CN118041460A

CN118041460A - Radio frequency energy generating device and calibration method

Info

Publication number: CN118041460A
Application number: CN202211424864.7A
Authority: CN
Inventors: 彭亚辉; 沈刘娉; 马小强
Original assignee: Shanghai Microport EP MedTech Co Ltd
Current assignee: Shanghai Microport EP MedTech Co Ltd
Priority date: 2022-11-14
Filing date: 2022-11-14
Publication date: 2024-05-14

Abstract

The invention relates to a radio frequency energy generating device and a calibration method, wherein the radio frequency energy generating device comprises a radio frequency energy generating circuit, and the radio frequency energy generating circuit comprises a frequency driving circuit, a radio frequency power amplifier, a calibration circuit, an impedance detection circuit and a processing module. The radio frequency power amplifier is connected with the output end of the frequency driving circuit; the calibration circuit has a plurality of different topological circuit structure states, the standard impedance value of the calibration circuit in each topological circuit structure state is different, and the calibration circuit can be switched and connected to the output end of the radio frequency power amplifier; the impedance detection circuit is connected with the output end of the radio frequency power amplifier; the processing module is used for determining the standard impedance value of the radio frequency load according to the impedance measured by the impedance detection circuit and the calibration table when the radio frequency power amplifier is connected with the radio frequency output port in a conducting mode. The radio frequency energy generating device can realize the automatic calibration of the impedance value of the radio frequency load, and does not need to be externally connected with calibration detection equipment.

Description

Radio frequency energy generating device and calibration method

Technical Field

The invention relates to the technical field of radio frequency, in particular to a radio frequency energy generating device and a calibration method.

Background

In order to improve the radio frequency parameter detection precision of radio frequency equipment, before leaving the factory, usually need to calibrate every equipment, need the manual work to carry out wiring during the calibration to be connected calibration check out test set with waiting to calibrate equipment, the connection process is comparatively time consuming and laborious, and manual operation often can introduce extra deviation simultaneously.

In addition, after the products are marketed, special personnel are required to maintain the performance of the products, and calibration detection equipment is required to be brought to the site, so that the whole process is complex, and the operation is inconvenient.

Disclosure of Invention

Based on this, it is necessary to provide a radio frequency energy generating device and a calibration method for automatically calibrating the impedance value of a radio frequency load.

In a first aspect, the present application provides a radio frequency energy generating device comprising:

the frequency driving circuit is used for outputting a radio frequency driving signal;

the radio frequency power amplifier is connected with the output end of the frequency driving circuit;

the calibration circuit is provided with a plurality of different topological circuit structure states, the standard impedance values of the calibration circuit in each topological circuit structure state are different, and the calibration circuit can be switched and connected to the output end of the radio frequency power amplifier;

the impedance detection circuit is connected with the output end of the radio frequency power amplifier and is used for measuring the impedance of an output loop of the radio frequency power amplifier;

The processing module is respectively connected with the impedance detection circuit and the calibration circuit and is used for determining the standard impedance value of the radio frequency load according to the impedance value measured by the impedance detection circuit and a calibration table when the radio frequency power amplifier is connected with the radio frequency load in a conducting mode, wherein the calibration table comprises the standard impedance value of the calibration circuit in each topological circuit structure state and the corresponding measured impedance value.

According to the radio frequency energy generating device, when the calibration circuit is connected with the output end of the radio frequency power amplifier, the measured impedance value of the calibration circuit in the structural state of each topological circuit can be obtained based on the measurement result of the detection circuit, and the standard impedance value of the calibration circuit in the structural state of each topological circuit can be obtained in advance, so that the standard impedance value and the corresponding measured impedance value of the calibration circuit in the structural state of each topological circuit can be obtained, a calibration table is formed according to the standard impedance value and the corresponding measured impedance value of the calibration circuit in the structural state of each topological circuit, and further when the radio frequency energy generating circuit outputs radio frequency energy, namely when the radio frequency load is connected with the output end of the radio frequency power amplifier, the standard impedance value of the radio frequency load is determined according to the impedance value measured by the detection circuit and the calibration table, automatic calibration of the impedance value of the radio frequency load is realized, and no external calibration detection equipment is needed.

In one embodiment, the processing module is further configured to adjust a topology circuit structure state of the calibration circuit when the calibration circuit is connected to an output end of the radio frequency power amplifier, obtain impedance values measured by the impedance detection circuit in each topology circuit structure state, determine the measured impedance value corresponding to each topology circuit structure state according to the impedance value measured by the impedance detection circuit in each topology circuit structure state, and form the calibration table according to a standard impedance value and a corresponding impedance value of the calibration circuit in each topology circuit structure state.

In one embodiment, the processing module is further configured to perform a filtering operation when the calibration circuit is connected to the output terminal of the radio frequency power amplifier and the calibration circuit is in a predetermined topology state, where the filtering operation includes: controlling the impedance detection circuit to sample for n times, and calculating the mean square error according to the impedance value sampled by the impedance detection circuit for n times, wherein n is more than or equal to 2; and when the mean square error exceeds a preset error value, repeating the average operation, and when the repetition times reach a preset threshold value, controlling the impedance detection circuit to stop sampling and outputting preset prompt information.

In one embodiment, the processing module is further configured to obtain a sampling average value of the impedance values sampled n times by the impedance detection circuit when the mean square error is smaller than a preset error value, determine a reserved sampling impedance value according to a difference value between the impedance values sampled n times by the impedance detection circuit and the sampling average value, calculate an average value of the reserved sampling impedance values as a calibration sampling value, and use the calibration sampling value as a measured impedance value of the calibration circuit in a current topological circuit structure state.

In one embodiment, the processing module is further configured to compare the calibration sampling value with a preset reference value, and determine that the calibration sampling value is abnormal when a difference between the calibration sampling value and the preset reference value is outside a preset range.

In one embodiment, the calibration circuit comprises a plurality of calibration units connected in series, wherein the calibration units comprise a calibration resistor and a control switch, and the calibration resistor is connected in parallel with the control switch;

The processing module is also used for controlling the on-off of each control switch so as to adjust the state of the topological circuit structure where the calibration circuit is located.

In one embodiment, the calibration circuit comprises a plurality of calibration units connected in parallel, wherein the calibration units comprise a calibration resistor and a control switch, and the calibration resistor is connected in series with the control switch;

In one embodiment, the calibration circuit further comprises an over-current protection circuit connected to the calibration circuit.

In one embodiment, the frequency driving circuit includes:

A frequency generation circuit for generating a radio frequency related radio frequency signal;

The input end of the frequency dividing circuit is connected with the output end of the frequency source, and the frequency dividing circuit is used for dividing the radio frequency signal to generate a frequency dividing signal of radio frequency working frequency;

The input end of the driving circuit is connected with the output end of the frequency dividing circuit, the output end of the driving circuit is connected with the radio frequency power amplifier, and the driving circuit is used for converting the frequency dividing signals into two groups of radio frequency driving signals with complementary phases.

In one embodiment, the driving circuit comprises a pulse transformer, the pulse transformer comprises a group of primary coils and two groups of secondary coils, and the pulse transformer is used for converting the frequency division signal into two groups of radio frequency driving signals with complementary phases.

In one embodiment, the radio frequency power amplifier comprises:

The modulation end of the primary coil of the isolation transformer is used for being connected with the output end of the adjustable direct current power supply, and the first end of the secondary coil of the isolation transformer is connected with the first end of the radio frequency load;

A first capacitor, a first end of which is connected with a first end of the primary coil, and a second end of which is connected with a second end of the primary coil;

The control end of the first switching tube is connected with the first output end of the frequency driving circuit, the first end of the first switching tube is connected with the first end of the first capacitor, and the second end of the first switching tube is grounded;

the control end of the second switching tube is connected with the second output end of the frequency driving circuit, the first end of the second switching tube is connected with the second end of the first capacitor, and the second end of the second switching tube is connected with the second end of the first switching tube;

The first end of the second capacitor is connected with the first end of the first switch tube, and the second end of the second capacitor is connected with the second end of the first switch tube;

the first end of the third capacitor is connected with the first end of the second switch tube, and the second end of the third capacitor is connected with the second end of the second switch tube;

and the first end of the fourth capacitor is connected with the second end of the secondary coil, and the second end of the fourth capacitor is connected with the second end of the radio frequency load.

In one embodiment, the radio frequency power amplifier further comprises:

the first end of the fifth capacitor is connected with the output end of the adjustable direct current power supply, and the second end of the fifth capacitor is grounded;

and the first end of the inductor is connected with the first end of the fifth capacitor, and the second end of the inductor is connected with the modulation end of the primary coil of the isolation transformer.

In one embodiment, the radio frequency energy generating circuit further comprises a current detection circuit, and the current detection circuit is connected with the output end of the radio frequency power amplifier and is used for measuring the output current of the radio frequency power amplifier;

the processing module is connected with the current detection circuit, and is further used for determining radio frequency power according to a current value measured by the current detection circuit and an impedance value measured by the impedance detection circuit when the radio frequency power amplifier is connected with the radio frequency load.

In one embodiment, the current detection circuit comprises a current sensor and an isolation amplifier, wherein the current sensor is connected with the output end of the radio frequency power amplifier through the isolation amplifier, the current sensor is used for measuring the output current of the radio frequency power amplifier, and the isolation amplifier is used for isolating radio frequency current.

In a second aspect, the present application provides a method of calibrating a radio frequency energy generating device, the method comprising the steps of:

When a calibration circuit is connected with the output end of the radio frequency power amplifier, regulating the topological circuit structure state of the calibration circuit, wherein the calibration circuit has a plurality of different topological circuit structure states, the standard impedance values of the calibration circuit in the topological circuit structure states are different, and the calibration circuit can be switched and connected to the output end of the radio frequency power amplifier;

Obtaining impedance values measured by the impedance detection circuit in the state of each topological circuit structure, wherein the impedance detection circuit is connected with the output end of the radio frequency power amplifier and is used for measuring the impedance values of the output loop of the radio frequency power amplifier;

when the radio frequency power amplifier is connected with the radio frequency output port in a conducting manner, the standard impedance value of the radio frequency load is determined according to the impedance value measured by the impedance detection circuit and a calibration table, wherein the calibration table comprises the standard impedance value of the calibration circuit in each topological circuit structure state and the corresponding measured impedance value.

According to the calibration method of the radio frequency energy generating circuit, the state of the topological circuit structure where the calibration circuit is located is regulated, so that when the calibration circuit is connected with the output end of the radio frequency power amplifier, the measured impedance value of each topological circuit structure state of the calibration circuit can be obtained based on the measurement result of the detection circuit, and the standard impedance value of each topological circuit structure state of the calibration circuit can be obtained in advance, so that the standard impedance value and the corresponding impedance value of each topological circuit structure state of the calibration circuit can be obtained, a calibration table is formed according to the standard impedance value and the corresponding measured impedance value of each topological circuit structure state of the calibration circuit, and further when the radio frequency energy generating circuit outputs radio frequency energy, namely when the radio frequency load is connected with the output end of the radio frequency power amplifier, the standard impedance value of the radio frequency load is determined according to the impedance value measured by the detection circuit and the calibration table, automatic calibration of the impedance value of the radio frequency load is realized, and no external calibration detection equipment is required.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments or the conventional techniques of the present application, the drawings required for the descriptions of the embodiments or the conventional techniques will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present application, and other drawings may be obtained according to the drawings without inventive effort for those skilled in the art.

FIG. 1 is a block diagram of an RF energy generating circuit of an RF energy generating device in one embodiment;

FIG. 2 is a schematic diagram of a calibration circuit in one embodiment;

FIG. 3 is a schematic diagram of a calibration circuit according to another embodiment;

FIG. 4 is a schematic diagram of a frequency driving circuit according to an embodiment;

FIG. 5 is a schematic diagram of a circuit configuration of a RF driver amplifier according to one embodiment;

FIG. 6 is a functional block diagram of a radio frequency energy generating circuit in one embodiment;

FIG. 7 is a flow chart of a method for calibrating a radio frequency energy generating circuit according to one embodiment.

Reference numerals illustrate:

The device comprises an 11-frequency driving circuit, a 111-frequency generating circuit, a 112-frequency dividing circuit, a 113-driving circuit, a 114-driving isolation circuit, a 12-radio frequency power amplifier, a 121-radio frequency output port, a 13-radio frequency load, a 14-calibration circuit, a 141-calibration unit, a 15-impedance detection circuit, a 16-processing module, a 17-direct current adjustable power supply and an 18-current detection circuit.

Detailed Description

In order that the application may be readily understood, a more complete description of the application will be rendered by reference to the appended drawings. Embodiments of the application are illustrated in the accompanying drawings. This application may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

It will be understood that the terms first, second, etc. as used herein may be used to describe various elements, but these elements are not limited by these terms. These terms are only used to distinguish one element from another element. For example, a first capacitance may be referred to as a second capacitance, and similarly, a second capacitance may be referred to as a first capacitance, without departing from the scope of the application. Both the first capacitance and the second capacitance are capacitances, but they are not the same capacitance.

It is to be understood that in the following embodiments, "connected" is understood to mean "electrically connected", "communicatively connected", etc., if the connected circuits, modules, units, etc., have electrical or data transfer between them.

As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," and/or the like, specify the presence of stated features, integers, steps, operations, elements, components, or groups thereof, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or groups thereof.

In one embodiment, as shown in fig. 1 and 6, the rf energy generating circuit of the rf energy generating apparatus provided by the present application includes a frequency driving circuit 11, an rf power amplifier 12, a calibration circuit 14, an impedance detecting circuit 15, and a processing module 16. The frequency driving circuit 11 is configured to output a radio frequency driving signal. The radio frequency power amplifier 12 is connected to the output of the frequency drive circuit 11. The calibration circuit 14 has a plurality of different topological circuit structure states, the standard impedance value of the calibration circuit 14 in each topological circuit structure state is different, and the calibration circuit 14 can be connected to the output end of the radio frequency power amplifier 12 in a switching way. The impedance detection circuit 15 is connected to the output terminal of the rf power amplifier 12, and is used for measuring the impedance value of the output load of the rf power amplifier 12. The processing module 16 is respectively connected to the impedance detection circuit 15 and the calibration circuit 14, and is configured to determine a standard impedance value of the current rf load 13 (as shown in fig. 6) according to the impedance value measured by the impedance detection circuit 15 and a calibration table when the rf power amplifier 12 is connected to the rf output port 121 in a conductive manner, where the calibration table includes the standard impedance values of the calibration circuit 14 in the state of each topology circuit structure and the corresponding measured impedance values.

When the calibration circuit 14 is switched to be connected to the output end of the rf power amplifier 12, the output load of the power amplifier 12 is the calibration circuit 14, and the calibration circuit 14 is connected to different resistances of the calibration circuit 14 in different topological circuit structural states, so that the standard impedance values of the calibration circuit 14 in the topological circuit structural states are different. When the rf power amplifier 12 is connected to the rf output port 121 in a conductive manner, the rf power amplifier 12 is connected to the current rf load 13, the output load of the power amplifier 12 is the current rf load 13, the rf load 13 is an object of the rf energy generating circuit to output rf energy, and for example, the rf load 13 may be a human body. The calibration circuit 14 may be connected to the output terminal of the rf power amplifier 12 through a switch, and likewise, the rf output port may be connected to the output terminal of the rf power amplifier 12 through a switch, when the switch is switched to connect to the calibration circuit terminal, the calibration circuit 14 is connected to the output terminal of the rf power amplifier 12, when the switch is switched to connect to the rf output port 121, the rf load 13 is connected to the output terminal of the rf power amplifier 12, and the switch may be controlled by the processing module 16 to switch, or may be manually completed by a worker, which is not limited herein.

Specifically, when the calibration circuit 14 is connected to the output terminal of the rf power amplifier 12, the processing module 16 may control the topology state of the calibration circuit 14, and the impedance detecting circuit 15 may measure the impedance value of the calibration circuit 14 in different topology states, and since the standard impedance value of the calibration circuit 14 in different topology states may be known in advance, the processing module 16 may form the calibration table according to the standard impedance value of the calibration circuit 14 in different topology states and the corresponding measured impedance value. When calibrating the impedance value of the rf load 13, the rf output loop 121 is connected to the output end of the rf power amplifier 12, and the processing module 16 may obtain the impedance value Dx measured by the impedance detection circuit 15, look up Dx in the calibration table, and calculate the standard impedance value of the rf load 13 according to the table look-up and linear interpolation.

For example, when Dx is between Dm and dm+1, the standard impedance value corresponding to Dm is Rm, and the standard impedance value corresponding to dm+1 is rm+1, the calculation formula may be:

Rx＝Rm+(Dx-Dm)(Rm+1-Rm)/(Dm+1-Dm)

In application, when the actual standard impedance value is calculated by table lookup and interpolation, the interpolation mode with more accurate fitting degree can be selected according to the data distribution rule.

In the above-mentioned rf energy generating circuit, when the calibration circuit 14 is connected to the output end of the rf power amplifier 12, the impedance value of the calibration circuit 14 in each topological structure state can be obtained based on the measurement result of the detection circuit, and since the standard impedance values of the calibration circuit 14 in different topological structure states can be known in advance, the standard impedance values and the corresponding measured impedance values of the calibration circuit 14 in each topological structure state can be obtained, and a calibration table is formed according to the standard impedance values and the corresponding measured impedance values of the calibration circuit 14 in each topological structure state, so that when the rf energy generating circuit outputs rf energy, that is, when the rf load 13 is connected to the output end of the rf power amplifier 12, the standard impedance values of the rf load 13 are determined according to the impedance values and the calibration table measured by the detection circuit, and the automatic calibration of the impedance values of the rf load 13 is realized without externally connecting a calibration detection device.

In one embodiment, the processing module 16 is further configured to adjust a topology state of the calibration circuit 14 when the calibration circuit 14 is connected to the output terminal of the rf power amplifier 12, obtain impedance values measured by the impedance detection circuit 15 in each topology state, determine measured impedance values corresponding to each topology state according to the impedance values measured by the impedance detection circuit 15 in each topology state, and form a calibration table according to the standard impedance values and the corresponding measured impedance values of the calibration circuit 14 in each topology state.

Specifically, when the calibration circuit 14 is connected to the output end of the rf power amplifier 12, the processing module 16 adjusts the topology state of the calibration circuit 14, in this process, the impedance detecting circuit 15 continuously measures the impedance value of the output loop of the rf power amplifier 12, that is, the impedance value of the calibration circuit 14 in the current topology state is transmitted to the processing module 16, after receiving the impedance value sent by the impedance detecting circuit 15, the processing module 16 determines the measured impedance value of the calibration circuit 14 in the current topology state according to the impedance value sent by the impedance detecting circuit 15 (for example, directly uses the impedance value measured by the impedance detecting circuit 15 in the current topology state as the impedance value of the calibration circuit 14 in the current topology state), and simultaneously obtains the standard impedance value of the calibration circuit 14 in the current topology state, and then establishes a corresponding relation between the standard impedance value and the measured impedance value in the current topology state to form the calibration table. It can be appreciated that, based on the above manner, the processing module 16 may establish a correspondence between the standard impedance value and the measured impedance value of the calibration circuit 14 in each topological circuit structure state, and further form a calibration table according to the standard impedance value and the corresponding measured impedance value of the calibration circuit 14 in each topological circuit structure state.

In one embodiment, the processing module 16 is further configured to perform a filtering operation when the calibration circuit 14 is connected to the output of the rf power amplifier 12 and the calibration circuit 14 is in a predetermined topology state, wherein the filtering operation includes: controlling the impedance detection circuit 15 to sample for n times, and calculating a sampling average value and a mean square error according to the impedance value of the n times of sampling of the impedance detection circuit 15, wherein n is more than or equal to 2; when the mean square error exceeds the preset error value, the average operation is repeatedly executed, and when the repetition number reaches the preset threshold value, the impedance detection circuit 15 is controlled to stop sampling and output preset prompt information.

The prompt information can comprise at least one of sound information, lamplight information, graphic information and vibration information.

It will be appreciated that when the calibration circuit 14 is in a certain topological state, the n impedance values obtained by controlling the impedance detection circuit 15 to sample n times should be relatively close. Therefore, under normal conditions, if the mean square error exceeds the preset error value, it indicates that the differences between the plurality of impedance values sampled by the impedance detection circuit 15 are large, and obviously, unlike the theoretical situation, it may be determined that there is abnormal data in the n impedance values sampled by the impedance detection circuit 15, and it is necessary to perform the averaging operation again, that is, control the impedance detection circuit 15 to perform a new sampling, and calculate the mean square error again according to the sampling result of the new sampling of the impedance detection circuit 15. If the number of repetitions reaches the preset threshold, it indicates that the mean square error is too large, which is not accidental, and it is likely that the rf energy generating circuit is abnormal, for example, the impedance detecting circuit 15 is abnormal. At this time, the processing module 16 controls the impedance detection circuit 15 to stop sampling and output a preset prompt message to prompt the staff that the rf energy generating circuit is abnormal.

In one embodiment, the processing module 16 is further configured to obtain a sampling average value of the n sampled impedance values of the impedance detection circuit 15 when the mean square error is less than the preset error value, determine a remaining sampled impedance value according to a difference between the n sampled impedance values of the impedance detection circuit 15 and the sampling average value, calculate an average value of the remaining sampled impedance values as a calibration sampling value, and use the calibration sampling value as a measured impedance value of the calibration circuit 14 in the current topology state.

It can be understood that, when the mean square error is smaller than the preset error value, the plurality of impedance values sampled by the impedance detection circuit 15 are relatively close, and the n impedance values sampled by the impedance detection circuit 15 meet the requirement. Taking the sampling average value of the n times of sampling impedance values of the impedance detection circuit 15 as a reference value, further optimizing the n impedance values according to the reference value, discarding a part of data with larger error than the sampling average value in the n impedance values, for example, obtaining a difference value between the n impedance values and the sampling average value, removing the impedance value with the difference value larger than a preset threshold value, for example, obtaining a difference value between the n impedance values and the sampling average value, and retaining the data of a preset proportion value of the total number with smaller error, wherein the preset proportion value can be 50%. The final processing module 16 obtains an average value of the remaining impedance values, uses the average value as a final calibration sampling value, and uses the calibration sampling value as an impedance value of the calibration circuit 14 in the current topology state, thereby improving the accuracy of the impedance value of the calibration circuit 14 in the current topology state.

In application, the calibration data may also be processed in other conventional manners to improve the accuracy of the impedance values of the calibration circuit 14 in the various topological circuit states.

Optionally, each topological circuit structure state may be measured and calibrated in advance, and then, for example, the theoretical standard impedance value of each topological circuit structure state is [100, 200, 300], and after measurement and calibration, the actual standard impedance value of each topological circuit structure state is [100.6, 199.4, 301.2], so that the accuracy of the finally obtained standard impedance value of the radio frequency load 13 is further improved.

In one embodiment, the processing module 16 is further configured to compare the calibration sampling value with a preset reference value, and determine that the calibration sampling value is abnormal when the difference between the calibration sampling value and the preset reference value is outside the preset range.

The reference value may be a theoretical calculation value or an empirical value of the radio frequency load 13, the theoretical calculation value is an idealized value obtained according to a circuit connection relationship and parameters of each circuit element, and the empirical value may be a common value of an actual product and may be obtained from calibration history data of similar products.

It will be appreciated that there may be some difference between the calibration sample value and the predetermined reference value, but the difference between the two values should be within a certain range. When the difference between the calibration sampling value and the preset reference value is outside the preset range, the calibration sampling value is abnormal, and the processing module 16 can control the corresponding device to output corresponding prompt information so as to remind the staff to correct the radio frequency energy generating circuit. The method includes the steps that when the ratio of the difference value between the calibration sampling value and the preset reference value to the preset reference value is larger than the preset value, the calibration sampling value is judged to be abnormal, and a corresponding prompting device is controlled to prompt, wherein the preset value can be 25%, and the prompting device can be an alarm lamp. After the correction of the radio frequency energy generating circuit by the staff is completed, the above calibration process can be restarted to acquire the calibration sampling value again.

In one embodiment, as shown in fig. 2, the calibration circuit 14 includes a plurality of calibration units 141 connected in series, the calibration units 141 including a calibration resistor and a control switch, the calibration resistor being connected in parallel with the control switch; the processing module 16 is further configured to control on/off of each control switch to adjust a topology state of the calibration circuit 14.

The calibration resistor can be a power resistor with low parasitic inductance and capable of bearing a certain radio frequency power, such as a power resistor with rated power of 10W. In fig. 2, R21, R22 and R23 are calibration resistors, S21, S22 and S23 are control switches, and the processing module 16 can control on-off of S21, S22 and S23.

Specifically, since the calibration resistor is connected in parallel with the control switch, when the control switch is turned on, the control switch will short-circuit the calibration resistor connected in parallel with the control switch, and by controlling the on/off of each control switch, the calibration resistor connected to the calibration circuit 14, that is, the state of the topological circuit structure of the calibration circuit 14, can be controlled, so as to control the standard impedance value of the calibration circuit 14.

Taking the calibration circuit 14 including two calibration units 141 as an example, two calibration resistances of 100 ohm and 200 ohm can be selected in the calibration circuit 14 in this embodiment, and the processing module 16 can select 4 standard impedance values of 0 ohm, 100 ohm, 200 ohm and 300 ohm by controlling the on-off of each control switch, so as to cover most of the impedance value ranges in practical application of the product.

In application, if a calibration impedance value with wider coverage range is desired, more resistors can be selected for combination, so that the calibration current has more topological circuit structure states and more standard impedance values. m resistors can finally obtain 2 ^m combined values, and n=3 is usually selected, so that 8 combined values can be obtained. For the calibration circuit 14 in the series mode, an equal ratio array standard impedance value with the ratio of 2 times can be selected, and a combined value with the basic standard impedance values of 1, 2 and 3 … times can be obtained, so that the conventional calibration requirement is met.

In one embodiment, as shown in fig. 3, the calibration circuit 14 includes a plurality of calibration units 141 connected in parallel, and the calibration units 141 include a calibration resistor and a control switch, and the calibration resistor is connected in series with the control switch; the processing module 16 is further configured to control on/off of each control switch to adjust a topology state of the calibration circuit 14.

In fig. 3, R31, R32, and R33 are calibration resistors, S31, S32, and S33 are control switches, and the processing module 16 may control on/off of S31, S32, and S33.

It can be understood that, since the calibration resistor is connected in series with the control switch, when the control switch is turned on, the corresponding calibration resistor is connected to the calibration circuit 14, and the calibration resistor connected to the calibration circuit 14, that is, the state of the topology circuit structure of the calibration circuit 14, can be controlled by controlling the on/off of each control switch, so as to control the standard impedance value of the calibration circuit 14. By way of example, two calibration resistances of 150 ohms and 300 ohms are selected, and finally, 4 calibration standard impedance values of 100 ohms, 150 ohms, 300 ohms and infinity can be obtained, and most of the calibration requirements can be met.

In application, the calibration circuit 14 may also adopt a circuit structure with multiple resistors, i.e. only one resistor is connected to the calibration circuit 14 at a time, and the standard impedance value of the calibration circuit 14 is controlled by controlling the resistor connected to the calibration circuit 14.

In one embodiment, calibration circuit 14 further includes an over-current protection circuit coupled to calibration circuit 14.

The overcurrent protection circuit is used to avoid the calibration resistor from being damaged due to the fact that the calibration resistor is subjected to current, voltage or power exceeding the limit, and the overcurrent protection circuit can specifically comprise a current limiting device or an overvoltage protection device, such as a self-restorable fuse, as shown in fig. 2 and 3. When a protection device such as a fuse is selected to protect the circuit, the resistance of the overcurrent protection circuit should be increased in the standard impedance value of the calibration circuit 14 to reduce the error.

In one embodiment, the frequency driving circuit 11 includes: a frequency generation circuit, a frequency division circuit and a driving circuit. The frequency generation circuit is used for generating radio frequency related radio frequency signals; the input end of the frequency dividing circuit is connected with the output end of the frequency generating circuit, and the frequency dividing circuit is used for dividing the radio frequency signal to generate a frequency dividing signal of the radio frequency working frequency; the input end of the driving circuit is connected with the output end of the frequency dividing circuit, the output end of the driving circuit is connected with the radio frequency power amplifier 12, and the driving circuit is used for converting the frequency dividing signals into two groups of radio frequency driving signals with complementary phases.

The rf power amplifier 12 may be a switch-type rf power amplifier 12, so that the energy conversion efficiency is high, thereby facilitating the miniaturization of the functional module and improving the accuracy and stability of the rf frequency. The frequency generating circuit can be formed by adopting a resonant circuit, such as a high-precision RC and a corresponding frequency generator, and a high-precision and high-stability crystal oscillation source. A crystal oscillator is typically employed as the frequency generation circuit. The frequency dividing circuit can be realized by a logic circuit or a Micro Controller Unit (MCU), and the output frequency of the frequency source is selected and the frequency dividing coefficient is calculated according to the final required radio frequency working frequency.

Optionally, the frequency drive circuit 11 further comprises a drive isolation circuit by which electrical isolation is achieved.

As shown in fig. 4, for an exemplary frequency driving circuit 11, the frequency generating circuit 111 adopts a resonant circuit, and the driving circuit 113 outputs two sets of radio frequency driving signals Drive a and Drive B after passing through the driving isolation circuit 114.

Specifically, the frequency generation circuit 111 divides the frequency by the frequency division circuit 112 to obtain a square wave signal of the radio frequency working frequency, that is, a frequency division signal, and the driving circuit 113 converts the frequency division signal into two sets of radio frequency driving signals with complementary phases, and drives the switching tube of the radio frequency power amplifier 12 to realize switching action through the two sets of radio frequency driving signals.

By way of example, the output frequency of the radio frequency power amplifier 12 typically required is 480kHz, and if a 7.68MHz crystal oscillator is selected as the frequency source and the divider circuit 112 divides 16, a square wave signal with a duty cycle of about 50% of 480kHz is obtained, the amplitude of the square wave signal being typically 3V or 5V. When the switching tube of the radio frequency power amplifier 12 is switched at high speed, a higher driving voltage and a larger instantaneous driving current are needed, the driving circuit 113 drives a square wave radio frequency signal with the amplitude of 3V or 5V to more than 10V, and the instantaneous current is more than 100mA, so that the switching tube at the low voltage side of the radio frequency power amplifier 12 is driven to work.

In one embodiment, the drive circuit 113 includes a pulse transformer including a set of primary coils and two sets of secondary coils for converting the divided signal into two sets of radio frequency drive signals of complementary phase.

It can be understood that the pulse transformer can realize electrical isolation between the rf power amplifier 12 and the frequency driving circuit 11 to avoid interference of the rf driving signal, and simultaneously, two sets of secondary windings of the pulse transformer can be utilized to output two sets of rf driving signals with complementary phases, so as to reliably and alternately drive the switching tube of the rf power amplifier 12 to work.

In one embodiment, as shown in fig. 5, the rf power amplifier 12 includes an isolation transformer T1, a first capacitor C11, a second capacitor C12, a third capacitor C13, a fourth capacitor C14, a first switching tube Q1, and a second switching tube Q2. The modulation end of the primary coil of the isolation transformer T1 is used for being connected with the output end Vdc of the adjustable direct current power supply, and the first end of the secondary coil of the isolation transformer T1 is connected with the first end of the radio frequency load 13. The first end of the first capacitor C11 is connected to the first end of the primary coil, and the second end of the first capacitor C11 is connected to the second end of the primary coil. The control end of the first switching tube Q1 is connected to the first output end (Drive a) of the frequency driving circuit 11, the first end of the first switching tube Q1 is connected to the first end of the first capacitor C11, and the second end of the first switching tube Q1 is grounded. The control end of the second switching tube Q2 is connected to the second output end (Drive B) of the frequency driving circuit 11, the first end of the second switching tube Q2 is connected to the second end of the first capacitor C11, and the second end of the second switching tube Q2 is connected to the second end of the first switching tube Q1. The first end of the second capacitor C12 is connected to the first end of the first switching tube Q1, and the second end of the second capacitor C12 is connected to the second end of the first switching tube Q1. The first end of the third capacitor C13 is connected with the first end of the second switching tube Q2, and the second end of the third capacitor C13 is connected with the second end of the second switching tube Q2. The first end of the fourth capacitor C14 is connected to the second end of the secondary winding, and the second end of the fourth capacitor C14 is connected to the second end of the radio frequency load 13.

The rf power amplifier should have a symmetrical structure, typically a push-pull structure (as shown in fig. 5), or a half-bridge structure, a full-bridge structure, or a symmetrical E-type power amplifying structure; the rf power amplifier 12 typically operates in a switching mode, and may operate in a zero-voltage switching mode or a zero-current switching mode through a resonant circuit formed by the primary windings of the isolation transformers T1, C11, C12, and C13, so as to reduce switching losses and improve energy conversion efficiency.

Specifically, in the circuit diagram of the rf power amplifier 12 shown in fig. 5, vdc is an output end of a dc power supply (i.e., an adjustable dc power supply) with an output voltage that is adjustable in real time, and is used for providing energy for the rf power amplifier; q1 and Q2 are power type switching transistors, and switching elements such as a power triode, an insulated gate bipolar transistor (Insulated Gate Bipolar Transistor, IGBT) or a Metal-Oxide-semiconductor field effect transistor (MOSFET) are selected, wherein Q1 and Q2 are N type MOSFETs; drive A and Drive B are two groups of radio frequency driving signals with opposite phases output by the driving circuit 113, and the two groups of radio frequency driving signals respectively Drive Q1 and Q2 to perform alternating switching actions; c12 and C13 can be replaced by parasitic capacitance of the device or the sum of the parallel connection of the parasitic capacitance and the external capacitance, inductance of primary coil of C11, C12 and C13 and transformer T1 resonates at radio frequency working frequency, switch square wave is converted into radio frequency energy approximate to sine wave, and Q1 and Q2 realize zero voltage switch by reasonably setting capacitance and inductance values so as to reduce loss; t1 is an isolation transformer for realizing electrical isolation between primary and secondary and transmitting radio frequency energy of the primary coil to the secondary coil; the capacitor C14 in the radio frequency output loop and the inductance of the secondary coil of the isolation transformer T1 resonate at the radio frequency working frequency, have the lowest impedance value at the radio frequency, and are favorable for filtering clutter in radio frequency energy and further gating the frequency, so that when the radio frequency ablation is performed on a human body, the unwanted low-frequency or high-frequency energy is prevented from entering the human body.

In one embodiment, as shown in fig. 5, the radio frequency power amplifier 12 further comprises: a fifth capacitance C15 and an inductance L11. The first end of the fifth capacitor C15 is connected with the output end Vdc of the adjustable direct current power supply, and the second end of the fifth capacitor C15 is grounded; the first end of the inductor L11 is connected to the first end of the fifth capacitor C15, and the second end of the inductor L11 is connected to the modulation end of the primary winding of the isolation transformer T1. Wherein, the fifth capacitor C15 plays roles of energy storage and decoupling; the inductor L11 plays a role of choke and constant current.

In one embodiment, the radio frequency energy generating circuit further comprises a current detection circuit, and the current detection circuit is connected with the output end of the radio frequency power amplifier 12 and is used for measuring the output current value of the radio frequency power amplifier 12; the processing module 16 is connected to the current detection circuit, and the processing module 16 is further configured to determine the rf power according to the measured output current value and the impedance value measured by the impedance detection circuit 15 when the rf power amplifier 12 is connected to the rf load 13.

Specifically, by connecting the current detection circuit to the output terminal of the rf power amplifier 12, when the rf power amplifier 12 is connected to the rf load 13, the current detection circuit can measure the current value flowing through the rf load 13, and at this time, the impedance detection circuit 15 can measure the impedance value of the outgoing rf loop, and the magnitude of the output rf power can be calculated according to the current value and the impedance value on the load.

In one embodiment, the current detection circuit includes a current sensor and an isolation amplifier, the current sensor is connected to the output end of the radio frequency power amplifier 12 through the isolation amplifier, the current sensor is used for measuring the output current value of the radio frequency power amplifier 12, and the isolation amplifier is used for isolating the radio frequency current.

The isolation amplifier is a special measurement amplifying circuit, the input and output of the special measurement amplifying circuit and the power supply circuit are not directly coupled, namely, the signal has no common ground terminal in the transmission process, and the current detection circuit is isolated from the radio frequency amplifier by disconnecting the ground loop. In addition, the isolation amplifier can be used for transmitting, converting, isolating, amplifying and remotely transmitting the current signal, and can be used for monitoring the output current of the radio frequency power amplifier 12 in cooperation with the current sensor.

Based on the above embodiments, in one embodiment, as shown in fig. 6, the present application provides a radio frequency energy generating device, where the radio frequency energy generating device includes a frequency driving circuit 11, a radio frequency power amplifier 12, a calibration circuit 14, an impedance detection circuit 15, a current detection circuit 18, a dc adjustable power supply 17, and a processing module 16, where an input end of the radio frequency power amplifier 12 is connected to the dc adjustable power supply 17 and an output end of the frequency driving circuit 11, respectively; the processing module 16 is respectively connected with the frequency driving circuit 11, the calibration circuit 14, the impedance detection circuit 15, the current detection circuit 18 and the direct current adjustable power supply 17, the impedance detection circuit 15 and the current detection circuit 18 are respectively connected with the output end of the radio frequency power amplifier 12, and the output end of the radio frequency power amplifier 12 is respectively connected with the calibration circuit 14 and the radio frequency load 13 through the change-over switch S11. In combination with the above embodiments, it may be found that the rf power amplifier 12 includes an isolation transformer, the frequency driving circuit 11 includes a driving isolation circuit 114, and the current detecting circuit 18 includes an isolation amplifier, so that the isolation transformer, the driving isolation circuit 114, and the isolation amplifier are disposed, thereby realizing electrical isolation of the corresponding circuits and ensuring accuracy of the calibration process.

Although the rf load 13 is shown in fig. 6, the rf energy generating device does not include the rf load 13, and the rf load 13 is the object of the rf energy generating device outputting rf energy.

The advantages of the above-mentioned rf energy generating device over the prior art are the same as those of the above-mentioned rf energy generating circuit over the prior art, and are not described in detail herein.

In one embodiment, the application provides a method for calibrating a radio frequency energy generation circuit, comprising the steps of:

S701: when the calibration circuit is connected with the output end of the radio frequency power amplifier, the topological circuit structure state of the calibration circuit is regulated, wherein the calibration circuit has a plurality of different topological circuit structure states, the standard impedance value of the calibration circuit in each topological circuit structure state is different, and the calibration circuit can be switched and connected to the output end of the radio frequency power amplifier;

S702: obtaining impedance values measured by the impedance detection circuit in the state of each topological circuit structure, wherein the impedance detection circuit is connected with the output end of the radio frequency power amplifier and is used for measuring the impedance values of the output load of the radio frequency power amplifier;

S703: when the radio frequency power amplifier is connected with the radio frequency output port in a conducting manner, the standard impedance value of the radio frequency load is determined according to the impedance value measured by the impedance detection circuit and a calibration table, wherein the calibration table comprises the standard impedance value of the calibration circuit in each topological circuit structure state and the corresponding measured impedance value.

In S703, a measured impedance value corresponding to each topology circuit structure state may be determined according to the impedance value measured by the impedance detection circuit in each topology circuit structure state; forming a calibration table according to the standard impedance value and the corresponding measured impedance value of the calibration circuit in each topological circuit structure state; when the radio frequency power amplifier is connected with the radio frequency load, the standard impedance value of the radio frequency load is determined according to the impedance value measured by the impedance detection circuit and the calibration table, wherein the calibration circuit can be switched and connected to the output end of the radio frequency power amplifier.

According to the calibration method of the radio frequency energy generating circuit, the state of the topological circuit structure of the calibration circuit 14 is regulated, so that when the calibration circuit 14 is connected with the output end of the radio frequency power amplifier 12, the measured impedance value in each topological circuit structure state of the calibration circuit 14 can be obtained based on the measurement result of the detection circuit, and the standard impedance value of the calibration circuit 14 in different topological circuit structure states can be known in advance, so that the standard impedance value of the calibration circuit 14 in each topological circuit structure state and the corresponding measured impedance value can be obtained, and a calibration table is formed according to the standard impedance value of the calibration circuit 14 in each topological circuit structure state and the corresponding measured impedance value, and further when the radio frequency energy generating circuit outputs radio frequency energy, namely when the radio frequency load 13 is connected with the output end of the radio frequency power amplifier 12, the standard impedance value of the radio frequency load 13 is determined according to the impedance value measured by the detection circuit and the calibration table, automatic calibration of the standard impedance value of the radio frequency load 13 is realized, and no external calibration detection equipment is required.

In one embodiment, before determining the impedance value corresponding to each topology state according to the impedance value measured by the impedance detection circuit in each topology state, the calibration method of the radio frequency energy generation circuit further includes: and when the calibration circuit is connected with the output end of the radio frequency power amplifier and is in a preset topological circuit structure state, performing a filtering operation, wherein the filtering operation comprises the following steps: controlling the impedance detection circuit to sample for n times, and calculating the mean square error according to the impedance value sampled by the impedance detection circuit for n times, wherein n is more than or equal to 2; and when the mean square error exceeds the preset error value, repeatedly executing the average operation, and when the repetition times reach the preset threshold value, controlling the impedance detection circuit to stop sampling and outputting preset prompt information.

It will be appreciated that when the calibration circuit 14 is in a certain topological state, the n impedance values obtained by n sampling performed by the control impedance detection circuit 15 should be relatively close. Therefore, under normal conditions, if the mean square error exceeds the preset error value, it indicates that the differences between the plurality of impedance values sampled by the impedance detection circuit 15 are large, and obviously, unlike the theoretical situation, it may be determined that there is abnormal data in the n impedance values sampled by the impedance detection circuit 15, and it is necessary to perform the averaging operation again, that is, control the impedance detection circuit 15 to perform a new sampling, and calculate the mean square error again according to the sampling result of the new sampling of the impedance detection circuit 15. If the number of repetitions reaches the preset threshold, it indicates that the mean square error is too large, and it is likely that the rf energy generating circuit is abnormal, for example, the impedance detecting circuit 15 is abnormal, and the processing module 16 controls the impedance detecting circuit 15 to stop sampling and output a preset prompt message to prompt the staff that the rf energy generating circuit is abnormal.

In one embodiment, determining the impedance value corresponding to each topology state from the impedance values measured by the impedance detection circuit at each topology state comprises: when the mean square error is smaller than the preset error value, a sampling average value of the impedance values sampled by the impedance detection circuit for n times is obtained, a reserved sampling impedance value is determined according to the difference value between the impedance values sampled by the impedance detection circuit for n times and the sampling average value, the average value of the reserved sampling impedance values is calculated to be used as a calibration sampling value, and the calibration sampling value is used as a measured impedance value of the calibration circuit in the current topological circuit structure state.

In one embodiment, the radio frequency energy generating circuit calibration method further comprises: and when the difference value between the calibration sampling value and the preset reference value is out of the preset range, judging that the calibration sampling value is abnormal.

Those skilled in the art will appreciate that implementing all or part of the above described methods may be accomplished by way of a computer program stored on a non-transitory computer readable storage medium, which when executed, may comprise the steps of the embodiments of the methods described above. Any reference to memory, database, or other medium used in embodiments provided herein may include at least one of non-volatile and volatile memory. The nonvolatile Memory may include Read-Only Memory (ROM), magnetic tape, floppy disk, flash Memory, optical Memory, high density embedded nonvolatile Memory, resistive random access Memory (ReRAM), magneto-resistive random access Memory (Magnetoresistive Random Access Memory, MRAM), ferroelectric Memory (Ferroelectric Random Access Memory, FRAM), phase change Memory (PHASE CHANGE Memory, PCM), graphene Memory, and the like. Volatile memory can include random access memory (Random Access Memory, RAM) or external cache memory, and the like. By way of illustration, and not limitation, RAM can be in various forms such as static random access memory (Static Random Access Memory, SRAM) or dynamic random access memory (Dynamic Random Access Memory, DRAM), etc. The databases referred to in the embodiments provided herein may include at least one of a relational database and a non-relational database. The non-relational database may include, but is not limited to, a blockchain-based distributed database, and the like. The processor referred to in the embodiments provided in the present application may be a general-purpose processor, a central processing unit, a graphics processor, a digital signal processor, a programmable logic unit, a data processing logic unit based on quantum computing, or the like, but is not limited thereto.

In the description of the present specification, reference to the terms "some embodiments," "other embodiments," "desired embodiments," and the like, means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic descriptions of the above terms do not necessarily refer to the same embodiment or example.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.

Claims

1. A radio frequency energy generating device comprising a radio frequency energy generating circuit, the radio frequency energy generating circuit comprising:

The impedance detection circuit is connected with the output end of the radio frequency power amplifier and is used for measuring the impedance value of an output load of the radio frequency power amplifier;

The processing module is respectively connected with the impedance detection circuit and the calibration circuit and is used for determining the standard impedance value of the current radio frequency load according to the impedance value measured by the impedance detection circuit and a calibration table when the radio frequency power amplifier is connected with the radio frequency output port in a conducting mode, wherein the calibration table comprises the standard impedance value of the calibration circuit in each topological circuit structure state and the corresponding measured impedance value.

2. The radio frequency energy generating device according to claim 1, wherein the processing module is further configured to adjust a topology state of the calibration circuit when the calibration circuit is connected to the output terminal of the radio frequency power amplifier, obtain impedance values measured by the impedance detection circuit in each topology state, determine the measured impedance value corresponding to each topology state according to the impedance values measured by the impedance detection circuit in each topology state, and form the calibration table according to a standard impedance value and a corresponding measured impedance value of the calibration circuit in each topology state.

3. The radio frequency energy generating device of claim 1, wherein the processing module is further configured to perform a filtering operation when the calibration circuit is in conductive connection with the output of the radio frequency power amplifier and the calibration circuit is in a predetermined topology state, wherein the filtering operation comprises: controlling the impedance detection circuit to sample for n times, and calculating a sampling average value and a mean square error according to the impedance value sampled by the impedance detection circuit for n times, wherein n is more than or equal to 2; and when the mean square error exceeds a preset error value, repeatedly executing the average operation until the repetition number reaches a preset threshold value, and controlling the impedance detection circuit to stop sampling and outputting preset prompt information.

4. The radio frequency energy generating device according to claim 3, wherein the processing module is further configured to obtain a sampling average value of the impedance values sampled n times by the impedance detection circuit when the mean square error is smaller than a preset error value, determine a remaining sampling impedance value according to a difference between the impedance values sampled n times by the impedance detection circuit and the sampling average value, calculate an average value of the remaining sampling impedance values as a calibration sampling value, and use the calibration sampling value as a measured impedance value of the calibration circuit in a current topological circuit structure state.

5. The apparatus of claim 4, wherein the processing module is further configured to compare the calibration sample value with a predetermined reference value, and determine that the calibration sample value is abnormal when a difference between the calibration sample value and the predetermined reference value is outside a predetermined range.

6. The radio frequency energy generating device of claim 1, wherein the radio frequency energy generating circuit further comprises a switch via which an output of the radio frequency power amplifier is switchably connected to one of the calibration circuit and the radio frequency output port.

7. The radio frequency energy generating device of claim 1, wherein the calibration circuit comprises a plurality of calibration units, the calibration units comprising a calibration resistor and a control switch; wherein,

The calibration units are connected in series, and the calibration resistor is connected with the control switch in parallel; or, a plurality of calibration units are connected in parallel, and the calibration resistor is connected in series with the control switch;

8. The radio frequency energy generating device of claim 1, wherein the calibration circuit further comprises an over-current protection circuit coupled to the calibration circuit.

9. The radio frequency energy generating device of claim 1, wherein the frequency drive circuit comprises:

the input end of the frequency dividing circuit is connected with the output end of the frequency generating circuit, and the frequency dividing circuit is used for dividing the radio frequency signal to generate a frequency dividing signal of radio frequency working frequency;

10. The radio frequency energy generating device of claim 9, wherein the drive circuit comprises a pulse transformer comprising one set of primary coils and two sets of secondary coils, the pulse transformer being configured to convert the divided signal into two sets of radio frequency drive signals of complementary phase.

11. The radio frequency energy generating device of claim 1, wherein the radio frequency power amplifier comprises:

the modulation end of the primary coil of the isolation transformer is used for being connected with the output end of the adjustable direct current power supply, and the first end of the secondary coil of the isolation transformer is used for being connected with the first end of the radio frequency load;

And the first end of the fourth capacitor is connected with the second end of the secondary coil, and the second end of the fourth capacitor is used for being connected with the second end of the radio frequency load.

12. The radio frequency energy generating device of claim 11, wherein the radio frequency power amplifier further comprises:

13. The radio frequency energy generating device according to any one of claims 1 to 12, wherein the radio frequency energy generating circuit further comprises a current detection circuit connected to an output terminal of the radio frequency power amplifier for measuring an output current value of the radio frequency power amplifier;

The processing module is connected with the current detection circuit, and is further used for determining radio frequency power according to a current value measured by the current detection circuit and an impedance value measured by the impedance detection circuit when the radio frequency power amplifier is connected with the radio frequency output port in a conducting mode.

14. A method of calibrating a radio frequency energy generating device, the method comprising the steps of:

When a calibration circuit is connected with the output end of the radio frequency power amplifier in a conducting way, regulating the topological circuit structure state of the calibration circuit, wherein the calibration circuit has a plurality of different topological circuit structure states, the standard impedance values of the calibration circuit in the topological circuit structure states are different, and the calibration circuit can be connected to the output end of the radio frequency power amplifier in a switching way;

obtaining impedance values measured by the impedance detection circuit in the state of each topological circuit structure, wherein the impedance detection circuit is connected with the output end of the radio frequency power amplifier and is used for measuring the impedance value of an output load of the radio frequency power amplifier;