CN117961979A - Replacement device and replacement method for magnetic field cold head of single crystal furnace - Google Patents

Abstract

The invention provides a replacement device and a replacement method for a magnetic field cold head of a single crystal furnace, and relates to the technical field of single crystal furnace equipment maintenance; an opening is arranged at the lower corner of the isolation box body, the isolation box body can be tightly fixed on the magnetic field function box of the magnetic field of the single crystal furnace through the opening, and a cold head inserted on the magnetic field function box is positioned in the isolation box body; the front and the back of the isolation box body are symmetrically provided with a pair of isolation operation gloves, the isolation operation gloves are isolated from the inside of the isolation box body, the isolation operation gloves extend into the inside of the isolation box body, and operators can spread the positions of the new cold head and the old cold head after maintenance through the isolation operation gloves; the upper end of the isolation box body is provided with an exhaust port, and the lower end of the isolation box body is provided with an inflation inlet for filling rare gas into the isolation box body and exhausting air from the exhaust port. The scheme can shorten the replacement time of the magnetic field cold head of the single crystal furnace, and further improve the production efficiency of single crystal silicon.

Description

Replacement device and replacement method for magnetic field cold head of single crystal furnace

Technical Field

The invention relates to the technical field of maintenance of single crystal furnace equipment, in particular to a device and a method for replacing a magnetic field cold head of a single crystal furnace.

Background

The semiconductor single crystal growth furnace is a necessary device in the process of converting polycrystal into single crystal silicon, and the single crystal silicon is a basic raw material in the semiconductor industry. Monocrystalline silicon is one of the most important monocrystalline materials in the world at present as a key supporting material of modern information equipment, and is also a main functional material for developing computers and integrated circuits.

At present, a single crystal furnace for growing large-size crystals is provided with a magnetic field, the cold head needs to be maintained after the magnetic field runs for a period of time, the magnetic field needs to be heated to a normal temperature state, then the cold head in the normal temperature state is replaced, and then the replaced cold head is cooled to the working temperature and then is operated. However, the whole process can not shorten the time from the cold state to the normal temperature by heating the cold head, and the cold head can be damaged by the influence of air when being directly replaced in the cold state, so that the whole cold head replacing time can be generally about 36 days, and the production efficiency of monocrystalline silicon is seriously influenced.

Disclosure of Invention

In view of the above, it is necessary to provide a device and a method for replacing a magnetic field cold head of a single crystal furnace, so as to shorten the replacement time of the magnetic field cold head of the single crystal furnace and further improve the production efficiency of single crystal silicon.

In a first aspect, the present invention provides a device for replacing a magnetic field cold head of a single crystal furnace, including: a transparent isolation box body and isolation operation gloves; the lower corner of the isolation box body is provided with an inverted L-shaped unfilled corner opening, the isolation box body can be tightly fixed on a magnetic field functional box of a magnetic field of the single crystal furnace through the inverted L-shaped unfilled corner opening, and a cold head inserted on the magnetic field functional box is positioned in the isolation box body; the front and the back of isolation box all symmetry is provided with a pair of isolation operation gloves, and this isolation operation gloves is isolated with isolation box is inside, and operating personnel can wear the isolation operation gloves and stretch into the inside of isolation box with the hand, isolation operation glove's length satisfies: after the isolation box body is installed, operators can spread the positions of the new cold head after maintenance and the old cold head on the magnetic field functional box through the isolation operation gloves; the upper end of the isolation box body is provided with an exhaust port, and the lower end of the isolation box body is provided with an inflation inlet for filling rare gas into the isolation box body and exhausting air in the isolation box body from the exhaust port.

Preferably, the isolation box body is of a rectangular structure.

Preferably, the outer surface of the isolation box body, which is close to the magnetic field, is an arc-shaped surface, the arc-shaped surface can be attached to the arc-shaped surface of the magnetic field, and other surfaces of the isolation box body are all planar structures.

Preferably, the isolation box body is made of an acrylic plate.

Preferably, the edges of the openings of the inverted L-shaped unfilled corners are provided with sealing strips.

Preferably, the replacing device further comprises a cold head storage rack, wherein the cold head storage rack is used for being fixed on the magnetic field functional box before the cold head is replaced, and a plurality of jacks are arranged on the cold head storage rack and used for inserting the maintained new cold head and the replaced old cold head.

Preferably, a gas detector is arranged at the gas outlet and is used for detecting the gas components discharged from the gas outlet.

Preferably, the isolation operating glove is made of a heat insulating material.

In a second aspect, the present invention also provides a method for replacing a magnetic field cold head of a single crystal furnace, which is implemented based on the device for replacing a magnetic field cold head of a single crystal furnace according to the first aspect, and includes the following steps:

Step 101: the cold head storage rack is fixedly arranged on a magnetic field functional box where the cold head to be replaced is positioned;

step 102: respectively inserting the two maintained new cold heads sealed by the isolation protection cover into the insertion holes of the installed cold head storage rack;

Step 103: the opening of the inverted L-shaped unfilled corner of the isolation box body is fixedly arranged on the magnetic field functional box, and the cold head storage rack on the magnetic field functional box are positioned in the isolation box body;

step 104: filling rare gas into the isolation box body through an inflation inlet at the lower end of the isolation box body, and opening a valve at an exhaust port to discharge gas;

Step 105: detecting the discharged gas components through a gas detector arranged at the gas outlet, and closing valves at the gas charging port and the gas outlet if the discharged gas components are completely the components of the filled rare gas;

Step 106: an operator takes off the old cold head to be replaced through the isolation operation glove on the isolation box body, inserts the old cold head into the jack of the cold head storage rack, takes a new cold head after maintenance from the jack of the cold head storage rack, removes the isolation protection cover on the new cold head, and installs the new cold head at the corresponding position on the magnetic field functional box;

step 107: replacing another coldhead in accordance with the operation of step 106;

Step 108: after the cold head is replaced, the valve of the exhaust port is opened, the isolation box body is disassembled, the replaced cold head is taken down, and the cold head storage rack is disassembled.

Preferably, in the process of executing step 104, further includes: and (3) in the process of filling rare gas, checking the gas tightness between the isolation box body and the magnetic field functional box, and additionally arranging a gas sealing strip at the position where gas leakage occurs.

According to the technical scheme, in the replacement device and the replacement method for the magnetic field cold head of the single crystal furnace, the device is mainly characterized in that the isolation box body is formed by the transparent isolation box body and the isolation operation glove and can be fixed on the magnetic field function box of the magnetic field through the opening of the inverted L-shaped unfilled corner, so that the magnetic field cold head is positioned in the closed space formed by the magnetic field function box and the isolation box body, rare gas is further filled into the closed space through the charging opening, and air in the closed space is discharged from the exhaust hole, so that the closed space is in a rare gas atmosphere. At the moment, the cold head to be replaced is replaced through the isolation operation glove, the cold head cannot be contacted with air, and the cold head cannot be damaged due to the influence of air in a cold state. Therefore, the cold head does not need to be heated to normal temperature and then replaced by the scheme, so that the replacement time of the magnetic field cold head of the single crystal furnace is greatly shortened, and the production efficiency of single crystal silicon is further improved.

Drawings

Fig. 1 is a schematic diagram of an assembly and an internal structure of a replacement device for a magnetic field cold head of a single crystal furnace according to an embodiment of the present invention.

Fig. 2 is an opening schematic diagram of a device for replacing a magnetic field cold head of a single crystal furnace according to an embodiment of the present invention.

Fig. 3 is an assembly schematic diagram of a device for replacing a magnetic field cold head of a single crystal furnace according to an embodiment of the present invention.

Fig. 4 is a flowchart of a method for replacing a magnetic field cold head of a single crystal furnace according to an embodiment of the present invention.

In the figure: the isolation box body 1, the isolation operation glove 2, the opening 3, the single crystal furnace magnetic field 4, the magnetic field function box 5, the old cold head 6, the new cold head 7, the exhaust port 8, the inflation inlet 9, the cold head storage rack 10 and the jack 11.

Detailed Description

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Referring to fig. 1-3, an embodiment of the present invention provides a device for replacing a magnetic field cold head of a single crystal furnace, including: a transparent isolation box body 1 and an isolation operation glove 2; the lower corner of the isolation box body 1 is provided with an opening 3 with an inverted L-shaped unfilled corner, the isolation box body 1 can be tightly fixed on a magnetic field functional box 5 of a magnetic field 4 of the single crystal furnace through the opening 3 with the inverted L-shaped unfilled corner, and a cold head inserted on the magnetic field functional box 5 is positioned in the isolation box body 1; the front and the back of the isolation box body 1 are symmetrically provided with a pair of isolation operation gloves 2, the isolation operation gloves 2 are isolated from the inside of the isolation box body 1, operators can wear the isolation operation gloves 2 to stretch hands into the inside of the isolation box body 1, and the length of the isolation operation gloves 2 is as follows: after the isolation box body 1 is installed, an operator can spread the isolation operation glove 2 to the positions of the new cold head 7 after maintenance and the old cold head 6 on the magnetic field functional box 5; the upper end of the isolation box body 1 is provided with an exhaust port 8, and the lower end is provided with an inflation inlet 9 for inflating rare gas into the isolation box body 1 and exhausting air in the isolation box body 1 from the exhaust port 8.

In this embodiment, the isolation box 1 may be a rectangular structure as a whole, specifically may be a structure in which a small cuboid is cut off for the lower corner of the cuboid, the small cuboid is an opening 3 of the isolation box 1, and the opening 3 is used for placing a cold head on the magnetic field functional box 5 inside the isolation box 1 and is used for being fixed on the magnetic field functional box 5.

In order to further make the device more compact and to make the cold head to be replaced after the device is mounted on the magnetic field functional box 5 closer to the central position of the isolation box 1, in one embodiment, the isolation box 1 may be further considered to be provided with an arc surface near the outer surface of the magnetic field, and the arc surface can be attached to an arc surface of the magnetic field. Thus, after the isolation box body 1 is installed on the magnetic field functional box 5, the surface close to the magnetic field can be tightly attached to the outer surface of the annular magnetic field, so that the cold head on the magnetic field functional box 5 is closer to the center of the isolation box body 1, and the operation of operators is facilitated. Of course, other surfaces of the isolation box 1 may still be provided in a planar configuration, making the device more convenient to manufacture.

For the isolation box body 1, each surface of the isolation box body 1 can be prepared by using a transparent acrylic plate, the transparency of the acrylic plate is good, the operation and observation of operators are convenient, and the acrylic plate also has the advantages of strong plasticity, difficult deformation, long service life, low cost and the like. The adjacent acrylic plates can be connected by section bars. Of course, in some embodiments, the whole isolation box 1 can also be manufactured by integrally forming acrylic materials, so that connection between adjacent acrylic plates is avoided.

The isolation box 1 is fixed on the magnetic field functional box 5 through the edge of the opening 3 with an inverted L-shaped unfilled corner, such as through bolt and nut matching, slot matching and the like. In order to ensure the tightness of the connection between the insulating casing 1 and the magnetic field functional casing 5, in one embodiment, it is considered to provide sealing strips at the edges of the opening 3 of the inverted-L-shaped unfilled corner, avoiding the escape of the filled rare gas and, more importantly, the entry of external air into the insulating casing 1. Of course, in order to further enhance the sealing, both the outer edge and the inner edge of the insulation box 1 may be provided with sealing strips, i.e. sealing from the inside and the outside at the same time.

The new cold head 7 after maintenance and the old cold head 6 after replacement can be placed on the bottom surface of the isolation box 1, or hung at a certain position, or when two people operate simultaneously, one of the two people is replaced, and the other is used for holding the new cold head 7 or the old cold head 6. In order to facilitate the operation of the operator, in one embodiment, the replacing device may further comprise a cold head rack 10, wherein the cold head rack 10 is used for being fixed on the magnetic field functional box 5 before the replacement operation is performed on the cold head, and a plurality of insertion holes 11 are formed in the cold head rack 10 for inserting the new cold head 7 after maintenance and the old cold head 6 after replacement.

In this embodiment, the new cold head 7 after maintenance can be placed on the cold head rack 10, and the replaced old cold head 6 can also be placed on the cold head rack 10, so that even one person can complete the cold head replacement operation. For example, three insertion holes 11 are formed in the cold head rack 10, two new cold heads 7 are respectively inserted into the insertion holes before replacement, when the socket is replaced, one old cold head 6 is taken down and then is placed into the other insertion hole 11, then one new cold head 7 is taken down for replacement, and similarly, replacement of the other old cold head 6 is completed. Of course, it is also possible for two operators to exchange two old coldheads 6 simultaneously by operating the isolating glove on the front and on the back.

In order to ensure that the inside of the isolation box 1 is in a rare gas atmosphere during the replacement operation, it is also conceivable to provide a gas detector at the gas outlet 8 for detecting the gas component discharged from the gas outlet 8, and if it is detected that the gas component discharged from the gas outlet 8 is completely in a rare gas component, it is indicated that the air in the isolation box 1 is completely discharged and the inside is all in a rare gas, thereby ensuring the atmosphere of the rare gas in the isolation box 1 during the replacement operation. It will be understood, of course, that the composition of the fully rare gas is not an absolute concept, and that the rare gas is considered to be fully rare when it reaches a certain concentration.

In addition, argon is generally used as the rare gas, and argon is heavier than air, and the air in the isolation box 1 is above and the argon is below. It is therefore considered to provide the air charging port 9 at the bottom end and the air discharging port 8 at the top end, thereby accelerating the discharge of air while ensuring that air is not deposited under the isolation box 1 and cannot be discharged.

Because the cold head is replaced in a cold state, the temperature of the cold head is very low, and in general, an operator replaces the cold head through a handle which is not in a low temperature on the cold head during replacement, and in order to avoid the operator from frostbite caused by mistakenly touching the cold head in a cold state, the isolation operation glove 2 is considered to be made of a heat insulation material so as to protect the hand of the operator from frostbite caused by mistakenly touching the cold head.

Referring to fig. 4, the embodiment of the invention also provides a method for replacing the magnetic field cold head of the single crystal furnace, which is implemented based on the replacing device of the magnetic field cold head of the single crystal furnace in any embodiment, and comprises the following steps:

Step 101: the cold head storage rack 10 is fixedly arranged on the magnetic field functional box 5 where the cold head to be replaced is positioned;

step 102: inserting the two new cold heads 7 sealed by the isolation protection cover into the insertion holes 11 of the cold head storage rack 10;

step 103: the inverted L-shaped unfilled corner opening 3 of the isolation box body 1 is fixedly arranged on the magnetic field functional box 5, and the cold head storage rack 10 on the magnetic field functional box 5 are positioned in the isolation box body 1;

step 104: filling rare gas into the isolation box body 1 through an inflation inlet 9 at the lower end of the isolation box body 1, and opening a valve at an exhaust port 8 to discharge gas;

Step 105: detecting the discharged gas component by a gas detector arranged at the gas outlet 8, and closing the valves at the gas inlet 9 and the gas outlet 8 if the discharged gas component is completely the component of the filled rare gas;

Step 106: an operator removes the old cold head 6 to be replaced through the isolation operation glove 2 on the isolation box body 1, inserts the old cold head 6 into the jack 11 of the cold head storage rack 10, takes a new cold head 7 after maintenance from the jack 11 of the cold head storage rack 10, removes the isolation protection cover on the new cold head 7, and installs the new cold head 7 at the corresponding position on the magnetic field functional box 5;

step 107: replacing another coldhead in accordance with the operation of step 106;

step 108: after the cold head is replaced, the valve of the exhaust port 8 is opened, the isolation box body 1 is disassembled, the replaced cold head is taken down, and the cold head storage rack 10 is disassembled.

In one embodiment, in the process of executing step 104, the gas tightness between the isolation box 1 and the magnetic field functional box 5 can be checked at the same time in the process of filling rare gas, if a gas leakage is found, the gas tightness can be ensured to be good by means of adjusting the position of the sealing body or adding a gas sealing strip at the position of the gas leakage.

The method embodiments and the apparatus embodiments are based on the same inventive concept, and the corresponding descriptions of the method embodiments may be referred to the related descriptions of the apparatus embodiments, which are not repeated herein.

The modules or units in the device of the embodiment of the invention can be combined, divided and deleted according to actual needs. The foregoing disclosure is illustrative of the preferred embodiments of the present invention, and is not to be construed as limiting the scope of the invention, as it is understood by those skilled in the art that all or part of the above-described embodiments may be practiced with equivalents thereof, which fall within the scope of the invention as defined by the appended claims.

Claims (10)

1. The utility model provides a change device of single crystal growing furnace magnetic field cold head which characterized in that includes: a transparent isolation box body and isolation operation gloves; the lower corner of the isolation box body is provided with an inverted L-shaped unfilled corner opening, the isolation box body can be tightly fixed on a magnetic field functional box of a magnetic field of the single crystal furnace through the inverted L-shaped unfilled corner opening, and a cold head inserted on the magnetic field functional box is positioned in the isolation box body; the front and the back of isolation box all symmetry is provided with a pair of isolation operation gloves, and this isolation operation gloves is isolated with isolation box is inside, and operating personnel can wear the isolation operation gloves and stretch into the inside of isolation box with the hand, isolation operation glove's length satisfies: after the isolation box body is installed, operators can spread the positions of the new cold head after maintenance and the old cold head on the magnetic field functional box through the isolation operation gloves; the upper end of the isolation box body is provided with an exhaust port, and the lower end of the isolation box body is provided with an inflation inlet for filling rare gas into the isolation box body and exhausting air in the isolation box body from the exhaust port.

2. The replacement device for the magnetic field cold head of the single crystal furnace according to claim 1, wherein the isolation box body is of a rectangular structure.

3. The replacement device for the magnetic field cold head of the single crystal furnace according to claim 1, wherein the outer surface of the isolation box body, which is close to the magnetic field, is an arc-shaped surface, the arc-shaped surface can be attached to the arc-shaped surface of the magnetic field, and other surfaces of the isolation box body are all planar structures.

4. The replacement device for the magnetic field cold head of the single crystal furnace according to claim 2 or 3, wherein the isolation box body is made of an acrylic plate.

5. The replacement device for the magnetic field cold head of the single crystal furnace according to claim 1, wherein sealing strips are arranged at edges of the opening of the inverted-L-shaped unfilled corner.

6. The replacement device for the magnetic field cold head of the single crystal furnace according to claim 1, further comprising a cold head storage rack, wherein the cold head storage rack is used for being fixed on the magnetic field functional box before the replacement operation is performed on the cold head, and a plurality of jacks are arranged on the cold head storage rack and used for inserting a new cold head after maintenance and an old cold head after replacement.

7. The replacement device for the magnetic field cold head of the single crystal furnace according to claim 1, wherein a gas detector is arranged at the gas outlet and is used for detecting gas components discharged from the gas outlet.

8. The replacement device for a magnetic field coldhead of a single crystal furnace of claim 1, wherein the isolation operating glove is made of a thermally insulating material.

9. A method for replacing a magnetic field coldhead of a single crystal furnace, which is implemented based on a device for replacing a magnetic field coldhead of a single crystal furnace according to claims 1-8, comprising the steps of:

Step 101: the cold head storage rack is fixedly arranged on a magnetic field functional box where the cold head to be replaced is positioned;

step 102: respectively inserting the two maintained new cold heads sealed by the isolation protection cover into the insertion holes of the installed cold head storage rack;

Step 103: the opening of the inverted L-shaped unfilled corner of the isolation box body is fixedly arranged on the magnetic field functional box, and the cold head storage rack on the magnetic field functional box are positioned in the isolation box body;

step 104: filling rare gas into the isolation box body through an inflation inlet at the lower end of the isolation box body, and opening a valve at an exhaust port to discharge gas;

Step 105: detecting the discharged gas components through a gas detector arranged at the gas outlet, and closing valves at the gas charging port and the gas outlet if the discharged gas components are completely the components of the filled rare gas;

Step 106: an operator takes off the old cold head to be replaced through the isolation operation glove on the isolation box body, inserts the old cold head into the jack of the cold head storage rack, takes a new cold head after maintenance from the jack of the cold head storage rack, removes the isolation protection cover on the new cold head, and installs the new cold head at the corresponding position on the magnetic field functional box;

step 107: replacing another coldhead in accordance with the operation of step 106;

Step 108: after the cold head is replaced, the valve of the exhaust port is opened, the isolation box body is disassembled, the replaced cold head is taken down, and the cold head storage rack is disassembled.

10. The method of claim 9, wherein in performing step 104, further comprising: and (3) in the process of filling rare gas, checking the gas tightness between the isolation box body and the magnetic field functional box, and additionally arranging a gas sealing strip at the position where gas leakage occurs.