelectric/electrostrictive film element with integral way subsequently.In the third method, used first sintered plate not that does not have thin plate layer 22 shapes.This first sintered plate and have the second and the 3rd not sintered plate stack and combination not corresponding to the shape of base layer 24 and interlayer 26, subsequently by roasting to produce the integral roasting product.First not the presumptive area of the roasted product part of sintered plate form piezoelectric/electrostrictive film element with integral way.Afterwards, by means of, for example Laser Processing and ultrasonic machining realize the shape of thin plate layer 22.Thereby obtain vibrating gyrosensor.Especially, the present invention has adopted the third method of addressing at last to avoid the distortion that thermal treatment causes during piezoelectric/electrostrictive film element forms valuably.Preferably adopt such method to realize thin plate layer 22, the shape of base layer 24 and interlayer 26, in these methods, sintered plate is not processed to given shape, promptly by adopting, for example, Laser Processing, the pressure processing of employing model, and ultrasonic machining.Especially, it is useful using the pressure processing of band model, because this method function admirable aspect batch process and integration.

Figure 17 has represented according to aforesaid not sintered plate stacking method, is used for an example of the best production technology (third party's method) of vibrating gyrosensor.In this course, form thin plate layer 22 first not sintered plate 52 be not processed into the shape of thin plate layer 22 at all.First not sintered plate 52 only as a thin plate with rectangular shape.Form base layer 24 second not the shape of sintered plate 54 be processed into shape corresponding to base layer 24.Form interlayer 26 the 3rd not the shape of sintered plate 56 also be processed into shape corresponding to interlayer 26.The the first, the second, the 3rd not sintered plate 52,54,56 be applied, subsequently by roasting with integrate one.Afterwards, form piezoelectric/ electrostrictive film element 12,14 in the presumptive area of the thin plate layer 22 of the roasted product that obtains with integral way according to the film formation method of describing later.Subsequently, by means of, for example, Laser Processing or ultrasonic machining are cut processing to the thin plate layer 22 of integral roasting product 58.Thereby obtain vibrating gyrosensor as shown in Figure 1.

Under situation based on the second method of above-mentioned not sintered plate stacking method, form piezoelectric/electrostrictive film element 12, the order of the step of 14 step and processing thin plate layer 22 is inverted, and forms piezoelectric/ electrostrictive film element 12,14 with integral way.Obtain vibrating gyrosensor shown in Figure 1 like this.

At sintered plate stacking method not (wherein by aforesaid stack the first, the second, the 3rd sintered plate 52 not, 54,56 obtain vibrating gyrosensor) in, consider the shape of thin plate layer 22, but can form the plate-shaped cut-out 16 that stretches out from the preceding end of Vib. 2 at an easy rate.After producing vibrating gyrosensor, measure resonant frequency, if necessary can by, for example Laser Processing and ultrasonic machining cutting (excision) but the cut-outs 16 of ends before being formed at Vib. 2.Thereby can easily meticulous adjusting resonant frequency.

Illustrate to Figure 17 as Fig. 2, vibrating gyrosensor shown in Figure 1 is so constructed, make to form second discontinuous construction of sintered plate 54 not of base layer 24 with such form, wherein provide Vib. 2,2 part is separated out, because the first plate shape part 6,6 by first not the thin plate layer 22 that produces of sintered plate 52 form.Owing to be difficult to like this, to such discontinuous construction location.In addition, there is a potential problem, promptly during the formation piezoelectric/electrostrictive film element, tends to produce distortion.Thereby preferably adopt a kind of like this technology, therein, in additive process, prepare and use a kind of continuous not sintered plate, after finishing stack and integration or roasting and integration, form aforesaid discontinuous part again.An example of this technology is shown among Figure 18.

That is, Figure 18 has represented to make a kind of effective technology of the vibrating gyrosensor that is shown in Fig. 7.In this course, produce base layer 24 second not sintered plate 54 provide with continuous slab shown in Figure 180.That is, the part 58,58 that is used to form Vib. 2,2 is connected on the part 60 that is used to form fixed frame 30 by coupling part 62,62, thus second not sintered plate 54 under the state that does not comprise discontinuous part, be used.With second not not sintered plate 56 stack of sintered plate 52 and the 3rd of sintered plate 54 and first, with their roastings and be incorporated into mutually-rise.After this, form piezoelectric/ electrostrictive film element 12,14 with integral way thereon, subsequently to first not the thin plate layer 22 that produces of sintered plate 52 carry out machining.In machining, or before or after the machining, by means of, for example the coupling part 62,62 of Laser Processing or ultrasonic machining cutting connection Vib. 2,2 and fixed frame 30 makes it separate from fixed frame 30.When 62,62 forming cutting tips at 60,60 o'clock from the coupling part, Vib. 2,2 frees from the restriction of fixed frame 30.Thereby obtain vibrating gyrosensor shown in Figure 7.

Do not exist in the sintered plate 54 structure of any discontinuous part not only can be used to realize having the sensor of this spline structure second as mentioned above therein, this structure comprises fixed frame 30,36, thereby 38 and framework 32 as Fig. 7 to shown in Figure 16 Vib. 2,2 around living, also can be used to realize having the sensor of this spline structure, this structure comprises that two Vib.s 2 that are positioned at as shown in Figure 5 and Figure 6, support bar 28 between 2, between Vib. 2,2 and support bar 28, form coupling part 62,62 like this, and the coupling part finally is cut at cutting tip 64,64 places.

In the manufacturing step of aforesaid vibrating gyrosensor and compound sensor, the presumptive area at thin plate layer 22 forms piezoelectric/ electrostrictive film element 12,14 as follows.

At first, for form the electrode film 12a that constitutes by material separately, 12c and piezoelectric film 12b in the presumptive area of thin plate layer 22, can adopt various known film build methods expediently, comprise, for example, thick-film methods such as serigraphy, application method is for example flooded, reach for example ion beam of film process, sputter, vacuum vapor deposition, ion plating, CVD and plating.But, to film build method without any restriction.Be to form piezoelectric film 12b, preferably adopt based on, for example serigraphy, the technology of flooding and applying ointment or plaster.In these technology, can obtain good operating performance by using principal ingredient on thin plate layer 22, to form piezoelectric film 12b as the paste or the paste of piezoelectric/electrostrictive porcelain particulate.When film formation method as described above forms piezoelectric/ electrostrictive film element 12,14 o'clock, these elements can not use any bonding agent and thin plate layer 22 to combine.So it is best using film formation method,, and can easily realize integrating because reliability and reproducibility are good.By utilizing, for example the pattern of silk screen print method and photolithography formation forms such film shape.Otherwise, also can be by utilizing for example laser treatment of mechanical processing method, section, and ultrasonic Treatment is removed unnecessary portions and is formed required pattern.

The structure of the piezoelectric/ electrostrictive film element 12,14 that integrally forms in the presumptive area of thin plate layer 22 to the shape of film with according to film formation method is without any restriction, and known up to now all can adopt rightly.For example, based on utilizing electric field to induce the structure of transversal effect of strain, also can adopt those except shown in Figure 3 rightly based on utilizing electric field to induce the structure of the longitudinal effect of strain.Can not produce the problem of any relevant film shape.The shape of film can be polygon-shaped arbitrarily, and for example triangle and rectangle are round-shaped, and is for example round, ellipse and annulus, pectination shape, mesh shape, and the special shape that obtains of the combination of aforementioned shapes.

Each film 12a that on the first and the 3rd plate shape part 6,10 that provides by thin plate layer 22, forms, 12b, 12c can heat-treat when forming film each, thereby and plate shape separately partly form whole structure.Perhaps, can form all films earlier, subsequently they be heat-treated simultaneously, so that each film can be simultaneously with integral way and the combination of plate shape part.Occasionally, when forming electrode film by means of film formation method, integrate for realizing in some cases, thermal treatment is not must be indispensable.

As for the heat treatment temperature that the film that will form as mentioned above and plate shape partly combine, the general temperature that adopts is about 800 ℃ to 1400 ℃, preferably is chosen in 1000 ℃ to the 1400 ℃ temperature in the scope.When to piezoelectric film 12b thermal treatment, be preferably in when heat-treating, come controlled atmospher by utilizing the evaporation source of forming by piezoelectric/electrostrictive material, so that avoid the constituent instability of piezoelectric film at high temperature.

To being used to constitute the electrode film 12a of the piezoelectric/electrostrictive film element that produces with preceding method, the material of 12c has no particular limits, as long as this material is a conductor, can resist the oxidizing atmosphere under the such high temperature of heat treatment temperature and sintering temperature.For example, this material may be a kind of simple material or a kind of alloy of metal.Also can be the pottery that for example insulate of metal or alloy and a kind of adjuvant and the potpourri of glass.In addition, when being the electric conductivity pottery, this material can not produce any problem yet.More suitably, preferably utilize principal ingredient to be high-melting-point noble metal platinum for example, palladium, rhodium, and alloy silver-palladium for example, silver-platinum, the electrode material of platinum-palldium alloy.

About aforesaid potpourri, in metal and alloy, add under the situation of pottery, preferably use and constitute first plate shape part and the 3rd plate shape partly material or the piezoelectric/electrostrictive material identical materials of describing later.With the addition of the material identical materials of plate shape part (volume ratio) 5% to 30% preferably.With the addition of piezoelectric/electrostrictive material identical materials be (volume ratio) 5% to 20%.Especially, aforesaid metal or alloy and being used to being constituted the material of plate shape part and piezoelectric/electrostrictive material mixes the potpourri that obtains to be used to form target electrode is useful.

The electrode 12a that uses above-mentioned material to form, 12c can have the suitable thickness that depends on use or applicable cases.As shown in Figure 3, for based on utilizing electric field to induce the type of the transversal effect of strain, the thickness of electrode of formation generally is not more than 15 microns, preferably is not more than 5 microns.As shown in figure 19, for based on utilizing electric field to induce the type of the longitudinal effect of strain, the thickness of the electrode of formation should be not less than 3 microns, preferably is not less than 10 microns, better is not less than 20 microns.

Any material all can be used as piezoelectric/electrostrictive material and be used to constitute the film shape piezoelectric layer 12b of piezoelectric/ electrostrictive film element 12,14 with generation, as long as this material list reveals electric field and induces strain, and for example piezoelectricity or electrostrictive effect.This material can be crystalline material or non-crystalline material.This material can be any semiconductor material, dielectric ceramic material, or ferroelectric ceramic material.This material can be the material that needs polarization to handle, and does not perhaps need the material that polarizes and handle.

Particularly, those of Cai Yonging can be used as piezoelectric/electrostrictive material and comprise in the present invention, for example, principal ingredient is the material of lead zirconate titanate (PZT system), principal ingredient is the material of lead magnesio-niobate (PMN system), principal ingredient is the material of niobium nickel lead plumbate (PNN system), principal ingredient is the material of lead zinc niobate, principal ingredient is the material of manganese niobium lead acid, principal ingredient is the material of tin lead antimonate, principal ingredient is the material of lead titanates, and principal ingredient is the material of barium titanate, and the compound substance of above-mentioned material.When principal ingredient is that material and the predetermined adjuvant that PZT is is added into given material, can not produce any problem in the time of for example in the material of PLZT system, these PLZT based materials contain the lanthanum as adjuvant, barium, niobium, zinc, the oxide of nickel and manganese, the perhaps compound of their other type.

The thickness of the piezoelectric/ electrostrictive film element 12,14 of Gou Chenging preferably is not more than 100 microns as mentioned above, preferably is not more than 50 microns, better is not more than 30 microns.

The present invention is specifically understood according to several embodiment in the front.But the present invention should not be subjected to the restriction of previous embodiment.Need should be appreciated that according to those skilled in the art's knowledge and can make various changes to the present invention without departing from the present invention, revise and improve.

For example, in illustrative each embodiment, for example provide compartment 18 to be used for supporting base base 4, fixed frame 30,36, or fixed part 34 be not even so that can influence fixed pan yet when Vib. 2,2 is made the vibration that is used to detect.But, in some cases, do not need the compartment that more provides such, depend on the shape or the structure of fixed pan.

In illustrative embodiment, for example, seat base 4, fixed frame 30,36, or fixed part bolt.But it also is feasible adopting the bonding and fixing such part of bonding agent.In this case, preferably adopt the whole lower surface of adhesive compartment 18.Available bonding agent comprises, for example, and epoxide resin type, acryl resin type, synthetic rubber type, heat molten type, cyanoacrylate type, polyurethane resin type bonding agent.

In illustrative vibrating gyrosensor according to the present invention, form middle part or the proximal end place that the first plate shape part 6 that detects piezoelectric/electrostrictive film element 12 is positioned at Vib. 2 with integral way thereon.But, shown in Figure 20 and 21, but also the first plate shape part 6 can be placed the preceding end of Vib. 2 to provide an one-piece construction that is extended to cut-out 16.In this case, put on the Coriolis force that detects piezoelectric/electrostrictive film element 12 and be reduced, sensitivity reduces.But this structure is favourable with regard to realizing small and exquisite size and disconnection aspect.

Below, will the 15th embodiment according to vibrating gyrosensor of the present invention be described with reference to Figure 22.

The vibrating gyrosensor of the 15th embodiment comprises the seat base 100 of a cuboid, its longitudinal direction stretches (being the x direction) along a certain direction in Figure 22, two are positioned on the side of base 100, and its main shaft is along the Vib. 102A that stretches (being the y direction) perpendicular to the direction of above-mentioned a certain direction in Figure 22,102B, two are positioned on another side of base 100, and the Vib. 102C that its main shaft stretches along the y direction, 102D, and frame plane is parallel to the plane that comprises x and y direction, is used for around seat base 100 and those four Vib. 102A to 1021) framework 104.

Two Vib. 102A separately, 102B and 102C, 102D is supported by seat base 100 in side separately, thereby they are stretched in parallel with each other, keeps predetermined spacing width " d " simultaneously.

Each Vib. 102A has the Vib. main body 106 of cuboid to 102D, and a thin-walled part shape coupling part (the second plate shape part) 108 that Vib. main body 106 is connected to seat base 100.Coupling part 108 is stretched over seat base 100 from the lateral middle of an end face of Vib. main body 106.The height of coupling part 108 height with Vib. main body 106 basically is identical, and its width is realized with the same manner of describing in the 1st embodiment (see figure 1) less than the width of Vib. main body 106.

One has substantially and runs through formation for the opening 110 of rectangular planar shape at the middle part of framework 104.Opening 110 penetrates framework 104 in the short transverse of framework 104, and aperture area is wide enough so that opening can be around 100 and four Vib. 102A of seat base to 102D.Opening 110 is having rectangular slits 112 corresponding to 100 liang of vertically terminal parts of seat base.Distance between two otch, 112 bottoms is greater than the length of seat base 100 longitudinal directions.The side of each otch 112 faces toward the side of seat base 100 in the part near opening 110.That is, seat base 100 is formed like this, makes two ends of its longitudinal direction be inserted into respectively in the corresponding otch 112.

Be connected to two Vib. 102A separately of basic 100 two sides of seat, 102B and 102C, 102D have the drive part (the 3rd plate shape part) 114 of plate shape, and this part is a thin-walled in short transverse, and is formed at respectively between each Vib. main body 106.In illustrative embodiment shown in Figure 22, the upper surface of each drive part 114 is placed on Vib. main body 106 upper surfaces one side, and is positioned at the position near coupling part 108.In fact each drive part 114 is disposed in upper surface one side of Vib. main body 106.Drive part is convex or protruding downwards, thereby produces a kind of structure, therein these parts (leaf spring structure) not in identical plane but strictly speaking.

Near two terminal two sides surface portions of present basic 100 longitudinal directions, and otch 112 is the plate shape part 116 of thin-walled shape facing to having between the aforementioned surfaces side surface partly on short transverse.In illustrative embodiment shown in Figure 22, the upper surface of each plate shape part 116 is described to and the upper surface of seat base 100 and the upper surface flush of framework 104.But, in fact, although each plate shape part 116 is arranged on present upper surface-side of basic 100 and on upper surface one side of framework 104, each plate shape part 116 is convex or protruding downwards.Strictly speaking, each plate shape part 116 has such structure, and they are not to be disposed in (leaf spring structure) in the same plane therein.

In the vibrating gyrosensor according to the 15th embodiment, 100, four Vib. 1 02A of seat base are to 102D, and 108, two drive parts 114 in 104, four coupling parts of framework and four plate shape parts 116 all are the integral roasting product slate by pottery.This vibrating gyrosensor also comprises the driving piezoelectric/electrostrictive film element 118 that is formed on the drive part 114 and is formed at detection piezoelectric/electrostrictive film element 120 on the plate shape part 116.So the drive unit that is used for vibrating Vib. 102 in the mode of excitation is by drive part 114 and drive piezoelectric/electrostrictive film element 118 and constitute, test section 124 is by plate shape part 116 and detect piezoelectric/electrostrictive film element 120 and constitute.When on driving piezoelectric/electrostrictive film element 118, applying electric power and making its work, two Vib. 102A separately, 102B and 102C, 102D is in bending, on the axial direction relative to each other of x, vibrate, that is, in the plane of arrangement at place, make on their near each other or directions of separating and vibrating.

Coupling part 108 between Vib. 106 and seat base 100 is described now.The ratio of width to height of coupling part 108 (width: highly) be preferably in 1: 1.2 to 1: 1000 the scope, better in 1: 1.8 to 1: 50 scope.It is owing to following reason that the ratio of width to height is designed in such scope.That is, if the ratio of width to height of coupling part 108 greater than 1: 1.2, to 102D, can produce unnecessary vibration along the z direction of principal axis at Vib. 102A.Consequently, on test section 124, produce unnecessary vibration.On the other hand, if this ratio of width to height less than 1: 1000, just is difficult to handle and processing coupling part 108.Consequently, machining precision reduces.

The front has been understood the integral roasting of pottery and the formation of piezoelectric/electrostrictive film element in detail, will save explanation to them in this part.

In the vibrating gyrosensor according to the 15th embodiment, when driving piezoelectric/electrostrictive film element 118 was operated, drive part 114 was out of shape.So, two Vib. 102A separately, 102B and 102C, 102D makes excited vibration on the axial direction relative to each other of x.

Under so a kind of state, two Vib. 102A separately wherein, 102B and 102C, 102D is vibrated, when winding perpendicular to comprising that when applying an angular velocity, a power acts on the plate shape part 116 of test section 124 along Y direction the direction (around son axle shown in Figure 22) of described a certain direction with the plane of basic 100 direction of extension of seat.This power makes test section 124 make transverse vibration.That is, produce whirling vibration, and should vibration detect by the piezoelectric/electrostrictive film element 120 of test section 124 form with electromotive force (voltage) around the z axle.

In the present invention, all Vib.s 102, seat base 100, and test section 124 all is the integral roasting product slate by pottery.Thereby, in the material that constitutes vibrating gyrosensor, do not have magnetic material, for example traditional iron-nickel-chromium.So the performance of sensor can not be subjected to the influence of environmental magnetic field.

Test section 124 has plate shape part 116, and plate shape part 116 is much thin in its short transverse ratio vibrator main body 106, thereby has low rigidity.So, when aforesaid angular velocity causes vibration around the z axle, can obtain big strain or distortion in plate shape part 116.Thereby can greatly improve the detection sensitivity that is formed at the detection piezoelectric/electrostrictive film element 120 on the plate shape part 116.

Especially, in vibrating gyrosensor, just in test section 124, produce vibration when only applying angular velocity according to the 15th embodiment.So, under the situation that does not apply angular velocity, very little from the output (no-voltage) that detection piezoelectric/electrostrictive film element 120 obtains.So greatly improved detection sensitivity.In addition, 124 possibilities that fatigue breaks take place are lowered in the test section owing to vibrate, thereby the serviceable life of vibrating gyrosensor is longer.

Vibrating gyrosensor has the angular velocity that is not to be used to measure the main shaft (around the y axle) around Vib. 106, winds perpendicular to comprising the structure of described a certain direction with the angular velocity of the axle (around the z axle) on the plane of basic 100 direction of extension of seat but be used to measure.So, Vib. 102, seat base 100 and framework 104 can be done thinlyyer on their short transverse.Be convenient to like this realize that the vibrating gyrosensor size is little, in light weight.

Four Vib. 102A have such structure to 102D, and therein, each Vib. main body 106 comprises non-thin-walled plate, and each Vib. main body 106 is by having the supporting individually of high-intensity seat base 100.So each Vib. main body 106 self can have big quality.Thereby the Coriolis force (Fc=2mv Ω) that produces in the 102D at Vib. 102A is increased, thereby can obtain high sensitivity for the detection of the strain that is caused by detecting device 124.

Below, with reference to Figure 23 vibrating gyrosensor according to the 16th embodiment is described.Element or part corresponding to element shown in Figure 22 or part are represented with same reference number, and their same explanation is removed.

As shown in figure 23, identical with structure (seeing Figure 22) basically according to the structure of the vibrating gyrosensor of the 16th embodiment according to the vibrating gyrosensor of the 15th embodiment.But test section 124 is in following some difference.

Promptly, test section 124 comprises a ceramic annulus spare 130 that forms with integral way, this annulus spare side surface of otch 112 and basic 100 longitudinal directions of seat two near terminal both side surface partly between, one is provided in the annulus spare 130 with whole and bridge joint mode, the plate shape part 116 that is parallel to the direction of extension (x direction of principal axis) of seat base 100, and a detection piezoelectric/electrostrictive film element 120 that is formed on the plate shape part 116.

Vibrating gyrosensor according to the 16th embodiment is operated as follows.Promptly, under so a kind of state, two Vib. 102A separately wherein, 102B and 102C, 102D is vibrated according to the operation that drives piezoelectric/electrostrictive film element 118, when winding perpendicular to the direction (around the z axle) that comprises the described a certain direction and the plane of basic 100 direction of extension of seat when applying an angular velocity, a power acts on the test section 124 along Y direction.The effect of this power is vibrated annulus spare 130, becomes major axis or minor axis simultaneously and points to the axial ellipse of y.Annulus spare 130 detects in the form of the detected piezoelectric/electrostrictive film element 120 of the axial vibration of y with electromotive force (voltage).In the 16th embodiment, test section 124 is measured by the distortion of annulus spare 130 by detecting piezoelectric/electrostrictive film element 120 indirectly in the axial strain of y.The effect of this embodiment is that the persistence of vibrating gyrosensor is good.

In according to the 15th and the 16th embodiment, with, for example aforesaidly regulate resonant frequency according to the identical method of the vibrating gyrosensor (see figure 1) of the 1st embodiment.Under by situation about representing, will specifically describe adjusting to resonant frequency with reference to Figure 24 and Figure 25 according to the vibrating gyrosensor of the 15th embodiment.

In fact pressed following formation to regulate resonant frequency according to the vibrating gyrosensor of the 15th embodiment.That is, as shown in figure 24, thin-walled first projection 132 is formed by pottery with integral way, and it is from separately two Vib. 102A, 102B and 102C, and each free end of 102D is protruding.In addition, thin-walled second projection 134 is formed by pottery with integral way, and it is two terminal protruding from seat base 100 longitudinal directions.

Driving resonance frequencies is regulated by first projection 132 that can repair processing, detects resonant frequency and is regulated by second projection 134 that can repair processing.

In the present embodiment, driving resonance frequencies can be handled (excision processing) and regulate by first projection 132 being applied finishing, and the detection resonant frequency can be handled (excision processing) and regulate by second projection 134 being applied finishing.That is, the resonant frequency that drives and detect can be conditioned respectively independently.So, can avoid the inconvenience of regulating, for example can avoid the adjusting of driving resonance frequencies is had influence on the detection resonant frequency.

The shape of first and second projections 132,134 can be by following formation.For example, shown in Figure 124, first and second projections 132,134 can be constructed to plate shape, and are thin-walled on short transverse with respect to Vib. main body 106 separately.Perhaps, as shown in figure 25, first and second projections 132,134 can be constructed to plate shape, and the direction of extension (x direction of principal axis) of being present base 100 with respect to Vib. main body 106 separately are thin-walleds.

The benefit that is shown in the shape of Figure 24 be by means of, for example laser beam can realize easily that to the scanning of upper surface finishing handles.For the shape that is shown in Figure 25, the zone that be subjected to repairing processing is disposed in two Vib. 102A perpendicular to separately, and 102B and 102C on the whole surface of the direction of vibration of 102D, thereby can obtain fabulous mass balance.In this case, the finishing processing is to adopt the impact of ultrasound wave and so on to realize to remove unnecessary portions after for example resembling laser irradiation by employing.

In fact, when regulating resonant frequency,, detect resonant frequency and can be subjected to considerable influence if first projection is repaired processing to regulate driving resonance frequencies.But even when second projection being repaired processing with adjusting detection resonant frequency, driving resonance frequencies can not be affected.Thereby, when in fact regulating resonant frequency, preferably at first handle first projection 132 and regulate driving resonance frequencies by finishing, handle second projection 134 by finishing more subsequently and regulate the detection resonant frequency.

Below, with reference to Figure 26 vibrating gyrosensor according to the 17th embodiment is described.Element or part corresponding to element shown in Figure 22 or part are represented with same reference number, and their same explanation is removed.

As shown in figure 26, the same with building method basically according to the building method of the vibrating gyrosensor of the 17th embodiment according to the vibrating gyrosensor of the 15th embodiment.But the plate shape drive part 114 that the former and the latter's difference part is drive unit 122 is arranged in the mode of the center of gravity that is connected Vib. main body 106 separately respectively.

In the present embodiment, compare (for example), two Vib. 102A separately with near the vibrating gyrosensor drive part 114 is disposed in coupling part 108 according to the vibrating gyrosensor of the 15th embodiment, 102B and 102C, 102D can be effectively mutually near with separate.So the advantage of present embodiment is that the detection sensitivity of test section 124 can be enhanced.

By means of the finishing processing adjusting of vibrating gyrosensor resonant frequency can another kind of method be carried out, to replace finishing processing aforesaid first and second projections 132,134 (seeing Figure 24 and 25).That is, as shown in figure 27, the drive part 114 between each Vib. main body 106, and the plate shape part 116 of the test section 124 between present base 100 and the framework 104 can have the width of broad in advance respectively.Change the width of drive part 114 and plate shape part 116 rightly.Thereby the resonant frequency that scalable drives and detects.

In this control method, the resonant frequency that drives and detect is not to regulate by the quality that changes Vib. 106 and seat base 100, but regulates by the elastic constant that changes drive part 114 and plate shape part 116.

Particularly, when driving frequency is changed, those two be arranged between each Vib. main body 106 plate shape drive part 114 by means of, for example Laser Processing or ultrasonic machining are cut.When detecting frequency and be changed, those four arrange between present base 100 and the framework 104 plate shape part 116 by means of, for example, Laser Processing or ultrasonic machining are cut.

In the present embodiment, there is no need to form first projection 132 and second projection 134 at the free end of each Vib. main body 106 and two ends of present basic 100 longitudinal directions respectively.So, can simplify manufacturing step.In addition, be thin-walled owing to be subjected to repairing the zone of processing, so resonant frequency is easy to regulate.Different with the method for regulating resonant frequency by the change quality, the method for present embodiment also is favourable at this on the one hand, i.e. the adjusting of driving resonance frequencies and detection resonant frequency is fully separate each other.

The the 15th to 17 embodiment has illustrated the formation of drive part 114 between Vib. main body 106.In addition, drive part 114 also can be formed between seat base 100 and the Vib. main body 106.Several examples of this layout are shown among Figure 28 and Figure 29 as embodiment 18 and 19.

That is, as shown in figure 28, comprise drive part 114, each drive part 114 present base 100 and place the end face of a Vib. main body 106 of basic 100 1 sides to be close between the part of framework 104 to form according to the vibrating gyrosensor of embodiment 18.As shown in figure 29, vibrating gyrosensor according to embodiment 19 comprises drive part 114, each drive part 114 present bases 100 and corresponding to placing basic 100 1 side, the end face of Vib. main body 106 are close between the part in zone at center of basic 100 longitudinal direction and form.

In two vibrating gyrosensors according to the 18th and the 19th embodiment, drive part 114 is not to be formed between the adjacent Vib. main body 106.So, can dwindle the spacing distance between the adjacent Vib. main body 106, thereby can be convenient to realize the vibrating gyrosensor compact size.

In the 15th to the 19th embodiment, be formed at coupling part 108 between each Vib. main body 106 and the seat base 100 and be disposed in a position on each Vib. main body 106, this position is positioned at the core of Vib. main body 106 present bases 100 1 side end faces.But it is not must be indispensable that this position is in this core.For example, as shown in figure 30, coupling part 108 can be disposed in the position that forms on each Vib. main body 106 on the part of the contiguous framework 106 of end face of Vib. main body 106 present base 100 1 sides (the 20th embodiment).Although not expression among the figure, this position also can be positioned on the part corresponding to the zone at the center of basic 100 longitudinal directions of the contiguous seat of the end face of the Vib. main body 106 of present base 100 1 sides.

Arrive shown in Figure 33 as Figure 31, the constant vibration of the drive part 114 that produces for the driving piezoelectric/electrostrictive film element of keeping by drive unit 122 118, also can preferably adopt a kind of like this mechanism, therein, a signal that obtains from the reference piezoelectric/electrostrictive film element 142 of reference unit 140 is sent to drive unit 122 in the mode of feedback, and reference unit 140 is positioned at the position that is different from drive unit 122.

That is, the vibrating gyrosensor according to the 21st embodiment that is shown in Figure 31 is so constructed, and the vibrating gyrosensor according to the 17th embodiment that promptly is shown in Figure 26 also comprises near the reference unit 140 the coupling part 108 that is positioned at each Vib. main body 106.The constructive method of reference unit 140 constructive method with drive unit 122 basically is the same, it comprises one is the plate shape reference section (the 4th plate shape part) 144 of thin-walled shape in short transverse, and a reference piezoelectric/electrostrictive film element 142 that is formed on the reference section 144.Reference section 144 is to be formed by pottery with integral way with drive part 114 same methods.

The signal that obtains from the reference piezoelectric/electrostrictive film element 142 of reference unit 140 is sent in the mode of feedback and drives piezoelectric/electrostrictive film element 118, with the constant vibration of the drive unit 122 that forms on the connecting line that is given in the center of gravity that connects each Vib. main body 106.

In aforesaid embodiment, the plate shape part that on the connecting line of the center of gravity that connects each Vib. main body 106, forms, be used as drive unit 122 with the piezoelectric/electrostrictive film element that is formed on this plate shape part, be positioned near plate shape part the coupling part 108 of each Vib. main body 106 and the piezoelectric/electrostrictive film element that is formed on this plate shape part and be used as reference unit 140.But, also can adopt so a kind of layout, wherein the position of drive unit 122 and reference unit 140 is intercoursed.

Below, the vibrating gyrosensor according to the 22nd embodiment that is shown in Figure 32 is so constructed, and the vibrating gyrosensor according to the 18th embodiment that promptly is shown in Figure 28 also comprises at seat base 100 with corresponding to the reference unit 140 between the part in the zone at the basic 100 longitudinal direction centers of the contiguous seat of end face of the Vib. main body 106 of present base 100 1 sides.

The signal that obtains from the reference piezoelectric/electrostrictive film element 142 of reference unit 140 is sent in the mode of feedback and drives piezoelectric/electrostrictive film element 118, to provide the constant vibration of the drive unit 122 between the part of the contiguous framework 104 of end face of the Vib. main body 106 of seat base 100 and present base 100 1 sides.

In aforesaid embodiment, plate shape part between the part of the contiguous framework 104 of end face of the Vib. main body 106 of seat base 100 and present base 100 1 sides, be used as drive unit 122 with the piezoelectric/electrostrictive film element that is formed on this plate shape part, be used as reference unit 140 at seat base 100 with corresponding to plate shape part between the part in the zone at the center of basic 100 longitudinal directions of the contiguous seat of end face of the Vib. main body 106 of present base 100 1 sides and the piezoelectric/electrostrictive film element that is formed on this plate shape part.But, also can adopt so a kind of layout, wherein the position of drive unit 122 and reference unit 140 is intercoursed.

Below, the vibrating gyrosensor according to the 23rd embodiment that is shown in Figure 33 is so constructed, and the vibrating gyrosensor according to the 17th embodiment that promptly is shown in Figure 26 also comprises at seat base 100 with corresponding to the reference unit 140 between the part in the zone at the basic 100 longitudinal direction centers of the contiguous seat of end face of the Vib. main body 106 of present base 100 1 sides.

The signal that obtains from the reference piezoelectric/electrostrictive film element 142 of reference unit 140 is sent in the mode of feedback and drives piezoelectric/electrostrictive film element 118, to provide the constant vibration of the drive unit 122 on the connecting line that is formed at the center of gravity that connects each Vib. main body 1 06.

In aforesaid embodiment, be positioned at the plate shape part on the connecting line of the center of gravity that connects each Vib. main body 106, be used as drive unit 122 with the piezoelectric/electrostrictive film element that on this plate shape part, forms, be used as reference unit 140 at seat base 100 and corresponding to plate shape part between the part in the zone at the center of basic 100 longitudinal directions of the contiguous seat of end face of the Vib. main body 106 of present base 100 1 sides and the piezoelectric/electrostrictive film element that on this plate shape part, forms.But, also can adopt so a kind of layout, wherein the position of drive unit 122 and reference unit 140 is intercoursed.

Arbitrary embodiment according to the 1st to the 23rd has the structure of so-called forced vibration system, and wherein Vib. 2 (or 102) is directly vibrated by drive part.But, to shown in Figure 36, also can adopt structure based on free oscillating system as Figure 34.

At first, explanation is shown in the vibrating gyrosensor of Figure 34 according to the 24th embodiment.The vibrating gyrosensor that illustrates has such structure, wherein comprise plate shape and execute the part 150 of shaking (the 5th plate shape part), it stretches between seat base 100 and each Vib. main body 106 and along being parallel to a direction of the longitudinal direction of base 100, the thin-walled part shape the first pontes 152 (the 6th plate shape part) that is used for Connection Block base 100 and Shi Zhen part 150, be used to connect the thin-walled part shape coupling part 154 (the 7th plate shape part) of Vib. main body 106 and Shi Zhen part 150, and execute the drive unit 122 that shakes between the part 150 at each.

First and second coupling parts 152,154 have the size relationship identical with the coupling part 108 of aforesaid vibrating gyrosensor according to the 15th to the 23rd embodiment.The height of height fundamental sum Vib. main body 106 of executing the part 150 of shaking is identical.Execute the width of the width of the part 150 of shaking, be a bit larger tham the width of first and second coupling parts 152,154 less than Vib. main body 106.

Be shown in the same basically with formation of Figure 35 according to the vibrating gyrosensor of the 24th embodiment according to the formation of the vibrating gyrosensor of the 25th embodiment.But the former and the latter's difference is that drive unit 122 is between the part of the contiguous framework 104 of the end face of executing the part 150 of shaking of seat base 100 and present base 100 1 sides.

Be shown in the same basically with formation of Figure 36 according to the vibrating gyrosensor of the 24th embodiment according to the formation of the vibrating gyrosensor of the 26th embodiment.But the place that the former is different from the latter is that drive unit 122 shakes at seat base 100 with corresponding to executing of seat base 100 1 sides between the part in zone at the basic 100 longitudinal direction centers of the contiguous seat of end face of part 150.

In vibrating gyrosensor according to the 24th to 26 embodiment, by with drive unit 122 to placing the part 150 of shaking of executing between Vib. main body 106 and the seat base 100 to apply vibration, thereby Vib. 102A is directly vibrated to 102D.Because the Vib. main body is subjected to the influence of drive part 114 hardly, thus these vibrating gyrosensors some is favourable following.That is, (1) when Vib. 102A when 102D is vibrated, be easy to obtain big amplitude, (2) are almost interference-free at Vib. 102A vibrational waveform in the 102D, and may obtain the sine wave oscillations waveform of rule.

For adopting iron-nickel-chromium to be used for Vib. in many cases to the vibrating gyrosensor that uses, wherein the Ben Chong piezoelectric/electrostrictive film element that has electrode is fixed on the Vib. by bonding so far.So, must use, for example, scolder or silver-colored paste are connected to outer lead on the electrode of piezoelectric/electrostrictive film element.On this process, for example, scolder, silver-colored paste reaches outer lead self and is equivalent to added weight, has greatly influenced the vibration performance of Vib., makes and makes the vibrating gyrosensor difficulty.

The vibrating gyrosensor of known another kind of type adopts piezoelectric ceramics as Vib..But the common vibrating gyrosensor of this vibrating gyrosensor of this point and front does not have the difference of essence on lead is connected to as the part of vibration.The problem that produces is: (a) the coupling part reliability with outer lead is low, and the skew in (b) making is big.

On the contrary, have such advantage according to the vibrating gyrosensor of aforesaid the 1st to the 26th embodiment, outer lead can easily be connected on the electrode pair of each piezoelectric/electrostrictive film element 118,120.

This advantage will be being that the basis describes according to the vibrating gyrosensor that is shown in the 17th embodiment of Figure 26.As shown in figure 37, this vibrating gyrosensor is except drive unit 122 and test section 124 electrode pair separately, by the integral roasting product slate of pottery (non-conductive material).So, be used to constitute the electrode pair of the piezoelectric/electrostrictive film element 118 of drive unit 122, two outer leads (160 of drawing from this electrode pair, 162) and (164,166), be used to constitute the electrode pair of the piezoelectric/electrostrictive film element 120 of test section 124, and two outer leads (168 of drawing from this electrode pair, 170), (172,174), (176,178) and (180,182) available identical materials form respectively according to film formation method.

To specifically describe the mode that lead forms below.From being used to form two leads (160 of drawing at the electrode pair of the piezoelectric/electrostrictive film element 118 of the drive unit 122 between each Vib. main body 1 06,162) and (164,166), formed like this, make them pass through the upper surface of the Vib. main body 106 of contiguous each electrode, the upper surface of coupling part 108, the upper surface of seat base 100, and contiguous Vib. 102A, the upper surface of the plate shape part 116 of the test section 124 of 102B is introduced to frame 104.

From existing two leads (168,170) that the electrode pair of the piezoelectric/electrostrictive film element 120 of each test section 124 is drawn, (172,174), (176,178) and (180,182) are formed like this, make them be introduced to frame 104 from each test section 124.

This material as mentioned above, the material that is used to constitute electrode and lead had no particular limits, as long as can be resisted the oxidizing atmosphere under heat treatment temperature and the sintering temperature.For example, this material can be simple metal or alloy.This material is a metal or alloy and an adjuvant, for example potpourri of insulating ceramics and glass also.In addition, when being conductivity ceramics, this material can not have problems yet.More suitably, preferably use be divided into the high-melting-point noble metal main being divided into, platinum for example, palladium, rhodium, and alloy, silver-palladium for example, silver-platinum, the electrode material of platinum-palladium.

About forming the method for electrode and lead, can suitably adopt, for example, and thick-film methods, for example serigraphy, application method is for example flooded, and reaches for example ion beam of film process, sputter, vacuum vapor deposition, ion plating, CVD and plating.But, to film build method without any restriction.

Below, will further specify other embodiment.The embodiment that the following describes can be understood that to be shown in the variant embodiment of Fig. 1 to each embodiment of Figure 21.So, corresponding to Fig. 1 in Figure 21 element or part with same reference number representation, the explanation of repetition will be omitted.

At first, be shown in Figure 38 according to the vibrating gyrosensor of the 27th embodiment be shown in constituting of Fig. 1 according to the similar substantially mode of the vibrating gyrosensor of the 1st embodiment.But the former is different from latter's part and is: the 3rd plate shape part 10 that has piezoelectric/electrostrictive film element 14 thereon forms with integral way, thereby makes two plate shape parts 8 and the 3rd plate shape part 10 bridge joints.

Be shown in Figure 39 according to the vibrating gyrosensor of the 28th embodiment be shown in constituting of Fig. 5 according to the similar substantially mode of the vibrating gyrosensor of the 3rd embodiment.But, the former is different from latter's part and is: thin-walled the 3rd plate shape part 10 is formed at support bar 28 with integral way and places between the second plate shape part 8 about support bar, drive piezoelectric/electrostrictive film element 14 and be formed at respectively on the 3rd plate shape part 10, thereby two Vib.s 2 vibrate on direction relative to each other in the mode of excitation about driving piezoelectric/electrostrictive film element 14 and make by operation.

Be shown in Figure 40 according to the vibrating gyrosensor of the 29th embodiment be shown in constituting of Fig. 7 according to the similar substantially mode of the vibrating gyrosensor of the 5th embodiment.But, the former is different from latter's part and is: thin-walled the 3rd plate shape part 10 is formed at facing between the side of second plate portion 8 of two second plate shape parts 8 and fixed frame 30 with integral way, and driving piezoelectric/electrostrictive film element 14 integral way are formed on the 3rd plate shape part 10 according to film formation method.

Be shown in Figure 41 according to the vibrating gyrosensor of the 30th embodiment be shown in constituting of Fig. 9 according to the similar substantially mode of the vibrating gyrosensor of the 7th embodiment.But, the former is different from latter's part and is: thin-walled the 3rd plate shape part 10 is formed between two the second plate shape parts 8 that place the fixed frame 30 with rectangular frame structure with integral way, and driving piezoelectric/electrostrictive film element 14 is formed at the 3rd plate shape part 10 with integral way according to film formation method.

Vibrating gyrosensor according to the 27th to the 30th embodiment is so constructed, and makes directly not drive Vib. 2, but drives the second plate shape part 8.So Vib. 2 can not constituted the restriction of the 3rd plate shape part 10 of drive unit 122 and be done vibration.Thereby the Q factor of Vib. 2 is increased, thereby vibration can not decay apace.So just be easy to handle by detecting piezoelectric/electrostrictive film element 12 detected detection signals.In addition, the Oscillation Amplitude of Vib. 2 increases, and can further improve sensitivity.

In the vibrating gyrosensor according to the 1st to the 30th embodiment, the first plate shape part, 6 ratio vibrators 2 that constitute the test section are much thin, and first plate shape part and Vib. are combined with each other.But on function, the first plate shape part 6 or test section obviously are different from Vib. 2.

Each following embodiment is so constructed, and makes Vib. 2 and test section all be combined with each other on 26S Proteasome Structure and Function.In order to improve sensitivity, such embodiment is more favourable.To explain such embodiment below.Corresponding to Fig. 1 in Figure 21 element or part with same reference number representation, the explanation of repetition will be omitted.

At first, the vibrating gyrosensor according to the 31st embodiment that is shown in Figure 42 constitutes with integral way by the integral roasting product that adopts pottery, has such structure, comprise a rectangular block shape seat base 4 with predetermined thickness, two second plate shape parts 8, they outwards stretch along the direction perpendicular to seat base 4 vertical sides from the proximal end of seat base 4 vertical sides, simultaneously each other apart from a predetermined spacing distance, two first plate shape parts 6, each first plate shape partly has one and is the flat shape of sheet (wide and long) substantially, outwards stretch along the direction perpendicular to vertical side of seat base 4 from the proximal end of the free end top part of each second plate shape part 8 on this plane, simultaneously each other apart from a predetermined spacing distance (referring to Figure 43), and one have substantially and be the 3rd plate shape part 10 of strip flat shape, by two second plate shapes of its bridge joint part 8.In the present embodiment, Vib. 2 is made of the first plate shape part 6.

The width of the second plate shape part 8 is littler than the width of the first plate shape part 6.The second plate shape part 8 is thin-walled part shape parts, and stretch along the direction perpendicular to the first plate shape part 6 on its main surface.The first plate shape part 6 (Vib. 2) is connected to seat base 4 with integral way by the second plate shape part 8.

The 3rd plate shape part 10 is connected between near the present base 4 of the second plate shape part 8 the part with integral way.

In vibrating gyrosensor according to the 31st embodiment, to detect piezoelectric/electrostrictive film element 12 and be formed on the almost entire upper surface of each first plate shape part 6, the first plate shape makes its broad when partly forming.Driving piezoelectric/electrostrictive film element 14 is formed on the almost entire upper surface of the 3rd plate shape part 10.

In the vibrating gyrosensor according to the 32nd embodiment, Vib. 2 is made of the first wide and long plate shape part 6.Thereby Vib. 2 has big quality and big momentum.Consequently, by driving speed (∝ amplitude) increase that vibration causes.So, can further improve sensitivity.In addition, detecting piezoelectric/electrostrictive film element 12 is formed on the almost whole surface of the first plate shape part 6.Thereby, can accumulate a large amount of electric charges, thereby this embodiment is useful in current detecting system.

Be shown in Figure 44 according to the vibrating gyrosensor of the 32nd embodiment to constitute with the similar substantially mode of vibrating gyrosensor (referring to Figure 42) according to the 31st embodiment.But the former is different from latter's part and is: heavy wall bulk portion 70 is formed at respectively between the first plate shape part 6 and the second plate shape part 8 with integral way.

In being shown in the vibrating gyrosensor according to the 31st embodiment of Figure 42, the first plate shape part 6 directly is formed on the second plate shape part 8.So from the viewpoint of intensity, the marginal portion between the first plate shape part 6 and the second plate shape part 8 is disadvantageous.But in the vibrating gyrosensor according to the 32nd embodiment, the existence of bulk portion 7 has increased the intensity of marginal portion.Thereby present embodiment helps improving reliability.

Next, be shown in Figure 45 according to the vibrating gyrosensor of the 33rd embodiment be shown in constituting of Figure 42 according to the similar substantially mode of the vibrating gyrosensor of the 31st embodiment.But the former is different from latter's part and is: seat base 4 is provided as rectangular frame 32.Two second plate shape parts 8 form with integral way, make them be parallel to the direction stretching, extension of the long side surface of framework 32, the certain spacing distance of mutual distance simultaneously from the proximal end edge of a short side of the inner frame metope of framework 32.

For example, the vibrating gyrosensor according to the 31st embodiment that is shown in Figure 42 comprises block seat base 4.So, will there be the problem of installing in a vibrating gyrosensor like this, promptly when adopting installation of bonding agent or analog and holder base 4, what be used for fixing is regional little, and there is a problem on the intensity, that is, the stability of seat base 4 will be lowered, and vibration is passed to seat base 4 apace.But in the present embodiment, seat base 4 forms with framework 32 are provided, thereby have increased fixing degrees of freedom.In addition, also improved stability.So, can solve the problem of front, thereby this embodiment is more appropriate actually.

Below, be shown in Figure 46 according to the vibrating gyrosensor of the 34th embodiment to constitute with the similar substantially mode of vibrating gyrosensor (Figure 45) according to the 33rd embodiment.But the former is different from latter's part and is: heavy wall bulk portion 70 is formed at respectively between the first plate shape part 6 and the second plate shape part 8 with integral way.

In the present embodiment, the existence of bulk portion 7 can increase the intensity of the marginal portion between the first plate shape part 6 and the second plate shape part 8.In addition, owing to used framework 32, from installing and stable viewpoint, this present embodiment is favourable.

Below, be shown in Figure 47 according to the vibrating gyrosensor of the 35th embodiment to constitute with the similar substantially mode of vibrating gyrosensor (Figure 45) according to the 33rd embodiment.But, the former is different from latter's part and is: form a plurality of grooves 72 at the back side of the first plate shape part 6, as shown in figure 48, detecting piezoelectric/electrostrictive film element 12 position corresponding to these a plurality of grooves 72 on the first plate shape part, 6 upper surfaces forms with a form of arranging island.The embodiment that is shown in Figure 47 has illustrated such structure, and its further groove 72 has circular profile, and detection piezoelectric/electrostrictive film element 12 has circular planar form.

In vibrating gyrosensor according to the 33rd embodiment, on the first plate shape part 6, form the place of groove 72, intensity is lowered.So when the first plate shape part 6 during by the Coriolis force deformation, the strain that produces in the part that forms groove 72 is greater than the strain that obtains in the part that does not have groove 72.Thereby, detect piezoelectric/electrostrictive film element 12 by forming in part corresponding to groove 72, can obtain big detection output.Can further improve sensitivity like this.

Below, be shown in Figure 49 according to the vibrating gyrosensor of the 36th embodiment be shown in constituting of Figure 47 according to the similar substantially mode of the vibrating gyrosensor of the 35th embodiment.But the former is different from latter's part and is: heavy wall bulk portion 70 is formed at respectively between the first plate shape part 6 and the second plate shape part 8 with integral way.

In this embodiment, the existence of bulk portion 70 can increase the intensity of the marginal portion between the first plate shape part 6 and the second plate shape part 8.In addition, owing to can obtain big output, from the aspect of improving of high reliability and sensitivity, present embodiment is favourable.

Aforesaid vibrating gyrosensor according to the 35th to the 36th embodiment has illustrated such structure, wherein, detect piezoelectric/electrostrictive film element 12 and form with the form of row's island on the upper surface of the first plate shape part 6, each detects piezoelectric/electrostrictive film element and has the basic circular flat shape that is.On the other hand, shown in Figure 50 and 51, each groove 72 (seeing Figure 48) and detection piezoelectric/electrostrictive film element 12 can all be square or rectangle (the 37th and 38 embodiment).Groove 72 and detection piezoelectric/electrostrictive film element 12 can imagine that the flat shape that obtains comprises, for example aforesaid circle and rectangular shape, and diamond shape.To the not special restriction of the shape of these elements.

Next, be shown in Figure 52 according to the vibrating gyrosensor of the 39th embodiment be shown in constituting of Figure 42 according to the similar substantially mode of the vibrating gyrosensor of the 31st embodiment.But, the former is different from latter's part and is: the fixed part 74 of holder base 4 is formed on the surface on the surface that forms the second plate shape part 8 with integral way, and the horizontal direction of a present base 4 is that supporting part (the 5th plate shape part) 76 of thin-walled shape is formed between seat base 4 and the fixed part 74 with integral way.

Promptly, vibrating gyrosensor according to the 39th embodiment has such structure, wherein tuning fork 78 is made of seat base 4, two second plate shape parts 8, two Vib.s 2 (the first plate shape part 6), and tuning fork 78 is connected to fixed part 74 with integral way by supporting part (the 5th plate shape part) 76.

Usually, the oscillation mode that when tuning fork 78 is vibrated by any stationary installation supporting with strut and tuning fork 78, obtains, two Vib.s 2 that comprise a tuning fork are at the oscillation mode of relative to each other direction vibration, and another two Vib. 2 is respectively at the oscillation mode of identical direction vibration.

The needed oscillation mode of vibrating gyrosensor is last oscillation mode (at the oscillation mode of the vibration of direction relative to each other).Back one oscillation mode is unnecessary to vibrating gyrosensor.So, when the frequency of the oscillation mode of needs obviously is different from the frequency of unnecessary oscillation mode, can easily identify this two kinds of oscillation modes, can improve accuracy of detection to the oscillation mode of needs.

Figure 53 has represented that the frequency of the frequency of oscillation mode of needs and unnecessary oscillation mode is the length that how to depend on strut.In Figure 53, the characteristic of the oscillation mode that curve " a " expression needs, curve " b " has been represented the characteristic of unnecessary oscillation mode.But arrive as subsolution among Figure 53, when the length of strut was big, the difference of the frequency of two kinds of oscillation modes was very big.But, when the length of strut in short-term, the frequency of two kinds of oscillation modes is closer to each other, and is difficult to they are identified.So from the accuracy of detection aspect, strut length weak point is disadvantageous.

On the contrary, in the vibrating gyrosensor according to the 39th embodiment, seat base 4 is connected to fixed part 74 with integral way by supporting part 76.Thereby supporting part 76 plays strut, can improve accuracy of detection.

Below, be shown in Figure 54 according to the vibrating gyrosensor of the 40th embodiment be shown in constituting of Figure 52 according to the similar substantially mode of the vibrating gyrosensor of the 39th embodiment.But the former is different from latter's part and is: heavy wall bulk portion 70 is formed at respectively between the first plate shape part 6 and the second plate shape part 8 with integral way.

In this embodiment, the existence of bulk portion 70 can increase the intensity of the marginal portion between the first plate shape part 6 and the second plate shape part 8.In addition, this vibrating gyrosensor has one and is formed in tuning fork 78 on the supporting part 76 with integral way.So for improving accuracy of detection, present embodiment is useful.

Below, be shown in Figure 55 according to the vibrating gyrosensor of the 41st embodiment be shown in constituting of Figure 52 according to the similar substantially mode of the vibrating gyrosensor of the 39th embodiment.But the former is different from latter's part and is: fixed part 76 has the form (hereinafter referred to as " fixed frame 80 ") of a rectangular frame.Form supporting part 76 with integral way, make its proximal end from the short side of its inner frame metope that places fixed frame 80, along the direction stretching, extension of the long side surface that is parallel to fixed frame 80.

In the present embodiment, can improve accuracy of detection.Because the form with fixed frame 80 provides fixed part, thereby from, for example Gu Ding degrees of freedom and stable aspect are best in the present embodiment realization.

Below, be shown in Figure 56 according to the vibrating gyrosensor of the 42nd embodiment be shown in constituting of Figure 55 according to the similar substantially mode of the vibrating gyrosensor of the 41st embodiment.But the former is different from latter's part and is: heavy wall bulk portion 70 is formed at respectively between the first plate shape part 6 and the second plate shape part 8 with integral way.

In this embodiment, the existence of bulk portion 70 can increase the intensity of the marginal portion between the first plate shape part 6 and the second plate shape part 8.In addition, owing to used fixed frame 80, from installing and stable viewpoint of giving birth to, this embodiment is favourable.

Below, be shown in Figure 57 according to the vibrating gyrosensor of the 43rd embodiment be shown in constituting of Figure 55 according to the similar substantially mode of the vibrating gyrosensor of the 41st embodiment.But, the former is different from latter's part and is: a plurality of grooves 72 are formed at the back side of the first plate shape part 6, as shown in figure 48, and detect piezoelectric/electrostrictive film element 12 and on the first plate shape part, 6 upper surfaces, form corresponding to the position of these a plurality of grooves 72 form with row's island.The embodiment that is shown in Figure 57 has illustrated such structure, and its further groove 72 has circular contour, detects piezoelectric/electrostrictive film element 12 and has circular planar form.

In this embodiment, can improve accuracy of detection, and or obtain big detection output.Thereby can improve sensitivity.

Below, be shown in Figure 58 according to the vibrating gyrosensor of the 44th embodiment be shown in constituting of Figure 57 according to the similar substantially mode of the vibrating gyrosensor of the 43rd embodiment.But the former is different from latter's part and is: heavy wall bulk portion 70 is formed at respectively between the first plate shape part 6 and the second plate shape part 8 with integral way.

In this embodiment, the existence of bulk portion 70 can increase the intensity of the marginal portion between the first plate shape part 6 and the second plate shape part 8.In addition, can obtain big output.So from the aspect of improving of high reliability and sensitivity, this embodiment is favourable.

Aforesaid vibrating gyrosensor according to the 43rd to the 44th embodiment has illustrated such structure, wherein, detect piezoelectric/electrostrictive film element 12 and form with the form of row's island on the upper surface of the first plate shape part 6, each detects piezoelectric/electrostrictive film element and has the basic circular flat shape that is.On the other hand, shown in Figure 59 and 60, each groove 72 (seeing Figure 48) and detection piezoelectric/electrostrictive film element 12 all can be square or rectangle (the 45th and 46 embodiment).In these embodiments, groove 72 and detection piezoelectric/electrostrictive film element 12 (original text is 72, mistake) can imagine that the flat shape that obtains also comprises, for example aforesaid circle and rectangular shape, and diamond shape.To the not special restriction of the shape of these elements.

In vibrating gyrosensor according to the 31st to the 46th embodiment, drive unit 122 is formed between the second plate shape part 8 with integral way, and drive unit 122 has the drive part (the 3rd plate shape part) 10 that surface formation thereon drives piezoelectric/electrostrictive film element 14.On the other hand, shown in Figure 61, in order to keep the constant vibration of Vib. 2, preferably adopt such mechanism, wherein the signal that obtains from the reference unit 140 that places the position that is different from drive part 10 is delivered to drive unit 122 in the mode of feedback.

Promptly, the vibrating gyrosensor according to the 47th embodiment that is shown in Figure 61 has such structure, makes vibrating gyrosensor according to the 34th embodiment (seeing Figure 46) also comprise between two second plate shape parts 8 reference unit 140 parallel with drive unit 122.

Reference unit 140 to be to constitute with the similar substantially mode of drive unit 122, and comprising one is that 144, one of the plate shape reference sections (the 4th plate shape part) of thin-walled are formed on the reference section 144 with reference to piezoelectric/electrostrictive film element 142 in short transverse.Reference section 144 is to be formed by ceramic integral with drive part 10 identical modes.Arrange reference section 144 and drive part 10 according to following relation.That is, drive part 10 is formed at the position of close framework 80 between the second plate shape part 8 with integral way.Reference section 144 is formed at than drive part 10 a little near the position of the first plate shape part 6 with integral way.

Obtain signal from the reference piezoelectric/electrostrictive film element 142 of reference unit 140 and deliver in the mode of feedback and drive piezoelectric/electrostrictive film element 14, so that be formed at the drive unit 122 constant vibrations between the second plate shape part 8.

Shown in Figure 62, the lead 200a of drive signal by being connected with the upper/lower electrode that is formed at the upper and lower surface that drives piezoelectric/electrostrictive film element 14 (not having expression among the figure), 200b is delivered to drive unit 122.The lead 202a of reference signal by being connected with the upper/lower electrode (not having expression among the figure) that is formed at reference to the upper and lower surface of piezoelectric/electrostrictive film element 142,202b obtains from reference unit 140.

The lead 204a of detection signal by being connected with the upper/lower electrode that is formed at detection piezoelectric/electrostrictive film element 12 upper and lower surfaces (not having expression among the figure), 204b obtains from the detection piezoelectric/electrostrictive film element 12 that is formed at the first plate shape part 6.

To illustrate that below other has the embodiment of reference unit 140.At first, vibrating gyrosensor according to the 48th embodiment has such structure, make the vibrating gyrosensor according to the 36th embodiment that is shown in Figure 49 also comprise a reference unit 140, this reference position is parallel to drive unit 122 between two second plate shape parts 8.

The formation of this embodiment is shown in Figure 64.That is, the top electrode separately of a plurality of detection piezoelectric/electrostrictive film elements 12 that form with the form of row's island is electrically connected by middle conductor 206a and lead 204a respectively.Each bottom electrode of these a plurality of detection piezoelectric/electrostrictive film elements 12 is electrically connected by middle conductor 206b and lead 204b respectively.By lead 204a, 204b obtains detection signal from detecting piezoelectric/electrostrictive film element 12.

Below, the vibrating gyrosensor according to the 49th embodiment that is shown in Figure 65 is pressed following formation based on the vibrating gyrosensor (seeing Figure 52) according to the 39th embodiment.That is, having a free-ended center section (the 6th plate shape part) 208 is formed on the nearly middle body of seat base 4 in the face of the side of Vib. 2 with integral way.Drive unit 122 is formed between center section 208 and one the second plate shape part 8 with integral way.Aforesaid reference unit 140 is formed between center section 208 and another the second plate shape part 8 with integral way.

This embodiment is based on the use to following feature.That is, form supporting part 76 (the 5th plate shape part) between present base 4 and the fixed part 74, thereby make supporting part 76 be placed in basically on the position that the position with the line of symmetry of tuning fork 78 overlaps.So one of them is vibrated when two second plate shape parts 8, when vibrating corresponding Vib. 2, another Vib. 2 is vibrated with identical frequency.

Thereby when Vib. 2 of operation drive unit 122 vibrations, another Vib. 2 is also vibrated with identical frequency.So the signal that reference unit 140 obtains can be used for realizing FEEDBACK CONTROL, makes that the vibration of drive unit 122 is constant.

Below, the vibrating gyrosensor according to the 50th embodiment that is shown in Figure 66 is pressed following formation based on the vibrating gyrosensor (seeing Figure 52) according to the 39th embodiment.That is, a plurality of free-ended center section 210a that have separately, 210b is formed on two terminal positions of seat base 4 in the face of the longitudinal direction of the side of Vib. 2 with integral way.Drive unit 122 is formed between one second plate shape part 8 and the center section 210a with integral way.Reference unit 140 is formed between another second plate shape part 8 and another center section 210b with integral way.

In the present embodiment, when operation drive unit 122 makes a Vib. 2 vibration, another Vib. 2 with aforesaid the same manner also with identical frequency vibration.So the signal that reference unit 14 0 obtains can be used to realize FEEDBACK CONTROL, makes that the vibration of drive unit 122 is constant.

Vibrating gyrosensor according to the 49th and the 50th embodiment has such structure, and wherein tuning fork 78 is formed on the block fixed part 74 with integral way.On the other hand, fixed part 74 is provided with the form of rectangular frame (fixed frame) 80, as by be shown in Figure 67 and 68 according to the vibrating gyrosensor illustration of the 51st and 52 embodiment.

In these embodiments, reference unit 140 can be by in realizing FEEDBACK CONTROL, makes that the vibration that is produced by drive unit 122 is constant.In addition, owing to fixed part is provided as fixed frame 80, thereby from, for example, fixing degree of freedom and stable aspect, these embodiment are favourable.

Below, be shown in Figure 69 according to the vibrating gyrosensor of the 53rd embodiment be shown in constituting of Figure 56 according to the similar substantially mode of the vibrating gyrosensor of the 42nd embodiment.But the former is different from latter's part and is: supporting part 76 is by following formation.

Promptly, supporting part 76 comprises first supporting part 212 that a mode with integral body and bridge joint provides, with in the interior metope of bridge joint fixed frame 80 along the direction of extension of Vib. 2 two a pair of in metope, thereby make Vib. 2 be placed in the top of first supporting part 212, shown in Figure 70 A and 70C, second supporting part 214 that provides in the mode of whole and bridge joint, with bridge joint first supporting part 212 and seat base 4, thereby make drive unit 122 be placed in the top of second supporting part 214, shown in Figure 70 B.

As mentioned above, when the strut that is used for tuning fork 78 is extended, can more clearly pick out the oscillation mode of needs and unnecessary oscillation mode.Thereby,, preferably prolong the length of the strut that is used for tuning fork in order to improve the accuracy of detection of sensor.But, have such structure according to the vibrating gyrosensor (seeing Figure 56) of the 42nd embodiment, wherein the supporting part 76 that partly is made of the 5th plate shape is formed between seat base 4 and the fixed frame 80 with integral way.So if prolong supporting part 76, the length of whole sensor also is extended in view of the above.Thereby the prolongation of supporting part 76 is restricted.

Otherwise, in vibrating gyrosensor according to the 53rd embodiment, be parallel to two plate shape parts 8 for tuning fork 78 with second supporting part 214 that the identical mode of cardinal principle plays the strut effect, provide such structure, wherein second supporting part 214 stretches along the direction of extension of the second plate shape part 8.Thereby, be extended even work as the length of second supporting part 214, before this length exceeded certain scope, the whole length of sensor can not change.So second supporting part 214 can be extended, and can realize the further improvement of accuracy of detection.

In addition, the aforementioned structure of first and second supporting parts 212,214 also can be used to, for example, and in each vibrating gyrosensor that comprises drive unit 122 and reference unit 140 shown in Figure 71 and Figure 72.

The vibrating gyrosensor according to the 54th embodiment that is shown in Figure 71 is so constructed, and makes first and second supporting parts 212,214 be formed to be shown on the position according to the supporting part 76 of the vibrating gyrosensor of the 51st embodiment of Figure 67.The vibrating gyrosensor according to the 55th embodiment that is shown in Figure 72 is so constructed, and makes first and second supporting parts 212,214 be formed to be shown on the position according to the supporting part 76 of the vibrating gyrosensor of the 52nd embodiment of Figure 68.

Vibrating gyrosensor by the integral roasting product slate of pottery can form with the form of whole packed structures, and this structure comprises thin plate layer 22 as shown in Figure 2, base layer 24 and interlayer 26.On the other hand, shown in Figure 73, can constitute vibrating gyrosensor by adopting an extra play (middle layer) 216 that inserts between thin plate layer 22 and the base layer 24.

The suitable thickness in middle layer 216 is 1 micron to 500 microns, is preferably 10 microns to 400 microns, more preferably 50 to 300 microns.If thickness surpasses 500 microns, crooked difficulty.If thickness is less than 1 micron, intensity is low, and the problem of bringing thus is that middle layer 216 is easy to break.Thereby the thickness in middle layer 216 preferably adopts aforesaid scope.

(see Fig. 1 with regard to block Vib. 2 by this class vibrating gyrosensor of the thin-walled first plate shape part 6 supportings, 4 to 18, and 38 to 41), and just have four block Vib. 102A seat basic 100 these class vibrating gyrosensors (seeing Figure 22 and 24 to 37) with integral way by 116 supportings of thin-walled part shape part to 102D, for proof strength and improve sensitivity, it is best forming middle layer 216.

Constitute by the thin-walled first plate shape part 6 for Vib. 2, as be shown in Figure 42 to 72 according to this class vibrating gyrosensor in the vibrating gyrosensor of the 31st to 55 embodiment, for proof strength and sensitivity, it also is favourable inserting middle layer 216.

The embodiment that is shown in Figure 74 has illustrated such structure, wherein formation be shown in Figure 45 according to the thin plate layer 22 of the vibrating gyrosensor of the 33rd embodiment and base layer 24 between insert middle layer 216.By handling thin plate layer 22, with the upper surface portion 32a of integral way formation framework 32, the top 6a of the first plate shape part 6, the upper end 8a of the second plate shape part 8, and the 3rd plate shape part 10.By handling middle layer 216, with the top 32b that removes its upper surface portion of integral way formation framework 32, the bottom 6b of the first plate shape part 6, and remove the top 8b of the second plate shape part 8 of its upper end.By handling base layer 24, form the remainder 32c of framework 32 and the remainder 8c of the second plate shape part 8 with integral way.Which floor is combined in one by mutual the accumulation for this, carries out roasting subsequently.Produce vibrating gyrosensor like this according to the 33rd embodiment.

The embodiment that is shown in Figure 75 has illustrated such structure, wherein formation be shown in Figure 46 according to the thin plate layer 22 of the vibrating gyrosensor of the 34th embodiment and base layer 24 between insert middle layer 216.By handling thin plate layer 22, with the upper surface portion 32a of integral way formation framework 32, the top 6a of the first plate shape part 6, the upper end 8a of the second plate shape part 8, and the 3rd plate shape part 10.By handling middle layer 216, with the top 32b that removes its upper surface portion of integral way formation framework 32, the bottom 6b of the first plate shape part 6, and remove the top 8b of the second plate shape part 8 of its upper end.By handling base layer 24, with the remainder 32c of integral way formation framework 32, the remainder 8c of the second plate shape part 8, and bulk portion 70.Which floor is combined in one by mutual the accumulation for this, carries out roasting subsequently.Produce vibrating gyrosensor like this according to the 34th embodiment.

The embodiment that is shown in Figure 76 has illustrated such structure, wherein formation be shown in Figure 47 according to the thin plate layer 22 of the vibrating gyrosensor of the 35th embodiment and base layer 24 between insert middle layer 216.By handling thin plate layer 22, with the upper surface portion 32a of integral way formation framework 32, the top 6a of the first plate shape part 6, the upper end 8a of the second plate shape part 8, and the 3rd plate shape part 10.By handling middle layer 216, form the top 32b that removes its upper surface portion of framework 32 with integral way, have the bottom 6b of the first plate shape part 6 of a plurality of holes 218 (being used for constituting the groove 72 that is shown in Figure 48 together), and remove the top 8b of the second plate shape part 8 of its upper end with thin plate layer 22.By handling base layer 24, form the remainder 32c of framework 32 and the remainder 8c of the second plate shape part 8 with integral way.Which floor is combined in one by mutual the accumulation for this, carries out roasting subsequently.Produce vibrating gyrosensor like this according to the 35th embodiment.

As mentioned above, in vibrating gyrosensor according to the 1st to the 55th embodiment, Vib. 2 (or 102), seat base 4 (or 100), fixed frame 30,36,38, framework 32 (or 104), and other member is made the integral roasting product slate of as a whole pottery (electron opaque material) by zirconium dioxide representative.Thereby, the invention has the advantages that by means of film formation method, outer lead can directly connect up and form thereon.Except this advantage, film formation method, for example serigraphy is used to form piezoelectric/electrostrictive film element 12,14,118,120,142 electrode.Thereby the present invention also has such advantage, and when piezoelectric/ electrostrictive film element 12,14, when 118,120,142 electrode formed, the lead of these electrodes can extend to frame part (framework 104) simultaneously, thereby vibration performance can not be affected.Thereby, can make the improvement of vibrating gyrosensor output and easy to manufacture.

In each embodiment of explanation vibrating gyrosensor, the thin-walled second plate shape part 8 all is described to surface plate shape shape.But the present invention is not limited to these members with surface plate shape shape.Can use in order on the direction of vibration that requires, to be easy to vibrate Vib., the structure that rigidity is lowered.Much less, when using the structure of partial compression shape, problem can not take place.

When explaining, entirely by the integral roasting product slate of pottery, do not use any magnetic material according to vibrating gyrosensor of the present invention as the description of front.Thereby, needn't consider the influence that environmental magnetic field applies performance fully, with regard to infield or similar factor, vibrating gyrosensor of the present invention is not subjected to any restriction.In addition, use first and second plate shapes part can obtain big displacement by detection and driving direction at Vib..And vibrating gyrosensor of the present invention has whole structure, and wherein piezoelectric/electrostrictive film element directly contacts with Vib..Thereby, big output can be obtained effectively, and the problem that causes sensitivity to reduce because of the pressure absorption can be solved effectively.The sensor of high sensitivity can be provided so expediently.

Compound sensor according to the present invention is different from the sensor that a common member has only a kind of function.Compound sensor is convenient to provide with integral way another sensor of contiguous vibrating gyrosensor very much.For example, be easy to realize such structure, wherein vibrating gyrosensor and acceleration transducer are provided simultaneously as a member (integrated sensor).

Claims (64)

1. vibrating gyrosensor, it comprises at least one or a plurality of Vib. that is subjected to the excited vibration that produced by at least one or a plurality of drive unit, a seat base that supports described Vib. at described Vib. proximal end place, and at least one or a plurality of test section, described test section comprises at least one or a plurality of being used for when described Vib. is rotated, the detection piezoelectric/electrostrictive film element of the displacement that detection produces on the direction perpendicular to described Vib. direction of vibration, described vibrating gyrosensor comprises:

With described Vib. and the basic described test section of being made up of the integral roasting product of pottery together of described seat, described test section is by much thinner than described Vib., and its main surface partly constitutes along first plate shape that described direction of vibration stretches;

Be formed at described detection piezoelectric/electrostrictive film element on the described first plate shape part according to film formation method with integral way; And

Be used to reduce the rigidity on the described direction of vibration and promote at least one or a plurality of thin-walled second plate shape part of described vibration, described second plate shape part for described Vib. provides, makes its main surface stretch along the direction perpendicular to described direction of vibration with integral way.

2. vibrating gyrosensor as claimed in claim 1, wherein:

But described Vib. has terminal thin-walled cut-out that stretches out before it; And

But regulate the resonant frequency of described Vib. according to the excision amount of described cut-out.

3. vibrating gyrosensor as claimed in claim 1 or 2, two in the wherein said Vib. are supported by described seat base in parallel with each other, and described two Vib.s are vibrated on direction relative to each other with energisation mode by described drive unit.

4. as the described vibrating gyrosensor of claim 1 to 3, wherein said drive unit comprises:

One the 3rd plate shape part, it is much thinner than described Vib., and and described Vib. together by the integral roasting product slate of pottery; And

One is formed at driving piezoelectric/electrostrictive film element on described the 3rd plate shape part according to described film formation method with integral way.

5. as claim 3 or 4 described vibrating gyrosensors, wherein:

Support bar be disposed between described two Vib.s and and the position that separates of described Vib. on; And

Described support bar is supported by the seat base together with integral way and described two Vib.s.

6. as the arbitrary described vibrating gyrosensor of claim 1 to 5, wherein said seat base is by placing described Vib. outside and constitute apart from the fixed frame of certain distance, thereby described Vib. is centered on by described fixed frame.

7. as the arbitrary described vibrating gyrosensor of claim 3 to 6, wherein said drive unit is formed between described two Vib.s with integral way.

8. as the arbitrary described vibrating gyrosensor of claim 3 to 6, wherein said drive unit is formed between the described second plate shape part with integral way.

9. vibrating gyrosensor as claimed in claim 5, wherein said drive unit is formed at respectively between described support bar and the described Vib. with integral way.

10. vibrating gyrosensor as claimed in claim 5, wherein said drive unit is formed at respectively between described support bar and the described second plate shape part with integral way.

11. vibrating gyrosensor as claimed in claim 6, wherein said drive unit is formed at respectively between described fixed frame and the described Vib. with integral way.

12. vibrating gyrosensor as claimed in claim 6, wherein said drive unit is formed at respectively between described fixed frame and the described second plate shape part with integral way.

13. vibrating gyrosensor, it comprise two parallel to each other and be subjected to the Vib. of excited vibration jointly, a framework that centers on described Vib. and support described Vib. at described Vib. proximal end place, and test section, described test section comprises and being used for when described Vib. is rotated, the detection piezoelectric/electrostrictive film element of the displacement that detection produces on the direction perpendicular to described Vib. direction of vibration, described vibrating gyrosensor comprises:

Described test section, it and described Vib. and described framework are together by the integral roasting product slate of pottery, described test section partly is made of the first plate shape, and described first plate shape part is much thinner than described Vib., and stretch along described direction of vibration on its main surface;

Described detection piezoelectric/electrostrictive film element, it is formed on the described first plate shape part with integral way according to film formation method;

Be used to reduce the rigidity on the described direction of vibration and promote a thin-walled second plate shape part of described vibration, described second plate shape part is formed on described framework supports part between the zone of described two Vib.s with integral way, makes its main surface stretch along the direction perpendicular to described direction of vibration;

On the described framework facing to the part in the zone that forms described second plate shape part, described part be than described framework thin one the 3rd plate shape part of Duoing; And

Be formed at driving piezoelectric/electrostrictive film element on described the 3rd plate shape part according to described film formation method with integral way, wherein

Described two Vib.s are vibrated on the basis of the vibration of the described framework that is caused by described driving piezoelectric/electrostrictive film element.

14. vibrating gyrosensor as claimed in claim 13, wherein:

But each of described Vib. has terminal thin-walled cut-out that stretches out before it; And

But regulate the resonant frequency of described Vib. according to the excision amount of described cut-out.

15. as claim 13 or 14 described vibrating gyrosensors, the fixed part of wherein fixing described framework is formed on the outside surface in the zone that forms described second plate shape part on the described framework with integral way.

16. vibrating gyrosensor as claimed in claim 15, wherein said fixed part comprise with integral way, one places the outside of described framework and apart from certain distance, thereby around the fixed frame of described framework.

17. vibrating gyrosensor, it comprise two parallel to each other and be subjected to the Vib. of excited vibration jointly, a seat base that supports described Vib. at Vib. proximal end place, and test section, described test section comprises and being used for when described Vib. is rotated, the detection piezoelectric/electrostrictive film element of the displacement that detection produces on the direction perpendicular to described Vib. direction of vibration, described vibrating gyrosensor comprises:

Described test section, it and described Vib. and described framework are together by the integral roasting product slate of pottery, described test section partly is made of the first plate shape, and described first plate shape part is much thinner than described Vib., and stretch along described direction of vibration on its main surface;

Described detection piezoelectric/electrostrictive film element, it is formed on the described first plate shape part with integral way according to film formation method;

Be used to reduce the rigidity on the described direction of vibration and promote a thin-walled second plate shape part of described vibration, described second plate shape part is formed on the part between the zone of described two Vib.s of described seat base supporting with integral way, makes its main surface stretch along the direction perpendicular to described direction of vibration;

A fixed part that has fixed frame, fixed frame is connected with the outside surface of integral way with the zone that forms described second plate shape part, and place the outside of described two Vib.s and described seat base, simultaneously apart from a Vib. and the basic certain distance of seat, make described two Vib.s and the described seat base framework that is fixed center on;

The 3rd plate shape part, this part is much thinner than described seat base, and forms the part that is positioned at the described second plate shape part both sides with described fixed frame of bridge joint and described seat base respectively with integral way; And

Be formed at driving piezoelectric/electrostrictive film element on described the 3rd plate shape part according to film formation method with integral way, wherein:

Described two Vib.s are vibrated on the basis of the vibration of the described seat base that is caused by described driving piezoelectric/electrostrictive film element.

18. vibrating gyrosensor as claimed in claim 17, wherein:

But each described Vib. have one from its before end stretch out the thin-walled cut-out; And

But regulate the resonant frequency of described Vib. according to the excision amount of described cut-out.

19. a vibrating gyrosensor comprises:

The Vib. that main shaft stretches along a certain direction;

Stretch along direction, at the seat base of the described Vib. of described Vib. one end bearing perpendicular to described a certain direction;

Around described Vib. and described seat base, the framework surface is parallel to a framework on the plane of the described direction of extension that comprises described a certain direction and described seat base; And

A test section is attached between described seat base and the described framework, has the detection piezoelectric/electrostrictive film element that is used to detect the strain of generation when described Vib. winds axle perpendicular to described plane and is rotated, wherein:

All described Vib.s, described seat base, and described test section all is the integral roasting product slate by pottery;

Described test section is by much thinner that the first plate shape partly constitutes than described Vib. on the short transverse; And

By the supporting of described seat base, described end partly is made of the second plate shape that in described a certain direction is thin-walled described Vib. at described end.

20. vibrating gyrosensor as claimed in claim 19, wherein said test section is made of the annulus spare that is formed between described seat base and the described framework, and described first plate shape part is formed at described annulus spare with the described direction of extension that the bridge joint mode is parallel to described seat base.

21 as claim 19 or 20 described vibrating gyrosensors, at least two in the wherein said Vib. are supported, and have arranged a drive unit that is used for vibrating on direction relative to each other in the mode of excitation described each Vib. in parallel with each other by described seat base.

22. vibrating gyrosensor as claimed in claim 21, wherein said drive unit comprises:

Much thinner on the short transverse than described Vib., and and described Vib. together by the 3rd plate shape part of the integral roasting product slate of described pottery; And

Be formed at the driving piezoelectric/electrostrictive film element on described the 3rd plate shape part.

23. as claim 21 or 22 described vibrating gyrosensors, wherein said drive unit is formed between described two Vib.s with integral way.

24. vibrating gyrosensor as claimed in claim 23, wherein said drive unit are disposed on the line of each center of gravity that connects described two Vib.s.

25. as claim 21 or 22 described vibrating gyrosensors, wherein said drive unit is formed between described each Vib. and the described seat base with integral way.

26. as the arbitrary described vibrating gyrosensor of claim 21 to 25, also comprise being used to realize FEEDBACK CONTROL, make described drive unit make the reference unit of constant vibration.

27. vibrating gyrosensor as claimed in claim 26, wherein said reference unit comprises:

One is much thinner than described Vib. on short transverse, and and described Vib. together by the 4th plate shape part of the integral roasting product slate of described pottery; And

A reference piezoelectric/electrostrictive film element that is formed on described the 4th plate shape part.

28. as claim 26 or 27 described vibrating gyrosensors, wherein said reference unit is formed between described each Vib. with integral way.

29. as claim 26 or 27 described vibrating gyrosensors, wherein said reference unit is formed between described each Vib. and the described seat base with integral way.

30., also comprise one and be formed at the part of shaking of executing between described Vib. and the described seat base with integral way as the arbitrary described vibrating gyrosensor of claim 19 to 29.

31. vibrating gyrosensor as claimed in claim 30, the wherein said part of shaking of executing comprises:

One is arranged between described Vib. and the described seat base, and along the 5th plate shape part of the basic longitudinal direction extends parallel of described seat;

The 6th plate shape part that described seat base and described the 5th plate shape partly are connected; And

The 7th plate shape part that described Vib. and described the 5th plate shape partly are connected.

32. as claim 30 or 31 described vibrating gyrosensors, wherein said drive unit with integral way be formed at described each execute shake the part between.

33. as claim 30 or 31 described vibrating gyrosensors, wherein said drive unit is formed at described executing with integral way and shakes between part and the described seat base.

34. the arbitrary described vibrating gyrosensor as claim 19 to 33 also comprises:

Be used to regulate driving resonance frequencies, be positioned at thin-walled first projection of described Vib. free terminal; And

Be used to regulate and detect resonant frequency, be positioned at thin-walled second projection of two ends on the basic longitudinal direction of described seat, wherein:

Described first and second projections and described Vib. and described seat base are together by the integral roasting product slate of described pottery.

35. vibrating gyrosensor as claimed in claim 34, wherein said first and second projections are thin-walleds with respect to described Vib. on short transverse.

36. vibrating gyrosensor as claimed in claim 34, wherein said first and second projections are thin-walleds with respect to described Vib. on the described direction of extension of described seat base.

37. as the arbitrary described vibrating gyrosensor of claim 22 to 36, wherein:

Described the 3rd plate shape part of described drive unit also is used as the controlled plant that is used for driving resonance frequencies; And

The described first plate shape part of described test section also is used as the controlled plant that is used to detect resonant frequency.

38. vibrating gyrosensor, it comprises at least one or a plurality of Vib. that is subjected to the excited vibration that produced by drive unit, a seat base that supports described Vib. at described Vib. proximal end place, and at least one or a plurality of test section, described test section comprises at least one or a plurality of being used for when described Vib. is rotated, the detection piezoelectric/electrostrictive film element of the displacement that detection produces on the direction perpendicular to described Vib. direction of vibration, described vibrating gyrosensor comprises:

With the described Vib. that described seat base is made up of the integral roasting product of pottery together, described Vib. is by much thinner than described seat base, and main surface partly constitutes along the first plate shape that described direction of vibration stretches;

Described test section, it is by described first plate shape part and forms method according to film and be formed at the detection piezoelectric/electrostrictive film element of the described first plate shape on partly with integral way and constitute; And

Be used to reduce the rigidity on the described direction of vibration and promote at least one or a plurality of thin-walled second plate shape part of described vibration, described second plate shape part provides for described Vib. with integral way, thereby makes its main surface stretch along the direction perpendicular to described direction of vibration.

39. vibrating gyrosensor as claimed in claim 38, two in the wherein said Vib. in parallel with each other by the supporting of described seat base, described drive unit is disposed between described each second plate shape part, and described two Vib.s are vibrated on direction relative to each other with energisation mode by institute's drive unit.

40. as claim 38 or 39 described vibrating gyrosensors, wherein said drive unit comprises:

One the 3rd plate shape part, it is much thinner than described seat base, and and described second plate shape part together by the integral roasting product slate of described pottery; And

One is formed at driving piezoelectric/electrostrictive film element on described the 3rd plate shape part according to described film formation method with integral way.

41. as the arbitrary described vibrating gyrosensor of claim 38 to 40, wherein said detection piezoelectric/electrostrictive film element is formed on the almost whole plane of described first plate shape part with integral way.

42. as the arbitrary described vibrating gyrosensor of claim 38 to 41, wherein:

Described first plate shape part has a plurality of grooves at its back side; And

Described detection piezoelectric/electrostrictive film element is formed at the form of row's island on the front surface of described first plate shape part on the position corresponding to described a plurality of grooves.

43. as the arbitrary described vibrating gyrosensor of claim 38 to 42, one of them heavy wall bulk portion is formed between described first plate shape part and the described second plate shape part with integral way.

44. as the arbitrary described vibrating gyrosensor of claim 38 to 43, wherein said seat base is by placing described Vib. outside, and the described Vib. certain distance of distance, thereby constitutes round a framework of described Vib..

45. as the arbitrary described vibrating gyrosensor of claim 38 to 44, wherein said drive unit is formed between described each second plate shape part with integral way.

46. as claim 43 or 44 described vibrating gyrosensors, wherein said drive unit is formed between described each bulk portion with integral way.

47. vibrating gyrosensor as claimed in claim 44, wherein said drive unit is formed between described bulk portion and the described framework with integral way.

48. as the arbitrary described vibrating gyrosensor of claim 38 to 47, also comprise and be used to realize FEEDBACK CONTROL, thereby make the constant reference unit of described vibration of described drive unit.

49. vibrating gyrosensor as claimed in claim 48, wherein said reference unit comprises:

One is much thinner than described seat base in its short transverse, and and described Vib. together by the 4th plate shape part of the integral roasting product slate of described pottery; And

Be formed on described the 4th plate shape part one with reference to piezoelectric/electrostrictive film element.

50 as claim 48 or 49 described vibrating gyrosensors, and wherein said reference unit is formed between described each second plate shape part with integral way.

51. as the arbitrary described vibrating gyrosensor of claim 48 to 50, wherein said drive unit is formed on the plate shape part in described each second plate shape part with integral way, described reference unit is formed on another second plate shape part.

52. vibrating gyrosensor as claimed in claim 51, wherein:

When center section with a free terminal is formed at face of described seat base with integral way on the nearly middle body of the side of described oscillating component;

Described drive unit is formed between in the described second plate shape part one and the described center section with integral way; And

Described reference unit is formed between another second plate shape part and the described center section with integral way.

53. vibrating gyrosensor as claimed in claim 51, wherein:

The a plurality of center sections that all have a free terminal are formed at two ends of described seat basal plane to the horizontal direction of described oscillating component with integral way;

Described drive unit is formed between described second a plate shape part and the described center section with integral way; And

Described reference unit is formed between another second plate shape part and another center section with integral way.

54. as the arbitrary described vibrating gyrosensor of claim 38 to 53, wherein:

The fixed part that is used for fixing described seat base is formed on the surface on one of described seat base surface that forms described second plate shape part thereon with integral way;

One on described seat sound stage width degree direction the 5th plate shape part for thin-walled be formed at integral way between described seat base and the described fixed part; And

Tuning fork is made of described seat base and described Vib. at least.

55. vibrating gyrosensor as claimed in claim 54, wherein said fixed part are by placing described tuning fork outside, and the described tuning fork certain distance of distance, thereby constitute around the fixed frame of described tuning fork.

56. vibrating gyrosensor as claimed in claim 55, wherein:

A supporting part provides with integral body and bridge joint mode, thereby makes that metope is by described supporting part bridge joint in a pair of that the described direction of extension along described Vib. of described fixed frame stretches, and described supporting part is in the face of side's placed on it described Vib.; And

Described the 5th plate shape part is formed between described supporting part and the described seat base with integral way.

57. one kind comprises a vibrating gyrosensor and has the compound sensor of the sensor of the function that is different from described vibrating gyrosensor with another; Described vibrating gyrosensor comprises at least one or a plurality of Vib. that is subjected to the excited vibration that produced by at least one or a plurality of drive unit, a seat base that supports described Vib. at described Vib. proximal end place, at least one or a plurality of test section, described test section comprises at least one or a plurality of being used for when described Vib. is rotated, the detection piezoelectric/electrostrictive film element of the displacement that detection produces on the direction perpendicular to described Vib. direction of vibration, described test section and described Vib. and described seat base are together by the integral roasting product slate of pottery, described test section is much thinner than described Vib. by one, and its main surface partly constitutes along the first plate shape that described direction of vibration stretches, described detection piezoelectric/electrostrictive film element is formed on the described first plate shape part with integral way according to film formation method, be used to reduce the rigidity on the described direction of vibration and promote at least one or a plurality of thin-walled second plate shape part of described vibration, described second plate shape part provides for described Vib. with integral way, make its main surface stretch along direction perpendicular to described direction of vibration, described seat base is by placing described Vib. outside and the described Vib. certain distance of distance, thereby the fixed frame around described Vib. constitutes, and described drive unit is formed between described fixed frame and the described Vib. with integral way; Described compound sensor comprises that also one forms together with integral way and described fixed frame, and second framework of the described fixed frame of contiguous described vibrating gyrosensor; Wherein said second sensor is supported with integral way in described second fixed frame.

58. one kind comprises a vibrating gyrosensor and has the compound sensor of the sensor of the function that is different from described vibrating gyrosensor with another; Described vibrating gyrosensor comprise two parallel to each other and be subjected to the Vib. of excited vibration jointly, a framework that centers on described Vib. and support described Vib. at described Vib. proximal end place, and test section, described test section comprises and being used for when described Vib. is rotated, the detection piezoelectric/electrostrictive film element of the displacement that detection produces on the direction perpendicular to described Vib. direction of vibration, described detection part and described Vib. and described framework are together by the integral roasting product slate of pottery, described test section is by much thinner than described Vib., and its main surface partly constitutes along the first plate shape that described direction of vibration stretches, described detection piezoelectric/electrostrictive film element, it is formed on the described first plate shape part with integral way according to film formation method, be used to reduce the rigidity on the described direction of vibration and promote a thin-walled second plate shape part of described vibration, described second plate shape part is formed on described framework supports part between the zone of described two Vib.s with integral way, make its main surface stretch along described direction perpendicular to described direction of vibration, described framework forms the part in the zone of described second plate shape part vis-a-vis, described part be than described framework thin one the 3rd plate shape part of Duoing, be formed at driving piezoelectric/electrostrictive film element on described the 3rd plate shape part according to described film formation method with integral way, described two Vib.s are vibrated on the basis of the vibration of the described framework that is caused by described driving piezoelectric/electrostrictive film element, fixing described framework also is formed at fixed part on the outside surface in the described zone that is used to form described second plate shape part with integral way, a fixed frame that provides together with integral way and described fixed part, described fixed frame places the outside of described framework and apart from certain distance, thereby around described framework; And described compound sensor comprises that also one forms together with integral way and described fixed frame, and second framework of the described fixed frame of contiguous described vibrating gyrosensor; Wherein said second sensor is supported with integral way in described second fixed frame.

59. one kind comprises a vibrating gyrosensor and has the compound sensor of the sensor of the function that is different from described vibrating gyrosensor with another; Described vibrating gyrosensor comprise two parallel to each other and be subjected to the Vib. of excited vibration jointly, a seat base that supports described Vib. at Vib. proximal end place, and test section, described test section comprises and being used for when described Vib. is rotated, the detection piezoelectric/electrostrictive film element of the displacement that detection produces on the direction perpendicular to described Vib. direction of vibration, described vibrating gyrosensor comprises:

With described Vib. and the basic described test section of being made up of the integral roasting product of pottery together of described seat, described test section is by much thinner than described Vib., and its main surface constitutes along first that described direction of vibration stretches;

Be formed at described detection piezoelectric/electrostrictive film element on the described first plate shape part according to film formation method with integral way;

Be used to reduce the rigidity on the described direction of vibration and promote a thin-walled second plate shape part of described vibration, described second plate shape part is formed on the part between the zone of described two Vib.s of described seat base supporting with integral way, makes its main surface stretch along the described direction perpendicular to described direction of vibration;

A fixed part that has fixed frame, fixed frame is connected with the outside surface of integral way with the zone that forms described second plate shape part, and place the outside of described two Vib.s and described seat base, simultaneously apart from a Vib. and the basic certain distance of seat, make described two Vib.s and the described seat base framework that is fixed center on;

The 3rd plate shape part, this part is much thinner than described seat base, and forms the part that is positioned at the described second plate shape part both sides with described fixed frame of bridge joint and described seat base respectively with integral way; And

Be formed at driving piezoelectric/electrostrictive film element on described the 3rd plate shape part according to film formation method with integral way;

Described two Vib.s are vibrated on the basis of the vibration of the described seat base that is caused by described driving piezoelectric/electrostrictive film element; And described compound sensor comprises that also one forms together with integral way and described fixed frame, and second framework of the described fixed frame of contiguous described vibrating gyrosensor; Wherein said another sensor is supported with integral way in described second fixed frame.

60. a method of making vibrating gyrosensor comprises the steps:

Pile up and integrated at least one base layer and thin plate layer that constitutes by sintered plate not, roasting subsequently is to produce the product of roasting, this product comprises the Vib. that at least one or a plurality of main shaft all stretch along a certain direction with integral way, stretch perpendicular to the direction of described a certain direction on edge, be used for seat base at the described Vib. of described Vib. one end bearing, its framework surface is parallel to the framework on the plane that comprises described a certain direction and the basic direction of extension of described seat, this framework is used for around described Vib. and described seat base, and at least one or a plurality of test section that is attached between described seat base and the described framework;

At least on described test section, form one or more at least piezoelectric/electrostrictive film elements according to film formation method;

Regulate driving resonance frequencies by the part of described Vib. being repaired handle;

By being repaired to handle, the part of described seat base regulates the detection resonant frequency.

61. method as claimed in claim 60, wherein:

Described vibrating gyrosensor, comprise at least two in the described Vib., in parallel with each other by seat base supporting, and a drive unit is formed between described two Vib.s, is used to make these two Vib.s to vibrate on direction relative to each other in the mode of excitation; And

Described drive unit comprise one much thinner than described Vib. on its short transverse, and, reach a driving piezoelectric/electrostrictive film element that is formed on the described plate shape part with the plate shape part that described Vib. is made up of the integral roasting product of described pottery together.

62. as claim 60 or 61 described methods, wherein:

By being repaired, thin-walled first projection that stretches out from described Vib. free end with integral way handles the described regulating step of finishing described driving resonance frequencies; And

By being repaired, thin-walled second projection that stretches out from basic longitudinal direction two ends of described seat with integral way handles the described regulating step of finishing described detection resonant frequency.

63. as claim 60 or 61 described methods, wherein:

By being repaired along its Width, the described plate shape part of described drive unit handles the described regulating step of finishing described driving resonance frequencies; And

By being repaired along its Width, plate shape part handles the described regulating step of finishing described detection resonant frequency, described plate shape partly constitutes the described test section that is attached between described seat base and the described framework, and described framework is round described Vib. and described seat base.

64. method as claimed in claim 60 is wherein regulated described detection resonant frequency again after regulating described driving resonance frequencies.

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