CN118074435A - Mover pose detection device and method for planar motor - Google Patents
Mover pose detection device and method for planar motor Download PDFInfo
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Abstract
The invention relates to the technical field of magnetic suspension planar motors, and discloses a rotor pose detection device and a pose detection method of a planar motor, wherein the rotor pose detection device comprises: a stator, a mover, an eddy current sensor array, a camera disposed above the mover, or a plurality of laser interferometers disposed around the mover; the eddy current sensor array comprises a sparse eddy current sensor array and at least one dense eddy current sensor array, the eddy current sensor array is positioned on a plane above the stator coil array, the sparse eddy current sensor array covers the whole stator coil array, and the dense sensor array covers part of the stator coil; the pitch of adjacent eddy current sensors in the dense eddy current sensor array is less than the pitch of adjacent eddy current sensors of the sparse eddy current sensor array. The mover pose detection device of the planar motor is simple in structure, convenient to use, high in communication speed, accurate in detection method and low in cost.
Description
Technical Field
The invention relates to the technical field of magnetic suspension planar motors, in particular to a rotor pose detection device and a pose detection method of a planar motor.
Background
In order to ensure the stable operation of the magnetic levitation planar motor, the position and the posture of the mover need to be measured in real time so as to adjust and control the position and the posture of the mover in time. At present, six degrees of freedom of detection of the mover are mainly realized through a camera or laser, but the defects are that: the camera is limited by communication bandwidth, the communication time of the camera is long, real-time performance cannot be achieved, and the requirement of rapidly monitoring the position and the pose of the rotor in real time is difficult to meet; the laser interferometer has high price, high requirement on environment and high requirement on installation precision, and is too high in cost for real-time monitoring.
Thus, the prior art is still to be further developed.
Disclosure of Invention
Aiming at the technical problems, the invention provides a mover pose detection device and a pose detection method of a planar motor, wherein the pose detection method has the advantages of high communication speed, high data acquisition precision and lower cost.
In order to solve the problems, the invention provides the following technical scheme:
In a first aspect, the present application provides a mover pose detection apparatus of a planar motor, including: a stator of a planar motor, an eddy current sensor array, a mover, a camera disposed above the mover, or a plurality of laser interferometers disposed around the mover; the eddy current sensor array is positioned on a plane above the stator coil array, the eddy current sensor array comprises a sparse eddy current sensor array used for collecting voltage information in the whole travel range of the rotor and at least one dense eddy current sensor array used for collecting accurate voltage information at a local position, the sparse eddy current sensor array covers the whole stator coil array, and the dense eddy current sensor array covers the local part of the stator coil array; the pitch of adjacent eddy current sensors in the dense eddy current sensor array is less than the pitch of adjacent eddy current sensors of the sparse eddy current sensor array.
Optionally, in the mover pose detection device of the planar motor, the number of the dense eddy current sensor arrays is one, the positions of the dense eddy current sensor arrays correspond to the positions near the center or the middle of the stator coil array, and the dense eddy current sensor arrays are located in an overlapping area where all motion tracks in the mover working process are projected on the stator.
Optionally, in the mover pose detection device of the planar motor, the number of the dense eddy current sensor arrays is more than 2, and positions of the dense eddy current sensor arrays are set to ensure that at least one dense eddy current sensor array always covers the mover in motion.
Optionally, in the mover pose detection device of the planar motor, the dense vortex sensor array is at least composed of 3 rows and 3 columns of vortex sensors.
Optionally, in the mover pose detection device of the planar motor, one or more cameras are perpendicular to the stator plane, and the distance between the camera and the stator plane is set to realize clear shooting of the whole process movement stroke of the mover in the field of view of the camera.
Optionally, in the mover pose detection device of the planar motor, the setting of the laser interferometer is as follows: the laser emitted by each laser interferometer is respectively emitted to each surface of the mover at angles parallel to X, Y and the Z axis of the mover.
In a second aspect, the present application further provides a method for detecting a rotor pose of a planar motor, using the aforementioned apparatus for detecting a rotor pose of a planar motor, the method comprising the steps of:
S1, acquiring six-degree-of-freedom pose of a rotor through a camera or a laser interferometer, wherein the pose is marked as P; simultaneously acquiring voltage information W of a dense sensor and voltage information V of a sparse sensor under the pose;
Step S2, acquiring pose P of a rotor at a plurality of different positions and poses, voltage information W of a dense sensor and voltage information V of a sparse sensor according to the step S1;
S3, taking the collected multiple pieces of sub pose data { P 1, P2, P3…Pn } as labels, taking voltage information { W 1, W2, W3…Wn } of a dense sensor and voltage information { V 1, V2, V3…Vn } of a sparse sensor under corresponding poses as data, and performing model training according to the data to obtain a trained deep learning model;
And S4, inputting the voltage information W t of the dense sensor and the voltage information V t of the sparse sensor in a certain unknown pose state of the mover into the deep learning model obtained in the previous step to obtain the six-degree-of-freedom pose P t of the mover in the state.
Optionally, in the method for detecting a rotor pose of a planar motor, the voltage information W of the dense sensor is a voltage set { U 1, U2, U3, U4…Un } of each sensor in each dense eddy current sensor array; the voltage information V of the sparse sensors is the voltage set { u 1, u2, u3…un } of each sensor in each sparse eddy current sensor array.
Optionally, in the method for detecting the pose of the mover of the planar motor, in step S1, the method for obtaining the pose of the mover with six degrees of freedom according to the image acquired by the camera includes: at least 3 simple marking points are arranged on the mover, the physical distance between the marking points on the same plane is known, and after the camera shoots, the six-degree-of-freedom pose of the mover is obtained by using a p3p algorithm.
Optionally, in the method for detecting the pose of the mover of the planar motor, in step S1, the method for obtaining the pose of the mover with six degrees of freedom according to the data acquired by the laser interferometer includes: and arranging a plurality of laser interferometers, and enabling laser emitted by each laser interferometer to be parallel to X, Y and Z axes of the mover to emit to each surface of the mover, so as to obtain six-degree-of-freedom pose information of the mover.
The mover pose detection device and the pose detection method of the planar motor have the following beneficial effects:
1. the mover pose detection device of the planar motor is simple in structure, convenient to use and low in cost. The method for detecting the position and the pose of the rotor of the planar motor is high in communication speed, does not depend on a camera or a laser interferometer after modeling is completed, can calculate and obtain the precise six-degree-of-freedom position and pose of the rotor at a certain moment only through the information W t of the dense sensor and the information V t of the sparse sensor, and is precise in detection method and remarkably reduced in cost.
2. The detection precision of the planar motor rotor pose detection method is high, and the position precision of the rotor pose detection method of a model trained by a laser interferometer is 1% different by taking the laser interferometer as a standard; the position accuracy of the mover pose detection method adopting the camera training model is 3 percent different.
Drawings
Fig. 1 is a schematic perspective view of a mover posture detecting device of a planar motor of embodiment 1; the structure of the mover is omitted in the drawing;
Fig. 2 is a schematic side view of the mover posture detecting device of the embodiment 1;
FIG. 3 is a schematic layout of the coil array and the sparse and dense two eddy current sensor arrays of example 1;
Fig. 4 is a schematic perspective view of a mover posture detecting device of a planar motor of embodiment 2;
FIG. 5 is a schematic diagram of training a planar motor rotor pose deep learning model;
Fig. 6 is a schematic diagram of a test principle of a planar motor rotor pose deep learning model.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to fall within the scope of the invention. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and/or" as used in this specification includes any and all combinations of one or more of the associated listed items. In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Example 1
Because the communication time of the current camera is long, the method for acquiring the pose of the plane motor in a visual mode is slow and is difficult to meet the real-time performance; however, although the communication time of the eddy current sensor is short, the eddy current sensor cannot be directly converted into the six-degree-of-freedom position information of the mover because only the voltage information is output.
Aiming at the problems, the embodiment provides a mover pose detection device of a planar motor, which uses information collected by a camera as calibration, and voltage information of a corresponding vortex sensor array exists in each pose state of the mover, so that the voltage information is collected, based on a large amount of data, deep learning is adopted to perform data training, a built deep learning model is obtained, and the six-degree-of-freedom pose information of the mover is obtained rapidly and accurately by inputting the voltage information of the vortex sensor array at a certain moment into the model.
Specifically, as shown in fig. 1-2, the embodiment provides a mover pose detection device of a planar motor, which includes: a stator 1 of a planar motor, a rotor 2 of the planar motor above the stator, an eddy current sensor array 3 and a camera 4 arranged above the rotor. The camera is used for collecting pose information of the mover.
In this embodiment, the camera is one, perpendicular to the stator plane, and the distance between the camera and the stator plane is set to ensure that the whole process movement stroke of the mover is clearly shot in the field of view of the camera.
The magnet array on the planar motor rotor is positioned on a first plane, and the coil array on the planar motor stator is arranged on a second plane parallel to the first plane; the plane of the eddy current sensor array is parallel to the first plane or the second plane and is arranged near the second plane. In this embodiment, the eddy current sensor array is fixed on a circuit board.
In this embodiment, the sparse eddy current sensor array and the dense eddy current sensor array are located in the same plane for simplicity of construction and space saving. In other embodiments, the sparse and dense eddy current sensor arrays may be disposed in two similar horizontal planes, respectively, to avoid positional interference.
Wherein the eddy current sensor array comprises at least one sparse eddy current sensor array 31 for collecting voltage information over a full range of travel and at least one dense eddy current sensor array 32 for collecting accurate voltage information at a local location.
The eddy current sensor array 3 is located in a plane above the stator coil array. The sparse eddy current sensor array covers the entire stator coil array 11 for more comprehensive collection of voltage information over the full range of travel of the mover. The dense sensor array covers a part of the stator coil and is used for collecting local accurate voltage information; the pitch of adjacent eddy current sensors in the dense eddy current sensor array is less than the pitch of adjacent eddy current sensors of the sparse eddy current sensor array.
In this embodiment, as shown in fig. 3, the eddy current sensors in the sparse eddy current sensor array are uniformly distributed in the coil array, corresponding to the center of the coil and the middle of the gap between each adjacent coil. In this embodiment, the number of the dense eddy current sensor arrays is one, and the dense eddy current sensor arrays are located in an overlapping area where all motion tracks of the mover in the working process are projected on the stator, that is, an area where the mover can repeatedly pass through in different motion states, so as to ensure that the dense eddy current sensor arrays can always collect local accurate voltage information when the mover is in different motion tracks. Optionally, the position of the dense eddy current sensor array corresponds to a position near a center or middle of the stator coil array.
In other embodiments, the number of dense eddy current sensor arrays is more than 2, each dense eddy current sensor array being positioned to ensure that at least one dense eddy current sensor array always covers the mover in motion.
The above arrangement ensures that the mover moving on the stator is always within the detection range of the at least one dense eddy current sensor array during movement.
Because the coverage range of the sparse vortex sensor array is wide, the acquired voltage precision is not high enough; while the tightly arranged vortex sensor array can acquire accurate position information, too dense sensors can lead to long acquisition time, high cost and difficult large-area application. The application combines the two arrays, ensures the rapid acquisition within the whole travel range of the rotor through the sparse sensor array covering the whole stator coil array, and ensures the accuracy of voltage information within the action range of the rotor through the dense eddy current sensor array which can be always distributed within the action track range of the rotor.
In this embodiment, the dense eddy current sensor array is comprised of at least 3 rows and 3 columns of eddy current sensors.
The embodiment also provides a mover pose detection method based on the detection device, which uses the mover pose detection device of the planar motor of the embodiment, and the mover pose detection method comprises the following steps:
Step S1, acquiring an image acquired by a camera aiming at a rotor, and further processing to obtain a six-degree-of-freedom pose of the rotor, wherein the pose is marked as P; and meanwhile, acquiring voltage information W of the dense vortex sensor and voltage information V of the sparse vortex sensor under the pose.
In this embodiment, the camera photographs the stator plane vertically, and the distance is set to ensure that the whole process of moving the mover can be photographed within the field of view of the camera. The number of cameras is at least one, and based on the expansion of the radiation area, a proper amount of cameras can be additionally arranged.
In this embodiment, the method for obtaining the six-degree-of-freedom pose of the mover according to the image acquired by the camera includes: a p3p algorithm is employed. The method specifically comprises the following steps: at least 3 simple marking points are made on the mover, the physical distance between the marking points on the same plane is known, and after the camera shoots, the six-degree-of-freedom pose of the mover can be obtained by using a p3p algorithm.
The voltage information W of the dense vortex sensor is a voltage set { U 1, U2, U3, U4…Un } of each sensor in the dense vortex sensor array; the voltage information V of the sparse eddy current sensor is the voltage set { u 1, u2, u3…un } of each sensor in the sparse eddy current sensor array.
And S2, acquiring the pose P of the rotor at a plurality of different positions and poses, the voltage information W of the dense vortex sensor and the voltage information V of the sparse vortex sensor according to the method of the step S1.
And S3, adopting a deep learning algorithm, taking the collected multiple pieces of sub pose data { P 1, P2, P3…Pn } as labels, taking voltage information { W 1, W2, W3…Wn } of the dense vortex sensor and voltage information { V 1, V2, V3…Vn } of the sparse vortex sensor under the corresponding poses as data, and carrying out model training according to the data to obtain a trained deep learning model 1. As shown in fig. 5.
The deep learning algorithm adopts the existing Convolutional Neural Network (CNN), and other existing deep learning algorithms, such as long-term short-term memory network (LSTM), cyclic neural network (RNN) and the like, can be adopted in other embodiments. This is prior art and is therefore not described in detail.
And S4, inputting the information W t of the dense vortex sensor and the information V t of the sparse vortex sensor in a certain unknown pose state of the mover into the deep learning model 1 obtained in the previous step to obtain the six-degree-of-freedom pose P t of the mover at the moment. As shown in fig. 6.
Through a stepping test, the position accuracy of the mover pose detection method of the camera-trained model in the embodiment is 3% different by taking a real-time laser interferometer as a standard (a traditional method).
Example 2
As shown in fig. 4, the present embodiment provides a mover pose detection device of a planar motor, which is different from embodiment 1 mainly in that: the camera is replaced by a laser interferometer 5 for acquiring pose information of the mover.
The number of the laser interferometers 5 is set to be multiple, and laser emitted by each laser interferometer is parallel to X, Y and Z axis of the mover and is emitted to each surface of the mover respectively, so that six-degree-of-freedom pose information of the mover is obtained.
Specifically, in this embodiment, at least three first laser interferometers are disposed above the top surface of the mover, and the connection line of the laser points of the first laser interferometers that reach the top surface of the mover is triangular, so as to determine the pitch angle, the roll angle and the center Z-axis position of the mover; two second laser interferometers are correspondingly arranged on one side face of the rotor, and at least one third laser interferometer is arranged on the other adjacent side face of the rotor and used for measuring the position of the central X axis of the rotor, the position of the central Y axis of the rotor and the yaw angle; and acquiring six-degree-of-freedom pose of the rotor through data acquired by the plurality of laser interferometers. The arrangement of the laser interferometer is not limited to the arrangement of fig. 4.
The embodiment also provides a corresponding rotor pose detection method of the planar motor, which comprises the following steps:
S1, acquiring six-degree-of-freedom pose of a mover measured by a laser interferometer, wherein the pose is marked as P; and meanwhile, acquiring voltage information W of the dense vortex sensor and voltage information V of the sparse vortex sensor under the pose.
In this embodiment, the method for obtaining the six-degree-of-freedom pose of the mover from the data collected by the laser includes: corresponding laser interferometers are arranged along each axis of the mover. When the interferometer works, after each laser interferometer emits laser to each surface of the mover at different angles, the position and the angle of the mover can be finally obtained, and therefore the pose of the mover is obtained.
The voltage information W of the dense vortex sensor is a voltage set { U 1, U2, U3, U4…Un } of each sensor in the dense vortex sensor array; the voltage information V of the sparse eddy current sensor is the voltage set { u 1, u2, u3…un } of each sensor in the sparse eddy current sensor array.
And S2, acquiring the pose P of the rotor at a plurality of different positions and poses, the voltage information W of the dense vortex sensor and the voltage information V of the sparse vortex sensor according to the method of the step S1.
And S3, adopting a deep learning algorithm, taking the collected multiple pieces of sub pose data { P 1, P2, P3…Pn } as labels, taking voltage information { W 1, W2, W3…Wn } of the dense vortex sensor and voltage information { V 1, V2, V3…Vn } of the sparse vortex sensor under the corresponding poses as data, and carrying out model training according to the data to obtain a trained deep learning model 2.
The deep learning algorithm adopts a Convolutional Neural Network (CNN), other existing deep learning algorithms such as a long-term short-term memory network (LSTM), a cyclic neural network (RNN) and the like can be adopted in other embodiments.
And S4, inputting the information W t of the dense vortex sensor and the information V t of the sparse vortex sensor in a certain unknown pose state of the mover into the deep learning model 2 obtained in the previous step to obtain the six-degree-of-freedom pose P t of the mover at the moment.
Through step test, with a laser interferometer as a standard, the position accuracy of the mover pose detection method of the model trained by the laser interferometer in the embodiment is 1% different.
The mover pose detection method of the planar motor is simple to use, low in environmental and equipment requirements, fast in communication speed and high in detection result accuracy, and after a deep learning model is built through S1-S3, accurate six-degree-of-freedom poses of the mover at the moment can be calculated through information W t of a dense sensor and information V t of a sparse sensor without relying on a camera or a laser interferometer.
It will be understood that equivalents and modifications will occur to those skilled in the art in light of the present teachings and concepts, and all such modifications and substitutions are intended to be included within the scope of the present invention as defined in the accompanying claims.
Claims (10)
1. The utility model provides a rotor position appearance detection device of planar motor which characterized in that includes: a stator (1) of a planar motor, an eddy current sensor array (3), a mover (2), a camera (4) arranged above the mover or a plurality of laser interferometers (5) arranged around the mover; wherein the eddy current sensor array (3) is located in a plane above the stator coil array, the eddy current sensor array (3) comprises a sparse eddy current sensor array (31) for collecting voltage information in the full travel range of the mover and at least one dense eddy current sensor array (32) for collecting accurate voltage information at a local position, the sparse eddy current sensor array covers the entire stator coil array (11), the dense eddy current sensor array covers a part of the stator coil array; the pitch of adjacent eddy current sensors in the dense eddy current sensor array is less than the pitch of adjacent eddy current sensors of the sparse eddy current sensor array.
2. The mover pose detection device of a planar motor according to claim 1, characterized in that the number of dense eddy current sensor arrays (32) is one, the positions of the dense eddy current sensor arrays (32) correspond to the positions near the center or middle of the stator coil array, and the dense eddy current sensor arrays are located in the overlapping area where all motion trajectories during the mover operation are projected on the stator.
3. The mover pose detection device of a planar motor according to claim 1, characterized in that the number of dense eddy current sensor arrays (32) is more than 2, each dense eddy current sensor array being positioned to ensure that at least one dense eddy current sensor array always covers the mover (2) in motion.
4. A mover pose detection device of a planar motor according to any of claims 1-3, characterized in that said dense vortex sensor array is composed of at least 3 rows and 3 columns of vortex sensors.
5. The mover pose detection device of a planar motor according to claim 4, wherein the camera is one or more, perpendicular to the stator plane, and the distance between the camera and the stator plane is set as follows: the whole process movement stroke of the mover can be clearly shot in the field of view of the camera.
6. The mover pose detection device of a planar motor according to claim 4, wherein the arrangement of the laser interferometer is: the laser emitted by each laser interferometer is respectively emitted to each surface of the mover at angles parallel to X, Y and the Z axis of the mover.
7. A mover pose detection method of a planar motor, characterized in that the mover pose detection device of a planar motor according to claim 1 is used, the mover pose detection method comprising the steps of:
S1, acquiring six-degree-of-freedom pose of a rotor through a camera or a laser interferometer, wherein the pose is marked as P; meanwhile, acquiring voltage information W of a dense vortex sensor and voltage information V of a sparse vortex sensor under the pose;
step S2, acquiring pose P of the rotor at a plurality of different positions and poses, voltage information W of a dense vortex sensor and voltage information V of a sparse vortex sensor according to the method of the step S1;
S3, taking the collected multiple pieces of mover pose data { P 1, P2, P3…Pn } as labels, taking voltage information { W 1, W2, W3…Wn } of a dense vortex sensor and voltage information { V 1, V2, V3…Vn } of a sparse vortex sensor under corresponding poses as data, and performing model training according to the data to obtain a trained deep learning model;
And S4, inputting the voltage information W t of the dense vortex sensor and the voltage information V t of the sparse vortex sensor in a certain unknown pose state of the mover into the deep learning model obtained in the previous step to obtain the six-degree-of-freedom pose P t of the mover in the state.
8. The method for detecting the mover pose of a planar motor according to claim 7, wherein the voltage information W of the dense eddy current sensor is a voltage set { U 1, U2, U3, U4…Un } of each eddy current sensor in the dense eddy current sensor array; the voltage information V of the sparse eddy current sensor is a voltage set { u 1, u2, u3…un } of each eddy current sensor in the sparse eddy current sensor array.
9. The mover pose detection method of a planar motor according to claim 8, wherein in step S1, the method for obtaining the six-degree-of-freedom pose of the mover according to the camera is as follows: at least 3 simple marking points are arranged on the mover, the physical distance between the marking points on the same plane is known, and after the camera shoots, the six-degree-of-freedom pose of the mover is obtained by using a p3p algorithm.
10. The mover pose detection method of a planar motor according to claim 8, wherein in step S1, the method for obtaining the six-degree-of-freedom pose of the mover according to the laser interferometer is as follows: and arranging a plurality of laser interferometers, and enabling laser emitted by each laser interferometer to emit to each surface of the mover at angles parallel to X, Y and a Z axis of the mover respectively to obtain six-degree-of-freedom pose information of the mover.
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| US20140204358A1 (en) * | 2013-01-23 | 2014-07-24 | Nikon Corporation | Magnetic sensor calibration and servo for planar motor stage |
| CN103543612A (en) * | 2013-09-25 | 2014-01-29 | 清华大学 | Moving-iron cableless six-degree-of-freedom magnetic levitation motion platform with vacuum cover |
| CN103546067A (en) * | 2013-09-25 | 2014-01-29 | 清华大学 | Large rotation angle long-travel maglev moving platform |
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