CN117948321A - Integrated siphon sulfuric acid dilution valve and high-temperature sulfuric acid module acid exchange system - Google Patents
Integrated siphon sulfuric acid dilution valve and high-temperature sulfuric acid module acid exchange system Download PDFInfo
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- CN117948321A CN117948321A CN202410007784.4A CN202410007784A CN117948321A CN 117948321 A CN117948321 A CN 117948321A CN 202410007784 A CN202410007784 A CN 202410007784A CN 117948321 A CN117948321 A CN 117948321A
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- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 title claims abstract description 291
- 239000002253 acid Substances 0.000 title claims abstract description 83
- 238000010790 dilution Methods 0.000 title claims abstract description 44
- 239000012895 dilution Substances 0.000 title claims abstract description 44
- 239000007788 liquid Substances 0.000 claims abstract description 99
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 75
- 239000012530 fluid Substances 0.000 claims abstract description 18
- 230000000694 effects Effects 0.000 claims abstract description 13
- 239000002699 waste material Substances 0.000 claims description 62
- 238000007789 sealing Methods 0.000 claims description 22
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000005086 pumping Methods 0.000 claims description 7
- 230000005484 gravity Effects 0.000 claims description 6
- 238000009434 installation Methods 0.000 abstract description 3
- 239000003814 drug Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 11
- 230000001276 controlling effect Effects 0.000 description 10
- 239000012459 cleaning agent Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 238000007599 discharging Methods 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C3/00—Circuit elements having moving parts
- F15C3/10—Circuit elements having moving parts using nozzles or jet pipes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F10/00—Siphons
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Theoretical Computer Science (AREA)
- Fluid Mechanics (AREA)
- Multiple-Way Valves (AREA)
Abstract
The invention relates to the technical field of dilution valves, in particular to an integrated siphon sulfuric acid dilution valve and a high-temperature sulfuric acid module acid exchange system. The valve comprises a valve body, wherein a through cavity is formed in the valve body; the nozzle is arranged in the valve body, the water inlet of the nozzle is provided with a water inlet cavity, and the water outlet of the nozzle is provided with a water outlet cavity; the driving fluid inlet is arranged on the valve body and communicated with the water inlet cavity and is used for flowing driving liquid in; the negative pressure suction inlet is arranged on the valve body and communicated with the water outlet cavity, and sucks the liquid to be discharged based on the Bernoulli effect formed by the flowing out of the driving liquid in the water outlet cavity; the piston is movably arranged in the valve body. The invention integrates the on-off switch of the control siphon valve on the siphon valve body, reduces the arrangement of pipelines and joints between the groove body and the valve, and reduces the risks of pipeline deformation, looseness and leakage caused by high temperature. Meanwhile, the space required by installation is saved, and the leakage risk is reduced.
Description
Technical Field
The invention relates to the technical field of dilution valves, in particular to a siphon sulfuric acid dilution valve and a high-temperature sulfuric acid module acid exchange system.
Background
In wet cleaning of wafers, concentrated sulfuric acid is often used as an organic contaminant cleaning agent for the surfaces of the chips, and can also be used as a metal residual cleaning agent. Concentrated sulfuric acid with 98% concentration is mixed with H2O2 with 30% concentration, and the mixture is used as a cleaning agent under the working condition of controlling the temperature to be 110-145 ℃. After the concentration of the concentrated sulfuric acid is lower than 94% or the circulation times of the concentrated sulfuric acid reaches a certain requirement, the concentrated sulfuric acid in the tank needs to be replaced to ensure the cleaning effect, so that the waste acid in the emptying tank is particularly important to replace new liquid medicine.
The discharge of high-temperature sulfuric acid is generally divided into two stages, wherein the first stage is to cool and discharge the liquid medicine in the tank to a cooling device (cooling unit) by its own weight when the liquid medicine is at a higher position. The first stage is that when the liquid medicine reaches the bottom, the liquid medicine can not be emptied by means of self-generated gravity, and then the liquid medicine is discharged by adopting a pump.
At this time, the discharged waste acid is high in temperature and concentration, if the waste acid is directly discharged into the waste liquid box, a large amount of high-temperature and high-concentration concentrated acid exists in the waste liquid box, when other pipelines discharge waste liquid, the waste acid can be heated and boiled to splash everywhere, and after the waste acid is used, the concentration of the waste sulfuric acid required to be discharged is still high, and if the waste acid is directly discharged, the liquid medicine can be boiled, so that the system is unstable.
Disclosure of Invention
The invention aims to provide an integrated siphon sulfuric acid dilution valve, which solves the technical problems;
The invention also aims to provide a high-temperature sulfuric acid module acid exchange system which solves the technical problems.
The technical problems solved by the invention can be realized by adopting the following technical scheme:
an integrated siphon sulfuric acid dilution valve, comprising,
The valve body is internally provided with a through cavity;
The water inlet of the nozzle is provided with a water inlet cavity, the water outlet of the nozzle is provided with a water outlet cavity, and the water outlet cavity is of a tubular structure with gradually narrowed diameter along the direction away from the nozzle;
the driving fluid inlet is arranged on the valve body and communicated with the water inlet cavity and is used for flowing driving liquid in;
The negative pressure suction inlet is arranged on the valve body, is communicated with the water outlet cavity, sucks in liquid to be discharged based on Bernoulli effect formed by the driving liquid flowing out of the water outlet cavity, and discharges the liquid together with the driving liquid;
the piston is movably arranged in the valve body, and is used for switching on and off the driving liquid to enter the nozzle based on the fact that the piston moves in the direction away from or close to the nozzle.
Preferably, the water outlet cavity comprises a front section cavity far away from one side of the nozzle and a rear section cavity close to the front side of one side of the nozzle, at least the front section cavity is of a tubular structure with gradually narrowing diameter along the direction far away from the nozzle, a water outlet of the nozzle penetrates out of the rear section cavity and stretches into the front section cavity to form a venturi structure with the front section cavity, the rear section cavity is an area influenced by Bernoulli effect formed by driving liquid passing through the front section cavity, and the negative pressure suction inlet is communicated with the rear section cavity.
Preferably, the method further comprises the steps of,
The valve cover is arranged on one side of the valve body, which is close to the water inlet of the nozzle;
The center support is arranged in the valve body, the center support is close to the first end of the valve cover, the piston and one end of the valve cover, which is positioned in the valve body, enclose to form a piston movable cavity for controlling the piston to move, and the center support is close to the second end of the nozzle, encloses to form the water inlet of the nozzle and the inner side wall of the valve body.
Preferably, the piston comprises a piston body having a piston head,
The middle connecting part is movably arranged in the central bracket;
The head part is connected with the front end of the middle connecting part and is positioned in the water inlet cavity, and the shape of the head part is matched with the shape of the water inlet of the piston;
The tail part is connected with the rear end of the middle connecting part and is positioned in the piston movable cavity, the outer side wall of the tail part is tightly attached to the inner side wall of the piston movable cavity, and the piston movable cavity comprises a first cavity separated by the tail part and close to one side of the valve cover and a second cavity close to one side of the center support.
Preferably, the method further comprises the steps of,
The first sealing ring is arranged at the joint of the nozzle and the valve body;
the second sealing ring is arranged at the joint of the piston and the center support;
the third sealing ring is arranged at the joint of the central bracket and the valve body;
the fourth sealing ring is arranged at the joint of the piston and the valve cover;
And the fifth sealing ring is arranged at the joint of the valve cover and the valve body.
Preferably, the valve body and the valve cover are tightly connected through threads; the valve body is tightly connected with the nozzle through threads.
Preferably, the method further comprises the steps of,
The first air inlet is arranged on the valve cover and communicated with the first cavity, and air is introduced into the first cavity through the first air inlet so as to drive the piston to move in a direction close to the nozzle;
The second air inlet is arranged on the valve body and communicated with the second cavity, and air is introduced into the second cavity through the second air inlet so as to drive the piston to move in a direction away from the nozzle;
the first air inlet and the second air inlet are respectively provided with an electromagnetic valve, and the first air inlet and the second air inlet are controlled to be in air by the electromagnetic valves.
Preferably, an outlet is arranged on one side of the valve body, which is close to the water outlet of the nozzle, the outlet and the water outlet cavity, the diameter of the outlet is larger than that of the water outlet cavity, and a protection ring is arranged on the outer side wall of the valve body, which corresponds to the outlet.
Preferably, the driving liquid is water, the liquid to be discharged is sulfuric acid, and the liquid to be discharged and the driving liquid are mixed in the water outlet cavity to form waste liquid to flow out.
A high-temperature sulfuric acid module acid exchange system comprises,
The high-temperature sulfuric acid module is used for storing and heating sulfuric acid;
The waste acid discharge port is connected with the high-temperature sulfuric acid module, and waste acid in the high-temperature sulfuric acid module is discharged from the waste acid discharge port by means of self gravity;
The acid discharge pump is connected with the high-temperature sulfuric acid module and is used for pumping out sulfuric acid which can be used in the high-temperature sulfuric acid module or pumping out the waste acid which cannot be naturally discharged from the waste acid discharge port;
the integrated siphon type sulfuric acid dilution valve is the integrated siphon type sulfuric acid dilution valve, the driving fluid inlet of the integrated siphon type sulfuric acid dilution valve is connected with a driving liquid outlet and is used for flowing in the driving liquid, the negative pressure suction inlet of the integrated siphon type sulfuric acid dilution valve is connected with the high-temperature sulfuric acid module, the high-temperature sulfuric acid module is connected with an acid discharge pipeline of the waste acid discharge port and a liquid outlet pipeline of the acid discharge pump and is used for sucking residual waste acid in the high-temperature sulfuric acid module, the acid discharge pipeline and the liquid outlet pipeline of the acid discharge pump;
And the waste liquid collecting device is connected with the outlet of the integrated siphon sulfuric acid dilution valve and is used for collecting waste liquid formed by mixing the waste acid and the driving liquid.
The invention has the beneficial effects that: by adopting the technical scheme, the on-off switch for controlling the siphon valve is integrated on the siphon valve body, so that the arrangement of pipelines and joints between the tank body and the valve is reduced, and the risks of pipeline deformation, looseness and leakage caused by high temperature are reduced. Meanwhile, the space required by installation is saved, and the leakage risk is reduced.
Drawings
FIG. 1 is a cross-sectional view of the internal structure of an integrated siphon sulfuric acid dilution valve in accordance with an embodiment of the present invention;
FIG. 2 is a schematic diagram of the external structure of an integrated siphon sulfuric acid dilution valve according to an embodiment of the present invention;
FIG. 3 is an exploded view of the internal components of the valve body of the integrated siphon sulfuric acid dilution valve in accordance with an embodiment of the present invention;
FIG. 4 is a schematic diagram of a high temperature sulfuric acid module acid exchange system in accordance with an embodiment of the present invention.
In the accompanying drawings: 1. a valve body; 11. a driving fluid inlet; 12. a negative pressure suction inlet; 13. an outlet; 14. a water inlet cavity; 15. a water outlet cavity; 151. a front section cavity; 152. a back section cavity; 16. a piston movable cavity; 161. a first cavity; 162. a second cavity; 17. a second air inlet; 18. a protective ring; 2. a nozzle; 3. a piston; 31. an intermediate connection portion; 32. a head; 33. tail part; 4. a valve cover; 41. a first air inlet; 5. a center support; 61. a first seal ring; 62. a second seal ring; 63. a third seal ring; 64. a fourth seal ring; 65. a fifth seal ring; 7. a high temperature sulfuric acid module; 71. a first sulfuric acid tank; 72. a second sulfuric acid tank; 73. a circulation pump; 74. a heater; 81. a waste acid discharge port; 82. an acid outlet; 83. an acid discharge pump; 84. a bubble eliminator; 85. a concentration meter; 86. a waste liquid collection device; 87. a driving liquid outlet; 9. and integrating a siphon sulfuric acid dilution valve.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other.
The invention is further described below with reference to the drawings and specific examples, which are not intended to be limiting.
An integrated siphon sulfuric acid dilution valve, as shown in figures 1-3, comprising,
The valve body 1, have cavity that link up in the valve body 1;
The nozzle 2 is arranged in the valve body 1, a water inlet of the nozzle 2 is provided with a water inlet cavity 14, a water outlet of the nozzle 2 is provided with a water outlet cavity 15, and the water outlet cavity 15 is of a tubular structure with gradually narrowing diameter along the direction far away from the nozzle 2;
a driving fluid inlet 11 which is arranged on the valve body 1 and is communicated with the water inlet cavity 14 for flowing driving liquid in;
A negative pressure suction inlet 12 which is arranged on the valve body 1 and is communicated with the water outlet cavity 15, sucks in the liquid to be discharged based on the Bernoulli effect formed by the driving liquid flowing out of the water outlet cavity 15, and discharges the liquid together with the driving liquid;
The piston 3 is movably arranged in the valve body 1, and is used for driving liquid to enter the nozzle 2 on and off based on the movement of the piston 3 in the direction away from or close to the nozzle 2.
Specifically, as shown in fig. 4, the purpose of the invention is to reduce the emission and residue problems of waste acid in the process of changing acid of high-temperature sulfuric acid, the high-temperature sulfuric acid module 7 is used as a cleaning agent after heating concentrated sulfuric acid to clean organic matters and metal particles on the surface of a wafer, and the concentration and cleanliness of sulfuric acid are reduced to a certain degree after circulating for a certain number of times, so that the sulfuric acid of the high-temperature sulfuric acid module 7 needs to be changed in order to ensure the subsequent cleaning effect.
In the discharging process of the waste acid, a certain amount of waste acid or wash tank water always remains at the tail part 33 of the pipeline or the rear part of the acid discharge pump 83, so that the residual liquid in the tail pipeline needs to be discharged cleanly, and the pollution of sulfuric acid added secondarily is avoided. Meanwhile, when uncooled high-temperature sulfuric acid is discharged, the pipeline has a certain phenomenon of thermal deformation, so that pipelines, valve joints and the like are required to be reduced as much as possible, and the risk of sulfuric acid leakage is reduced.
The invention utilizes the Bernoulli principle, which shows that in stable flow, the pressure is small at the place with high flow velocity and the pressure is strong at the place with low flow velocity. The driving liquid is supplied through the driving fluid inlet 11, the driving liquid passes through the nozzle 2 from large to small, so that the flow speed is increased, the driving liquid forms a vacuum area at the rear side of the outlet 13 of the nozzle 2, sulfuric acid is sucked in from the negative pressure suction inlet 12, and the two fluids are mixed to dilute the sulfuric acid.
Further, when the driving fluid is discharged through the nozzle 2, the area of the outlet 13 of the nozzle 2 becomes small, the flow speed becomes high, and the pressure therein becomes small, so that the sulfuric acid is sucked from the negative pressure suction port 12 by the pressure difference, and finally mixed and discharged from the outlet 13.
Further specifically, the invention can realize the on-off of driving liquid by adjusting the position of the piston 3, and realize the function of switching the valve body 1. And the stay position of the piston 3 is controlled by controlling the sequence of the valve cover 4 and the first air inlet 41 and the second air inlet 17 on the valve body 1, so that the flow rate flowing into the nozzle 2 is controlled.
In a preferred embodiment, the water outlet cavity 15 includes a front-stage cavity 151 on a side far from the nozzle 2 and a rear-stage cavity 152 on a front side close to the nozzle 2, at least the front-stage cavity 151 is a tubular structure with a gradually narrowing diameter along a direction far from the nozzle 2, a water outlet of the nozzle 2 penetrates from the rear-stage cavity 152 and stretches into the front-stage cavity 151 to form a venturi structure with the front-stage cavity 151, the rear-stage cavity 152 is a region affected by a bernoulli effect formed by driving liquid through the front-stage cavity 151, and the negative pressure suction inlet 12 is communicated with the rear-stage cavity 152.
Specifically, in the present invention, a certain gap exists between the water outlet of the nozzle 2 and the inner side wall of the valve body 1, so as to form an alternative venturi, and after the driving liquid is sprayed out from the nozzle 2, the inner diameter of the front section cavity 151 is reduced by a thickness so as to accelerate the gas flow rate, so that the gas forms a vacuum area in the rear section cavity 152, thereby generating a certain adsorption effect on the sulfuric acid to be discharged.
In a preferred embodiment, the method further comprises,
A valve cover 4 provided on one side of the valve body 1 near the water inlet of the nozzle 2;
The center support 5 is arranged in the valve body 1, the first end, close to the valve cover 4, of the center support 5 and one end, located in the valve body 1, of the piston 3 and the valve cover 4 enclose to form a piston movable cavity 16 for controlling the movement of the piston 3, and the second end, close to the nozzle 2, of the center support 5 and the water inlet of the nozzle 2 and the inner side wall of the valve body 1 enclose to form a water inlet cavity 14.
Specifically, in the invention, a closed piston movable cavity 16 is formed among the valve cover 4, the center support 5 and the piston 3, the tail 33 of the piston 3 divides the piston movable cavity 16 into two parts, and meanwhile, an air inlet is formed in each of the valve cover 4 and the valve body 1 and is led into the piston movable cavity 16, so that a simple air cylinder is formed.
In a preferred embodiment, the piston 3 comprises,
The middle connecting part 31 is movably arranged in the center bracket 5;
The head part 32 is connected with the front end of the middle connecting part 31 and is positioned in the water inlet cavity 14, and the shape of the head part 32 is matched with the shape of the water inlet of the piston 3;
The tail part 33 is connected with the rear end of the middle connecting part 31 and is positioned in the piston movable cavity 16, the outer side wall of the tail part 33 is tightly attached to the inner side wall of the piston movable cavity 16, and the piston movable cavity 16 comprises a first cavity which is separated by the tail part 33 and is close to one side of the valve cover 4 and a second cavity which is close to one side of the center support 5.
Specifically, the piston 3 moves back and forth under the restriction of the center bracket 5 and the valve cover 4, the direction of air inlet is controlled through the valve cover 4 and the first air inlet 41 and the second air inlet 17 on the valve body 1 so as to control the back and forth movement of the piston 3, when the first air inlet 41 is ventilated, the piston 3 moves to the rightmost end to block the nozzle 2 to block driving liquid, thereby realizing the closing of the valve body 1; conversely, when the second intake port 17 is ventilated, the piston 3 moves leftward, and the valve body 1 opens.
In a preferred embodiment, the method further comprises,
A first seal ring 61 provided at the junction of the nozzle 2 and the valve body 1;
the second sealing ring 62 is arranged at the joint of the piston 3 and the center support 5;
the third sealing ring 63 is arranged at the joint of the center bracket 5 and the valve body 1;
a fourth seal ring 64, which is arranged at the joint of the piston 3 and the valve cover 4;
The fifth sealing ring 65 is arranged at the joint of the valve cover 4 and the valve body 1.
Specifically, the invention adopts O-shaped sealing rings to seal the areas connected at a plurality of positions, improves the tightness and prevents the leakage and damage of sulfuric acid.
More specifically, in order to prevent air leakage from front to back, a fourth seal ring 64 is provided at the junction between the tail 33 of the piston 3 and the valve cover 4, and a second seal ring 62 is provided inside the piston 3 and the center bracket 5. A third sealing ring 63 is arranged between the center support 5 and the valve body 1 to prevent driving liquid from entering the second cavity, the driving liquid is tightly pressed through the valve cover 4, a fifth sealing ring 65 is added between the valve cover 4 and the valve body 1 for sealing, and the valve cover 4 and the valve body 1 are tightly connected through threads. In order to prevent corrosive sulfuric acid from flowing into the rear side of the nozzle 2, a first sealing ring 61 is added between the nozzle 2 and the valve body 1, and screwed in by screwing.
In a preferred embodiment, the valve body 1 and the valve cover 4 are tightly connected by screw threads; the valve body 1 and the nozzle 2 are tightly connected through threads.
Specifically, the valve cover 4 is in threaded connection with the valve body 1, and the nozzle 2 is in threaded connection with the valve body 1, so that the tightness is improved.
In a preferred embodiment, the method further comprises,
The first air inlet 41 is arranged on the valve cover 4 and communicated with the first cavity, and air is introduced into the first cavity through the first air inlet 41 to drive the piston 3 to move in the direction approaching the nozzle 2;
The second air inlet 17 is arranged on the valve body 1 and communicated with the second cavity, and air is introduced into the second cavity through the second air inlet 17 to drive the piston 3 to move in a direction away from the nozzle 2.
In a preferred embodiment, the first air inlet 41 and the second air inlet 17 are each provided with a solenoid valve by which the first air inlet 41 and the second air inlet 17 are controlled to intake air.
Specifically, the invention can also control the flow and the on-off of the liquid passing through the valve body 1 by controlling the on-off time of the electromagnetic valves of the first air inlet 41 and the second air inlet 17, so as to achieve the purpose of adjusting the concentration and the speed of the discharged sulfuric acid.
Specifically, in the present invention, the first air inlet 41 and the second air inlet 17 are controlled by the electromagnetic valve, the electromagnetic valve controls the unidirectional flow of the air, in other embodiments, the electromagnetic valve may be replaced by other devices for controlling the flow of the air, for example, an air suction device, and the air in the first cavity and the air in the second cavity are sequentially drawn out to realize the movement of the piston 3.
In a preferred embodiment, the valve body 1 is provided with an outlet 13 at a side close to the water outlet of the nozzle 2, the outlet 13 and the water outlet cavity 15, the diameter of the outlet 13 is larger than that of the water outlet cavity 15, and the valve body 1 is provided with a protection ring 18 on the outer side wall corresponding to the outlet 13.
In a preferred embodiment, the driving liquid is water, the liquid to be discharged is sulfuric acid, and the liquid to be discharged and the driving liquid are mixed in the water outlet cavity 15 to form a waste liquid to flow out.
Referring further to fig. 4, a high temperature sulfuric acid module acid conversion system, comprising,
A high temperature sulfuric acid module 7 for storing and heating sulfuric acid;
The waste acid discharge port 81 is connected with the high-temperature sulfuric acid module 7, and the waste acid in the high-temperature sulfuric acid module 7 is discharged from the waste acid discharge port 81 by means of self gravity;
The acid discharge pump 83 is connected with the high-temperature sulfuric acid module 7 and is used for pumping out sulfuric acid which can be used in the high-temperature sulfuric acid module 7 or pumping out waste acid which cannot be naturally discharged from the waste acid discharge port 81;
The integrated siphon-type sulfuric acid dilution valve 9, wherein the integrated siphon-type sulfuric acid dilution valve 9 is an integrated siphon-type sulfuric acid dilution valve in any embodiment, a driving fluid inlet 11 of the integrated siphon-type sulfuric acid dilution valve 9 is connected with a driving fluid outlet 87 for flowing driving fluid, a negative pressure suction inlet 12 of the integrated siphon-type sulfuric acid dilution valve 9 is connected with the high-temperature sulfuric acid module 7, the high-temperature sulfuric acid module 7 is connected with an acid discharge pipeline of the waste acid discharge port 81, and a liquid outlet pipeline of the acid discharge pump 83 for sucking residual waste acid in the high-temperature sulfuric acid module 7, in the acid discharge pipeline and in the liquid outlet pipeline of the acid discharge pump 83;
The waste liquid collecting device 86 is connected with the outlet 13 of the integrated siphon sulfuric acid dilution valve and is used for collecting waste acid and waste liquid formed by mixing driving liquid.
In particular, the dilution valve aims to reduce the emission and residual problems of waste acid in the acid exchange process of high-temperature sulfuric acid. The high-temperature sulfuric acid module 7 is used as a cleaning agent after heating the concentrated sulfuric acid, organic matters and metal particles on the surface of the wafer are cleaned, and after the concentrated sulfuric acid is circulated for a certain number of times, the concentration and the cleanliness of the sulfuric acid in the high-temperature sulfuric acid module 7 are reduced to a certain extent, so that the sulfuric acid in the high-temperature sulfuric acid module 7 needs to be replaced in order to ensure the subsequent cleaning effect.
In the discharging process of the waste acid, a certain amount of waste acid or washing tank water always remains at the tail part of the pipeline or at the rear part of the acid discharge pump 83, so that the residual liquid in the tail end pipeline needs to be discharged cleanly, and the pollution of sulfuric acid added secondarily is avoided.
Meanwhile, when uncooled high-temperature sulfuric acid is discharged, the pipeline has a certain phenomenon of thermal deformation, so that pipelines, valve joints and the like are required to be reduced as much as possible, and the risk of sulfuric acid leakage is reduced.
In this embodiment, the high temperature sulfuric acid module 7 includes,
A first sulfuric acid tank 71 and a second sulfuric acid tank 72 for storing sulfuric acid;
A circulation pump 73 connected to the bottom pipes of the first sulfuric acid tank 71 and the second sulfuric acid tank 72 for pumping sulfuric acid;
The liquid inlet end of the heater 74 is connected with the circulating pump 73 and is used for heating the sulfuric acid pumped by the circulating pump 73, the liquid outlet end of the heater 74 is connected into the first sulfuric acid tank 71 and the second sulfuric acid tank 72 through pipelines, and the heated sulfuric acid is returned to the first sulfuric acid tank 71 and the second sulfuric acid tank 72, so that high-temperature heating of the sulfuric acid is realized.
In this embodiment, the acid discharge pump 83 of the acid discharge system is further connected to the acid outlet 82 through a pipeline for normal use of sulfuric acid, a bubble eliminator 84 is disposed on the pipeline where the acid outlet 82 is connected to the acid discharge pump 83, the system is further provided with a concentration meter 85 in this embodiment, one end of the concentration meter 85 is connected to the bubble eliminator 84 for absorbing the concentration of sulfuric acid during normal use of sulfuric acid and analyzing the concentration of sulfuric acid at this time, the other end of the concentration meter 85 is connected to the high-temperature sulfuric acid module 7 for returning the sulfuric acid after concentration detection to the high-temperature sulfuric acid module 7, and when the result of the concentration of sulfuric acid counted by the concentration meter 85 is abnormal, the flow of waste acid discharge is executed.
The discharge of high-temperature sulfuric acid is generally divided into two stages, wherein the first stage is to discharge the liquid medicine in the sulfuric acid tank to a cooling device for cooling and discharging by self gravity when the liquid medicine is at a higher position. The second stage is that when the liquid medicine reaches the bottom, the liquid medicine can not be emptied by means of self-generated gravity, at the moment, the liquid medicine is discharged by adopting the acid discharge pump 83, acid gas can be generated by high-temperature sulfuric acid in the discharge process, the liquid medicine returns to the inside of the valve island through the air pipe of the pneumatic diaphragm valve, the valve island is corroded, and meanwhile, when the liquid medicine is discharged in a pump discharge mode, certain waste acid can be remained in a pipeline behind the pump.
At this time, the discharged waste acid is high in temperature and concentration, and if the waste acid is directly discharged into the waste liquid collecting device 86, a large amount of high-temperature and high-concentration concentrated acid exists in the waste liquid collecting device 86, and when other pipelines discharge the waste liquid, the waste acid can be heated and boiled to splash around. Therefore, the concentration and the temperature of sulfuric acid are reduced, and the pressure fluctuation in the pipeline is prevented.
The concentration of the waste sulfuric acid which is required to be discharged after being used is still higher, and if the waste sulfuric acid is directly discharged, the liquid medicine can be boiled, so that the system is unstable, and the concentrated sulfuric acid is required to be discharged after being diluted.
Therefore, the invention can use common municipal water as power through the dilution valve, and suck the residual waste acid in the high-temperature sulfuric acid module 7, the acid discharge pipeline and the rear pipeline of the acid discharge pump 83 into the sulfuric acid dilution valve in a manner of efficient siphon by using the Bernoulli principle through the venturi tube in the valve body 1, thereby discharging cleanly. Meanwhile, after the discharge is completed, the piston 3 can be controlled to move back and forth through controlling the air inlet directions of the two air inlets at the front end of the valve body 1, and when the piston 3 is in close contact with the nozzle 2, the siphon effect that driving liquid cannot flow in is stopped. If the time for opening the two air inlet electromagnetic valves back and forth is controlled, the position of the piston 3 in the valve body 1 away from the piston 3 can be controlled so as to meet the different flow rates through the nozzle 2, and the dilution speed is controlled.
Detailed description of the preferred embodiments
The embodiment provides an integrated siphon sulfuric acid dilution valve, wherein a closed cavity, namely a piston movable cavity 16, is formed among a valve cover 4, a center support 5 and a piston 3, the piston movable cavity 16 is divided into two parts by a tail 33 of the piston 3, and sealing rings are arranged in the tail 33 of the piston 3 and the center support 5 for preventing front and rear air leakage. At the same time, a hole is respectively arranged on the valve cover 4 and the valve body 1 to be communicated with the piston movable cavity 16, so that a simple cylinder is formed. A sealing ring is arranged between the center support 5 and the valve body 1 to prevent driving fluid from entering the second cavity, the driving fluid is tightly pressed through the valve cover 4, the sealing ring is added between the valve cover 4 and the valve body 1 for sealing, and the two are tightly connected through threads.
When the invention is used, the second air inlet 17 on the valve body 1 is used for air intake, the first air inlet 41 on the valve cover 4 is closed, the piston 3 moves along the direction away from the moving nozzle 2, the distance between the piston 3 and the nozzle 2 is increased, and the driving liquid can flow out of the siphon valve; the valve body 1 and the nozzle 2 form a venturi tube, the water outlet cavity 15 is of a tubular structure with gradually narrowing diameter along the direction far away from the nozzle 2, when the liquid is driven to flow through the continuously narrowing flow section, the flow speed of the fluid is increased, the Bernoulli's law knows that the increase of the flow speed is accompanied with the decrease of the pressure of the fluid, negative pressure is formed at the water outlet of the nozzle 2, and sulfuric acid at the negative pressure suction inlet 12 is sucked into the valve body 1 and discharged. In order to prevent the flow of the latter corrosive liquid into the rear side of the piston, a first sealing ring 61 is inserted between the nozzle 2 and the valve body 1 and screwed in by means of a screw connection.
When the valve is closed, the first air inlet 41 on the valve cover 4 is ventilated, the piston 3 is pushed to move in the direction close to the nozzle 2 in the center support 5 until the piston 3 touches the nozzle 2, under the action of the rear gas pressure, the piston 3 is tightly attached to the nozzle 2 to prevent the driving liquid entering from the driving fluid inlet 11, so that the water outlet of the nozzle 2 does not flow out, and the siphon effect disappears, so that the residual sulfuric acid in the pipeline cannot be sucked through negative pressure.
When the flow rate at the outlet 13 of the valve body 1 is regulated, the stop position of the piston 3 is controlled by controlling the sequence of the valve cover 4 and the inlet of the first air inlet 41 and the second air inlet 17 on the valve body 1, so that the flow rate flowing into the nozzle 2 is controlled.
In summary, the invention has the following beneficial effects: the on-off switch for controlling the siphon valve is integrated on the siphon valve body, so that the arrangement of pipelines and joints between the groove body and the valve is reduced, and the risks of pipeline deformation, looseness and leakage caused by high temperature are reduced. Meanwhile, the space required by installation is saved, and the leakage risk is reduced.
The foregoing description is only illustrative of the preferred embodiments of the present invention and is not to be construed as limiting the scope of the invention, and it will be appreciated by those skilled in the art that equivalent substitutions and obvious variations may be made using the description and illustrations of the present invention, and are intended to be included within the scope of the present invention.
Claims (10)
1. An integrated siphon sulfuric acid dilution valve, comprising,
The valve comprises a valve body (1), wherein a through cavity is formed in the valve body (1);
The water inlet of the nozzle (2) is provided with a water inlet cavity (14), the water outlet of the nozzle (2) is provided with a water outlet cavity (15), and the water outlet cavity (15) is of a tubular structure with gradually narrowing diameter along the direction far away from the nozzle (2);
A driving fluid inlet (11) which is arranged on the valve body (1) and is communicated with the water inlet cavity (14) for flowing in driving liquid;
A negative pressure suction inlet (12) which is arranged on the valve body (1) and is communicated with the water outlet cavity (15), and sucks in the liquid to be discharged based on the Bernoulli effect formed by the outflow of the driving liquid in the water outlet cavity (15) and discharges the liquid together with the driving liquid;
the piston (3) is movably arranged in the valve body (1), and is used for switching on and off the driving liquid entering the nozzle (2) based on the fact that the piston (3) moves in the direction away from or close to the nozzle (2).
2. The integrated siphon-type sulfuric acid dilution valve according to claim 1, characterized in that the water outlet cavity (15) comprises a front-stage cavity (151) far from the side of the nozzle (2) and a rear-stage cavity (152) near to the front side of the nozzle (2), at least the front-stage cavity (151) is of a tubular structure with gradually narrowing diameter along the direction far from the nozzle (2), a water outlet of the nozzle (2) penetrates from the rear-stage cavity (152) and extends into the front-stage cavity (151) to form a venturi structure with the front-stage cavity (151), the rear-stage cavity (152) is an area influenced by a bery effect formed by the driving liquid passing through the front-stage cavity (151), and the negative pressure suction inlet (12) is communicated with the rear-stage cavity (152).
3. The integrated siphon sulfuric acid dilution valve according to claim 1, further comprising,
The valve cover (4) is arranged on one side of the valve body (1) close to the water inlet of the nozzle (2);
the center support (5) is arranged in the valve body (1), the center support (5) is close to the first end of the valve cover (4) and the piston (3) and one end of the valve cover (4) which is positioned in the valve body (1) enclose to form a piston movable cavity (16) for controlling the piston (3) to move, and the center support (5) is close to the second end of the nozzle (2) and the water inlet of the nozzle (2) and the inner side wall of the valve body (1) enclose to form the water inlet cavity (14).
4. An integrated siphon-type sulfuric acid dilution valve according to claim 3, characterized in that the piston (3) comprises,
The middle connecting part (31) is movably arranged in the center support (5);
The head (32) is connected with the front end of the middle connecting part (31) and is positioned in the water inlet cavity (14), and the shape of the head (32) is matched with the shape of the water inlet of the piston (3);
The tail part (33) is connected with the rear end of the middle connecting part (31) and is positioned in the piston movable cavity (16), the outer side wall of the tail part (33) is tightly attached to the inner side wall of the piston movable cavity (16), and the piston movable cavity (16) comprises a first cavity (161) which is separated by the tail part (33) and is close to one side of the valve cover (4) and a second cavity (162) which is close to one side of the center support (5).
5. The integrated siphon sulfuric acid dilution valve according to claim 3, further comprising,
A first seal ring (61) arranged at the joint of the nozzle (2) and the valve body (1);
the second sealing ring (62) is arranged at the joint of the piston (3) and the center support (5);
The third sealing ring (63) is arranged at the joint of the central bracket (5) and the valve body (1);
A fourth sealing ring (64) arranged at the joint of the piston (3) and the valve cover (4);
and the fifth sealing ring (65) is arranged at the joint of the valve cover (4) and the valve body (1).
6. -Integrated siphon-type sulfuric acid dilution valve according to claim 3, characterized in that the valve body (1) and the valve cap (4) are connected by screw tightening; the valve body (1) is tightly connected with the nozzle (2) through threads.
7. The integrated siphon sulfuric acid dilution valve according to claim 4, further comprising,
A first air inlet (41) which is arranged on the valve cover (4) and communicated with the first cavity (161), and air is introduced into the first cavity (161) through the first air inlet (41) to drive the piston (3) to move in a direction approaching to the nozzle (2);
the second air inlet (17) is arranged on the valve body (1) and communicated with the second cavity (162), and air is introduced into the second cavity (162) through the second air inlet (17) to drive the piston (3) to move in a direction away from the nozzle (2);
the first air inlet (41) and the second air inlet (17) are respectively provided with electromagnetic valves, and the air inlet of the first air inlet (41) and the air inlet of the second air inlet (17) are controlled by the electromagnetic valves.
8. Integrated siphon-type sulfuric acid dilution valve according to claim 1, characterized in that the valve body (1) is provided with an outlet (13) at one side close to the water outlet of the nozzle (2), the outlet (13) and the water outlet cavity (15), the diameter of the outlet (13) is larger than the diameter of the water outlet cavity (15), and the valve body (1) is provided with a protection ring (18) on the outer side wall corresponding to the outlet (13).
9. The integrated siphon-type sulfuric acid dilution valve according to claim 1, characterized in that the driving liquid is water, the liquid to be discharged is sulfuric acid, and the liquid to be discharged and the driving liquid are mixed in the water outlet cavity (15) to form a waste liquid outflow.
10. A high-temperature sulfuric acid module acid exchange system is characterized by comprising,
A high temperature sulfuric acid module (7) for storing and heating sulfuric acid;
The waste acid discharge port (81) is connected with the high-temperature sulfuric acid module (7), and waste acid in the high-temperature sulfuric acid module (7) is discharged from the waste acid discharge port (81) by means of self gravity;
the acid discharge pump (83) is connected with the high-temperature sulfuric acid module (7) and is used for pumping out sulfuric acid which can be used in the high-temperature sulfuric acid module (7) or pumping out the waste acid which cannot be naturally discharged from the waste acid discharge port (81);
An integrated siphon sulfuric acid dilution valve (9), wherein the integrated siphon sulfuric acid dilution valve (9) is an integrated siphon sulfuric acid dilution valve (9) according to any one of claims 1-9, the driving fluid inlet (11) of the integrated siphon sulfuric acid dilution valve (9) is connected with a driving liquid outlet (87) for flowing in the driving liquid, the negative pressure suction inlet (12) of the integrated siphon sulfuric acid dilution valve (9) is connected with the high-temperature sulfuric acid module (7), the high-temperature sulfuric acid module (7) is connected with a discharge pipeline of the waste acid discharge port (81) and a liquid outlet pipeline of the acid discharge pump (83) for sucking residual waste acid in the high-temperature sulfuric acid module (7), in the acid discharge pipeline and in a liquid outlet pipeline of the acid discharge pump (83);
and the waste liquid collecting device (86) is connected with the outlet (13) of the integrated siphon sulfuric acid dilution valve (9) and is used for collecting waste liquid formed by mixing the waste acid and the driving liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410007784.4A CN117948321A (en) | 2024-01-03 | 2024-01-03 | Integrated siphon sulfuric acid dilution valve and high-temperature sulfuric acid module acid exchange system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410007784.4A CN117948321A (en) | 2024-01-03 | 2024-01-03 | Integrated siphon sulfuric acid dilution valve and high-temperature sulfuric acid module acid exchange system |
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| CN117948321A true CN117948321A (en) | 2024-04-30 |
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|---|---|---|---|
| CN202410007784.4A Pending CN117948321A (en) | 2024-01-03 | 2024-01-03 | Integrated siphon sulfuric acid dilution valve and high-temperature sulfuric acid module acid exchange system |
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| Country | Link |
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| CN (1) | CN117948321A (en) |
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2024
- 2024-01-03 CN CN202410007784.4A patent/CN117948321A/en active Pending
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