CN118136361A - Iron-based soft magnetic powder, manufacturing method and power inductor - Google Patents
Iron-based soft magnetic powder, manufacturing method and power inductor Download PDFInfo
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- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 title claims abstract description 132
- 239000006247 magnetic powder Substances 0.000 title claims abstract description 122
- 229910052742 iron Inorganic materials 0.000 title claims abstract description 65
- 238000004519 manufacturing process Methods 0.000 title description 7
- 239000000843 powder Substances 0.000 claims abstract description 82
- UGKDIUIOSMUOAW-UHFFFAOYSA-N iron nickel Chemical compound [Fe].[Ni] UGKDIUIOSMUOAW-UHFFFAOYSA-N 0.000 claims abstract description 74
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 26
- 239000000956 alloy Substances 0.000 claims abstract description 26
- 238000002360 preparation method Methods 0.000 claims abstract description 14
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000002105 nanoparticle Substances 0.000 claims abstract description 8
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 6
- 239000002245 particle Substances 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 14
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims description 9
- 229910000519 Ferrosilicon Inorganic materials 0.000 claims description 8
- 238000002156 mixing Methods 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 239000002994 raw material Substances 0.000 claims description 7
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- 238000012986 modification Methods 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000000696 magnetic material Substances 0.000 claims description 5
- 238000005469 granulation Methods 0.000 claims description 4
- 230000003179 granulation Effects 0.000 claims description 4
- 150000002505 iron Chemical class 0.000 claims description 4
- 239000011342 resin composition Substances 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 239000011863 silicon-based powder Substances 0.000 claims 1
- 230000000052 comparative effect Effects 0.000 description 8
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 230000035699 permeability Effects 0.000 description 6
- 102220043159 rs587780996 Human genes 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000003607 modifier Substances 0.000 description 5
- 239000006249 magnetic particle Substances 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 239000002122 magnetic nanoparticle Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 235000019441 ethanol Nutrition 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 229910001004 magnetic alloy Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005056 compaction Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000004146 energy storage Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000009689 gas atomisation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000000877 morphologic effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
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- 238000005406 washing Methods 0.000 description 1
- 238000009692 water atomization Methods 0.000 description 1
Abstract
The invention discloses an iron-based soft magnetic powder, a preparation method and a power inductor, wherein the iron-based soft magnetic powder comprises micron-sized alloy soft magnetic powder and nano-sized iron-nickel powder; the nano-scale iron-nickel powder is filled between the surfaces or air gaps of the micro-scale alloy state soft magnetic powder; the content of nickel element in the iron-nickel powder is 30 to 90 weight percent; the nano-scale iron-nickel powder accounts for 0.5% -50% of the total weight of the iron-based soft magnetic powder; the magnetic powder core performance can be remarkably improved, and the preparation process difficulty of the inductor can be reduced, so that the magnetic powder core is more suitable for being used in high-frequency and high-current scenes, and is particularly suitable for integrally formed power inductors above 10 MHz.
Description
Technical Field
The invention relates to the technical field of inductors, in particular to an iron-based soft magnetic powder, a manufacturing method and a power inductor.
Background
With the rapid development of third generation semiconductor technology, the switching frequency is higher and higher, so that miniaturization of power supply devices is brought, and higher requirements are put on the power inductor.
Power inductors require technology upgrades. Typically, conventional power inductors are adapted to frequencies below 2 MHz. The power inductor is generally made of metal soft magnetic powder, and is mainly formed by magnetic ring inductance and integrated inductance in a morphological mode. The integrated inductor has obvious miniaturization advantage and is suitable for portable electronic equipment. The magnetic ring inductor manufactured by carbonyl iron powder is applicable to the scene of more than 10MHz, but the required forming pressure is extremely large, the magnetic permeability is low, and the magnetic ring inductor is not suitable for manufacturing high-performance high-frequency integrated inductor.
The superfine powder is filled in the micron-sized metal soft magnetic particles, so that the performance of the inductor can be remarkably improved. The iron-nickel magnetic powder is often applied to high-power and high-direct-current bias scenes because of having a plurality of excellent characteristics, and is also one of soft magnetic materials with the best comprehensive performance. A significant feature that is distinguished from non-magnetic nanoparticles is that the permeability of the inductor can be improved; the magnetic nano particles are different from the common magnetic nano particles in that the iron-nickel nano particles have the characteristics of higher magnetic permeability, higher saturation magnetic flux density, lower magnetic loss, softness and easy compaction. However, the usual preparation method of iron-nickel powder is: mechanical disruption, water atomization or gas atomization, further micronization to submicron or nanoscale is difficult, nanoscale is difficult to achieve, and the process is complex.
Disclosure of Invention
The technical problems to be solved by the invention are as follows: the iron-based soft magnetic powder, the manufacturing method and the power inductor can remarkably improve the performance of the inductor and reduce the difficulty of the preparation process of the inductor.
In order to solve the technical problems, the invention adopts a technical scheme that:
an iron-based soft magnetic powder comprises micron-sized alloy soft magnetic powder and nano-sized iron-nickel powder;
The nano-scale iron-nickel powder is filled between the surfaces or air gaps of the micro-scale alloy state soft magnetic powder;
the content of nickel element in the iron-nickel powder is 30 to 90 weight percent;
the nanoscale iron-nickel powder accounts for 0.5% -50% of the total weight of the iron-based soft magnetic powder.
Optionally, the nanoscale iron-nickel powder is prepared by a PVD process.
Optionally, the particle size range of the nanoscale iron-nickel powder is 10 nm-1000 nm.
Optionally, the particle size range of the micron-sized alloy state soft magnetic powder is 0.1 um-10 um.
Optionally, the nanoscale iron-nickel powder accounts for 6% -50% of the total weight of the iron-based soft magnetic powder.
Optionally, the nanoscale iron-nickel powder accounts for 25% -50% of the total weight of the iron-based soft magnetic powder.
Optionally, the micron-sized alloy state soft magnetic powder is at least one of ferrosilicon powder, ferrosilicon chromium powder, ferrosilicon aluminum powder and iron-based nanocrystalline powder.
Optionally, the alloy also comprises submicron iron-nickel powder;
the submicron iron-nickel powder is filled between the surfaces or air gaps of the micron alloy state soft magnetic powder.
In order to solve the technical problems, the invention adopts another technical scheme that:
The preparation method of the iron-based soft magnetic powder comprises the following steps:
Preparing nano-scale iron-nickel powder: placing an iron-nickel alloy raw material into a reaction system consisting of a high-temperature evaporator, a particle controller and a collector which are sequentially communicated, and preparing, wherein plasma gas is used as a heating source to heat and evaporate the iron-nickel alloy raw material in the preparation process;
surface modification: insulating and coating the prepared nano-scale iron-nickel powder and micro-scale alloy soft magnetic powder by using a magnetic material, and fully mixing to obtain iron-based soft magnetic powder;
and (3) mixing: dispersing the surface-modified iron-based soft magnetic powder in a resin composition solution for coating granulation, and drying for standby.
In order to solve the technical problems, the invention adopts another technical scheme that:
a power inductor comprising an iron-based soft magnetic powder as described above.
The invention has the beneficial effects that: the iron-based soft magnetic powder comprises micron-sized alloy soft magnetic powder and nano-sized iron-nickel powder; filling the nanoscale iron-nickel powder between the surfaces or air gaps of the micron-scale alloy-state soft magnetic powder; and in the iron-nickel powder, the content of nickel element is 30-90 wt%; on the one hand, by adding a certain amount of nano-scale soft magnetic particles into the micro-scale soft magnetic powder particles, the volume fraction of a non-magnetic phase can be reduced, and the air gap can be reduced, so that the magnetic permeability and the saturation magnetic induction intensity are remarkably improved, meanwhile, the high-nickel-content iron-nickel magnetic powder has the characteristics of high magnetic permeability, high direct current superposition performance, high saturation magnetic flux density, low magnetic core loss and high energy storage, and is filled in the micro-scale metal soft magnetic particles, so that the improvement effect on the magnetic performance, compactness and strength of the magnetic powder core is quite obvious, and the miniaturization and low power consumption of the metal magnetic powder core under high frequency are greatly promoted through the improvement of the filled magnetic powder material and size; on the other hand, the iron-nickel material is soft, so that the iron-nickel material is easy to deform in the forming process, is easy to compact in the preparation process, and is easy to be mutually meshed with adjacent alloy soft magnetic powder, so that the magnetic body is uniform and compact, compact in structure, high in mechanical strength and good in stability, the fully-closed structure of the power inductor is enhanced, and the reliability of the inductor can be improved; the pressure required in the preparation process of the inductor is lower, so that the magnetic powder core performance can be remarkably improved, and the preparation process difficulty of the inductor can be reduced, so that the inductor is more suitable for being used in high-frequency and high-current scenes, and is particularly suitable for integrally formed power inductors above 10 MHz.
Drawings
Fig. 1 is a flowchart showing steps of a method for manufacturing an iron-based soft magnetic powder according to an embodiment of the present invention.
Detailed Description
In order to describe the technical contents, the achieved objects and effects of the present invention in detail, the following description will be made with reference to the embodiments in conjunction with the accompanying drawings.
The iron-based soft magnetic powder disclosed by the application can be suitable for preparing electronic components, and is particularly suitable for portable miniaturized electronic components, such as integrally formed power inductors with the frequency of more than 10MHz and the like, and the iron-based soft magnetic powder is described below by a specific embodiment:
In an alternative embodiment, an iron-based soft magnetic powder includes a micro-sized alloy state soft magnetic powder and a nano-sized iron-nickel powder;
The nano-scale iron-nickel powder is filled between the surfaces or air gaps of the micro-scale alloy state soft magnetic powder;
the content of nickel element in the iron-nickel powder is 30 to 90 weight percent;
the nanoscale iron-nickel powder accounts for 0.5% -50% of the total weight of the iron-based soft magnetic powder.
Wherein the nanoscale iron-nickel powder is prepared by a Physical Vapor Deposition (PVD) process.
The particle size range of the nanoscale iron-nickel powder is 10 nm-1000 nm.
The grain size range of the micron-sized alloy-state soft magnetic powder is 0.1 um-10 um, and the micron-sized alloy-state soft magnetic powder is at least one of ferrosilicon powder, ferrosilicon chromium powder, ferrosilicon aluminum powder and iron-based nanocrystalline powder.
In another alternative embodiment, the micrometer sized alloy state soft magnetic powder has a particle size ranging from 2.5um to 10um.
In another alternative embodiment, the micrometer sized alloy state soft magnetic powder has a particle size ranging from 4um to 10um.
In another alternative embodiment, the nanoscale iron-nickel powder comprises 6% to 50% by weight of the total iron-based soft magnetic powder.
In another alternative embodiment, the nanoscale iron-nickel powder comprises 25% to 50% by weight of the total weight of the iron-based soft magnetic powder.
In another alternative embodiment, the nanoscale iron-nickel powder has a particle size ranging from 490nm to 1000nm.
In another alternative embodiment, the nanoscale iron-nickel powder has a particle size in the range of 810nm to 1000nm.
In the above embodiment, the particle size of the nano-sized iron-nickel powder is extremely low, and the eddy current loss is proportional to the particle size of the soft magnetic material, so that the smaller the particle size, the lower the eddy current loss. The nanoscale iron-nickel powder has extremely low coercivity, and can overcome the problem of increased hysteresis loss caused by adding other conventional nano magnetic particles, so that the eddy current loss at high frequency can be reduced.
Meanwhile, the iron-nickel material is soft, so that the iron-nickel material is easy to deform in the forming process, and is easy to be meshed with adjacent alloy soft magnetic powder, so that the magnetic body is uniform and compact, the structure is compact, the mechanical strength is high, and the stability is good, therefore, the forming pressure and the process difficulty of the inductor preparation can be reduced, and the fully-closed structure of the power inductor can be enhanced. Therefore, it can improve the reliability of the inductor
Therefore, the nanoscale iron-nickel powder is filled in the alloy state soft magnetic powder with the micrometer scale, the diluting effect of an air gap and non-magnetic substances on the magnetic performance can be obviously weakened, the saturation magnetic induction and the magnetic conductivity can be improved, and the magnetic performance of the magnetic powder core can be obviously improved.
In another alternative embodiment, the method further comprises submicron iron-nickel powder;
The submicron iron-nickel powder is filled between the surfaces or air gaps of the micron alloy state soft magnetic powder;
That is, in this embodiment, the nano-scale iron-nickel powder and the submicron-scale iron-nickel powder are filled between the surfaces or air gaps of the micron-scale alloy-state soft magnetic powder, and the particles with various sizes are filled between the surfaces or air gaps of the micron-scale alloy-state soft magnetic powder, so that the different magnetic powder can be meshed more tightly, the air gaps are further reduced, and the magnetic powder core performance is further improved.
In another alternative embodiment, as shown in fig. 1, a method for preparing the iron-based soft magnetic powder according to any one of the above embodiments, includes the steps of:
Preparing nano-scale iron-nickel powder: placing an iron-nickel alloy raw material into a reaction system consisting of a high-temperature evaporator, a particle controller and a collector which are sequentially communicated, and preparing, wherein plasma gas is used as a heating source to heat and evaporate the iron-nickel alloy raw material in the preparation process;
By adopting the plasma gas as a heating source, the particle size can be ensured to be uniform, and no large-particle metal residue exists; surface modification: insulating and coating the prepared nano-scale iron-nickel powder and micro-scale alloy soft magnetic powder by using a magnetic material, and fully mixing to obtain iron-based soft magnetic powder, wherein the magnetic part of the iron-based soft magnetic powder accounts for 0-99wt% of the total mass;
The pressure resistance of the iron-based soft magnetic powder can be improved through surface modification;
and (3) mixing: dispersing the surface-modified iron-based soft magnetic powder in a resin composition solution for coating granulation, and drying for standby.
In another alternative embodiment, a power inductor comprising an iron-based soft magnetic powder according to any one of the embodiments above;
Specifically, the power inductor includes: a magnetic body, a coil and a terminal electrode. The magnetic body includes a first magnetic body and a second magnetic body. The coil is provided on one end surface of the first magnetic body, and the second magnetic body is laminated on the surface of the first magnetic body and completely covers the coil. The coil is insulated from the magnetic body. The number of the terminal electrodes is at least two, and the terminal electrodes are arranged on one surface of the first magnetic body, on which the coil is not arranged. The terminal electrodes are electrically connected with the coil. At least one of the first magnetic body and the second magnetic body comprises an iron-based soft magnetic powder according to any one of the embodiments described above.
In one example, the embossed inductor may be model 1412065-R33, but is not limited thereto.
The following illustrates the performance of the iron-based soft magnetic powder provided by the present application by comparing specific examples with comparative examples:
Example 1
The iron-based soft magnetic powder comprises nanoscale iron-nickel powder and alloy soft magnetic powder produced by a PVD process; in the iron-nickel powder, the content of nickel element is 50wt%.
The nanoscale iron-nickel powder accounts for 40% of the total weight of the iron-based soft magnetic powder.
The average grain diameter of the nanoscale iron-nickel powder is 62nm;
The micron-sized alloy-state soft magnetic powder is FeSiCr magnetic powder, and the median value D50=6 μm in the particle size of the alloy-state soft magnetic powder.
The present embodiment also provides a method of preparing an iron-based soft magnetic powder, the method comprising the steps of:
(1) Preparing nano-scale iron-nickel powder: adding iron-nickel alloy raw materials with purity more than or equal to 99.9% into a high-temperature evaporator, vacuumizing, and then filling nitrogen into a reaction system until the internal pressure is 75-150 kPa;
Then, starting a plasma gun at the top of the high-temperature evaporator to form iron-nickel alloy vapor, and conveying the iron-nickel alloy vapor to a particle controller communicated with the high-temperature evaporator along with nitrogen flow to collide and fuse;
finally, the particles are conveyed to the bottom of a hopper of a collector along with nitrogen, so that the iron-nickel powder with the purity of more than or equal to 99% and the average particle size of 62nm is obtained.
(2) Surface modification: independently adding the nano-scale iron-nickel powder and the micro-scale alloy state soft magnetic powder into a surface modifier solution, heating and stirring, then washing with absolute ethyl alcohol, drying, and then mixing to obtain surface modified soft magnetic powder; the surface modifier solution is an ethanol/water solution of tetraethoxysilane, the mass concentration of the surface modifier solution is 3%, and the ratio of ethanol to water is 25:75; the total weight ratio of the nanoscale iron-nickel powder added into the surface modifier solution is 50%; the total weight of the micron-sized alloy-state soft magnetic powder added into the surface modifier solution accounts for 60 percent.
(3) And (3) mixing: dispersing the surface modified iron-based soft magnetic powder in an epoxy resin composition solution for coating granulation, and drying for standby.
(4) The mixed magnetic powder is pressed into a magnetic ring with OD=16.6mm, ID=10.2 mm and density of 6.0-6.8 g/cm 3 by adopting the pressure of 6T, and the magnetic ring is detected.
Example 2
This embodiment differs from embodiment 1 in that:
the average grain diameter of the nanoscale iron-nickel powder is 20nm; the nanoscale iron-nickel powder accounts for 20% of the total weight of the iron-based soft magnetic powder.
Example 3
This embodiment differs from embodiment 1 in that:
the nanoscale iron-nickel powder accounts for 15% of the total weight of the iron-based soft magnetic powder for high frequency.
The micron-sized alloy-state soft magnetic powder is FeSiCr alloy powder, and the median value D50=3 μm in the particle size of the alloy-state soft magnetic powder.
Example 4
This embodiment differs from embodiment 1 in that:
the nanoscale iron-nickel powder accounts for 10% of the total weight of the iron-based soft magnetic powder for high frequency.
The micron-sized alloy-state soft magnetic powder is ferrosilicon powder, and the median value D50=3 mu m of the particle size of the alloy-state soft magnetic powder accounts for 50% of the total weight of the iron-based soft magnetic powder.
The soft magnetic alloy powder is FeSiCr powder, the median value D50=6μm of the particle diameter of the FeSiCr powder accounts for 30% of the total weight of the iron-based soft magnetic powder for high frequency.
Example 5
This embodiment differs from embodiment 1 in that:
the nanoscale iron-nickel powder accounts for 20% of the total weight of the iron-based soft magnetic powder for high frequency.
The micron-sized alloy-state soft magnetic powder is iron-based amorphous iron powder, and the median value D50=3μm of the particle size of the alloy-state soft magnetic powder accounts for 10% of the total weight of the iron-based soft magnetic powder.
The soft magnetic alloy powder is FeSiCr powder, the median value D50=6μm of the particle diameter of the FeSiCr powder accounts for 70% of the total weight of the iron-based soft magnetic powder for high frequency.
Comparative example 1
The difference between this comparative example and example 1 is that:
The iron-based soft magnetic powder does not contain the nanoscale iron-nickel powder.
Comparative example 2
The difference between this comparative example and example 1 is that:
The nano-scale iron-nickel powder in the iron-based soft magnetic powder is not subjected to surface modification.
Comparative example 3
The difference between this comparative example and example 1 is that:
the average particle size of the iron-nickel powder in the iron-based soft magnetic powder is 11 mu m.
Table 1 shows the magnetic properties of the above-mentioned examples 1 to 5 and comparative examples 1 to 3.
FIG. 1
As can be seen from the comparison of Table 1, the magnetic ring prepared from the iron-based soft magnetic powder has remarkable magnetic properties and has remarkable advantages in terms of magnetic permeability, Q value, strength and breakdown voltage.
In summary, according to the iron-based soft magnetic powder, the manufacturing method and the power inductor provided by the invention, through the cooperative improvement of the material, the particle size and the preparation process in the iron-based soft magnetic powder, the magnetic powder core performance can be obviously improved, and the preparation process difficulty of the inductor can be reduced, so that the iron-based soft magnetic powder is more suitable for being used in high-frequency and high-current scenes, and is particularly suitable for an integrally formed power inductor above 10 MHz.
The foregoing description is only illustrative of the present invention and is not intended to limit the scope of the invention, and all equivalent changes made by the specification and drawings of the present invention, or direct or indirect application in the relevant art, are included in the scope of the present invention.
Claims (10)
1. An iron-based soft magnetic powder is characterized by comprising micron-sized alloy-state soft magnetic powder and nano-sized iron-nickel powder;
The nano-scale iron-nickel powder is filled between the surfaces or air gaps of the micro-scale alloy state soft magnetic powder;
the content of nickel element in the iron-nickel powder is 30 to 90 weight percent;
the nanoscale iron-nickel powder accounts for 0.5% -50% of the total weight of the iron-based soft magnetic powder.
2. An iron-based soft magnetic powder according to claim 1, wherein the nano-sized iron-nickel powder is prepared by PVD process.
3. An iron-based soft magnetic powder according to claim 1, wherein the nanoscale iron-nickel powder has a particle size in the range of 10nm to 1000nm.
4. An iron-based soft magnetic powder according to claim 1, wherein the particle size of the micro-sized alloy state soft magnetic powder is in the range of 0.1um to 10um.
5. An iron-based soft magnetic powder according to any one of claims 1 to 4, wherein the nanoscale iron-nickel powder comprises 6% to 50% of the total weight of the iron-based soft magnetic powder.
6. An iron-based soft magnetic powder according to claim 5, wherein the nanoscale iron-nickel powder comprises 25% to 50% of the total weight of the iron-based soft magnetic powder.
7. An iron-based soft magnetic powder according to any one of claims 1 to 4, wherein the micro-sized alloyed soft magnetic powder is at least one of a ferro-silicon powder, a ferro-silicon-chromium powder, a ferro-silicon-aluminium powder, an iron-based nanocrystalline powder.
8. An iron-based soft magnetic powder according to any one of claims 1 to 4, further comprising submicron iron-nickel powder;
the submicron iron-nickel powder is filled between the surfaces or air gaps of the micron alloy state soft magnetic powder.
9. A method of preparing an iron-based soft magnetic powder according to any one of claims 1 to 8, comprising the steps of:
Preparing nano-scale iron-nickel powder: placing an iron-nickel alloy raw material into a reaction system consisting of a high-temperature evaporator, a particle controller and a collector which are sequentially communicated, and preparing, wherein plasma gas is used as a heating source to heat and evaporate the iron-nickel alloy raw material in the preparation process;
surface modification: insulating and coating the prepared nano-scale iron-nickel powder and micro-scale alloy soft magnetic powder by using a magnetic material, and fully mixing to obtain iron-based soft magnetic powder;
and (3) mixing: dispersing the surface-modified iron-based soft magnetic powder in a resin composition solution for coating granulation, and drying for standby.
10. A power inductor comprising an iron-based soft magnetic powder according to any one of claims 1 to 8.
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