CN117907280B - Super-surface near-infrared refractive index sensor based on electromagnetic multipole resonance - Google Patents
Super-surface near-infrared refractive index sensor based on electromagnetic multipole resonance Download PDFInfo
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- CN117907280B CN117907280B CN202410117605.2A CN202410117605A CN117907280B CN 117907280 B CN117907280 B CN 117907280B CN 202410117605 A CN202410117605 A CN 202410117605A CN 117907280 B CN117907280 B CN 117907280B
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- 230000005405 multipole Effects 0.000 title claims abstract description 17
- 230000007547 defect Effects 0.000 claims abstract description 53
- 239000012491 analyte Substances 0.000 claims abstract description 33
- 238000010521 absorption reaction Methods 0.000 claims abstract description 27
- 239000000758 substrate Substances 0.000 claims abstract description 23
- 239000002061 nanopillar Substances 0.000 claims abstract description 18
- 239000007769 metal material Substances 0.000 claims abstract description 3
- 239000000463 material Substances 0.000 claims description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 239000002210 silicon-based material Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 abstract description 10
- 239000000126 substance Substances 0.000 abstract description 8
- 238000000034 method Methods 0.000 abstract description 7
- 230000008569 process Effects 0.000 abstract description 6
- 230000009471 action Effects 0.000 abstract description 5
- 238000005457 optimization Methods 0.000 abstract description 3
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 4
- 230000006978 adaptation Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000000969 carrier Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001448 refractive index detection Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
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Abstract
The invention discloses a super-surface near-infrared refractive index sensor based on electromagnetic multipole resonance, which comprises a super-surface structure and an infrared sensor, wherein the super-surface structure is a cuboid and comprises an analyte placement layer, an intermediate layer and a substrate which are sequentially arranged from top to bottom; the analyte placement layer is used for placing an analyte; the intermediate layer comprises a plurality of defect medium nano-pillar groups which are uniformly distributed, and each defect medium nano-pillar group consists of four defect medium nano-pillars; the substrate is made of metal materials; through parameter optimization of the super-surface structure, after the electromagnetic wave enters the super-surface structure, four absorption resonance peaks with narrow bands can be generated in a near infrared band; the infrared sensor receives the generated absorption resonance peak and acquires the refractive index of the analyte; errors in the detection process can be reduced through the combined action of the multichannel sensing, and substances with different refractive indexes can be detected due to the fact that the sensor has a plurality of absorption resonance peaks.
Description
Technical Field
The invention relates to a near infrared refractive index sensor, in particular to a super-surface near infrared refractive index sensor based on electromagnetic multipole resonance, and belongs to the technical field of material refractive index detection.
Background
The refractive index sensor is widely applied in the fields of material detection, medical diagnosis and the like, researchers develop a plurality of refractive index sensing researches by utilizing Fabry-Perot resonance, electric dipole or magnetic dipole resonance and the like, and the structure of a medium nano column and the material of the medium nano column used by the conventional refractive index sensor have larger ohmic loss, so that serious thermal effect can be generated to influence the generation of photo-generated carriers, and the photoelectric efficiency is reduced. In addition, the existing refractive index sensor mainly uses single-channel sensing (namely, the sensor can only generate one absorption resonance peak when receiving electromagnetic waves and is used for single-channel sensing), and compared with single-channel refractive index sensing, if the sensor can generate a plurality of absorption resonance peaks with narrow bands in a certain wavelength range when receiving electromagnetic waves and is used for normal incidence, namely, multi-channel sensing, errors in the detection process can be reduced through the combined action of the multi-channel sensing, and the sensor has a plurality of absorption resonance peaks, so that the sensor can detect substances with different refractive indexes, and is one of the directions required to be studied in the industry.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides the super-surface near-infrared refractive index sensor based on electromagnetic multipole resonance, which can generate a plurality of absorption resonance peaks with narrow bands in a certain wavelength range, can reduce errors in the detection process through the combined action of multi-channel sensing, and can detect substances with different refractive indexes due to the fact that the sensor is provided with the plurality of absorption resonance peaks.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows: the super-surface near-infrared refractive index sensor based on electromagnetic multipole resonance comprises a super-surface structure and an infrared sensor, wherein the super-surface structure is a cuboid and comprises an analyte placement layer, an intermediate layer and a substrate which are sequentially arranged from top to bottom;
the analyte placement layer is used for placing the analyte, and the refractive index of the analyte ranges from 1.00 to 2.00; the analyte encapsulates the intermediate layer and contacts the substrate;
The middle layer comprises a plurality of defect medium nano column groups which are uniformly distributed, each defect medium nano column group consists of four defect medium nano columns, each defect medium nano column is a cylinder, the circumferential side surface of each defect medium nano column is provided with a cutting angle penetrating through two end surfaces of the cylinder, and the cutting angle is in a sector shape from the center of a circle to the circumferential side surface in the cross section direction of the cylinder; the four defect medium nano-pillars in each defect medium nano-pillar group are distributed at equal intervals in a rectangular shape, the cutting angles of each defect medium nano-pillar are all oriented to the center of the rectangular distribution of the four defect medium nano-pillars, and the axis connecting line of the defect medium nano-pillars where the two oppositely oriented cutting angles are respectively located is divided into two cutting angles;
The substrate is made of metal materials, and four absorption resonance peaks can be generated in a near infrared band after electromagnetic waves are incident from an analyte and pass through the intermediate layer and the substrate;
the infrared sensor is oriented towards the substrate for receiving the generated absorption resonance peak and acquiring the refractive index of the analyte.
Further, the near infrared band is a range of wavelengths from 1.3 to 2.0 μm. Multiple absorption resonance peaks can be generated within the range.
Further, the thickness of the deposited analyte is 620nm to 760nm.
Further, the defect medium nano-pillars are made of silicon materials.
Further, the height of the defect medium nano column is 130 nm-140 nm, and the radius is 230 nm-270 nm.
Further, the opening angle of the cutting angle in the cross section direction of the cylinder is 50-70 degrees.
Further, the spacing between two adjacent defect medium nano-pillars is the same and is in the range of 20 nm-40 nm.
Further, the substrate is made of silver material.
Further, setting two vertical edges of the super surface structure as x and y directions respectively and setting the height direction of the super surface structure as z direction to establish a coordinate system; the period length of the super surface structure in the x and y directions is 1100 nm-1200 nm.
Through the co-optimization definition of the specific parameters on the super-surface structure, after the electromagnetic waves enter the super-surface structure, the super-surface structure can realize the deep coupling among electromagnetic multipoles, so that four absorption resonance peaks with narrow bands are generated in a near infrared band; and finally, the infrared sensor receives the four generated absorption resonance peaks to realize detection of substances with different refractive indexes.
Further, the electromagnetic wave is incident in a direction perpendicular to the super surface structure. Therefore, after the electromagnetic wave enters the super-surface structure, the super-surface structure can realize the deep coupling among electromagnetic multipoles.
Compared with the prior art, the invention has the following advantages:
1. according to the invention, an analyte placing layer, an intermediate layer and a substrate form a super-surface structure, and after electromagnetic waves enter the super-surface structure, the super-surface structure utilizes a plurality of defect medium nano columns with specific layout modes and cutting angles to interact with a silver substrate, so that deep coupling among electromagnetic multipoles can be realized, and four absorption resonance peaks are generated in a near infrared band; finally, the infrared sensor receives the four absorption resonance peaks, namely multichannel sensing is generated, so that errors in the detection process can be reduced under the combined action of the multichannel sensing, and the sensor can detect substances with different refractive indexes due to the fact that the sensor is provided with a plurality of absorption resonance peaks.
2. In order to ensure the resonance response performance of the sensor in a near infrared band, the invention optimizes the resonance response performance of the super-surface structure by limiting specific parameters of the thickness of an analyte, the height and the radius of a defect medium nano column, the distance between two adjacent defect medium nano columns, the opening angle of a cutting angle and the period length of the super-surface structure in x and y directions, so that four absorption resonance peaks of narrow bands can be stably formed in the near infrared band with the wavelength of 1.3-2.0 mu m after the subsequent electromagnetic wave enters the super-surface structure, and finally the sensor forms multichannel sensing.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a subsurface structure according to the present invention;
FIG. 2 is a top view of any one of the defective dielectric nanopillar sets of FIG. 1;
FIG. 3 is a graph of the spectral absorptance of the present invention in the band range of 1.3 to 2.0 μm;
fig. 4 shows the peak wavelength corresponding to an increase in thickness of analytes of different refractive indices (i.e., n=1.00-2.00) from 160nm to 760nm in an embodiment of the invention.
In the figure: 1. the method comprises the steps of (1) analyzing an analyte, 2, a defect medium nano column, 3, a substrate, wherein H is the thickness of the analyte, H is the height of the defect medium nano column, r is the radius of the defect medium nano column, s is the distance between two adjacent defect medium nano columns, θ is the opening angle of a cutting angle in the defect medium nano column, D is the thickness of the substrate, and P x and P y are the periods of a super-surface structure in the x and y directions respectively.
Detailed Description
The present invention will be further described below.
As shown in fig. 1, the present invention comprises a super-surface structure and an infrared sensor, wherein the super-surface structure is a rectangular body, and comprises an analyte placement layer, an intermediate layer and a substrate 3 which are sequentially arranged from top to bottom;
The analyte placement layer is used for placing the analyte 1, and the refractive index of the analyte 1 ranges from 1.00 to 2.00; the thickness of the placed analyte 1 is 620 nm-760 nm; the analyte 1 encapsulates the intermediate layer and is in contact with the substrate 3.
The middle layer comprises a plurality of defect medium nano column groups which are uniformly distributed, each defect medium nano column group consists of four defect medium nano columns 2, each defect medium nano column 2 is made of a silicon material, each defect medium nano column 2 is a cylinder, the circumferential side surface of each defect medium nano column 2 is provided with a cutting angle penetrating through two end surfaces of the cylinder, and the height of each defect medium nano column 2 is 130-140 nm, and the radius of each defect medium nano column 2 is 230-270 nm; the cutting angle is in a sector shape from the center to the side surface of the circumference in the cross section direction of the cylinder, and the opening angle of the cutting angle in the cross section direction of the cylinder is 50-70 degrees. As shown in fig. 2, four defect medium nano-pillars 2 in each defect medium nano-pillar group are equally spaced and distributed in a rectangular shape, and the spacing between two adjacent defect medium nano-pillars 2 is in the range of 20 nm-40 nm; the cutting angles of each defect medium nano column 2 face the rectangular distribution center of the four defect medium nano columns 2, and the axis connecting line of the defect medium nano columns 2 where the two oppositely-facing cutting angles are respectively located is divided into two cutting angles; the substrate 3 is made of silver material.
Setting two vertical edges of the super surface structure as x and y directions respectively and setting the height direction of the super surface structure as z direction to establish a coordinate system; the period length of the super surface structure in the x and y directions is 1100 nm-1200 nm. When the electromagnetic wave is incident in the direction perpendicular to the super-surface structure, the super-surface structure can realize the deep coupling among electromagnetic multipoles after the electromagnetic wave sequentially passes through the analyte, the intermediate layer and the substrate, and then four absorption resonance peaks with narrow bands are generated in the near infrared band (namely, the wavelength is in the range of 1.3-2.0 mu m);
the infrared sensor is oriented towards the substrate for receiving the generated absorption resonance peak and acquiring the refractive index of the analyte.
Through the co-optimization definition of the specific parameters on the super-surface structure, after the electromagnetic waves enter the super-surface structure, the super-surface structure can realize the deep coupling among electromagnetic multipoles, so that four absorption resonance peaks with narrow bands are generated in a near infrared band; and finally, the infrared sensor receives the four generated absorption resonance peaks to realize detection of substances with different refractive indexes.
The test proves that:
the super-surface near-infrared refractive index sensor based on electromagnetic multipole resonance is manufactured through the scheme, and specific parameters are defined as follows: the height of the defect medium nano column 2 is 135nm, and the radius is 260nm; the opening angle of the cutting angle in the cross section direction of the cylinder is 60 degrees; the distance between two adjacent defect medium nano columns 2 is 40nm; the period length of the super surface structure in the x and y directions is 1120nm.
The sensor is tested, as shown in FIG. 3, the near infrared wave band with the wavelength of 1.3-2.0 μm forms four absorption resonance peaks with narrow bands, the center wavelengths corresponding to the four absorption resonance peaks are respectively 1.394, 1.484, 1.722 and 1.822 μm, and the corresponding absorption rates are respectively 99.92%,99.26%,99.27% and 98.13%; the maximum sensitivity S of the sensor reaches 395.5, 211.8, 170.6 and 267.7nm/RIU respectively, and the corresponding FOM reaches 37.5882, 19.7001, 10.5761 and 3.9986, and the maximum quality factors are 136.89, 98.76, 154.46 and 168.46 respectively. Therefore, the sensor has four channels, errors in the detection process can be reduced through the combined action of multi-channel sensing, and substances with different refractive indexes can be detected due to the fact that the sensor has a plurality of absorption resonance peaks.
In addition, analytes with refractive indexes of 1.00, 1.25, 1.50, 1.75 and 2.00 are respectively placed on the sensor, and the thickness of each analyte is subjected to a peak wavelength test from 160nm, and then each time the thickness is increased by 20nm, one test is performed until the thickness reaches 760nm; as shown in FIG. 4, by testing the thickness variation of various analytes with different refractive indexes, it can be obtained that the peak wavelength of different substances tends to be stable when the thickness of the analytes is larger than 620nm, so that the thickness of the analytes is determined to be in the range of 620 nm-760 nm in the invention, and detection errors caused by the thickness variation of the analytes can be avoided in the actual detection process.
The foregoing is only a preferred embodiment of the invention, it being noted that: it will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the principles of the present invention, and such modifications and adaptations are intended to be comprehended within the scope of the invention.
Claims (5)
1. The super-surface near-infrared refractive index sensor based on electromagnetic multipole resonance is characterized by comprising a super-surface structure and an infrared sensor, wherein the super-surface structure is a cuboid and comprises an analyte placement layer, an intermediate layer and a substrate which are sequentially arranged from top to bottom;
The analyte placement layer is used for placing an analyte, the refractive index of the analyte ranges from 1.00 to 2.00, and the thickness of the analyte ranges from 620 nm to 760 nm; the analyte encapsulates the intermediate layer and contacts the substrate;
The middle layer comprises a plurality of defect medium nano column groups which are uniformly distributed, each defect medium nano column group consists of four defect medium nano columns, each defect medium nano column is a cylinder, the circumferential side surface of each defect medium nano column is provided with a cutting angle penetrating through two end surfaces of the cylinder, the shape of each cutting angle is a sector from the center of a circle to the circumferential side surface in the cross section direction of the cylinder, and the opening angle of each cutting angle in the cross section direction of the cylinder is 50-70 degrees; four defect medium nano-pillars in each defect medium nano-pillar group are equally spaced and distributed in a rectangular shape, and the spacing between two adjacent defect medium nano-pillars is in the range of 20 nm-40 nm; the cutting angles of each defect medium nano column face to the rectangular distribution center of the four defect medium nano columns, and the axis connecting line of the defect medium nano columns where the two oppositely-facing cutting angles are respectively located is divided into two cutting angles; the height of the defect medium nano column is 130 nm-140 nm, and the radius is 230 nm-270 nm;
the substrate is made of metal materials, and four absorption resonance peaks can be generated in a near infrared band after electromagnetic waves are incident from an analyte and pass through the intermediate layer and the substrate; setting two vertical edges of the super surface structure as x and y directions respectively and setting the height direction of the super surface structure as z direction to establish a coordinate system; the cycle length of the super surface structure in the x and y directions is 1100 nm-1200 nm;
the infrared sensor is oriented towards the substrate for receiving the generated absorption resonance peak and acquiring the refractive index of the analyte.
2. The electromagnetic multipole resonance-based super-surface near-infrared refractive index sensor of claim 1, wherein the near-infrared band is in the range of 1.3-2.0 μm in wavelength.
3. The electromagnetic multipole resonance-based super-surface near-infrared refractive index sensor of claim 1, wherein the defect medium nanopillars are made of silicon material.
4. The electromagnetic multipole resonance-based super-surface near infrared refractive index sensor of claim 1, wherein the substrate is made of silver material.
5. The electromagnetic multipole resonance-based subsurface near infrared refractive index sensor according to claim 1, wherein the electromagnetic wave is incident in a direction perpendicular to the subsurface structure.
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| CN111029421A (en) * | 2019-12-13 | 2020-04-17 | 西安工业大学 | Micro-nano array structure for realizing near infrared light absorption enhancement |
| CN113376122A (en) * | 2021-06-01 | 2021-09-10 | 北京邮电大学 | All-dielectric super-surface refractive index sensor based on four-rectangular silicon pillar structure |
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| US9685765B2 (en) * | 2015-08-31 | 2017-06-20 | Sandia Corporation | High quality-factor fano metasurface comprising a single resonator unit cell |
| CN115824977A (en) * | 2022-09-26 | 2023-03-21 | 厦门大学 | Mid-infrared all-dielectric super-surface chiral molecular sensor |
| CN117074365A (en) * | 2023-07-13 | 2023-11-17 | 华南师范大学 | Terahertz high-quality factor refractive index sensor based on metal super surface |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111029421A (en) * | 2019-12-13 | 2020-04-17 | 西安工业大学 | Micro-nano array structure for realizing near infrared light absorption enhancement |
| CN113376122A (en) * | 2021-06-01 | 2021-09-10 | 北京邮电大学 | All-dielectric super-surface refractive index sensor based on four-rectangular silicon pillar structure |
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