CN117928695A - MEMS optical fiber cantilever type weighing sensor and weighing module - Google Patents
MEMS optical fiber cantilever type weighing sensor and weighing module Download PDFInfo
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- CN117928695A CN117928695A CN202410330217.2A CN202410330217A CN117928695A CN 117928695 A CN117928695 A CN 117928695A CN 202410330217 A CN202410330217 A CN 202410330217A CN 117928695 A CN117928695 A CN 117928695A
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- 238000005303 weighing Methods 0.000 title claims abstract description 44
- 239000013307 optical fiber Substances 0.000 title claims abstract description 17
- 239000000835 fiber Substances 0.000 claims description 20
- 230000035945 sensitivity Effects 0.000 claims description 5
- 238000005259 measurement Methods 0.000 abstract description 21
- 230000005484 gravity Effects 0.000 description 7
- 238000005452 bending Methods 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000009434 installation Methods 0.000 description 4
- 230000007774 longterm Effects 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000005489 elastic deformation Effects 0.000 description 2
- 230000002427 irreversible effect Effects 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
- G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
- G01G3/125—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing wherein the weighing element is an optical member
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- Physics & Mathematics (AREA)
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Abstract
The application relates to an MEMS optical fiber cantilever type weighing sensor and a weighing module, and belongs to the technical field of weighing measurement. The MEMS optical fiber cantilever type weighing sensor is used for measuring the weight or force application of an object to be measured and is provided with a cantilever beam, wherein a containing cavity is formed in the cantilever beam, one end of the cantilever beam is positioned at a fixed position, the other end of the cantilever beam is positioned at a loading position, and the object to be measured is placed at one end of the loading position; the accommodating cavity comprises at least four connected surfaces, at least one blazed grating arranged on a first surface in the accommodating cavity and at least one collimator arranged on a second surface in the accommodating cavity, wherein the first surface and the second surface are two adjacent surfaces in the accommodating cavity; and at least one collimator is in the same vertical plane as at least one blazed grating. The MEMS optical fiber cantilever type weighing sensor improves the measuring precision when the measured object is weighed, and prolongs the service cycle of the weighing sensor.
Description
Technical Field
The invention relates to the technical field of displacement measurement, in particular to an MEMS optical fiber cantilever type weighing sensor and a weighing module.
Background
The weighing device measures the weight of a measured object by using a weighing sensor, wherein the weighing sensor is a special force sensor for weighing, and the single-point weighing sensor is gradually called as a main sensor type in the modern weighing field with high precision. The single-point weighing sensor comprises parallel beams, bending beams, double bending beams and the like, the single-point weighing sensor on the market is based on the principle of an electronic strain gauge, the sensor structure deforms after being stressed, strain gauges stuck to the deformation area can monitor the strain of the structure at the moment, the stress of the sensor structure can be known through the strain, and therefore the weight of an object to be measured is calculated, for example, the typical parallel beam weighing sensor on the market is realized by the electronic strain gauge combined by a Wheatstone bridge.
These several types of techniques have the following drawbacks: 1. the long-term stability is poor, and the phenomena of creep, drifting and the like can occur when the electronic strain gauge, the vibrating wire and the fiber bragg grating are used for a long time, so that the performance of the sensor is reduced; 2. the resistance strain gauge and the vibrating wire strain gauge are active devices and are easy to be interfered by electromagnetic waves; 3. the fiber grating strain gauge has low resolution and poor precision due to the limitation of the stretching amount of the fiber grating.
The Chinese patent CN115560682B discloses a stress measuring device, which is provided with a top supporting beam and two vertical supporting beams, wherein a blazed grating chip and a collimation unit are respectively fixed on the vertical supporting beam and the top supporting beam, and the measurement of micro displacement is obtained through the measurement of micro angle, however, in the document, because the angular points arranged at the connecting positions of the top supporting beam and the two vertical supporting beams have inconsistent structures, for example, the angular points have different notch tolerance, the two vertical supporting beams have different inclination angles under the action of external force, and are inconsistent in deformation, so that the measurement of micro displacement is inaccurate; in the displacement measuring device, because the two vertical supporting beams are fixedly connected by virtue of the lower corner, when the top supporting beam is subjected to tiny side load or vibration, a bending moment around the lower fixed corner is generated on the top supporting beam, so that the measuring structure is unstable, and the angles of the vertical supporting beam and the top supporting beam are continuously changed, thus being unfavorable for stable measurement of displacement. Chinese patent CN206514980U discloses a dual fiber grating soil pressure sensor, in which a tensile fiber grating is disposed inside a parallelogram, when the parallelogram is deformed, the wavelength of light inside the grating is changed, strain is calculated according to the wavelength, and then pressure of a diaphragm is calculated according to the strain; chinese patent CN201237522Y discloses a grating weighing sensor, in which fiber gratings are arranged at weak positions of upper and lower end surfaces of a hole, and when a load is applied, the wavelength of the fiber gratings is changed to calculate the load; the fiber bragg gratings of the two sensors are fixed by using glue, when the fiber bragg gratings are used for a long time, stress is in a stretching state, creep, drifting and other phenomena can occur, and the resolution ratio of the fiber bragg grating strain gauge limited by the stretching amount of the fiber bragg grating is low and the precision is poor. The European Union patent EP0256392A1 discloses a cantilever weighing device, wherein resistance strain gages are attached to different positions of the upper surface of a cantilever, and the gravity of the tail end of the cantilever is calculated according to the strain generated by two resistance strain gages, however, the electronic strain is the same as that of a fiber bragg grating, and phenomena such as creep, drifting and the like can occur during long-term use, so that the performance of a sensor is reduced; and the resistance strain gauge and the vibrating wire strain gauge are active devices and are easy to be subjected to electromagnetic interference.
Disclosure of Invention
In order to overcome at least one of the problems in the prior art, the invention provides a MEMS optical fiber cantilever type weighing sensor and a weighing module which can perform accurate measurement.
The MEMS optical fiber cantilever type weighing sensor capable of accurately measuring is used for measuring the weight or force application of an object to be measured and is provided with a cantilever beam, wherein the cantilever beam is internally provided with a containing cavity which is divided into at least four connected surfaces, one end of the cantilever beam is positioned at a fixed position, the other end of the cantilever beam is positioned at a loading position, and the object to be measured is placed at one end of the loading position; at least one blazed grating arranged on a first surface in the accommodating cavity and at least one collimator arranged on a second surface in the accommodating cavity, wherein the first surface and the second surface are two adjacent surfaces in the accommodating cavity; and at least one collimator is in the same vertical plane as at least one blazed grating. When the measured object is placed at the loading position, the cantilever beam is deformed under the action of the gravity and the loading position, and the deformation is tiny, so that the section of the accommodating cavity has a trend of changing towards a parallelogram, corresponding angle changes are generated on two adjacent surfaces of the accommodating cavity, the angle changes between the two adjacent surfaces cause the angle changes between the collimator and the blazed grating, the deformation of the cantilever beam is monitored, and the weight of the measured object is obtained according to the calculation of the deformation of the cantilever beam.
In an alternative embodiment, the two adjacent surfaces are formed with two sides in the vertical plane, i.e. the cross section of the paper plane, and the sensitivity of the weighing sensor can be adjusted by adjusting the length ratio of the first side of the adjacent first surface to the second side of the receiving cavity, adjusting the deformation of the cantilever beam between the same gravity forces and adjusting the angle variation between the adjacent sides of the quadrangle. Preferably, the first side is a vertical side, the second side is a horizontal side, and the ratio of the vertical side to the horizontal side is in the range of 1:1 to 1:4, so that the optimal measuring range and sensitivity can be obtained when the measured object generates corresponding strain.
In an alternative embodiment, the fixed position and the loading position of the cantilever beam are located at two sides of the accommodating cavity of the cantilever beam, preferably at a diagonal position, so that the weight of the measured object has the maximum moment from the cantilever beam, and the deformation of the cantilever beam is increased. For example, the fixed position of the cantilever beam is located at the lower part of the cantilever Liang Zuoduan, the loading position of the cantilever beam is located at the upper part of the right end of the cantilever beam, the gravity of the measured object is utilized to act on the loading position, the cantilever beam is deformed, and the weight of the measured object is calculated by monitoring the corresponding angle changes of the two adjacent surfaces of the cantilever beam. The loading position is provided with the tray, fixed position is connected with the fixed plate and is used for fixed cantilever beam.
Preferably, the junction that holds the different faces of chamber forms a plurality of angular points, hold intracavity symmetric distribution and have 4 angular points, 4 angular points department is equipped with the deformation structure that structural strength is weak, preferably deformation structure is circular arc groove, circular arc groove is located 4 angular points, will hold the chamber and cut apart into equivalent parallelogram structure, utilizes the deformation structure that sets up at the angular point when the cantilever beam atress warp, prevent the stress concentration in angular point position, but increase the inclination of cantilever beam in the deformation process simultaneously, increase blazed grating diagonal angle measurement's accuracy to improve the accuracy of strain measurement.
In an alternative implementation, the circular arc grooves are tangent to the surface with the vertical edges, the connecting lines of the centers of the two circular arc grooves vertically opposite to each other extend along the vertical direction, the inner walls of the circular arc grooves are utilized to realize elastic deformation, and the stress concentration in the cantilever beam deformation process is prevented, so that irreversible damage is caused.
In an alternative implementation, at least one of the collimators is fixed on a second face parallel to the vertical face by a collimator bracket, the collimator bracket is fixedly connected on the second face, and the collimator is mounted on the collimator bracket; the blazed grating is fixed on a first surface adjacent to the second surface through a chip fixing rod, the chip fixing rod is fixedly connected to the first surface, the blazed grating is mounted on the chip fixing rod, and the chip fixing rod is of an L-shaped structure.
In an alternative implementation, at least one of the collimators is fixed on a second face parallel to the horizontal plane by a collimator bracket, the collimator bracket is fixedly connected on the second face, and the collimator is mounted on the collimator bracket; the blazed grating is fixed on a first surface adjacent to the second surface through a chip fixing rod, the chip fixing rod is fixedly connected to the first surface, and the blazed grating is installed on the chip fixing rod. The chip fixing rod is in a linear type, an L-shaped structure is not needed, the possibility of interference during installation of each part in the accommodating cavity is reduced, and the installation difficulty is reduced.
In a preferred embodiment, the housing cavity has a four-sided structure with four planar surfaces, a first side, a second side, a third side and a fourth side, respectively, the first side and the third side being parallel to the vertical side, the second side and the fourth side being parallel to the horizontal plane, two blazed gratings being provided on the first side, two blazed gratings being provided on the third side, the two blazed gratings being located at diagonal positions of the first side and the third side; corresponding to the blazed gratings of the first face and the third face, corresponding collimators are arranged on the second face and the fourth face. And a blazed grating bridge is formed by a plurality of blazed gratings through the blazed gratings arranged at diagonal positions, so that measurement inaccuracy caused by unbalanced load of an object to be measured is eliminated. For example, when the measured object is placed at the non-central position of the tray, the weight will generate bending moment around different axes to the cantilever beam, and the single blazed grating cannot comprehensively monitor the deformation of the cantilever beam, so that the deformation of different positions of the cantilever beam can be measured by utilizing the blazed grating bridge, the weight of the measured object can be accurately calculated, the measured object does not need to be placed at the central position of the tray, namely, above the loading position, by the arrangement of the blazed grating bridge, the inaccuracy in measurement when the measured object is placed at the edge of the tray is avoided, the placing requirement of the measured object is reduced, and the measuring difficulty is reduced.
The application also relates to a weighing module, which comprises the MEMS optical fiber cantilever type weighing sensor, wherein a tray is arranged at the loading position of the cantilever beam, and a fixing plate is connected at the fixing position for fixing the cantilever beam. One end upper portion of cantilever beam is connected with the tray, and the other end lower part is connected with the fixed plate.
As can be seen from the technical scheme, the MEMS optical fiber cantilever type weighing sensor improves the measurement precision when the measured object is weighed, prolongs the service cycle of the weighing sensor, has smaller wavelength variation in the prior art when the optical fiber grating is stretched, and generally does not exceed 5nm, and has the wavelength variation generated by 50nm, thereby improving the measurement precision; the blazed grating, the collimator and the components are fixed in a welding, threaded and other modes, the sensor is not influenced by external force, zero drift hidden danger is avoided, and long-term stability is better; through the setting of blazed grating bridge for the measured object need not to place in the central point of tray put promptly the top of loading position, has avoided the measured object to place when the tray edge and has measured inaccurately, has reduced the requirement of placing of measured object simultaneously, has reduced the measurement degree of difficulty, has avoided prior art weighing sensor's defect.
Drawings
FIG. 1 is a schematic diagram of a cantilever load cell of a MEMS fiber in accordance with an embodiment of the present invention;
FIG. 2 is a schematic diagram of a cantilever load cell of the present invention provided with a blazed grating bridge;
FIG. 3 is an isometric view of a weighing module of the present invention;
FIG. 4 is a front view of a weighing module of the present invention;
the device comprises a 1-MEMS optical fiber cantilever type weighing sensor, an 11-accommodating cavity, a 12-loading position, a 13-fixing position, a 14-circular arc-shaped groove, a 2-tray, a 3-fixing plate, a 4-chip fixing rod, a 5-blazed grating, a 6-collimator and a 7-collimator bracket.
Detailed Description
The following describes in further detail the embodiments of the present invention with reference to the drawings and examples. The following examples are illustrative of the invention and are not intended to limit the scope of the invention.
The present invention will be further described in detail below with reference to specific embodiments and with reference to the accompanying drawings, in order to make the objects, technical solutions and advantages of the present invention more apparent.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the disclosure. The terms "comprises," "comprising," and/or the like, as used herein, specify the presence of stated features, steps, operations, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, or components.
All terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art unless otherwise defined. It should be noted that the terms used herein should be construed to have meanings consistent with the context of the present specification and should not be construed in an idealized or overly formal manner.
Certain embodiments of the present disclosure will now be described more fully hereinafter with reference to the accompanying drawings, in which some, but not all embodiments are shown. Indeed, various embodiments of the disclosure may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will satisfy applicable legal requirements.
A MEMS fiber optic cantilever load cell 1 for accurate measurement, for measuring the weight or force applied by an object under measurement, as shown in fig. 1-2, having a cantilever beam with a receiving cavity 11 inside the cantilever beam, the receiving cavity 11 comprising at least four connected faces, one end of the cantilever beam being in a fixed position 13 and the other end being in a loading position 12, the object under measurement being placed at one end of the loading position 12; at least one blazed grating 5 arranged on a first side in the accommodating cavity 11 and at least one collimator 6 arranged on a second side in the accommodating cavity 11, wherein the first side and the second side are two adjacent sides in the accommodating cavity 11; and at least one collimator 6 is in the same vertical plane as at least one blazed grating 5. The blazed grating 5 and the collimator 6 are fixed on the corresponding surfaces by means of welding, threads, etc. The connection part of the collimator 6 and the optical fiber and the signal receiver belongs to the prior art, not shown, when the object to be measured is placed at the loading position 12, gravity acts on the loading position 12 to deform the cantilever under the action of the bending moment, and the cross section of the accommodating cavity 11 has a trend of changing towards the parallelogram due to the tiny deformation, so that the adjacent two surfaces of the accommodating cavity 11 generate corresponding angle changes, the angle between the adjacent two surfaces changes to cause the angle between the collimator 6 and the blazed grating 5 to change, thereby realizing the monitoring of the deformation of the cantilever, and further obtaining the weight of the object to be measured according to the calculation of the deformation of the cantilever.
In an alternative embodiment, the two adjacent sides are formed with two sides in a vertical plane, i.e. the cross section of the paper plane in fig. 1 and 2, and the sensitivity of the weighing sensor can be adjusted by adjusting the length ratio of the first side of the adjacent first side to the second side of the accommodating cavity 11, adjusting the deformation of the cantilever beam between the same gravity forces, and adjusting the angle variation between the adjacent sides of the quadrangle. Preferably, the first side is a vertical side, the second side is a horizontal side, and the ratio of the vertical side to the horizontal side is in the range of 1:1 to 1:4, so that the optimal measuring range and sensitivity can be obtained when the measured object generates corresponding strain.
In an alternative embodiment, the fixed position 13 and the loading position 12 of the cantilever beam are located at two sides of the accommodating cavity of the cantilever beam, and an optimal position may be a diagonal position of the cantilever beam, as can be seen in fig. 4, so that the weight of the object to be measured has the maximum moment from the cantilever beam, and the deformation of the cantilever beam is increased. For example, the fixed position 13 of the cantilever beam is located at the lower part of the cantilever Liang Zuoduan, the loading position 12 of the cantilever beam is located at the upper part of the right end of the cantilever beam, the gravity of the measured object is used for acting on the loading position 12 to deform the cantilever beam, and the weight of the measured object is calculated by monitoring the corresponding angle changes of the two adjacent surfaces of the cantilever beam. The loading position 12 is provided with a tray 2, and the fixing position 13 is connected with a fixing plate 3 for fixing the cantilever beam.
Preferably, the connection parts of different surfaces of the accommodating cavity 11 form a plurality of corner points, 4 corner points are symmetrically distributed in the accommodating cavity, deformation structures with weak structural strength are arranged at the 4 corner points, preferably, the deformation structures are arc-shaped grooves 14, the deformation structures arranged at the corner points are utilized, when the cantilever beam is stressed and deformed, stress concentration at the corner points is prevented, meanwhile, the inclination angle of the cantilever beam in the deformation process can be increased, the accuracy of the blazed grating 5 in angle measurement is improved, and accordingly the accuracy of the strain measurement is improved.
In an alternative implementation, the circular arc grooves 14 are tangent to the surface with vertical edges, the connecting lines of the centers of the two circular arc grooves 14 which are vertically opposite extend along the vertical direction, and the inner wall of the circular arc groove 14 is utilized to realize elastic deformation, so that the stress concentration in the cantilever beam deformation process is prevented, and the irreversible damage is caused.
In an alternative implementation, at least one of said collimators 6 is fixed by a collimator bracket 7 on a second face parallel to the vertical face, on which said collimator bracket 7 is fixedly connected, said collimator 6 being mounted on said collimator bracket 7; the blazed grating 5 is fixed on a first surface adjacent to the second surface through a chip fixing rod 4, the chip fixing rod 4 is fixedly connected to the first surface, the blazed grating 5 is mounted on the chip fixing rod 4, and the chip fixing rod 4 has an L-shaped structure.
In an alternative embodiment, at least one of said collimators 6 is fixed by means of a collimator support 7 to a second surface having a parallel horizontal plane, to which said collimator support 7 is fixedly connected, said collimator 6 being mounted to said collimator support 7; the blazed grating 5 is fixed on a first surface adjacent to the second surface through a chip fixing rod 4, the chip fixing rod 4 is fixedly connected to the first surface, and the blazed grating 5 is mounted on the chip fixing rod 4. By the arrangement, the chip fixing rod 4 is linear, an L-shaped structure is not needed, the possibility of interference during installation of each part in the accommodating cavity 11 is reduced, and the installation difficulty is reduced.
In a preferred embodiment, the housing 11 has a four-sided structure with four sides, a first side, a second side, a third side and a fourth side, respectively, the first side and the third side being parallel to the vertical side, the second side and the fourth side being parallel to the horizontal plane, as shown in fig. 2, two blazed gratings 5 being provided on the first side, two blazed gratings 5 being provided on the third side, the two blazed gratings 5 being located at diagonal positions of the first side and the third side; corresponding to the blazed gratings 5 of the first and third faces, respective collimators 6 are arranged on the second and fourth faces. And through the blazed gratings 5 arranged at the diagonal positions, a blazed grating bridge is formed by a plurality of blazed gratings 5, so that measurement inaccuracy caused by unbalanced load of an object to be measured is eliminated. For example, when the measured object is placed at the non-center position of the tray 2, the weight will generate bending moment around different axes to the cantilever beam, and the single blazed grating 5 cannot fully monitor the deformation of the cantilever beam, so that the deformation of different positions of the cantilever beam can be measured by utilizing the blazed grating bridge, the weight of the measured object can be accurately calculated, and the measured object is not required to be placed at the center position of the tray 2, namely, above the loading position 12 through the arrangement of the blazed grating bridge, so that inaccurate measurement when the measured object is placed at the edge of the tray 2 is avoided, the placing requirement of the measured object is reduced, and the measuring difficulty is reduced.
The application also relates to a weighing module, shown in figures 3 to 4, comprising the MEMS optical fiber cantilever type weighing sensor, a tray 2 being arranged at a loading position 12 of the cantilever beam, and a fixing plate 3 being connected to the fixing position 13 for fixing the cantilever beam. The upper part of one end of the cantilever beam is connected with a tray 2, and the lower part of the other end of the cantilever beam is connected with a fixing plate 3.
Claims (9)
1. The MEMS optical fiber cantilever type weighing sensor is used for measuring the weight or force application of an object to be measured and is provided with a cantilever beam, wherein a containing cavity is formed in the cantilever beam, one end of the cantilever beam is positioned at a fixed position, the other end of the cantilever beam is positioned at a loading position, and the object to be measured is placed at one end of the loading position; the device is characterized in that the accommodating cavity comprises at least four connected surfaces, at least one blazed grating arranged on a first surface in the accommodating cavity and at least one collimator arranged on a second surface in the accommodating cavity, wherein the first surface and the second surface are two adjacent surfaces in the accommodating cavity; and at least one collimator and at least one blazed grating are positioned in the same vertical plane, and the weight or the force application of the measured object is calculated by measuring the corresponding angle change of the two adjacent surfaces of the accommodating cavity.
2. The MEMS fiber optic cantilever load cell according to claim 1, wherein the two adjacent sides are formed with two sides in a vertical plane cross section, and wherein the sensitivity of the load cell is adjusted by adjusting the ratio of the length of the first side of the adjacent first side to the second side of the receiving cavity to adjust the deformation of the cantilever beam under the same weight.
3. The MEMS optical fiber cantilever type weighing sensor according to claim 1, wherein the fixed position and the loading position of the cantilever beam are respectively located at two sides of the accommodating cavity, a plurality of corner points are formed at the connecting positions of different surfaces of the accommodating cavity, 4 corner points are symmetrically distributed in the accommodating cavity, and deformation structures with weak structural strength are arranged at the 4 corner points.
4. A MEMS fiber optic cantilever load cell according to claim 3 wherein the deformed structure is a circular arc shaped slot.
5. The MEMS fiber optic cantilever weighing sensor of claim 4 wherein said arcuate slots are tangential to a plane parallel to the vertical plane, the line connecting the centers of the vertically opposed arcuate slots extending in the vertical direction, said arcuate slots being located at 4 corner points dividing the receiving cavity into equivalent parallelogram structures.
6. The MEMS fiber optic cantilever load cell of claim 5, wherein at least one of the collimators is secured to a second face parallel to the parallelogram structure by a collimator mount to which the collimator mount is fixedly attached; the blazed grating is fixed on a first surface adjacent to a second surface of the parallelogram structure through a chip fixing rod, the chip fixing rod is fixedly connected to the first surface, the blazed grating is installed on the chip fixing rod, and the chip fixing rod is of an L-shaped structure.
7. The MEMS fiber optic cantilever load cell of claim 1, wherein at least one of the collimators is secured by a collimator mount to a second face having a surface parallel to the horizontal plane, the collimator mount being fixedly attached to the second face, the collimator being mounted to the collimator mount; the blazed grating is fixed on a first surface adjacent to the second surface through a chip fixing rod, the chip fixing rod is fixedly connected to the first surface, and the blazed grating is installed on the chip fixing rod.
8. The MEMS fiber optic cantilever weighing sensor according to claim 1, wherein said receiving cavity is divided by a deformation structure at 4 corner points into four faces, a first face, a second face, a third face and a fourth face, respectively, said first face and said third face being parallel to a vertical face, said second face and said fourth face being parallel to a horizontal plane, two blazed gratings being provided at said first face, two blazed gratings being provided at said third face, said two blazed gratings of said first face and said third face being located at diagonal positions of said first face and said third face; corresponding to the blazed gratings of the first face and the third face, corresponding collimators are arranged on the second face and the fourth face.
9. A weighing module of a MEMS optical fiber cantilever weighing sensor according to any one of claims 1-8, wherein a tray is connected to an upper portion of one end of the cantilever beam, and a fixing plate is connected to a lower portion of the other end.
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