CN1182439C - Layot encode method for photoetching system of array-type integrated circit - Google Patents
Layot encode method for photoetching system of array-type integrated circit Download PDFInfo
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- CN1182439C CN1182439C CNB021041784A CN02104178A CN1182439C CN 1182439 C CN1182439 C CN 1182439C CN B021041784 A CNB021041784 A CN B021041784A CN 02104178 A CN02104178 A CN 02104178A CN 1182439 C CN1182439 C CN 1182439C
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- 238000000034 method Methods 0.000 title claims abstract description 35
- 238000001259 photo etching Methods 0.000 title claims abstract description 25
- 230000008676 import Effects 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 206010070834 Sensitisation Diseases 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000006399 behavior Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000008313 sensitization Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 241001269238 Data Species 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
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Abstract
The present invention relates to a layout encoding method of an array type integrated circuit photoetching system, which belongs to the technical field of encoding of a layout required by linear array light source scanning in an array type integrated circuit photoetching system. The present invention is characterized in that an encoding method group by group and column by column according to scanning width is adopted with regard to a bicolored (black and white) layout with the size of m*n pixels when a p*1 linear array light source is used for a scanning device; all the data is numbered by rows and uniformly divided into m/p groups, and every p rows are regarded as one group; one group, namely p rows of data, is encoded column by column each time until finish. Thereby, the present invention solves the problem of layout encoding of the array type integrated circuit photoetching system adopting a linear array light source.
Description
Technical field
A kind of array is used for the domain coding method of integrated circuit (IC) photo etching system, belongs to chip layout Computer Processing technical field, relates in particular to the required domain coding techniques of scanner with array light source in a kind of array integrated circuit (IC) photo etching system.
Background technology
The coding techniques of integrated circuit (IC) chip domain (soon the graph data of integrated circuit (IC) chip converts the technology of the needed control routine of litho machine to) is one of gordian technique of integrated circuit (IC) etching technology.
Xu Duanyi professor is in application number is 01120598.9,01120600.4,01123501.2 and 01144580.7 invention, proposed a kind of novel array light source that utilizes and carried out the array integrated circuit (IC) photo etching system of scanning photoetching, its photoetching principle as shown in Figure 1.This system's utilization has realized width scan to the modulation of array light source, promptly makes the pattern of all on the silicon chip in the certain width in the single pass process simultaneously by lithography.Left side figure is 100 * 1 a used array light source shape of optical head, and the while also is that array light source passes through after the optical head light path shape of imaging on silicon chip.Right figure is depicted as and is photo-etched into the figure principle, (white square is represented this not sensitization of place's material to the photoengraving pattern that its single source imaging obtains in the single pass process, and the black square is represented sensitization) be delegation wherein, arranged in patterns of these 100 row just is combined into target pattern together.Through retrieval both at home and abroad, do not find to be applicable to the domain coding method of array light source scanning photoetching system.
Summary of the invention
The objective of the invention is to provide a kind of domain coding method of practicality for the array integrated circuit (IC) photo etching system of utilizing array light source to carry out scanning photoetching.
The invention is characterized in: be two looks (black and white) domain (i.e. the matrix of a m * n, wherein each first value is 0 or 1 only, represents the black and white state of a pixel) of m * n pixel for a size.When scanister use be the array light source of p * 1 time, adopt by sweep length by group by the row Methods for Coding: all data evenly are divided into the m/p group by line number, by the group index in the coded file of an employing binary format, make capable one group of every p again.Be that the p line data pursues the row coding until finishing to one group at every turn.In the coded file of being addressed, added group index.Described coded file adopts binary format, and described binary format is divided into three parts: first is a file header, has the domain essential information; Second portion is a group index, has the coding reference position of each group data; Third part is the data field, has concrete domain coding.
Use proof: the present invention has realized intended purposes.
Description of drawings
Fig. 1: the scanning photoetching method synoptic diagram that uses array light source.
The coded object that Fig. 2: embodiment is used:
2a, a simple chip layout;
The data of each pixel correspondence in 2b, Fig. 2 a domain.
Fig. 3: two kinds of pairing grouping schemes of different sweep lengths:
3a, sweep length are 3;
3b, sweep length are 4.
Fig. 4: the coded sequence of single group data.It is first group of layout data of Fig. 3 a, and its coded sequence is encoded by row by the direction of arrow among the figure.
Fig. 5: the demonstration interface of coded program.
Fig. 6: the general flow chart of coded program.
Fig. 7: by group cataloged procedure general flow chart.
M among the figure, n are the length of domain and wide, and unit is the pixel number; P is the sweep length of scanister, i.e. the width of each group.Pointer index points to the memory address of current group index in file data.dat, and pointer pointer points to the memory address of present encoding.Parameter i and j represent the position of present picture element in domain (being matrix T) (i represents row, and j represents row, T[i] [j] promptly represent this pixel).Parameter k represents current group of encoding.And i=p*k-p+1 is exactly first row of k group, and p*k is last column of k group.
Embodiment
One, coded file standard
The coded object of present embodiment is the simple domain of one 12 * 12 pixel, and the corresponding binary code of its figure and each pixel as shown in Figure 2.(black square and code 1 this pixel of expression is the exposure area among the figure, and white square and code 0 this pixel of expression are exposure areas not.)
Below be example with the coded file of this domain, describe the coded file structure of domain coding method of the present invention in detail.
Coded file is that binary file is made up of three parts:
1. file header
File header comprises two parts content, and the one, the essential information of this chip layout, such as: design time, version of code, chip size, minimum feature etc.; The 2nd, the pairing photoetching process information of this coded file, such as: sweep length, sweep velocity, lithographic accuracy etc., see Fig. 5.
2. group index
In the coding method of existing monochrome image, because general handled object data is smaller, the pixel number of general figures is all 10
7This is below order of magnitude, and data volume is little, does not also have simultaneously to read the needs of a certain partial data at a high speed separately, thereby does not need a certain partial data is set up index.And concerning chip layout, the chip layout of a 10mm * 10mm, if its minimum feature is 100nm, the pixel number of this domain will reach 10 so
10The array integrated circuit (IC) photo etching system adopts the width scan mode, needs to read the data of each group in the domain fast, thereby added group index in coded file.
Group index is a string data, and they write down the corresponding coding of each group data start address hereof.The data length of single group index is 32byte.It can make the visit of a certain group of data more direct, faster.
3. domain is encoded
The domain coding adopts the binary coding of carrying out by group.The width of group is the sweep length of scanister, and control system just can read layout data according to sweep length easily when reading coding like this.
The chip layout of 12 * 12 pixels shown in Figure 2, if the sweep length of photoetching process is 3, then 12 line data can be divided into 4 groups (the 1st, 2,3 behavior I group, the 4th, 5,6 behavior II group, and the like, shown in the left figure of Fig. 3).The coding of each group data adopts by the row coded system, and for example the coded sequence of Fig. 3 left side figure I group data as shown in Figure 4.Can obtain this group binary coding by arrow indication order is:
10010111,11011000,00100110,01100101,1110 (16 carry system codes are 97D82665E).
In like manner, the coding of its II group, III group, IV group is as follows,
II group: 01001011,00100100,00011110,10011001,1001 (4B241E999)
III group: 00000100,10010010,01000000,00000000,1011 (04924000B)
IV group: 10011011,01101101,10100001,01111010,0000 (9B6D17A0)
Thereby the digital coding that obtains this domain is 97D82665E, 4B241E999,04924000B, 9B6D17A0.
In like manner, if sweep length is 4, then 12 line data can be divided into 3 groups (shown in the right figure of Fig. 3), and the binary code of its each group is as follows:
I group: 10001010,11111010,10000000,10001101,01110011,01101100 (8AFA808D736C)
II group: 10001000,10001000,10000000,11001000,00001000,11000101 (888880C808C5)
III group: 01001110,11101110,11101110,01000001,00110110,11001000 (4EEEEE4136C8)
Thereby the digital coding that obtains this domain is 8AFA808D736C, 888880C808C5,4EEEEE4136C8.
One, the program of coding realizes
Cataloged procedure all is to be realized by special coded program, as long as the user provides the monochrome image (PCX file) of chip layout to import photoetching process information (sweep length etc.) then in program, program can be finished coding automatically.The interface of coding demonstration program as shown in Figure 5.In text edit box, import corresponding information, click START button and get final product.
Main program flow chart as shown in Figure 5.Be to the wherein simple declaration of several piths in the master routine below:
1. read layout data
Promptly open the monochrome image file (data.pcx) of common coded system, read domain essential information (the long m of domain, wide n etc.) and all graph datas.In C++, can directly open file with the fopen function, read each byte (being the pixel data of figure) of the file header (being the domain master data) and the data division of data.pcx file with the fread function, the view data of reading is kept in the matrix T of m * n and (can explains with plurality of data structures such as two-dimensional array, tables on computers, for simplifying cataloged procedure, generally adopt two-dimensional array).
2. manually import photoetching process information
Photoetching process information (such as sweep length, sweep velocity, lithographic accuracy etc.), by on the program interface text edit box in import and can be received by program.
3. in coded file data.dat, write file header
Being about to domain essential information and photoetching process information writes among the file data.dat with binary mode.
4. coding obtains code and group index and writes file data.dat by group
Wherein the specific procedure flow process of cataloged procedure is seen Fig. 5 by group.The step that initialization procedure is carried out in the process flow diagram is as follows:
i＝1，j＝1，k＝1；
Index=1000 (group index is from the 1000th byte of file data.dat);
Pointer=index+32*m/p (graph data is after the group index end).
Coded program is encoded by group according to the layout data that flow process shown in Figure 7 will be kept at matrix T, is written among the file data.dat.
This shows, the invention solves the domain encoded question of the array integrated circuit (IC) photo etching system of using array light source.
Claims (3)
1, a kind of domain coding method of array integrated circuit (IC) photo etching system, the step that contains line by line coding, it is characterized in that: be two look black and white domains of m * n pixel for a size, when scanister use be the array light source of p * 1 time, adopt by sweep length and pursue the row Methods for Coding by group: all data evenly are divided into the m/p group by line number, again by the group index in the coded file of an employing binary format, make capable one group of every p, be that the p line data pursues the row coding until finishing to one group at every turn.
2, the domain coding method of array integrated circuit (IC) photo etching system according to claim 1 is characterized in that: added group index in the coded file of being addressed.
3, the domain coding method of array integrated circuit (IC) photo etching system according to claim 1 and 2, it is characterized in that: described coded file adopts binary format, described binary format is divided into three parts: first is a file header, has the domain essential information; Second portion is a group index, has the coding reference position of each group data; Third part is the data field, has concrete domain coding.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021041784A CN1182439C (en) | 2002-03-15 | 2002-03-15 | Layot encode method for photoetching system of array-type integrated circit |
| US10/389,043 US7012270B2 (en) | 2002-03-15 | 2003-03-14 | Photolithography system having multiple adjustable light sources |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021041784A CN1182439C (en) | 2002-03-15 | 2002-03-15 | Layot encode method for photoetching system of array-type integrated circit |
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| Publication Number | Publication Date |
|---|---|
| CN1369859A CN1369859A (en) | 2002-09-18 |
| CN1182439C true CN1182439C (en) | 2004-12-29 |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103871085A (en) * | 2012-12-14 | 2014-06-18 | 北京华大九天软件有限公司 | Layout data compression method |
| CN116408575B (en) * | 2021-12-31 | 2024-06-04 | 广东美的白色家电技术创新中心有限公司 | Method, device and system for locally scanning and eliminating workpiece reflection interference |
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