CN118130833A - Electrode multiplexing triaxial MEMS acceleration detection device - Google Patents

Electrode multiplexing triaxial MEMS acceleration detection device Download PDF

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Publication number
CN118130833A
CN118130833A CN202410074691.3A CN202410074691A CN118130833A CN 118130833 A CN118130833 A CN 118130833A CN 202410074691 A CN202410074691 A CN 202410074691A CN 118130833 A CN118130833 A CN 118130833A
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electrode
comb teeth
fixed
mass
mass block
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王志刚
王志
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Chengdu Benyuan Juneng Technology Co ltd
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Chengdu Benyuan Juneng Technology Co ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system

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  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)

Abstract

The invention provides a triaxial MEMS acceleration detection device with multiplexing electrodes, which relates to the technical field of acceleration detection and aims to reduce errors and improve measurement sensitivity, and comprises a mass block, a plurality of supporting beams and a plurality of electrodes; the mass block is of a quadrilateral flat plate structure, and the supporting beams are respectively arranged at four corners of the mass block; the first side and the third side of the mass block are opposite sides, and the second side and the fourth side are opposite sides; a first electrode and a second electrode are arranged on the first side of the mass block; a third electrode and a fourth electrode are arranged on the second side of the mass block; a fifth electrode and a sixth electrode are arranged on the third side of the mass block; and a seventh electrode and an eighth electrode are arranged on the fourth side of the mass block. The invention has the advantages of high detection reliability and high sensitivity.

Description

Electrode multiplexing triaxial MEMS acceleration detection device
Technical Field
The invention relates to the technical field of acceleration detection, in particular to an electrode multiplexing triaxial MEMS acceleration detection device.
Background
An accelerometer is a type of metering device that detects the acceleration of the movement of an object, and is often found in many modern devices or equipment, such as smart phones, motion sensors, and automotive stabilization systems.
In the prior art, most of accelerometers are composed of designs based on damping, springs, mass blocks and the like. In practical motion measurement, it is difficult for an accelerometer to avoid problems of measurement errors and sensitivity limitations. Especially for triaxial MEMS accelerometer, it can realize that a device detects three axial acceleration simultaneously, has small, light in weight's advantage, wide application in inertial navigation, platform stability and vibration detection etc. but triaxial MEMS accelerometer receives device size restriction, leads to detecting sensitivity not high scheduling problem.
Therefore, when designing the triaxial MEMS accelerometer, the error should be reduced as much as possible, and the measurement sensitivity should be improved.
Disclosure of Invention
The invention aims to provide an electrode multiplexing triaxial MEMS acceleration detection device which can reduce errors and improve measurement sensitivity.
The embodiment of the invention is realized by the following technical scheme:
The triaxial MEMS acceleration detection device for electrode multiplexing comprises a mass block, a plurality of supporting beams and a plurality of electrodes;
the mass block is of a quadrilateral flat plate structure, and the supporting beams are respectively arranged at four corners of the mass block;
The first side and the third side of the mass block are opposite sides, and the second side and the fourth side are opposite sides; a first electrode and a second electrode are arranged on the first side of the mass block; a third electrode and a fourth electrode are arranged on the second side of the mass block; a fifth electrode and a sixth electrode are arranged on the third side of the mass block; and a seventh electrode and an eighth electrode are arranged on the fourth side of the mass block.
Preferably, the support beam is a serpentine fold structure, one end of the support beam being connected to a corner of the mass, the other end of the support beam being connected to an external fixed anchor point.
Preferably, each of the electrodes includes an electrode anchor, a plurality of fixed combs and at least one movable comb;
The movable comb teeth are fixed to the edge of the mass block, the fixed comb teeth are fixed to the electrode anchor points, and the fixed comb teeth and the movable comb teeth are arranged in a staggered mode.
Preferably, the first electrode, the second electrode, the fifth electrode and the sixth electrode have the same structure and comprise a plurality of first movable comb teeth, a plurality of first fixed comb teeth and a first electrode anchor point;
One end of the first movable comb teeth is fixed to the edge of the mass block, and one end of the first fixed comb teeth is fixed to the first electrode anchor point;
the first movable comb teeth and the first fixed comb teeth are staggered;
the height of the first movable comb teeth is smaller than that of the first fixed comb teeth.
Preferably, the first movable comb teeth are offset from a center position between the two first fixed comb teeth on both sides thereof.
Preferably, the third electrode, the fourth electrode, the seventh electrode and the eighth electrode have the same structure and comprise a plurality of second movable comb teeth, a plurality of second fixed comb teeth and a second electrode anchor point;
One end of the second movable comb teeth is fixed to the edge of the mass block, and one end of the second fixed comb teeth is fixed to the second electrode anchor point;
the second movable comb teeth and the second fixed comb teeth are staggered;
the second movable comb teeth are higher than the second fixed comb teeth.
Preferably, the second movable comb teeth are offset from a center position between the two second fixed comb teeth on both sides thereof.
Preferably, the mass is a square flat plate structure.
Preferably, the two electrodes on each side of the mass are respectively symmetrical about the midline of the side on which they are located.
The technical scheme of the embodiment of the invention has at least the following advantages and beneficial effects:
The acceleration detection device can detect the acceleration of X, Y, Z shafts simultaneously, and has small size and high integration level;
the acceleration detection device increases the number of the electrodes through electrode multiplexing, so that the sensitivity of the device for detecting acceleration is improved;
according to the acceleration detection device, inter-axis interference is restrained through special electrode arrangement, so that the accuracy and reliability of acceleration detection are improved;
The invention has good detection performance and operation convenience, and the structural design is easy to realize, the manufacturing cost is low, and the cost performance is very high;
The invention has reasonable design and simple structure, and is convenient to implement and popularize.
Drawings
Fig. 1 is a schematic structural diagram of an electrode-multiplexed triaxial MEMS acceleration detection device according to embodiment 1 of the present invention;
FIG. 2 is a diagram showing the motion of the mass when X axial acceleration is applied;
FIG. 3 illustrates the motion of the mass when the Y-axis acceleration is applied;
FIG. 4 is a diagram showing the motion of the mass when Z-axis acceleration is applied;
FIG. 5 is a schematic top view of the first electrode, the second electrode, the fifth electrode, and the sixth electrode in example 2;
FIG. 6 is a schematic side view of the first electrode, the second electrode, the fifth electrode, and the sixth electrode in example 2;
FIG. 7 is a schematic top view of the third electrode, the fourth electrode, the seventh electrode, and the eighth electrode in example 2;
FIG. 8 is a schematic side view of the third electrode, the fourth electrode, the seventh electrode, and the eighth electrode in example 2;
Icon: 201-mass block, 202-supporting beam, 101-first electrode, 102-second electrode, 103-third electrode, 104-fourth electrode, 105-fifth electrode, 106-sixth electrode, 107-seventh electrode, 108-eighth electrode, 301-first fixed comb teeth, 302-first movable comb teeth, 303-first electrode anchor point, 401-second fixed comb teeth, 402-second movable comb teeth, 403-second electrode anchor point.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Example 1
The embodiment provides an electrode multiplexing triaxial MEMS acceleration detection device, referring to FIG. 1, including a mass 201, a plurality of support beams 202 and a plurality of electrodes;
The mass block 201 is in a quadrilateral flat plate structure, and the supporting beams 202 are respectively arranged at four corners of the mass block 201;
The first side and the third side of the mass block 201 are opposite sides, and the second side and the fourth side are opposite sides; a first electrode 101 and a second electrode 102 are arranged on a first side of the mass block 201; a third electrode 103 and a fourth electrode 104 are arranged on the second side of the mass block 201; a fifth electrode 105 and a sixth electrode 106 are arranged on the third side of the mass block 201; the seventh electrode 107 and the eighth electrode 108 are provided on the fourth side of the mass 201.
As a preferred solution of this embodiment, the support beam 202 has a serpentine folded structure, one end of the support beam 202 is connected to a corner of the mass 201, and the other end of the support beam 202 is connected to an external fixed anchor point.
Based on the structure of this embodiment, the support beam 202 allows the mass 201 to move along the X, Y, Z axes in three directions, specifically, the coordinate axes are established and defined as: the center of the mass 201 is taken as an origin, a perpendicular vector of the origin pointing to the third side is taken as an x-axis positive axis, a perpendicular vector of the origin to the fourth side is taken as a y-axis positive axis, and a z-axis is taken as a perpendicular to the two axes. The movement case can be seen in fig. 2-4, fig. 2 is the movement of the mass 201 when X-axis acceleration is applied. Fig. 3 shows the motion of the mass 201 when the Y-axis acceleration is applied. Fig. 4 shows the movement of the mass 201 when the Z-axis acceleration is applied.
The embodiment can detect the acceleration of X, Y, Z triaxial at the same time, the X-axis and the Z-axis and the Y-axis and the Z-axis are multiplexed, more detection electrodes can be arranged for each axial direction under the condition of the same structural size, the detection sensitivity is improved, the chip performance is improved, and the embodiment also inhibits the inter-axis coupling through special electrode arrangement.
Example 2
The present embodiment is based on the technical solution of embodiment 1, and the structure of each electrode in the device is further described.
Preferably, each electrode comprises an electrode anchor point, a plurality of fixed comb teeth and at least one movable comb tooth;
The movable comb teeth are fixed to the edge of the mass 201, the fixed comb teeth are fixed to the electrode anchor points, and the fixed comb teeth and the movable comb teeth are staggered with each other.
Wherein the fixed comb teeth are fixed and the movable comb teeth can follow the movement of the mass 201. Each electrode is equivalent to forming a capacitor respectively, and when the mass block 201 moves, the distance between the electrode plates or the facing area of the electrode plates of each electrode changes, so that the acceleration condition can be calculated based on the distance.
The respective electrodes of the present embodiment are of two types in total, in which the electrodes of the first side and the third side are all the same, and the electrodes of the second side and the fourth side are all the same.
In this embodiment, referring to fig. 5, the first electrode 101, the second electrode 102, the fifth electrode 105, and the sixth electrode 106 have the same structure, and include a plurality of first movable comb teeth 302, a plurality of first fixed comb teeth 301, and a first electrode anchor point 303;
One end of the first movable comb teeth 302 is fixed to an edge of the mass 201, and one end of the first fixed comb teeth 301 is fixed to the first electrode anchor point 303;
the first movable comb teeth 302 and the first fixed comb teeth 301 are staggered;
The first movable comb teeth 302 have a height smaller than that of the first fixed comb teeth 301. The design is such that: for example, for the first electrode 101, the capacitance of the first electrode 101 is unchanged (edge effect is ignored) when moving upward, and the capacitance of the first electrode 101 is reduced when moving downward.
Further, the first movable comb teeth 302 are offset from the center position between the two first fixed comb teeth 301 on both sides thereof. The design reasons of the design are as follows: still taking the first electrode 101 as an example, the capacitance of the first electrode 101 increases when the fixed comb teeth move to the proximal end, and the capacitance of the first electrode 101 decreases when the fixed comb teeth move to the distal end.
On the other hand, referring to fig. 6, the third electrode 103, the fourth electrode 104, the seventh electrode 107, and the eighth electrode 108 have the same structure, and include a plurality of second movable comb teeth 402, a plurality of second fixed comb teeth 401, and a second electrode anchor point 403;
One end of the second movable comb teeth 402 is fixed to an edge of the mass 201, and one end of the second fixed comb teeth 401 is fixed to the second electrode anchor point 403;
The second movable comb teeth 402 and the second fixed comb teeth 401 are staggered;
the second movable comb teeth 402 have a height greater than that of the second fixed comb teeth 401. The design is such that: for example, for the third electrode 103, the capacitance is unchanged (edge effect is ignored) when it moves downward and the capacitance is reduced when it moves upward.
Further, the second movable comb teeth 402 are offset from the center position between the two second fixed comb teeth 401 on both sides thereof. Taking the third electrode 103 as an example, the capacitance increases when the comb teeth are fixed to the proximal end, and decreases when the comb teeth are fixed to the distal end.
Preferably, the mass 201 is a square flat plate structure.
In this embodiment, the two electrodes on each side of the mass 201 are symmetrical about the midline of the side on which they are located.
In particular, fig. 5-6 are shown with a movable comb as a schematic representation for ease of illustration.
The measurement calculation principle of the acceleration measurement device of the present embodiment is described below based on the coordinate system established in embodiment 1:
first, acceleration in the X direction:
When the acceleration in the X direction is detected, the mass 201 moves along the X axis, and the total detection capacitance Cxt = (c3+c8) - (c4+c7). When the mass 201 is stationary, cxt =0 is ideal due to the symmetrical relationship of the third and fourth electrodes 103 and 104 and the seventh and eighth electrodes 107 and 108. Assuming that the mass 201 moves in the-X direction, due to the symmetrical relationship of the third and fourth electrodes 103 and 104 and the seventh and eighth electrodes 107 and 108, ideally C3 '=c3+Δcx, C4' =c4- Δcx, C7 '=c7- Δcx, C8' =c8+Δcx. C3, C4, C7, C8 are the capacitances of the third 103, fourth 104, seventh 107 and eighth 108 electrodes, respectively, when the mass 201 is stationary. C3', C4', C7', C8' are the capacitances of the third electrode 103, the fourth electrode 104, the seventh electrode 107 and the eighth electrode 108, respectively, when the mass 201 is moving. The relationship between Δcx and acceleration a is:
Wherein n is the number of movable comb teeth, s is the right area of the plate capacitor, D is the gap between the movable comb teeth and the near-end fixed comb teeth, D is the gap between the movable comb teeth and the far-end fixed comb teeth, and omega xn is the resonance frequency of the movement of the mass block 201X direction. From this, it can be seen that the larger the number n of movable comb teeth is, the larger Δcx is, and the higher the detection sensitivity is.
At this time, cxt = (c3 '+c8') - (c4 '+c7')=4Δcx, and the acceleration magnitude can be obtained by detecting the magnitude of Cxt.
On the contrary, the movement of the mass 201 in the +x direction can be concluded identically, except that Cxt = (c3 '+c8') - (c4 '+c7') = -4 Δcx is now present.
Assuming that the mass 201 is moved in the +y direction by the Y-direction acceleration at this time, due to the symmetrical relationship of the third electrode 103, the fourth electrode 104, the seventh electrode 107, and the eighth electrode 108, ideally, C3 '=c3- Δcy, C4' =c4- Δcy, C7 '=c7+Δcy, and C8' =c8+Δcy. The relationship between Δcy and acceleration a is:
Wherein n is the number of movable comb teeth, t is the overlapping height of the comb teeth, D is the gap between the movable comb teeth and the near-end fixed comb teeth, D is the gap between the movable comb teeth and the far-end fixed comb teeth, and omega yn is the resonance frequency of the Y-direction movement of the mass block 201.
At this time, cxt = (c3 '+c8') - (c4 '+c7') =0, indicating that the Y-direction acceleration does not interfere with the X-direction acceleration detection. Conversely, the same conclusion can be reached if the mass 201 is moving in the-Y direction.
Assuming that there is Z-direction acceleration at this time to move the mass 201 in the +z direction, similarly, ideally, C3 '=c3- Δcz, C4' =c4- Δcz, C7 '=c7- Δcz, and C8' =c8- Δcz. The relationship between Δcz and acceleration a is:
Wherein n is the number of movable comb teeth, l is the overlapping length of the comb teeth, D is the gap between the movable comb teeth and the near-end fixed comb teeth, D is the gap between the movable comb teeth and the far-end fixed comb teeth, and omega zn is the resonance frequency of the movement of the mass block 201 in the Z direction.
At this time, cxt = (c3 '+c8') - (c4 '+c7') =0, indicating that the Z-direction acceleration does not interfere with the X-direction acceleration detection. Conversely, the same conclusion can be reached if the mass 201 is moving in the-Z direction.
The acceleration detection mode in the Y direction is as follows:
When the acceleration in the Y direction is detected, the mass 201 moves along the Y axis, and the total detection capacitance is cyt= (c1+c6) - (c2+c5). When the mass 201 is stationary, cyt=0 is ideal due to the symmetrical relationship of the first and second electrodes 101 and 102 and the fifth and sixth electrodes 105 and 106. It is assumed that the mass 201 is now moving in the +y direction, ideally C1 '=c1+Δcy, c2' =c2- Δcy, c5 '=c5- Δcy, c6' =c6+Δcy. C1, C2, C5, C6 are the capacitances of the first electrode 101, the second electrode 102, the fifth electrode 105, and the sixth electrode 106, respectively, when the mass 201 is stationary. C1', C2', C5', C6' are the capacitances of the first electrode 101, the second electrode 102, the fifth electrode 105, and the sixth electrode 106, respectively, after movement of the mass 201. The relationship between Δcy and acceleration a is:
Wherein n is the number of movable comb teeth, s is the right area of the plate capacitor, D is the gap between the movable comb teeth and the near end fixed comb teeth, D is the gap between the movable comb teeth and the far end fixed comb teeth, and omega yn is the resonance frequency of the structure moving in the Y direction.
At this time, cyt= (c1 '+c6') - (c2 '+c6')=4Δcy, and the magnitude of the acceleration can be obtained by detecting the magnitude of Cyt.
Conversely, movement of the mass 201 in the-Y direction may lead to the same conclusion, except that at this time cyt= (c1 '+c6') - (c2 '+c6') = -4 Δcy.
Assuming that there is an X-direction acceleration at this time to move the mass 201 in the-X direction, due to the symmetrical relationship of the first and second electrodes 101 and 102 and the fifth and sixth electrodes 105 and 106, ideally c1 '=c1+Δcx, c2' =c2+Δcx, c5 '=c5- Δcx, C6' =c6- Δcx. The relationship between Δcy and acceleration a is:
Wherein n is the number of movable comb teeth, t is the overlapping height of the comb teeth, D is the gap between the movable comb teeth and the near-end fixed comb teeth, D is the gap between the movable comb teeth and the far-end fixed comb teeth, and omega xn is the resonance frequency of the movement of the mass block 201X direction.
At this time, cyt= (c1 '+c6') - (c2 '+c6') =0, indicating that the X-direction acceleration does not interfere with the Y-direction acceleration detection. Conversely, the same conclusion can be reached if the mass 201 is moving in the +x direction.
Assuming that there is Z-direction acceleration at this time to move the mass 201 in the-Z direction, the same symmetry is based on the symmetry relationship, in an ideal case, C1 '=c1- Δcz, C2' =c2- Δcz, C5 '=c5- Δcz, C6' =c6- Δcz. The relationship between Δcz and acceleration a is:
Wherein n is the number of movable comb teeth, l is the overlapping length of the comb teeth, D is the gap between the movable comb teeth and the near-end fixed comb teeth, D is the gap between the movable comb teeth and the far-end fixed comb teeth, and omega zn is the resonance frequency of the movement of the mass block 201 in the Z direction.
At this time, cxt = (C1 '+c6') - (C2 '+c5') =0, indicating that the Z-direction acceleration does not interfere with the X-direction acceleration detection. Conversely, the same conclusion can be reached if the mass 201 is moving in the +z direction.
Finally, the acceleration in the Z direction is detected as follows:
When the acceleration in the Z direction is detected, the mass 201 moves along the Z axis, and the total detection capacitance is Czt = (c1+c2+c5+c6) - (c3+c4+c7+c8). When the mass 201 is stationary, czt =0 is ideal due to the symmetrical relationship of the electrodes. It is assumed that the mass 201 is now moving in the +z direction, and due to the symmetry of the electrodes, ideally, no edge effect is considered, C1 '=c1, C2' =c2, C5 '=c5, C6' =c6, C3 '=c3- Δcz, C4' =c4- Δcz, C7 '=c7- Δcz, C8' =c8- Δcz. C1C 8 are in turn the capacitances of the first electrode 101 to the eighth electrode 108, respectively, when the mass 201 is stationary. C1'-C8' are in turn the capacitances of the first electrode 101 to the eighth electrode 108, respectively, when the mass 201 is moving. The relationship between Δcz and acceleration a is:
Where n is the number of movable comb teeth, l is the length of overlap of the comb teeth, D is the gap between the movable comb teeth and the proximal fixed comb teeth, D is the gap between the movable comb teeth and the distal fixed comb teeth, and ω zn is the resonant frequency of the movement of the mass 201 along the Z direction.
At this time, czt = (c1 '+c2' +c5 '+c6') - (c3 '+c4' +c7 '+c8')=4Δcz, and the magnitude of acceleration can be obtained by detecting the magnitude of Czt.
Conversely, movement of the mass 201 in the-Z direction may lead to the same conclusion, except that Czt = (c1 '+c2' +c5 '+c6') - (c3 '+c4' +c7 '+c8') = -4 Δcz is now the same.
Assuming that there is an acceleration in the X direction at this time to move the mass 201 in the-X direction, the relationship between ,C1'＝C1+ΔCx1,C2'＝C2+ΔCx1,C5'＝C5-ΔCx1,C6'＝C6-ΔCx1,C3'＝C3+ΔCx2,C4'＝C4-ΔCx2,C7'＝C7-ΔCx2,C8'＝C8+ΔCx2.ΔCy and acceleration a is ideal due to the symmetrical relationship of the electrodes:
Wherein n is the number of movable comb teeth, t is the overlapping height of the comb teeth, s is the overlapping area of the comb teeth, D is the gap between the movable comb teeth and the near-end fixed comb teeth, D is the gap between the movable comb teeth and the far-end fixed comb teeth, and omega xn is the resonance frequency of the movement of the mass block 201X direction.
At this time, czt = (C1 '+c2' +c5 '+c6') - (C3 '+c4' +c7 '+c8') =0, indicating that the X-direction acceleration does not interfere with the Z-direction acceleration detection. Conversely, the same conclusion can be reached if the mass 201 is moving in the +x direction.
Assuming that there is a Y-direction acceleration to move the mass 201 in the +y direction at this time, the relationship between ,C3'＝C3+ΔCy1,C4'＝C4-ΔCy1,C5'＝C5-ΔCy1,C6'＝C6+ΔCy1,C3'＝C3-ΔCy2,C4'＝C4-ΔCy2,C7'＝C7+ΔCy2,C8'＝C8+ΔCy2.ΔCy and acceleration a is ideal due to the symmetrical relationship of the electrodes:
Wherein n is the number of movable comb teeth, t is the overlapping height of the comb teeth, s is the overlapping area of the comb teeth, D is the gap between the movable comb teeth and the near-end fixed comb teeth, D is the gap between the movable comb teeth and the far-end fixed comb teeth, and ω yn is the resonance frequency of the mass block 201 moving along the Y direction.
At this time, czt = (C1 '+c2' +c5 '+c6') - (C3 '+c4' +c7 '+c8') =0, indicating that the Y-direction acceleration does not interfere with the Z-direction acceleration detection. Conversely, the same conclusion can be reached if the mass 201 is moving in the-Y direction.
In summary, the triaxial MEMS acceleration detection device can detect acceleration in X, Y, and Z axes simultaneously, increase the number of electrodes through electrode multiplexing, improve detection sensitivity, and suppress inter-axis interference through novel electrode arrangement, thereby having good performance.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (9)

1. The triaxial MEMS acceleration detection device for electrode multiplexing is characterized by comprising a mass block (201), a plurality of supporting beams (202) and a plurality of electrodes;
The mass block (201) is of a quadrilateral flat plate structure, and the supporting beams (202) are respectively arranged at four corners of the mass block (201);
The first side and the third side of the mass block (201) are opposite sides, and the second side and the fourth side are opposite sides; a first electrode (101) and a second electrode (102) are arranged on the first side of the mass block (201); a third electrode (103) and a fourth electrode (104) are arranged on the second side of the mass block (201); a fifth electrode (105) and a sixth electrode (106) are arranged on the third side of the mass block (201); a seventh electrode (107) and an eighth electrode (108) are arranged on the fourth side of the mass block (201).
2. The electrode-multiplexed triaxial MEMS acceleration detection device according to claim 1, characterized in, that the support beam (202) is of a serpentine folded structure, one end of the support beam (202) is connected to a corner of the mass (201), and the other end of the support beam (202) is connected to an external fixed anchor point.
3. The electrode multiplexed triaxial MEMS acceleration sensing device of claim 1, wherein each electrode includes an electrode anchor, a plurality of fixed combs and at least one movable comb;
The movable comb teeth are fixed to the edge of the mass block (201), the fixed comb teeth are fixed to the electrode anchor points, and the fixed comb teeth and the movable comb teeth are staggered with each other.
4. A triaxial MEMS acceleration detection device with multiplexing electrodes according to claim 3, characterized in that the first electrode (101), the second electrode (102), the fifth electrode (105) and the sixth electrode (106) have the same structure, and comprise a plurality of first movable comb teeth (302), a plurality of first fixed comb teeth (301) and a first electrode anchor point (303);
-one end of the first movable comb (302) is fixed to an edge of the mass (201), one end of the first fixed comb (301) is fixed to the first electrode anchor point (303);
The first movable comb teeth (302) and the first fixed comb teeth (301) are staggered;
the first movable comb teeth (302) are smaller in height than the first fixed comb teeth (301).
5. The electrode-multiplexed triaxial MEMS acceleration detection device according to claim 4, characterized in, that the first movable comb teeth (302) are each offset from the center position between the two first fixed comb teeth (301) on both sides thereof.
6. A triaxial MEMS acceleration detection device with multiplexing electrodes according to claim 3, characterized in that the third electrode (103), the fourth electrode (104), the seventh electrode (107), the eighth electrode (108) have the same structure, and comprise a plurality of second movable comb teeth (402), a plurality of second fixed comb teeth (401), and a second electrode anchor point (403);
-one end of the second movable comb (402) is fixed to an edge of the mass (201), one end of the second fixed comb (401) is fixed to the second electrode anchor (403);
The second movable comb teeth (402) and the second fixed comb teeth (401) are staggered;
The second movable comb teeth (402) are greater in height than the second fixed comb teeth (401).
7. An electrode multiplexed triaxial MEMS acceleration sensing device according to claim 6, characterized in that the second movable comb teeth (402) are offset from the centre position between the two second fixed comb teeth (401) on both sides thereof.
8. The electrode-multiplexed triaxial MEMS acceleration detection device according to claim 1, characterized in, that the mass (201) is a square flat plate structure.
9. An electrode multiplexed triaxial MEMS acceleration sensing device according to claim 8, characterized in that the two electrodes on each side of the mass (201) are symmetrical about the midline of the side.
CN202410074691.3A 2024-01-18 2024-01-18 Electrode multiplexing triaxial MEMS acceleration detection device Pending CN118130833A (en)

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