CN117902330B - Non-contact mobile device based on symmetrical standing wave type near-field acoustic levitation - Google Patents
Non-contact mobile device based on symmetrical standing wave type near-field acoustic levitation Download PDFInfo
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Abstract
The invention relates to the field of non-contact precise movement, and particularly discloses a non-contact moving device based on symmetrical standing wave type near-field acoustic suspension, which comprises a base, vertical vibrating units, horizontal vibrating units and U-shaped vibrating components, wherein a plurality of vertical vibrating units are linearly distributed on a middle supporting table surface of the base along the length direction of the base, two horizontal vibrating units are respectively and transversely fixed at the top ends of supporting bodies at two sides of the base and are coaxially and oppositely arranged, the U-shaped vibrating components are suspended above the vertical vibrating units, and two vertical surfaces at two sides of the U-shaped vibrating components are respectively in non-contact positioning fit with the two horizontal vibrating units. The non-contact moving device based on the symmetrical standing wave type near-field acoustic suspension has the characteristics of simple structure, easiness in processing, low cost, high precision, low energy loss, extremely small friction, no abrasive particle pollution and the like, and can be widely applied to non-contact positioning and moving of semiconductors and other precise components.
Description
Technical Field
The invention belongs to the field of non-contact precise movement, and particularly relates to a non-contact moving device based on symmetrical standing wave type near-field acoustic levitation.
Background
Acoustic levitation is a levitation technique that utilizes the pressure of acoustic radiation generated by high frequency vibrations to levitate an object. Acoustic levitation can be classified into standing wave acoustic levitation and near-field acoustic levitation according to the propagation length of its acoustic wave. Standing wave acoustic levitation is mainly used for levitating granular objects, and usually has small levitation force. Near-field acoustic levitation is primarily used for levitation of planar objects, which have a relatively large load-carrying capacity.
Whatever the acoustic suspension, its working precondition requires a source of high frequency vibrations, typically in the ultrasonic frequency range. For near-field acoustic levitation, its load carrying capacity is proportional to the vibration amplitude. Because the sandwich type transducer can generate larger vibration amplitude, the generated levitation force is larger, and therefore, the sandwich type transducer is widely applied to a near-field acoustic levitation system. The core working component in the sandwich type transducer is a piezoelectric ceramic plate. According to the inverse piezoelectric effect, the piezoelectric ceramic plate can convert high-frequency alternating current into longitudinal vibration with the same frequency.
Near-field acoustic levitation may be classified into traveling wave type near-field acoustic levitation and standing wave type near-field acoustic levitation according to the type of vibration wave thereof. The sound field of the traveling wave type near-field acoustic levitation is asymmetric, and thrust is generated at any moment under the action of gas viscosity force to enable a levitated object to move. Therefore, the travelling wave type near-field acoustic levitation is mainly applied to the fields of non-contact transmission and motors. However, the load bearing capacity of the traveling wave type near-field acoustic levitation is lower than that of the standing wave type near-field acoustic levitation, and therefore, the device is not suitable for the case where the load is large. In addition, the sound field of the traveling wave type near-field sound suspension is complex to change and control, so that accurate movement of a suspended object is difficult to realize.
For a transmission system based on standing wave type near-field acoustic levitation, a method for breaking a symmetric sound field is generally adopted to generate thrust for realizing transmission. In this way, long-distance transmission of the suspended object can be realized, but the change and control of the sound field are still very difficult, which makes it difficult for the system to realize ultra-precise transmission over a small distance. In view of the foregoing, there is a need for a non-contact mobile device based on symmetric standing wave near-field acoustic levitation that solves the above-mentioned problems.
Disclosure of Invention
The present invention aims to solve one of the technical problems in the related art at least to some extent. Therefore, an object of the present invention is to provide a non-contact moving device based on symmetric standing wave type near-field acoustic levitation, which can control the sound field by using the sound field with symmetric distribution, and can realize the purpose of ultra-precise movement of the levitated object by only changing the voltage and frequency applied by the transducer.
In order to achieve the above object, the present invention provides the following solutions: a symmetric standing wave based near field acoustic levitation based non-contact mobile device comprising:
the base is provided with a middle supporting table top and two supporting bodies which are positioned on two sides and are higher than the supporting table top;
The vertical vibration units are arranged and are linearly distributed and supported on the supporting table top along the length direction of the base; the vertical vibration unit comprises a sandwich type energy converter II, an amplitude transformer II and a radiation plate II, wherein the amplitude transformer II is connected between the sandwich type energy converter II and the radiation plate II and is fixed on a supporting table surface of the base through a flange structure positioned on the peripheral side of the amplitude transformer II;
The two horizontal vibration units are oppositely fixed at the top ends of the two supporting bodies; the horizontal vibration unit comprises a sandwich type energy converter I, an amplitude transformer I and a radiation plate I, wherein the amplitude transformer I is connected between the sandwich type energy converter I and the radiation plate I and is fixed at the upper end of a support body of the base through a flange structure positioned at one periphery of the amplitude transformer I;
The U-shaped vibration assembly is suspended above the vertical vibration units, and two vertical faces of the U-shaped vibration assembly are respectively matched with the two horizontal vibration units in a non-contact positioning manner; the U-shaped vibration component comprises a left piezoelectric ceramic plate, a right piezoelectric ceramic plate and a U-shaped metal frame, wherein the polarization directions of the left piezoelectric ceramic plate and the right piezoelectric ceramic plate are opposite, and the left piezoelectric ceramic plate and the right piezoelectric ceramic plate are respectively arranged on the left end face and the right end face of the inner side of the U-shaped metal frame.
Preferably, the plurality of vertical vibration units are uniformly distributed along the length direction of the base, and the center lines of the vertical vibration units are positioned on the same plane.
Preferably, the center lines of the two horizontal vibration units are positioned on the same straight line, and are perpendicular to and coplanar with the center line of each vertical vibration unit.
Preferably, the second sandwich type transducer comprises a second front metal cover plate, a second piezoelectric ceramic plate, a second rear metal cover plate and a second fastening bolt, wherein the second piezoelectric ceramic plates are clamped and fixed between the second front metal cover plate and the second rear metal cover plate through the second fastening bolts.
Preferably, the second radiation plate is a square flat plate and is supported below the U-shaped vibration component in a non-contact manner.
Preferably, the sandwich type transducer I comprises a piezoelectric ceramic plate I, a rear metal cover plate I and a fastening bolt I, wherein the piezoelectric ceramic plates I are clamped and fixed between the amplitude transformer I and the rear metal cover plate I through the fastening bolt I.
Preferably, the U-shaped metal frame completely covers the radiation range of the second radiation plate in each vertical vibration unit. I.e. at least flush with the width edge and the length edge of the second radiation plate in each vertical vibration unit, or the length of the metal frame greater than the U-shape is greater than the sum of the lengths of the second radiation plates in each vertical vibration unit.
The invention discloses the following technical effects:
The non-contact moving device based on the symmetrical standing wave type near-field acoustic suspension has the characteristics of simple structure, easiness in processing, low cost, high precision, low energy loss, extremely small friction, no abrasive particle pollution and the like, and can be widely applied to non-contact positioning and moving of semiconductors and other precise components.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of an embodiment of the present invention;
FIG. 2 is a schematic view showing the construction and installation of a vertical vibration unit according to the present invention;
FIG. 3 is a schematic view showing the construction and installation of a horizontal vibration unit according to the present invention;
FIG. 4 is a schematic structural diagram and a force analysis diagram of a U-shaped vibration assembly according to the present invention;
FIG. 5 is a polarization pattern of the left and right piezoelectric ceramic plates of the U-shaped vibration assembly of the present invention;
FIG. 6 is a partial schematic view of a vertical vibration unit and U-shaped vibration assembly of the present invention;
1, a first horizontal vibration unit; 101. a first radiation plate; 102. a first amplitude transformer; 102-1, a flange structure I; 104. fastening a first bolt; 105. copper electrode sheet I; 106. a piezoelectric ceramic piece I; 107. a first rear metal cover plate; 108. a first conducting wire; 109. a first lower cover plate; 110. an ultrasonic generator I;
2. A U-shaped vibration assembly; 201. a left piezoelectric ceramic plate; 202. a right piezoelectric ceramic plate; 203. a U-shaped metal frame;
3. transporting the object;
4. A second horizontal vibration unit;
5. a base;
6. a first vertical vibration unit;
7. A second vertical vibration unit; 701. a second radiation plate; 702. a second amplitude transformer; 702-1, flange structure two; 703. a second front metal cover plate; 704. fastening a second bolt; 705. copper electrode plate II; 706. a piezoelectric ceramic piece II; 707. a second rear metal cover plate; 708. a second conducting wire; 709. a second lower cover plate; 710. an ultrasonic generator II;
8. and a third vertical vibration unit.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In order that the above-recited objects, features and advantages of the present invention will become more readily apparent, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description.
Referring to fig. 1, the invention provides a non-contact moving device based on symmetric standing wave type near-field acoustic levitation, which comprises a base 5, a vertical vibration unit group formed by a plurality of vertical vibration units, two horizontal vibration units supported on two sides of the base 5 and arranged oppositely, and a U-shaped vibration assembly 2 suspended above the vertical vibration unit group and positioned between the two horizontal vibration units, wherein the two horizontal vibration units form a horizontal vibration unit group. The number of vertical vibration units in the vertical vibration unit group increases and decreases according to the length of the U-shaped vibration assembly 2. In this embodiment, the vertical vibration units are provided with three, namely, a first vertical vibration unit 6, a second vertical vibration unit 7 and a third vertical vibration unit 8, and the three vertical vibration units have the same structure, installation mode and direction, and jointly form a vertical vibration unit group, the installation positions of the three vertical vibration units are ensured by the base 5, the three vertical vibration units are required to be linearly and uniformly distributed on the same horizontal plane, so that the bearing capacity of standing wave type near-field acoustic suspension can be increased, the inclination of the U-shaped transmission platform can be controlled, and the high precision and the safety of the mobile platform are realized. The horizontal vibration unit group specifically comprises a first horizontal vibration unit 1 and a second horizontal vibration unit 4 which are horizontally arranged in opposite directions, and the radiation plates in the two horizontal vibration units squeeze air between the radiation plates and the left and right surfaces of the U-shaped vibration assembly 2, so that horizontal ultra-precise positioning and movement of the U-shaped vibration assembly 2 are realized.
Specifically, in the above embodiment, the base 5, the vertical vibration unit group, the horizontal vibration unit group, and the U-shaped vibration assembly 2 together form an ultra-precise non-contact moving platform based on standing wave type near-field acoustic levitation. The base 5 is mainly used for positioning and mounting the vertical vibration unit group and the horizontal vibration unit group.
As shown in fig. 2, each vertical vibration unit (first vertical vibration unit 6, second vertical vibration unit 7, third vertical vibration unit 8) includes a sandwich-type transducer second, a horn second 702, and a radiation plate second 701, and the sandwich-type transducer second mainly includes four annular piezoelectric ceramic plates second 706, a front metal cover plate second 703, a rear metal cover plate second 707, and a fastening bolt second 704. The second piezoelectric ceramic piece 706 is positioned between the second front metal cover plate 703 and the second rear metal cover plate 707, and is clamped by the second fastening bolt 704 by applying a pretightening force. The amplitude transformer II 702 and the sandwich type transducer II can be connected through a stud, the amplitude transformer II 702 adopts a ladder shape, a flange structure II 702-1 is processed at the transition section, and the amplitude transformer II 702 and the radiation plate II 701 can be processed into a whole and can be connected through the stud. The sandwich type transducer II converts high-frequency alternating current into vibration of the radiation plate by utilizing the inverse piezoelectric effect so as to squeeze air between the radiation plate II 701 and the lower surface of the U-shaped vibration component 2, and non-contact suspension of the U-shaped vibration component 2 is realized.
Further optimization, to improve the energy utilization of the sandwich-type transducer, the materials of the front metal cover plate two 703 and the rear metal cover plate two 707 are generally different. The second front metal cover 703 is typically aluminum and the second rear metal cover 707 is typically steel.
In a further optimized scheme, the front metal cover plate II 703, the piezoelectric ceramic plate II 706, the rear metal cover plate II 707 and the amplitude transformer II 702 are all cylindrical, and the radiation plate II 701 is a square flat plate. The front metal cover plate II 703, the piezoelectric ceramic plate II 706, the rear metal cover plate II 707, the fastening bolt II 704 and the amplitude transformer II 702 are coaxially arranged, and the center of the radiation plate II 701 and the axis are positioned on the same straight line.
In a further optimized scheme, the two piezoelectric ceramic plates 706 are connected in a mechanical series connection and an electrical end parallel connection manner, two end faces of the two piezoelectric ceramic plates 706 are bonded with adjacent elements by using epoxy resin as adhesive, and then the two piezoelectric ceramic plates 706 are fixed and screwed by using a fastening bolt 704, and the two piezoelectric ceramic plates 706 are connected in the same polarization direction by using a copper electrode.
Further optimizing, ultrasonic generator two 710 generates a frequency ofIs applied to the two copper electrode plates 705 and thus to the piezoelectric ceramic plate 706. Based on the inverse piezoelectric effect, the piezoceramic wafer two 706 will generate vibrations of the same frequency in its longitudinal direction.
In a further optimized scheme, the other end of the amplitude transformer II 702 is connected with the radiation plate II 701, and the vibration of the sandwich type transducer II is transmitted to the radiation plate II 701, so that the radiation plate II 701 has the vibration with the same frequency, the upper surface of the radiation plate II 701 is a working surface, and the amplitude transformer II 702 and the radiation plate II 701 can be integrated through processing and can be connected through studs.
In a further preferred embodiment, as shown in fig. 1 and 2, the upper surface of the second flange 702-1 on the second horn 702 is in contact with the base 5, and the lower surface of the second flange 702-1 is in contact with the second lower cover 709. The lower cover plate II 709 is connected with the base 5 through bolts, so that the mounting and positioning of the amplitude transformer II 702 are realized.
As shown in fig. 3, the first horizontal vibration unit 1 and the second horizontal vibration unit 4 have the same structure, and each comprises a sandwich type transducer I, a horn I102 and a radiation plate I101; the sandwich type transducer I mainly comprises four annular piezoelectric ceramic plates I106, a rear metal cover plate I107 and a fastening bolt I104; since the horizontal vibratory unit is placed horizontally with respect to the base 5, the horn one 102 acts as a front cover plate in order to reduce its horizontal dimension.
In a further optimized scheme, the four piezoelectric ceramic plates 106 are connected in a mechanical series connection and an electrical end parallel connection mode, two end faces of the piezoelectric ceramic plates 106 are bonded with adjacent elements by using epoxy resin as adhesive, and then the piezoelectric ceramic plates are fixed and screwed by fastening bolts 104, and as the polarization directions of the adjacent two piezoelectric ceramic plates 106 are opposite, the same polarization directions of the two piezoelectric ceramic plates 106 which are separated are connected by using copper electrodes.
Further optimizing, the ultrasonic generator one 110 generates a frequency ofIs applied to the two copper electrode plates 105 and thus to the piezoelectric ceramic plate 106. Based on the inverse piezoelectric effect, the piezoelectric ceramic piece 106 will generate vibrations of the same frequency in its longitudinal direction.
Further optimized, the horn I102 is used for amplifying the vibration on the piezoelectric ceramic plate I106, and is connected with the sandwich type transducer I through the fastening bolt I104, and the material is aluminum alloy. In view of the convenience of processing, the first horn 102 is stepped, i.e., is composed of two cylindrical rods of different diameters, and a flange structure 102-1 is processed at the transition section.
In a further preferred embodiment, the other end of the horn 102 is connected to the first radiation plate 101, and the vibration of the sandwich transducer is transmitted to the first radiation plate 101, so that the first radiation plate 101 has the vibration with the same frequency, and the horn 102 and the first radiation plate 101 can be integrated by machining or connected by a stud.
In a further optimized scheme, the right surface of the flange structure I102-1 on the amplitude transformer I102 is contacted with the base 5, the left surface of the flange structure I102-1 is contacted with the lower cover plate I109, and the lower cover plate I109 is connected with the base 5 through bolts, so that the installation and the positioning of the amplitude transformer I102 are realized.
In a further optimization scheme, as shown in fig. 1 and 3, the first horizontal vibration unit 1 and the second horizontal vibration unit 4 have the same structure and installation mode, and form a horizontal vibration unit group together. The first horizontal vibration unit 1 and the second horizontal vibration unit 4 are mounted in different directions. The first radiation plate 101 of the first horizontal vibration unit 1 is positioned on the left inner side of the base 5; the second radiation plate 701 in the second horizontal vibration unit 4 is on the right inner side of the base 5. The mounting positions of the first horizontal vibration unit 1 and the second horizontal vibration unit 4 are ensured by the base 5, requiring their center lines to be on the same straight line and perpendicular and coplanar with the center lines of the three vertical vibration units.
As shown in fig. 4 and 5, the U-shaped vibration assembly 2 includes a U-shaped metal frame 203 and a set of piezoelectric ceramic plates, wherein the set of piezoelectric ceramic plates includes a left piezoelectric ceramic plate 201 and a right piezoelectric ceramic plate 202 with opposite polarization directions, and the left piezoelectric ceramic plate 201 and the right piezoelectric ceramic plate 202 are respectively mounted on left and right end surfaces inside the U-shaped metal frame 203 through epoxy resin glue. The piezoelectric ceramic piece is rectangular and has the same size as the inner end surface of the U-shaped metal frame 203. The same frequency is applied to the left piezoelectric ceramic piece 201 and the right piezoelectric ceramic piece 202 by using the inverse piezoelectric effectWill cause the U-shaped metal frame 203 to vibrate at the same frequency. The left piezoelectric ceramic piece 201 and the right piezoelectric ceramic piece 202 convert high-frequency alternating current into vibration of the U-shaped metal frame 203, on one hand, air between the upper surface of the U-shaped metal frame 203 and the transmission object 3 is extruded, and non-contact suspension of the transmission object 3 is realized; on the one hand, the bearing capacity of standing wave type near-field sound suspension is improved, and meanwhile, the thrust in the horizontal direction is increased.
Further optimizing scheme, the width of the U-shaped metal frame 203 is the same as the width of the second radiation plate 701 in each vertical vibration unit; two end surfaces of the U-shaped metal frame 203 in the width direction are flush with two end surfaces of the radiation plate two 701 in each vertical vibration unit in the width direction; the length of the U-shaped metal frame 203 should be greater than the sum of the lengths of the second radiation plates 701 in each of the vertical vibration units.
In a further optimization scheme, the width of the first radiation plate 101 in the first horizontal vibration unit 1 and the width of the second horizontal vibration unit 4 are the same as the width of the U-shaped metal frame 203, and two end surfaces of the first radiation plate 101 in the width direction are flush with two end surfaces of the U-shaped metal frame 203 in the width direction.
It should be understood that the conveying object 3 has a flat plate shape, the length of which cannot be greater than the length of the U-shaped metal frame 203, and the width of which cannot be greater than the width of the U-shaped metal frame 203.
The working principle of the non-contact mobile device of the invention is as follows:
Referring to fig. 4 and 6, a rectangular coordinate system is established on the upper surface of the second radiation plate 701 in the vertical vibration unit. The origin of the coordinate system is located at the center point of the upper surface of the second radiation plate 701, the horizontal direction is the x axis, the vertical direction is the z axis, and the y axis is perpendicular to the plane formed by the xz axis. Therefore, the vibration amplitude distribution expression of the radiation plate two 701 is
Equation one:
Wherein, For the maximum amplitude of vibration of radiation plate two 701,The normalized amplitude distribution of radiation plate two 701. Accordingly, when the center of the U-shaped metal frame 203 is also located on the z-axis, that is, the initial position of the U-shaped metal frame 203, the vibration amplitude distribution expression thereof is expressed as formula two:
Wherein, Is the maximum amplitude of vibration of the U-shaped metal frame 203,Is the normalized amplitude distribution of the U-shaped metal frame 203.
When the U-shaped metal frame 203 moves horizontally and the displacement thereof relative to the initial position is d, the vibration amplitude distribution expression thereof is formula three:
Since the vertical vibration unit group is designed, the U-shaped metal frame 203 can be ensured to be always kept horizontal, and the expression of the extrusion film between the radiation plate II 701 and the U-shaped metal frame 203 is as shown in the formula IV:
Wherein the method comprises the steps of For this purpose, the average film thickness of the film is extruded. In addition, the boundary condition of the extruded film is that the air pressure is all around. Therefore, the squeeze film pressure distributionThe control equation of (2) is equation five:
Wherein, Is the extrusion number; t is the dimensionless time of the sample,AndThe speed and acceleration of the horizontal movement of the U-shaped metal frame 203; And Are coefficients.
The extrusion film pressure distribution can be obtained by a corresponding numerical solution method through joint solution of a formula I, a formula III, a formula IV and a formula VThen the suspension forceIs the formula six:
Similarly, can be solved for ，，，，And. Thus, the first and second substrates are bonded together,，AndTogether to support the suspension of the U-shaped vibrating assembly 2 and can be sized to ensure that the U-shaped metal frame 203 remains horizontal at all times.AndFor achieving both stationary and horizontal movement of the U-shaped metal frame 203.For supporting the levitation of the transport object 3.
In the initial position, the center of the U-shaped metal frame 203 and the center of the conveyance object 3 are both located on the z-axis. When the U-shaped metal frame 203 moves relative to the initial position, a restoring force is generated due to the action of the gas viscosityThe transfer object 3 is caused to follow the movement of the U-shaped metal frame 203, eventually such that the center of the U-shaped metal frame 203 and the center of the transfer object 3 are on the same vertical line.
The present invention is not limited to the conventional technical means known to those skilled in the art.
In the description of the present invention, it should be understood that the terms "longitudinal," "transverse," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate or are based on the orientation or positional relationship shown in the drawings, merely to facilitate description of the present invention, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention. The above embodiments are only illustrative of the preferred embodiments of the present invention and are not intended to limit the scope of the present invention, and various modifications and improvements made by those skilled in the art to the technical solutions of the present invention should fall within the protection scope defined by the claims of the present invention without departing from the design spirit of the present invention.
Claims (7)
1. A non-contact mobile device based on symmetric standing wave near-field acoustic levitation, comprising:
a base (5) having a middle support table and two supports located on both sides and raised above the support table;
The vertical vibration units are arranged and are linearly distributed and supported on the supporting table top along the length direction of the base (5); the vertical vibration unit comprises a sandwich type energy converter II, a luffing rod II (702) and a radiation plate II (701), wherein the luffing rod II (702) is connected between the sandwich type energy converter II and the radiation plate II (701) and is fixed on a supporting table surface of the base (5) through a flange structure positioned on the peripheral side of the luffing rod II (702);
The two horizontal vibration units are oppositely fixed at the top ends of the two supporting bodies; the horizontal vibration unit comprises a sandwich type energy converter I, an amplitude transformer I (102) and a radiation plate I (101), wherein the amplitude transformer I (102) is connected between the sandwich type energy converter I and the radiation plate I (101) and is fixed at the upper end of a supporting body of the base (5) through a flange structure positioned at the periphery of the amplitude transformer I (102);
The U-shaped vibration component (2) is suspended above the vertical vibration units, and two vertical faces of the U-shaped vibration component (2) are respectively matched with the two horizontal vibration units in a non-contact positioning manner; the U-shaped vibration component (2) comprises a left piezoelectric ceramic piece (201), a right piezoelectric ceramic piece (202) and a U-shaped metal frame (203), wherein the polarization directions of the left piezoelectric ceramic piece (201) and the right piezoelectric ceramic piece (202) are opposite, and the left piezoelectric ceramic piece and the right piezoelectric ceramic piece are respectively arranged on the left end face and the right end face of the inner side of the U-shaped metal frame (203).
2. The non-contact moving device based on symmetric standing wave type near-field acoustic levitation according to claim 1, wherein a plurality of the vertical vibration units are uniformly distributed along the length direction of the base (5), and the center lines of the vertical vibration units are located on the same plane.
3. The non-contact moving device based on symmetric standing wave type near-field acoustic levitation according to claim 2, wherein the center lines of the two horizontal vibration units are positioned on the same straight line and are perpendicular to and coplanar with the center line of each vertical vibration unit.
4. The non-contact mobile device based on symmetric standing wave type near-field acoustic levitation of claim 1, wherein the sandwich type transducer two comprises a front metal cover plate two (703), a piezoelectric ceramic plate two (706), a rear metal cover plate two (707) and a fastening bolt two (704), and a plurality of piezoelectric ceramic plates two (706) are clamped and fixed between the front metal cover plate two (703) and the rear metal cover plate two (707) through the fastening bolt two (704).
5. The non-contact moving device based on symmetric standing wave type near field acoustic levitation of claim 1, wherein the second radiation plate (701) is a square flat plate, and is non-contact supported below the U-shaped vibration assembly (2).
6. The non-contact moving device based on symmetric standing wave type near-field acoustic levitation of claim 1, wherein the sandwich transducer one comprises a piezoelectric ceramic plate one (106), a rear metal cover plate one (107) and a fastening bolt one (104), and a plurality of piezoelectric ceramic plates one (106) are clamped and fixed between the amplitude transformer one (102) and the rear metal cover plate one (107) through the fastening bolt one (104).
7. The non-contact moving device based on symmetric standing wave type near-field acoustic levitation of claim 1, wherein the U-shaped metal frame (203) completely covers the radiation range of the radiation plate two in each of the vertical vibration units.
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| CN110116911A (en) * | 2019-05-20 | 2019-08-13 | 河南理工大学 | Ultrasonic suspension transmission device capable of realizing multi-excitation large load |
| CN110838803A (en) * | 2019-10-31 | 2020-02-25 | 山东科技大学 | Ultrasonic near-field suspension driving system |
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| WO2015114634A1 (en) * | 2014-02-02 | 2015-08-06 | Technion Research & Development Foundation Limited. | Method and system for non-contact levitation |
| CN204471392U (en) * | 2015-02-05 | 2015-07-15 | 杭州电子科技大学 | The ultrasonic standing wave suspension clamping type manipulator of contactless carrying workpiece |
| CN112919140B (en) * | 2021-01-20 | 2022-08-02 | 山东科技大学 | Near-field suspension and static pressure adsorption coupled suspension grabbing system |
| CN116317684A (en) * | 2023-01-31 | 2023-06-23 | 安徽大学 | Non-contact motor based on standing wave type near field ultrasonic levitation and static pressure gas levitation coupling |
| CN117001185A (en) * | 2023-03-30 | 2023-11-07 | 广东工业大学 | Multi-position ultrasonic suspension clamp and workpiece processing method |
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| CN110116911A (en) * | 2019-05-20 | 2019-08-13 | 河南理工大学 | Ultrasonic suspension transmission device capable of realizing multi-excitation large load |
| CN110838803A (en) * | 2019-10-31 | 2020-02-25 | 山东科技大学 | Ultrasonic near-field suspension driving system |
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