CN118026724A - Pore-diameter-controllable porous silicon carbide ceramic sucker prepared by gel casting and preparation method thereof - Google Patents
Pore-diameter-controllable porous silicon carbide ceramic sucker prepared by gel casting and preparation method thereof Download PDFInfo
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 80
- 239000000919 ceramic Substances 0.000 title claims abstract description 34
- 238000005266 casting Methods 0.000 title claims abstract description 32
- 229910021426 porous silicon Inorganic materials 0.000 title claims abstract description 27
- 238000002360 preparation method Methods 0.000 title claims abstract description 9
- 239000011148 porous material Substances 0.000 claims abstract description 55
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 53
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 39
- 239000002002 slurry Substances 0.000 claims abstract description 37
- 238000000034 method Methods 0.000 claims abstract description 29
- 238000000498 ball milling Methods 0.000 claims abstract description 23
- 238000001035 drying Methods 0.000 claims abstract description 23
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims abstract description 23
- 239000004926 polymethyl methacrylate Substances 0.000 claims abstract description 23
- 238000007873 sieving Methods 0.000 claims abstract description 23
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 claims abstract description 21
- 238000005245 sintering Methods 0.000 claims abstract description 20
- 239000003054 catalyst Substances 0.000 claims abstract description 18
- 239000003999 initiator Substances 0.000 claims abstract description 18
- 239000002270 dispersing agent Substances 0.000 claims abstract description 17
- 239000003431 cross linking reagent Substances 0.000 claims abstract description 16
- 238000005238 degreasing Methods 0.000 claims abstract description 12
- 239000011268 mixed slurry Substances 0.000 claims abstract description 3
- 238000002156 mixing Methods 0.000 claims abstract description 3
- 239000002245 particle Substances 0.000 claims description 23
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical group [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 claims description 12
- 239000000203 mixture Substances 0.000 claims description 10
- 238000003756 stirring Methods 0.000 claims description 10
- 239000008188 pellet Substances 0.000 claims description 7
- KWYHDKDOAIKMQN-UHFFFAOYSA-N N,N,N',N'-tetramethylethylenediamine Chemical group CN(C)CCN(C)C KWYHDKDOAIKMQN-UHFFFAOYSA-N 0.000 claims description 6
- 229910001870 ammonium persulfate Inorganic materials 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 6
- ZIUHHBKFKCYYJD-UHFFFAOYSA-N n,n'-methylenebisacrylamide Chemical group C=CC(=O)NCNC(=O)C=C ZIUHHBKFKCYYJD-UHFFFAOYSA-N 0.000 claims description 2
- 238000009826 distribution Methods 0.000 abstract description 11
- 239000003795 chemical substances by application Substances 0.000 abstract description 10
- 230000002902 bimodal effect Effects 0.000 abstract description 4
- 229910010293 ceramic material Inorganic materials 0.000 abstract description 2
- 238000001914 filtration Methods 0.000 description 8
- 238000004321 preservation Methods 0.000 description 8
- 239000000843 powder Substances 0.000 description 6
- 238000005452 bending Methods 0.000 description 5
- 238000004891 communication Methods 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 238000001879 gelation Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 239000006260 foam Substances 0.000 description 2
- 238000005187 foaming Methods 0.000 description 2
- 238000005470 impregnation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052580 B4C Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The invention relates to the technical field of ceramic materials, in particular to a pore-diameter-controllable porous silicon carbide ceramic sucker prepared by gel casting and a preparation method thereof, wherein the method comprises the following steps: (1) Placing water, acrylamide, a cross-linking agent, a dispersing agent and small balls into a ball milling tank for ball milling, then adding SiC, PMMA and B4C, and continuing ball milling to obtain gel casting slurry; (2) Sieving the gel casting slurry, sequentially adding an initiator and a catalyst into the sieved slurry, uniformly mixing, injecting the uniformly mixed slurry into a mold, standing for a period of time, and demolding, drying, degreasing and sintering to obtain a target product. Compared with the prior art, the silicon carbide ceramic sucker has the porosity of 25-50%, the pore size distribution is in bimodal distribution, the small pores form a network structure, the small pore diameter is 0.5-3 mu m, and the large pore diameter is similar to the pore-forming agent in size.
Description
Technical Field
The invention relates to the technical field of ceramic materials, in particular to a pore-diameter-controllable porous silicon carbide ceramic sucker prepared by gel casting and a preparation method thereof.
Background
The porous ceramic vacuum chuck industry for semiconductor wafers is an important link in the semiconductor manufacturing process, and is mainly used for accurately carrying and positioning the wafers in high-temperature, high-pressure and high-purity environments. Therefore, the vacuum chuck is required to have the characteristics of high strength, high temperature resistance, chemical corrosion resistance, high thermal shock resistance and the like. The vacuum chuck in the current market has the defects of low strength (the bending strength is generally slightly higher than 40 MPa), wide pore size distribution and the like, and is easy to cause the problems of unstable product performance, short service life and the like, and the use requirement of high-end users is gradually not met.
The porous silicon carbide ceramic has excellent high temperature resistance, chemical corrosion resistance, oxidation resistance, higher strength and good thermal shock resistance, and very meets the performance requirements of the porous ceramic vacuum chuck for the semiconductor wafer, and a pore structure with pore size distribution suitable for the porous ceramic chuck with higher requirements can be prepared through a certain molding process. Currently, porous silicon carbide ceramics are prepared by a plurality of methods, such as an organic foam impregnation method, a foaming method, a pore-forming agent method, gel casting and the like. However, each of these methods has disadvantages such as an organic foam impregnation method, which is weak in controllability of pore size; the foaming method has wide pore size distribution, and the pore size is difficult to regulate and control; pore size distribution of the pore-forming agent method is adjustable, but a large number of closed pores are easily caused; the pore formed by gel casting method is in a three-position communication network structure, and is used as sucking disc material, the sucking force is uniform, but the pore diameter is small, the sucking force is weak, and the like.
Disclosure of Invention
In order to overcome at least one of the following drawbacks in the prior art:
1) The pore size distribution of the porous silicon carbide ceramic prepared by the pore-forming agent method is adjustable, but a large number of closed pores are easily formed;
2) The porous silicon carbide ceramic prepared by gel casting method has three-position communication network structure, and is used as sucking disc material with uniform sucking force, but fine pore diameter and weak sucking force. The invention aims to provide a method for preparing a porous silicon carbide ceramic sucker with a communication structure and controllable pore size by combining gel casting and pore-forming agent methods.
One of the technical schemes of the invention provides a preparation method of a porous silicon carbide ceramic sucker with controllable pore diameter, which is prepared by gel casting, and comprises the following steps:
(1) Placing water, acrylamide, a cross-linking agent, a dispersing agent and small balls into a ball milling tank for ball milling, then adding SiC, PMMA and B 4 C, and continuing ball milling to obtain gel casting slurry;
(2) Sieving the gel casting slurry, sequentially adding an initiator and a catalyst into the sieved slurry, uniformly mixing, then injecting the uniformly mixed slurry into a set mold, standing for a period of time, and demoulding, drying, degreasing and sintering to obtain a target product.
Further, in the step (1), the cross-linking agent is N, N' -methylene bisacrylamide, and the dispersing agent is D305 dispersing agent.
In the step (2), the initiator is ammonium persulfate solution with the mass fraction of 2-6%, and the catalyst is tetramethyl ethylenediamine.
Further, in the step (1), ball milling is performed for 0.5 to 1 hour, siC, PMMA and B 4 C are added, and then ball milling is continued for 12 to 36 hours.
Further, the purity of SiC is 99%, and the particle size of SiC is 0.5 to 20. Mu.m.
Further, the particle size of PMMA is 5 to 50. Mu.m.
Further, the purity of B 4 C was 99%, and the particle size of B 4 C was 0.5. Mu.m.
Further, in the step (1), the mass percentage of the acrylamide to the water is 12-20%, the mass percentage of the cross-linking agent to the acrylamide is 2-4%, the volume percentage of the SiC to the sum of the SiC and the water (the water volume is the volume of the water added initially) is 30-45%, the mass percentage of the PMMA to the SiC is 5-25%, the mass percentage of the B 4 C to the SiC is 0.5-1.5%, the mass percentage of the dispersing agent to the SiC is 0.5-1.0%, and the volume ratio of the pellets to the water is 3:1.
Further, in the step (2), the mass percentage of the initiator to the water in the slurry obtained after sieving is 0.5-1.2%, and the mass percentage of the catalyst to the water in the slurry obtained after sieving is 0.5-1.0%.
Further, in the step (2), the mesh number used for sieving is 60 mesh.
Further, in the step (2), the initiator is added into the slurry obtained by sieving, and then stirred for 0.5-5 min, and then the catalyst is added, and further stirred for 0.5-2 min.
Further, in the step (2), the standing time is 1 to 10 hours.
Further, in the step (2), the drying process is as follows: firstly, placing the mixture in an environment with the humidity of 60-80% at normal temperature for 1-5 days; then placing the mixture in an environment with humidity of 30-50% at normal temperature for 1-3 days; finally, the mixture is placed for 1 to 3 days at the temperature of 65 to 70 ℃ and the humidity of 30 to 50 percent, and is dried to constant weight, and the drying process is finished.
Further, in the step (2), the degreasing and sintering process is as follows: vacuum sintering, heating at a speed of 0.3-0.7 ℃/min, degreasing at 300-400 ℃ and 500-700 ℃ for 1-2 h, final sintering at 2050-2200 ℃ for 1-3 h, and cooling with a furnace.
The second technical scheme of the invention provides a porous silicon carbide ceramic sucker with controllable aperture, which is prepared by adopting the preparation method.
When the addition amount of the acrylamide is too large, the green body has higher strength, is not easy to preprocess, and is easy to crack when degreasing; when the amount of acrylamide added is too small, the slurry cannot be gelled. The addition amounts of the cross-linking agent, the initiator and the catalyst mainly control the progress of the gel, and the addition range can be adjusted to be suitable for time, so that the sufficient operation time is provided for gel casting.
In the raw materials used in the invention, siC particles with the size of 0.5-20 mu m are mainly used for forming micron-sized three-dimensional network communication pores, PMMA is used for forming macropores with relatively controllable size, the mixed SiC particles can cover the surface of PMMA, and if the SiC particles are all fine SiC particles, the macropores can be closed, so that coarse SiC particles with the size of 0.5-20 mu m are needed to be added, and the three-dimensional network and the macropores are ensured to be mutually communicated. The invention mainly controls the porosity by adjusting the solid phase content and PMMA content of the slurry, and the pore size is mainly controlled as follows: the SiC particles control the pore diameter of the fine pores, the PMMA controls the pore diameter of the large pores, and the BC 4 is used as a sintering aid to promote the sintering of the SiC powder, so that a strength supporting framework is formed.
The invention has the beneficial effects that:
The invention combines gel casting and pore-forming agent method, uses silicon carbide micro powder (0.5-20 μm) as raw material, spherical PMMA (5-50 μm) as pore-forming agent, boron carbide (0.5 μm) as sintering aid, controls preparation condition, controls porosity, pore size and strength of porous silicon carbide, etc. to prepare high-performance porous silicon carbide ceramic sucker, the porosity of the silicon carbide ceramic sucker prepared by the method is 25-50%, pore size distribution is bimodal distribution, pores form network structure, small pore diameter is 0.5-3 μm, large pore is spherical pore, large pore diameter is similar to added pore-forming agent size (4.3-43 μm, such as 50 μm added spherical PMMA, large pore diameter is 43 μm), and bending strength of the obtained silicon carbide ceramic sucker is 60-100 MPa.
Drawings
FIG. 1 is a scanning electron microscope image of the product of example 1.
Detailed Description
In the following examples, unless otherwise specified, the raw materials or processing techniques are indicated as being conventional commercially available raw material products or conventional processing techniques in the art.
Example 1
(1) Adding water, acrylamide, a cross-linking agent and a dispersing agent (D305), adding the pellets into a ball milling tank, ball milling for half an hour, then adding SiC powder (purity 99%, particle size 1 μm), PMMA (particle size 30 μm) and B 4 C (purity 99%, particle size 0.5 μm) according to the proportion, and continuing ball milling for 12 hours to obtain the gel casting slurry.
(2) Sieving the prepared slurry, sieving with 60 mesh sieve, filtering, adding initiator (ammonium persulfate solution, mass fraction of 4%), stirring for 5min, adding catalyst (tetramethyl ethylenediamine), stirring for 1min, and finally injecting the slurry into a set mold, and waiting for gelation.
(3) After gel for 2 hours, demolding and drying are carried out, wherein the drying process is as follows: the drying temperature is normal temperature, and the mixture is placed in a humidity environment with 70% for 2 days; standing at normal temperature in an environment with 40% humidity for 1 day; and (5) standing at 68 ℃ for 2 days in an environment with 40% humidity, and drying.
(4) Vacuum sintering, wherein the heating speed is 0.5 ℃/min, degreasing is carried out at 350 ℃ and 600 ℃ respectively under the heat preservation for 2 hours, the final sintering temperature is 2150 ℃, the heat preservation is carried out for 2 hours, and the porous silicon carbide ceramic sucker is obtained after cooling along with a furnace.
In the step (1), the mass percentage of acrylamide to water is 15%, the mass percentage of cross-linking agent to acrylamide is 3%, the volume percentage of SiC to the sum of SiC and water is 40%, the mass percentage of PMMA to SiC is 10%, the mass percentage of B 4 C to SiC is 0.5%, the mass percentage of D305 dispersing agent to SiC is 0.5%, and the volume ratio of pellets to water is 3:1.
In the step (2), the mass percentage of the initiator to the water in the slurry obtained after sieving is 0.8%, and the mass percentage of the catalyst to the water in the slurry obtained after filtering is 0.6%.
The product obtained in this example has the following properties: as shown in FIG. 1, the pores are distributed in a double-peak mode, the pore diameter of the communicating pores is about 1 μm, the pore diameter of the macropores is about 25 μm, the porosity is 30.5%, and the bending strength is 80.3MPa.
Compared with comparative example 1, in the embodiment, by adding the pore-forming agent PMMA, the prepared silicon carbide ceramic sucker has spherical pores with the pore diameter of about 25 mu m besides communicating pores with the pore diameter of about 1 mu m, and the porosity is greatly improved.
Example 2
(1) Adding water, acrylamide, a cross-linking agent and a dispersing agent (D305), ball-milling for 1 hour, adding SiC powder (purity 99%, particle size of 0.5 μm), PMMA (particle size of 5 μm) and B 4 C (purity 99%, particle size of 0.5 μm) according to the proportion, and continuing ball-milling for 36 hours to obtain the gel casting slurry.
(2) Sieving the prepared slurry, sieving with 60 mesh sieve, filtering, adding initiator (ammonium persulfate solution, mass fraction of 2%), stirring for 0.5min, adding catalyst (tetramethyl ethylenediamine), stirring for 0.5min, and injecting the slurry into a set mold, and waiting for gel.
(3) After gel for 1h, demolding and drying are carried out, wherein the drying process is as follows: the drying temperature is normal temperature, and the mixture is placed in a humidity environment with 60 percent for 1 day; standing at normal temperature in 30% humidity for 3 days; and (3) standing for 1 day at 65 ℃ in an environment with 30% humidity, and drying.
(4) Vacuum sintering, wherein the heating speed is 0.3 ℃/min, degreasing is carried out at 300 ℃ and 500 ℃ respectively under the condition of heat preservation for 2 hours, the final sintering temperature is 2050 ℃, the heat preservation is carried out for 2 hours, and the porous silicon carbide ceramic sucker is obtained after cooling along with a furnace.
In the step (1), the mass percentage of acrylamide to water is 12%, the mass percentage of the cross-linking agent to acrylamide is 2%, the volume percentage of SiC to the sum of SiC and water is 30%, the mass percentage of PMMA to SiC is 5%, the mass percentage of B 4 C to SiC is 1.5%, the mass percentage of D305 dispersing agent to SiC is 1.0%, and the volume ratio of the pellets to water is 3:1.
In the step (2), the initiator accounts for 0.5% of the water in the slurry obtained after sieving, and the catalyst accounts for 0.5% of the water in the slurry obtained after filtering.
The product obtained in this example has the following properties: the pores are in bimodal distribution, the pore diameter of the communicating pores is about 0.5 mu m, the pore diameter of the spherical pores is about 4.3 mu m, the porosity is 25%, and the bending strength is 100MPa.
Example 3
(1) Adding water, acrylamide, a cross-linking agent and a dispersing agent (D305), ball-milling for 0.6 hour, adding SiC powder (purity 99%, particle size of 20 μm), PMMA (particle size of 50 μm) and B 4 C (purity 99%, particle size of 0.5 μm) according to the proportion, and continuing ball-milling for 24 hours to obtain the gel casting slurry.
(2) Sieving the prepared slurry, sieving with 60 mesh sieve, filtering, adding initiator (ammonium persulfate solution, mass fraction of 6%), stirring for 2min, adding catalyst (tetramethyl ethylenediamine), stirring for 2min, and finally injecting the slurry into a set mold, and waiting for gelation.
(3) After gel for 10 hours, demolding and drying are carried out, wherein the drying process is as follows: the drying temperature is normal temperature, and the mixture is placed in a humidity environment with 80 percent for 5 days; standing at room temperature in 50% humidity for 2 days; and (3) standing at 70 ℃ in an environment with 50% humidity for 3 days, and drying.
(4) Vacuum sintering, wherein the heating speed is 0.7 ℃/min, degreasing is carried out at 400 ℃ and 700 ℃ respectively under the heat preservation of 1.5h, the final sintering temperature is 2200 ℃, the heat preservation is 3h, and the porous silicon carbide ceramic sucker is obtained after furnace cooling.
In the step (1), the mass percentage of acrylamide to water is 20%, the mass percentage of cross-linking agent to acrylamide is 4%, the volume percentage of SiC to the sum of SiC and water is 45%, the mass percentage of PMMA to SiC is 25%, the mass percentage of B 4 C to SiC is 1.0%, the mass percentage of D305 dispersing agent to SiC is 0.7%, and the volume ratio of pellets to water is 3:1.
In the step (2), the mass percentage of the initiator to the water in the slurry obtained after sieving is 1.2%, and the mass percentage of the catalyst to the water in the slurry obtained after filtering is 1.0%.
The product obtained in this example has the following properties: the pores are in bimodal distribution, the pore diameter of the communicating pores is about 3 mu m, the pore diameter of the spherical pores is about 43 mu m, the porosity is 50%, and the bending strength is 60MPa.
Comparative example 1
In this comparative example, compared with example 1, only the gel casting process was used, and the pore-forming agent PMMA was not added.
(1) Adding water, acrylamide, a cross-linking agent and a dispersing agent (D305) into a ball milling tank, ball milling for half an hour, then adding SiC powder (purity 99%, particle size 1 μm) and B 4 C (purity 99%, particle size 0.5 μm) according to the proportion, and continuing ball milling for 12 hours to obtain the gel casting slurry.
(2) Sieving the prepared slurry, sieving with 60 mesh sieve, filtering, adding initiator (ammonium persulfate solution, mass fraction of 4%), stirring for 5min, adding catalyst (tetramethyl ethylenediamine), stirring for 1min, and finally injecting the slurry into a set mold, and waiting for gelation.
(3) After gel for 2 hours, demolding and drying are carried out, wherein the drying process is as follows: the drying temperature is normal temperature, and the mixture is placed in a humidity environment with 70% for 2 days; standing at normal temperature in an environment with 40% humidity for 1 day; and (5) standing at 68 ℃ for 2 days in an environment with 40% humidity, and drying.
(4) Vacuum sintering, wherein the heating speed is 0.5 ℃/min, degreasing is carried out at 350 ℃ and 600 ℃ respectively under the heat preservation for 2 hours, the final sintering temperature is 2150 ℃, the heat preservation is carried out for 2 hours, and the porous silicon carbide ceramic sucker is obtained after cooling along with a furnace.
In the step (1), the mass percentage of acrylamide to water is 15%, the mass percentage of cross-linking agent to acrylamide is 3%, the percentage of SiC volume to the sum of SiC and water volume is 40%, the mass percentage of B 4 C to SiC is 0.5%, the mass percentage of D305 dispersing agent to SiC is 0.5%, and the volume ratio of the pellets to water is 3:1.
In the step (2), the mass percentage of the initiator to the water in the slurry obtained after sieving is 0.8%, and the mass percentage of the catalyst to the water in the slurry obtained after filtering is 0.6%.
The properties of the product obtained in this comparative example: the pores are unimodal, the pore diameter is a three-position communication network, the pore diameter is about 1 mu m, and the porosity is 17.1%.
The above embodiments are preferred embodiments of the present invention, and besides, the present invention may be implemented in other ways, and any obvious substitution is within the scope of the present invention without departing from the concept of the present invention.
Claims (10)
1. The preparation method of the pore-diameter-controllable porous silicon carbide ceramic sucker prepared by gel casting is characterized by comprising the following steps of:
(1) Placing water, acrylamide, a cross-linking agent, a dispersing agent and small balls into a ball milling tank for ball milling, then adding SiC, PMMA and B 4 C, and continuing ball milling to obtain gel casting slurry;
(2) Sieving the gel casting slurry, sequentially adding an initiator and a catalyst into the sieved slurry, uniformly mixing, then injecting the uniformly mixed slurry into a set mold, standing for a period of time, and demoulding, drying, degreasing and sintering to obtain a target product.
2. The method for preparing the pore-size-controllable porous silicon carbide ceramic sucker by gel casting according to claim 1, wherein in the step (1), the cross-linking agent is N, N' -methylenebisacrylamide, and the dispersing agent is D305 dispersing agent.
3. The method for preparing the pore-diameter-controllable porous silicon carbide ceramic sucker by gel casting according to claim 1, wherein in the step (2), the initiator is ammonium persulfate solution with the mass fraction of 2-6%, and the catalyst is tetramethyl ethylenediamine.
4. The method for preparing the pore-diameter-controllable porous silicon carbide ceramic sucker by gel casting according to claim 1, wherein in the step (1), ball milling is performed for 0.5-1 hour, and after SiC, PMMA and B 4 C are added, ball milling is continued for 12-36 hours.
5. The method for preparing the pore-diameter controllable porous silicon carbide ceramic sucker by gel casting according to claim 1, wherein the purity of SiC is 99%, and the particle size of SiC is 0.5-20 μm;
The particle size of PMMA is 5-50 mu m;
The purity of B 4 C was 99%, and the particle size of B 4 C was 0.5. Mu.m.
6. The method for preparing the pore-diameter-controllable porous silicon carbide ceramic sucker by gel casting according to claim 1, wherein in the step (1), the mass percentage of acrylamide to water is 12-20%, the mass percentage of cross-linking agent to acrylamide is 2-4%, the volume percentage of SiC to the sum of SiC and water is 30-45%, the mass percentage of PMMA to SiC is 5-25%, the mass percentage of B 4 C to SiC is 0.5-1.5%, the mass percentage of dispersing agent to SiC is 0.5-1.0%, and the volume ratio of pellets to water is 3:1; in the step (2), the initiator accounts for 0.5 to 1.2 percent of the mass of water in the slurry obtained after sieving, and the catalyst accounts for 0.5 to 1.0 percent of the mass of water in the slurry obtained after sieving.
7. The method for preparing the pore-diameter-controllable porous silicon carbide ceramic sucker by gel casting according to claim 1, wherein in the step (2), the mesh number of the sieve used for sieving is 60 meshes;
In the step (2), adding an initiator into the slurry obtained by sieving, stirring for 0.5-5 min, then adding a catalyst, and stirring for 0.5-2 min;
in the step (2), the standing time is 1-10 h.
8. The method for preparing the pore-size-controllable porous silicon carbide ceramic sucker by gel casting according to claim 1, wherein in the step (2), the drying process is as follows: firstly, placing the mixture in an environment with the humidity of 60-80% at normal temperature for 1-5 days; then placing the mixture in an environment with humidity of 30-50% at normal temperature for 1-3 days; finally, the mixture is placed for 1 to 3 days at the temperature of 65 to 70 ℃ and the humidity of 30 to 50 percent, and the drying process is finished.
9. The method for preparing the pore-size-controllable porous silicon carbide ceramic sucker by gel casting according to claim 1, wherein in the step (2), the degreasing and sintering process is as follows: vacuum sintering, heating at a speed of 0.3-0.7 ℃/min, degreasing at 300-400 ℃ and 500-700 ℃ for 1-2 h, final sintering at 2050-2200 ℃ for 1-3 h, and cooling with a furnace.
10. The porous silicon carbide ceramic sucker with controllable pore diameter prepared by gel casting is characterized in that the silicon carbide ceramic sucker is prepared by the preparation method according to any one of claims 1-9.
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