CN117930372A - Interference optical platform with high carrier-to-noise ratio and low attitude coupling optical path noise - Google Patents
Interference optical platform with high carrier-to-noise ratio and low attitude coupling optical path noise Download PDFInfo
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Abstract
The interference optical platform comprises a local laser light path, a transmitting laser light path and a receiving laser light path, combines the advantages of few off-axis light path components and high on-axis light path carrier-to-noise ratio according to the requirements of laser heterodyne interferometry on inter-satellite relative distance change, provides a scheme for constructing the off-axis optical platform by using five groups of kepler telescope systems, realizes antiparallel light receiving and transmitting beams, reduces optical path errors caused by satellite gesture jitter, improves the carrier-to-noise ratio of an optical measurement system, ensures the measurement requirement of a gravity satellite on inter-satellite relative displacement, and has reliable precision and strong stability.
Description
Technical Field
The application relates to an interference optical platform with high carrier-to-noise ratio and low attitude coupling optical path noise, and belongs to the technical field of gravitational field measurement.
Background
The earth gravitational field can reflect the spatial distribution and the evolution along with time of the earth substances, and accurately measure the earth gravitational field and the change along with time thereof not only is one of the main scientific targets of modern geodetics, but also can provide important basic earth space information for solving the problems of increasingly serious resources, environments, disasters and the like faced by human beings. The orbit motion of the satellite is mainly limited by the earth gravitational field, and the research of inverting the earth gravitational field by utilizing the relative distance observation data of the inter-satellite interferometers is the research front of the current geophysics and geodetics, and simultaneously lays a solid foundation for successful completion of future space gravitational wave detection experiments.
At present, in the inter-satellite high-precision laser interference ranging task, a method of a three-mirror is adopted to enable a transmitted light beam and a received light beam to generate transverse offset and keep the two anti-parallel, but the three-mirror is separated from a main body measuring light path, so that the inter-satellite relative distance measuring error is increased. In addition, because of the problems of small aperture of the receiving diaphragm, large divergence angle of the emitted light beam and the like, the carrier-to-noise ratio realized by the light path measuring system is not high. Several coaxial optical platform designs using polarized light and multiple lens systems have been proposed in recent years, which can realize the coaxial transceiving beams and can significantly improve the carrier-to-noise ratio of the system, and the smart design of the multiple lens systems can also effectively inhibit the laser path noise caused by the change of satellite postures. However, because the number of polarization components in the coaxial optical path is large and the polarization state of the laser is easy to change in the measurement process, additional relative distance measurement errors are easy to cause.
Disclosure of Invention
The application solves the technical problems that: the interference optical platform with high carrier-to-noise ratio and low attitude coupling optical path noise is provided, and the problems that the design of the off-axis and coaxial optical platforms cannot simultaneously achieve the requirements of few optical components, compact optical platform, low attitude coupling optical path noise, high carrier-to-noise ratio of a measuring system and the like are solved.
The technical scheme of the application is as follows: an interferometric optical platform with high carrier-to-noise ratio and low attitude coupling optical path noise, comprising:
The local laser light path comprises an optical fiber collimator, a polaroid, a quick reflection mirror, a first plano-convex lens, a polarizing flat beam splitter, a fourth plano-convex lens, a fifth plano-convex lens, a first four-quadrant photoelectric detector and a second four-quadrant photoelectric detector; the optical fiber collimator emits laser, the polarization direction of the laser is changed by the polarizing plate and then reflected by the quick reflection lens and passes through the first plano-convex lens, P light with the polarization direction parallel to the optical platform in the laser passes through the polarizing flat beam splitter, and part of the P light is reflected by the flat beam splitter and passes through the fourth plano-convex lens and then is thrown on the first four-quadrant photoelectric detector; the other part of P light transmitted through the flat beam splitter passes through a fifth plano-convex lens and then is cast on a second four-quadrant photoelectric detector;
The laser emission light path comprises a 1/4 wave plate, a reflecting mirror and a second plano-convex lens; the S light with the polarization direction perpendicular to the optical platform in the laser passing through the first plano-convex lens is reflected by the polarizing plate beam splitter, the S light is reflected by the reflector after passing through the 1/4 wave plate and returns along the original path, the P light parallel to the optical platform is formed after passing through the 1/4 wave plate again, and all the P light passes through the polarizing plate beam splitter and is emitted through the second plano-convex lens;
A receiving laser path comprising an aperture diaphragm and a third plano-convex lens; p light with the polarization direction parallel to the optical platform and emitted from the far end is intercepted by the aperture diaphragm and passes through the third plano-convex lens, wherein one part of the P light is reflected by the flat beam splitter, passes through the fifth plano-convex lens and is thrown onto the second four-quadrant photoelectric detector, and the other part of the P light passing through the flat beam splitter is thrown onto the first four-quadrant photoelectric detector after passing through the fourth plano-convex lens.
Further, the beam waist of the laser emitted by the optical fiber collimator is positioned at the center point of the reflecting surface of the quick reflection mirror.
Further, the polarizing plate sets the polarization state of the laser light to 10% p light and 90% s light.
Further, the first plano-convex lens, the fourth plano-convex lens, the first plano-convex lens and the fifth plano-convex lens form a kepler telescope respectively, the front focal point of the first plano-convex lens coincides with the center point of the fast reflection mirror reflecting surface, the rear focal point of the first plano-convex lens coincides with the front focal points of the fourth plano-convex lens and the fifth plano-convex lens, and the rear focal points of the fourth plano-convex lens and the fifth plano-convex lens are located at the center points of the detection surfaces of the first four-quadrant photoelectric detector and the second four-quadrant photoelectric detector respectively.
Further, the direction of the slow axis of the 1/4 wave plate is obtained by rotating 45 degrees in the clockwise direction perpendicular to the upward direction of the optical platform by taking the direction along which S light enters the 1/4 wave plate as a reference.
Further, the first plano-convex lens and the second plano-convex lens form a kepler telescope, and the back focus of the first plano-convex lens and the front focus of the second plano-convex lens coincide.
Further, the third plano-convex lens and the fourth plano-convex lens, the third plano-convex lens and the fifth plano-convex lens respectively form a kepler telescope, the front focal point of the third plano-convex lens coincides with the center point of the aperture diaphragm, and the rear focal point of the third plano-convex lens coincides with the front focal points of the fourth plano-convex lens and the fifth plano-convex lens; and the rear focus of the second plano-convex lens, the center point of the aperture diaphragm and the mass center of the satellite are coincided.
Further, the polarizing plate beam splitter is fully transparent to the P light with the polarization direction parallel to the optical platform, fully reflective to the S light with the polarization direction perpendicular to the optical platform, and the reflecting surfaces of the polarizing plate beam splitter are the initial incidence surfaces of the P light and the S light; the flat beam splitter is irrelevant to the polarization direction, and the beam splitting ratio is 1:1, the reflection surface is the initial incidence surface of the P light emitted from the polarizing plate beam splitter.
Further, the diameter of the aperture diaphragm is 20mm, the diameters of detection surface elements of the first four-quadrant photoelectric detector and the second four-quadrant photoelectric detector are 1mm, and the focal lengths of the first plano-convex lens, the second plano-convex lens, the third plano-convex lens, the fourth plano-convex lens and the fifth plano-convex lens are 50mm, 200mm, 10mm and 10mm respectively.
Further, according to the differential wavefront signal obtained by the first four-quadrant photoelectric detector or the second four-quadrant photoelectric detector, the pitching degree of freedom and the yawing degree of freedom of the quick reflection mirror are adjusted, so that the differential wavefront signal is close to zero; the first four-quadrant photoelectric detector and the second four-quadrant photoelectric detector form a balanced detector for eliminating direct current signal components in the differential wavefront signals and increasing alternating current signal components in the differential wavefront signals.
Compared with the prior art, the application has the advantages that:
According to the requirements of laser heterodyne interferometry on inter-satellite relative distance change, the advantages of few off-axis optical path components and high carrier-to-noise ratio of the coaxial optical path are combined, a scheme of constructing an off-axis optical platform by using five groups of kepler telescope systems is provided, anti-parallel of receiving and transmitting light beams is achieved, laser optical path noise caused by satellite attitude jitter is reduced, receiving light power of a satellite platform is increased, carrier-to-noise ratio of an optical measurement system is further improved, measurement requirements of a gravity satellite on inter-satellite relative displacement are met, and the method is reliable in precision and strong in stability.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the application. Also, like reference numerals are used to designate like parts throughout the figures. In the drawings:
FIG. 1 is a schematic diagram of an optical path design of the present application; wherein, RP: total reference point, TX RP: emission beam reference point, RX RP: receive beam reference point, P: p polarized light (parallel to the optical platform), S: s polarized light (perpendicular to the optical bench), LHC: left-handed circularly polarized light, RHC: right-hand circularly polarized light.
Detailed Description
In order to better understand the above technical solutions, the following detailed description of the technical solutions of the present application is made by using the accompanying drawings and specific embodiments, and it should be understood that the specific features of the embodiments and the embodiments of the present application are detailed descriptions of the technical solutions of the present application, and not limiting the technical solutions of the present application, and the technical features of the embodiments and the embodiments of the present application may be combined with each other without conflict.
The following describes in further detail an interference optical platform with high carrier-to-noise ratio and low attitude coupling optical path noise provided by the embodiment of the present application with reference to the accompanying drawings, and a specific implementation manner may include: a local laser light path, a transmitting laser light path and a receiving laser light path.
The local laser path means that laser is emitted from an optical fiber collimator, the polarization direction of the laser is changed by a polarizer, the laser is reflected by a quick reflector FSM and passes through a first plano-convex lens L1, then P light with the polarization direction parallel to an optical platform in the laser is transmitted through a polarizing flat beam splitter PBS, and then part of the P light is reflected by a flat beam splitter BS, passes through a fourth plano-convex lens L4 and is projected on a first four-quadrant photodetector QPD 1; meanwhile, the other part of the P light transmitted through the flat beam splitter BS passes through the fifth plano-convex lens L5 and is then cast onto the second four-quadrant photodetector QPD 2.
The emitted laser path means that laser is emitted from an optical fiber collimator, the polarization direction of the laser is changed by a polarizer, the laser is reflected by a quick reflector FSM and passes through a first plano-convex lens L1, S light with the polarization direction perpendicular to an optical platform in the laser is reflected by a polarizing plate beam splitter PBS, then the S light is changed into left-hand circularly polarized light after passing through a 1/4 wave plate, is changed into right-hand circularly polarized light after being reflected by a reflector and returns along an original path, P light which is changed into P light parallel to the optical platform after passing through the 1/4 wave plate again, and the P light is totally emitted through the polarizing plate beam splitter PBS and passes through a second plano-convex lens L2.
The received laser path means that P light which is emitted from the far end and has a polarization direction parallel to the optical platform is intercepted by the aperture diaphragm and then passes through the third plano-convex lens L3, and then a part of the P light is reflected by the flat beam splitter BS, passes through the fifth plano-convex lens L5 and is thrown onto the second four-quadrant photoelectric detector QPD 2; meanwhile, the other part of the P light transmitted through the plate beam splitter BS passes through the fourth plano-convex lens L4 and is then cast onto the first four-quadrant photodetector QPD 1.
The beam waist of the laser light exiting the fiber collimator is located at the center point of the FSM reflecting surface of the fast mirror.
The polarizing plate sets the polarization state of the laser light exiting from the fiber collimator to 10% p light and 90% s light.
The first plano-convex lens L1 and the fourth plano-convex lens L4, the first plano-convex lens L1 and the fifth plano-convex lens L5 form a kepler telescope, the front focal point of the first plano-convex lens L1 coincides with the center point of the reflecting surface of the fast reflector FSM, the back focal point of the first plano-convex lens L1 coincides with the front focal point of the fourth plano-convex lens L4 and the fifth plano-convex lens L5, and the back focal points of the fourth plano-convex lens L4 and the fifth plano-convex lens L5 are respectively located at the center points of the detecting surfaces of the first quadrant photodetector QPD1 and the second quadrant photodetector QPD 2.
The direction of the slow axis of the 1/4 wave plate can be obtained by rotating the Z axis by 45 degrees in the clockwise direction (as viewed along the direction of S light entering the 1/4 wave plate).
The first plano-convex lens L1 and the second plano-convex lens L2 constitute a kepler telescope, and the back focus of the first plano-convex lens L1 and the front focus of the second plano-convex lens L2 coincide and the back focus of the second plano-convex lens L2 is named as an emission beam reference point TX RP.
The diameter of the aperture diaphragm is 20mm, and the center point of the aperture diaphragm is named as the reference point RX RP of the received light beam.
The third plano-convex lens L3, the fourth plano-convex lens L4 and the fifth plano-convex lens L5 form a kepler telescope, and the front focal point of the third plano-convex lens L3 coincides with the reference point RX RP of the received light beam, and the back focal point of the third plano-convex lens L3 coincides with the front focal points of the fourth plano-convex lens L4 and the fifth plano-convex lens L5.
The polarization plate beam splitter PBS is fully transparent to P light with the polarization direction parallel to the optical platform, fully reflective to S light with the polarization direction perpendicular to the optical platform, and the reflection surfaces of the PBS are the initial incidence surfaces of the P light and the S light.
The flat beam splitter BS is independent of the polarization direction of the laser, and the splitting ratio is 1:1, and the reflection surface thereof is the initial incidence surface of the P light emitted from the polarizing plate beam splitter PBS.
The diameters of the detection surface elements of the first four-quadrant photoelectric detector QPD1 and the second four-quadrant photoelectric detector QPD2 are 1mm.
The transmitting beam reference point TX RP, the receiving beam reference point RX RP and the mass center of the satellite coincide.
The focal lengths of the first plano-convex lens L1, the second plano-convex lens L2, the third plano-convex lens L3, the fourth plano-convex lens L4 and the fifth plano-convex lens L5 are respectively 50 mm, 200mm, 10mm and 10mm.
The fast mirror FSM adjusts two degrees of freedom of pitch and yaw according to the differential wavefront signal DWS detected by the first four-quadrant photodetector QPD1 or the second four-quadrant photodetector QPD2, so that the DWS signal is as close to zero as possible.
The first four-quadrant photoelectric detector QPD1 and the second four-quadrant photoelectric detector QPD2 can form a balanced detector, eliminate direct current signal components and increase alternating current signal components.
In the scheme provided by the embodiment of the application, as shown in fig. 1, the application mainly comprises the following optical components: the optical fiber collimator has a laser beam waist radius of 2.5mm; a polarizing plate having a split ratio of P light parallel to the optical mesa and S light perpendicular to the optical mesa of 1:9, a step of performing the process; the fast reflecting mirror can realize the control of two degrees of freedom of micro-arc measurement yaw and pitch; the polarization plate beam splitter PBS is fully transparent to P light and fully reflective to S light; the plate beam splitter BS is independent of the polarization direction of the laser, and the transmission ratio is 1:1, a step of; a 1/4 wave plate, the slow axis direction rotating 45 ° in the clockwise direction on the Z axis (viewed along the direction in which the S light enters the 1/4 wave plate); a reflecting mirror, the reflecting surface is perpendicular to the incidence direction of the laser; an aperture diaphragm with a diameter of 20mm; the first plano-convex lens L1, the second plano-convex lens L2, the third plano-convex lens L3, the fourth plano-convex lens L4 and the fifth plano-convex lens L5 have focal lengths of 50, 200, 200, 10, 10mm, respectively; the first four-quadrant photodetector QPD1 and the second four-quadrant photodetector QPD2, the detection bin diameter is 1mm.
The design scheme of the optical path of the application is as follows: the laser beam waist radius from the fiber collimator was 2.5mm, and the beam waist position was set at the center of the FSM reflecting surface of the fast mirror. After passing through the polarizer, the laser consisted of P light with 10% polarization direction parallel to the optical bench and S light with 90% polarization direction perpendicular to the optical bench. After being reflected by the fast mirror FSM, the laser light passes through the first plano-convex lens L1. Then P light passes through the polarization plate beam splitter PBS, and then half of the P light passes through the plate beam splitter BS and the fifth plano-convex lens L5 continuously and is projected onto the second four-quadrant photodetector QPD 2; the other half is reflected by the flat beam splitter BS and projected onto the first four-quadrant photodetector QPD1 through the fourth plano-convex lens L4. S light in original laser is reflected by a polarizing plate beam splitter PBS and then is changed into left-hand circularly polarized light through a 1/4 wave plate, is changed into right-hand circularly polarized light after being reflected by a reflecting mirror, and then is changed into P light through the 1/4 wave plate, so that the P light directly passes through the polarizing plate beam splitter PBS and a second planoconvex lens L2 to be emitted to a far-end satellite. On the other hand, the laser emitted from the remote satellite is intercepted by the aperture diaphragm, passes through the third plano-convex lens L3, and then is half transmitted through the flat beam splitter BS and the fourth plano-convex lens L4 to be projected onto the first four-quadrant photodetector QPD1 to interfere with the local light; the other half is reflected by the flat beam splitter BS, passes through the fifth plano-convex lens L5, and finally projects onto the second four-quadrant photodetector QPD2 to interfere with another beam of local light.
The first four-quadrant photodetector QPD1 and the second four-quadrant photodetector QPD2 convert the optical beat signal into a current signal, and then into a voltage signal through an impedance amplifier. The first four-quadrant photoelectric detector QPD1 and the second four-quadrant photoelectric detector QPD2 can form a balanced detector, direct current signals cancel, alternating current signals double, and signal to noise ratio can be effectively increased. The voltage signals output by the quadrants of the detector are input into the channels of the phase meter, and the phase meter can output real-time phase change information of the channels. The phases of the four channel outputs are designed as follows: And/> The differential wavefront signal can be calculated by the following formula:
The DWS h is a differential wavefront signal parallel to the optical platform, and can measure the difference of the wavefront of two laser beams in the horizontal direction; whereas DWS v is a differential wavefront signal perpendicular to the optical platform, the difference in the wavefront of the two lasers in the vertical direction can be measured. The two differential wavefront signals are used as the input of a feedback control loop to adjust the yaw and pitch angles of the fast-reflection mirror FSM so that the differential wavefront signals are always close to 0, thus two laser beams which interfere can keep a common path, and a receiving beam and a transmitting beam can also keep antiparallel. Before the whole optical path system starts to work, the positions and directions of the polarizing plate beam splitter PBS and the polarizing plate beam splitter BS need to be adjusted, so that the receiving light beam and the transmitting light beam are antiparallel at the beginning.
The center point of the connection of the receive beam reference point RX RP and the transmit beam reference point TX RP is named the total reference point RP. During system operation, the centroid of the adjusting satellite and the total reference point are kept coincident, and when the whole satellite rotates around the centroid, the RX RP point and the TX RP point move in opposite directions and are equal in size. Therefore, the optical path change measured by the phase meter on the local satellite and the optical path change measured by the phase meter on the remote satellite cancel each other out, and the attitude coupling optical path noise caused by satellite rotation can be effectively restrained.
The carrier-to-noise ratio of the four-quadrant detector of the optical path measurement system can be expressed as follows:
Where I noise is the current noise of the photodetector, I carrier is the effective value of the load current, and PSD refers to the power spectral density. I carrier can be further written as:
Where P RX denotes the power of the received beam on the photodetector, which is proportional to the square of the aperture stop radius; p LO is the power of the local beam on the photodetector; η PD is the photoelectric conversion efficiency of the photodiode; and η represents heterodyne interference efficiency of two beams of light, and the expression can be approximately written as:
Where r PD is the radius of the detection bin of the photodetector and ω LO,PD represents the beam waist radius of the local beam when it is incident on the photodetector. In order to make as many local beams as possible incident on the detection bin and to increase heterodyne interference efficiency as much as possible, r PD＝ωLO,PD =1 mm, heterodyne interference efficiency can be calculated to be 0.92. Meanwhile, the radius of the detection surface element is 1mm, and the magnification of the receiving light path is 10mm of the radius of the aperture diaphragm. Therefore, the optical path design increases the carrier-to-noise ratio of the measuring optical system mainly by increasing the power of the received light beam and the heterodyne interference efficiency of the received light and the local light, thereby improving the accuracy of the inter-satellite relative distance measurement.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present application without departing from the spirit or scope of the application. Thus, it is intended that the present application also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
What is not described in detail in the present specification is a well known technology to those skilled in the art.
Claims (10)
1. An interferometric optical platform with high carrier-to-noise ratio and low attitude coupling optical path noise, comprising:
The local laser light path comprises an optical fiber collimator, a polaroid, a quick reflection mirror, a first plano-convex lens, a polarizing flat beam splitter, a fourth plano-convex lens, a fifth plano-convex lens, a first four-quadrant photoelectric detector and a second four-quadrant photoelectric detector; the optical fiber collimator emits laser, the polarization direction of the laser is changed by the polarizing plate and then reflected by the quick reflection lens and passes through the first plano-convex lens, P light with the polarization direction parallel to the optical platform in the laser passes through the polarizing flat beam splitter, and part of the P light is reflected by the flat beam splitter and passes through the fourth plano-convex lens and then is thrown on the first four-quadrant photoelectric detector; the other part of P light transmitted through the flat beam splitter passes through a fifth plano-convex lens and then is cast on a second four-quadrant photoelectric detector;
The laser emission light path comprises a 1/4 wave plate, a reflecting mirror and a second plano-convex lens; the S light with the polarization direction perpendicular to the optical platform in the laser passing through the first plano-convex lens is reflected by the polarizing plate beam splitter, the S light is reflected by the reflector after passing through the 1/4 wave plate and returns along the original path, the P light parallel to the optical platform is formed after passing through the 1/4 wave plate again, and all the P light passes through the polarizing plate beam splitter and is emitted through the second plano-convex lens;
A receiving laser path comprising an aperture diaphragm and a third plano-convex lens; p light with the polarization direction parallel to the optical platform and emitted from the far end is intercepted by the aperture diaphragm and passes through the third plano-convex lens, wherein one part of the P light is reflected by the flat beam splitter, passes through the fifth plano-convex lens and is thrown onto the second four-quadrant photoelectric detector, and the other part of the P light passing through the flat beam splitter is thrown onto the first four-quadrant photoelectric detector after passing through the fourth plano-convex lens.
2. The interferometer optical stage of claim 1, wherein the waist of the laser light emitted from the fiber collimator is centered on the fast reflector.
3. The interferometer optical stage of claim 1, wherein the polarizer sets the polarization state of the laser light to 10% p-light and 90% s-light.
4. The interference optical platform with high carrier-to-noise ratio and low attitude coupling optical path noise according to claim 1, wherein the first plano-convex lens and the fourth plano-convex lens, the first plano-convex lens and the fifth plano-convex lens respectively form a kepler telescope, the front focal point of the first plano-convex lens coincides with the center point of the fast reflecting mirror reflecting surface, the rear focal point of the first plano-convex lens coincides with the front focal points of the fourth plano-convex lens and the fifth plano-convex lens, and the rear focal points of the fourth plano-convex lens and the fifth plano-convex lens are respectively located at the center points of the detection surfaces of the first quadrant photodetector and the second quadrant photodetector.
5. The interference optical bench of claim 1 wherein the direction of the slow axis of the 1/4 wave plate is rotated 45 ° in a clockwise direction perpendicular to the upward direction of the optical bench with respect to the direction of the S-light entering the 1/4 wave plate.
6. The interferometer optical stage of claim 1, wherein the first plano-convex lens and the second plano-convex lens form a keplerian telescope, and the back focal point of the first plano-convex lens and the front focal point of the second plano-convex lens coincide.
7. The interference optical platform with high carrier-to-noise ratio and low attitude coupling optical path noise according to claim 1, wherein the third plano-convex lens and the fourth plano-convex lens, the third plano-convex lens and the fifth plano-convex lens respectively form a kepler telescope, the front focal point of the third plano-convex lens coincides with the center point of the aperture diaphragm, and the rear focal point of the third plano-convex lens coincides with the front focal points of the fourth plano-convex lens and the fifth plano-convex lens; and the rear focus of the second plano-convex lens, the center point of the aperture diaphragm and the mass center of the satellite are coincided.
8. The interference optical platform with high carrier-to-noise ratio and low attitude coupling optical path noise according to claim 1, wherein the polarizing plate beam splitter is fully transparent to P light with a polarization direction parallel to the optical platform and fully reflective to S light with a polarization direction perpendicular to the optical platform, and the reflecting surfaces are the initial incidence surfaces of the P light and the S light; the flat beam splitter is irrelevant to the polarization direction, and the beam splitting ratio is 1:1, the reflection surface is the initial incidence surface of the P light emitted from the polarizing plate beam splitter.
9. The interferometer optical stage of claim 1, wherein the aperture stop has a diameter of 20mm, the detection surface elements of the first four-quadrant photodetector and the second four-quadrant photodetector have a diameter of 1mm, and the focal lengths of the first plano-convex lens, the second plano-convex lens, the third plano-convex lens, the fourth plano-convex lens, and the fifth plano-convex lens are 50mm, 200mm, 10mm, and 10mm, respectively.
10. The interference optical platform of high carrier-to-noise ratio and low attitude coupling optical path noise according to claim 1, wherein the two degrees of freedom of pitching and yawing of the fast mirror are adjusted according to the differential wavefront signal obtained by the first four-quadrant photodetector or the second four-quadrant photodetector, so that the differential wavefront signal is close to zero; the first four-quadrant photoelectric detector and the second four-quadrant photoelectric detector form a balanced detector for eliminating direct current signal components in the differential wavefront signals and increasing alternating current signal components in the differential wavefront signals.
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2024
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