CN118099077A - Two-dimensional motion platform device - Google Patents
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Abstract
The invention provides a two-dimensional motion platform device, wherein a first sliding structure is rigidly connected with the center part of a first motion platform, and two side parts are flexibly connected; the first motion platform is rigidly connected with the central part of the second direction measuring ruler, and two side parts are flexibly connected. According to the invention, the first sliding structure and the second direction measuring ruler are rigidly connected with the center of the first moving table, and the two sides of the first sliding structure and the second direction measuring ruler are flexibly connected, so that the second direction measuring ruler does not drift along with the thermal deformation of the first moving table, and the measuring precision of the moving table is improved; meanwhile, the length of the first decoupling surface and the second decoupling surface in the second direction is smaller than that of the mounting surface, so that the influence of thermal deformation of the first moving table on the position of the second direction measuring ruler is reduced; the second flexible piece is made of a low expansion coefficient material, so that the influence of the thermal deformation of the second direction measuring ruler is reduced; and finally, a first position and a second position with the minimum length in the second direction are respectively arranged on the first decoupling surface and the second decoupling surface, so that the influence of the thermal deformation of the first moving table on the position of the second direction measuring ruler is further reduced.
Description
Technical Field
The invention belongs to the technical field of semiconductor integrated circuit manufacturing equipment, and particularly relates to a two-dimensional motion platform device.
Background
With the development of the semiconductor equipment industry, higher requirements are being placed on a motion stage of one of the core components of the semiconductor assembly. The semiconductor assembly requires higher production efficiency, so that higher requirements are generated on the movement speed, acceleration and the use duty ratio of the movement table; meanwhile, as the process of the silicon wafer is smaller, higher demands are also generated on the motion measurement and control precision of the motion platform.
However, in the process of further improving the movement speed and further miniaturizing the semiconductor process, the temperature rise caused by the motor heating, the movement friction heating, the local temperature rise of the environment and the like of the movement table starts to have a serious influence on the measuring tool on the movement table. The temperature rise of the motion platform easily causes thermal deformation of part materials connected with a measuring tool such as a grating ruler and the like, so that the measuring tool is subject to thermal drift, and the measuring scale is inaccurate. The measuring tool is used for measuring the movement distance and the position of the feedback movement table and adjusting the position and the movement state of the movement table according to the movement distance and the position, and the precision of the measuring tool is the basis for controlling the movement speed and the position precision of the movement table. Therefore, the problem of heating of the motion platform is increasingly obvious in miniaturization and high speed, and the control precision of the motion platform is obviously and negatively affected, so that the motion platform is not beneficial to the adaptation of the motion platform to miniaturized high-precision application scenes.
Therefore, a new design of the motion stage is needed to reduce or eliminate the influence of thermal deformation on the measurement accuracy of the motion stage.
It should be noted that the foregoing description of the background art is only for the purpose of providing a clear and complete description of the technical solutions of the present application and is thus convenient for a person skilled in the art to understand, and it should not be construed that the above technical solutions are known to the person skilled in the art merely because these solutions are described in the background art section of the present application.
Disclosure of Invention
In view of the above drawbacks of the prior art, an object of the present invention is to provide a two-dimensional motion platform device, which is used for solving the problem of poor measurement accuracy caused by thermal drift of a measurement tool of a motion platform in the prior art.
To achieve the above object, the present invention provides a two-dimensional motion platform device comprising: a first directional motion system and a second directional motion system;
the first directional motion system includes: the device comprises a first motion platform, a base platform and a first sliding structure;
The first moving table is connected to the base table in a sliding manner along a first direction through the first sliding structure;
The first sliding structure comprises a guide rail part and a sliding block part which are oppositely arranged;
the guide rail part is fixedly arranged on the base station; the sliding block part is rigidly connected with the central part of the first moving table and flexibly connected with the two side parts of the first moving table; the two side parts of the first moving table are symmetrically arranged along the second direction relative to the central part of the first moving table;
The first moving table is self-symmetrical relative to a first symmetrical surface perpendicular to a second direction, and the center part of the first moving table is arranged corresponding to the position of the first symmetrical surface;
the second direction movement system includes: the second motion platform is provided with a second direction measuring ruler and a second direction measuring reading head which are oppositely arranged;
The second moving table is connected with the first moving table in a sliding manner along a second direction;
The central part of the second direction measuring ruler is rigidly connected with the first moving table, and the two side parts of the second direction measuring ruler are flexibly connected with the first moving table; the two side parts of the second direction measuring ruler are symmetrically arranged along the second direction relative to the center part of the second direction measuring ruler;
The second direction measuring ruler is self-symmetrical relative to a second symmetrical surface perpendicular to the second direction, and the center part of the second direction measuring ruler is arranged at a position corresponding to the second symmetrical surface;
the second direction measuring reading head is fixedly arranged on the second moving table;
The first sliding structure is self-symmetrical relative to a third symmetrical plane perpendicular to the second direction, and the first symmetrical plane, the second symmetrical plane and the third symmetrical plane are overlapped; the first direction is perpendicular to the second direction.
Optionally, the two-dimensional motion platform device further comprises: a first flexible connection unit;
both side parts of the first moving table are flexibly connected with the sliding block part through the first flexible connecting piece;
the first flexible connection unit includes: the first motion installation surface, the first decoupling surface and the guide rail installation surface are sequentially connected;
The first moving installation surface is connected with the first moving table, and the guide rail installation surface is connected with the sliding block part;
The length of the first decoupling surface in the second direction is less than the lengths of the first motion mounting surface and the rail mounting surface in the second direction.
Optionally, the first motion mounting surface has a length in the third direction of 5mm to 10 mm; and/or the length of the first decoupling surface in the third direction is 2-8 mm; and/or the length of the guide rail mounting surface in the third direction is 1 mm-5 mm.
Optionally, the length of the first decoupling surface along the second direction is uniform; or the length of the first decoupling surface along the second direction is shortest at a first position, and increases from the first position to two sides along a third direction; the first position is located on the first decoupling surface, and the first position is not the end position of the first decoupling surface in the third direction; the third direction is perpendicular to the first direction and the second direction.
Optionally, when the lengths of the first decoupling surfaces along the second direction are uniform, the length of the first motion mounting surface along the second direction is greater than or equal to 10 times the length of the first decoupling surface along the second direction, and the length of the guide rail mounting surface along the second direction is greater than or equal to 10 times the length of the first decoupling surface along the second direction;
Or the length of the first decoupling surface along the second direction is greater than or equal to 10 times of the length of the first decoupling surface along the second direction at the first position when the length of the first decoupling surface along the second direction increases from the first position to the two sides along the third direction, and the length of the guide rail mounting surface along the second direction is greater than or equal to 10 times of the length of the first decoupling surface along the second direction at the first position.
Optionally, when the lengths of the first decoupling surfaces along the second direction are uniform, the lengths of the first decoupling surfaces along the second direction are 0.4 mm-1.2 mm;
or the length of the first decoupling surface along the second direction is 0.4 mm-1.2 mm in the first position along the second direction when the length of the first decoupling surface increases from the first position to the two sides along the third direction.
Optionally, the length of the first decoupling surface along the second direction is 2 mm-4 mm when the length of the first decoupling surface increases from the first position to the two sides along the third direction.
Optionally, the two-dimensional motion platform device further comprises: a second connector; the second connecting piece comprises a mounting seat, a central fixedly connected structure and two groups of second flexible pieces, one surface of the mounting seat is fixed with the second direction measuring ruler, and the other surface of the mounting seat is respectively fixed with the central fixedly connected structure and the second flexible pieces;
The second direction measuring ruler is rigidly connected with the first moving table through the center fixedly connecting structure;
The second direction measuring ruler is flexibly connected with the first moving table through the second flexible piece;
the center fixed connection structure is arranged corresponding to the center part of the second direction measuring ruler; the two groups of second flexible pieces are respectively arranged corresponding to the two side parts of the second direction measuring ruler; the two groups of second flexible pieces are symmetrically arranged along the second direction relative to the central fixed connection structure.
Optionally, the second connector has a material thermal expansion coefficient of less than 10 -6/°c.
Optionally, the second flexible element includes: the second motion installation surface and the second decoupling surface are sequentially connected, the second decoupling surface is fixed with the installation seat, and the second motion installation surface is fixed with the first motion platform; the length of the second decoupling surface in the second direction is less than the length of the second motion mounting surface in the second direction.
Optionally, the length of the second decoupling surface in the first direction is 1 mm-4 mm; and/or the second motion mounting surface has a length in the first direction of 1 mm to 3 mm.
Optionally, the length of the second decoupling surface along the second direction is uniform; or the length of the second decoupling surface along the second direction is shortest at a second position, and increases from the second position to two sides along the first direction, wherein the second position is positioned on the second decoupling surface, and the second position is not the end position of the second decoupling surface in the first direction; the third direction is perpendicular to the first direction and the second direction.
Optionally, when the lengths of the second decoupling surfaces along the second direction are uniform, the lengths of the second motion mounting surfaces along the second direction are greater than or equal to 10 times the lengths of the second decoupling surfaces along the second direction;
Or the length of the second decoupling surface along the second direction is greater than or equal to 10 times of the length of the second decoupling surface along the second direction when the second decoupling surface increases from the second position to the two sides along the first direction.
Optionally, when the lengths of the second decoupling surfaces along the second direction are uniform, the lengths of the second decoupling surfaces along the second direction are 0.4 mm-0.8 mm;
Or the length of the second decoupling surface along the second direction is 0.4-0.8 mm in length along the second direction when the second decoupling surface increases from the second position to the two sides along the first direction.
Optionally, the length of the second decoupling surface along the second direction is 2 mm-4 mm when the length of the second decoupling surface increases from the second position to the two sides along the first direction.
As described above, the two-dimensional motion platform device of the present invention has the following beneficial effects:
According to the invention, the first sliding structure and the second direction measuring ruler are respectively and rigidly connected with the two sides of the center of the first moving platform in a flexible manner, so that the second direction measuring ruler does not drift along with the thermal deformation of the first moving platform in the second direction, and the measuring precision of the moving platform is improved;
the length of the first decoupling surface and the length of the second decoupling surface in the second direction are smaller than the mounting surface, so that the influence of thermal deformation of the first moving table in the second direction on the position of the second direction measuring ruler is further reduced;
The second flexible piece is made of a low expansion coefficient material, so that the influence of the thermal deformation of the second direction measuring ruler is reduced;
The invention is arranged at a first position and a second position with minimum length on the first decoupling surface and the second decoupling surface respectively, so that the influence of thermal deformation of the first moving table in the second direction on the position of the second direction measuring ruler is further reduced.
Drawings
Fig. 1 is a schematic structural diagram of a two-dimensional motion platform device according to a first embodiment of the invention.
Fig. 2 is a schematic structural diagram of a first directional motion system according to a first embodiment of the invention.
Fig. 3 is a schematic structural diagram of a second direction motion system according to a first embodiment of the invention.
Fig. 4 is a schematic structural view of a first flexible connection unit according to a first embodiment of the invention.
Fig. 5 is a schematic structural diagram of a second connector according to a first embodiment of the invention.
Fig. 6 is a schematic structural diagram of a second decoupling surface according to a first embodiment of the present invention.
Fig. 7 is a schematic structural diagram of a heat isolation assembly and a heat dissipation plate according to an embodiment of the invention.
Fig. 8 is a schematic structural diagram of a first decoupling surface in a second embodiment of the present invention.
Fig. 9 is a schematic structural diagram of a second decoupling surface in a third embodiment of the present invention.
Description of element reference numerals
11. A first motion stage; 12. a base station; 131. a side rail; 132. a center rail; 133. a side slider; 134. a central slider; 14. a first direction motor; 15. a first flexible connection unit; 151. a first motion mounting surface; 152. a first decoupling surface; 153. a guide rail mounting surface; 161. a first direction measuring scale; 162. a first direction measurement readhead; A-A, a first symmetry plane;
21. a second motion stage; 221. a guide rail group; 222. a slider group; 23. a second connector; 231. a mounting base; 232. a center fixedly connected structure; 233. a second flexible member; 2331. a second motion mounting surface; 2332. a second decoupling surface; 234. a clamping piece; 241. a second direction measuring ruler; 242. a second direction measuring readhead; 25. A second direction motor; B-B, a fourth symmetry plane;
31. A thermal insulation assembly; 32. a heat dissipation plate; 331. a heat dissipation runner inlet; 332. a heat dissipation runner outlet; 34. the cable is moved.
Detailed Description
Other advantages and effects of the present invention will become apparent to those skilled in the art from the following disclosure, which describes the embodiments of the present invention with reference to specific examples. The invention may be practiced or carried out in other embodiments that depart from the specific details, and the details of the present description may be modified or varied from the spirit and scope of the present invention.
As described in detail in the embodiments of the present invention, the schematic drawings showing the structure of the apparatus are not partially enlarged to general scale, and the schematic drawings are merely examples, which should not limit the scope of the present invention. In addition, the three-dimensional dimensions of length, width and depth should be included in actual fabrication.
For ease of description, spatially relative terms such as "under", "below", "beneath", "above", "upper" and the like may be used herein to describe one element or feature's relationship to another element or feature as illustrated in the figures. It will be understood that these spatially relative terms are intended to encompass other orientations of the device in use or operation in addition to the orientation depicted in the figures.
In the context of the present application, a structure described as a first feature being "on" a second feature may include embodiments where the first and second features are formed in direct contact, as well as embodiments where additional features are formed between the first and second features, such that the first and second features may not be in direct contact.
It should be noted that, the illustrations provided in the present embodiment merely illustrate the basic concept of the present invention by way of illustration, and only the components related to the present invention are shown in the drawings rather than the number, shape and size of the components in actual implementation, and the form, number and proportion of each component in actual implementation may be arbitrarily changed, and the layout of the components may be more complex.
For convenience of description, the first direction is the X direction, the second direction is the Y direction, and the third direction is the Z direction in the following embodiments. The first symmetry plane A-A is parallel to the XOZ plane and the fourth symmetry plane B-B is parallel to the YOZ plane.
Example 1
As shown in fig. 1, the present embodiment provides a two-dimensional motion platform device, which includes: a first directional motion system and a second directional motion system;
As shown in fig. 1 and 2, the first direction movement system includes: a first moving stage 11, a base stage 12, a first sliding structure;
The first moving stage 11 is slidably connected to the base stage 12 along a first direction by a first sliding structure;
The first sliding structure comprises a guide rail part and a sliding block part which are oppositely arranged;
the guide rail part is fixedly arranged on the base 12; the sliding block part is rigidly connected with the central part of the first moving table 11 and flexibly connected with the two side parts of the first moving table 11; the two side parts of the first moving table 11 are symmetrically arranged along the second direction with respect to the center part of the first moving table 11;
the first moving table 11 is self-symmetrical relative to a first symmetrical plane A-A perpendicular to the second direction, and the center part of the first moving table 11 is arranged at a position corresponding to the first symmetrical plane A-A;
As shown in fig. 1 and 3, the second direction movement system includes: a second motion stage 21, a second direction measuring scale 241 and a second direction measuring readhead 242 disposed opposite to each other;
the second movement table 21 is slidably connected to the first movement table 11 along the second direction;
The center part of the second direction measuring ruler 241 is rigidly connected with the first moving table 11, and the two side parts of the second direction measuring ruler 241 are flexibly connected with the first moving table 11; the two side parts of the second direction measuring rule 241 are symmetrically arranged along the second direction with respect to the center part of the second direction measuring rule 241;
the second direction measuring rule 241 is self-symmetrical relative to a second symmetrical plane perpendicular to the second direction, and the center part of the second direction measuring rule 241 is arranged corresponding to the position of the second symmetrical plane;
the second direction measuring reading head 242 is fixedly arranged on the second moving table 21;
The first sliding structure is self-symmetrical relative to a third symmetrical plane perpendicular to the second direction, and the first symmetrical plane A-A, the second symmetrical plane and the third symmetrical plane are overlapped; the first direction is perpendicular to the second direction.
In the prior art, after the motion speed, the acceleration and the duty ratio of the motion platform are increased, as the motor of the motion platform heats and the motion platform moves, friction and heat are generated, a measuring tool used for measuring the motion state and the position of the motion platform on the motion platform can deform due to thermal expansion, so that the position of a scale is deviated, the measurement reading is inaccurate, and the control precision of the motion state of the motion platform is affected.
The invention is provided with the first symmetrical plane A-A, the second symmetrical plane and the third symmetrical plane which are used for rigidly connecting the sliding block part of the first sliding structure with the central part of the first moving table 11, so that the central surface of the whole moving table structure is enabled to be coincident with the central surface of the second direction measuring ruler 241 by taking the central part of the first moving table 11 as a reference; meanwhile, through the arrangement of the sliding block part of the first sliding structure and the flexible connection of the two side parts of the first moving table 11, the two side parts of the first moving table 11 are symmetrically arranged along the second direction relative to the center part of the first moving table 11, so that the rigidity of the flexible connection between the first moving table 11 and the sliding block part of the first sliding structure in the second direction is close to 0 (namely, the interaction force of the first moving table 11 and the sliding block part of the first sliding structure in the second direction is close to 0), and the thermal center surface of the first moving table 11 perpendicular to the second direction is relatively fixed by matching with the rigid connection of the center part, so that the first moving table 11 is subjected to thermal deformation along the second direction to the two sides by taking the thermal center surface as the center; and the first motion platform 11 is flexibly connected with the two side parts of the second direction measuring ruler 241, and meanwhile, the first motion platform 11 is rigidly connected with the central part of the second direction measuring ruler 241, so that the influence of the thermal deformation of the first motion platform 11 in the second direction on the second direction measuring ruler 241 is reduced, and the reliability of the structure is ensured.
In one embodiment, as shown in fig. 2 and 4, the two-dimensional motion platform device further includes: a first flexible connection 15;
both side parts of the first moving table 11 are flexibly connected with the sliding block part through a first flexible connecting piece 15;
The first flexible connection 15 comprises: a first moving installation surface 151, a first decoupling surface 152, and a guide rail installation surface 153 connected in sequence;
The first moving mounting surface 151 is connected to the first moving table 11, and the rail mounting surface 153 is connected to the slider portion;
The length of the first decoupling surface 152 in the second direction is less than the lengths of the first motion mounting surface 151 and the rail mounting surface 153 in the second direction.
According to the invention, the length of the first decoupling surface 152 in the second direction is smaller than the lengths of the first motion mounting surface 151 and the guide rail mounting surface 153 along the second direction, so that the first decoupling surface 152 is easier to deform, when the first motion platform 11 is subjected to thermal deformation, the first flexible connecting piece 15 is subjected to deformation stress, the length of the first decoupling surface 152 in the second direction is small, so that the deformation rigidity of the first decoupling surface 152 in the second direction is infinitely close to 0, the reaction force of the first flexible connecting piece 15 on the first motion platform 11 in the second direction is close to 0, the flexible connection rigidity between the first motion platform 11 and the sliding block part of the first sliding structure is close to 0, and the first flexible connecting piece 11 is matched with the rigid connection of the first motion platform 11 on the thermal center surface, so that the first motion platform 11 is subjected to thermal deformation along the second direction and two sides by taking the thermal center surface as the center.
Specifically, the length of the first motion installation surface 151 in the first direction and the second direction is determined by the size and the position of the first motion stage 11; the length of the rail mounting surface 153 in the first direction and the second direction is determined by the size and the position of the first sliding structure.
In one embodiment, the material of the first flexible connection 15 is invar or stainless steel.
The present invention further improves the ability to guide thermal deformation of the first motion stage 11 by providing the first flexible connection member 15 as a low coefficient of thermal expansion material.
In one embodiment, the bottom of the first moving platform 11 corresponding to the first flexible connecting piece 15 is provided with a groove, the first moving mounting surface 151 is disposed in the groove, and the side surface of the first moving mounting surface 151 is connected with the side surface of the groove.
The connecting mode that the first motion installation surface 151 extends into the groove at the bottom of the first motion platform 11 is arranged, so that the contact area between the first motion installation surface 151 and the first motion platform 11 can be increased, the connection reliability between the first motion installation surface 151 and the first motion platform 11 is improved, and the space utilization rate is improved; meanwhile, the connecting mode can be suitable for a structure with the first movement installation surface 151 being longer in the third direction and shorter in the second direction, when the first movement table 11 is used in a narrow space, the size of the first movement table 11 in the second direction can be limited, the structure of the first movement installation surface 151 can adapt to the space requirement of the first movement table 11, and the design and installation flexibility of the structure are improved.
In one embodiment, the first motion mounting surface 151 has a length in the third direction of 5 millimeters to 10 millimeters.
In one embodiment, the length of the first decoupling surface 152 in the third direction is 2 millimeters to 8 millimeters.
In one embodiment, the length of the rail mounting surface 153 in the third direction is 1 millimeter to 5 millimeters.
The length range of the first motion mounting surface 151, the first decoupling surface 152 and the guide rail mounting surface 153 in the third direction is set, so that flexible connection with rigidity close to 0 between the first motion platform 11 and the sliding block part of the first sliding structure is further formed, and the first motion platform 11 is subjected to thermal deformation to two sides in the second direction by taking the thermal center surface as the center in cooperation with the rigid connection of the first motion platform 11 on the thermal center surface.
In this embodiment, as shown in fig. 4, the length of the first decoupling surface 152 along the second direction is uniform.
In one embodiment, the length of the first motion mounting surface 151 in the second direction is 10 times or more the length of the first decoupling surface 152 in the second direction, and the length of the rail mounting surface 153 in the second direction is 10 times or more the length of the first decoupling surface 152 in the second direction.
The length relation of the first motion mounting surface 151, the guide rail mounting surface 153 and the first decoupling surface 152 in the second direction can further ensure that the flexible connection rigidity between the first motion platform 11 and the sliding block part of the first sliding structure is close to 0, and the first motion platform 11 is thermally deformed to two sides in the second direction by taking the thermal center surface as the center in cooperation with the rigid connection of the first motion platform 11 on the thermal center surface.
In one embodiment, the length of the first decoupling surface 152 in the second direction is 0.4 millimeters to 1.2 millimeters.
According to the invention, by setting the absolute length of the first decoupling surface 152 in the second direction, the flexible characteristic of the first decoupling surface 152 can better ensure that the flexible connection rigidity between the first moving table 11 and the sliding block part of the first sliding structure is close to 0, and the first moving table 11 is thermally deformed to two sides along the second direction by taking the thermal center surface as the center by matching with the rigid connection of the first moving table 11 on the thermal center surface; while ensuring that its rigidity can support the first motion stage 11.
In one embodiment, as shown in fig. 5, the two-dimensional motion platform device further includes: a second connector 23; the second connecting piece 23 comprises a mounting seat 231, a central fixedly connecting structure 232 and two groups of second flexible pieces 233, one surface of the mounting seat 231 is fixed with the second direction measuring ruler 241, and the other surface of the mounting seat 231 is respectively fixed with the central fixedly connecting structure 232 and the second flexible pieces 233;
The second direction measuring ruler 241 is rigidly connected with the first moving table 11 through a central fixed connecting structure 232;
The second direction measuring ruler 241 is flexibly connected with the first moving table 11 through a second flexible piece 233;
The center fixing structure 232 is arranged corresponding to the center part of the second direction measuring ruler 241; the two groups of second flexible pieces 233 are respectively arranged corresponding to the two side parts of the second direction measuring ruler 241; the two sets of second flexible members 233 are symmetrically disposed along the second direction with respect to the central fastening structure 232.
The invention realizes the rigid connection between the center part of the second direction measuring ruler 241 and the first moving table 11 through the structure provided with the second connecting piece 23 and the center fixed connection structure 232, the second flexible piece 233 realizes the flexible connection between the two side parts of the second direction measuring ruler 241 and the first moving table 11, and the mounting seat 231 realizes the rigid connection and the mounting arrangement of the flexible connection of the second direction measuring ruler 241; meanwhile, by arranging two groups of second flexible pieces 233 to be symmetrical along the second direction about the central fixed connection structure 232, when the first moving table 11 is deformed, the reaction forces of the two groups of second flexible pieces 233 to the mounting seat 231 can be equal in magnitude and opposite in direction, so that the reaction forces are offset to each other, and the reliability of rigid connection between the central part of the second direction measuring ruler 241 and the first moving table 11 is ensured.
In one embodiment, each set of second flexural elements 233 includes 2-8 second flexural elements 233. Specifically, as shown in fig. 5, each set includes 2 second flexural elements 233.
According to the invention, by arranging the number of the second flexible pieces 233 in each group, the capability of the second flexible pieces 233 for absorbing the thermal deformation of the first movement table 11 is improved, and meanwhile, the supporting strength of the second flexible pieces 233 on the second direction measuring ruler 241 is ensured.
In one embodiment, as shown in fig. 5, when the length of the second direction measuring rule 241 in the second direction is 300 mm or more, the length f of the contact area where the central fastening structure 232 is fixedly connected with the first moving table 11 in the second direction is 5mm to 20 mm.
The invention ensures the connection reliability between the central fixed connection structure 232 and the first moving table 11 and the bearing capacity of the deformation force in the second direction by setting the length range of the contact area of the central fixed connection structure 232 and the second moving table 21 in the second direction.
In one embodiment, the material of the second connector 23 has a coefficient of thermal expansion of less than 10 -6/DEG C.
In one embodiment, the material of the second connection 23 is invar.
According to the invention, the material of the second connecting piece 23 is a low thermal expansion coefficient material, so that the thermal deformation of the second connecting piece 23 is reduced, and the influence of the thermal deformation of the first moving table 11 on the thermal drift of the second direction measuring ruler 241 can be further reduced.
In one embodiment, as shown in fig. 6, the second flexible member 233 includes: the second motion installation surface 2331 and the second decoupling surface 2332 are sequentially connected, the second decoupling surface 2332 is fixed with the installation seat 231, and the second motion installation surface 2331 is fixed with the first motion platform 11; the length of the second decoupling surface 2332 in the second direction is less than the length of the second motion mounting surface 2331 in the second direction.
According to the invention, the length of the second decoupling surface 2332 in the second flexible piece 233 in the second direction is smaller than the second motion installation surface 2331, so that when the first motion platform 11 is subjected to thermal deformation, after the second flexible piece 233 is subjected to deformation stress, the rigidity of the second decoupling surface 2332 in the second direction is infinitely close to 0 due to the small length of the second decoupling surface 2332 in the second direction, the stress of the second decoupling surface 2332 on the installation seat 231 and the reaction force on the first motion platform 11 are close to 0, and therefore the second decoupling surface 2332 absorbs the thermal deformation of the first motion platform 11 in the second direction, and the second direction measuring rule 241 cannot be influenced by the deformation of the first motion platform 11 to generate thermal drift.
Specifically, the length of the second movement installation surface 2331 in the second direction and the third direction is determined by the size and the position of the first movement table 11.
In one embodiment, as shown in fig. 6, the length h 1 of the second decoupling surface 2332 in the first direction is 1 millimeter to 4 millimeters.
In one embodiment, as shown in FIG. 6, the length h 2 of the second motion-mounting surface 2331 in the first direction is 1 millimeter-3 millimeters.
According to the invention, by arranging the lengths of the second decoupling surface 2332 and the second motion installation surface 2331 in the first direction, the absorption capacity of the second flexible piece 233 on the thermal deformation of the first motion platform 11 is further improved, and the possibility of thermal drift of the second direction measuring ruler 241 is further reduced.
In this embodiment, as shown in fig. 6, the length h 3 of the second decoupling plane 2332 along the second direction is uniform.
In one embodiment, the length of the second motion mounting surface 2331 in the second direction is greater than or equal to 10 times the length of the second decoupling surface 2332 in the second direction.
The invention further ensures the capability of the second decoupling surface 2332 to absorb the thermal deformation of the first motion stage 11 by setting the length relationship of the second motion mounting surface 2331 and the second decoupling surface 2332 in the second direction.
In one embodiment, the length of the second decoupling surface 2332 in the second direction is 0.4 millimeters to 0.8 millimeters.
According to the invention, by setting the absolute length of the second decoupling surface 2332 in the second direction, the second decoupling surface 2332 can absorb the thermal deformation of the first moving table 11 to the greatest extent, and simultaneously ensure that the rigidity of the second decoupling surface 2332 can support the second direction measuring rule 241.
Specifically, the rigid connection in the present embodiment mainly refers to glue connection and welding connection; wherein, glue connection is preferred, and the operation is more convenient.
In one embodiment, as shown in fig. 5, the second direction measuring rule 241 is fixedly connected to the mounting seat 231 at the position of the first symmetry plane A-A through hard glue, and the second direction measuring rule 241 is connected to the mounting seat 231 at the position not at the first symmetry plane A-A through the clamping piece 234.
In one embodiment, the second flexible member 233 is fixedly connected to the first moving table 11 by means of a screw connection.
In one embodiment, the central fixing structure 232 is fixedly connected with the first moving platform 11 through hard glue.
In one embodiment, the hard glue is preferably an epoxy glue.
In one embodiment, the slider portion is located inside the rail portion; or the slider portion semi-encloses the upper and side portions of the rail portion. Specifically, other suitable positions and connection modes of the sliding blocks and the guide rails can be selected, and the positions and connection modes are all within the protection scope of the invention.
In one embodiment, the slider portion and the rail portion are mechanically or pneumatically sliding structures. Specifically, other suitable sliding structures may be selected, which are within the scope of the present invention.
In one embodiment, as shown in fig. 2, the guide rail portion includes a center guide rail 132 and two sets of side guide rails 131, the slider portion includes a center slider 134 and two sets of side sliders 133, the center slider 134 is rigidly connected to the center portion of the first motion stage 11, the two sets of side sliders 133 are flexibly connected to two side portions of the first motion stage 11, the center guide rail 132 is disposed corresponding to the center slider 134, and the two sets of side guide rails 131 are disposed corresponding to the two sets of side sliders 133.
In one embodiment, as shown in fig. 3, the second direction movement system further includes a second sliding structure, and the second sliding structure also includes a guide rail set 221 and a slider set 222, where the guide rail set 221 is self-symmetrical with respect to the first symmetry plane A-A.
In one embodiment, the second motion stage 21 is self-symmetrical with respect to a fourth symmetry plane B-B perpendicular to the first direction, and the guide rail set 221 and the slider set 222 are self-symmetrical with respect to the fourth symmetry plane B-B.
In this embodiment, the second moving table 21 and the second sliding structure are self-symmetrical about the fourth symmetry plane B-B, so that the thermal deformation of the second moving table 21 along the first direction can be symmetrically distributed, so as to reduce the problems of dislocation, deformation and the like caused by uneven stress distribution, which are caused by larger stress of the structure, and improve the reliability of the structure.
In one embodiment, the slider group 222 is located inside the guide rail group 221; or the slider group 222 semi-surrounds the upper and side portions of the rail group 221. Specifically, other suitable positions and connection modes of the sliding blocks and the guide rails can be selected, and the positions and connection modes are all within the protection scope of the invention.
In one embodiment, the sliding block set 222 and the guide rail set 221 are mechanically sliding structures or air-floating sliding structures. Specifically, other suitable sliding structures may be selected, which are within the scope of the present invention.
In one embodiment, the first direction movement system further includes two sets of first direction measurement scales 161 and two sets of first direction measurement readheads 162, the two sets of first direction measurement scales 161 being symmetrically disposed about the first symmetry plane A-A along the second direction, the two sets of first direction measurement readheads 162 being symmetrically disposed about the first symmetry plane A-A along the second direction, the one set of first direction measurement scales 161 being disposed opposite the one set of first direction measurement readheads 162.
In one embodiment, first direction measuring scale 161 is fixed to base 12 and first direction measuring readhead 162 is fixed to first motion stage 11.
The first direction measuring scale 161 is fixed with the base 12, so that thermal drift of the first direction measuring scale 161 caused by thermal deformation of the first moving table 11 is reduced.
In one embodiment, the material of the base 12 is marble and/or the material of the first direction measurement scale 161 is invar, glass, ceramic.
The invention further reduces the thermal drift of the motion stage to the first direction measuring scale 161 by providing the base 12 and the first direction measuring scale 161 as low thermal expansion coefficient materials.
In one embodiment, the material of the second direction measurement scale 241 is invar, glass, or ceramic.
According to the invention, the second direction measuring ruler 241 is made of a material with a low thermal expansion coefficient, so that the influence of thermal deformation of the motion platform on the thermal drift of the second direction measuring ruler 241 is further reduced.
In one embodiment, first direction measuring scale 161 and/or second direction measuring scale 241 are other suitable measuring scales such as grating scales, capacitive scales, inductive scales, etc., and first direction measuring readhead 162 and second direction measuring readhead 242 are correspondingly matched readheads to the measuring scales.
In one embodiment, as shown in fig. 2, the first direction movement system further includes a first direction motor 14, where the first direction motor 14 drives the first movement stage 11 to move along the first direction, and the first direction motor 14 is self-symmetrical with respect to a first symmetry plane A-A perpendicular to the second direction.
In one embodiment, as shown in fig. 2, a heat insulation assembly 31 and/or a heat dissipation plate 32 as shown in fig. 7 is arranged between the first direction motor 14 and the first moving table 11, a heat dissipation flow passage is arranged in the heat dissipation plate 32, a cooling medium is introduced into the heat dissipation flow passage through a heat dissipation flow passage inlet 331, and the cooling medium taking away heat is discharged from a heat dissipation flow passage outlet 332. Specifically, the heat insulating member 31 may be a material with low thermal conductivity such as PEEK (polyetheretherketone) or ceramic, and the cooling medium may be compressed air or water at 22 ℃ or less.
According to the invention, the heat insulation assembly 31 and the heat dissipation plate 32 are arranged between the motor and the moving table, so that the heat insulation and dissipation capacity of the moving table is improved, and the thermal deformation of the moving table is further reduced, and therefore, the thermal drift of the measuring ruler is reduced by matching with other heat deformation absorption arrangements of the invention.
In one embodiment, as shown in fig. 3, the second direction movement system further includes a second direction motor 25, where the second direction motor 25 drives the second movement table 21 to move along the second direction, and the second direction motor 25 is self-symmetrical with respect to a fourth symmetry plane B-B perpendicular to the second direction.
In one embodiment, as shown in fig. 3, a heat insulation assembly 31 and/or a heat dissipation plate 32 as shown in fig. 7 is arranged between the second direction motor 25 and the second moving table 21, and a heat dissipation flow channel is arranged in the heat dissipation plate 32, and a cooling medium is introduced into the heat dissipation flow channel to take away heat. Specifically, the heat insulating member 31 may be a material with low thermal conductivity such as PEEK (polyetheretherketone) or ceramic, and the cooling medium may be compressed air or water at 22 ℃ or less.
According to the invention, the heat insulation assembly 31 and the heat dissipation plate 32 are arranged between the motor and the moving table, so that the heat insulation and dissipation capacity of the moving table is improved, and the thermal deformation of the moving table is further reduced, and the thermal drift of each measuring ruler is reduced by matching with other arrangements for absorbing the thermal deformation.
In one embodiment, as shown in FIG. 1, the two-dimensional motion platform device powers the first direction motor 14, the second direction motor 25, the first direction measurement readhead 162, the second direction measurement readhead 242 through the motion cable 34, and/or provides a cooling medium in the heat sink 32 through the motion cable 34.
Example two
The present embodiment provides a two-dimensional motion platform device, and other features of the two-dimensional motion platform device are substantially the same as those of the first embodiment, and the difference is that: as shown in fig. 8, the length of the first decoupling surface 152 in the second direction is shortest at the first position, and increases from the first position to both sides in the third direction; the first position is located on the first decoupling surface 152, and the first position is not an end position of the first decoupling surface 152 in the third direction; the third direction is perpendicular to the first direction and the second direction.
According to the invention, by arranging the structure that the length of the first decoupling surface 152 in the second direction at the first position is shortest and increases gradually towards the two ends, the reaction force of the first decoupling surface 152 to the first motion stage 11 in the second direction can be further made to be close to 0, and compared with the embodiment 1, the strength of the first decoupling member 15 is further improved.
In one embodiment, the length of the first motion mounting surface 151 in the second direction is equal to or greater than 10 times the length of the first decoupling surface 152 in the second direction at the first position, and the length of the rail mounting surface 153 in the second direction is equal to or greater than 10 times the length of the first decoupling surface 152 in the second direction at the first position.
The invention can further ensure that the rigidity of the flexible connection between the first moving platform 11 and the sliding block part of the first sliding structure in the second direction is close to 0 by setting the length relation between the first moving installation surface 151 and the first decoupling surface 152 in the second direction of the first position, and the first moving platform 11 is matched with the rigid connection of the first moving platform 11 on the thermal center surface, so that the first moving platform 11 is thermally deformed to two sides in the second direction by taking the thermal center surface as the center.
In one embodiment, as shown in fig. 8, the first decoupling surface 152 has a length b of 0.4 mm-1.2 mm in the second direction in the first position.
According to the invention, by setting the absolute length of the first decoupling surface 152 in the second direction of the first position, the flexible characteristic of the first decoupling surface 152 can better realize the guiding capability of the thermal deformation of the first moving table 11, and meanwhile, the rigidity of the first decoupling surface can support the first moving table 11.
In one embodiment, as shown in fig. 8, the maximum length c of the first decoupling surface 152 in the second direction is 2 millimeters-4 millimeters.
The maximum length of the first decoupling surface 152 in the second direction is set to be matched with the length of the first decoupling surface in the second direction, so that the obtained structure can guide the thermal deformation of the first moving table 11 to the maximum extent, and meanwhile, the structural rigidity reliability of the first moving table 11 can be guaranteed.
Example III
The present embodiment provides a two-dimensional motion platform device, and other features of the two-dimensional motion platform device are substantially the same as those of the first embodiment, and the difference is that: as shown in fig. 9, the length of the second decoupling surface 2332 in the second direction is shortest at a second position, and increases from the second position to both sides in the first direction, the second position being located on the second decoupling surface 2332, and the second position being not an end position of the second decoupling surface 2332 in the first direction; the third direction is perpendicular to the first direction and the second direction.
The invention can further enable the reaction force of the second decoupling surface 2332 on the first moving table 11 in the second direction and the stress on the mounting seat 231 to be close to 0 by arranging the structure that the second decoupling surface 2332 is shortest in length in the second direction at the second position and gradually increases towards the two ends, thereby further improving the absorption capacity of the second decoupling surface 2332 on the thermal deformation of the first moving table 11 in the second direction.
In one embodiment, the length of the second motion mounting surface 2331 in the second direction is greater than or equal to 10 times the length of the second decoupling surface 2332 in the second direction in the second position.
The invention further ensures the thermal deformation absorbing capacity of the second decoupling surface 2332 on the first moving platform 11 in the second direction by setting the length relation of the second moving installation surface 2331 and the second decoupling surface 2332 in the second direction of the second position.
In one embodiment, as shown in fig. 9, the second decoupling surface 2332 has a length e of 0.4 mm to 0.8 mm in the second direction in the second position.
According to the invention, by setting the absolute length of the second decoupling surface 2332 in the second direction of the second position, the flexible characteristic of the second decoupling surface 2332 can better realize the absorption capacity of the first motion platform 11 on the thermal deformation in the second direction, and meanwhile, the rigidity of the second decoupling surface 2332 can be ensured to support the second direction measuring rule 241.
In one embodiment, the maximum length of the second decoupling surface 2332 in the second direction is 2 millimeters to 4 millimeters.
According to the invention, the maximum length of the second decoupling surface 2332 in the second direction is set to be matched with the length of the second position in the second direction, so that the obtained structure can absorb the thermal deformation of the first moving table 11 in the second direction to the maximum extent, and meanwhile, the structural rigidity reliability of the second direction measuring ruler 241 can be supported is ensured.
In summary, according to the two-dimensional motion platform device, the first sliding structure and the second direction measuring ruler are respectively and rigidly connected with the centers of the first motion platform and are flexibly connected with the two sides, so that the second direction measuring ruler does not generate position drift along with the thermal deformation of the first motion platform in the second direction, and the measurement precision of the motion platform is improved; meanwhile, the length of the first decoupling surface and the length of the second decoupling surface in the second direction are smaller than the mounting surface, so that the influence of thermal deformation of the first moving table in the second direction on the position of the second direction measuring ruler is reduced; the second flexible piece is made of a low expansion coefficient material, so that the influence of the thermal deformation of the second direction measuring ruler is reduced; and finally, a first position and a second position with the minimum length in the second direction are respectively arranged on the first decoupling surface and the second decoupling surface, so that the influence of the thermal deformation of the first moving table in the second direction on the position of the second direction measuring ruler is further reduced.
Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The above embodiments are merely illustrative of the principles of the present invention and its effectiveness, and are not intended to limit the invention. Modifications and variations may be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the invention. Accordingly, it is intended that all equivalent modifications and variations of the invention be covered by the claims, which are within the ordinary skill of the art, be within the spirit and scope of the present disclosure.
Claims (15)
1. A two-dimensional motion platform device, comprising: a first directional motion system and a second directional motion system;
The first directional motion system includes: a first moving table (11), a base table (12) and a first sliding structure;
the first moving table (11) is connected to the base table (12) in a sliding manner along a first direction through the first sliding structure;
The first sliding structure comprises a guide rail part and a sliding block part which are oppositely arranged;
The guide rail part is fixedly arranged on the base (12); the sliding block part is rigidly connected with the central part of the first moving table (11) and flexibly connected with the two side parts of the first moving table (11); two side parts of the first moving table (11) are symmetrically arranged along a second direction relative to the central part of the first moving table (11);
The first moving table (11) is self-symmetrical relative to a first symmetrical plane (A-A) perpendicular to the second direction, and the central part of the first moving table (11) is arranged corresponding to the position of the first symmetrical plane (A-A);
The second direction movement system includes: a second motion stage (21), and a second direction measuring scale (241) and a second direction measuring readhead (242) which are arranged opposite to each other;
the second motion platform (21) is connected to the first motion platform (11) in a sliding manner along a second direction;
The center part of the second direction measuring ruler (241) is rigidly connected with the first moving table (11), and the two side parts of the second direction measuring ruler (241) are flexibly connected with the first moving table (11); two side parts of the second direction measuring ruler (241) are symmetrically arranged along a second direction along the center part of the second direction measuring ruler (241);
the second direction measuring ruler (241) is self-symmetrical relative to a second symmetrical plane perpendicular to the second direction, and the center part of the second direction measuring ruler (241) is arranged corresponding to the position of the second symmetrical plane;
The second direction measuring reading head (242) is fixedly arranged on the second moving table (21);
the first sliding structure is self-symmetrical relative to a third symmetrical surface perpendicular to the second direction, and the first symmetrical surface (A-A), the second symmetrical surface and the third symmetrical surface are overlapped; the first direction is perpendicular to the second direction.
2. The two-dimensional motion platform device of claim 1, further comprising: a first flexible connection (15);
Both side parts of the first moving table (11) are flexibly connected with the sliding block part through the first flexible connecting piece (15);
The first flexible connection (15) comprises: the first motion installation surface (151), the first decoupling surface (152) and the guide rail installation surface (153) are sequentially connected;
The first moving installation surface (151) is connected with the first moving table (11), and the guide rail installation surface (153) is connected with the sliding block part;
The length of the first decoupling surface (152) in the second direction is less than the lengths of the first motion mounting surface (151) and the rail mounting surface (153) in the second direction.
3. The two-dimensional motion platform device according to claim 2, wherein the first motion mounting surface (151) has a length in the third direction of 5mm to 10 mm; and/or the length of the first decoupling surface (152) in the third direction is 2-8 mm; and/or the length of the guide rail mounting surface (153) in the third direction is 1 mm-5 mm.
4. The two-dimensional motion platform device according to claim 2, wherein the first decoupling surface (152) is uniform in length along the second direction; or the length of the first decoupling surface (152) in the second direction is shortest at a first position and increases from the first position to both sides in a third direction; the first position is on the first decoupling surface (152), and the first position is not an end position of the first decoupling surface (152) in a third direction; the third direction is perpendicular to the first direction and the second direction.
5. The two-dimensional motion platform device according to claim 4, wherein when the lengths of the first decoupling surfaces (152) in the second direction are uniform, the lengths of the first motion mounting surfaces (151) in the second direction are 10 times or more that of the first decoupling surfaces (152) in the second direction, and the lengths of the rail mounting surfaces (153) in the second direction are 10 times or more that of the first decoupling surfaces (152) in the second direction;
Or the length of the first decoupling surface (152) along the second direction is greater than or equal to 10 times of the length of the first decoupling surface (152) along the second direction at the first position when the length of the first decoupling surface (152) along the second direction increases from the first position to the two sides along the third direction, and the length of the guide rail mounting surface (153) along the second direction is greater than or equal to 10 times of the length of the first decoupling surface (152) along the second direction at the first position.
6. The two-dimensional motion platform device according to claim 4, wherein when the lengths of the first decoupling surfaces (152) along the second direction are uniform, the lengths of the first decoupling surfaces (152) along the second direction are 0.4 mm-1.2 mm;
Or the length of the first decoupling surface (152) along the second direction is 0.4-1.2 mm when the length of the first decoupling surface (152) along the second direction increases from the first position to the two sides along the third direction.
7. The two-dimensional motion platform device according to claim 4, wherein the length of the first decoupling surface (152) in the second direction is 2-4 mm when increasing from the first position to the two sides in the third direction.
8. The two-dimensional motion platform device of claim 1, further comprising: a second connector (23); the second connecting piece (23) comprises a mounting seat (231), a central fixedly connected structure (232) and two groups of second flexible pieces (233), one surface of the mounting seat (231) is fixed with the second direction measuring ruler (241), and the other surface of the mounting seat is fixed with the central fixedly connected structure (232) and the second flexible pieces (233) respectively;
The second direction measuring ruler (241) is rigidly connected with the first moving table (11) through the center fixedly connecting structure (232);
The second direction measuring ruler (241) is flexibly connected with the first moving table (11) through the second flexible piece (233);
the center fixed connection structure (232) is arranged corresponding to the center part of the second direction measuring ruler (241); the two groups of second flexible pieces (233) are respectively arranged corresponding to the two side parts of the second direction measuring ruler (241); the two groups of second flexible pieces (233) are symmetrically arranged along the second direction along the central fixed connection structure (232).
9. The two-dimensional motion platform device according to claim 8, wherein the material thermal expansion coefficient of the second connection member (23) is less than 10 -6/°c.
10. The two-dimensional motion platform device according to claim 8, wherein the second flexible member (233) comprises: a second motion installation surface (2331) and a second decoupling surface (2332) which are sequentially connected, wherein the second decoupling surface (2332) is fixed with the installation seat (231), and the second motion installation surface (2331) is fixed with the first motion platform (11); the length of the second decoupling surface (2332) in the second direction is less than the length of the second motion mounting surface (2331) in the second direction.
11. The two-dimensional motion platform device according to claim 10, wherein the second decoupling surface (2332) has a length in the first direction of 1 mm-4 mm; and/or the second motion mounting surface (2331) has a length in the first direction of 1mm to 3 mm.
12. The two-dimensional motion platform device according to claim 10, wherein the second decoupling surface (2332) is uniform in length along the second direction; or the second decoupling surface (2332) is shortest at a second position along the length in the second direction and increases from the second position to both sides in the first direction, the second position being on the second decoupling surface (2332) and the second position being not an end position of the second decoupling surface (2332) in the first direction; the third direction is perpendicular to the first direction and the second direction.
13. The two-dimensional motion platform device according to claim 12, wherein the length of the second motion mounting surface (2331) in the second direction is 10 times or more as long as the length of the second decoupling surface (2332) in the second direction when the lengths of the second decoupling surfaces (2332) in the second direction are uniform;
Or the length of the second decoupling surface (2332) along the second direction is greater than or equal to 10 times the length of the second decoupling surface (2332) along the second direction when the second decoupling surface (2331) increases from the second position to two sides along the first direction.
14. The two-dimensional motion platform device according to claim 12, wherein the length of the second decoupling surface (2332) along the second direction is 0.4 mm to 0.8 mm when the length of the second decoupling surface (2332) along the second direction is uniform;
or the length of the second decoupling surface (2332) along the second direction is 0.4-0.8 mm when the second decoupling surface (2332) increases from the second position to the two sides along the first direction.
15. The two-dimensional motion platform device according to claim 12, wherein the length of the second decoupling surface (2332) in the second direction is 2 mm-4 mm when increasing from the second position to both sides in the first direction.
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| CN219574594U (en) * | 2023-03-31 | 2023-08-22 | 上海隐冠半导体技术有限公司 | One-dimensional movement device |
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