CN118121973B - Condenser for purifying electronic grade hydrofluoric acid - Google Patents
Condenser for purifying electronic grade hydrofluoric acid Download PDFInfo
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- CN118121973B CN118121973B CN202410537202.3A CN202410537202A CN118121973B CN 118121973 B CN118121973 B CN 118121973B CN 202410537202 A CN202410537202 A CN 202410537202A CN 118121973 B CN118121973 B CN 118121973B
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- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 title claims abstract description 48
- 239000007788 liquid Substances 0.000 claims abstract description 103
- 239000002184 metal Substances 0.000 claims abstract description 45
- 238000002955 isolation Methods 0.000 claims abstract description 36
- 238000009833 condensation Methods 0.000 claims abstract description 29
- 230000005494 condensation Effects 0.000 claims abstract description 29
- 238000007599 discharging Methods 0.000 claims abstract description 21
- 230000007246 mechanism Effects 0.000 claims abstract description 20
- 230000000149 penetrating effect Effects 0.000 claims abstract description 4
- 230000009471 action Effects 0.000 claims description 16
- 238000009825 accumulation Methods 0.000 claims description 9
- 238000000746 purification Methods 0.000 claims description 7
- 238000007789 sealing Methods 0.000 claims description 7
- 230000000903 blocking effect Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 34
- 239000011344 liquid material Substances 0.000 abstract description 17
- 238000000034 method Methods 0.000 description 17
- 230000008569 process Effects 0.000 description 17
- 230000000694 effects Effects 0.000 description 10
- 238000001816 cooling Methods 0.000 description 3
- 238000011049 filling Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000012958 reprocessing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Abstract
The invention discloses a condenser for purifying electronic grade hydrofluoric acid, which comprises: the condensing tank body comprises a cylinder body and a cover plate; the condensing mechanism comprises a condensing sleeve and a heat exchange coil coiled around the periphery of the condensing sleeve, one end of the heat exchange coil is connected to the condensing sleeve in a communication way, and the other end of the heat exchange coil is connected to a heat exchange medium discharge pipe; the two ends of the heat exchange tubes are respectively connected between the upper end plate and the lower end plate of the cylinder body in a penetrating way; the discharging mechanism comprises a discharging pipe, a siphon three-way pipe is arranged on the discharging pipe, and a siphon section of the siphon three-way pipe is connected with a liquid suction pipe; the isolation mechanism comprises an isolation tube which is arranged in a coaxial state with the liquid suction tube, and a metal floating ball is arranged in the isolation tube. The invention can effectively realize the discharge of the liquid material formed by condensation in the pretreatment space on the premise of not forming the entrainment on the gaseous material, thereby effectively realizing the precooling treatment on the gaseous material.
Description
Technical Field
The invention relates to electronic grade hydrofluoric acid purifying equipment, in particular to a condenser for purifying electronic grade hydrofluoric acid.
Background
Hydrofluoric acid is colorless transparent liquid and has strong acidity. High purity hydrofluoric acid is one of the most widely used electronic chemicals in semiconductor manufacturing processes, and electronic grade hydrofluoric acid for semiconductors is widely used in the fields of integrated circuits, solar photovoltaics, liquid crystal displays and the like.
In the process of preparing electronic-grade hydrofluoric acid, a plurality of purification processes are needed to be carried out on the hydrofluoric acid, a condenser is one of purification devices commonly used in the process of purifying the hydrofluoric acid, gaseous materials are condensed into a liquid state through the condenser, materials which are not condensed into the liquid state are discharged back to corresponding devices, such as a purification tower for reprocessing, and the condensed liquid materials enter a blending kettle for concentration configuration. The existing condenser for purifying hydrofluoric acid generally adopts a conventional condenser which does not have the function of precooling gaseous materials, so that the heat exchange efficiency in the whole condensation process is relatively low. The existing condenser for purifying hydrofluoric acid cannot pre-cool gaseous materials, and the reason is that: the gaseous material can also form partial condensed liquid material in the pre-cooling process, and the liquid material in the pretreatment space is easy to form a large amount of entrainment on uncondensed gaseous material in the discharging process, so that the purification effect is greatly reduced.
Therefore, the invention designs the condenser for purifying the electronic grade hydrofluoric acid, which can effectively realize the discharge of the liquid material formed by condensation in the pretreatment space on the premise of not forming the entrainment on the gaseous material, thereby effectively realizing the precooling treatment of the gaseous material and obviously improving the material heat exchange efficiency in the condensation process.
Disclosure of Invention
The invention aims to solve the technical problems in the prior art, and provides a condenser for purifying electronic grade hydrofluoric acid, which can effectively solve the technical problems in the prior art.
The technical scheme of the invention is as follows:
an electronic grade hydrofluoric acid purification condenser comprising:
the condensing tank body comprises a cylinder body and cover plates which are hermetically arranged at the upper end part and the lower end part of the cylinder body, wherein the cylinder body is fixedly provided with a corresponding upper end plate and a corresponding lower end plate respectively at the joint of the cylinder body and the cover plates, and the lower side of the cylinder body is externally connected with a corresponding feeding pipe;
The condensing mechanism comprises a condensing sleeve and a heat exchange coil, wherein the condensing sleeve is connected between the upper end plate and the lower end plate in a sealing way, the heat exchange coil is coiled around the periphery of the condensing sleeve, the upper end plate is upwards connected with a corresponding heat exchange medium inlet pipe, one end of the heat exchange coil is connected to the condensing sleeve in a communicating way, the other end of the heat exchange coil is connected to a heat exchange medium discharge pipe arranged outside the cylinder body, and a plurality of corresponding air holes are uniformly distributed on the upper end plate outside the condensing sleeve;
The heat exchange tubes are all arranged in the condensation sleeve, and two ends of the heat exchange tubes are respectively connected between the upper end plate and the lower end plate in a penetrating way;
The discharging mechanism comprises a discharging pipe which is communicated and connected to the cover plate positioned at the bottom side, a corresponding siphon three-way pipe is fixedly arranged on the discharging pipe, a siphon section of the siphon three-way pipe is outwards connected with a corresponding liquid suction pipe, and a liquid inlet end of the liquid suction pipe penetrates through and is connected to the upper side of the lower end plate;
the isolation mechanism comprises an isolation tube fixedly connected to the upper side of the lower end plate, the isolation tube and the liquid suction tube are coaxially arranged, a corresponding liquid discharge long hole is longitudinally formed in the side wall of the isolation tube, and a pair of metal floating balls for blocking the liquid inlet ends of the liquid suction tube can be arranged in the isolation tube in a vertically movable manner; when the liquid accumulation height between the condensation sleeve and the cylinder body exceeds the height of the metal floating ball, the metal floating ball floats upwards under the buoyancy action, so that the liquid accumulation enters the isolation pipe along the liquid discharge long hole, and the liquid accumulation enters the discharge pipe along the liquid suction pipe to be discharged together under the siphon action.
A corresponding limiting plate is arranged on the lower end plate outside the liquid discharge long hole in a swinging way, a reset baffle push plate with the area smaller than that of the limiting plate is obliquely arranged in the bottom of the limiting plate, and a corresponding baffle protruding part is obliquely arranged on the upper side of the limiting plate in a backward direction; when the metal floating ball floats upwards under the action of buoyancy, the limiting plate swings inwards under the impact of liquid flow, and the gear protruding part enters the isolation tube through the liquid discharge long hole to support the metal floating ball; after the liquid level of the effusion descends, the reset baffle push plate is impacted by liquid flow to swing inwards, the baffle protruding part is separated from the metal floating ball, and the metal floating ball resets under the action of dead weight so as to form a plug for the end part of the liquid suction pipe.
The upper end and the lower end of the cylinder body are respectively integrally formed and provided with corresponding locking convex edges, and the cover plate is locked and mounted on the locking convex edges of the cylinder body through a plurality of corresponding locking bolts.
Corresponding sealing gaskets are respectively arranged between the cover plate and the locking convex edge of the cylinder body in a cushioning mode.
The lower end plate is connected with an emptying pipe provided with an emptying valve.
The lower end plate outside the liquid discharge slot hole is fixedly connected with a corresponding support rod piece, and the limiting plate can be installed on the support rod piece in a swinging mode through a corresponding hinge shaft.
The heat exchange medium inlet pipe, the heat exchange medium outlet pipe, the feeding pipe and the discharging pipe are respectively and fixedly provided with corresponding opening and closing valves.
And a cover plate positioned at the upper end part of the cylinder body is upwards connected with an exhaust gas discharge pipe provided with an exhaust valve.
The invention has the advantages that:
1) The periphery of the heat exchange space of the existing condenser is additionally provided with the heat exchange coil, so that the heat exchange medium circulates through the heat exchange coil to be discharged outside after filling the space of the condensation sleeve, a precooling space is formed between the condensation sleeve and the cylinder body, and in the process of circulating gaseous materials between the condensation sleeve and the cylinder body, precooling heat exchange can be formed with the heat exchange coil; the gaseous material after the precooling treatment circulates along the heat exchange tubes, and forms sufficient heat exchange with the heat exchange medium filled in the condensation sleeve, so as to be condensed into liquid material and discharged along the discharge tube, thereby effectively realizing the precooling treatment of the gaseous material and obviously improving the material heat exchange efficiency in the condensation process.
2) In the pre-cooling treatment process of the gaseous material between the condensation sleeve and the barrel part, part of the gaseous material is condensed into liquid material and is collected at the bottom of the barrel part, after the liquid level of the collected accumulated liquid rises to a certain height, a metal floating ball arranged in the isolation pipe floats upwards under the buoyancy effect, so that the accumulated liquid can enter the isolation pipe along a liquid discharge long hole on the isolation pipe and enter the liquid discharge pipe along the liquid suction pipe to be discharged together under the siphon effect; and after the liquid level is lowered, the metal floating ball resets again to form a plug for the liquid inlet end of the liquid suction pipe. Therefore, the liquid accumulated material can be continuously discharged through the up-and-down movement of the metal floating ball in a circulating way, and the liquid material between the condensation sleeve and the cylinder body can not be entrained in the discharging process. Thereby realizing the following steps: on the premise of not forming entrainment on gaseous materials, the liquid materials formed by condensation in the pretreatment space are effectively discharged.
3) Through the setting of isolation tube and the metal floater of isolation mechanism, though realized the liquid material output that no gaseous state material was carried, but after the metal floater was floated under buoyancy effect, along with the drainage of liquid material, its liquid level was reduced after, just not enough to support its come-up to the buoyancy of metal floater, leads to the reset shutoff rate of metal floater too fast, causes the outer discharging inefficiency of liquid long-pending material to cause the influence for normal condensation discharge operation. Therefore, the limiting plate is arranged on the lower end plate outside the liquid discharge long hole in a swinging way, the reset baffle push plate with a smaller area is arranged at the bottom of the limiting plate, and the baffle protruding part is obliquely arranged on the upper side of the limiting plate.
In the effusion discharging process: after the metal floating ball floats upwards under the action of buoyancy, the limiting plate swings inwards under the impact of liquid flow, and the gear bulge part enters the isolating pipe through the liquid discharge long hole to form a support for the metal floating ball so as to prolong the drainage rate of accumulated liquid; after the liquid level of the effusion drops, the reset baffle push plate is impacted by liquid flow to swing inwards, so that the baffle protruding part is separated from the support of the metal floating ball, and at the moment, the metal floating ball can reset under the action of dead weight to form a plug for the end part of the liquid suction pipe, thereby effectively and singly improving the drainage efficiency of the effusion, and further greatly improving the practical effect of the invention.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a cross-sectional view of the present invention.
Fig. 3 is a schematic structural view of the condensing mechanism.
Fig. 4 is a schematic structural view of the isolation mechanism.
Fig. 5 is a cross-sectional view of the isolation mechanism.
In the accompanying drawings: the condensing tank 1, the cylinder 101, the cover plate 102, the upper end plate 2, the lower end plate 3, the feed pipe 4, the condensing mechanism 5, the condensing sleeve 501, the heat exchange coil 502, the heat exchange medium inlet pipe 503, the heat exchange medium outlet pipe 504, the ventilation holes 6, the heat exchange pipe 7, the discharge mechanism 8, the discharge pipe 801, the siphon three-way pipe 802, the liquid pumping pipe 803, the isolation mechanism 9, the isolation pipe 901, the metal floating ball 902, the liquid draining long hole 10, the limiting plate 11, the reset baffle plate 12, the baffle boss 13, the locking flange 14, the locking bolt 15, the sealing gasket 16, the emptying valve 17, the emptying pipe 18, the support rod 19, the opening and closing valve 20, the exhaust valve 21 and the tail gas outlet pipe 22.
Detailed Description
For the convenience of understanding by those skilled in the art, the structure of the present invention will now be described in further detail with reference to the accompanying drawings:
referring to fig. 1 to 5, a condenser for purifying electronic grade hydrofluoric acid, comprising:
The condensing tank 1 comprises a cylinder 101 and cover plates 102 which are hermetically arranged at the upper end and the lower end of the cylinder 101, wherein the cylinder 101 is fixedly provided with a corresponding upper end plate 2 and a corresponding lower end plate 3 at the joint of the cylinder 101 and the cover plates 102, and the lower side of the cylinder 101 is externally connected with a corresponding feed pipe 4;
The condensing mechanism 5 comprises a condensing sleeve 501 and a heat exchange coil 502, wherein the condensing sleeve 501 is connected between the upper end plate 2 and the lower end plate 3 in a sealing way, the heat exchange coil 502 is coiled and arranged at the periphery of the condensing sleeve 501, the upper end plate 2 is upwards connected with a corresponding heat exchange medium inlet pipe 503, one end of the heat exchange coil 502 is connected to the condensing sleeve 501 in a communicating way, the other end of the heat exchange coil 502 is connected to a heat exchange medium outlet pipe 504 arranged at the outer side of the cylinder part 101, and a plurality of corresponding ventilation holes 6 are uniformly distributed on the upper end plate 2 at the outer side of the condensing sleeve 501;
The heat exchange tubes 7 are all arranged in the condensation sleeve 501, and two ends of the heat exchange tubes 7 are respectively connected between the upper end plate 2 and the lower end plate 3 in a penetrating way;
The discharging mechanism 8 comprises a discharging pipe 801 which is communicated and connected with the cover plate 102 positioned at the bottom side, a corresponding siphon three-way pipe 802 is fixedly arranged on the discharging pipe 801, a siphon section of the siphon three-way pipe 802 is externally connected with a corresponding liquid suction pipe 803, and a liquid inlet end of the liquid suction pipe 803 penetrates and is connected to the upper side of the lower end plate 3;
The isolation mechanism 9 comprises an isolation tube 901 fixedly connected to the upper side of the lower end plate 3, the isolation tube 901 and the liquid suction tube 803 are coaxially arranged, a corresponding liquid discharge long hole 10 is longitudinally arranged on the side wall of the isolation tube 901, and a pair of metal floating balls 902 for blocking the liquid inlet ends of the liquid suction tube 803 are arranged in the isolation tube 901 in a vertically movable manner; when the liquid accumulation height between the condensation sleeve 501 and the cylinder 101 exceeds the height of the metal floating ball 902, the metal floating ball 902 floats up under the buoyancy action, so that the liquid accumulation enters the isolation tube 901 along the liquid discharge long hole 10, and the liquid accumulation enters the discharge tube 801 along the liquid suction tube 803 to be discharged together under the siphon action.
The heat exchange coil 502 is additionally arranged on the periphery of the heat exchange space of the existing condenser, so that heat exchange medium circulates through the heat exchange coil 502 to be discharged after filling the space of the condensation sleeve 501, a precooling space is formed between the condensation sleeve 501 and the cylinder 101, and in the process of circulating gaseous materials between the condensation sleeve 501 and the cylinder 101, precooling heat exchange can be formed with the heat exchange coil 502; the gaseous material after the precooling treatment circulates along the heat exchange tubes 7, and forms sufficient heat exchange with the heat exchange medium filled in the condensation sleeve 501 to be condensed into liquid material and discharged along the discharge tube, thereby effectively realizing the precooling treatment of the gaseous material and obviously improving the material heat exchange efficiency in the condensation process.
In the pre-cooling process of the gaseous material between the condensation sleeve 501 and the cylinder 101, part of the gaseous material is condensed into liquid material and forms a collection at the bottom of the cylinder 101, after the liquid level of the collected accumulated liquid rises to a certain height, a metal floating ball 902 arranged in the isolation tube 901 floats upwards under the buoyancy effect, so that the accumulated liquid can enter the isolation tube 901 along a liquid discharge long hole 10 on the isolation tube 901 and enter the discharge tube 801 along a liquid suction tube 803 to be discharged together under the siphon effect; after the liquid level drops, the metal floating ball 902 resets again to form a plug for the liquid inlet end of the liquid suction pipe 803. Therefore, the liquid accumulated material can be continuously discharged through the up-and-down movement of the metal floating ball in a circulating way, and the liquid material between the condensation sleeve 501 and the cylinder part 101 cannot be entrained in the discharging process. Thereby realizing the following steps: on the premise of not forming entrainment on gaseous materials, the liquid materials formed by condensation in the pretreatment space are effectively discharged, so that the precooling treatment of the gaseous materials is realized, the heat exchange efficiency of the materials in the condensation process is obviously improved, and the practical effect of the invention is further ensured.
A corresponding limiting plate 11 is arranged on the lower end plate 3 outside the liquid discharge long hole 10 in a swinging way, a reset baffle push plate 12 with the area smaller than that of the limiting plate 11 is obliquely arranged in the bottom of the limiting plate 11, and a corresponding baffle protruding part 13 is obliquely arranged on the upper side of the limiting plate 11 in a backward direction; when the metal floating ball 902 floats upwards under the action of buoyancy, the limiting plate 11 swings inwards under the impact of liquid flow, and the gear protruding part 13 enters the isolating pipe 901 through the liquid draining long hole 10 to support the metal floating ball 902; after the liquid level of the accumulated liquid drops, the reset baffle push plate 12 swings inwards under the impact of the liquid flow, the baffle boss 13 is separated from the metal floating ball 902, and the metal floating ball 902 resets under the action of self weight to form a plug for the end part of the liquid suction pipe 803.
Through the setting of isolation tube 901, and metal floater 902 of isolation mechanism 9, though realized the liquid material output that no gaseous material was carried, but metal floater 902 is after the come-up under buoyancy effect, along with the drainage of liquid material, after its liquid level was reduced, just not enough to support its come-up to the buoyancy of metal floater 902, leads to metal floater 902's reset shutoff rate too fast, causes the outer discharging inefficiency of liquid long-pending material to influence for normal condensation row material operation. Therefore, the limiting plate 11 is arranged on the lower end plate 3 outside the liquid discharge long hole 10 in a swinging way, the reset baffle push plate 12 with a smaller area is arranged at the bottom of the limiting plate 11, and the baffle protruding part 13 is arranged on the upper side of the limiting plate 11 in a tilting way.
In the effusion discharging process: after the metal floating ball 902 floats upwards under the action of buoyancy, the limiting plate 11 swings inwards under the impact of liquid flow, and the gear bulge 13 enters the isolating pipe 901 through the liquid discharge long hole 10 to support the metal floating ball 902 so as to prolong the discharge rate of accumulated liquid; after the liquid level of the effusion drops, the reset baffle push plate 12 swings inwards under the impact of liquid flow, so that the baffle convex part 13 is separated from the support of the metal floating ball 902, and at the moment, the metal floating ball 902 can reset under the action of dead weight to form a plug on the end part of the liquid suction pipe 803, thereby effectively improving the drainage efficiency of the effusion for a single time, and further greatly improving the practical effect of the invention.
The upper and lower ends of the cylinder 101 are respectively integrally formed with corresponding locking flanges 14, and the cover plate 102 is locked and mounted on the locking flanges 14 of the cylinder 101 through a plurality of corresponding locking bolts 15. Corresponding sealing gaskets 16 are respectively arranged between the cover plate 102 and the locking convex edges 14 of the cylinder body 101 in a cushioning mode.
The lower end plate 3 is connected outwardly to an evacuation tube 18 fitted with an evacuation valve 17. A corresponding support rod piece 19 is fixedly connected to the lower end plate 3 outside the liquid discharge long hole 10, and the limiting plate 11 is arranged on the support rod piece 19 in a swinging mode through a corresponding hinge shaft.
The heat exchange medium inlet pipe 503, the heat exchange medium outlet pipe 504, the feeding pipe 4 and the discharging pipe 801 are respectively and fixedly provided with a corresponding on-off valve 20. A cover plate 102 at the upper end of the cylinder is connected upward to an exhaust gas discharge pipe 22 having an exhaust valve 21 mounted thereon.
The foregoing is merely a preferred embodiment of the present invention and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present invention, which are intended to be comprehended within the scope of the present invention.
Claims (7)
1. An electronic grade hydrofluoric acid purification condenser, comprising:
The condensing tank body (1) comprises a cylinder body (101) and cover plates (102) which are hermetically arranged at the upper end and the lower end of the cylinder body (101), wherein the cylinder body (101) is fixedly provided with a corresponding upper end plate (2) and a corresponding lower end plate (3) at the joint of the cylinder body (101) and the cover plates (102), and the lower side of the cylinder body (101) is externally connected with a corresponding feeding pipe (4);
the condensing mechanism (5) comprises a condensing sleeve (501) which is connected between the upper end plate (2) and the lower end plate (3) in a sealing manner and a heat exchange coil (502) which is coiled and arranged on the periphery of the condensing sleeve (501), the upper end plate (2) is upwards connected with a corresponding heat exchange medium inlet pipe (503), one end of the heat exchange coil (502) is connected to the condensing sleeve (501) in a communicating manner, the other end of the heat exchange coil (502) is connected to a heat exchange medium discharge pipe (504) arranged on the outer side of the cylinder part (101), and a plurality of corresponding air holes (6) are uniformly distributed on the upper end plate (2) on the outer side of the condensing sleeve (501);
The heat exchange tubes (7) are all arranged in the condensation sleeve (501), and two ends of the heat exchange tubes (7) are respectively connected between the upper end plate (2) and the lower end plate (3) in a penetrating way;
the discharging mechanism (8) comprises a discharging pipe (801) which is communicated and connected with the cover plate (102) positioned at the bottom side, a corresponding siphon three-way pipe (802) is fixedly arranged on the discharging pipe (801), a siphon section of the siphon three-way pipe (802) is externally connected with a corresponding liquid suction pipe (803), and a liquid inlet end of the liquid suction pipe (803) penetrates through and is connected to the upper side of the lower end plate (3);
The isolation mechanism (9) comprises an isolation tube (901) fixedly connected to the upper side of the lower end plate (3), the isolation tube (901) and the liquid suction tube (803) are coaxially arranged, a corresponding liquid discharge long hole (10) is longitudinally formed in the side wall of the isolation tube (901), and a pair of metal floating balls (902) for blocking the liquid inlet ends of the liquid suction tube (803) are arranged in the isolation tube (901) in a vertically movable mode; when the liquid accumulation height between the condensation sleeve (501) and the cylinder body (101) exceeds the height of the metal floating ball (902), the metal floating ball (902) floats upwards under the buoyancy action, so that the liquid accumulation enters the isolation pipe (901) along the liquid discharge long hole (10), and the liquid accumulation enters the discharge pipe (801) along the liquid suction pipe (803) to be discharged together under the siphon action;
A corresponding limiting plate (11) is arranged on the lower end plate (3) at the outer side of the liquid discharge long hole (10) in a swinging way, a reset baffle push plate (12) with the area smaller than that of the limiting plate (11) is obliquely arranged in the bottom of the limiting plate (11), and a corresponding baffle protruding part (13) is obliquely arranged on the upper side of the limiting plate (11) in a backward direction; when the metal floating ball (902) floats upwards under the action of buoyancy, the limiting plate (11) swings inwards under the impact of liquid flow, and the gear protruding part (13) enters the isolating pipe (901) through the liquid draining long hole (10) to support the metal floating ball (902); after the liquid level of the accumulated liquid is lowered, the reset baffle push plate (12) swings inwards under the impact of liquid flow, the baffle protruding portion (13) is separated from the metal floating ball (902), and the metal floating ball (902) resets under the action of dead weight to form a plug on the end part of the liquid suction pipe (803).
2. The condenser for purifying electronic grade hydrofluoric acid according to claim 1, wherein the upper and lower end portions of the cylindrical body (101) are respectively integrally formed with corresponding locking flanges (14), and the cover plate (102) is locked and mounted to the locking flanges (14) of the cylindrical body (101) by a plurality of corresponding locking bolts (15).
3. The condenser for purifying electronic grade hydrofluoric acid according to claim 1, wherein a corresponding sealing gasket (16) is respectively interposed between the cover plate (102) and the locking flange (14) of the cylindrical body (101).
4. An electronic grade hydrofluoric acid purification condenser as claimed in claim 1, wherein the lower end plate (3) is connected outwardly with an evacuation tube (18) fitted with an evacuation valve (17).
5. The condenser for purifying electronic grade hydrofluoric acid according to claim 1, wherein the lower end plate (3) outside the long liquid drain hole (10) is fixedly connected with a corresponding support rod (19), and the limiting plate (11) is swingably mounted on the support rod (19) through a corresponding hinge shaft.
6. The condenser for purifying electronic grade hydrofluoric acid according to claim 1, wherein the heat exchange medium inlet pipe (503), the heat exchange medium outlet pipe (504), the feed pipe (4) and the discharge pipe (801) are respectively fixedly provided with corresponding on-off valves (20).
7. The condenser for purifying electronic grade hydrofluoric acid as claimed in claim 1, wherein a cover plate (102) at an upper end portion of the cylinder portion is upwardly connected with an exhaust gas discharge pipe (22) having an exhaust valve (21) mounted thereon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410537202.3A CN118121973B (en) | 2024-04-30 | 2024-04-30 | Condenser for purifying electronic grade hydrofluoric acid |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410537202.3A CN118121973B (en) | 2024-04-30 | 2024-04-30 | Condenser for purifying electronic grade hydrofluoric acid |
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| CN118121973A CN118121973A (en) | 2024-06-04 |
| CN118121973B true CN118121973B (en) | 2024-07-12 |
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| CN202410537202.3A Active CN118121973B (en) | 2024-04-30 | 2024-04-30 | Condenser for purifying electronic grade hydrofluoric acid |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113996080A (en) * | 2021-12-31 | 2022-02-01 | 山东海科新源材料科技股份有限公司 | Chemical condenser and method for condensing and separating gas-phase product by using same |
| CN114543549A (en) * | 2020-11-25 | 2022-05-27 | 中国石油天然气股份有限公司 | Automatic recovery unit of air cooler condensate |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2050125U (en) * | 1989-07-01 | 1989-12-27 | 北京化工学院 | Gas and liquid separating unit |
| KR102087872B1 (en) * | 2019-08-13 | 2020-03-12 | (주)이알코리아 | Bridges drain air vent device |
| CN112762222B (en) * | 2021-01-28 | 2023-01-24 | 深圳绿色云图科技有限公司 | Floating ball type drain valve |
| CN117414601B (en) * | 2023-12-19 | 2024-03-12 | 福建德尔科技股份有限公司 | Primary purification equipment for preparing electronic grade chlorine trifluoride |
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- 2024-04-30 CN CN202410537202.3A patent/CN118121973B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114543549A (en) * | 2020-11-25 | 2022-05-27 | 中国石油天然气股份有限公司 | Automatic recovery unit of air cooler condensate |
| CN113996080A (en) * | 2021-12-31 | 2022-02-01 | 山东海科新源材料科技股份有限公司 | Chemical condenser and method for condensing and separating gas-phase product by using same |
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