CN118083847B - Auxiliary tool for disassembling and assembling evaporation source - Google Patents

Abstract

The invention discloses an auxiliary tool for disassembling and assembling an evaporation source, which comprises a mounting base assembly, an angle adjusting assembly, a width adjusting assembly, a lifting assembly and a transportation assembly, wherein the mounting base assembly is connected with the angle adjusting assembly; the mounting base assembly comprises two first sectional materials arranged in parallel along a first direction and two second sectional materials arranged in parallel along a second direction, each first sectional material is connected with one second sectional material, and the two second sectional materials are provided with supporting base plates; one end of the first section bar is connected with the supporting bending plate, the other end of the first section bar is movably connected with the width adjusting assembly, and the distance between the two first section bars is adjusted through the width adjusting assembly; the middle of the first section bar is connected with the angle adjusting component and can rotate around the width adjusting component, and the mounting base component, the angle adjusting component and the width adjusting component are fixed on the conveying component through the lifting component. The auxiliary tool disclosed by the invention is labor-saving in disassembly and assembly, accurate in positioning and capable of meeting the requirement of multi-angle installation, and the assembly efficiency and the assembly precision are greatly improved.

Description

Auxiliary tool for disassembling and assembling evaporation source

Technical Field

The invention relates to an auxiliary tool, in particular to an auxiliary tool for disassembling and assembling an evaporation source.

Background

The vacuum evaporation coating equipment needs to be provided with an evaporation source, and when the evaporation raw materials in the evaporation source are almost exhausted, the evaporation source needs to be disassembled and maintained, and the vacuum evaporation coating equipment needs to be installed again after the maintenance is completed. The evaporation source belongs to the core part of the evaporation equipment and has higher requirement on assembly precision, so that the installation of the evaporation source is an important link in equipment installation.

At present, to the evaporation source that is located the bottom of evaporation equipment and can't realize dismouting through appurtenance such as removal loading trolley, its installation and dismantlement process are all mainly manual operation. The auxiliary tool for disassembling the evaporation source disclosed in the Chinese patent document CN210850035U adopts a sleeve and a jacking piece to replace manual lifting, but the traditional multiple evaporation sources and equipment are installed at various angles, the space of the height direction is very narrow, the automatic lifting is realized only, the on-site installation requirement is difficult to meet flexibly, the disassembly and the assembly are laborious, the positioning is not accurate enough, and the assembly efficiency and the assembly precision are greatly influenced. In addition, the existing evaporation source is heavy in general, and is difficult to carry and move; therefore, the auxiliary tool for disassembling and assembling the existing evaporation source is required to be continuously improved.

Disclosure of Invention

The technical problem to be solved by the invention is to provide an auxiliary tool for disassembling and assembling the evaporation source, which is labor-saving in disassembly and assembly, accurate in positioning, flexible in operation, capable of meeting the requirement of multi-angle installation and greatly improving the assembly efficiency and the assembly precision.

The invention aims to solve the technical problems and adopts the technical scheme that the auxiliary tool for disassembling and assembling the evaporation source comprises a mounting base assembly, an angle adjusting assembly, a width adjusting assembly, a lifting assembly and a conveying assembly; the mounting base assembly comprises two first sectional materials arranged in parallel along a first direction and two second sectional materials arranged in parallel along a second direction, each first sectional material is connected with one second sectional material, and the two second sectional materials are provided with supporting base plates; one end of the first section bar is connected with the supporting bending plate, the other end of the first section bar is movably connected with the width adjusting assembly, and the distance between the two first section bars is adjusted through the width adjusting assembly; the middle of the first section bar is connected with the angle adjusting component, so that the installation base component can rotate around the width adjusting component, and the installation base component, the angle adjusting component and the width adjusting component are fixed on the conveying component through the lifting component.

Further, the first section bars are respectively connected with the angle adjusting assembly and the width adjusting assembly through section bar connecting hinges, one side of the supporting base plate is provided with a long waist hole, and the length of the long waist hole is the width adjusting distance between the two first section bars.

Further, the support bending plate can be detachably arranged at the end part of the first section bar and can be slidably adjusted along the first section bar.

Further, the angle adjusting assembly comprises two angle adjusting supporting blocks which are arranged in parallel, a screw rod is arranged between the two angle adjusting supporting blocks, a first screw rod nut is arranged on the screw rod, a guide shaft is further arranged on the first screw rod nut, the guide shaft rod is vertically arranged, third sectional materials are arranged at two ends of the guide shaft, a dovetail sliding block is arranged at one end of each third sectional material, and the other end of each third sectional material is movably connected with the first sectional material through a sectional material connecting hinge; and the dovetail sliding block is embedded in a dovetail groove guide rail of the width adjusting assembly.

Further, a deep groove ball bearing is embedded in the angle adjusting support block to fix the screw rod; an angle adjusting handle is arranged at the tail end of the screw rod, and the screw rod is driven by the rotation of the angle adjusting handle, so that force is transmitted to the first screw rod nut and then the guide shaft is driven to move forwards and backwards; the guide shaft is fastened to the first screw nut through a jackscrew, and the guide shaft is in clearance fit with the dovetail sliding block.

Further, the width adjusting assembly comprises two width adjusting supporting blocks which are arranged in parallel, the number of the two dovetail groove guide rails is two, the two dovetail groove guide rails are arranged on the inner sides of the width adjusting supporting blocks in parallel, two ends of the dovetail groove guide rails are sleeved on the guide rods, a double-rotation-direction screw rod is arranged in the middle of the dovetail groove guide rails, the double-rotation-direction screw rod is connected with a width adjusting hand wheel, and the double-rotation-direction screw rod is rotated through the rotation of the width adjusting hand wheel to realize synchronous widening or narrowing of the dovetail groove guide rails.

Further, a deep groove ball bearing is embedded in a middle bearing hole of the width adjusting support block to fix the double-rotation-direction screw rod, a left-rotation nut or a right-rotation nut is arranged in the dovetail groove guide rail to realize direction change, two side holes of the dovetail groove guide rail are arranged on a guide rod through oil-free bushings, and the guide rod is fixedly connected with the width adjusting support block through jackscrews.

Further, the dovetail groove guide rail is connected with the mounting base assembly through a profile hinge, and a notch of the dovetail groove guide rail is abutted against a dovetail sliding block in the angle adjusting assembly; a width adjusting pointer is arranged on the dovetail groove guide rail and close to the section bar hinge, and a width adjusting scale plate is correspondingly arranged on the angle adjusting supporting block of the angle adjusting component; an angle adjusting scale plate is arranged on the dovetail groove guide rail and close to the double-rotation-direction screw rod, and an angle adjusting pointer is correspondingly arranged on the third section bar of the angle adjusting assembly and close to the dovetail sliding block.

Further, the lifting assembly comprises a lifting flat plate and a lifting screw rod, wherein outer scissors fork arms and inner scissors fork arms are arranged on two sides of the lifting flat plate to form an X-shaped lifting support, the outer scissors fork arms on two sides of the lifting flat plate are connected through a driven wheel shaft, a second screw rod nut is fixedly installed on the driven wheel shaft, the lifting screw rod penetrates through the second screw rod nut, a square screw rod support is arranged at one end of the lifting screw rod, and a square flange screw rod support and a lifting adjusting hand wheel are arranged at the other end of the lifting screw rod.

Further, the transportation assembly comprises a machine body welding frame and a push-pull handrail, and four universal casters are arranged on the machine body welding frame.

Compared with the prior art, the invention has the following beneficial effects: the auxiliary tool for disassembling and assembling the evaporation source can realize integral adjustment of the angle width, has a compact structure, and is flexible and labor-saving to apply; the operation is simple, and the installation is convenient and quick; the lifting, tilting angle and width size are adjusted by adopting the screw rod, so that the evaporation source is compatible with the installation of evaporation sources of various types and the assembly precision is improved; the labor cost and the structural cost are reduced; the original evaporation source is installed by 4 persons in a cooperative way, and can be completed by only 2 persons at present; at least 3 tools are required to meet the requirements for the original installation of different evaporation sources, and only one tool is required to be completed by adjusting the width and the inclination angle of the installation base assembly.

Drawings

FIG. 1 is a schematic diagram of an auxiliary tool for disassembling and assembling an evaporation source;

FIG. 2 is a schematic view of an angle width integrated installation adjusting assembly of the auxiliary tool of the invention;

FIG. 3 is a schematic view of a mounting base assembly of the auxiliary tool of the present invention;

FIG. 4 is a schematic view of an angle adjusting assembly of the auxiliary tool of the present invention;

FIG. 5 is a schematic view of a width adjusting assembly of the auxiliary tool of the present invention;

FIG. 6 is a schematic view of a lifting assembly of the auxiliary tool of the present invention;

fig. 7 is a schematic structural diagram of a transportation assembly of the auxiliary tool of the present invention.

Marked in the figure as:

1. A mounting base assembly; 2. an angle adjustment assembly; 3. a width adjustment assembly; 4. a lifting assembly; 5. a transport assembly; 6. an evaporation source; 101. supporting the bending plate; 102. a first profile; 103. the section bar is connected with a hinge; 104. a support backing plate; 105. a second profile; 201. a width adjustment scale plate; 202. an angle adjusting support block; 203. deep groove ball bearings; 204. a third section bar; 205. a guide shaft; 206. dovetail slide blocks; 207. a first lead screw nut; 208. an angle adjusting pointer; 209. a screw rod; 210. an angle adjusting handle; 301. a width adjustment support block; 302. a guide rod; 303. a width adjustment pointer; 304. a left-handed nut; 305. an angle adjusting scale plate; 306. a right-handed nut; 307. an oilless bushing; 308. dovetail groove guide rails; 309. a double-flighted screw; 310. a width adjusting hand wheel; 401. lifting a flat plate; 402. an outer scissor fork arm; 403. a shaft end cover; 404. a scissors fork shaft; 405. inner scissor fork arms; 406. a second lead screw nut; 407. driven wheel axle; 408. a roller; 409. lifting the screw rod; 410. square flange screw rod support; 411. lifting and lowering the adjusting hand wheel; 412. a fixed shaft; 413. a bearing seat locking plate; 414. square screw rod support; 415. a bearing seat; 416. a scissor fork upper shaft; 501. universal castor; 502. a machine body welding frame; 503. push-pull armrests.

Detailed Description

The invention is further described below with reference to the drawings and examples.

FIG. 1 is a schematic diagram of an auxiliary tool for disassembling and assembling an evaporation source; fig. 2 is a schematic view of an angle-width integrated installation adjusting assembly of the auxiliary tool.

Referring to fig. 1 and 2, the auxiliary tool for dismounting an evaporation source provided by the invention comprises a mounting base assembly 1, an angle adjusting assembly 2, a width adjusting assembly 3, a lifting assembly 4 and a transportation assembly 5; referring to fig. 3 in combination, the mounting base assembly 1 is used for placing and supporting the evaporation source 6, and includes two first profiles 102 arranged in parallel along a first direction and two second profiles 105 arranged in parallel along a second direction, wherein each first profile 102 is connected with one second profile 105, and support pads 104 are arranged on the two second profiles 105; one end of each first section bar 102 is connected with a supporting bending plate 101, the other end of each first section bar 102 is movably connected with a width adjusting assembly 3, and the distance between the two first section bars 102 is adjusted through the width adjusting assembly 3; the middle of the first profile 102 is connected with the angle adjusting assembly 2, so that the mounting base assembly 1 can rotate around the width adjusting assembly 3, and the mounting base assembly 1, the angle adjusting assembly 2 and the width adjusting assembly 3 are fixed on the conveying assembly 5 through the lifting assembly 4.

With continued reference to fig. 3, the mounting base assembly 1 of the present invention is composed of a supporting bending plate 101, two parallel first profiles 102, a profile connecting hinge 103, a supporting pad 104, two parallel second profiles 105 and a plurality of fasteners, and mainly plays a role in placing and supporting the evaporation source 6; the supporting bending plate 101 mainly plays a role in supporting the radial direction of the evaporation source 6, is positioned at the end part of the first section bar 102, can be adjusted and installed on the first section bar 102 according to different lengths of the evaporation source 6, has certain compatibility, and the section bar connecting hinge 103 is respectively connected with the angle adjusting assembly 2 and the width adjusting assembly 3, so that flexible adjustment of the angle and the width direction is ensured, and the supporting base plate 104 mainly supports the axial direction of the evaporation source 6; the first direction and the second direction are perpendicular, i.e. the two first profiles 102 and the two second profiles 105 are connected at substantially right angles; the support base plate 104 is fixedly arranged on the two second sectional materials 105, one side of the support base plate 104 is provided with a long waist hole, relative displacement sliding during width adjustment is guaranteed, and corresponding fasteners are locked after the width is determined to guarantee stability of the whole module.

With continued reference to fig. 4, the angle adjusting assembly 2 of the present invention is composed of a width adjusting scale 201, an angle adjusting supporting block 202, a deep groove ball bearing 203, a third section 204, a guiding shaft 205, a dovetail sliding block 206, a first screw nut 207, an angle adjusting pointer 208, a screw 209, an angle adjusting handle 210 and a plurality of fasteners, and mainly plays a role in adjusting a source installation angle. The width adjustment scale plate 201 is fixed on the angle adjustment support blocks 202, the two angle adjustment support blocks 202 play a role in supporting the whole screw rod 209, and deep groove ball bearings 203 are embedded in each of the two angle adjustment support blocks to fix the screw rod 209, so that the stability of screw rod transmission is ensured; in order to facilitate the installation of the angle adjusting handle 210 at the adjusting end, the angle adjusting handle 210 rotates to drive the screw rod 209, the force is transmitted to the first screw nut 207 to give forward or backward motion, the guide shaft 205 is driven to move forwards and backwards, the guide shaft 205 is fastened to the first screw nut 207 by jackscrews, the left and right movement of the guide shaft 205 is prevented, the force is continuously transmitted to the dovetail slide block 206, the guide shaft 205 and the dovetail slide block 206 are in clearance fit, and the free rotation or axial movement can be realized, so that the relative movement of the front, the rear and the left and right is satisfied. The dovetail sliding block 206 is embedded in the dovetail groove guide rail 308 of the width adjusting component 3, the section bar connecting hinge 103 is also fixed on the dovetail sliding block 206, a section of the third section bar 204 is connected in the middle, the force is finally transmitted to the installation base component 1 by the section bar connecting hinge 103, the pair of section bar connecting hinges 103 below the installation base component 1 are fixed, the adjustment of the whole structure angle is realized by changing the triangle for a section of distance change, the adjustment angle is based on the angle adjustment scale plate 305 in the width adjusting component 3 as a reference, and for conveniently checking the numerical value, the angle adjustment pointer 208 is correspondingly arranged on the third section bar 204 of the angle adjusting component 2, which is close to the dovetail sliding block 206.

With continued reference to fig. 5, the width adjusting assembly 3 of the present invention is composed of a width adjusting support block 301, a guide rod 302, a width adjusting pointer 303, a left-hand nut 304, an angle adjusting scale plate 305, a right-hand nut 306, an oilless bushing 307, a dovetail groove guide rail 308, a double-turning screw 309, a width adjusting hand wheel 310 and a plurality of fasteners, and mainly plays a role in installation, fixation, support and adjustment of evaporation sources with different diameters; the assembly is mainly supported by two width adjustment supporting blocks 301 to support the whole adjustment assembly, two deep groove ball bearings are embedded in middle bearing holes of the width adjustment supporting blocks 301 to fix double-rotation screws 309, the double-rotation screws 309 are rotated through rotation of a width adjustment hand wheel 310 to realize synchronous widening or narrowing of a dovetail groove guide rail 308, the realization of direction change is realized by applying left-rotation nuts 304 and right-rotation nuts 306 installed in the dovetail groove guide rail 308, guide rods 302 are additionally installed on two sides of the precision of the stability and the movement of the structure, two side holes of the dovetail groove guide rail 308 are installed on the guide rods 302, oil-free bushings 307 are installed in the two side holes of the dovetail groove guide rail 308, and the guide rods 302 are fixedly connected with the width adjustment supporting blocks 301 by jackscrews after the positioning, so that the parts need to frequently reciprocate, the abrasion between the guide rods and the guide rails is serious, and the adjustment precision is reduced; the notch of the dovetail guide rail 308 is abutted against two dovetail sliding blocks 206 in the angle adjusting assembly 2; the section bar hinge 103 is connected to the dovetail groove guide rail 308, the other end of the dovetail groove guide rail 308 is fixed on the section bar connecting hinge 103 connected with the lower part of the mounting base assembly 1 for linkage adjustment to realize switching mounting of evaporation sources with different diameters, the adjustment width is based on the width adjustment scale plate 201 in the angle adjustment assembly 2 as a reference, and for convenient checking of numerical values, a width adjustment pointer 303 is correspondingly arranged on the dovetail groove guide rail 308 close to the section bar hinge 103.

Because the working condition is special, the reserved space in the height direction of the whole auxiliary tool trolley is relatively limited after the whole auxiliary tool trolley is lowered to the lowest point, the invention further designs non-calibrated parts such as the dovetail sliding block 206, the dovetail groove guide rail 308, the first screw nut 207 and the like, the integral adjustment of the angle width is realized, the structure is compact, and the problems that the space in the height direction is narrow and the multi-angle precise installation is difficult are effectively solved.

With continued reference to fig. 6, the lifting assembly 4 of the present invention is composed of a lifting flat plate 401, an outer scissor fork arm 402, a shaft end cover 403, a scissor fork shaft 404, an inner scissor fork arm 405, a second screw nut 406, a driven wheel shaft 407, a roller 408, a lifting screw 409, a square flange screw support 410, a lifting adjusting hand wheel 411, a fixed shaft 412, a bearing seat locking plate 413, a square screw support 414, a bearing seat 415, a scissor fork upper shaft 416 and a plurality of fasteners, and mainly plays a role in installation and moving safety and flexible avoidance, so as to ensure that an evaporation source is smoothly installed in a source hole; the structure realizes the lifting of the lifting flat plate 401 by the principle of an outer scissors fork arm 402, an inner scissors fork arm 405, a middle scissors fork shaft 404 and a shaft end cover 403, two inner scissors fork arms 405 at one side of the lower end are fixed with a fixed shaft 412, the two ends of the fixed shaft 412 are supported by bearing blocks 415 at the two sides to realize the rotation function, and the bearing blocks 415 are locked on a machine body welding frame 502 in a transportation assembly 5 by a plurality of fasteners and bearing block locking plates 413; the two ends of the upper shaft 416 of the scissors fork are supported by bearing blocks 415 at two sides to realize the rotation function, the bearing blocks 415 are locked on the lifting flat plate 401 by a plurality of fasteners and bearing block locking plates 413, and the driving force is transmitted to the second screw nut 406 by the lifting screw rod 409 to drive the driven wheel shaft 407 to drive the outer scissors fork arms 402 with bearings at two sides and one ends. In order to ensure the stability of the left and right movement, the rollers 408 with bearings are additionally arranged on the two sides, and the rollers 408 can be stably arranged in the guide rail grooves on the machine body welding frame 502 in the transport assembly 5; lifting screw 409 is fixed between square flange screw support 410 and square screw support 414, both of which are locked to body weld holder 502 in transport assembly 5. The square screw rod support 414 is a support seat provided with two bearings, one end of the square screw rod support is fixed by a locking nut, and the square screw rod support can also be called as one end of a screw rod fixing side, so that the screw rod cannot move back and forth after use; if only one bearing is arranged on the supporting side, the bearing is fixed by a clamping ring, and a certain range of bouncing is possible to meet the requirement, so a square screw rod support 414 is adopted; the square flange screw mount 410 is a mount composed of a single bearing, and mainly plays a supporting role. In order to facilitate the adjustment of the lifting screw 409, one end is provided with a lifting adjusting hand wheel 411, and the moving side of the lifting upper end is similar to the moving side of the lower end, but screw adjusting mechanisms are omitted; the lift plate 401 is provided with mounting holes associated with the angle adjustment assembly 2 and the width adjustment assembly 3.

Referring to fig. 7, the transporting assembly 5 of the present invention is composed of universal casters 501, a body welding frame 502, push-pull handrails 503 and a plurality of fasteners, wherein the universal casters 501 are provided with four, are installed at the bottom of the body welding frame 502, and mainly play roles in transporting evaporation sources and universal adjustment, and bear the whole set of tools; the matched push-pull handrail 503 is convenient for manual operation.

In summary, the auxiliary tool for disassembling and assembling the evaporation source provided by the invention has the following advantages:

1. The original fixed angle installation and decoration is changed into flexible installation with adjustable angles, so that the alignment installation of various angles is realized, an angle adjustment pointer and an angle adjustment scale plate are installed, the angle adjustment can be completed by rotating a hand wheel, and the labor is saved and the operation is easy;

2. The width adjusting mechanism realizes the installation of evaporation sources with different diameters, the size adjustment of the bracket in the width direction is completed through a manual adjusting hand wheel, and a width adjusting pointer and a width adjusting scale plate are installed, so that the evaporation source is placed more stably;

3. The screw rod is adjusted to lift, so that the installation safety and the installation and adjustment accuracy are ensured; the screw rod is adopted to adjust to replace a common hydraulic trolley, so that the defects of shaking impact, unstable pressure release and the like of the hydraulic trolley are avoided; in addition, the problem that the lifting distance is difficult to control can be well solved by adopting the screw rod structure.

4. The dovetail sliding block and the dovetail groove guide rail are matched to realize integral angle width adjustment, so that the angle width adjusting device is compact in structure, and the problem that the angle width adjusting device is difficult to accurately mount in place in a narrow space in the height direction is effectively solved.

5. The universal wheel is changed from a common group of orientation and a group of universal upgrade to the current 2 groups, so that free adjustment in any direction is realized.

While the invention has been described with reference to the preferred embodiments, it is not intended to limit the invention thereto, and it is to be understood that other modifications and improvements may be made by those skilled in the art without departing from the spirit and scope of the invention, which is therefore defined by the appended claims.

Claims (9)

1. An auxiliary tool for disassembling and assembling an evaporation source is characterized by comprising a mounting base assembly (1), an angle adjusting assembly (2), a width adjusting assembly (3), a lifting assembly (4) and a conveying assembly (5); the mounting base assembly (1) comprises two first sectional materials (102) which are arranged in parallel along a first direction and two second sectional materials (105) which are arranged in parallel along a second direction, each first sectional material (102) is connected with one second sectional material (105), and a supporting base plate (104) is arranged on each second sectional material (105); one end of each first section bar (102) is connected with a supporting bending plate (101), the other end of each first section bar is movably connected with a width adjusting assembly (3), and the distance between the two first section bars (102) is adjusted through the width adjusting assembly (3); the middle of the first section bar (102) is connected with the angle adjusting component (2) so that the installation base component (1) can rotate around the width adjusting component (3), and the installation base component (1), the angle adjusting component (2) and the width adjusting component (3) are fixed on the conveying component (5) through the lifting component (4);

The angle adjusting assembly (2) comprises two angle adjusting supporting blocks (202) which are arranged in parallel, a screw rod (209) is arranged between the two angle adjusting supporting blocks (202), a first screw rod nut (207) is arranged on the screw rod (209), a guide shaft (205) is further arranged on the first screw rod nut (207), the guide shaft (205) is vertically arranged with the screw rod (209), third sectional materials (204) are arranged at two ends of the guide shaft (205), a dovetail sliding block (206) is arranged at one end of each third sectional material (204), and the other end of each third sectional material is movably connected with the first sectional material (102) through a sectional material connecting hinge (103); the dovetail sliding block (206) is embedded in a dovetail groove guide rail (308) of the width adjusting component (3).

2. The auxiliary fixture for dismounting and mounting an evaporation source according to claim 1, wherein the first section bars (102) are respectively connected with the angle adjusting assembly (2) and the width adjusting assembly (3) through section bar connecting hinges (103), one side of the supporting pad (104) is provided with a long waist hole, and the length of the long waist hole is the width adjusting distance between the two first section bars (102).

3. The auxiliary tool for dismounting and mounting an evaporation source according to claim 1, wherein the supporting bending plate (101) is detachably arranged at the end part of the first section bar (102) and can be slidably adjusted along the first section bar (102).

4. The auxiliary tool for dismounting and mounting the evaporation source according to claim 1, wherein the angle adjusting support block (202) is embedded with a deep groove ball bearing (203) for fixing a screw rod (209); an angle adjusting handle (210) is arranged at the tail end of the screw rod (209), the screw rod (209) is driven by the rotation of the angle adjusting handle (210), and force is transmitted to a first screw rod nut (207) to drive a guide shaft (205) to move forwards and backwards; the guide shaft (205) is fastened to the first screw nut (207) through a jackscrew, and a clearance fit is formed between the guide shaft (205) and the dovetail sliding block (206).

5. The auxiliary fixture for disassembling and assembling an evaporation source according to claim 1, wherein the width adjusting assembly (3) comprises two width adjusting supporting blocks (301) which are arranged in parallel, the number of the dovetail groove guide rails (308) is two, the two dovetail groove guide rails (308) are arranged on the inner sides of the width adjusting supporting blocks (301) in parallel, two ends of the dovetail groove guide rails (308) are sleeved on the guide rods (302), a double-rotation-direction screw (309) is arranged in the middle of the dovetail groove guide rails (308), the double-rotation-direction screw (309) is connected with a width adjusting hand wheel (310), and the double-rotation-direction screw (309) is rotated through rotation of the width adjusting hand wheel (310) to realize synchronous widening or narrowing of the dovetail groove guide rails (308).

6. The auxiliary fixture for dismounting and mounting an evaporation source according to claim 5, wherein a deep groove ball bearing is embedded in a bearing hole in the middle of the width adjusting support block (301) to fix the double-rotation-direction screw rod (309), a left-rotation nut (304) or a right-rotation nut (306) is mounted in the dovetail groove guide rail (308) to realize direction change, holes on two sides of the dovetail groove guide rail (308) are mounted on the guide rod (302) through oil-free bushings (307), and the guide rod (302) is fixedly connected with the width adjusting support block (301) through jackscrews.

7. The auxiliary tool for dismounting and mounting the evaporation source according to claim 5, wherein the dovetail groove guide rail (308) is connected with the mounting base assembly (1) through a profile hinge (103), and a dovetail slide block (206) in the notch butt joint angle adjusting assembly (2) of the dovetail groove guide rail (308); a width adjusting pointer (303) is arranged on the dovetail groove guide rail (308) close to the section bar hinge (103), and a width adjusting scale plate (201) is correspondingly arranged on the angle adjusting supporting block (202) of the angle adjusting component (2); an angle adjusting scale plate (305) is arranged on the dovetail groove guide rail (308) close to the double-rotation-direction screw (309), and an angle adjusting pointer (208) is correspondingly arranged on the third section bar (204) of the angle adjusting assembly (2) close to the dovetail sliding block (206).

8. The auxiliary fixture for dismounting and mounting an evaporation source according to claim 1, wherein the lifting assembly (4) comprises a lifting flat plate (401) and a lifting screw rod (409), an outer scissor fork arm (402) and an inner scissor fork arm (405) are arranged on two sides of the lifting flat plate (401) to form an X-shaped lifting support, the outer scissor fork arms (405) on two sides of the lifting flat plate (401) are connected through a driven wheel shaft (407), a second screw rod nut (406) is fixedly arranged on the driven wheel shaft (407), the lifting screw rod (409) penetrates through the second screw rod nut (406), a square screw rod support (414) is arranged at one end of the lifting screw rod (409), and a square flange screw rod support (410) and a lifting adjusting hand wheel (411) are arranged at the other end of the lifting screw rod (409).

9. The auxiliary tool for disassembling and assembling an evaporation source according to claim 1, wherein the transportation assembly (5) comprises a machine body welding frame (502) and a push-pull handrail (503), and four universal casters (501) are arranged on the machine body welding frame (502).