CN117950118A - Reflective super-structured surface space division multiplexing device and optoelectronic device - Google Patents
Reflective super-structured surface space division multiplexing device and optoelectronic device Download PDFInfo
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- 230000005693 optoelectronics Effects 0.000 title claims abstract description 10
- 239000013307 optical fiber Substances 0.000 claims abstract description 52
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 239000000835 fiber Substances 0.000 claims description 35
- 230000003287 optical effect Effects 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 8
- 238000002310 reflectometry Methods 0.000 claims description 5
- 239000002131 composite material Substances 0.000 claims description 3
- 230000000737 periodic effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 9
- 230000008878 coupling Effects 0.000 abstract description 8
- 238000010168 coupling process Methods 0.000 abstract description 8
- 238000005859 coupling reaction Methods 0.000 abstract description 8
- 230000008569 process Effects 0.000 abstract description 6
- 239000010410 layer Substances 0.000 abstract description 4
- 239000002356 single layer Substances 0.000 abstract description 3
- 230000033228 biological regulation Effects 0.000 abstract description 2
- 239000010409 thin film Substances 0.000 abstract description 2
- 238000009826 distribution Methods 0.000 description 14
- 230000005540 biological transmission Effects 0.000 description 7
- 238000013461 design Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000004891 communication Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000004038 photonic crystal Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000001603 reducing effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
Abstract
The invention provides a reflective super-structured surface space division multiplexing device and an optoelectronic device, which relate to the field of optoelectronic devices, and comprise a substrate, a super-structured surface and a reflecting mirror, wherein the super-structured surface is positioned on one side of the substrate, the positions of the super-structured surface correspond to the positions of an input end optical fiber and an output end optical fiber respectively, and the reflecting mirror is positioned on the other side of the substrate; the mirrors reflect the light field back to the super-structured surface, which optimizes the propagation result of the light field from the input end to the output end. In the space division multiplexing occasion, the multiplexing/de-multiplexing process of the multi-core optical fiber is taken as an example, and the coupling between the multi-core optical fiber and the single-mode optical fiber can be realized in a short distance by using the single-layer super-structured surface and the thin film reflecting layer through the regulation and control of the super-structured surface.
Description
Technical Field
The invention relates to the field of optoelectronic devices, in particular to a reflective super-structured surface space division multiplexing device and an optoelectronic device.
Background
Optical fiber communication is a communication mode using light waves as carrier waves and optical fibers as transmission media. The optical fiber has large transmission capacity, long distance, strong anti-interference performance, reduced signal attenuation, and transmission rate far greater than that of cables and radios, and becomes a main transmission mode in world communication.
With the social development and the technical progress, the information amount required by people is increased, the transmission capacity of the single-core single-mode fiber is approaching to the limit at present, and the multi-core fiber can improve the integration density of a single fiber per unit area by using the concept of space division multiplexing, so that the space division multiplexing/demultiplexing device becomes an important development direction in the future. The efficient coupling between different fiber cores of the optical fiber is generally realized by fusion tapering of the optical fiber bundle, laser direct writing body waveguide in a block medium or a method based on a space optical path and the like. However, these methods have the disadvantage of large volume, which is not beneficial to the occasion of integrating the photonic devices, and the manufacturing process is complex, so that it is difficult to ensure the uniformity of each channel.
The super-structured surface is used as a technology which is rapidly developed in recent years, and can well simplify complex three-dimensional optical structures. The super-structured surface is a two-dimensional array formed by periodically arranging discrete sub-wavelength structures, and the amplitude, phase, polarization and other characteristics of electromagnetic waves with specific wavelengths can be modulated by selecting proper materials and changing the structural parameters of the microstructure. As the process of micro-structure such as ion beam etching, electron beam exposure, etc. has become mature, the process precision of super-structured surface devices is continuously improved, and attention is paid to the unique planar structure, extremely high modulation precision and design flexibility. The performance of current super-structured surface devices has been comparable to conventional optical devices, even in some special applications. Due to the advantages of small super-surface volume, light weight, flexible design and the like, the optical fiber is very suitable for being applied to occasions of optical fiber communication.
Disclosure of Invention
In view of the defects in the prior art, the invention aims to provide a reflective super-structured surface space division multiplexing device and an optoelectronic device, and the optical field entering and leaving the device is modulated by processing and generating a super-structured surface with accurate design and a reflecting mirror on the other side on one side of a substrate, so that an optical signal in an input optical fiber can be transmitted to a fiber core at a corresponding position of a receiving optical fiber. The technology can realize a miniaturized and planarized space division multiplexing device, and can improve the integral coupling efficiency by changing the super-structure surface structure or adapt to different numbers of input and output fiber cores. Taking the ultra-structured surface fan-in fan-out device suitable for four-core optical fibers to four single-mode optical fibers as an example, the size of the device is 635 microns by 127 microns, and the thickness is only about 600 mm.
The invention provides a reflective super-structured surface space division multiplexing device, which comprises a substrate, a super-structured surface and a reflecting mirror, wherein the super-structured surface is positioned on one side of the substrate, the positions of the super-structured surface correspond to the positions of an input end optical fiber and an output end optical fiber respectively, and the reflecting mirror is positioned on the other side of the substrate; the mirrors reflect the light field back to the super-structured surface, which optimizes the propagation result of the light field from the input end to the output end.
Preferably, the super-structured surface is an array of sub-wavelength scale microstructures arranged in two dimensions in a periodic fashion, the super-structured surface modulating the optical signals entering and exiting the device by the microstructures.
Preferably, the super-structured surface regulates and controls the light field incident from the input optical fiber, and after the light beam propagates to the next surface in the substrate and is reflected back by the reflecting mirror, the super-structured surface regulates and controls the light field secondarily, so that the incident light beam finally propagates to the position of the fiber core to be coupled and is converted into a mode in the optical fiber meeting the requirement.
Preferably, the super-structured surface comprises a first super-structured surface and a second super-structured surface, and the second super-structured surface is distributed on the periphery of the first super-structured surface;
The first super-structured surface performs primary modulation to enable the light field to be reflected and then to be directed to the position of the fiber core of the corresponding output end, and the second super-structured surface further converges the light field energy into the fiber core of the optical fiber.
Preferably, the diameter of the first super-structured surface is 40-45 microns.
Preferably, the diameter of the second super-structured surface is 120-130 microns.
Preferably, the number of input end fibers and output end fibers is equal or unequal.
Preferably, the microstructure of the super-structured surface includes, but is not limited to, a cylindrical structure, and the structural morphology of the microstructure meets the optical wave modulation requirements for the operating wavelength.
Preferably, the material of the reflecting mirror is a material that achieves high reflectivity or a composite dielectric film having high reflectivity characteristics.
The invention also provides an optoelectronic device comprising the reflective super-structured surface space division multiplexing device.
Compared with the prior art, the invention has the following beneficial effects:
(1) The super-structured surface unit can modulate the light field emitted by the fiber core at the input end, and control the light field to propagate into the fiber core at the output end to be coupled; the super-structured surface space division multiplexing device does not need to redesign the existing optical fiber parameters, can be purposefully designed, manufactured, processed and large-scale flow sheet according to the parameters of products which are widely applied in the market, and has wide applicability and flexibility; meanwhile, the invention is a plane structure, the thickness can be below 1 millimeter, and when in use, one side of a group of optical fibers (or optical integrated devices) can be directly inserted, so that the integration is convenient and quick, and as the devices are non-contact, the risk of damaging end surfaces can not be brought, the subsequent packaging is convenient, and the volume of the system can be also extremely large;
(2) The super-structured surface can obtain a high-performance low-loss modulation effect through simulation calculation and optimization, and can be flexibly and accurately designed according to the actual situation so as to meet the application in different occasions; in addition, due to the modulation principle of the super-structured surface, the influence caused by errors in the production and manufacturing process can be reduced; therefore, the strategy processing of the super-structured surface is convenient, the production and manufacturing flow can be simplified while the modulation precision is improved, the cost is reduced, and the large-scale production is realized;
(3) Although the super-structured surface is processed on one side of the substrate, the light field can still be modulated twice due to the existence of the reflecting layer, and the modulation effect is far better than that of a single-layer super-structured surface device; the distance between the input end and the device can also be increased by the divergence of the emergent light of the end face of the optical fiber, the modulation area is increased, the difficulty that fine light field modulation cannot be directly carried out due to the fact that the fiber core is too small is solved, and the connection between fiber cores of single-mode fibers below 10 microns can be effectively realized by carrying out common modulation through a group of super-structured surface units before and after reflection;
(4) The super-structured surface unit can adopt different microstructure modulation strategies, for example, different materials are adopted to adapt to application scenes under different working wavelengths, different output responses can be realized aiming at different input polarization states, and more functions such as achromatism and the like can be realized by adopting a more complex composite structure.
Drawings
Other features, objects and advantages of the present invention will become more apparent upon reading of the detailed description of non-limiting embodiments, given with reference to the accompanying drawings in which:
FIG. 1 is a schematic diagram of a reflective super-structure surface space division multiplexing device according to the present invention;
FIG. 2 is a graph showing the intensity distribution of the front surface of a four-core optical fiber when the light exits the device;
FIG. 3 is an optical field intensity distribution when leaving a spatial multiplexing device in an embodiment;
FIG. 4 is an optical field intensity distribution (sectioned on the x-axis of FIG. 3) as it leaves the spatial multiplexing device in an embodiment;
FIG. 5 shows the intensity distribution of the optical field when reaching the single-mode optical fiber at the output end in the embodiment;
FIG. 6 is a graph showing the intensity distribution of the optical field (sectioned on the x-axis of FIG. 5) when reaching the single-mode optical fiber at the output end in the embodiment;
FIG. 7 is a phase distribution of a super-structured surface as described in the embodiments;
fig. 8 is a cross-talk of four sets of input/output light rays in the embodiment, and the corresponding directions are shown in fig. 1.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the present invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications could be made by those skilled in the art without departing from the inventive concept. These are all within the scope of the present invention.
Example 1
The invention provides a reflective super-structured surface space division multiplexing device, which comprises a substrate, a series of super-structured surface units which are processed on one surface of the substrate and matched with the positions of input and output fiber cores, and a reflector on the other surface of the substrate. Taking a single-mode fiber with four-core fibers arranged in parallel to form 1*4 as an example, incident light is emitted from the fiber cores of the input four-core fibers, enters the super-structure surface after being subjected to free propagation and diffusion, enters the substrate after being modulated, the super-structure surface units (1, 2,3 and 4 in fig. 1) have the functions of initially modulating the light field so that the light field can be directed to the super-structure surface units corresponding to the fiber core position of the single-mode fiber at the output end after being reflected, and the super-structure surface units (5, 6, 7 and 8 in fig. 1) have the functions of further converging the light field energy into the fiber core of the single-mode fiber. Both groups of super-structured surfaces can play the roles of deflection and convergence.
The ultra-structured surface device with certain phase modulation is designed according to the specific requirements of the embodiment. The diameter of the 1,2, 3,4 super-structured surface units in fig. 1 is 43.5 microns, and the diameter of the 5, 6,7, 8 super-structured surface units is 125 microns.
The microstructure adopted by the super-structured surface device in the embodiment is cylindrical, the material is amorphous silicon, the height is 950 nanometers, and the period is 600 nanometers. And placing high-transmittance microstructures with corresponding phase delays at corresponding positions according to the phase distribution (the phase distribution is shown in fig. 7). The process flow which can be referred to is as follows, firstly, silicon with the required thickness is deposited at the bottom of the substrate, then photoresist is coated on the silicon film, the pattern is etched on the photoresist by using electron beam exposure, after the steps of development, fixation and the like, a protective layer with a certain thickness is continuously deposited, and finally, the pattern is transferred to the silicon by dry etching.
As shown in fig. 2, the intensity distribution of the optical field emitted from the four-core optical fiber to the surface of the space division multiplexing device is a gaussian intensity distribution after diffusion, and the distance from the input end to the device is controlled so that the energy of a single fiber core falls into one super-structure surface unit. As shown in fig. 3-4, the intensity of the optical field reflected back to the device surface has preliminarily matched the core position distribution of the output fiber. As shown in fig. 5-6, after the super-structured surface secondary modulation, the light field intensity reaching the coupling plane accords with the intensity distribution of the end face of the single-mode fiber, and at this time, the high coupling efficiency is obtained, which is about 75%. As shown in fig. 7, the phase distribution of the super-structured surface can be obtained by taking the phase angle of the complex amplitude expected after passing through the surface after the quotient of the incident complex amplitude. As can be seen from fig. 8, the crosstalk between the channels is already below-40 dB before the phase distribution is further optimized, indicating that the device has a significant crosstalk reducing effect.
More specifically, 1,2, 3, and 4 in fig. 1 are the super-structured surfaces corresponding to the positions of the four-core optical fibers (the core spacing is 43.5 μm) at the input end, 5,6, 7, and 8 are the super-structured surfaces corresponding to the single-mode optical fibers 11, 12, 13, and 14 at the output end, 9 is the substrate (where Device marks the side of the super-structured surface on the substrate and mirrors marks the side of the Mirror on the substrate), and 10 is the input four-core optical fiber. Taking the light rays passing through the super-structure surface units 2 and 5 as an illustration of the working principle, firstly, the light rays are emitted from fiber cores corresponding to the super-structure surface unit 2 in the four-core optical fiber, reach the space division multiplexing device after being freely transmitted and diverged, enter the substrate 9 for transmission after being modulated by the super-structure surface unit 2, then are reflected by the reflecting layer, change the transmission direction, leave the space division multiplexing device after being modulated for the second time at the super-structure surface unit 5, and finally are coupled at the fiber core position of the single-mode fiber corresponding to the super-structure surface unit 5. The units of the coordinates in fig. 2,3, 5 and 7 are micrometers, the units of the abscissas in fig. 4 and 6 are micrometers, the abscissas are dimensionless relative intensities, and the units in fig. 8 are dB.
The substrate may be an optical material having high transmittance in the device operating band, such as various types of optical glass or fused silica commonly used in CMOS processes, and the like.
The reflecting mirror can be a material which can obtain high reflectivity in the working wave band of the device, such as gold, silver, aluminum and other metals, or can be a dielectric film, even a grating, a photonic crystal and other structures which can achieve the purpose of reflection.
The input/output optical fibers can be any arranged array, such as 1*N, m×n, etc. of a commercial optical fiber array, and can also be freely arranged according to application occasions.
The input/output optical fiber can be any specification optical fiber required by application occasions such as single-mode optical fiber, multi-core optical fiber and the like, wherein the multi-core optical fiber can be multi-core optical fiber with any number of cores, such as two-core, four-core, seven-core or more.
The super-structured surface unit can be obtained by etching microstructures with a certain periodic arrangement on the substrate, and plays a role in modulating optical signals entering and leaving the device. The microstructure elements comprising the super-structured surface include, but are not limited to, cylindrical structures, and may be other structures that meet the optical modulation requirements for the operating wavelength, such as square columns or grooves, etc.
The super-structured surface elements may vary in relative position or increase or decrease in number to accommodate different numbers of cores, depending on design parameters. Each group of fiber cores to be connected corresponds to a group of super-structure surface units and is positioned on one surface of the substrate.
One output of the spatial multiplexing device may correspond to a non-unique input, e.g., one multimode fiber output may receive different modes of optical field from multiple inputs.
In the space division multiplexing occasion, taking the multiplexing/demultiplexing process of the multi-core optical fiber as an example, the coupling between the multi-core optical fiber and the single-mode optical fiber can be realized in a short distance by using a single-layer super-structured surface and a thin film reflecting layer through the regulation and control of the super-structured surface. The device includes a substrate, a super-structured surface on one side of the substrate, and a mirror on the other side of the substrate, and can have high coupling efficiency and low cross-talk by optimizing the design of the super-structured surface. Compared with the traditional method, the device has the advantages of simple structure, very thin thickness, convenient use, flexible design aiming at different optical fiber arrangement modes and optical fiber specifications and high compatibility; meanwhile, the indexes such as the insertion loss and the coupling efficiency of the device can be further improved by optimizing the geometric dimension of the micro elements forming the super-structure surface and the phase arrangement of the super-structure surface.
Example 2
The invention also provides an optoelectronic device comprising the reflective super-structured surface space division multiplexing device of embodiment 1.
In the description of the present application, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application.
The foregoing describes specific embodiments of the present application. It is to be understood that the application is not limited to the particular embodiments described above, and that various changes or modifications may be made by those skilled in the art within the scope of the appended claims without affecting the spirit of the application. The embodiments of the application and the features of the embodiments may be combined with each other arbitrarily without conflict.
Claims (10)
1. The reflective super-structured surface space division multiplexing device is characterized by comprising a substrate, a super-structured surface and a reflecting mirror, wherein the super-structured surface is positioned on one side of the substrate, the positions of the super-structured surface correspond to the positions of an input optical fiber and an output optical fiber respectively, and the reflecting mirror is positioned on the other side of the substrate; the mirror reflects the light field back to the super-structured surface, which optimizes the propagation result of the light field from the input end to the output end.
2. The reflective super-structured surface spatial multiplexing device of claim 1, wherein said super-structured surface is an array of sub-wavelength scale microstructures arranged in two dimensions in a periodic fashion, said super-structured surface modulating optical signals entering and exiting the device by the microstructures.
3. The reflective super-structure surface spatial multiplexing device of claim 2, wherein said super-structure surface modulates the optical field incident from said input optical fiber, and after the light beam propagates in said substrate to the next surface and is reflected back by said mirror, said super-structure surface modulates it twice, so that the incident light beam propagates to the core position to be coupled finally and is converted into a mode in the optical fiber that satisfies the requirement.
4. The reflective super-structured surface spatial multiplexing device of claim 3, wherein said super-structured surface comprises a first super-structured surface and a second super-structured surface, said second super-structured surface being distributed about a perimeter of said first super-structured surface;
the first super-structured surface initially modulates the light field to be reflected and then points to the position corresponding to the fiber core of the output end, and the second super-structured surface further converges the light field energy into the fiber core of the optical fiber.
5. The reflective super-surface space division multiplexing device of claim 4, wherein said first super-surface has a diameter of 40-45 microns.
6. The reflective super-surface space division multiplexing device of claim 4, wherein said second super-surface has a diameter of 120-130 microns.
7. The reflective super-structure surface space division multiplexing device of claim 1, wherein the number of said input optical fibers and said output optical fibers are equal or unequal.
8. The reflective super-structure surface space division multiplexing device of claim 2, wherein the microstructure of the super-structure surface comprises, but is not limited to, a cylindrical structure, and the structural morphology of the microstructure meets the optical wave modulation requirement of the working wavelength.
9. The reflective super-structure surface space division multiplexing device of claim 1, wherein said reflector is made of a material with high reflectivity or a composite dielectric film with high reflectivity.
10. An optoelectronic device comprising the reflective super-structured surface spatial multiplexing device of any one of claims 1-9.
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| CN202410236151.0A CN117950118A (en) | 2024-03-01 | 2024-03-01 | Reflective super-structured surface space division multiplexing device and optoelectronic device |
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