CN118203359A - Microneedle sensor integrating drug delivery and multi-substance multi-channel detection and preparation method thereof - Google Patents

Microneedle sensor integrating drug delivery and multi-substance multi-channel detection and preparation method thereof Download PDF

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CN118203359A
CN118203359A CN202410307934.3A CN202410307934A CN118203359A CN 118203359 A CN118203359 A CN 118203359A CN 202410307934 A CN202410307934 A CN 202410307934A CN 118203359 A CN118203359 A CN 118203359A
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array
micro
microelectrode
microneedle
layer
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王欣怡
蔡新霞
罗金平
刘瑶瑶
江龙辉
张奎
张司羽
曹瀚文
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Aerospace Information Research Institute of CAS
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    • A61M37/00Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
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    • G01MEASURING; TESTING
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    • G01MEASURING; TESTING
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    • G01N27/327Biochemical electrodes, e.g. electrical or mechanical details for in vitro measurements
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    • G01MEASURING; TESTING
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    • G01N27/30Electrodes, e.g. test electrodes; Half-cells
    • G01N27/327Biochemical electrodes, e.g. electrical or mechanical details for in vitro measurements
    • G01N27/3275Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction
    • G01N27/3278Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction involving nanosized elements, e.g. nanogaps or nanoparticles
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B10/00Other methods or instruments for diagnosis, e.g. instruments for taking a cell sample, for biopsy, for vaccination diagnosis; Sex determination; Ovulation-period determination; Throat striking implements
    • A61B10/0045Devices for taking samples of body liquids
    • A61B2010/008Interstitial fluid
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A61M2037/0053Methods for producing microneedles

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Abstract

The invention discloses a microneedle sensor integrating drug delivery and multi-substance multi-channel detection and a preparation method thereof, comprising the following steps: an insulating substrate on which a microelectrode array is formed, wherein the microelectrodes of the microelectrode array are equally divided into a plurality of groups, and each group of microelectrodes is provided with a reference electrode corresponding to the microelectrode array; the surface of the microelectrode array is modified with a biological recognition molecule layer for specifically recognizing a target detection object in interstitial fluid and a nano material for improving the detection quality of electrochemical signals. The contacts are distributed around the insulating substrate, and the microelectrode array and the reference electrode are connected to the contacts through leads. All the lead surfaces are covered with an insulating layer. The micro-needle array is adhered to the micro-electrode array by a thin adhesive, wherein the micro-needle array is used for extracting the liquid to be detected and consists of a plurality of hollow rectangular pyramids distributed at equal intervals, the vertexes of the pyramids are distributed at the center of the side of the square bottom surface, and the micro-groove structure at the back of the micro-needle array is used for storing the liquid to be detected so as to be contacted with the micro-electrode array to finish detection.

Description

Microneedle sensor integrating drug delivery and multi-substance multi-channel detection and preparation method thereof
Technical Field
The present invention relates to the fields of bioelectronics, biosensing, microelectromechanical systems (MEMS) micromachining and 3D printing technologies. In particular to a microneedle sensor integrating drug delivery and multi-substance multi-channel detection and a preparation method thereof.
Background
The interstitial fluid (INTERSTITIAL FLUID, ISF) is considered an ideal target biological fluid, whose composition can rapidly equilibrate with the composition of whole body blood, can rapidly reflect changes in biomarker concentration in blood, and thus can be used for real-time molecular concentration monitoring. ISF contains various metabolites that can be used as biomarkers, such as glucose concentration abnormality leading to diabetes, lactic acid excess leading to cell dysfunction, hormonal level representing endocrine status, etc., and concentration changes of these substances are important indicators for diagnosing diseases and measuring health status. In addition, since ISF is present in the skin epidermis layer without vascularization, this allows for minimally invasive and even painless detection of target analytes in ISF.
Microneedles (Microneedles, MNs) are tiny needles that are applied to the skin in a minimally invasive manner to facilitate transdermal drug delivery or to aspirate interstitial fluid from the skin, which can be subsequently analyzed or biosensing in real-time on site for disease diagnosis and drug monitoring after collection. Microneedles play a central role in personalized medicine, biomedical research, and biotechnology applications due to their minimal trauma and low skin pain permeability. However, at present, microneedles are mostly used for subcutaneous drug delivery, even if being used for subcutaneous substance detection, the microneedles are used for in-vitro detection after in-vivo extraction through a series of complicated and time-consuming operations, and the concentration of various target substances can be rarely detected at the same time. Thus further improving the technology of completing the timely detection of multiple target substances in multiple channels in subcutaneous tissue and simultaneously integrating the drug delivery function can help doctors to quickly diagnose and treat the physical health condition of patients.
Disclosure of Invention
It is an object of the present invention to provide a microneedle sensor integrating drug delivery and multi-substance multi-channel detection. The micro-needle array in the sensor is used as a minimally invasive device to be integrated with an electrochemical sensor, and the micro-needle array is used for extracting subcutaneous ISF and delivering medicines by utilizing numerical control processing and micro-molding technology; the microelectrode array manufactured by the MEMS technology is utilized to realize the multichannel electrochemical detection of the biomarker. Such an integrated device allows continuous, accurate and rapid in situ measurement directly within the tissue, allows analysis and monitoring of biomarkers, metabolites, drug release and other parameters involved in biological processes and present in tissue fluids, and allows drug delivery to achieve drug intervention under specific requirements.
In order to achieve the purpose, the invention adopts the following technical scheme:
A microneedle sensor integrating drug delivery and multi-substance multi-channel detection comprises an insulating substrate, a microelectrode array, a reference electrode, a lead, a contact, an insulating layer, a microneedle array, a nanomaterial, a biological recognition molecule layer, a microneedle array back micro-groove and a drug delivery channel.
An insulating substrate on which a microelectrode array is formed, wherein the microelectrode array comprises microelectrodes which are equally divided into a plurality of groups, and each group of microelectrodes is provided with a reference electrode corresponding to the microelectrode array; the surface of the microelectrode array is modified with a biological recognition molecular layer for recognizing a target detection object in interstitial fluid and a nano material for further improving the detection quality of electrochemical signals; the contacts are distributed around the insulating substrate, and the microelectrode array and the reference electrode are connected to the contacts through leads; wherein, all the surfaces of the leads are covered with an insulating layer; the micro-needle array is adhered to the micro-electrode array, wherein the micro-needle array consists of a plurality of hollow rectangular pyramids which are equidistantly distributed (the number is determined according to the amount and the speed of interstitial fluid sucked by a target), a micro-groove structure is arranged at the back and used for storing a certain amount of interstitial fluid so as to be in contact with the micro-electrode array for completing detection, and a drug delivery channel is arranged at the back and used for drug delivery.
The microelectrode array is further formed by 10-20 circular microelectrodes and is equally divided into 2-4 groups, wherein the diameter of the electrodes is 150-500 mu m, the distance between the electrodes in each group is 500-2500 mu m, and the interval between the groups is 2250-7250 mu m; microelectrode arrays are used to detect electrochemical signals.
Further, the number of the reference electrodes is matched with the number of the microelectrode groups, and the reference electrodes are round, and the diameter of the reference electrodes is 1.5-3 times of that of the microelectrodes, so that the reference electrodes are used for providing reference potential and keeping potential stability.
Further, the insulating substrate is made of square quartz glass, the side length is 3-5cm, and the thickness is 1-5mm.
Further, the conductive film material selected for the microelectrode array is metal with excellent conductivity such as gold, platinum, chromium and the like; the insulating layer is made of inorganic insulating material with good biocompatibility, and is silicon dioxide or silicon nitride.
The invention provides a preparation method of a microneedle sensor for integrated drug delivery and multi-substance multi-channel detection, which comprises the steps of preparing a microneedle electrode array and preparing a microelectrode array, wherein the preparation of the microelectrode array part comprises the following steps:
a) Spin-coating a layer of photoresist on the cleaned insulating substrate, wherein the thickness of the photoresist is more than three times that of the conductive film to be sputtered, and forming patterns of a microelectrode array, a reference electrode, a lead and a contact after photoetching development;
b) Sputtering a conductive film with a layer thickness of 300-500 nm on the surface of the photoresist pattern, and sputtering chromium or titanium with a thickness of 10-50 nm in advance to serve as a seed layer if the metal used in the conductive layer is gold so as to increase the adhesiveness between the conductive film layer and the substrate;
c) Removing the redundant film layer by adopting a stripping process, and leaving a needed microelectrode array, a reference electrode, a lead and a contact;
D) Coating an insulating layer on the surface of the insulating substrate on which the conductive thin film layer is prepared by plasma enhanced chemical vapor deposition of silicon oxide and silicon nitride;
e) Exposing the microelectrode array, the reference electrode, the lead and the contact by photoetching and ion beam etching methods, and reserving all insulating layers covered on the surfaces of the leads;
F) The method comprises the steps of modifying nano materials or biological recognition molecule layers on the surfaces of microelectrodes with different detection functions by electrochemical deposition or physical dripping and adsorption, and designing a Polydimethylsiloxane (PDMS) film with a specific shape for modifying the biological recognition molecule layers in the microelectrode arrays in a partitioning way because one biological recognition molecule layer is required to be modified in each of the two groups of microelectrode arrays.
Further, the microneedle array is in a quadrangular pyramid shape, but not in a regular rectangular pyramid shape, and the vertexes of the pyramids are distributed at the midpoints of square sides of the bottom surface, so that the needles can be conveniently inserted into the skin, and the hollow pore diameter can be increased, and the preparation method specifically comprises the following steps:
A) Firstly, preparing a female die of a microneedle array by micro-nano numerical control processing, wherein the female die is made of stainless steel and consists of a plurality of rectangular pyramids, the bottom of each pyramid is square with the side length of 300-600 mu m, the height of each pyramid is 600-800 mu m, the interval is 600-1000 mu m, and the thickness of the bottom layer is 1-1.5cm;
B) Selecting a microneedle at the edge in a mould, fixing a needle head of a syringe on the mould, pouring solid PLA (polylactic acid), photo-curing resin, PMMA (acrylic resin) and other polymer particles with high biocompatibility and certain mechanical strength into the mould, heating the polymer in vacuum for 20-40 minutes according to the melting temperature of a required substance until the polymer is melted, taking out the polymer, pressing the polymer by a tabletting with matched size to fill the mould, standing at room temperature until the polymer solidifies, and demoulding, wherein the needle head of the syringe is fixed on the mould to form a drug delivery channel, and pressing the mould by the tabletting with matched size to form a microneedle array back micro-groove structure;
C) Punching on the prepared solid micro-needle array by using a laser, controlling the hollow aperture to be 60-110 mu m, cleaning the solid micro-needle array by using alcohol in an ultrasonic cleaning machine for 15-30 minutes after laser punching, and taking out the solid micro-needle array.
Furthermore, glass cement is coated on the bottom of the micro-needle array, and the micro-needle array and the micro-electrode array are aligned and bonded to form the micro-needle sensor for integrated drug delivery and multi-substance multi-channel detection, the micro-needle array is used for extracting the liquid to be detected and delivering the drugs, and the micro-electrode array is used for the subsequent multi-channel electrochemical detection of various biomarkers in the liquid to be detected.
Further, the multichannel detection function is that the multichannel detection function is connected with a microelectrode array through an electrochemical workstation, and a three-electrode system is used for giving a certain potential (chronoamperometry) to a working electrode to detect the current when the target substance undergoes the oxidation-reduction reaction, so that the concentration of the target detection substance is judged; the multi-substance detection function is based on modification of different biological recognition molecules in different groups of microelectrode arrays, so that specific recognition of different substances is realized.
The invention has the following beneficial technical effects:
The micro-needle array for extracting the liquid to be detected and the micro-electrode array for electrochemically detecting the target object are integrated together, so that the integrated structure is small, and the problems of liquid extraction to be detected and multi-substance multi-channel detection integration are solved; innovating in the structural design of the microneedle array, changing the common regular quadrangular microneedle into an inclined quadrangular pyramid with the vertex distributed on the center of the square edge of the bottom surface, so that the puncture strength of the microneedle can be further improved and the hollow aperture range can be enlarged; channels for drug delivery are designed on the microneedle array, allowing the sensor to integrate the test fluid extraction function as well as the drug delivery function.
Drawings
FIG. 1 is a schematic diagram of the structure of a microneedle sensor for integrated drug delivery and multi-substance multi-channel detection of the present invention;
FIG. 2 is a schematic diagram of the structure of a microelectrode array portion of the present invention;
FIG. 3 is a schematic view of a portion of the structure of a microneedle array according to the present invention;
FIG. 4 illustrates a process for preparing a microelectrode array portion of the present invention;
FIG. 5 is a mold and platen for preparing a microneedle array; wherein 5a is a mold for preparing a microneedle array; 5b is a platen for preparing a microneedle array.
Reference numerals illustrate:
An insulating substrate 1, a microelectrode array 2, a reference electrode 3, a lead 4, a contact 5, an insulating layer 6, a microneedle array 7, a nanomaterial 8, a biological recognition molecule layer 9, a microneedle array back micro-groove 10 and a drug delivery channel 11.
Detailed Description
The technical scheme of the invention is further described below with reference to the accompanying drawings and specific embodiments. The following examples do not constitute a limitation of the present invention.
Fig. 1 is a schematic diagram showing the structure of a microneedle sensor for integrated drug delivery and multi-substance multi-channel detection according to the present invention. The microneedle sensor is composed of a microelectrode structure A and a microneedle array structure B. The contact 5 of the microelectrode structure is connected with an electrochemical workstation, and the microneedle array sucks interstitial fluid to the surface of the microelectrode array so as to complete electrochemical detection.
Fig. 2 is a schematic diagram of a microelectrode structure a provided by the present invention. The microelectrode structure A includes: an insulating substrate 1, a microelectrode array 2, a reference electrode 3, a lead 4, a contact 5, an insulating layer 6, a nano material 8 and a biological recognition molecule layer 9; fig. 3 is a schematic diagram showing a microneedle array structure B according to the present invention, which includes a microneedle array 7, a microneedle array backside micro-groove 10, and a drug delivery channel 11.
The insulating substrate 1 is made of square quartz glass, the side length is 5cm, and the thickness is 1-5mm. The microelectrode array 2 is distributed on the insulating substrate 1, wherein microelectrodes included in the microelectrode array 2 are equally divided into two groups, seven microelectrodes are arranged in one group, the radius of each microelectrode is 250 mu m, the interval is 2000 mu m, each group of microelectrodes is provided with a reference electrode 3 corresponding to the microelectrode, the radius of the reference electrode 3 is 500 mu m, and the group-to-group interval is 6250 mu m; the surface of the microelectrode array 2 is modified with a biological recognition molecule layer 9 for recognizing a target detection object in interstitial fluid and a nano material 8 for further improving the detection quality of electrochemical signals; the microelectrode array 2 and the reference electrode 3 are connected with the contacts 5 distributed around the insulating substrate 1 through the leads 4, so that electrochemical signals detected by the microelectrode array 2 are led out from the contacts 5, the contacts 5 are square, the side length is 1000 mu m, and the distance between the contacts is 12700 mu m; all the leads 4 are covered on their surfaces with an insulating layer 6.
Fig. 3 shows a specific preparation flow of the microelectrode structure a:
a) Spin coating a layer of SPR220 photoresist on the surface of the quartz glass after pickling, and then carrying out first photoetching;
b) Imaging the microelectrode array, the reference electrode, the lead and the contact on the surface of quartz glass after development;
c) Sputtering a layer of chromium with the thickness of 30nm as a seed layer and 300nm of platinum as a conductive layer on the surface of the photoresist pattern by adopting a sputtering process;
d) Stripping the photoresist-containing part by using an acetone solution and an ethanol solution to leave a conductive layer, and adopting plasma chemical vapor deposition (PECVD, 300 ℃) to deposit SiO 2(300nm)/Si3N4 (500 nm) as an insulating layer;
e) Spin-coating a layer of SPR220 photoresist and then performing second photoetching;
f) Patterning the lead part by developing to expose the microelectrode array, the reference electrode and the insulating layer above the contact;
g) Selectively removing the microelectrode array, the reference electrode and the insulating layer above the contact by CHF 3 Reactive Ion Etching (RIE);
h) Washing the residual photoresist by using an acetone solution and an ethanol solution;
i) Electroplating a layer of Multi-walled carbon nanotubes (Multi-Walled Carbon Nanotubes, MWCNTS) on the microelectrode array detection electrode by adopting an electrochemical chronoamperometry method, so as to improve the electrical characteristics of the detection electrode; the biological recognition molecule layer is modified by physical dripping, electrodeposition and adsorption, and the specific type of biological recognition molecule is determined by the target detection object, and in this example, glucose oxidase for detecting glucose and an aptamer for detecting estradiol are specifically selected as the biological recognition molecules. Prussian blue and analogues thereof (PBA) were electrodeposited on the electrode surface for the attachment of the biorecognition molecules prior to immobilization of the biorecognition molecules. After the biological recognition molecules are immobilized, a Nafion layer is spin-coated to be used as a diffusion limiting layer, so that the linearity of the biosensor is expanded to high concentration, and negatively charged interference and biological pollution (such as protein adsorption) are avoided. Wherein, since one biological recognition molecule needs to be modified in each of the two groups of microelectrode arrays, a PDMS film with a specific shape is designed for modifying different biological recognition molecules in a partitioning way in the microelectrode arrays.
FIG. 4 is a schematic diagram of a microelectrode array structure B, which consists of 10 x 10 rectangular pyramids and micro grooves 10 on the back of the microneedle array, wherein the bottom of each pyramid is square with a side length of 500 μm, the height of each pyramid is 800 μm, the distance between the microneedles is 1000 μm, and the thickness of the bottom layer is 1cm; the micropyles are regular rectangular pyramids, and cone vertexes are distributed at the midpoints of the square sides of the bottom surface; the back of the microneedle array is provided with a microgroove 10 which is connected with a hollow structure of the microneedles and has the size of 250 mu m and the length and width of 1.6cm; the microneedle array contains on its back a drug delivery channel 11 matching the syringe needle diameter, in this example a 34G gauge metal needle. The specific preparation process of the microneedle comprises the following steps:
a) Firstly, preparing a master model of a microneedle array structure by utilizing a micro-nano numerical control processing technology, wherein the master model is shown in fig. 5a, the material is stainless steel, the master model consists of 10 x 10 rectangular pyramids, the bottom of each pyramid is square with the side length of 500 mu m, the height of each pyramid is 800 mu m, the distance between the microneedles is 1000 mu m, and the thickness of the bottom layer is 1cm;
b) Selecting a microneedle at the edge in a mould, fixing a needle of an injector aside, pouring solid PLA (polylactic acid) particles into the mould, heating at a high temperature of 200 ℃ in vacuum for 20 minutes until PLA is melted and taken out, pressing by a matched-size tabletting as shown in figure 5b to fill the mould with PLA, standing at room temperature until solidification, and demoulding, wherein the needle of the injector is fixed on the mould to form a drug delivery channel, and pressing the mould by the matched-size tabletting to form a microneedle array back micro-groove structure;
c) Punching on the prepared solid microneedle array by using a laser, controlling the hollow aperture to be 90-110 mu m, and taking out after alcohol cleaning in an ultrasonic cleaning machine for 20min after laser punching.
Finally, aligning and bonding the micro-needle array structure B and the micro-electrode array structure A by using glass cement to form the integrated drug delivery and multi-substance multi-channel detection micro-needle sensor. The micro-needle array is used for extracting subcutaneous interstitial fluid by utilizing capillary force, and the micro-electrode array is used for the subsequent multi-channel electrochemical detection of glucose and estradiol in the liquid to be detected.

Claims (10)

1. A microneedle sensor integrating drug delivery and multi-substance multi-channel detection, characterized by: the microneedle sensor comprises an insulating substrate, a microelectrode array, a reference electrode, a lead, a contact, an insulating layer, a microneedle array, a nanomaterial, a biological recognition molecule layer, a microgroove on the back of the microneedle array and a drug delivery channel;
An insulating substrate on which a microelectrode array is formed, wherein the microelectrode array comprises microelectrodes which are equally divided into a plurality of groups, and each group of microelectrodes is provided with a reference electrode corresponding to the microelectrode array; the surface of the microelectrode array is modified with a biological recognition molecular layer for specifically recognizing a target detection object in interstitial fluid and a nano material for further improving the detection quality of electrochemical signals;
The contacts are distributed around the insulating substrate, and the microelectrode array and the reference electrode are connected to the contacts through leads; wherein, all the surfaces of the leads are covered with an insulating layer;
The micro-needle array is adhered to the micro-electrode array, wherein the micro-needle array consists of a plurality of hollow rectangular pyramids which are distributed at equal intervals and is used for extracting the liquid to be detected, the vertexes of the pyramids are distributed at the center of the side of the square bottom surface, the micro-groove structure at the back of the micro-needle array is used for storing a certain amount of liquid to be detected so as to be in contact with the micro-electrode array for detection, and the back of the micro-needle array is additionally provided with a medicine delivery channel connected with the hollow micro-needles and used for injecting medicine into the liquid to be detected.
2. The integrated drug delivery and multi-substance multi-channel detection microneedle sensor according to claim 1, wherein the microelectrode array is composed of 10-20 circular microelectrodes equally divided into 2-4 groups, wherein the electrode diameter is 150-500 μm, the electrode distance within each group is 500-2500 μm, group-to-group spacing 2250-7250 μm.
3. The integrated drug delivery and multi-substance multi-channel detection microneedle sensor according to claim 1, wherein the number of reference electrodes is matched to the number of microelectrode sets, in a circle with a diameter 1.5-3 times the diameter of the microelectrode, one for each set of microelectrode arrays.
4. The integrated drug delivery and multi-substance multi-channel detection microneedle sensor according to claim 1, wherein the insulating substrate is made of square quartz glass, has a side length of 3-5cm and a thickness of 1-5mm.
5. The integrated drug delivery and multi-substance multi-channel detection microneedle sensor according to claim 1, wherein the microelectrode array is made of conductive thin film material, which is metal with excellent conductivity; the insulating layer is made of inorganic insulating material with good biocompatibility, and is silicon dioxide or silicon nitride.
6. The integrated drug delivery and multi-substance multi-channel detection microneedle sensor of claim 1, wherein said microelectrode array is fabricated using microelectromechanical system micromachining techniques.
7. The integrated drug delivery and multi-substance multi-channel detection microneedle sensor of claim 1, wherein in performing multi-substance detection, different biological recognition molecules are modified by electrodeposition and physical spin coating methods in different groups of microelectrode arrays, thereby realizing specific recognition of different substances in a liquid to be detected; the electrochemical workstation is connected with the microelectrode array, and a three-electrode system is used for giving a certain potential to the working electrode to measure the current when the target substance undergoes oxidation-reduction reaction, so that the concentration of the liquid to be measured is judged.
8. A method of manufacturing a microneedle sensor for integrated drug delivery and multi-substance multi-channel detection according to claims 1-7, wherein the method of manufacturing comprises manufacturing a microneedle array; preparing a microelectrode array;
the preparation of the microneedle array is realized by utilizing a micro-nano numerical control processing technology, a micro-forming reverse mold technology, a 3D printing technology and a laser drilling technology, and specifically comprises the following steps:
step 1) preparing a female die of a microneedle array by utilizing a micro-nano numerical control processing technology, wherein the female die is made of stainless steel and consists of a plurality of rectangular pyramids, the bottoms of the pyramids are square with the side length of 300-600 mu m, the heights of the pyramids are 600-800 mu m, the distance between the microneedles is 600-1000 mu m, and the thickness of the bottom layer is 1-1.5cm; the micropyles are regular rectangular pyramids, and cone vertexes are distributed at the midpoints of the square sides of the bottom surface;
Step 2) selecting a microneedle at the edge in a mould, after fixing a needle head of a syringe, pouring polymer particles comprising one or more of solid polylactic acid PLA, photo-curing resin or acrylic resin PMMA into the mould, heating in vacuum for 20-40 minutes according to the melting temperature of the polymer particles until the polymer melts, taking out, pressing by a tablet with matched size to fill the mould with the polymer, standing at room temperature until the polymer solidifies, and demoulding;
and 3) punching holes on the prepared solid micro-needle array by using a laser, controlling the hollow aperture to be 60-150 mu m, and taking out the solid micro-needle array after alcohol washing in an ultrasonic washing machine for 15-30 minutes after laser punching.
9. The preparation method of claim 8, wherein the specific preparation method of the microelectrode array is as follows:
Step a), spin coating a layer of SPR220 photoresist on the surface of the quartz glass after acid washing, and then carrying out first photoetching;
step b), imaging the microelectrode array, the reference electrode, the lead and the contact on the surface of quartz glass after development;
Step c), sputtering a layer of chromium with the thickness of 30nm serving as a seed layer and 300nm of platinum serving as a conductive layer on the surface of the photoresist pattern by adopting a sputtering process;
Step d), stripping the photoresist-containing part by using an acetone solution and an ethanol solution to leave a conductive layer, and depositing SiO 2 nm or Si 3N4 nm as an insulating layer by adopting plasma chemical vapor deposition;
step e), spin coating a layer of SPR220 photoresist and then carrying out second photoetching;
step f) developing to pattern the lead part and expose the microelectrode array, the reference electrode and the insulating layer above the contact;
Step g) selectively removing the microelectrode array, the reference electrode and the insulating layer above the contact through CHF 3 reactive ion etching;
step h) washing the residual photoresist cleanly by using an acetone solution and an ethanol solution;
Step i) electroplating a layer of multiwall carbon nanotubes on the electrode of the microelectrode array by adopting an electrochemical chronoamperometry; modifying a layer of biological recognition molecule layer on the electrode by adopting physical dripping, electrodeposition and adsorption methods, and spin-coating a modified Nafion layer to serve as a diffusion limiting layer after the biological recognition molecules are fixed.
10. The method of claim 9, wherein the glass cement is coated on the bottom of the microneedle array and aligned with the microelectrode array for adhesion to form a microneedle sensor for integrated drug delivery and multi-substance multi-channel detection, the microneedle array is used for extracting the liquid to be detected and drug delivery, and the microelectrode array is used for subsequent multi-channel electrochemical detection of multiple biomarkers in the liquid to be detected.
CN202410307934.3A 2024-03-18 2024-03-18 Microneedle sensor integrating drug delivery and multi-substance multi-channel detection and preparation method thereof Pending CN118203359A (en)

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