CN1180402A - Waste gas purification device - Google Patents
Waste gas purification device Download PDFInfo
- Publication number
- CN1180402A CN1180402A CN 96191477 CN96191477A CN1180402A CN 1180402 A CN1180402 A CN 1180402A CN 96191477 CN96191477 CN 96191477 CN 96191477 A CN96191477 A CN 96191477A CN 1180402 A CN1180402 A CN 1180402A
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- burner
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- outer tube
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Abstract
An apparatus for purifying waste gases, particularly waste gases from chemical vapor deposition, plasma etching or similar processes, with at least one combustion space, which is in a vertical arrangement within an outer pipe and is limited at the top by an umbrella-like cover, and an internally or externally mixing burner, the combustion gas nozzles of which protrude into the combustion space, combustion gas, oxygen or air and waste gas being supplied to the burner, as well as to means for supplying and discharging oxidizing agents and/or absorbents to a scrubbing space above the combustion space. By means of the invention, an apparatus is to be provided for purifying waste gases, which can be manufactured cost-effectively and by means of which the disadvantages of the state of the art are avoided. The invention is characterized in that the burner (12) is fastened centrally in the cover (5), the burner (12) has combustion gas nozzles (13) and at least one waste gas nozzle (14), which are directed vertically downwards into the combustion space (6), and that the reaction products, formed during the combustion process, are passed along the inside of the outer pipe (1) into the scrubbing space (7).
Description
The present invention relates to a kind of waste gas purification apparatus, especially the waste gas purification apparatus that decontamination of chemical vapour deposition, plasma pickling or similar procedure produce, have at least one and be vertically set on the interior combustion chamber of an outer tube, the upper end of this combustion chamber is by-umbrella shape cover piece gauge, and have in one and to mix or the outer burner that mixes, the gas nozzle of burner stretches in the combustion chamber, burner delivery of fuel gas, oxygen or air and waste gas in the middle of it flow to device in the washing chamber outside the combustion chamber to have to have with oxidant and/or adsorbent.
Usually the purification of this class waste gas is carried out in two steps, wherein waste gas is at first burnt and then passes through washing, purifying.Being the burner that utilizes gas-powered at this realizes waste gas burning or oxidation in-combustion chamber.
In EP 0,348 893 B1, put down in writing a kind of like this device of purifying exhaust air, this device by one basic downwards closed and in the upper end matrix open, that have circular cross-section constitutes.This matrix is made of with the inwall of the concentric setting of outer wall a cylindric outer wall and, and this inwall is to the combustion chamber gauge.The burner that flows to the waste gas of burning usefulness with combustion gas that is used to burn stretches in the combustion chamber of this matrix.There is a washing or a developing room upper end of this combustion chamber by an antispray guard member gauge above the antispray guard member.At this developing room one nozzle that is provided with is with one heart arranged, utilize this nozzle to produce the mist awl of irrigation, utilize this mist awl to flush out through aerosol and the solid constituent in the waste gas of burning.Adopt this antispray guard member to prevent that irrigation from spraying into the combustion chamber and also being sprayed onto on the burner or in the flame thereupon.
The residue that flushes out is carried downwards and is discharged from through a outlet on matrix along outer wall cylindraceous inboard with irrigation.
The shortcoming of this waste gas purification apparatus is that the cost prohibitive of the purification process of device and cleaning combustion chamber be difficulty especially.Almost can not avoid the pollution of gas nozzle and emission nozzle in addition, thereby, must carry out periodic maintenance burner for guaranteeing running reliably.
The objective of the invention is to propose a kind of device of purifying exhaust air, it is cheap and can avoid the shortcoming of prior art that this device is manufactured expense.
The solution that the objective of the invention is in the waste gas purification apparatus of mode described in this specification introductory section is as follows, burner is fixed on the cover piece with one heart, burner has gas nozzle and at least one emission nozzle, and gas nozzle and emission nozzle point to the combustion chamber vertically downward and the product that produces in combustion process is imported in the washing chamber along the outer tube inboard.
Utilize the device of this purifying exhaust air that is easy to realize to realize higher usability, and improved waste gas purification apparatus greatly.Especially avoided being deposited on the burner, in the combustion chamber or the combustion residue on bottom, on the outer tube inboard and combustion chamber to the influence of combustion process.But also avoided gas nozzle to narrow down or stop up in possible cross section usually.
In order to realize that combustion gas mixes very uniformly with waste gas, burner has a plurality of emission nozzles, and these nozzles are enclosed by the gas nozzle concentric ring.
For avoiding the overheated appearance of possibility, be that burner is equipped with a cooling device.Be provided with an adsorbent or washing agent spray nozzle in outer tube He above the burner, this spray nozzle is used to wash the waste gas that is come out by the combustion chamber on the one hand and simultaneously burner housing is cooled off on the other hand for this reason.Spray nozzle can be nozzle ring, bore nozzle-type inner cone nozzle entirely, thereby has the impact liquid of sufficient quantity to impact on the shell of burner.
Nozzle ring is fixed on the outer tube wall of cover piece top.Consequent spraying ring both had been parallel to the inwall of outer tube when this situation, concentrate on again on the shell of burner, thereby the whole cross section in outer tube is capped.
If spray nozzle is connected with a chamber in the burner for the inclined tube road by one, adsorbent or cleaning agent flow to spray nozzle by this feeding pipeline, then will improve the cooling to burner greatly.
Adopt this mode that burning is cooled off by in implementing, thereby can allow higher ignition temperature.Therefore this enforcement is particularly useful for hydrogen burner, and wherein ring encloses the setting of gas nozzle ground and has family between gas nozzle and emission nozzle.
For avoiding, between combustion chamber and cover piece, be provided with a concentric ring and enclose heat shielding burner and that extend downwards cover piece and burner superheated.In addition, this heat shielding also plays a part to prevent to treat burnt gas and is acutely cooled off.
Have an interior pipe to side, combustion chamber gauge in outer tube, pipe encloses heat shielding by cover piece extension downwards and ring in this.
Form a circumferential weld between the inwall of heat shielding and interior pipe, wherein cover piece is connected with outer tube space outward by the hole with space between heat shielding.Therefore and cooperate with the negative pressure in the combustion chamber and realized continual flushing to the space between heat shielding and cover piece.
In further design of the present invention, be provided with a nozzle ring that has the nozzle of carrying cleaning agent in the space between cover piece and heat shielding, the inwall of pipe in these nozzles point to.Like this device work just can water intermittently the time or adsorbent the combustion chamber is cleaned, and needn't the combustion chamber be opened for this reason.
The sealing of lower end, combustion chamber is to have taper or become the matrix of the bottom of arch to realize that the lowest part in this bottom has an outlet downwards by one.Under the situation that does not influence combustion process, guaranteed continual discharge like this to adsorbent or irrigation.
Be to realize the good guiding to gas, especially to the guiding of the gas through purifying and be admitted to the washing chamber, interior pipe stretches in the matrix and ends in a distance of top, bottom.
In a kind of special design, outer tube and interior pipe are made of an upper section and a lower section respectively, and these two sections can removably link together, and wherein matrix can be removably links together with the hypomere of outer tube or outer tube.So just realized tangible simplification to cleaning or maintenance process, this point also can axially move up by the outer tube epimere that has the burner, cover piece, interior pipe epimere, heat shielding, hole and the nozzle ring that are fixed on the outer tube epimere or matrix can axially move down, and is further improved.
In another modification of the present invention, the lower end of interior pipe epimere has a cross section reducing, and the upper end of this cross section reducing and hypomere constitutes a circle cup seam.Owing to therefore can impel the recirculation of a part of waste gas that has burnt, this waste gas is flowed to combustion process repeatedly, thereby has improved the efficient of combustion process like this.Realize the flushing of internal pipe inboard in addition so also and reduced deposition.
For preventing to enter the combustion chamber in time flushing of this situation or adsorbent, intersegmentally on outer tube epimere and interior pipe be provided with a protection tube, this protection tube is to the top genesis covering effect of hypomere.
In further design of the present invention, the combustion chamber connects by leading the outer space of tube and tube, is provided with the device that is used for burner igniting or supervision in conduit; Or burner itself contains the device to its igniting and supervision.
In addition, a scopiform rib is arranged between cover piece and outer tube inboard, this scopiform rib is led irrigation or adsorbent row the inboard of outer tube and is played a part the waste gas reinforcement wetting simultaneously.
Outer tube is being used for being connected with the exhaust equipment of generation negative pressure in the washing chamber in the combustion chamber by one or more separators and above the cover piece.Because this negative pressure that produces has realized the suction of burning indoor exhaust air on the one hand and has avoided the discharge of waste gas through flushing hole and outlet simultaneously.
The present invention is described further will to contrast an embodiment below.Shown in the drawings:
The profile of Fig. 1 waste gas purification apparatus of the present invention;
But Fig. 2 has the device of Fig. 1 of divided combustion chamber;
Fig. 3 has the waste gas purification apparatus of waste gas circulation;
Fig. 4 is not with the simplification device of the waste gas purification of dedicated combustion chamber;
Fig. 5 has the profile of the burner of additional cooling device;
Fig. 6 has the profile of the burner of gas nozzle and emission nozzle;
The vertical view of Fig. 7 Fig. 6 burner.
As shown in Figure 1, waste gas purification apparatus is made of a vertically disposed outer tube 1, and the lower end of outer tube is by a matrix 2 closures.Matrix 2 has bottom 3 taper or that become arch downwards, and the bottom has an outlet 4 in its minimum point.
Be provided with a cover piece 5 that stretch, umbrella in outer tube 1 downwards, this cover piece separates following combustion chamber 6 with the washing chamber 7 that is positioned at above it.Cover piece 5 in outer tube 1 fixedly be to adopt the connector 9 have hole 8 to realize, cover piece 5 pipe fitting fixed thereon for example.In order to realize the passage of gas by combustion chamber 6 to washing chamber 7, the diameter of cover piece 5 is less than the internal diameter of outer tube 1.Therefore just reserved an annulus 10 in the inwall scope of outer tube 1, this sews a scopiform rib 11 that is fixed on the cover piece 5 and hides.
In addition, the center fixation at umbrella cover piece 5 has the gas nozzle of a band directed downwards and the burner 12 of emission nozzle 13,14.Burner 12 fixing on cover piece 5 can adopt screw or collar to be realized.For the waste gas of realizing adding by emission nozzle 14 fully mixes with the uniform of combustion gas, emission nozzle 14 is a central nozzle, and this nozzle is enclosed by an annular fuel gas nozzle 13 or a plurality of gas nozzle 13 rings.Especially consider to adopt natural gas as combustion gas here, this natural gas burns with excessive oxygen, or hydrogen, and this hydrogen burns with excessive oxygen equally.
The heat shielding 15 that below cover piece 5, has a ring to enclose burner 12 and gas nozzle and emission nozzle 13,14, the tapered downward stretching, extension of this heat shielding and be particularly useful for reducing thermic load on the cover piece 5.Have an interior pipe 16 that is fixed on the cover piece to be extended by cover piece 5 downwards, so that gauge is carried out in combustion chamber 6, pipe ring encloses heat shielding 15 in this.Simultaneously between the inwall of heat shielding 15 and interior pipe 16, remain with a circumferential weld 17, thereby the space of 15 of cover piece 5 and heat shieldings is connected with outer tube 1 space outward by hole 8.Therefore when in combustion chamber 6, being negative pressure, realized purge to the space of 15 of cover piece 5 and heat shieldings.
The interior pipe 16 that extends to matrix is used for the flame in the combustion chamber 6 is separated with the waste gas that adds in the thermal response section simultaneously, and this waste gas upwards is introduced into washing chamber 7 by matrix 2 beginnings in the inboard of outer tube 1 as reacting gas.
In washing chamber 7, there is a spray nozzle 18 at the certain intervals place above burner 12, and this spray nozzle is used for carrying and even distribution adsorbent, and the minimum drop that produces adsorbent.This adsorbent is used for the gas that produces when the waste gas burning or the product of solid are washed.Wherein the mist of spray nozzle 18 awl is an outer cone and the inboard that extends to outer tube 1.Adopt this mode to realize cooling simultaneously to burner 12.
By spray nozzle 18 adsorbents in aerosol is distributed evenly at washing chamber 7 and then be directed into the inboard of outer tube 1 and flow in the matrix 2 from here and in outlet 4 enters not shown storage tank by cover piece 5 and scopiform rib 11 fixed thereon.
Interior pipe upper end on cover piece 5 have one be used to purify in the nozzle ring 19 of pipe 16 inboards, utilize this nozzle ring can work intermittently the time water or adsorbent internally manage 16 inboard and spray, thereby can eliminate or reduce deposition at this place.
A separator 20 that is used to suppress solid or liquid aersol constitutes the upper end of washing chambers 7, and this seperator is connected with a not shown exhaust equipment, and this exhaust equipment produces the negative pressure of necessity simultaneously.
For ignition combustion device flame and for combustion process having been monitored a conduit 21 by outer tube, passes cover piece 5 and extends to heat shielding 15.In conduit, can be provided with one and fire nozzle and/or a ultraviolet ray-flame detector.
Fig. 2 illustrates an essentially identical waste gas purification apparatus, and its middle external tube and 1,18 segmentations of interior pipe are implemented, thereby the dismounting of this device and safeguard particularly easy.Outer tube 1 is made of an upper section and a lower section 1a, 1b for this reason and interior pipe 16 is made of epimere and a hypomere 16a, 16b, and they can removably link together respectively.Matrix 2 can removably link together with the hypomere 1a of outer tube 1 or outer tube 1 in addition.
The epimere 1a of outer tube 1 that has epimere 16a, heat shielding 15, hole 8 and the nozzle cups 20 of the burner 12 that is fixed on the outer tube epimere, cover piece 5, interior pipe 16 also can axially make progress, and perhaps matrix 2 can axially be implemented downwards movably.Therefore particularly easy to the purification of combustion chamber 6.
Fig. 3 illustrates a particular variation of the present invention, has wherein realized the interior flushing of interior backflow of waste gas and interior pipe 16.Its basic structure conforms to the modification shown in Fig. 2, wherein in pipe 16 epimere 16a have a cross section reducing 22 in its lower end, this reducing is concentric and stretch in the hypomere with hypomere 16b.A part of stitching 23 waste gas of upwards carrying by the annulus that forms in this way between hypomere 16b and hypomere 1b inboard is flowed to combustion chamber 6 once more and is born causus flame herein again.Realized purge by this backflow in addition, thereby avoided the deposition of particle at least in part at this place to hypomere 16b inboard.
For avoiding adsorbent to enter the combustion chamber by circle cup seam 23, at the epimere 1a and the epimere 16a of outer tube 1 protection tube 24 is arranged, this protection tube plays the covering effect to the top edge of hypomere 16b.
Also prevented sub-cooled simultaneously by this protection tube 24 to combustion chamber 6 epimeres.
Fig. 4 illustrates the modification of a kind of simplification of the present invention, and wherein combustion chamber 6 is only enclosed by outer tube 1 ring.In order in this realization burner 12 to be cooled off comparatively fully, adsorbent is reinforced to spray nozzle 18 by burner 12, and wherein as described below, feeding pipeline 25 leads in the shell of burner 12.
Fig. 5 illustrates a kind of especially effectively modification of cool burner 12.A chamber 26 is set between emission nozzle 14 and one or more gas nozzle 13 for this reason, and this chamber concentric ring encloses emission nozzle 14.This chamber 26 on the one hand by pipeline 27 with spray nozzle 18 and be connected with the feeding device of flushing or adsorbent on the other hand.Adopt this mode can realize cooling, and don't can influence the temperature of combustion process itself the special reinforcement of burner.Therefore this modification is specially adapted to hydrogen burner or the higher combustion process of temperature.
Fig. 6,7 illustrates a kind of configuration that is used for simultaneously burning to from the waste gas of various process the time.For this reason as shown in Figure 6, with burner 12 direct neighbors be provided with two emission nozzles 14,14 ', the wherein input of relieved gas inlet 29, the 29 ' realization waste gas by separately.Gas nozzle 13 ring encloses emission nozzle 14,14 ' and by a not shown combustion gas feeding pipeline feed above annular compensating chamber 30.Article one, additional oxygen steam line 28 is responsible for burning extra high excess of oxygen is provided.
Burning reacts to each other when this waste gas mixes outside the combustion chamber uncontrollably when adopting this configuration to realize waste gas, thereby has realized the very effective utilization to waste gas purification apparatus simultaneously.
Say in principle, to waste gas pipeline road 29,29 ' quantity be hard-core, wherein only the size restrictions of burner 12 emission nozzle 14,14 ' quantity.For with many waste gas pipeline roads to realizing reliable operation, only be noted that must avoid reliably exhaust gas recirculation to waste gas pipeline road 29,29 ' in.
The Reference numeral table of comparisons
1 outer tube
The 1a epimere
The 1b hypomere
2 matrixes
3 bottoms
4 outlets
5 cover pieces
6 combustion chambers
7 washing chambers
8 holes
9 connectors
10 seams
11 scopiform ribs
12 burners
13 gas nozzles
14 emission nozzles
15 heat shieldings
Pipe in 16
The 16a epimere
The 16b hypomere
17 circumferential welds
18 spray nozzles
19 nozzle rings
20 separators
21 conduits
22 cross section reducings
23 annulus seam
24 protection tubes
25 feeding pipelines
Room 26
27 pipelines
28 oxygen steam lines
29 waste gas steam lines
30 compensating chambers
Claims (22)
1. waste gas purification apparatus, especially chemical vapour deposition (CVD), the waste gas purification apparatus that plasma pickling or similar procedure produce, have at least one and be vertically set on the interior combustion chamber of outer tube, by the upper end gauge of a umbrella shape cover piece to this combustion chamber, and have in one and to mix or the outer burner that mixes, the gas nozzle of burner stretches into the combustion chamber, wherein to the burner delivery of fuel gas, oxygen or air and waste gas, and have with oxidant and/or adsorbent flow to outside the combustion chamber the washing chamber and with the device of its discharge, it is characterized in that: burner (12) is fixed on the cover piece (5) with one heart, burner (12) has gas nozzle (13) and at least one emission nozzle (14), and the downward product of pointing to combustion chamber (6) and producing in combustion process in the vertical ground of emission nozzle is imported into washing chamber (7) along outer tube (1) inboard.
2. according to the device of claim 1, it is characterized in that: gas nozzle (13) concentric ring encloses emission nozzle.
3. according to the device of claim 1 and 2, it is characterized in that: for burner (12) is equipped with a cooling device.
4. according to each the device in the claim 1 to 3, it is characterized in that: in outer tube (1) and burner (12) top be provided with the spray nozzle (18) of an adsorbent or washing agent, this spray nozzle is nozzle ring, bores nozzle or inner cone nozzle entirely.
5. according to the device of claim 4, it is characterized in that: spray nozzle (18) is connected by the interior chamber (26) of pipeline (27) and burner (12), and adsorbent or washing agent are fed to spray nozzle (18) by this pipeline.
6. according to the device of claim 5, it is characterized in that: between gas nozzle (13) and emission nozzle (14), be provided with and have family (26) and this chamber concentric ring encloses emission nozzle.
7. according to the device of claim 1 to 6, it is characterized in that: between combustion chamber (6) and cover piece (5), be provided with the heat shielding (15) that a concentric ring encloses burner (12) and stretches downwards.
8. according to the device of claim 1 to 7, it is characterized in that: have pipe (16) in outer tube (1), pipe encloses heat shielding (15) from cover piece (5) beginning extension downwards and ring in this.
9. device according to Claim 8 is characterized in that: the space that forms between heat shielding (15) and interior pipe (16) inwall between a circumferential weld (17) and cover piece (5) and heat shielding (15) is connected with space outside the outer tube (1) by hole (8).
10. according to each the device in the claim 1 to 9, it is characterized in that: be provided with a nozzle ring (19) that has the nozzle of carrying cleaning agent in the space between cover piece (5) and heat shielding (15), the inwall of pipe (16) in these nozzles point to.
11. according to each the device in the claim 1 to 10, it is characterized in that: the lower end of combustion chamber (6) is by a matrix (2) closure, and the lowest order of matrix is equipped with an outlet (4).
12. according to each the device in the claim 1 to 11, interior pipe (16) stretches in the matrix (2) and determining deviation place termination above the bottom.
13. according to each the device in the claim 1 to 12, it is characterized in that: outer tube and interior pipe (1,16) are respectively by an upper section and a lower section (1a, 16a; 16,16b) constitute, epimere and hypomere removably interconnect.
14. the device according to claim 13 is characterized in that: matrix (2) removably is connected with the part (1b) of outer tube (1) or outer tube (1).
15. the device according to claim 13 and 14 is characterized in that: outer tube (1) epimere (1a) that has epimere (16a), heat shielding (15), hole (8) and the nozzle ring (19) of cover piece (5) and burner (1) fixed thereon, interior pipe (16) can axially move up.
16. the device according to claim 13 and 14 is characterized in that: matrix (2) can axially move down.
17. the device according to claim 13 to 15 is characterized in that: the lower end of interior pipe (16) epimere (16a) has a cross section reducing (22), and the upper end of this cross section reducing and hypomere (16b) constitutes annulus seam (23).
18. the device according to claim 17 is characterized in that: be provided with a protection tube (24) between the epimere (16a) of the epimere (1a) of outer tube (1) and interior pipe (16), this protection tube hides the top edge of hypomere (16b).
19. the device according to claim 1 to 18 is characterized in that: combustion chamber (6) link together by the outer space of conduit (21) and pipe (1) and be provided with the device that is used for burner (12) igniting and supervision in conduits (21).
20. the device according to claim 1 to 19 is characterized in that: burner (12) contains the device that is useful on its igniting and supervision.
21. the device according to claim 1 to 20 is characterized in that: one scopiform rib (11) is arranged at cover piece (5) and outer tube (1) inboard.
22. the device according to claim 1 to 21 is characterized in that: be connected by the exhaust equipment that one or more separators (21) and are used for producing combustion chamber (6) and washing chamber (7) negative pressure at the outer tube (1) of cover piece (5) top.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 96191477 CN1180402A (en) | 1995-01-23 | 1996-01-19 | Waste gas purification device |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19501914.8 | 1995-01-23 | ||
| CN 96191477 CN1180402A (en) | 1995-01-23 | 1996-01-19 | Waste gas purification device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1180402A true CN1180402A (en) | 1998-04-29 |
Family
ID=5128192
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 96191477 Pending CN1180402A (en) | 1995-01-23 | 1996-01-19 | Waste gas purification device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1180402A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102252330A (en) * | 2010-05-21 | 2011-11-23 | 中芯国际集成电路制造(上海)有限公司 | Tail gas treatment device for high-temperature furnace |
| CN105240862A (en) * | 2015-09-17 | 2016-01-13 | 洛阳明远石化技术有限公司 | Waste gas burner |
| CN107429912A (en) * | 2015-03-30 | 2017-12-01 | 爱德华兹有限公司 | For the fletcher radial burner for the incineration for being contaminated gas |
| CN107461755A (en) * | 2017-08-31 | 2017-12-12 | 江苏密斯欧智能科技有限公司 | A kind of waste gas burning purifier |
-
1996
- 1996-01-19 CN CN 96191477 patent/CN1180402A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102252330A (en) * | 2010-05-21 | 2011-11-23 | 中芯国际集成电路制造(上海)有限公司 | Tail gas treatment device for high-temperature furnace |
| CN102252330B (en) * | 2010-05-21 | 2013-05-29 | 中芯国际集成电路制造(上海)有限公司 | Tail gas treatment device for high-temperature furnace |
| CN107429912A (en) * | 2015-03-30 | 2017-12-01 | 爱德华兹有限公司 | For the fletcher radial burner for the incineration for being contaminated gas |
| US11112110B2 (en) | 2015-03-30 | 2021-09-07 | Edwards Limited | Radiant burner |
| CN107429912B (en) * | 2015-03-30 | 2023-12-22 | 爱德华兹有限公司 | Radiant burner for the incineration of contaminated gases |
| CN105240862A (en) * | 2015-09-17 | 2016-01-13 | 洛阳明远石化技术有限公司 | Waste gas burner |
| CN105240862B (en) * | 2015-09-17 | 2017-06-13 | 洛阳明远石化技术有限公司 | A kind of gas flare |
| CN107461755A (en) * | 2017-08-31 | 2017-12-12 | 江苏密斯欧智能科技有限公司 | A kind of waste gas burning purifier |
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