CN118243478A - Hall sample clamp for corrosion treatment and Hall effect tester - Google Patents

Abstract

The invention relates to a Hall sample clamp for corrosion treatment and a Hall effect tester, wherein the Hall sample clamp comprises: the bracket comprises a fixed frame and a tray which are connected; the compression assembly comprises a mounting piece and at least four compression bars, the mounting piece is connected to the fixed frame in an axially movable mode, the at least four compression bars are respectively hinged to the mounting piece, and the tail ends of the compression bars are provided with sucking discs; the driving assembly is used for driving the mounting piece to move along the axial direction; when the Hall sample is clamped, the Hall sample is placed on the tray, four suckers cover the upper surfaces of metal electrodes positioned at four corners of the Hall sample, the driving assembly drives the mounting piece to drive at least four compression bars to move downwards, and the Hall sample is pressed on the tray through the suckers. The Hall sample clamp disclosed by the invention can stably clamp the Hall sample, prevent the Hall sample from falling in the corrosion treatment process to influence the corrosion effect, prevent the metal electrode from being corroded, and further improve the accuracy and stability of the follow-up Hall effect test result.

Description

Hall sample clamp for corrosion treatment and Hall effect tester

Technical Field

The invention relates to the technical field of semiconductors, in particular to a Hall sample clamp for corrosion treatment and a Hall effect tester.

Background

With the development of wireless communication technology, a pseudo high electron mobility field effect transistor (pHEMT) is widely studied and applied due to the characteristics of high-speed switching, radio frequency amplification and the like, and the pHEMT device generally comprises a cap layer and a channel layer, and since the carrier concentration and mobility in the channel layer play a decisive role in the performance of the device, the carrier concentration and mobility of the channel layer are characterized by utilizing a hall effect test, which is important to judge the quality of the device.

However, if the hall effect test is directly performed on the pHEMT device, the high-doping concentration of the cap layer on the surface will significantly affect the test result, so that the carrier concentration and mobility of the channel layer cannot be accurately reflected, and therefore, the cap layer needs to be removed by corrosion, so that a hall sample without a high-doping cap layer structure is constructed.

In the existing corrosion treatment process, in the process of clamping a small-size (1 cm x1 cm) Hall sample by using a clamp, the sample easily falls into the corrosion liquid, so that the corrosion process is difficult to control. In addition, the metal electrode materials on the four corners of the Hall sample are easily affected by corrosive liquid, and the surface is oxidized or corroded, so that the corroded Hall sample is difficult to form good ohmic contact in the Hall effect test process, and the accuracy and stability of the result are affected due to the fact that the test results of a plurality of times have larger errors.

Disclosure of Invention

Based on the above-mentioned drawbacks of the prior art, an object of the present invention is to provide a hall sample holder capable of stably holding a hall sample and capable of preventing a metal electrode on the surface of the hall sample from being corroded.

Therefore, the invention provides the following technical scheme.

The invention provides a Hall sample clamp for corrosion treatment, which comprises:

The bracket comprises a fixed frame and a tray which are connected;

The compression assembly comprises a mounting piece and at least four compression rods, the mounting piece is connected to the fixed frame in an axially movable mode, the at least four compression rods are hinged to the mounting piece respectively, and the tail ends of the compression rods are provided with sucking discs;

a drive assembly to drive the mount to move in the axial direction;

When the Hall sample is clamped, the Hall sample is placed on the tray, four suckers are covered on the upper surfaces of metal electrodes positioned at four corners of the Hall sample, the driving assembly drives the mounting piece to drive the at least four pressing rods to move downwards, and the Hall sample is pressed on the tray through the suckers.

Preferably, the driving assembly comprises an actuating member and a pushing member, wherein the pushing member is positioned below the actuating member and is abutted against the upper end surface of the mounting member;

When the actuating piece is pressed downwards, the actuating piece actuates the pushing piece to push the mounting piece to move downwards to a pressing position, and the mounting piece drives the at least four pressing rods to press the Hall sample downwards.

Preferably, the actuating member is provided with a gear tooth portion, and the pushing member is provided with a plurality of convex teeth;

The driving assembly further comprises a guide sleeve and an elastic piece, wherein the inner wall of the guide sleeve is provided with a plurality of limiting grooves and tooth grooves which are distributed in sequence along the circumferential direction of the guide sleeve, the limiting grooves extend along the axial direction of the guide sleeve, and the actuating piece is connected in the guide sleeve in an axially movable manner;

When the driving assembly is in an initial state, the convex teeth are limited in the limiting grooves and are propped against the gear tooth parts but are not fully meshed;

When the actuating piece moves downwards under the external force, the actuating piece pushes the pushing piece to move downwards, the tooth parts push the convex teeth to be separated from the limit grooves, and the pushing piece rotates until the convex teeth are completely meshed with the tooth parts;

When the external force on the actuating piece is removed, the pushing piece moves upwards to the position that the convex teeth are meshed with the tooth grooves to stop under the upward elastic force of the elastic piece, and at the moment, the mounting piece is in the pressing position.

Preferably, the inner wall of the guide sleeve is provided with a plurality of guide inclined planes, and the limit groove, the tooth groove and the guide inclined planes are sequentially distributed along the circumferential direction;

When the pressing component needs to be reset, the pushing component is pushed downwards through the actuating component, so that the convex teeth are separated from the tooth grooves, then, the external force on the actuating component is removed, the convex teeth move to be limited in the next limiting groove under the upward elastic force of the elastic component and the surface matching of the convex teeth and the guide inclined surface, and the installation component drives the at least four pressing rods to reset.

Preferably, the tooth portion includes eight teeth, the number of the teeth is four and is uniformly spaced apart along the circumferential direction thereof, and the number of the limit grooves and the number of the tooth grooves are four.

Preferably, the elastic piece is a spring and is sleeved on the periphery of the mounting piece; the mounting piece is provided with a first abutting portion, the fixing frame is provided with a second abutting portion, the top end of the elastic piece abuts against the first abutting portion, and the bottom end of the elastic piece abuts against the second abutting portion.

Preferably, the suction cup is rotatably connected to the end of the compression bar.

Preferably, the upper part of the fixed frame is provided with an annular supporting frame and a mounting box, and the mounting box is fixed on the annular supporting frame; the mounting member is axially movably connected to the mounting box, and the drive assembly is mounted to the mounting box.

Preferably, the hall sample holder comprises a grip portion connected to the tip of the actuator of the drive assembly.

The invention also provides a Hall effect tester which comprises the Hall sample clamp for corrosion treatment.

The invention has the following technical effects:

The Hall sample clamp provided by the invention can stably clamp a Hall sample, prevent the Hall sample from falling in the corrosion treatment process to influence the corrosion effect, and prevent the metal electrode from being corroded, so that the accuracy and stability of a subsequent Hall effect test result can be improved.

Drawings

FIG. 1 is a schematic diagram of a Hall sample fixture of the present invention;

FIG. 2 is a schematic perspective view of an actuator according to the present invention;

FIG. 3 is a schematic perspective view of a pusher according to the present invention;

FIG. 4 is a perspective cross-sectional view of the guide sleeve of the present invention;

FIG. 5 is a cross-sectional view of the assembled structure of the drive assembly and mounting member of the present invention;

Fig. 6 is a simplified view of a partial assembly structure of the mounting member, the pressing rod and the elastic member of the present invention.

Description of the reference numerals

100. A hall sample holder;

1. A bracket; 11. a fixed frame; 111. a second abutting portion; 112. an annular support frame; 113. a mounting box; 114. a connecting rod; 115. a bottom bracket; 12. a tray;

2. A compression assembly; 21. a mounting member; 211. a first abutting portion; 22. a compression bar; 23. a suction cup; 24. a hinge;

3. a drive assembly; 31. an actuator; 311. a gear tooth portion; 312. a limit protrusion; 32. a pushing member; 321. convex teeth; 33. a guide sleeve; 331. a limit groove; 332. tooth slots; 333. a guide slope; 34. an elastic member;

4. a holding part.

Detailed Description

In order to make the technical scheme and the beneficial effects of the application more obvious and understandable, the following detailed description is given by way of example. Unless defined otherwise, technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

In the description of the present invention, unless explicitly defined otherwise, terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "height", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., refer to an orientation or positional relationship based on that shown in the drawings, and are merely for convenience of simplifying the description of the present invention, and do not indicate that the apparatus or element referred to must have a specific orientation, be constructed and operated in a specific orientation, i.e., are not to be construed as limiting the present invention.

In the present invention, the terms "first", "second" are used for descriptive purposes only and are not to be construed as relative importance of the features indicated or the number of technical features indicated. Thus, a feature defining "first", "second" may explicitly include at least one such feature. In the description of the present invention, "plurality" means at least two; "plurality" means at least one; unless otherwise specifically defined.

In the present invention, the terms "mounted," "connected," "secured," "disposed," and the like are to be construed broadly, unless otherwise specifically limited. For example, "connected" may be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, or can be communicated between two elements or the interaction relationship between the two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present invention, unless explicitly defined otherwise, a first feature "on", "above", "over" and "above", "below" or "under" a second feature may be that the first feature and the second feature are in direct contact, or that the first feature and the second feature are in indirect contact via an intermediary. Moreover, a first feature "above," "over" and "on" a second feature may be that the first feature is directly above or obliquely above the second feature, or simply indicates that the level of the first feature is higher than the level of the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the level of the first feature is less than the level of the second feature.

The references to "upper" and "lower" in this invention are both made to the designation in fig. 1.

The hall sample fixture of the present invention is described in detail below with reference to fig. 1 to 6.

In this embodiment, as shown in fig. 1 to 6, the hall sample holder 100 is configured to hold a hall sample and put the hall sample into an etching solution for etching treatment, the hall sample holder 100 includes a support 1, a pressing assembly 2 and a driving assembly 3, the support 1 includes a fixed frame 11 and a tray 12 connected to each other, the pressing assembly 2 includes a mounting member 21 and four pressing rods 22, the mounting member 21 is axially movably connected to the fixed frame 11, the four pressing rods 22 are respectively hinged to the mounting member 21, and a suction cup 23 is disposed at an end of each pressing rod 22.

When the Hall sample is clamped, the Hall sample is firstly placed on the tray 12, then four suckers 23 are covered on the upper surfaces of metal electrodes positioned at four corners of the Hall sample, the driving assembly 3 drives the mounting piece 21 to drive the four pressing rods 22 to move downwards, the Hall sample is pressed downwards through the four suckers 23, and therefore the suckers 23 are matched with the tray 12 to clamp the Hall sample. In the etching process, the hall sample holder 100 is placed in an etching liquid together with the hall sample held by the holder.

Through adopting above-mentioned technical scheme, through compressing tightly subassembly 2 and drive assembly 3 cooperation, can stabilize centre gripping hall sample, avoid hall sample to take place to drop and influence corrosion effect in corrosion treatment process to, hall sample is usually less and the quality is lighter, cooperatees through tray 12 and sucking disc 23 and carries out the centre gripping, and the centre gripping is stable and safe, and sucking disc 23 can also cover metal electrode, in order to prevent that metal electrode from being corroded, and then can improve the accuracy and the stability of follow-up hall effect test result.

Of course, the number of the pressing rods 22 is not limited to four, but may be five, six or more, and the ends of all the pressing rods 22 are pressed down along the edge of the hall sample, wherein four pressing rods 22 are used to press down on four metal electrodes of the hall sample.

In one embodiment, as shown in fig. 1 to 3 and 5, the driving assembly 3 includes an actuating member 31 and a pushing member 32, and the pushing member 32 is located below the actuating member 31 and abuts against an upper end surface of the mounting member 21. When the clamping operation is performed, the actuating member 31 is pressed downwards, and the actuating member 31 actuates the pushing member 32, so that the pushing member 32 pushes the mounting member 21 to move downwards to the pressing position, and finally, the mounting member 21 drives the four pressing rods 22 to press the hall sample downwards.

Further, as shown in fig. 1 to 6, the bottom end of the actuator 31 is provided with a gear tooth portion 311, the gear tooth portion 311 includes eight gear teeth, the outer periphery of the pusher 32 is provided with four teeth 321, and the four teeth 321 are uniformly spaced apart along the circumferential direction thereof. The driving assembly 3 further comprises a guide sleeve 33 and an elastic piece 34, wherein limiting grooves 331 and tooth grooves 332 which are distributed in sequence along the circumferential direction of the inner wall of the guide sleeve 33 are formed in the inner wall of the guide sleeve 33, the number of the limiting grooves 331 and the number of the tooth grooves 332 are four, and the limiting grooves 331 and the tooth grooves 332 are alternately distributed in sequence. The limiting groove 331 extends along the axial direction of the guide sleeve 33, and the actuating member 31 is axially movably connected in the guide sleeve 33.

When the driving assembly 3 is in the initial state, the end of the pushing member 32 provided with the protruding teeth 321 is located in the guiding sleeve 33, the protruding teeth 321 are limited in the limiting groove 331, and the gear tooth portion 311 is located in the guiding sleeve 33, and the protruding teeth 321 and the gear tooth portion 311 are abutted against each other but cannot be completely meshed due to the limitation of the limiting groove 331 on the position of the protruding teeth 321, that is, the tooth tips of the protruding teeth 321 and the gear tooth portion 311 are abutted against each other.

When the hall sample is clamped, the actuator 31 is manually pressed downwards, the actuator 31 pushes the pushing member 32 to move downwards, after the tooth portion 311 pushes the tooth 321 to separate from the limit groove 331 downwards, the tooth surface of the tooth 321 moves along the gear surface of the gear portion 311 after the tooth 321 separates from the limit groove 331, so that the pushing member 32 rotates until the tooth 321 is fully engaged with the tooth portion 311, in the process, the pushing member 32 pushes the mounting member 21 to move downwards by a first distance and the elastic member 34 is compressed. Then, the user removes the external force applied to the actuating member 31, the mounting member 21 pushes the pushing member 32 upward under the upward elastic force of the elastic member 34, the pushing member 32 pushes the actuating member 31 upward, and the pushing member 32 stops when the teeth 321 are engaged with the teeth grooves 332, during which the mounting member 21 moves upward by the elastic member 34 by the second distance, and thus, the mounting member 21 moves downward by a certain distance (a value obtained by subtracting the second distance from the first distance) with respect to the initial position, and at this time, the mounting member 21 is in the pressed position.

Further, as shown in fig. 4 and 5, four guiding inclined planes 333 are provided on the inner wall of the guiding sleeve 33, and the limiting groove 331, the tooth slot 332 and the guiding inclined planes 333 are sequentially distributed along the circumferential direction. When the pressing component 2 needs to be reset, the actuating element 31 is manually pressed downwards, the actuating element 31 pushes the pushing element 32 downwards, so that the convex teeth 321 are separated from the tooth grooves 332, in the process, the pushing element pushes the mounting element 21 to move downwards and the elastic element 34 is compressed, then, the external force applied to the actuating element 31 is removed, under the upward elastic force of the elastic element 34, the mounting element 21 pushes the pushing element 32 upwards, the pushing element 32 moves upwards until the convex teeth 321 are abutted against the guide inclined surfaces 333, in this way, under the matching of the convex teeth 321 and the surface of the guide inclined surfaces 333, the convex teeth 321 move upwards and rotate, finally move to be limited in the next limiting groove 331, the mounting element 21 continues to move upwards, and finally, the four pressing rods 22 are driven to reset, and at the moment, the hall sample after corrosion treatment can be taken out.

Further, as shown in fig. 2 and 5, the outer periphery of the actuating member 31 is provided with a plurality of limiting protrusions 312, and the limiting protrusions 312 are axially movably limited in the limiting grooves 331, and the actuating member 31 is limited to rotate by the limiting grooves 331.

Of course, the number of teeth of the tooth portion 311 is not limited to eight, the number of teeth 321 is not limited to four, and the number of the limit grooves 331, the tooth grooves 332, and the guide inclined surfaces 333 is not limited to four, and the number of these components may be limited to satisfy the above-described matching relationship.

It should be understood that the pushing member 32 may be located within the guide sleeve 33 all the way through the operation of the drive assembly 3 or may extend partially beyond the guide sleeve 33, and the upper end of the mounting member 21 may extend into the guide sleeve 33 or may be located outside the guide sleeve 33 all the way.

In one embodiment, as shown in fig. 5 and 6, the elastic member 34 is a spring, and has a simple structure, and the elastic member 34 is sleeved on the outer periphery of the mounting member 21. The mount 21 is provided with a first abutting portion 211, the fixed frame 11 is provided with a second abutting portion 111, the top end of the elastic member 34 abuts against the first abutting portion 211, and the bottom end abuts against the second abutting portion 111. When the mounting member 21 moves downward under the drive of the drive assembly 3, the first abutment 211 presses the elastic member 34 downward so that the elastic member 34 is in a compressed state. When the pushing member 32 of the driving assembly 3 moves upward to return, the elastic member 34 pushes the first abutment 211 upward to return the mounting member 21.

In one embodiment, the suction cup 23 is rotatably connected to the end of the compression bar 22, facilitating the user's adjustment of the suction cup 23 so that the suction cup 23 fully covers the corresponding metal electrode. Preferably, the suction cup 23 is 360 ° rotatably connected to the compression bar 22. When the clamping operation is performed, the hall sample is placed on the tray 12 with the front side facing upwards, the suction cups 23 are adjusted to fully cover the corresponding metal electrodes, and then the actuating member 31 is manually operated so that the pressing bar 22 presses the suction cups 23 downward, so that the four suction cups 23 press the metal electrodes at the four corners of the hall sample downward. The surface of the Hall sample with the metal electrode is the front surface.

In one embodiment, as shown in fig. 1, an annular supporting frame 112 and a mounting box 113 are provided at an upper portion of the fixing frame 11, and the mounting box 113 is fixed to the annular supporting frame 112. The mounting box 113 is provided with a cavity, the top end of the mounting piece 21 is inserted into the mounting box 113, a sealing ring is arranged at the assembly position of the mounting piece and the mounting box 113, the bottom end of the actuating piece 31 extends into the mounting box 113, a sealing ring is arranged at the assembly position of the actuating piece 31 and the mounting box, the other end of the actuating piece is positioned outside the mounting box 113, and the pushing piece 32, the guide sleeve 33 and the elastic piece 34 are positioned in the mounting box 113. Through setting up mounting box 113, can improve the pleasing to the eye degree of hall sample anchor clamps 100 outward appearance on the one hand, on the other hand can prevent corrosive liquid contact drive assembly 3 to avoid the residual of corrosive liquid to influence the cooperation transmission of each part of drive assembly 3.

Further, as shown in fig. 1, the fixing frame 11 includes four connection bars 114 and a bottom bracket 115, the top ends of the connection bars 114 are connected to the ring-shaped supporting frame 112 and the bottom ends thereof are connected to the bottom bracket 115, and the tray 12 is fixed to the bottom bracket 115.

In one embodiment, as shown in fig. 1, the hall sample fixture 100 includes a grip portion 4, where the grip portion 4 is connected to the top end of the actuator 31 of the driving assembly 3, and the grip portion 4 is gripped by a user so as to press the actuator 31 downward. Preferably, the holding portion 4 has a ring-shaped structure, so that a finger of a user can pass through the holding portion 4 conveniently. The shape of the grip portion 4 may be a perfect circle, an ellipse or a square.

In one embodiment, as shown in FIG. 6, the strut 22 is pivotally connected to the mounting member 21 by a hinge 24.

In one embodiment, the hall sample holder 100 is made of polytetrafluoroethylene with heat resistance, acid resistance and alkali resistance, the height of the hall sample holder 100 is 15cm, the tray 12 is a square structure of 1.5cm×1.5cm×0.3cm, the suction cup 23 is a square structure of 1mm×1mm, and the shape of the suction cup 23 is not limited to a round shape or a square shape.

The invention also provides a Hall effect tester, which comprises a testing device and the Hall sample clamp 100 for corrosion treatment, wherein before testing, the Hall sample is clamped by the Hall sample clamp 100 for corrosion treatment so as to remove the cap layer on the surface of the Hall sample. Through optimizing the structure of hall sample fixture 100, can stabilize centre gripping hall sample and protect the metal electrode on the hall sample, can solve corrosion operation and data test unstable problem.

It should be understood that the above examples are illustrative and are not intended to encompass all possible implementations encompassed by the claims. Various modifications and changes may be made in the above embodiments without departing from the scope of the disclosure. Likewise, the individual features of the above embodiments can also be combined arbitrarily to form further embodiments of the invention which may not be explicitly described. Therefore, the above examples merely represent several embodiments of the present invention and do not limit the scope of protection of the patent of the present invention.

Claims (10)

1. A hall sample holder for corrosion treatment, the hall sample holder comprising:

a bracket (1) comprising a fixed frame (11) and a tray (12) which are connected;

The compression assembly (2) comprises a mounting piece (21) and at least four compression rods (22), wherein the mounting piece (21) is axially movably connected with the fixed frame (11), the at least four compression rods (22) are respectively hinged to the mounting piece (21), and the tail ends of the compression rods (22) are provided with sucking discs (23);

-a drive assembly (3) for driving the mounting (21) to move in the axial direction;

When the Hall sample is clamped, the Hall sample is placed on the tray (12), four suckers (23) are covered on the upper surfaces of metal electrodes positioned at four corners of the Hall sample, the driving assembly (3) drives the mounting piece (21) to drive the at least four pressing rods (22) to move downwards, and the Hall sample is pressed on the tray (12) through the suckers (23).

2. The hall sample holder for corrosion treatment according to claim 1, wherein the driving assembly (3) comprises an actuating member (31) and a pushing member (32), and the pushing member (32) is located below the actuating member (31) and abuts against an upper end surface of the mounting member (21);

When the actuating piece (31) is pressed downwards, the actuating piece (31) actuates the pushing piece (32) to push the mounting piece (21) to move downwards to a pressing position, and the mounting piece (21) drives the at least four pressing rods (22) to press the Hall sample downwards.

3. The hall sample holder for etching treatment according to claim 2, wherein the actuator (31) is provided with a gear tooth portion (311), and the pusher (32) is provided with a plurality of convex teeth (321);

The driving assembly (3) further comprises a guide sleeve (33) and an elastic piece (34), wherein the inner wall of the guide sleeve (33) is provided with a plurality of limiting grooves (331) and tooth grooves (332) which are distributed in sequence along the circumferential direction of the guide sleeve, the limiting grooves (331) extend along the axial direction of the guide sleeve (33), and the actuating piece (31) is connected in the guide sleeve (33) in an axially movable manner;

Wherein, when the driving component (3) is in an initial state, the convex teeth (321) are limited in the limiting grooves (331) and are propped against the gear tooth parts (311) but are not fully meshed;

When the actuating piece (31) moves downwards under the external force, the actuating piece pushes the pushing piece (32) to move downwards, the gear tooth part (311) pushes the convex tooth (321) to be separated from the limit groove (331), and the pushing piece (32) rotates until the convex tooth (321) is completely meshed with the gear tooth part (311);

when the external force on the actuating piece (31) is removed, the pushing piece (32) moves upwards under the upward elastic force of the elastic piece (34) until the convex teeth (321) are meshed with the tooth grooves (332) to stop, and at the moment, the mounting piece (21) is in the pressing position.

4. A hall sample holder for corrosion treatment according to claim 3, wherein the inner wall of the guide sleeve (33) is provided with a plurality of guide inclined surfaces (333), and the limit grooves (331), the tooth grooves (332) and the guide inclined surfaces (333) are distributed in this order in the circumferential direction;

When the pressing component (2) needs to be reset, the pushing component (32) is pushed downwards through the actuating component (31), so that the convex teeth (321) are separated from the tooth grooves (332), then, the external force on the actuating component (31) is removed, under the upward elastic force of the elastic component (34) and the surface matching of the convex teeth (321) and the guide inclined planes (333), the convex teeth (321) move to be limited in the next limiting groove (331), and the mounting component (21) drives the at least four pressing rods (22) to reset.

5. A hall sample holder for corrosion treatment according to claim 3, wherein the tooth portion (311) comprises eight teeth, the number of the teeth (321) is four and is uniformly spaced apart along the circumference thereof, and the number of the limit grooves (331) and the number of the tooth grooves (332) are four.

6. A hall sample holder for corrosion treatment according to claim 3, wherein the elastic member (34) is a spring and is fitted around the outer periphery of the mounting member (21); the mounting piece (21) is provided with a first abutting portion (211), the fixing frame (11) is provided with a second abutting portion (111), the top end of the elastic piece (34) abuts against the first abutting portion (211), and the bottom end of the elastic piece abuts against the second abutting portion (111).

7. The hall sample holder for etching treatment according to any one of claims 1 to 6, wherein said suction cup (23) is rotatably connected to the end of said pressing rod (22).

8. The hall sample holder for corrosion treatment according to any one of claims 1 to 6, wherein an annular supporting frame (112) and a mounting case (113) are provided at an upper portion of the fixing frame (11), and the mounting case (113) is fixed to the annular supporting frame (112); the mounting member (21) is axially movably connected to the mounting box (113), and the driving assembly (3) is mounted to the mounting box (113).

9. The hall sample holder for etching treatment according to any one of claims 1 to 6, characterized in that the hall sample holder comprises a grip portion (4), the grip portion (4) being connected to the tip of an actuating member (31) of the drive assembly (3).

10. A hall effect tester comprising a hall sample fixture for corrosion treatment according to any one of claims 1 to 9.