CN117906529B - Automatic balancing method and device for inclined space plane, electronic equipment and storage medium - Google Patents
Automatic balancing method and device for inclined space plane, electronic equipment and storage medium Download PDFInfo
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Abstract
The invention relates to an automatic balancing method, a device, electronic equipment and a storage medium for an inclined space plane, which belong to the technical field of space plane balancing, wherein the method comprises the steps of obtaining an object to be detected, detecting the surface of the object to be detected, and obtaining a morphology data plane; performing plane fitting on the morphology data plane according to a preset threshold value to obtain an inner point plane; processing the interior point plane to obtain an accurate threshold; performing plane fitting on the inner point plane according to the accurate threshold value to obtain a plane to be balanced; correcting the plane to be balanced to obtain a balanced plane. According to the method, the surface fitting is carried out on the shape data plane of the object to be measured, after the accurate threshold value is calculated, the surface fitting is carried out again, and under the condition that a plurality of orderly noise points or multiple layers of planes exist on the surface of the object to be measured, the surface fitting is carried out, so that a more accurate plane to be balanced is obtained. The angle of the plane to be balanced is corrected, and the purpose of carrying out balanced fitting on the complex plane is achieved.
Description
Technical Field
The present invention relates to the field of spatial plane balancing technologies, and in particular, to an automatic balancing method and apparatus for an inclined spatial plane, an electronic device, and a storage medium.
Background
The white light interferometry can accurately measure the surface profile, roughness, texture and the like to be measured due to the characteristics of no damage and high accuracy of measurement in the micro-nano field. In practical application, due to the influence of detection environments, such as object stage inclination, environmental vibration and the like, the space plane restored by practical measurement can generate some inclinations, and the inclination can cause the surface morphology distortion of an object to be detected, so that the calculation of the surface step and roughness of the object to be detected is greatly influenced.
In the prior art, the conventional balancing method is to perform balancing by using a least square method, but the method is difficult to fit an ideal plane in a complex plane, and still has partial inclination, and particularly when a plurality of orderly noise points or multi-layer planes appear, the least square method is difficult to achieve an ideal effect.
Therefore, there is an urgent need to provide an automatic balancing method, device, electronic apparatus and storage medium for an inclined spatial plane, which solve the technical problem that an ideal plane cannot be obtained due to partial inclination, a plurality of orderly noise points or multiple layers of planes when balance fitting is performed on a complex plane in the prior art.
Disclosure of Invention
In view of the foregoing, it is necessary to provide an automatic balancing method, device, electronic apparatus and storage medium for a tilted spatial plane, so as to solve the technical problem that an ideal plane cannot be obtained due to partial tilt, multiple ordered noise points or multiple layers of planes when balancing complex planes in the prior art.
In order to solve the above problems, the present invention provides an automatic balancing method for an inclined space plane, comprising:
obtaining an object to be detected, and detecting the surface of the object to be detected to obtain a morphology data plane;
performing plane fitting on the morphology data plane according to a preset threshold value to obtain an inner point plane;
Processing the inner point plane to obtain an accurate threshold;
performing plane fitting on the inner point plane according to the accurate threshold value to obtain a plane to be balanced;
And correcting the plane to be balanced to obtain a balanced plane.
In one possible implementation, the topographical data plane includes at least one initial point;
Performing plane fitting on the morphology data plane according to a preset threshold to obtain an interior point plane, including:
Screening the at least one initial point in the morphology data plane according to the preset threshold value to obtain at least one inner point;
And performing plane fitting on the at least one internal point to obtain an internal point plane.
In one possible implementation manner, the performing plane fitting on the at least one interior point to obtain an interior point plane includes:
Setting the circulation times;
performing plane fitting on the at least one internal point to obtain a fitted plane, and updating the circulation times to obtain target circulation times;
Calculating all initial points and all inner points to obtain success rate;
And carrying out loop iteration according to the target loop times, the success rate and the fitting plane to obtain an interior point plane.
In one possible implementation manner, the performing loop iteration according to the target loop times, the success rate and the fitting plane to obtain an interior point plane includes:
Judging whether the target cycle number is equal to a preset cycle number or whether the success rate is greater than a preset success rate,
If not, resetting the preset threshold value, and performing plane fitting on the morphology data plane according to the preset threshold value to obtain an inner point plane;
If yes, the fitting plane is determined to be the inner point plane.
In one possible implementation manner, the processing the interior point plane to obtain an accurate threshold includes:
Processing the interior point plane based on singular value decomposition to obtain interior point plane parameters; the interior point plane parameters comprise normal vectors;
calculating each internal point of the internal point plane according to the normal vector to obtain a deviation corresponding to each internal point;
Calculating the deviation to obtain the standard deviation of the inner point plane;
And obtaining an accurate threshold according to the multiple of the standard deviation.
In one possible implementation manner, the correcting the plane to be balanced to obtain a balanced plane includes:
calculating the normal vector of the plane to be balanced to obtain an angle to be corrected;
And rotating the plane to be balanced to a required position according to a preset rotation matrix and the angle to be corrected to obtain a balanced plane.
In one possible implementation manner, the detecting the surface of the object to be detected to obtain a topography data plane includes:
processing the surface of the object to be detected based on a white light interference system to obtain a white light interference image sequence;
searching the white light interference image sequence based on cosine modulation to obtain a maximum value index position;
Analyzing the maximum value index position according to the size of a preset window to obtain a zero optical path difference position index of the object to be detected;
And carrying out phase calculation on the zero optical path difference position index based on a half-wave compensation method to obtain a morphology data plane.
On the other hand, the invention also provides an automatic balancing device for the inclined space plane, which comprises the following components:
The object monitoring module is used for acquiring an object to be detected, detecting the surface of the object to be detected and obtaining a morphology data plane;
The first plane fitting module is used for performing plane fitting on the morphology data plane according to a preset threshold value to obtain an inner point plane;
The threshold determining module is used for processing the inner point plane to obtain an accurate threshold;
The second plane fitting module is used for carrying out plane fitting on the inner point plane according to the accurate threshold value to obtain a plane to be balanced;
and the plane correction module is used for correcting the plane to be balanced to obtain a balance plane.
In another aspect, an embodiment of the present invention discloses an electronic device, including: a processor, a memory and a computer program stored on the memory and capable of running on the processor, which when executed by the processor, performs the steps of the tilted spatial plane automatic balancing method embodiment described above.
In another aspect, embodiments of the present invention disclose a computer readable storage medium having stored thereon a computer program which, when executed by a processor, implements the steps of the tilted spatial plane automatic balancing method embodiments described above.
The beneficial effects of the invention are as follows: according to the invention, the surface fitting is carried out on the shape data plane of the object to be measured, and after the accurate threshold value is calculated, the surface fitting is carried out again, so that the surface fitting can be carried out under the condition that a plurality of orderly noise points or multiple layers of planes exist on the surface of the object to be measured, and a more accurate plane to be balanced is obtained. Furthermore, the angle of the plane to be balanced can be corrected, so that the balanced plane after correction is obtained, and the technical problem that an ideal plane cannot be obtained due to partial inclination and a plurality of orderly noise points or multiple layers of planes when the complex plane is balanced and fitted in the prior art can be solved.
Drawings
FIG. 1 is a schematic flow chart of an embodiment of an automatic balancing method for inclined space planes according to the present invention;
FIG. 2 is a flow chart of one embodiment of a first plane fit provided by the present invention;
FIG. 3 is a flowchart illustrating the step S103 of FIG. 1 according to one embodiment of the present invention;
FIG. 4 is a schematic structural view of an embodiment of an automatic balancing device for inclined space plane according to the present invention;
fig. 5 is a schematic structural diagram of an embodiment of an electronic device according to the present invention.
Detailed Description
The following detailed description of preferred embodiments of the application is made in connection with the accompanying drawings, which form a part hereof, and together with the description of the embodiments of the application, are used to explain the principles of the application and are not intended to limit the scope of the application.
White light interferometry: white light is a concept of relatively ideal monochromatic light, and refers to a low coherence light source with a certain spectral width and a short coherence length. The coherence length is a concept related to the temporal coherence of a light source and indicates the ability of a delayed portion of a light beam emitted by the light source to interfere by superimposing the undelayed light beam itself in an interference field. The white light interferometry system is the whole process of detecting based on white light interferometry, for example, if the detection is performed by a white light interferometer, the whole process from the beginning of the detection to the obtaining of the detection result is called as white light interferometry system.
Singular value decomposition (Singular Value Decomposition, SVD) is an important matrix decomposition in linear algebra, and is also an algorithm widely applied in the field of machine learning, and can be used for characteristic decomposition in a dimension reduction algorithm, a recommendation system, natural language processing and other fields.
A random sample consensus algorithm (RANdom SAmple Consensus, RANSAC) that iteratively estimates parameters of a mathematical model from a set of observed data containing outliers. RANSAC is a non-deterministic algorithm that produces a reasonable result at some probability in the sense that more iterations increase this probability.
As shown in fig. 1, in one embodiment of the present invention, a method for automatically balancing an inclined space plane is disclosed, comprising:
s101, acquiring an object to be detected, and detecting the surface of the object to be detected to obtain a morphology data plane;
S102, performing plane fitting on the morphology data plane according to a preset threshold value to obtain an inner point plane;
S103, processing the interior point plane to obtain an accurate threshold value;
s104, performing plane fitting on the inner point plane according to the accurate threshold value to obtain a plane to be balanced;
S105, correcting the plane to be balanced to obtain a balanced plane.
It should be understood that: when detecting an object, due to the influence of detection environment, such as object stage inclination, environment vibration and the like, the space plane restored by actual measurement can generate some inclinations, the inclination can cause the surface morphology distortion of the object to be detected, the calculation of the surface step and roughness of the object to be detected is greatly influenced, partial inclination still exists through the least square method, and particularly when a plurality of orderly noise points or multilayer planes appear, the least square method is difficult to achieve an ideal effect.
In the specific embodiment of the invention, the aspects of the surface profile, roughness, texture and the like to be measured can be accurately measured through the white light interference system, and then repeated iterative fitting is carried out through a random sampling consistent algorithm, so that the fitting precision can be improved.
Compared with the prior art, the method and the device have the advantages that plane fitting is carried out on the shape data plane of the object to be measured, and after the accurate threshold value is calculated, the plane fitting is carried out again, so that the plane fitting can be carried out under the condition that a plurality of orderly noise points or multiple layers of planes exist on the surface of the object to be measured, and a more accurate plane to be balanced is obtained. Furthermore, the angle of the plane to be balanced can be corrected, so that the balanced plane after correction is obtained, and the technical problem that an ideal plane cannot be obtained due to partial inclination and a plurality of orderly noise points or multiple layers of planes when the complex plane is balanced and fitted in the prior art can be solved.
It should be noted that, in order to obtain the topography data plane of the surface of the object to be measured, in some embodiments of the present invention, step S101 includes:
processing the surface of the object to be detected based on the white light interference system to obtain a white light interference image sequence; searching the white light interference image sequence based on cosine modulation to obtain a maximum value index position;
Analyzing the maximum value index position according to the size of a preset window to obtain a zero optical path difference position index of the object to be measured; and carrying out phase calculation on the zero optical path difference position index based on a half-wave compensation method to obtain a morphology data plane.
In the specific embodiment of the invention, the white light interference system can be used for acquiring a white light interference image sequence with the surface profile of the object to be detected by using the white light interference system taking pi/2 as a step; finding the maximum value index position of the envelope related sequence signal based on cosine modulation, selecting a proper window size for moving average analysis to obtain a zero optical path difference position index of the pixel of the object to be detected; and calculating the phase based on a half-wave compensation method, and calculating the high-precision morphology of the object to be measured. The object to be measured may include an object to be measured, and the surface topography measurement: white light interferometers can be used for measurement of surface topography, such as detecting undulations, waves, etc. of a surface. This is important in the industry where it is desirable to ensure surface flatness. Such as surface topography of silicon wafers, circuit boards, wafers, etc. Specific processes of obtaining the white light interference image sequence, finding the maximum value index position and calculating the high-precision morphology of the object to be measured can be set according to actual conditions, and the embodiment of the invention is not limited herein.
It should be noted that: to perform a plane fit to the topographical data plane, in some embodiments of the present invention, the topographical data plane includes at least one initial point; step S102 includes:
screening at least one initial point in the morphology data plane according to a preset threshold value to obtain at least one inner point;
And performing plane fitting on at least one inner point to obtain an inner point plane.
In the specific embodiment of the invention, the preset threshold value can be selected in any reasonable range according to the actual situation, and theoretically, the preset threshold value can be any numerical value, and the accuracy is higher when the selected preset threshold value is closer to the magnitude order of planar fluctuation. For example, a reasonable range is recommended to remove the fluctuation obviously exceeding the normal range, such as the fluctuation of most points at 10nm, but one point has a height reaching 100nm or higher, the fluctuation data of this point is removed, one fifth of the difference value between the highest point and the lowest point of the plane fluctuation after removal is taken as the reasonable range, the preset threshold value selection can be one fourth of the reasonable range, and the preset threshold value selection can be rough, because the embodiment of the invention can obtain a more reasonable and accurate threshold value through calculation later. All initial points in the morphology data plane can be screened according to a preset threshold value, the distance between a certain point and the fitting plane is smaller than the preset threshold value and is called an inner point, the distance between the certain point and the fitting plane is larger than the preset threshold value and is called an outer point, and then at least one inner point meeting the condition can be obtained.
As shown in fig. 2, in some embodiments of the present invention, performing a plane fit on at least one interior point to obtain an interior point plane includes:
S201, setting the circulation times;
S202, performing plane fitting on at least one internal point to obtain a fitting plane, and updating the circulation times to obtain target circulation times;
s203, calculating all initial points and all inner points to obtain success rate;
s204, performing loop iteration according to the target loop times, the success rate and the fitting plane to obtain an interior point plane.
In the specific embodiment of the invention, the morphology data plane can be subjected to iterative fitting through a random sampling coincidence algorithm, and the iteration times can be controlled through the circulation times. The random sampling consistency algorithm can randomly select three inner points to perform plane fitting to obtain a fitting plane, after performing plane fitting once, the circulation times can be updated to obtain target circulation times, for example, the circulation times are +1, and all initial points and all inner points can be calculated to obtain success rates, wherein the calculation is shown in a formula (1):
（1）
In the method, in the process of the invention, Is the number of inliers,/>For the number of initial points,/>Is the success rate.
In some embodiments of the present invention, performing loop iteration according to the target loop number, the success rate and the fitting plane to obtain an interior point plane, including:
judging whether the target cycle times are equal to the preset cycle times or the success rate is greater than the preset success rate,
If not, resetting a preset threshold value, and performing plane fitting on the morphology data plane according to the preset threshold value to obtain an inner point plane;
if yes, the fitting plane is determined to be the inner point plane.
In a specific embodiment of the present invention, after obtaining the success rate and the target cycle number, it may be determined whether the target cycle number is equal to the preset cycle number, or whether the success rate is greater than the preset success rate, and if one of the conditions is satisfied, the iterative process of the random sampling consistency algorithm may be ended, and the fitted fitting plane is determined to be the interior point plane. If the two conditions are not met, setting a preset threshold value again according to the actual conditions, and then carrying out plane fitting on the morphology data plane again according to the preset threshold value to obtain an inner point plane, so that iterative loop is carried out until the target loop times or success rate meet one of the conditions, and the inner point plane is obtained.
As shown in fig. 3, in some embodiments of the present invention, step S103 includes:
s301, processing an interior point plane based on singular value decomposition to obtain interior point plane parameters; the interior point plane parameters include normal vectors;
S302, calculating each internal point of the internal point plane according to the normal vector to obtain a deviation corresponding to each internal point;
s303, calculating the deviation to obtain the standard deviation of the inner point plane;
S304, obtaining an accurate threshold according to the multiple of the standard deviation.
In a specific embodiment of the present invention, SVD decomposition may be used to decompose the interior point plane to obtain interior point plane parameters, where the interior point plane parameters may include normal vectors n and d, and the normal vectors are shown in formula (2):
n=/>（2）
Vector d is shown in formula (3);
d=（3）
In the method, in the process of the invention, Right singular vectors corresponding to the minimum singular values; /(I)In order to form any one of three inner points of the inner point plane, a d vector corresponding to each inner point can be obtained.
The deviation corresponding to each interior point can be calculated according to the d vector corresponding to each interior point, and the calculation is shown in the formula (4):
（4）
Where a, b, c, d is four coefficients of the plane general equation ax+by+cz+d=0, a plane can be represented by these four coefficients. For each interior point a corresponding deviation.
The standard deviation can be calculated according to the deviation corresponding to each internal point, and the calculation is shown in a formula (5):
（5）
In the method, in the process of the invention, =/>，/>Is the standard deviation.
Further, the precision threshold may also be obtained from a multiple of the standard deviation, for example, twice the standard deviation is taken as the precision threshold. Specific multiples the embodiments of the invention are not limited herein.
Further, after the accurate threshold is obtained, a plane to be balanced is obtained by performing secondary plane fitting on the inner point plane through the accurate threshold according to the random sampling consistency algorithm, the plane to be balanced is a plane obtained by using the random sampling consistency algorithm of the accurate threshold, and other parameters of the random sampling consistency algorithm are consistent with those of the first time of using the random sampling consistency algorithm.
In some embodiments of the present invention, step S105 includes:
calculating the normal vector of the plane to be balanced to obtain an angle to be corrected;
and rotating the plane to be balanced to a required position according to a preset rotation matrix and an angle to be corrected to obtain a balanced plane.
In a specific embodiment of the present invention, the plane to be balanced may be processed to obtain a normal vector, and a specific process of obtaining the normal vector may be set according to an actual situation, which is not limited herein. The normal vector of the plane to be balanced can be calculated through operation to obtain the angle to be corrected, wherein the normal vector is calculated to be the included angle between the plane to be balanced and each coordinate axis. According to the included angle between the plane to be balanced and the coordinate axis, namely the angle to be corrected, the plane to be balanced is balanced to a required position through a rotation matrix, after the process, the balancing can be basically completed, and according to specific actual treatment, the inclination of the plane to be balanced can be reduced from the left-right height difference 420nm before unbalance to 50nm. The gradient after treatment was reduced to 11% before the untreated state compared to the untreated state.
In order to better implement the automatic balancing method for the inclined space plane in the embodiment of the present invention, correspondingly, the embodiment of the present invention further provides an automatic balancing device for the inclined space plane based on the automatic balancing method for the inclined space plane, as shown in fig. 4, the automatic balancing device 400 for the inclined space plane includes:
the object monitoring module 401 is configured to obtain an object to be detected, and detect a surface of the object to be detected, so as to obtain a morphology data plane;
a first plane fitting module 402, configured to perform plane fitting on the profile data plane according to a preset threshold value, so as to obtain an interior point plane;
the threshold determining module 403 is configured to process the interior point plane to obtain an accurate threshold;
the second plane fitting module 404 is configured to perform plane fitting on the inner point plane according to the accurate threshold value to obtain a plane to be balanced;
the plane correction module 405 is configured to correct a plane to be balanced to obtain a balanced plane.
The automatic balancing device 400 for an inclined spatial plane provided in the above embodiment may implement the technical solution described in the above embodiment of the automatic balancing method for an inclined spatial plane, and the specific implementation principle of each module or unit may refer to the corresponding content in the above embodiment of the automatic balancing method for an inclined spatial plane, which is not described herein again.
As shown in fig. 5, the present invention further provides an electronic device 500 accordingly. The electronic device 500 comprises a processor 501, a memory 502 and a display 503. Fig. 5 shows only some of the components of the electronic device 500, but it should be understood that not all of the illustrated components are required to be implemented and that more or fewer components may be implemented instead.
The memory 502 may be an internal storage unit of the electronic device 500 in some embodiments, such as a hard disk or memory of the electronic device 500. The memory 502 may also be an external storage device of the electronic device 500 in other embodiments, such as a plug-in hard disk provided on the electronic device 500, a smart memory card (SMART MEDIA CARD, SMC), a Secure Digital (SD) card, a flash memory card (FLASH CARD), or the like.
Further, the memory 502 may also include both internal storage units and external storage devices of the electronic device 500. The memory 502 is used for storing application software and various types of data for installing the electronic device 500.
The processor 501 may be a central processing unit (Central Processing Unit, CPU), microprocessor or other data processing chip in some embodiments for running program code or processing data stored in the memory 502, such as the tilted spatial plane auto-balancing method of the present invention.
The display 503 may be an LED display, a liquid crystal display, a touch-sensitive liquid crystal display, an OLED (Organic Light-Emitting Diode) touch, or the like in some embodiments. The display 503 is for displaying information at the electronic device 500 and for displaying a visual user interface. The components 501-503 of the electronic device 500 communicate with each other via a system bus.
In some embodiments of the present invention, when the processor 501 executes the tilted spatial plane auto-balancing program in the memory 502, the following steps may be implemented:
acquiring an object to be detected, and detecting the surface of the object to be detected to obtain a morphology data plane;
performing plane fitting on the morphology data plane according to a preset threshold value to obtain an inner point plane;
Processing the interior point plane to obtain an accurate threshold;
Performing plane fitting on the inner point plane according to the accurate threshold value to obtain a plane to be balanced;
Correcting the plane to be balanced to obtain a balanced plane.
It should be understood that: the processor 501 may perform other functions in addition to the above functions when executing the tilted spatial plane auto-balancing program in the memory 502, see in particular the description of the corresponding method embodiments above.
Further, the type of the electronic device 500 is not particularly limited, and the electronic device 500 may be a portable electronic device such as a mobile phone, a tablet computer, a personal digital assistant (personal digitalassistant, PDA), a wearable device, a laptop (laptop), etc. Exemplary embodiments of portable electronic devices include, but are not limited to, portable electronic devices that carry IOS, android, microsoft or other operating systems. The portable electronic device described above may also be other portable electronic devices, such as a laptop computer (laptop) or the like having a touch-sensitive surface, e.g. a touch panel. It should also be appreciated that in other embodiments of the invention, electronic device 500 may not be a portable electronic device, but rather a desktop computer having a touch-sensitive surface (e.g., a touch panel).
Correspondingly, the embodiment of the application also provides a computer readable storage medium, and the computer readable storage medium is used for storing a computer readable program or instruction, and when the program or instruction is executed by a processor, the steps or functions of the automatic balancing method for the inclined space plane provided by the above method embodiments can be realized.
Those skilled in the art will appreciate that all or part of the flow of the methods of the embodiments described above may be accomplished by way of a computer program stored in a computer readable storage medium to instruct related hardware (e.g., a processor, a controller, etc.). The computer readable storage medium is a magnetic disk, an optical disk, a read-only memory or a random access memory.
The method, the device, the electronic equipment and the storage medium for automatically balancing the inclined space plane provided by the invention are described in detail, and specific examples are applied to the principle and the implementation mode of the invention, and the description of the examples is only used for helping to understand the method and the core idea of the invention; meanwhile, as those skilled in the art will have variations in the specific embodiments and application scope in light of the ideas of the present invention, the present description should not be construed as limiting the present invention.
Claims (8)
1. An automatic balancing method for an inclined space plane, comprising:
obtaining an object to be detected, and detecting the surface of the object to be detected to obtain a morphology data plane;
performing plane fitting on the morphology data plane according to a preset threshold value to obtain an inner point plane;
Processing the inner point plane to obtain an accurate threshold;
performing plane fitting on the inner point plane according to the accurate threshold value to obtain a plane to be balanced;
Correcting the plane to be balanced to obtain a balanced plane;
the topographical data plane includes at least one initial point;
Performing plane fitting on the morphology data plane according to a preset threshold to obtain an interior point plane, including:
Screening the at least one initial point in the morphology data plane according to the preset threshold value to obtain at least one inner point;
performing plane fitting on the at least one internal point to obtain an internal point plane;
the processing the interior point plane to obtain an accurate threshold value comprises the following steps:
Processing the interior point plane based on singular value decomposition to obtain interior point plane parameters; the interior point plane parameters comprise normal vectors;
calculating each internal point of the internal point plane according to the normal vector to obtain a deviation corresponding to each internal point;
Calculating the deviation to obtain the standard deviation of the inner point plane;
And obtaining an accurate threshold according to the multiple of the standard deviation.
2. The method of automatic balancing of an inclined spatial plane according to claim 1, wherein said performing a plane fit on said at least one interior point to obtain an interior point plane comprises:
Setting the circulation times;
performing plane fitting on the at least one internal point to obtain a fitted plane, and updating the circulation times to obtain target circulation times;
Calculating all initial points and all inner points to obtain success rate;
And carrying out loop iteration according to the target loop times, the success rate and the fitting plane to obtain an interior point plane.
3. The automatic balancing method of the inclined space plane according to claim 2, wherein the performing loop iteration according to the target loop number, the success rate and the fitting plane to obtain an interior point plane includes:
Judging whether the target cycle number is equal to a preset cycle number or whether the success rate is greater than a preset success rate,
If not, resetting the preset threshold value, and performing plane fitting on the morphology data plane according to the preset threshold value to obtain an inner point plane;
If yes, the fitting plane is determined to be the inner point plane.
4. The method for automatically balancing an inclined space plane according to claim 1, wherein the correcting the plane to be balanced to obtain a balanced plane comprises:
calculating the normal vector of the plane to be balanced to obtain an angle to be corrected;
And rotating the plane to be balanced to a required position according to a preset rotation matrix and the angle to be corrected to obtain a balanced plane.
5. The method for automatically balancing an inclined space plane according to claim 1, wherein the detecting the surface of the object to be measured to obtain a topography data plane comprises:
processing the surface of the object to be detected based on a white light interference system to obtain a white light interference image sequence;
searching the white light interference image sequence based on cosine modulation to obtain a maximum value index position;
Analyzing the maximum value index position according to the size of a preset window to obtain a zero optical path difference position index of the object to be detected;
And carrying out phase calculation on the zero optical path difference position index based on a half-wave compensation method to obtain a morphology data plane.
6. An automatic balancing device for an inclined space plane, comprising:
The object monitoring module is used for acquiring an object to be detected, detecting the surface of the object to be detected and obtaining a morphology data plane;
The first plane fitting module is used for performing plane fitting on the morphology data plane according to a preset threshold value to obtain an inner point plane;
The threshold determining module is used for processing the inner point plane to obtain an accurate threshold;
The second plane fitting module is used for carrying out plane fitting on the inner point plane according to the accurate threshold value to obtain a plane to be balanced;
The plane correction module is used for correcting the plane to be balanced to obtain a balanced plane;
the topographical data plane includes at least one initial point;
The first plane fitting module is further configured to screen the at least one initial point in the morphology data plane according to the preset threshold value to obtain at least one inner point; performing plane fitting on the at least one internal point to obtain an internal point plane;
The threshold determining module is further used for processing the interior point plane based on singular value decomposition to obtain interior point plane parameters; the interior point plane parameters comprise normal vectors; calculating each internal point of the internal point plane according to the normal vector to obtain a deviation corresponding to each internal point; calculating the deviation to obtain the standard deviation of the inner point plane; and obtaining an accurate threshold according to the multiple of the standard deviation.
7. An electronic device, comprising: a processor, a memory and a computer program stored on the memory and capable of running on the processor, which when executed by the processor performs the steps of the tilted spatial plane auto-balancing method according to any one of claims 1-5.
8. A computer readable storage medium, characterized in that the computer readable storage medium has stored thereon a computer program which, when executed by a processor, implements the steps of the tilted spatial plane automatic balancing method according to any one of claims 1-5.
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