CN118335582A - Ignition method, system and equipment applied to remote plasma source - Google Patents
Ignition method, system and equipment applied to remote plasma source Download PDFInfo
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- 238000004140 cleaning Methods 0.000 description 5
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Abstract
The present invention relates to the field of semiconductor manufacturing technology, and more particularly, to an ignition method, system and apparatus for a remote plasma source. The scheme includes that a coupling capacitor is adopted to control discharge energy, and 2 ignition power sources OUT1 and OUT2 are arranged; the chamber structure is arranged and is used for being connected with 2 ignition power supplies OUT1 and OUT2 to form a capacitive coupling discharge area; setting an ignition flow by using the chamber structure and an ion source ignition circuit; learning according to historical test data to obtain optimal preset time length; forming a control time sequence of the minimum MOS tube; and after the ignition process is finished according to the control time sequence of the minimum MOS tube, recording all signal wave recordings. According to the scheme, the ignition block is added in the plasma chamber, and an optimized control curve is obtained through test, so that ignition can be definitely realized every time an ignition loop is obtained, and the control time sequence of the MOS tube with the minimum damage to the device is provided.
Description
Technical Field
The present invention relates to the field of semiconductor manufacturing technology, and more particularly, to an ignition method, system and apparatus for a remote plasma source.
Background
Remote plasma sources for generating fluorine atoms are currently widely used for chamber cleaning in the semiconductor processing industry, particularly for chamber cleaning for deposition. The use of a remote plasma source avoids erosion of the interior chamber materials of typical in situ chamber cleaning. Remote plasma sources typically operate by pre-energizing (igniting) with argon or helium and applying high pressure, and then introducing a cleaning gas into the NF3 to ionize the atoms for chamber cleaning.
The conventional remote plasma source ignition mode is to perform dielectric barrier discharge on sapphire glass through an electrode, so that the cavity is internally started, the structure is complex, higher voltage is required, the sapphire glass has the risk of breakdown, and the sapphire glass also needs to be subjected to vacuum sealing design, so that the risk is caused for chamber air leakage.
Prior to the present technology, prior art has conventionally used a series-load resonant converter as an ignition circuit in terms of circuitry, upon ignition of the plasma, the inductance of the primary winding of the applicator transformer is effectively shorted, at which time the inductance reduction circuit resonant frequency becomes high, the resonant converter entering a capacitive state, enabling additional second higher resonant frequency current to flow to the switching power semiconductor device. The short-circuit current brings hard switch which is difficult to eliminate to the semiconductor device, but the short-circuit current is required to be reduced or clamped for reliable operation, and the series capacitor is required to be short-circuited by the high-voltage relay to be removed from the circuit at once, so that the resonance frequency point is reduced to enter the soft switch, and the damage to the switching tube is avoided. The ignition device has a complex structure, and has higher requirement on a high-voltage relay and is easy to damage.
Disclosure of Invention
In view of the above problems, the invention provides an ignition method, an ignition system and an ignition device applied to a remote plasma source, wherein an ignition block is added in a plasma chamber, the ignition block and the chamber are insulated by a ceramic ring and a perfluorinated O-shaped ring, and an optimized control curve is obtained through experimental tests, so that ignition can be definitely realized every time an ignition loop is obtained, and the control time sequence of an MOS tube with the least damage to devices is provided.
According to a first aspect of an embodiment of the present invention, there is provided an ignition method applied to a remote plasma source.
In one or more embodiments, preferably, the ignition method applied to a remote plasma source includes:
the discharge energy is controlled by adopting a coupling capacitor, and 2 ignition power supplies OUT1 and OUT2 are arranged;
The chamber structure is arranged and is used for being connected with 2 ignition power supplies OUT1 and OUT2 to form a capacitive coupling discharge area;
setting an ignition flow by using the chamber structure and an ion source ignition circuit;
Learning according to historical test data to obtain optimal preset time length;
obtaining the preset time length and forming a control time sequence of the minimum MOS tube;
and after the ignition process is finished according to the control time sequence of the minimum MOS tube, recording all signal wave recordings.
In one or more embodiments, preferably, the controlling the discharge energy by using a coupling capacitor and setting 2 ignition power sources OUT1 and OUT2 specifically includes:
Controlling discharge energy by adopting a coupling capacitor;
The set electrode adopts an easy-to-process metal electrode;
The ignition power supply adopts a parallel load resonant converter;
two current measuring points A1 and A2 are arranged, wherein A1 is positioned at the node between the Q1 and Q2 switches of the bridge circuit and faces the filter inductance direction, and A2 is positioned at the output of the secondary side of the T2 transformer.
In one or more embodiments, preferably, the chamber structure is configured to be connected to 2 ignition power sources OUT1 and OUT2 to form a capacitive coupling discharge area, and specifically includes:
Setting 2 cavity ignition blocks, wherein the cavity ignition blocks comprise a No.1 ignition block and a No. 2 ignition block;
connecting an ignition power supply OUT1 to an ignition block No. 1;
Connecting an ignition power supply OUT2 to an ignition block No. 2;
the upper cavity and the lower cavity are isolated, the isolated material is a ceramic ring, and the ceramic ring is sealed by a perfluorinated O-shaped ring;
the air gap formed by the cross section of the ignition block and the cross section of the chamber forms a capacitive coupling discharge region.
In one or more embodiments, preferably, the ignition process is set by using the chamber structure and the ion source ignition circuit, and specifically includes:
Receiving an ignition signal in a standby state;
closing the relay to enable a circuit from an ignition power supply to the ignition transformer to be connected;
the ignition power supply outputs an excitation signal, and the ignition transformer is boosted to a voltage peak value;
Under the action of a voltage peak value, the air gap is broken down and ionized, ionized argon ions collide with surrounding gas molecules, more ions are continuously ionized, and the discharge is carried out in a capacitive coupling discharge area until plasma rings form ignition;
and (3) whether the current values of A1 and A2 reach the preset value is measured, if so, starting timing, if so, stopping the output of the ignition power supply, and feeding back the ignition success, and if not, continuing to output the ignition power supply.
In one or more embodiments, preferably, the learning to obtain the optimal preset time period according to the historical test data specifically includes:
extracting the preset time length of each ignition process, and judging the current values at the A1 and A2 positions;
calculating average current according to the current values of the A1 and the A2 positions by using a first calculation formula;
Calculating an optimal coefficient matrix according to a second calculation formula;
extracting a preset time by using the optimal coefficient matrix;
The first calculation formula is as follows:
IAVG＝(I1+I2)÷2
wherein IAVG is average current, I 1 and I 2 are current values at positions A1 and A2, respectively;
The second calculation formula is as follows:
{k1,k2,……,kn}＝argmin(Σj i＝ ＝ s 1(Zj-Σi i ＝ ＝0 n kiIAVG i))
Where i is the number of powers, n is the total number of powers, Z j is the optimal duration obtained by theoretical analysis in the j-th acquisition, j is the number of acquisition times, s is the total number of acquisition times, argmin () is a function of the coefficient matrix { k 1,k2,……,kn } when Σj i＝ ＝ s 1(Zj-Σi i ＝ ＝0 nkiIAVG i) is extracted to be minimum, { k 1,k2,……,kn } is the optimal coefficient matrix, and k 1,k2,……,kn is the 1,2, … …, n coefficients of the optimal coefficient matrix in sequence;
the third calculation formula is as follows:
Y＝Σi i ＝ ＝0 n kiIAVG i
Wherein Y is a preset time.
In one or more embodiments, preferably, the obtaining the preset time period to form the control timing sequence of the minimum MOS transistor specifically includes:
Obtaining the preset time length and calculating the preset time length of the time delay by using a fourth calculation formula;
Judging how long the MOS tube needs to be turned off according to the preset time length of the time delay, and setting a control time sequence of the MOS tube to realize the time delay turn-off;
the fourth calculation formula is as follows:
C＝1.2×Y
Wherein C is the preset time of the time delay.
In one or more embodiments, preferably, after the ignition process is completed according to the control timing sequence of the minimum MOS transistor, recording all signal records specifically includes:
After the ignition is completed, the record of the excitation signal output by the ignition power supply, the current of the parallel load resonant converter at the A1 and the A2 and the ignition voltage is automatically carried out;
and storing the data into a memory card according to a preset format to realize off-line reading of the ignition recording data.
According to a second aspect of an embodiment of the present invention, an ignition system for use with a remote plasma source is provided.
In one or more embodiments, preferably, the ignition system applied to a remote plasma source includes:
the setting structure module is used for controlling discharge energy by adopting a coupling capacitor and setting 2 ignition power supplies OUT1 and OUT2;
The device comprises a chamber module, a capacitor-coupled discharge area and a control module, wherein the chamber module is used for setting a chamber structure and is used for being connected with 2 ignition power supplies OUT1 and OUT2 to form a capacitor-coupled discharge area;
the ignition module is used for setting an ignition flow by utilizing the chamber structure and the ion source ignition circuit;
the state acquisition module is used for learning to obtain optimal preset time according to the historical test data;
The self-adaptive adjustment module is used for obtaining the preset time length and forming the control time sequence of the minimum MOS tube;
and the ignition completion module is used for recording all signal wave records after the ignition process is completed according to the control time sequence of the minimum MOS tube.
According to a third aspect of embodiments of the present invention, there is provided a computer readable storage medium having stored thereon computer program instructions which, when executed by a processor, implement a method according to any of the first aspect of embodiments of the present invention.
According to a fourth aspect of embodiments of the present invention there is provided an electronic device comprising a memory and a processor, the memory being for storing one or more computer program instructions, wherein the one or more computer program instructions are executable by the processor to implement the method of any of the first aspects of embodiments of the present invention.
The technical scheme provided by the embodiment of the invention can comprise the following beneficial effects:
In the scheme of the invention, the cross section of the ignition block and the cross section of the cavity form a capacitive coupling discharge area by changing the structure of the cavity, the discharge energy is controlled by adopting a coupling capacitor, the discharge power is improved, and the electrode adopts an easily-processed metal electrode, so that the discharge is easy to occur; the power supply frequency can be applied from high frequency to low frequency or even pulse power supply, and an additional igniter is not required to be added, so that the structural complexity and the failure rate are reduced. And the ignition power supply adopts a parallel load resonant converter, so that the advantage of hard switching after burning caused by resonance point offset is not needed to be considered in the moment of arcing.
In the scheme of the invention, the optimal control curve is obtained through test, so that the ignition can be definitely realized every time an ignition loop is obtained, and the control time sequence of the MOS tube with the minimum damage to the device is provided.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims thereof as well as the appended drawings.
The technical scheme of the invention is further described in detail through the drawings and the embodiments.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the description of the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a flow chart of an ignition method applied to a remote plasma source according to an embodiment of the present invention.
Fig. 2 is a flowchart of an ignition method for a remote plasma source using a coupling capacitor to control discharge energy and setting 2 ignition power sources OUT1 and OUT2 according to an embodiment of the present invention.
Fig. 3 is a flow chart of an embodiment of the invention for providing a chamber structure for use in an ignition method for a remote plasma source for connecting with 2 ignition sources OUT1 and OUT2 to form a capacitively coupled discharge region.
Fig. 4 is a flow chart of an ignition process using a chamber configuration and an ion source ignition circuit setup in an ignition method for a remote plasma source according to an embodiment of the present invention.
Fig. 5 is a flowchart of learning to obtain an optimal preset time based on historical test data in an ignition method applied to a remote plasma source according to an embodiment of the present invention.
Fig. 6 is a flowchart of a control sequence for obtaining the preset time and forming the minimum MOS transistor in the ignition method applied to the remote plasma source according to an embodiment of the present invention.
Fig. 7 is a flowchart of recording all signal recordings after the ignition process is completed according to the control timing sequence of the minimum MOS transistor in an ignition method applied to a remote plasma source according to an embodiment of the present invention.
Fig. 8 is a block diagram of an ignition system for a remote plasma source according to an embodiment of the present invention.
Fig. 9 is a block diagram of an electronic device in one embodiment of the invention.
Fig. 10 is a block diagram of a conventional remote plasma source ignition mode.
Fig. 11 is a block diagram of a remote plasma source ignition scheme according to an embodiment of the present invention.
Fig. 12 is a graph of the ignition effect produced by the inventive arrangements.
Detailed Description
In some of the flows described in the specification and claims of the present invention and in the foregoing figures, a plurality of operations occurring in a particular order are included, but it should be understood that the operations may be performed out of order or performed in parallel, with the order of operations such as 101, 102, etc., being merely used to distinguish between the various operations, the order of the operations themselves not representing any order of execution. In addition, the flows may include more or fewer operations, and the operations may be performed sequentially or in parallel. It should be noted that, the descriptions of "first" and "second" herein are used to distinguish different messages, devices, modules, etc., and do not represent a sequence, and are not limited to the "first" and the "second" being different types.
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to fall within the scope of the invention.
The conventional remote plasma source ignition mode is to perform dielectric barrier discharge on sapphire glass through an electrode, so that the cavity is internally started, the structure is complex, higher voltage is required, the sapphire glass has the risk of breakdown, and the sapphire glass also needs to be subjected to vacuum sealing design, so that the risk is caused for chamber air leakage.
Prior to the present technology, prior art has conventionally used a series-load resonant converter as an ignition circuit in terms of circuitry, upon ignition of the plasma, the inductance of the primary winding of the applicator transformer is effectively shorted, at which time the inductance reduction circuit resonant frequency becomes high, the resonant converter entering a capacitive state, enabling additional second higher resonant frequency current to flow to the switching power semiconductor device. The short-circuit current brings hard switch which is difficult to eliminate to the semiconductor device, but the short-circuit current is required to be reduced or clamped for reliable operation, and the series capacitor is required to be short-circuited by the high-voltage relay to be removed from the circuit at once, so that the resonance frequency point is reduced to enter the soft switch, and the damage to the switching tube is avoided. The ignition device has a complex structure, and has higher requirement on a high-voltage relay and is easy to damage.
The embodiment of the invention provides an ignition method, an ignition system and ignition equipment applied to a remote plasma source. According to the scheme, the ignition block is added in the plasma chamber, the ignition block and the chamber are insulated through the ceramic ring and the perfluorinated O-shaped ring, and in addition, an optimized control curve is obtained through experimental tests, so that ignition can be definitely realized after each ignition loop is obtained, and the control time sequence of the MOS tube with the minimum damage to the device is provided.
According to a first aspect of an embodiment of the present invention, there is provided an ignition method applied to a remote plasma source.
Fig. 1 is a flow chart of an ignition method applied to a remote plasma source according to an embodiment of the present invention.
In one or more embodiments, preferably, the ignition method applied to a remote plasma source includes:
s101, controlling discharge energy by adopting a coupling capacitor and setting 2 ignition power supplies OUT1 and OUT2;
S102, a cavity structure is arranged and is used for being connected with 2 ignition power supplies OUT1 and OUT2 to form a capacitive coupling discharge area;
s103, setting an ignition flow by using the chamber structure and an ion source ignition circuit;
s104, learning according to historical test data to obtain optimal preset time length;
S105, obtaining the preset time to form a control time sequence of the minimum MOS tube;
s106, after the ignition process is completed according to the control time sequence of the minimum MOS tube, recording all signal wave recordings.
In the embodiment of the present invention, the structure diagram of the conventional remote plasma source ignition mode is shown in fig. 10, and a series load resonant converter is conventionally used as an ignition circuit, however, once plasma is ignited, the inductance of the primary winding of the applicator transformer T4 is effectively shorted, and as Lm is shorted, the transformer leakage inductance (Le) resonates with Cr, and the resonant frequency of the L-reduction circuit becomes high according to the resonant frequency calculation formula f=1/[ 2pi (LC) ] at this time, and the resonant converter enters a capacitive state, so that an additional second higher resonant frequency current can flow to the switching power semiconductor device. The short-circuit current brings hard switch which is difficult to eliminate to the semiconductor device, but the short-circuit current is required to be reduced or clamped for reliable operation, and the series capacitor is required to be short-circuited by the high-voltage relay to be removed from the circuit at once, so that the resonance frequency point is reduced to enter the soft switch, and the damage to the switching tube is avoided. The ignition device has a complex structure, and has higher requirement on a high-voltage relay and is easy to damage.
Fig. 2 is a flowchart of an ignition method for a remote plasma source using a coupling capacitor to control discharge energy and setting 2 ignition power sources OUT1 and OUT2 according to an embodiment of the present invention.
As shown in fig. 2, in one or more embodiments, the controlling the discharge energy using the coupling capacitor and setting 2 ignition power sources OUT1 and OUT2 preferably includes:
s201, controlling discharge energy by adopting a coupling capacitor;
S202, the set electrode is an easily-processed metal electrode;
S203, adopting a parallel load resonant converter as an ignition power supply;
S204, two current measuring points A1 and A2 are set, wherein A1 is positioned at the output of the secondary side of the T2 transformer, and the node between the Q1 and Q2 switches of the bridge circuit faces the filter inductance direction.
In the embodiment of the invention, when the remote plasma ignition mode is set, an ignition circuit is changed, the discharge energy is controlled by adopting a coupling capacitor, and the set electrode adopts an easily-processed metal electrode; the ignition power supply adopts a parallel load resonant converter.
Fig. 3 is a flow chart of an embodiment of the invention for providing a chamber structure for use in an ignition method for a remote plasma source for connecting with 2 ignition sources OUT1 and OUT2 to form a capacitively coupled discharge region.
As shown in fig. 3, in one or more embodiments, the cavity structure is preferably configured to be connected to 2 ignition power sources OUT1 and OUT2 to form a capacitive coupling discharge area, and specifically includes:
s301, setting 2 cavity ignition blocks, wherein the cavity ignition blocks comprise a No. 1 ignition block and a No. 2 ignition block;
s302, connecting an ignition power supply OUT1 to an ignition block No. 1;
S303, connecting an ignition power supply OUT2 to an ignition block No. 2;
s304, the upper cavity and the lower cavity are isolated, the isolated materials are ceramic rings, and the ceramic rings are sealed by perfluoro O-shaped rings;
and S305, forming a capacitive coupling discharge area by an air gap formed by the section of the ignition block and the section of the chamber.
In the embodiment of the invention, 2 cavity ignition blocks are arranged, wherein the cavity ignition blocks comprise a No. 1 ignition block and a No. 2 ignition block, an upper cavity and a lower cavity are isolated, the isolated materials are ceramic rings, the ceramic rings are sealed by perfluoro O-shaped rings, an ignition power supply OUT1 is connected to the No. 1 ignition block, and an ignition power supply OUT2 is connected to the No. 2 ignition block; the air gap formed by the cross section of the ignition block and the cross section of the chamber can form a capacitive coupling discharge area.
Fig. 4 is a flow chart of an ignition process using a chamber configuration and an ion source ignition circuit setup in an ignition method for a remote plasma source according to an embodiment of the present invention.
In one or more embodiments, as shown in fig. 4, the setting an ignition process using the chamber structure and the ion source ignition circuit preferably specifically includes:
S401, receiving an ignition signal in a standby state;
S402, closing a relay to enable a circuit from an ignition power supply to an ignition transformer to be connected;
S403, an ignition power supply outputs an excitation signal, and an ignition transformer boosts to a voltage peak value;
S404, under the action of a voltage peak, the air gap is broken down and ionized, ionized argon ions collide with surrounding gas molecules, more ions are continuously ionized, and the discharge is carried out in a capacitive coupling discharge area until plasma rings form ignition;
And S405, if the current values of A1 and A2 reach the preset value, not starting timing, if so, starting timing to reach the preset time, then turning off the ignition power supply output, feeding back the ignition success, and if not, continuing to output the ignition power supply.
In the embodiment of the invention, an ignition signal is received in a standby state, 1. Firstly, a relay is closed, so that a circuit from an ignition power supply to an ignition transformer is connected. 2. The ignition power supply outputs an excitation signal, the ignition transformer boosts, under the action of Vspark and-Vspark, an air gap breaks down and ionizes, ionized argon ions collide with surrounding gas molecules, more ions are continuously ionized until reaching a preset time, a plasma ring is formed, at the moment, whether ignition is successful or not can be judged by measuring current values of A1 and A2, and the ignition is successful or not is judged when reaching the preset value.
Fig. 5 is a flowchart of learning to obtain an optimal preset time based on historical test data in an ignition method applied to a remote plasma source according to an embodiment of the present invention.
As shown in fig. 5, in one or more embodiments, preferably, the learning to obtain the optimal preset time period according to the historical test data specifically includes:
s501, extracting the preset time length of each ignition process, and judging the current values at the A1 and A2 positions;
S502, calculating average current by using a first calculation formula according to the current values of the A1 and A2 positions;
S503, calculating an optimal coefficient matrix according to a second calculation formula;
S504, extracting a preset time by using the optimal coefficient matrix;
The first calculation formula is as follows:
IAVG＝(I1+I2)÷2
wherein IAVG is average current, I 1 and I 2 are current values at positions A1 and A2, respectively;
The second calculation formula is as follows:
{k1,k2,……,kn}＝argmin(Σj i＝ ＝ s 1(Zj-Σi i ＝ ＝0 n kiIAVG i))
Where i is the number of powers, n is the total number of powers, Z j is the optimal duration obtained by theoretical analysis in the j-th acquisition, j is the number of acquisition times, s is the total number of acquisition times, argmin () is a function of the coefficient matrix { k 1,k2,……,kn } when Σj i＝ ＝ s 1(Zj-Σi i ＝ ＝0 nkiIAVG i) is extracted to be minimum, { k 1,k2,……,kn } is the optimal coefficient matrix, and k 1,k2,……,kn is the 1,2, … …, n coefficients of the optimal coefficient matrix in sequence;
the third calculation formula is as follows:
Y＝Σi i ＝ ＝0 n kiIAVG i
Wherein Y is a preset time.
In the embodiment of the invention, the test is carried out to obtain the control curve with the optimal preset time, so that the control time length of each ignition loop can be predicted according to the environmental condition acquired in advance.
Fig. 6 is a flowchart of a control sequence for obtaining the preset time and forming the minimum MOS transistor in the ignition method applied to the remote plasma source according to an embodiment of the present invention.
As shown in fig. 6, in one or more embodiments, preferably, the obtaining the preset time period to form the control timing sequence of the minimum MOS transistor specifically includes:
s601, obtaining the preset time length and calculating the preset time length of the time delay by using a fourth calculation formula;
s602, judging whether the MOS tube is required to be turned off or not according to the preset time length of the time delay, and setting a control time sequence of the MOS tube to realize the time delay turn-off;
the fourth calculation formula is as follows:
C＝1.2×Y
Wherein C is the preset time of the time delay.
In the embodiment of the invention, the control time length of the ignition loop is determined according to the preset margin, the time delay judgment of ignition can be definitely realized, and the control time sequence of the MOS tube with the minimum damage to the device is definitely stored as a control instruction.
Fig. 7 is a flowchart of recording all signal recordings after the ignition process is completed according to the control timing sequence of the minimum MOS transistor in an ignition method applied to a remote plasma source according to an embodiment of the present invention.
As shown in fig. 7, in one or more embodiments, preferably, after the ignition process is completed according to the control timing sequence of the minimum MOS transistor, all signal recordings are recorded, which specifically includes:
S701, after ignition is completed, recording excitation signals output by an ignition power supply, currents of parallel load resonant converters at A1 and A2 and ignition voltage is automatically carried out;
S702, storing the data into a memory card according to a preset format, and realizing off-line reading of the ignition recording data.
In the embodiment of the invention, the ignition process is completed, and the transformation process of the waveform is recorded in the ignition process.
According to a second aspect of an embodiment of the present invention, an ignition system for use with a remote plasma source is provided.
Fig. 8 is a block diagram of an ignition system for a remote plasma source according to an embodiment of the present invention.
In one or more embodiments, preferably, the ignition system applied to a remote plasma source includes:
A setting structure module 801, configured to control discharge energy by using a coupling capacitor and set 2 ignition power sources OUT1 and OUT2;
a set chamber module 802 for setting a chamber structure for connecting with 2 ignition power sources OUT1 and OUT2 to form a capacitive coupling discharge region;
an ignition module 803 is provided for setting an ignition flow using the chamber structure and the ion source ignition circuit;
the state acquisition module 804 is configured to learn to obtain an optimal preset time period according to the historical test data;
the self-adaptive adjustment module 805 is configured to obtain the preset time length, and form a control time sequence of the smallest MOS transistor;
And an ignition completion module 806, configured to record all signal records after completing the ignition process according to the control timing sequence of the minimum MOS tube.
In the embodiment of the invention, a system suitable for different structures is realized through a series of modularized designs, and the system can realize closed-loop, reliable and efficient execution through acquisition, analysis and control.
According to a third aspect of embodiments of the present invention, there is provided a computer readable storage medium having stored thereon computer program instructions which, when executed by a processor, implement a method according to any of the first aspect of embodiments of the present invention.
According to a fourth aspect of an embodiment of the present invention, there is provided an electronic device. Fig. 9 is a block diagram of an electronic device in one embodiment of the invention. The electronic device shown in fig. 9 is an ignition device commonly used in a remote plasma source. The electronic device can be a smart phone, a tablet computer and the like. As shown, the electronic device 900 includes a processor 901 and a memory 902. The processor 901 is electrically connected to the memory 902. Processor 901 is a control center of terminal 900 that connects the various parts of the overall terminal using various interfaces and lines, and performs various functions of the terminal and processes data by running or calling computer programs stored in memory 902, and calling data stored in memory 902, thereby performing overall monitoring of the terminal.
In this embodiment, the processor 901 in the electronic device 900 loads instructions corresponding to the processes of one or more computer programs into the memory 902 according to the following steps, and the processor 901 executes the computer programs stored in the memory 902, so as to implement various functions: the discharge energy is controlled by adopting a coupling capacitor, and 2 ignition power supplies OUT1 and OUT2 are arranged; the chamber structure is arranged and is used for being connected with 2 ignition power supplies OUT1 and OUT2 to form a capacitive coupling discharge area; setting an ignition flow by using the chamber structure and an ion source ignition circuit; learning according to historical test data to obtain optimal preset time length; obtaining the preset time length and forming a control time sequence of the minimum MOS tube; and after the ignition process is finished according to the control time sequence of the minimum MOS tube, recording all signal wave recordings.
Memory 902 may be used to store computer programs and data. The memory 902 stores a computer program having instructions executable in a processor. The computer program may constitute various functional modules. The processor 901 executes various functional applications and data processing by calling a computer program stored in the memory 902.
The structure diagram of the remote plasma source ignition mode provided by the scheme is shown in fig. 11, 1 and 2 represent cavity ignition blocks, 1 and 2 are isolated from an upper cavity and a lower cavity, the isolated materials are ceramic rings, the ceramic rings are used for sealing, an ignition power OUT1 is connected to the No. 1 ignition block, the voltage is Vspark, the ignition power OUT2 is connected to the No. 2 ignition block, the voltage is Vspark, a capacitive coupling discharge area CCP can be formed due to the air gap formed by the section of the ignition block and the section of the cavity, under the action of Vspark and Vspark, the air gap breaks down and ionizes, ionized argon ions collide surrounding gas molecules, more ions are continuously ionized until plasma rings are formed, whether ignition is successful or not can be judged by measuring the current values of A1 and A2, and the ignition success is judged if the preset value is reached, and the relay is disconnected.
As shown in FIG. 12, the scheme of the invention forms an ignition effect graph, wherein the 1 channel is an excitation signal output by an ignition power supply, the 3 channel is current of a parallel load resonant converter at A1, the 2 channel is Vspark ignition voltage, and the 4 channel is ignition current. The upper graph shows the whole waveform transformation process of successful breakdown discharge ignition. The whole discharging process is stable in waveform, the ignition time is short, the ignition success rate is high, and the improved ignition device meets the working requirement.
The technical scheme provided by the embodiment of the invention can comprise the following beneficial effects:
In the scheme of the invention, the cross section of the ignition block and the cross section of the cavity form a capacitive coupling discharge area by changing the structure of the cavity, the discharge energy is controlled by adopting a coupling capacitor, the discharge power is improved, and the electrode adopts an easily-processed metal electrode, so that the discharge is easy to occur; the power supply frequency can be applied from high frequency to low frequency or even pulse power supply, and an additional igniter is not required to be added, so that the structural complexity and the failure rate are reduced. And the ignition power supply adopts a parallel load resonant converter, so that the advantage of hard switching after burning caused by resonance point offset is not needed to be considered in the moment of arcing.
In the scheme of the invention, the optimal control curve is obtained through test, so that the ignition can be definitely realized every time an ignition loop is obtained, and the control time sequence of the MOS tube with the minimum damage to the device is provided.
It will be appreciated by those skilled in the art that embodiments of the present invention may be provided as a method, system, or computer program product. Accordingly, the present invention may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present invention may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, magnetic disk storage, optical storage, and the like) having computer-usable program code embodied therein.
The present invention is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems) and computer program products according to embodiments of the invention. It will be understood that each flow and/or block of the flowchart illustrations and/or block diagrams, and combinations of flows and/or blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
Claims (10)
1. An ignition method for a remote plasma source, the method comprising:
the discharge energy is controlled by adopting a coupling capacitor, and 2 ignition power supplies OUT1 and OUT2 are arranged;
The chamber structure is arranged and is used for being connected with 2 ignition power supplies OUT1 and OUT2 to form a capacitive coupling discharge area;
setting an ignition flow by using the chamber structure and an ion source ignition circuit;
Learning according to historical test data to obtain optimal preset time length;
obtaining the preset time length and forming a control time sequence of the minimum MOS tube;
and after the ignition process is finished according to the control time sequence of the minimum MOS tube, recording all signal wave recordings.
2. The ignition method for a remote plasma source according to claim 1, wherein the discharging energy is controlled by using a coupling capacitor and 2 ignition power sources OUT1 and OUT2 are provided, and the method specifically comprises:
Controlling discharge energy by adopting a coupling capacitor;
The set electrode adopts an easy-to-process metal electrode;
The ignition power supply adopts a parallel load resonant converter;
two current measuring points A1 and A2 are arranged, wherein A1 is positioned at the node between the Q1 and Q2 switches of the bridge circuit and faces the filter inductance direction, and A2 is positioned at the output of the secondary side of the T2 transformer.
3. The ignition method of claim 1, wherein the chamber structure is configured to be connected to 2 ignition power sources OUT1 and OUT2 to form a capacitive coupling discharge region, and specifically comprises:
Setting 2 cavity ignition blocks, wherein the cavity ignition blocks comprise a No.1 ignition block and a No. 2 ignition block;
connecting an ignition power supply OUT1 to an ignition block No. 1;
Connecting an ignition power supply OUT2 to an ignition block No. 2;
the upper cavity and the lower cavity are isolated, the isolated material is a ceramic ring, and the ceramic ring is sealed by a perfluorinated O-shaped ring;
the air gap formed by the cross section of the ignition block and the cross section of the chamber forms a capacitive coupling discharge region.
4. The ignition method of claim 1, wherein the ignition process is set by using a chamber structure and an ion source ignition circuit, and the ignition method comprises:
Receiving an ignition signal in a standby state;
closing the relay to enable a circuit from an ignition power supply to the ignition transformer to be connected;
the ignition power supply outputs an excitation signal, and the ignition transformer is boosted to a voltage peak value;
Under the action of a voltage peak value, the air gap is broken down and ionized, ionized argon ions collide with surrounding gas molecules, more ions are continuously ionized, and the discharge is carried out in a capacitive coupling discharge area until plasma rings form ignition;
and (3) whether the current values of A1 and A2 reach the preset value is measured, if so, starting timing, if so, stopping the output of the ignition power supply, and feeding back the ignition success, and if not, continuing to output the ignition power supply.
5. The ignition method according to claim 1, wherein the learning to obtain the optimal preset time period based on the historical test data comprises:
extracting the preset time length of each ignition process, and judging the current values at the A1 and A2 positions;
calculating average current according to the current values of the A1 and the A2 positions by using a first calculation formula;
Calculating an optimal coefficient matrix according to a second calculation formula;
extracting a preset time by using the optimal coefficient matrix;
The first calculation formula is as follows:
IAVG＝(I1+I2)÷2
wherein IAVG is average current, I 1 and I 2 are current values at positions A1 and A2, respectively;
The second calculation formula is as follows:
Wherein i is the number of powers, n is the total number of powers, Z j is the optimal duration obtained by theoretical analysis in the jth acquisition, j is the number of acquisition times, s is the total number of acquisition times, argmin () is the extraction The function of the coefficient matrix { k 1,k2,……,kn } at the minimum, { k 1,k2,……,kn } is the optimal coefficient matrix, and k 1,k2,……,kn is the 1 st, 2 nd, … … th and n th coefficients of the optimal coefficient matrix in sequence;
the third calculation formula is as follows:
Wherein Y is a preset time.
6. The ignition method for a remote plasma source according to claim 1, wherein the obtaining the preset time period to form a control timing sequence of a minimum MOS transistor specifically comprises:
Obtaining the preset time length and calculating the preset time length of the time delay by using a fourth calculation formula;
Judging how long the MOS tube needs to be turned off according to the preset time length of the time delay, and setting a control time sequence of the MOS tube to realize the time delay turn-off;
the fourth calculation formula is as follows:
C＝1.2×Y
Wherein C is the preset time of the time delay.
7. The ignition method for a remote plasma source according to claim 1, wherein after the ignition process is completed according to the control timing sequence of the minimum MOS tube, recording all signal recordings, specifically comprising:
After the ignition is completed, the record of the excitation signal output by the ignition power supply, the current of the parallel load resonant converter at the A1 and the A2 and the ignition voltage is automatically carried out;
and storing the data into a memory card according to a preset format to realize off-line reading of the ignition recording data.
8. An ignition system for use with a remote plasma source, wherein the system is adapted to perform the method of any one of claims 1-7, the system comprising:
the setting structure module is used for controlling discharge energy by adopting a coupling capacitor and setting 2 ignition power supplies OUT1 and OUT2;
The device comprises a chamber module, a capacitor-coupled discharge area and a control module, wherein the chamber module is used for setting a chamber structure and is used for being connected with 2 ignition power supplies OUT1 and OUT2 to form a capacitor-coupled discharge area;
the ignition module is used for setting an ignition flow by utilizing the chamber structure and the ion source ignition circuit;
the state acquisition module is used for learning to obtain optimal preset time according to the historical test data;
The self-adaptive adjustment module is used for obtaining the preset time length and forming the control time sequence of the minimum MOS tube;
and the ignition completion module is used for recording all signal wave records after the ignition process is completed according to the control time sequence of the minimum MOS tube.
9. A computer readable storage medium, on which computer program instructions are stored, which computer program instructions, when executed by a processor, implement the method of any of claims 1-7.
10. An electronic device comprising a memory and a processor, wherein the memory is configured to store one or more computer program instructions, wherein the one or more computer program instructions are executed by the processor to implement the method of any of claims 1-7.
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|---|---|---|---|
| CN202410349756.0A CN118335582B (en) | 2024-03-26 | Ignition method, system and equipment applied to remote plasma source |
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| CN202410349756.0A CN118335582B (en) | 2024-03-26 | Ignition method, system and equipment applied to remote plasma source |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104183452A (en) * | 2013-05-22 | 2014-12-03 | 崔大奎 | Remote plasma system having self-management function and self management method of the same |
| KR20170134012A (en) * | 2016-05-27 | 2017-12-06 | (주) 엔피홀딩스 | Plasma chamber using the chamber block possible plasma ignition |
| CN111052300A (en) * | 2017-09-15 | 2020-04-21 | Mks 仪器公司 | Apparatus and method for ignition of plasma system and for monitoring health condition of plasma system |
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104183452A (en) * | 2013-05-22 | 2014-12-03 | 崔大奎 | Remote plasma system having self-management function and self management method of the same |
| KR20170134012A (en) * | 2016-05-27 | 2017-12-06 | (주) 엔피홀딩스 | Plasma chamber using the chamber block possible plasma ignition |
| CN111052300A (en) * | 2017-09-15 | 2020-04-21 | Mks 仪器公司 | Apparatus and method for ignition of plasma system and for monitoring health condition of plasma system |
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