CN118661268A - 半导体装置 - Google Patents
半导体装置 Download PDFInfo
- Publication number
- CN118661268A CN118661268A CN202380020878.9A CN202380020878A CN118661268A CN 118661268 A CN118661268 A CN 118661268A CN 202380020878 A CN202380020878 A CN 202380020878A CN 118661268 A CN118661268 A CN 118661268A
- Authority
- CN
- China
- Prior art keywords
- layer
- oxide semiconductor
- oxide
- semiconductor layer
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6758—Thin-film transistors [TFT] characterised by the insulating substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6757—Thin-film transistors [TFT] characterised by the structure of the channel, e.g. transverse or longitudinal shape or doping profile
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
- H10D30/673—Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes
- H10D30/6733—Multi-gate TFTs
- H10D30/6734—Multi-gate TFTs having gate electrodes arranged on both top and bottom sides of the channel, e.g. dual-gate TFTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/674—Thin-film transistors [TFT] characterised by the active materials
- H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
- H10D30/031—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Thin Film Transistor (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022-057462 | 2022-03-30 | ||
| JP2022057462 | 2022-03-30 | ||
| PCT/JP2023/009642 WO2023189489A1 (ja) | 2022-03-30 | 2023-03-13 | 半導体装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN118661268A true CN118661268A (zh) | 2024-09-17 |
Family
ID=88200912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202380020878.9A Pending CN118661268A (zh) | 2022-03-30 | 2023-03-13 | 半导体装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20250048680A1 (https=) |
| JP (1) | JPWO2023189489A1 (https=) |
| CN (1) | CN118661268A (https=) |
| WO (1) | WO2023189489A1 (https=) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011142467A1 (en) * | 2010-05-14 | 2011-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| US8860023B2 (en) * | 2012-05-01 | 2014-10-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| US9343579B2 (en) * | 2013-05-20 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| US11189736B2 (en) * | 2015-07-24 | 2021-11-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
-
2023
- 2023-03-13 JP JP2024511697A patent/JPWO2023189489A1/ja active Pending
- 2023-03-13 CN CN202380020878.9A patent/CN118661268A/zh active Pending
- 2023-03-13 WO PCT/JP2023/009642 patent/WO2023189489A1/ja not_active Ceased
-
2024
- 2024-09-27 US US18/898,825 patent/US20250048680A1/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US20250048680A1 (en) | 2025-02-06 |
| WO2023189489A1 (ja) | 2023-10-05 |
| JPWO2023189489A1 (https=) | 2023-10-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20250626 Address after: Tokyo, Japan Applicant after: JAPAN DISPLAY Inc. Country or region after: Japan Applicant after: IDEMITSU KOSAN Co.,Ltd. Address before: Tokyo, Japan Applicant before: JAPAN DISPLAY Inc. Country or region before: Japan |
|
| TA01 | Transfer of patent application right |