CN117890628A

CN117890628A - Scanning probe measuring system and method

Info

Publication number: CN117890628A
Application number: CN202311841804.XA
Authority: CN
Inventors: 陈庚亮; 刘业桂; 纪李佳; 李浩正; 钟宇; 谢颂华
Original assignee: Shenzhen Technology University
Current assignee: Shenzhen Technology University
Priority date: 2023-12-28
Filing date: 2023-12-28
Publication date: 2024-04-16

Abstract

The application discloses a scanning probe measurement system and method, the system includes: the device comprises a plurality of probes, a plurality of cantilever beams, a probe base, a scanning head, a sample table, a feedback system and a data acquisition system; each probe is correspondingly arranged at the first end of one cantilever beam, the second end of each cantilever beam is connected with a probe base, and the probe base is also connected with the scanning head; the at least one probe is used for measuring the sample on the sample table to obtain a scanning signal; at least one probe for measuring a vibration noise signal generated by mechanical vibration; the scanning head is used for driving each probe to move; the sample table is used for bearing a sample and driving the sample to move; the feedback system is used for controlling the scanning head to drive each probe to move according to the driving signal; the data acquisition system is used for adjusting the driving signals according to the vibration noise signals so as to adjust the movement of each probe. The method and the device can efficiently remove noise interference in the measuring process in real time, and can be widely applied to the technical field of scanning probe imaging.

Description

Scanning probe measuring system and method

Technical Field

The present disclosure relates to the field of scanning probe imaging technologies, and in particular, to a scanning probe measurement system and method.

Background

Scanning probe imaging systems, such as atomic force microscopes or scanning tunneling microscopes, are very sensitive to noise during measurement, especially in nano/sub-nano scale measurement, where small disturbances will produce nano-scale noise.

Since the scanning probe imaging system is severely disturbed by the environment, its measurement results are severely dependent on the current test environment. The prior art places the scanning probe imaging system in the sound box by using a heavy sound box and then performs scanning probe imaging. Because the sound-proof box system is heavy, the equipment is debugged. Meanwhile, the noise attenuation performance of the sound insulation box is affected, and all noise interference is difficult to filter. In the prior art, a data analysis method is adopted, a scanning image containing noise is collected first, and noise filtering is realized by using a software filtering mode. This approach is not real-time and relies heavily on the user's proficiency at the device.

Disclosure of Invention

The main objective of the embodiments of the present application is to provide a scanning probe measurement system and method, so as to efficiently remove noise interference in the measurement process in real time.

To achieve the above object, an aspect of embodiments of the present application proposes a scanning probe measurement system, including:

the device comprises at least two probes, cantilever beams, a probe base, a scanning head, a sample table, a feedback system and a data acquisition system, wherein the number of the cantilever beams is equal to that of the probes;

each probe is correspondingly arranged on the first end of one cantilever beam, the second end of each cantilever beam is connected with the probe base, and the probe base is also connected with the scanning head;

at least one probe is used for measuring a sample on the sample stage to obtain a scanning signal; at least one probe for measuring a vibration noise signal generated by mechanical vibration;

the scanning head is used for driving each probe to move;

the sample stage is used for bearing the sample; driving the sample to move;

the feedback system is used for controlling the scanning head to drive each probe to move according to the driving signal; acquiring the scanning signal and the vibration noise signal and sending the scanning signal and the vibration noise signal to the data acquisition system;

the data acquisition system is used for adjusting the driving signals according to the vibration noise signals so as to adjust the movement of each probe.

In some embodiments, each of the probes comprises a first probe and a second probe, and the first probe is longer than the second probe;

the first probe is in contact with the surface of the sample and is used for measuring the sample to obtain the scanning signal;

the second probe is not in contact with the surface of the sample, and the second probe is used for measuring and obtaining the vibration noise signal.

In some embodiments, the measurement system further comprises an electroacoustic transducer;

the electroacoustic transducer is arranged on the probe base and is used for measuring acoustic noise signals;

the data acquisition system is also used for adjusting the driving signals according to the acoustic noise signals so as to adjust the movement of each probe.

In some embodiments, the feedback system includes a laser light source, a position sensitive detector, and a control unit;

the laser light source is used for emitting laser signals;

the position sensitive detector is used for receiving the reflected signal; the reflected signal is the laser signal returned after being irradiated to the cantilever beam;

the control unit is used for obtaining the scanning signal according to the reflection signal.

To achieve the above object, another aspect of the embodiments of the present application provides a scanning probe measurement method, which is applied to the foregoing scanning probe measurement system, and the measurement method includes:

acquiring a noise signal;

adjusting the driving signal according to the noise signal to obtain a new driving signal;

and controlling each probe in the measuring system to move according to the new driving signal.

In some embodiments, the acquiring the noise signal comprises:

acquiring a vibration noise signal generated by mechanical vibration through a probe in the measurement system;

alternatively, the acoustic noise signal is acquired by an electroacoustic transducer in the measurement system.

In some embodiments, the adjusting the driving signal according to the noise signal to obtain a new driving signal includes:

adding the vibration noise signal and the driving signal to obtain the new driving signal;

or adding the acoustic noise signal and the driving signal to obtain the new driving signal.

To achieve the above object, another aspect of the embodiments of the present application proposes a scanning probe measuring apparatus, including:

a signal acquisition unit configured to acquire a noise signal;

the signal adjusting unit is used for adjusting the driving signal according to the noise signal to obtain a new driving signal;

and the probe driving unit is used for controlling each probe in the measuring system to move according to the new driving signal.

To achieve the above object, another aspect of the embodiments of the present application proposes an electronic device including a memory storing a computer program and a processor implementing the above method when executing the computer program.

To achieve the above object, another aspect of the embodiments of the present application proposes a computer-readable storage medium storing a computer program that, when executed by a processor, implements the above method.

The embodiment of the application at least comprises the following beneficial effects:

the utility model provides a set up at least one probe and be used for measuring the vibration noise signal that mechanical vibration produced, and then according to this vibration noise signal real-time update measurement system's drive signal, drive each probe of scanning head drive after the renewal again and remove, interference signal in the scanning signal that other probes obtained of real-time filtration, and this application need not to measure in the sound insulation box, can adjust the removal of each probe effectively.

Drawings

FIG. 1 is an exemplary block diagram of a scanning probe measurement system provided in an embodiment of the present application;

FIG. 2 is an exemplary block diagram of an alternative scanning probe measurement system provided in an embodiment of the present application;

FIG. 3 is an exemplary block diagram of a probe arrangement on a probe base according to an embodiment of the present application;

FIG. 4 is an illustration of a work field Jing Shi of a feedback system provided in an embodiment of the present application;

fig. 5 is a schematic diagram of an operating principle of a scanning probe measurement system according to an embodiment of the present application;

fig. 6 is a schematic flow chart of a method for measuring a scanning probe according to an embodiment of the present application;

FIG. 7 is a flowchart illustrating an online vibration noise compensation method according to an embodiment of the present disclosure;

FIG. 8 is a flowchart illustrating an online acoustic noise compensation method according to an embodiment of the present disclosure;

fig. 9 is a schematic structural diagram of a scanning probe measurement device according to an embodiment of the present application;

fig. 10 is a schematic hardware structure of an electronic device according to an embodiment of the present application.

Detailed Description

In order to make the objects, technical solutions and advantages of the present application more apparent, the present application will be further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the present application. When the following description refers to the accompanying drawings, the same numbers in different drawings refer to the same or similar elements, unless otherwise indicated. The implementations described in the following exemplary embodiments do not represent all implementations consistent with the embodiments of the application, but are merely examples of apparatuses and methods consistent with some aspects of the embodiments of the application as detailed in the accompanying claims.

It will be understood that the terms "first," "second," and the like, as used herein, may be used to describe various concepts, but are not limited by these terms unless otherwise specified. These terms are only used to distinguish one concept from another. For example, the first information may also be referred to as second information, and similarly, the second information may also be referred to as first information, without departing from the scope of embodiments of the present application. The words "if", as used herein, may be interpreted as "at … …" or "at … …" or "in response to a determination", depending on the context.

The terms "at least one," "a plurality," "each," "any" and the like as used herein, wherein at least one includes one, two or more, and a plurality includes two or more, each referring to each of a corresponding plurality, and any one referring to any one of the plurality.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing embodiments of the present application only and is not intended to be limiting of the present application.

Referring to fig. 1, an exemplary block diagram of a scanning probe measurement system is provided, which may include:

the scanning head is used for driving each probe to move;

the sample stage is used for bearing the sample; driving the sample to move;

Referring to fig. 2, fig. 2 is an exemplary structure diagram of an alternative scanning probe measurement system, where, compared to the measurement system shown in fig. 2, the measurement system of the embodiment of the present application may include a plurality of probes, and at least one probe is used to measure a vibration noise signal generated by mechanical vibration, so as to perform real-time denoising according to the vibration noise signal.

Specifically, the working principle of the scanning probe measurement system in this embodiment may be to calculate the surface topography of the sample based on the deflection of the piezoelectric measurement laser on the cantilever beam. The scanning probe measurement system in this embodiment may include the following components:

and (3) probe: the probe may be used for relative movement and interaction with the sample. Alternatively, each probe of this embodiment consists of an atomically sharp tip mounted on a flexible cantilever beam that is mounted on the probe base. Wherein the material of the probe depends on the type of measurement and the nature of the sample.

Scanning head: the scanning head is used to move the probe over the sample surface. Alternatively, the scanning head may be composed of a set of piezoelectric elements, and the probe may be controlled to move in three dimensions very precisely. The scanning head can move the probe both laterally (X, Y plane) and longitudinally (Z direction).

Sample stage: the sample stage is used for placing the sample under investigation, and can be mounted on a set of piezoelectric elements, and can also be moved very precisely controlled so that the sample can be moved relative to the probe during scanning.

Feedback system: the feedback system is used for controlling each probe to move relative to the sample during scanning. Alternatively, the feedback system may detect the deflection of the cantilever beam as it interacts with the sample by a laser, and then the feedback system adjusts the position of the scanning head to maintain the cantilever beam deflection constant and the sample at a constant distance from the probe.

And a data acquisition system: the data acquisition system is used to collect and analyze data measured by the scanning probe measurement system, including the position and deflection of the cantilever beam, and any other signals generated by probe-sample surface interactions.

As a further embodiment, each of the probes comprises a first probe and a second probe, and the first probe is longer than the second probe;

Referring to fig. 3, the present embodiment provides an exemplary structural diagram in which individual probes are provided on a probe base.

Specifically, in addition to the embodiment of fig. 1 in which the lengths of the probes are different, the embodiment may further set the cantilever beams at different heights to enable at least one probe to contact the surface of the sample and measure the sample, and at least one probe does not contact the surface of the sample and measures a vibration noise signal generated by mechanical vibration.

Wherein, the probe which is lower in position and is in contact with the sample surface is set as the first probe, and the probe which is higher in position and is not in contact with the sample surface is set as the second probe.

In consideration of that, in addition to the vibration noise signal generated by the mechanical vibration during the actual use of the scanning probe measurement system, the measurement of the scanning probe measurement system is also affected by the sound of the surrounding environment, so as to further optional implementation manners, the scanning probe measurement system in the embodiment of the present application may further filter the acoustic noise signal in real time, which is specifically implemented as follows:

the measurement system further comprises an electroacoustic transducer;

Specifically, still referring to fig. 3, the present embodiment may provide an electroacoustic transducer on the side of the probe base, alternatively the electroacoustic transducer may be a MEMS piezoelectric ultrasonic transducer.

The measurement of acoustic noise is based on the original probe, an electroacoustic transducer is added to the side wall of the probe base, and the electroacoustic transducer can be arranged close to the probe as much as possible. The electroacoustic transducer may detect acoustic noise around the probe tip, alternatively an array of electroacoustic transducers may be used for acoustic noise measurement, such that acoustic noise signals are detected in any direction.

MEMS piezoelectric ultrasonic transducer acoustic noise measurement principle: the method is to realize the measurement of acoustic noise sound pressure based on the piezoelectric effect of the piezoelectric material. In the imaging measurement process of the probe, due to the existence of acoustic noise in the environment, charges are generated at two ends of a piezoelectric material structure in the electroacoustic transducer due to the action of sound pressure of a sound field of the acoustic noise, charge information generated by the electroacoustic transducer due to the action of the sound field can be obtained through a feedback system, and therefore the sound intensity of the acoustic noise around the probe can be obtained.

As a further alternative embodiment, the feedback system comprises a laser light source, a position sensitive detector and a control unit;

the laser light source is used for emitting laser signals;

In particular, referring to FIG. 4, the present embodiment provides an exemplary diagram of an operating scenario for a feedback system. Referring to fig. 5, the present embodiment provides a schematic diagram of the working principle of a scanning probe measurement system.

First, a position sensitive detector (Position Sensitive Detector, PSD) of the present embodiment is described, which may include a one-dimensional PSD and a two-dimensional PSD. The PSD is a PIN photodiode composed of one or two with uniform impedance surfaces, and compared with a discrete element detector, the position sensitive detector has the advantages of high position resolution, simple reaction current, rapidity (related to the position of a light spot) and the like. In addition, the position signal data of the PSD of this embodiment is independent of the shape of the spot on the detector.

As shown in fig. 4, the PSD may be used to receive the laser signal impinging on the cantilever. When the probe contacts the sample surface, the probe bends with the cantilever beam, further causing the laser signal on the cantilever beam to deflect. The PSD can receive the deflected laser signal and detect the height (topography) of the current measurement point of the sample surface accordingly. When the scanning probe measurement system is interfered by external vibration, the cantilever beam can generate weak vibration, and the vibration signal can be acquired through the photoelectric system.

According to the embodiment of the application, vibration noise and acoustic noise can be measured in real time and fed back to the scanning probe measuring system, so that interference of noise on imaging is avoided. Moreover, both the mechanical vibration noise measurement and the external acoustic noise measurement are near the probe, ensuring that both the measured vibration noise and acoustic noise are closest to the measurement point.

Next, a method for measuring a scanning probe according to an embodiment of the present application will be described in detail.

The embodiment of the application provides a scanning probe measuring method, and relates to the technical field of scanning probe imaging. The scanning probe measuring method provided by the embodiment of the application can be applied to a terminal, a server and software running in the terminal or the server. In some embodiments, the terminal may be, but is not limited to, a smart phone, a tablet computer, a notebook computer, a desktop computer, a smart speaker, a smart watch, a vehicle-mounted terminal, and the like; the server side can be configured as an independent physical server, a server cluster or a distributed system formed by a plurality of physical servers, and can be configured as a cloud server for providing cloud services, cloud databases, cloud computing, cloud functions, cloud storage, network services, cloud communication, middleware services, domain name services, security services, CDNs, basic cloud computing services such as big data and artificial intelligence platforms, and the server can also be a node server in a blockchain network; the software may be an application or the like for realizing the scanning probe measurement method, but is not limited to the above form.

The subject application is operational with numerous general purpose or special purpose computer system environments or configurations. For example: personal computers, server computers, hand-held or portable devices, tablet devices, multiprocessor systems, microprocessor-based systems, set top boxes, programmable consumer electronics, network PCs, minicomputers, mainframe computers, distributed computing environments that include any of the above systems or devices, and the like. The application may be described in the general context of computer-executable instructions, such as program modules, being executed by a computer. Generally, program modules include routines, programs, objects, components, data structures, etc. that perform particular tasks or implement particular abstract data types. The application may also be practiced in distributed computing environments where tasks are performed by remote processing devices that are linked through a communications network. In a distributed computing environment, program modules may be located in both local and remote computer storage media including memory storage devices.

Referring to fig. 6, the embodiment of the present application provides a scanning probe measurement method, which may be applied to a scanning probe measurement system in the embodiment of the present application, and the measurement method includes, but is not limited to, steps S600 to S620, specifically as follows:

s600: a noise signal is acquired.

Specifically, the noise signal in the present embodiment is an interference signal of the scanning probe measurement system during measurement.

Further, S600 may include:

Specifically, the present embodiment can acquire a vibration noise signal generated by mechanical vibration or acquire an acoustic noise signal generated by the surrounding environment.

S610: and adjusting the driving signal according to the noise signal to obtain a new driving signal.

Specifically, the updating driving signal can filter the interference influence of the noise signal on the process of scanning the sample in real time, so that when the feedback system drives each probe according to the new driving signal, each probe can scan to obtain the real appearance of the sample surface.

Further, S610 may include:

In particular, during the measurement, the driving signal of the probe may be of a fixed frequency and of a high frequency, for example up to 100KHz or more. The vibration noise signal and the acoustic noise signal which actually affect the measurement are generally below 1KHz and mainly low-frequency signals of 1Hz-300 Hz. The scanning signal and the noise signal can be distinguished by the signal frequency.

After distinguishing the noise signal from the scan signal, the present embodiment may fourier transform the noise signal and then add the noise spectrum to the drive probe excitation signal to obtain an updated drive signal.

Referring to fig. 7, the present embodiment provides a flowchart illustrating an online vibration noise compensation method.

Specifically, first, the AFM (Atomic Force Microscope ) may be started in this embodiment, and then a time domain signal of vibration noise is acquired through a high-speed ADC (analog-to-digital converter) in a feedback system, then the time domain signal is transformed through fourier transform to obtain a spectrum signal of vibration noise, and then the spectrum signal is added to a scanning probe excitation signal to obtain an updated driving signal.

Referring to fig. 8, the present embodiment provides a flowchart illustrating an online acoustic noise compensation method.

Specifically, first, the AFM (Atomic Force Microscope ) may be started in this embodiment, and then a time domain signal of acoustic noise is acquired through a high-speed ADC (analog-to-digital converter) in a feedback system, then the time domain signal is transformed through fourier transform to obtain a spectrum signal of acoustic noise, and then the spectrum signal is added to a scanning probe excitation signal to obtain an updated driving signal.

S620: and controlling each probe in the measuring system to move according to the new driving signal.

Specifically, the feedback system in this embodiment may drive the scanning head to drive the probes to move according to the new driving signal.

According to the embodiment of the application, the vibration noise and the acoustic noise of the probe can be detected in an active detection mode, the current real-time mechanical vibration noise spectrum and the external acoustic noise spectrum are measured while the probe is scanned for imaging, and then driving signals of the probes are adjusted in real time according to the mechanical vibration noise spectrum and the external acoustic noise spectrum so as to change a control mode, and the influence of the mechanical vibration noise and the external acoustic noise is eliminated.

The following describes and illustrates the embodiments of the present application in detail with reference to specific application examples:

referring to fig. 9, the embodiment of the present application further provides a scanning probe measurement apparatus, which may implement the scanning probe measurement method, where the apparatus includes:

a signal acquisition unit configured to acquire a noise signal;

It can be understood that the content in the above method embodiment is applicable to the embodiment of the present device, and the specific functions implemented by the embodiment of the present device are the same as those of the embodiment of the above method, and the achieved beneficial effects are the same as those of the embodiment of the above method.

The embodiment of the application also provides electronic equipment, which comprises a memory and a processor, wherein the memory stores a computer program, and the processor realizes the scanning probe measurement method when executing the computer program. The electronic equipment can be any intelligent terminal including a tablet personal computer, a vehicle-mounted computer and the like.

It can be understood that the content in the above method embodiment is applicable to the embodiment of the present apparatus, and the specific functions implemented by the embodiment of the present apparatus are the same as those of the embodiment of the above method, and the achieved beneficial effects are the same as those of the embodiment of the above method.

Referring to fig. 10, fig. 10 illustrates a hardware structure of an electronic device according to another embodiment, the electronic device includes:

the processor 1001 may be implemented by using a general-purpose CPU (central processing unit), a microprocessor, an application-specific integrated circuit (ApplicationSpecificIntegratedCircuit, ASIC), or one or more integrated circuits, etc. to execute related programs to implement the technical solutions provided by the embodiments of the present application;

the memory 1002 may be implemented in the form of read-only memory (ReadOnlyMemory, ROM), static storage, dynamic storage, or random access memory (RandomAccessMemory, RAM). The memory 1002 may store an operating system and other application programs, and when the technical solutions provided in the embodiments of the present application are implemented by software or firmware, relevant program codes are stored in the memory 1002, and the processor 1001 invokes a scanning probe measurement method to perform the embodiments of the present application;

an input/output interface 1003 for implementing information input and output;

the communication interface 1004 is configured to implement communication interaction between the present device and other devices, and may implement communication in a wired manner (e.g. USB, network cable, etc.), or may implement communication in a wireless manner (e.g. mobile network, WIFI, bluetooth, etc.);

a bus 1005 for transferring information between the various components of the device (e.g., the processor 1001, memory 1002, input/output interface 1003, and communication interface 1004);

wherein the processor 1001, the memory 1002, the input/output interface 1003, and the communication interface 1004 realize communication connection between each other inside the device through the bus 1005.

The embodiment of the application also provides a computer readable storage medium, wherein the computer readable storage medium stores a computer program, and the computer program realizes the scanning probe measuring method when being executed by a processor.

It can be understood that the content of the above method embodiment is applicable to the present storage medium embodiment, and the functions of the present storage medium embodiment are the same as those of the above method embodiment, and the achieved beneficial effects are the same as those of the above method embodiment.

The memory, as a non-transitory computer readable storage medium, may be used to store non-transitory software programs as well as non-transitory computer executable programs. In addition, the memory may include high-speed random access memory, and may also include non-transitory memory, such as at least one magnetic disk storage device, flash memory device, or other non-transitory solid state storage device. In some embodiments, the memory optionally includes memory remotely located relative to the processor, the remote memory being connectable to the processor through a network. Examples of such networks include, but are not limited to, the internet, intranets, local area networks, mobile communication networks, and combinations thereof.

The embodiments described in the embodiments of the present application are for more clearly describing the technical solutions of the embodiments of the present application, and do not constitute a limitation on the technical solutions provided by the embodiments of the present application, and as those skilled in the art can know that, with the evolution of technology and the appearance of new application scenarios, the technical solutions provided by the embodiments of the present application are equally applicable to similar technical problems.

It will be appreciated by those skilled in the art that the technical solutions shown in the figures do not constitute limitations of the embodiments of the present application, and may include more or fewer steps than shown, or may combine certain steps, or different steps.

The above described apparatus embodiments are merely illustrative, wherein the units illustrated as separate components may or may not be physically separate, i.e. may be located in one place, or may be distributed over a plurality of network elements. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

Those of ordinary skill in the art will appreciate that all or some of the steps of the methods, systems, functional modules/units in the devices disclosed above may be implemented as software, firmware, hardware, and suitable combinations thereof.

The terms "first," "second," "third," "fourth," and the like in the description of the present application and in the above-described figures, if any, are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that embodiments of the present application described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

It should be understood that in this application, "at least one" means one or more, and "a plurality" means two or more. "and/or" for describing the association relationship of the association object, the representation may have three relationships, for example, "a and/or B" may represent: only a, only B and both a and B are present, wherein a, B may be singular or plural. The character "/" generally indicates that the context-dependent object is an "or" relationship. "at least one of" or the like means any combination of these items, including any combination of single item(s) or plural items(s). For example, at least one (one) of a, b or c may represent: a, b, c, "a and b", "a and c", "b and c", or "a and b and c", wherein a, b, c may be single or plural.

In the several embodiments provided in this application, it should be understood that the disclosed apparatus and method may be implemented in other ways. For example, the above-described apparatus embodiments are merely illustrative, and for example, the above-described division of units is merely a logical function division, and there may be another division manner in actual implementation, for example, a plurality of units or components may be combined or may be integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be an indirect coupling or communication connection via some interfaces, devices or units, which may be in electrical, mechanical or other form.

The units described above as separate components may or may not be physically separate, and components shown as units may or may not be physical units, may be located in one place, or may be distributed over a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

In addition, each functional unit in each embodiment of the present application may be integrated in one processing unit, or each unit may exist alone physically, or two or more units may be integrated in one unit. The integrated units may be implemented in hardware or in software functional units.

The integrated units, if implemented in the form of software functional units and sold or used as stand-alone products, may be stored in a computer readable storage medium. Based on such understanding, the technical solution of the present application may be embodied essentially or in part or all of the technical solution or in part in the form of a software product stored in a storage medium, including multiple instructions to cause a computer device (which may be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the methods of the various embodiments of the present application. And the aforementioned storage medium includes: a U-disk, a removable hard disk, a Read-Only Memory (ROM), a random access Memory (Random Access Memory, RAM), a magnetic disk, or an optical disk, or other various media capable of storing a program.

Preferred embodiments of the present application are described above with reference to the accompanying drawings, and thus do not limit the scope of the claims of the embodiments of the present application. Any modifications, equivalent substitutions and improvements made by those skilled in the art without departing from the scope and spirit of the embodiments of the present application shall fall within the scope of the claims of the embodiments of the present application.

Claims

1. A scanning probe measurement system, said measurement system comprising: the device comprises at least two probes, cantilever beams, a probe base, a scanning head, a sample table, a feedback system and a data acquisition system, wherein the number of the cantilever beams is equal to that of the probes;

the scanning head is used for driving each probe to move;

the sample stage is used for bearing the sample; driving the sample to move;

2. A scanning probe measurement system according to claim 1, wherein each of said probes comprises a first probe and a second probe, and said first probe is longer than said second probe;

3. A scanning probe measurement system according to claim 1, characterized in that said measurement system further comprises an electroacoustic transducer;

4. A scanning probe measurement system according to any one of claims 1 to 3, characterized in that the feedback system comprises a laser light source, a position sensitive detector and a control unit;

the laser light source is used for emitting laser signals;

5. A scanning probe measurement method, characterized in that it is applied to a scanning probe measurement system according to any one of claims 1 to 4, said measurement method comprising:

acquiring a noise signal;

6. The method of claim 5, wherein the acquiring the noise signal comprises:

7. The method of claim 6, wherein adjusting the driving signal according to the noise signal to obtain a new driving signal comprises:

8. A scanning probe measurement device, the measurement device comprising:

a signal acquisition unit configured to acquire a noise signal;

9. An electronic device comprising a memory storing a computer program and a processor implementing the method of any of claims 5 to 7 when the computer program is executed by the processor.

10. A computer readable storage medium storing a computer program, characterized in that the computer program, when executed by a processor, implements the method according to any one of claims 5 to 7.