CN117906745A - Full-frequency vibration sensor based on magneto-electric mechanical self-balance and microelectronic coupling - Google Patents
Full-frequency vibration sensor based on magneto-electric mechanical self-balance and microelectronic coupling Download PDFInfo
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- CN117906745A CN117906745A CN202311621741.7A CN202311621741A CN117906745A CN 117906745 A CN117906745 A CN 117906745A CN 202311621741 A CN202311621741 A CN 202311621741A CN 117906745 A CN117906745 A CN 117906745A
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Abstract
The invention discloses a full-frequency vibration sensor based on magneto-electric mechanical self-balancing and microelectronic coupling, which comprises a low-frequency detection unit and a high-frequency detection unit, wherein the low-frequency detection unit comprises an electromagnetic coil, a permanent magnet, a control circuit, a first polar plate and a second polar plate, wherein the vibrator is formed by connecting the permanent magnet; the high frequency detection unit includes a MEMS chip. The vibrator position of the invention is kept at the initial balance position, the measuring effect for low-frequency large-displacement vibration is good, and the MEMS chip detects high-frequency vibration, thereby avoiding the problem that two sets of equipment are needed to be used for detecting full-frequency vibration in a conventional way, and the phase information is easy to lose, so that a huge obstacle is formed for fault diagnosis.
Description
Technical Field
The invention relates to the technical field of vibration sensors, in particular to a full-frequency vibration sensor based on magneto-electric mechanical self-balancing and microelectronic coupling.
Background
Vibration is a common physical phenomenon, and in most cases, vibration is harmful, and severe vibration can lead to initiation and expansion of cracks of a power structure, and finally to fatigue failure of a component, thereby affecting the service life of mechanical equipment. Accurately measuring vibration conditions of various engineering structures is very important for determining states, researching structural failure mechanisms and reducing losses caused by vibration.
The low-frequency vibration has the characteristics of low vibration frequency, large vibration amplitude, strong destructive power and the like, and is particularly important in the fields of structural health monitoring, seismic research, medical diagnosis and the like. The low-frequency vibration sensor commonly used at present comprises a magneto-electric vibration speed sensor and a piezoelectric acceleration sensor. The magnetoelectric sensor directly measures the speed and displacement of low-frequency vibration, and has high measurement accuracy and strong anti-interference capability. But its measurement range is limited by the frequency of vibration. The piezoelectric sensor circuit is large in size, is easily influenced by drift of circuit devices during measurement, and is high in cost. At the same time, higher frequency vibrations can be captured by a MEMS (micro-electromechanical system) vibration sensor.
Therefore, the design can effectively detect low-frequency signals and simultaneously couple the MEMS elements, and can realize detection of full-frequency vibration.
Disclosure of Invention
In order to solve the problems existing in the prior art, the invention provides a full-frequency vibration sensor based on magneto-electric mechanical self-balancing and microelectronic coupling, which comprises a low-frequency detection unit and a high-frequency detection unit,
The low-frequency detection unit comprises an electromagnetic coil, a permanent magnet, a control circuit, a first polar plate, a second polar plate and a vibrator formed by connecting the permanent magnet, wherein when the low-frequency detection unit works, the electromagnetic coil generates a magnetic field to repel the permanent magnet so as to lead the vibrator to be in suspension balance, the first polar plate and the second polar plate form a parallel plate capacitor, and when low-frequency vibration exists, the control circuit controls the electromagnetic coil to keep the vibrator to keep suspension balance;
The high frequency detection unit includes a MEMS chip.
Further, the low-frequency detection unit also comprises a capacitance detection circuit, the capacitance of the parallel plate capacitor is detected in real time when the low-frequency detection unit works, capacitance information is transmitted to the control circuit, and the control circuit adjusts and controls the current magnitude and direction change of the electromagnetic coil according to the capacitance change.
Further, the low-frequency detection unit specifically comprises a fixed polar plate component, a vibrator component and an electromagnetic coil component which are all provided with an energizing interface and a signal leading-out interface, and the MEMS chip is arranged in the vibrator component;
The pole plate fixing piece comprises a first plate body which is integrated with a capacitance detection circuit and provided with a groove, and a first pole plate is fixed in the groove;
The vibrator part comprises a frame integrated with an MEMS circuit and a vibrator formed by connecting a second polar plate and a permanent magnet, wherein the second polar plate is connected with the permanent magnet through a tenon, a gap exists between the second polar plate and the permanent magnet, a grille is arranged on the inner side of the frame, the vibrator is limited by the tenon and the grille and can only move up and down relative to the frame, and the MEMS chip is fixed in the gap by the grille;
the electromagnetic coil component comprises a second plate body integrated with a control circuit and provided with a groove, and an electromagnetic coil is arranged in the groove.
Further, the axes of the first polar plate, the vibrator and the electromagnetic coil are the same.
Further, the sections of the first polar plate, the second polar plate and the permanent magnet are the same.
Further, the permanent magnet is closer to the electromagnetic coil than the second pole plate.
Further, the grille is disposed around the inside of the frame.
The invention also provides a full-frequency vibration detection element which comprises a shell and a plurality of full-frequency vibration sensors based on magneto-electric mechanical self-balancing and microelectronic coupling, wherein the full-frequency vibration sensors are arranged in the shell.
Compared with the prior art, the invention has the following beneficial effects:
The invention uses magneto-electric mechanical balance and does not need micro-springs to limit the movement of the permanent magnet, thus avoiding the need of micro-springs with higher precision, keeping the vibrator position at the initial balance position, adjusting the equivalent supporting rigidity and equivalent damping of the vibrator to be very small, changing the absolute coordinates of a displacement measurement system into accumulated relative coordinates during vibration measurement, greatly improving the measuring range, having good measuring effect on low-frequency large-displacement vibration and being suitable for low-frequency measurement of large engineering structures; meanwhile, the MEMS chip detects high-frequency vibration, so that the problem that two sets of equipment are required to be used for detecting full-frequency vibration in a conventional way, phase information is easy to lose, and huge barriers are formed to fault diagnosis is avoided.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a full-frequency vibration sensor based on magneto-electric mechanical self-balancing and microelectronic coupling, wherein an enlarged part of the structure is a schematic diagram of a vibrator part fixed relation;
FIG. 2 is a schematic view showing the structure of a first plate body according to an embodiment of the present invention;
FIG. 3 shows a schematic structural view of a frame of an embodiment of the present invention;
fig. 4 is a schematic structural diagram showing a positional relationship between a vibrator and a MEMS chip according to an embodiment of the present invention;
Fig. 5 is a schematic structural view showing an all-frequency vibration detecting element according to an embodiment of the present invention;
Reference numerals illustrate:
10. a first plate body; 101. a first plate; 20. a frame; 201. a grille; 202. a second polar plate; 203. a permanent magnet; 204. a tenon; 205. a gap; 206. a MEMS chip; 30. a second plate body; 301. an electromagnetic coil; 40. a power-on interface and a signal extraction interface.
Detailed Description
In the description of the present application, it should be understood that the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more of the described features. In the description of the present application, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically connected, electrically connected or can be communicated with each other; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.
Example 1
The full-frequency vibration sensor based on magneto-electric mechanical self-balancing and microelectronic coupling comprises a fixed polar plate component, a vibrator component and an electromagnetic coil component which are arranged from top to bottom and are provided with an energizing interface and a signal leading-out interface 40, wherein the fixed polar plate component, the vibrator component and the electromagnetic coil component are all cuboid in shape and have the same axle center; as shown in fig. 2, the plate fixing member includes a first plate body 10 integrated with a capacitance detection circuit and having a groove, and a first plate 101 is fixed in the groove of the first plate body 10; the vibrator part comprises a frame 20 (shown in fig. 3) integrated with an MEMS circuit and vibrators formed by connecting a second pole plate 202 and a permanent magnet 203, wherein a grid 201 is arranged around the inner side of the frame 20, the axes of the permanent magnet 203, a first pole plate 101 and a second pole plate 202 are the same, the sections are all square, as shown in fig. 4, the second pole plate 202 and the permanent magnet 203 are connected through a tenon 204, a gap 205 is reserved between the second pole plate 202 and the permanent magnet 203, the permanent magnet 203 is closer to an electromagnetic coil 301 relative to the second pole plate 202, 2 tenons 204 are arranged on each side, 8 vibrators are limited by the tenons 204 and the grid 201, and can only move up and down relative to the frame 20, the MEMS chip 206 is fixed in the gap 205 by the grid 201, and the section of the MEMS chip 206 is the same as that of the permanent magnet 203; the electromagnetic coil component comprises a second plate body 30 integrated with a control circuit and provided with a groove, and an electromagnetic coil 301 is arranged in the groove of the second plate body 30. The working principle of the sensor of the present embodiment is described in detail below:
When the electromagnetic coil 301 is electrified to work, the electromagnetic coil 301 is equivalent to a magnet of an upper N pole and a lower S pole, the upper end of the permanent magnet 203 is the S pole, the lower end of the permanent magnet 203 is the N pole, the electromagnetic coil 301 generates a magnetic field to repel the permanent magnet 203 so that a vibrator formed by connecting the second pole plate 202 and the permanent magnet 203 is in suspension balance, the first pole plate 101 and the second pole plate 202 form a parallel plate capacitor, and at the moment, a capacitance detection circuit can measure the capacitance and the distance between the first pole plate 101 and the second pole plate 202; the capacitance and the distance between the first polar plate 101 and the second polar plate 202 can be regulated and controlled by the control circuit to achieve suspension balance, and the distance d 0 between the vibrator and the first polar plate 101 is set. When low-frequency vibration exists, the suspension balance of the vibrator is destroyed, the size and direction of current in the electromagnetic coil 301 are controlled by the control circuit, the suspension balance of the vibrator is kept, namely, the distance d 0 between the vibrator and the first polar plate 101 is kept unchanged, and the displacement change of the vibrator can be detected by filtering and demodulating the capacitance information detected by the capacitance detection circuit. The result shows that the vibrator position is kept at the initial balance position, the equivalent supporting rigidity and equivalent damping of the vibrator are regulated to be very small, and the absolute coordinates of a displacement measurement system are changed into accumulated relative coordinates during vibration measurement, so that the measuring range is greatly improved, the low-frequency vibration measuring effect is good for low-frequency large-displacement vibration, and low-frequency vibration with the frequency of 0.01 Hz-10 Hz can be detected. At frequencies above 10Hz, the amplitude is no longer a major factor in the effects of vibration, and the MEMS chip 206 detects higher frequencies.
The information output by the whole sensor is as follows:
Full frequency shift, s=s1+s2, S is full frequency shift; s1 is vibrator displacement data; s2 is MEMS chip acceleration secondary integral data;
Full frequency speed, v=v1+v2, V is full frequency speed; v1 is primary differential data of vibrator displacement; v2 is the acceleration primary integral data of the MEMS chip;
full frequency acceleration, a=a1+a2, a being full frequency acceleration; a1 is vibrator displacement secondary differential data; a2 is MEMS chip acceleration data.
In actual vibration measurement, a large-sized turbine unit is taken as an example, and the main structure of the large-sized turbine unit can be considered as a mechanical system and a lower supporting frame structure, and the vibration of the turbine unit is mainly a medium-high frequency signal, and the damage signal of the supporting frame structure is mainly a low-frequency signal. In actual engineering, the phenomena of sudden burst and the like of the over-control oil pipe occur. In the case of a conventional measurement, the influence of the low-frequency structure is lost if only the high-frequency sensor signal is used when the cause of the fault is investigated, whereas the influence of the high-frequency machine is lost if the low frequency is used. When the two sets of systems are connected, the sensors are installed, the debugging difficulty of the systems is high, in addition, 2 groups of vibration signals in each direction are output from the two sets of systems, the difficulty in adjustment and judgment is high due to the fact that no special algorithm is adopted, the data acquired by the sensors are not strict, meanwhile, the phase information is easy to lose, and huge barriers are formed for fault diagnosis. The sensor can solve the defects, only one set of system is needed to be installed, the installation is convenient, the data is full-frequency measurement data, the acquired data are strict, the phase is the same, the data precision is obviously improved, the vibration fault judging effect is obvious, and the mechanical equipment fault and the foundation frame structure fault can be judged at the same time.
Example 2
The full-frequency vibration detection element, as shown in fig. 5, comprises a housing (semi-split structure) and 3 full-frequency vibration sensors (same as embodiment 1, the structure and principle will not be repeated) based on magneto-electric mechanical self-balance and microelectronic coupling, wherein the sensor is small in volume, so that a three-way sensor can be arranged, and the applicability is stronger.
Finally, it should be noted that: the foregoing description is only illustrative of the preferred embodiments of the present invention, and although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements or changes may be made without departing from the spirit and principles of the present invention.
Claims (8)
1. A full-frequency vibration sensor based on magneto-electric mechanical self-balance and microelectronic coupling is characterized by comprising a low-frequency detection unit and a high-frequency detection unit,
The low-frequency detection unit comprises an electromagnetic coil, a permanent magnet, a control circuit, a first polar plate, a second polar plate and a vibrator formed by connecting the permanent magnet, wherein when the low-frequency detection unit works, the electromagnetic coil generates a magnetic field to repel the permanent magnet so as to lead the vibrator to be in suspension balance, the first polar plate and the second polar plate form a parallel plate capacitor, and when low-frequency vibration exists, the control circuit controls the electromagnetic coil so as to keep the vibrator to be in suspension balance;
The high frequency detection unit includes a MEMS chip.
2. The full-frequency vibration sensor based on magneto-electric mechanical self-balancing and microelectronic coupling according to claim 1, wherein the low-frequency detection unit further comprises a capacitance detection circuit, the capacitance of the parallel plate capacitor is detected in real time during operation and the capacitance information is transmitted to a control circuit, and the control circuit adjusts and controls the current magnitude and direction change of the electromagnetic coil according to the capacitance change.
3. The full-frequency vibration sensor based on magneto-electric mechanical self-balancing and microelectronic coupling according to claim 2, wherein the low-frequency detection unit specifically comprises a fixed polar plate component, a vibrator component and an electromagnetic coil component, wherein the fixed polar plate component, the vibrator component and the electromagnetic coil component are all provided with an energizing interface and a signal extraction interface, and the MEMS chip is arranged inside the vibrator component;
The pole plate fixing piece comprises a first plate body which is integrated with a capacitance detection circuit and provided with a groove, and a first pole plate is fixed in the groove;
The vibrator part comprises a frame integrated with an MEMS circuit and a vibrator formed by connecting a second polar plate and a permanent magnet, wherein the second polar plate is connected with the permanent magnet through a tenon, a gap exists between the second polar plate and the permanent magnet, a grille is arranged on the inner side of the frame, the vibrator is limited by the tenon and the grille and can only move up and down relative to the frame, and the MEMS chip is fixed in the gap by the grille;
the electromagnetic coil component comprises a second plate body integrated with a control circuit and provided with a groove, and an electromagnetic coil is arranged in the groove.
4. The full-frequency vibration sensor based on magneto-mechanical self-balancing and microelectronic coupling according to claim 3, wherein the axes of the first polar plate, the vibrator and the electromagnetic coil are the same.
5. The magnetoelectric-mechanical self-balancing and microelectronic coupling based full-frequency vibration sensor according to claim 3, characterized in that the first plate, the second plate and the permanent magnet have the same cross section.
6. The magneto-mechanical self-balancing and microelectronic coupling based full frequency vibration sensor according to claim 3, characterized in that the permanent magnet is closer to the electromagnetic coil than the second pole plate.
7. A full frequency vibration sensor based on magneto-mechanical self-balancing and microelectronic coupling according to claim 3, characterized in that the grating is arranged around the inside of the frame.
8. A full-frequency vibration detection element, characterized by comprising a shell and a plurality of full-frequency vibration sensors based on magneto-electric mechanical self-balancing and microelectronic coupling, which are arranged in the shell, wherein the full-frequency vibration sensors are arranged in the shell.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311621741.7A CN117906745A (en) | 2023-11-28 | 2023-11-28 | Full-frequency vibration sensor based on magneto-electric mechanical self-balance and microelectronic coupling |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202311621741.7A CN117906745A (en) | 2023-11-28 | 2023-11-28 | Full-frequency vibration sensor based on magneto-electric mechanical self-balance and microelectronic coupling |
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| CN117906745A true CN117906745A (en) | 2024-04-19 |
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| CN202311621741.7A Pending CN117906745A (en) | 2023-11-28 | 2023-11-28 | Full-frequency vibration sensor based on magneto-electric mechanical self-balance and microelectronic coupling |
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