CN117886251A - Horizontal lifting device of evaporator - Google Patents

Abstract

The invention discloses a horizontal lifting device of an evaporation machine, which belongs to the field of evaporation machines and comprises a rack; the fixing mechanism is connected with the frame and fixedly connected with the base of the vapor deposition machine; the bearing mechanism is arranged on the rack in a lifting manner and comprises a cross beam; the guide mechanism is arranged on the frame and comprises two guide rails, sliding blocks are arranged on the two guide rails in a sliding mode, and the two sliding blocks and the cross beam are positioned on the same horizontal line; the driving mechanism is arranged on the frame and is in transmission connection with the bearing mechanism, and the driving mechanism is used for driving the bearing mechanism to ascend and descend. Therefore, when the evaporation source cushion block between the evaporator and the evaporator base is replaced, the evaporator can be lifted in a horizontal state all the time, so that larger errors of film thickness distribution in the operation process of the evaporation process are avoided, and the quality and efficiency of evaporation are improved.

Description

Horizontal lifting device of evaporator

Technical Field

The invention relates to the field of vapor deposition machines, in particular to a horizontal lifting device of a vapor deposition machine.

Background

The evaporator is a machine for manufacturing a screen by utilizing an evaporation technology, and the material to be formed into a film is evaporated or sublimated in a vacuum environment, so that the material can be separated out on the surface of a workpiece, and finally, the luminescent material of the screen is re-engraved on a screen plate without error, so that the uniform distribution of the material is ensured, and the screen panel is better connected with photosensitive information.

In the process of manufacturing production, the evaporation source cushion block of the evaporation machine needs to be lifted, and the evaporation source cushion block of the evaporation machine needs to be adjusted and replaced so as to achieve the purpose of controlling the height of the evaporation machine, thereby meeting the production process of a screen, but because the environment space of a manufacturing site is limited and barriers are more, the evaporation machine is difficult to ensure to be in a horizontal state all the time in the process of lifting the evaporation machine, the film thickness distribution is easy to generate larger errors and form shadows, and the patterning degree of the screen is poor.

Disclosure of Invention

The invention aims to at least solve one of the technical problems in the prior art, and therefore, the invention provides a horizontal lifting device of an evaporator, which can keep the evaporator in a horizontal state in the lifting process, and is convenient for lifting the evaporator horizontally so as to replace an evaporation source cushion block at the bottom of the evaporator, thereby meeting the production process of a screen.

The horizontal lifting device of the evaporator comprises a rack; the fixing mechanism is connected with the frame and fixedly connected with the base of the vapor deposition machine; the bearing mechanism is arranged on the frame in a lifting manner and comprises a cross beam which is horizontally arranged, the cross beam is connected with the evaporator, and the evaporator is horizontally supported by the cross beam; the guide mechanism is arranged on the frame and comprises two guide rails, the two guide rails are arranged along the vertical direction, the two guide rails are respectively positioned at two ends of the cross beam, the two guide rails are respectively provided with sliding blocks in a sliding manner, the two sliding blocks are respectively fixedly connected with two ends of the cross beam, the two sliding blocks and the cross beam are positioned on the same horizontal line, and the cross beam is moved to synchronously lift along the two guide rails in the vertical direction, so that the cross beam keeps a horizontal state to vertically lift and descend; the driving mechanism is arranged on the frame and is in transmission connection with the bearing mechanism, and the driving mechanism is used for driving the bearing mechanism to ascend and descend.

The horizontal lifting device of the evaporator provided by the embodiment of the invention has at least the following beneficial effects: two guide rails are arranged on two sides of the frame and extend along the vertical direction, sliding blocks are respectively arranged on the two guide rails, the two sliding blocks move up and down along the respective guide rails, the two sliding blocks are respectively and fixedly connected to two ends of the cross beam, when the driving piece drives the cross beam to lift, the cross beam keeps ascending and descending in a horizontal state under the limit of the sliding blocks at the left end and the right end, therefore, when the evaporation source cushion block between the evaporation source machine and the evaporation source machine base is replaced, the evaporation source machine can be lifted in the horizontal state, the evaporation source cushion block is replaced, the evaporation source cushion block is continuously maintained to descend in the horizontal state, the evaporation source machine is always lifted in the horizontal state, larger errors of film thickness distribution are avoided in the evaporation process operation process, and the quality and efficiency of evaporation are improved.

According to some embodiments of the invention, the vapor deposition machine further comprises a safety mechanism arranged on the frame, wherein the safety mechanism is connected with the driving mechanism and is used for preventing personnel accidents of operators during the lifting process of the vapor deposition machine.

According to some embodiments of the invention, the safety mechanism comprises: the emitter is arranged at the bottom of the cross beam; the receiver is arranged at the bottom of the cross beam, the photoelectric track of the receiver and the emitter opposite to each other is consistent with the extending direction of the cross beam, and the receiver and the emitter rise and fall along with the rise and fall of the cross beam; and the signal processor is connected with the driving mechanism, and the signal processor is used for receiving and processing the photoelectric signal and outputting the photoelectric signal to the driving mechanism.

According to some embodiments of the invention, the load bearing mechanism further comprises two supporting parts, the two supporting parts are respectively arranged at two ends of the cross beam, the two supporting parts are opposite to the two sliding blocks, the cross beam directly bears the evaporator through the supporting parts, and the direction of the acting force of the sliding blocks on the evaporator is vertical downward.

According to some embodiments of the invention, the support portion is provided with an anti-collision block, the anti-collision block is arranged at one end of the support portion, which is close to the evaporator, and the anti-collision block is used for preventing the outer surface of the evaporator from being damaged in the moving process.

According to some embodiments of the invention, the drive mechanism comprises: the screw rod assembly is arranged on the frame, extends in the vertical direction, and is arranged on the beam in a lifting manner, and is in transmission connection with the beam; the driving piece is arranged on the frame, and is in transmission connection with the screw rod assembly, and the driving piece drives the screw rod assembly to enable the cross beam to ascend and descend at a stable speed, so that impact received by the evaporation machine in the moving process is reduced.

According to some embodiments of the invention, a sealing ring is arranged between the guide rail and the slider, the sealing ring being used for preventing dust and dirt from entering the contact surface between the guide rail and the slider.

According to some embodiments of the invention, the securing mechanism comprises: the buckling part is fixedly arranged on the vapor deposition machine base and buckled with the vapor deposition machine base; the fixing base is arranged on the buckling part and detachably connected with the frame, and the fixing base is used for supporting the frame.

According to some embodiments of the invention, the frame is provided with a guiding part, the guiding part is detachably connected with the fixing seat, and the guiding part is matched with the fixing seat to guide the assembling position of the frame on the fixing seat.

Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.

Drawings

The invention is further described below with reference to the drawings and examples;

fig. 1 is a schematic structural diagram of a horizontal lifting device of an evaporation machine according to an embodiment of the present invention;

FIG. 2 is a schematic view of the lifting mechanism and the driving mechanism in FIG. 1;

FIG. 3 is a schematic view of the rear structure of FIG. 2;

FIG. 4 is a schematic view of the bottom structure of FIG. 2;

FIG. 5 is a schematic view of the attachment mechanism of FIG. 1 to a frame;

fig. 6 is a schematic structural diagram of the fixing mechanism in fig. 1 connected to the base of the vapor deposition machine.

Reference numerals:

a frame 100, a guide part 110, and a reinforcing plate 120;

a fixing mechanism 200, a buckling part 210 and a fixing seat 220;

the bearing mechanism 300, the cross beam 310, the groove 311, the supporting part 320 and the anti-collision block 321;

a guide mechanism 400, a guide rail 410, and a slider 420;

the device comprises a driving mechanism 500, a screw rod assembly 510, a screw rod 511, a screw rod nut 512, a nut seat 513, a driving piece 520, a transmission assembly 530, a synchronous pulley 531, a limit baffle 532 and a bearing roller 533;

a security mechanism 600, a transmitter 610, a receiver 620;

an anti-crash mechanism 700;

a vapor deposition machine 10, a vapor deposition machine base 20.

Detailed Description

Reference will now be made in detail to the present embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein the accompanying drawings are used to supplement the description of the written description so that one can intuitively and intuitively understand each technical feature and overall technical scheme of the present invention, but not to limit the scope of the present invention.

In the description of the present invention, it should be understood that references to orientation descriptions such as upper, lower, front, rear, left, right, etc. are based on the orientation or positional relationship shown in the drawings, are merely for convenience of description of the present invention and to simplify the description, and do not indicate or imply that the apparatus or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention.

In the description of the present invention, a number means one or more, a number means two or more, and greater than, less than, exceeding, etc. are understood to not include the present number, and above, below, within, etc. are understood to include the present number. The description of the first and second times, if any, is intended only for the purpose of distinguishing between technical features and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.

In the description of the present invention, unless explicitly defined otherwise, terms such as arrangement, installation, connection, etc. should be construed broadly and the specific meaning of the terms in the present invention can be reasonably determined by a person skilled in the art in combination with the specific contents of the technical scheme.

A horizontal lifting device of an evaporation machine according to an embodiment of the present invention will be described with reference to fig. 1 to 6.

As shown in fig. 1 to 6, the height adjusting device of the evaporator 10 according to the embodiment of the invention comprises a frame 100; the fixing mechanism 200 is connected with the frame 100, and the fixing mechanism 200 is fixedly connected with the evaporator base 20; the bearing mechanism 300 is arranged on the frame 100 in a lifting manner, the bearing mechanism 300 comprises a beam 310, the beam 310 is horizontally arranged, the beam 310 is connected with the evaporator 10, and the beam 310 horizontally supports the evaporator 10; the guide mechanism 400 is arranged on the frame 100, the guide mechanism 400 comprises two guide rails 410, the two guide rails 410 are arranged along the vertical direction, the two guide rails 410 are respectively positioned at two ends of the beam 310, the two guide rails 410 are respectively provided with a sliding block 420 in a sliding manner, the two sliding blocks 420 are respectively fixedly connected with two ends of the beam 310, the two sliding blocks 420 and the beam 310 are positioned on the same horizontal line, the beam 310 is moved, and the two sliding blocks 420 synchronously lift along the two guide rails 410 along the vertical direction, so that the beam 310 keeps a horizontal state and vertically rises and falls; the driving mechanism 500, the driving mechanism 500 is arranged on the frame 100, the driving mechanism 500 is connected with the bearing mechanism 300 in a transmission way, and the driving mechanism 500 is used for driving the bearing mechanism 300 to ascend and descend.

As shown in fig. 1 and 2, the frame 100 is provided with a fixing mechanism 200, a bearing mechanism 300, a guiding mechanism 400 and a driving mechanism 500, wherein the driving mechanism 500 is in transmission connection with the bearing mechanism 300, the bearing mechanism 300 is connected with the guiding mechanism 400, the guiding mechanism 400 ascends and descends synchronously with the bearing mechanism 300, the driving mechanism 500 drives the bearing mechanism 300 to ascend and descend, the bearing mechanism 300 bears the whole load of the vapor deposition machine 10, and the fixing mechanism 200 is fixedly connected with the vapor deposition machine base 20, so that the frame 100 can be stably connected with the vapor deposition machine base 20 through the fixing mechanism 200. As shown in fig. 3, the load bearing mechanism 300 includes a beam 310, the beam 310 is liftably disposed on the frame 100, the beam 310 extends in the left-right direction, and the beam 310 is disposed horizontally. The guide mechanism 400 includes two guide rails 410, the two guide rails 410 are respectively located at the left and right sides of the frame 100, the two guide rails 410 are all arranged along the vertical direction, the two guide rails 410 are all provided with sliding blocks 420 in a sliding manner, the sliding blocks 420 on the guide rails 410 move along the extending direction of the guide rails 410, namely the vertical direction, the sliding blocks 420 on the guide rails 410 at the left and right sides are respectively fixedly connected with the left and right ends of the cross beam 310, and the two sliding blocks 420 and the cross beam 310 are located on the same horizontal line. Therefore, when the beam 310 is moved, the beam 310 and the sliders 420 on the left and right sides are lifted synchronously, and the sliders 420 on the left and right sides are lifted vertically under the limitation of the guide rail 410, so that the beam 310 keeps a horizontal state to lift and descend, when the evaporation source cushion block between the evaporator 10 and the evaporator base 20 is replaced to adjust the height of the evaporator 10, the beam 310 can lift the evaporator 10 in a horizontal state all the time, thereby avoiding larger errors of film thickness distribution in the evaporation process operation process, and improving the quality and efficiency of evaporation.

Of course, the guide rail 410 may be further provided with three, four, etc., correspondingly, the sliding blocks 420 are also provided with three, four, etc., the plurality of guide rails 410 extend along the vertical direction, the plurality of guide rails 410 are slidably connected with the cross beam 310 through the plurality of sliding blocks 420, and the plurality of guide rails 410 are distributed along the extending direction of the cross beam 310, thereby further improving the horizontal precision of the cross beam 310 in the lifting process.

It should be noted that, the evaporator 10 is a large mechanical device and is expensive, and the load in this embodiment is required to reach 500kg, so if the evaporator 10 is accidentally lowered, a huge economic loss may be caused, and the personal safety of the operator may be possibly compromised. As shown in fig. 2, the frame 100 is provided with an anti-falling mechanism 700, the anti-falling mechanism 700 is located above the bearing mechanism 300, and the anti-falling mechanism 700 is in transmission connection with the bearing mechanism 300, when the vapor deposition machine 10 suddenly descends, the anti-falling mechanism 700 senses the speed of the vapor deposition machine 10, and immediately locks the bearing mechanism 300 or directly locks the vapor deposition machine 10 after detecting that the vapor deposition machine 10 has a descending trend, so as to prevent the vapor deposition machine 10 from continuously descending.

Specifically, the anti-falling mechanism 700 is generally composed of an anti-falling power source, a locking assembly and a trigger, and is connected to a safety belt or rope, when the evaporator 10 suddenly descends, the trigger is triggered by the descending speed of the evaporator 10, the trigger receives and transmits a signal, the locking assembly locks the safety belt or rope, and the load bearing mechanism 300 or the evaporator 10 is tensioned by the safety belt or rope, so that the evaporator 10 is prevented from suddenly falling.

In some embodiments of the present invention, a safety mechanism 600 is further included, the safety mechanism 600 is disposed on the frame 100, the safety mechanism 600 is connected to the driving mechanism 500, and the safety mechanism 600 is used to prevent personal accidents of operators during the lifting of the evaporation machine 10.

In some embodiments of the present invention, the safety mechanism 600 includes: an emitter 610, the emitter 610 being disposed at the bottom of the beam 310; the receiver 620, the receiver 620 is arranged at the bottom of the beam 310, the photoelectric track of the receiver 620 opposite to the emitter 610 is consistent with the extending direction of the beam 310, and the receiver 620 and the emitter 610 rise and fall along with the rising and falling of the beam 310; and the signal processor is connected with the driving mechanism 500, and the signal processor is used for receiving and processing the photoelectric signal and outputting the photoelectric signal to the driving mechanism 500.

In order to protect personal safety of operators, the safety mechanism 600 is further disposed on the frame 100 to prevent the operators from damaging the body part by extending into the gap between the evaporator 10 and the evaporator base 20 by mistake during the lifting process of the evaporator 10. As shown in fig. 1, the safety mechanism 600 is provided on the load bearing mechanism 300 to be lifted and lowered along with the lifting and lowering of the load bearing mechanism 300 to detect whether or not the body part of the operator is in a dangerous area. In this embodiment, the safety mechanism 600 includes a transmitter 610, a receiver 620, and a signal processor, and its working principle is: the light emitted by the emitter 610 directly enters the receiver 620, when the detected object passes through the gap between the emitter 610 and the receiver 620 and blocks the light, the signal processor receives the photoelectric signal and outputs the photoelectric signal to the driving mechanism 500, namely, when the body part of the operator enters a dangerous area, the body part of the operator blocks the light, the signal processor transmits the dangerous signal to the driving mechanism 500, and the driving mechanism 500 stops driving the evaporator 10 to descend, so that the operator is prevented from being further damaged.

It is contemplated that security mechanism 600 may also be a safety grating, infrared sensor, etc., correlation, reflection, or diffusion type photoelectric protection device.

In some embodiments of the present invention, the load bearing mechanism 300 further includes two supporting portions 320, the two supporting portions 320 are respectively disposed at two ends of the beam 310, the two supporting portions 320 are disposed opposite to the two sliding blocks, and the beam 310 directly carries the evaporation machine 10 through the supporting portions 320, so that the direction of the sliding blocks 420 subjected to the acting force of the evaporation machine 10 is vertically downward.

As shown in fig. 3, the load bearing mechanism 300 further includes a supporting portion 320, the supporting portion 320 is fixedly connected to the beam 310, and the supporting portion 320 is in direct contact with the evaporation machine 10 and supports the evaporation machine 10 to ascend and descend under the driving of the driving member 520. In this embodiment, two support portions 320 are provided, and the two support portions 320 simultaneously support the bottom of the vapor deposition machine 10, and the two support portions 320 are respectively provided at the left and right ends of the beam 310, and the support portions 320 are located on the opposite side of the beam 310 to the slider 420, however, the support portions 320 may also be located on the same side of the beam 310 as the slider 420. Thus, the two guide rails 410 extend vertically, the beam 310 is perpendicular to the two guide rails 410, two ends of the beam 310 are fixed on the sliding blocks 420 on the left and right sides of the frame 100, two supporting parts 320 are respectively fixed on two ends of the beam 310, the positions of the supporting parts 320 correspond to the sliding blocks 420, and the supporting parts 320 move up and down along the guide rails 410 along with the beam 310.

Of course, the support portion 320 may be provided with one, three, five, or the like, and when there is only one support portion 320, the contact area between the support portion 320 and the vapor deposition machine 10 needs to be increased as much as possible to prevent the vapor deposition machine 10 from tilting and turning over during the movement process; when the supporting parts 320 are provided with a plurality of supporting parts 320, the supporting parts 320 are uniformly distributed on the cross beam 310 to increase the load capacity of the bearing mechanism 300, disperse the acting force of the evaporator 10 on each supporting part 320, and prolong the service life of the supporting part 320 structure.

In some embodiments of the present invention, the support portion 320 is provided with an anti-collision block 321, and the anti-collision block 321 is disposed at one end of the support portion 320 near the evaporator 10, where the anti-collision block is used to prevent the outer surface of the evaporator 10 from being damaged during the movement process.

Specifically, in this embodiment, the support portion 320 is provided with two claws, each of the claws is in a shape of a right-angle folded plate, one side of the right-angle folded plate extends along a vertical direction, and the other side of the right-angle folded plate extends along a horizontal direction away from the guide rail 410, so as to fit the edge shape of the evaporator 10 and be buckled with the edge of the evaporator 10. Further, the anti-collision block 321 is disposed on the gripper, as shown in fig. 3, the anti-collision block 321 is located at the front end of the gripper, and when the gripper is inserted into the gap between the evaporator 10 and the evaporator base 20, the anti-collision block 321 can reduce the scratch and collision of the gripper to the evaporator 10, and plays a role in protecting the evaporator 10.

In some embodiments of the present invention, the drive mechanism 500 includes: the screw rod assembly 510 is arranged on the frame 100, the screw rod assembly 510 extends along the vertical direction, the beam 310 is arranged on the screw rod assembly 510 in a lifting manner, and the screw rod assembly 510 is in transmission connection with the beam 310; the driving member 520 is disposed on the frame 100, the driving member 520 is in transmission connection with the screw assembly 510, and the driving member 520 drives the screw assembly 510 to enable the beam 310 to ascend and descend at a stable speed, thereby reducing the impact received by the evaporation machine 10 during the moving process.

As shown in fig. 2 and 5, the driving mechanism 500 includes a screw assembly 510 and a driving member 520, the screw assembly 510 is disposed on the frame 100, and the screw assembly 510 is located between the two guide rails 410. The driving member 520 is in transmission connection with the screw rod assembly 510, the screw rod assemblies 510 are in transmission connection with the cross beam 310, and the driving member 520 drives the screw rod assembly 510 to enable the cross beam 310 to move in the up-down direction. The transmission precision of the screw rod is high, and the screw rod is suitable for mechanical equipment requiring high-precision movement, so that the evaporation coating machine 10 can be stably and slowly lowered above the evaporation source cushion block, and unnecessary damage of the evaporation source cushion block to the evaporation coating machine 10 is avoided. Meanwhile, the screw rod has good transmission stability and strong load capacity, has small inertia and friction force and is enough to support the evaporator to lift, so that the evaporator 10 can keep stable linear motion, and the impact of the evaporator 10 in the lifting process is reduced

Specifically, the screw rod 511 mechanism includes a screw rod 511, a screw rod nut 512 and a nut seat 513, the screw rod 511 is in transmission connection with a driving member 520, the screw rod nut 512 is sleeved on the screw rod 511, the driving member 520 drives the screw rod 511 to rotate, the screw rod nut 512 moves up and down along the extending direction of the screw rod 511, the nut seat 513 is sleeved on the screw rod nut 512, and the nut seat 513 is fixedly connected with the beam 310, therefore, two nut seats 513 in two screw rod assemblies 510 are fixedly connected with the beam 310 and horizontally fixed by the guide rail 410 and the pulley beam 310, and in the process of driving the screw rod 511 by the driving member 520, the two nut seats 513 move in a horizontal state all the time.

In this embodiment, the driving member 520 is a servo motor, which is electrically connected to the safety mechanism 600, and the servo motor may be electrically connected to the anti-falling mechanism 700.

In this embodiment, two screw assemblies 510 are provided, and two screw assemblies 510 are disposed on the frame 100, and two screw assemblies 510 are disposed between two guide rails 410, it is understood that two guide rails 410 may be disposed between two screw assemblies 510, and two guide rails 410 and two screw assemblies 510 may be alternatively disposed. The driving piece 520 is in transmission connection with the two screw rod assemblies 510, the two screw rod assemblies 510 are in transmission connection with the beam 310, and the driving piece 520 drives the two screw rod 511 mechanisms to enable the beam 310 to move in the up-down direction, so that the beam 310 is further ensured to be in an accurate horizontal state.

It is conceivable that the screw rod assembly 510 may further be provided with a plurality of one, three, four, five, etc., and the plurality of screw rod assemblies 510 may enable the beam 310 to bear a larger load, so as to reduce the deformation degree of the beam 310 when being stressed, and enable the horizontal degree of the position of the vapor deposition machine 10 in the lifting process to be more accurate.

As shown in fig. 4, a transmission assembly 530 is disposed at the bottom of the frame 100, in this embodiment, the transmission assembly 530 is a synchronous pulley 531, the synchronous pulley 531 includes a first pulley, a second pulley and a track, the first pulley is coaxially connected with the right screw rod 511, the first pulley rotates synchronously with the right screw rod 511, the second pulley is coaxially connected with the left screw rod 511, the second pulley rotates synchronously with the left screw rod 511, the driving member 520 drives the right screw rod 511 to rotate, meanwhile, the right screw rod 511 rotates the second pulley through the track, and the second pulley drives the left screw rod 511 to rotate synchronously, thereby realizing synchronous driving of the two screw rod assemblies 510. Of course, the screw assemblies 510 on the left and right sides can be synchronously driven by two driving members 520, respectively.

Specifically, be provided with limit baffle 532 on synchronous pulley 531, limit baffle 532 has seted up two through-holes, and two through-holes are held respectively and are had the track, simultaneously, evenly are provided with bearing roller 533 along track extending direction, and bearing roller 533 is located the front side of track, and bearing roller 533 offsets with the track, and is unanimous with track roll direction. When the frame 100 is mounted on the fixed seat 220, the limit baffle 532 abuts against the fixed seat 220, so that a sufficient space is provided between the frame 100 and the fixed seat 220 to accommodate the transmission assembly 530 to operate normally.

It is contemplated that the drive assembly 530 may also be gear driven, chain driven, worm driven, screw driven, or the like.

In some embodiments of the present invention, a seal is provided between the rail 410 and the slider 420, the seal being configured to prevent dust and dirt from entering the interface between the rail 410 and the slider 420.

A sealing ring (not shown in the figure) is arranged between the guide rail 410 and the sliding block 420, and the sealing ring is arranged between the guide rail 410 and the sliding block 420, so that a completely closed space is formed between the sealing ring and the guide rail 410 and between the sealing ring and the sliding block 420, and impurities such as dust and dirt are prevented from entering a contact surface, thereby reducing abrasion and failure occurrence rate.

In some embodiments of the invention, the cross-section of the beam 310 is in the shape of "".

As shown in fig. 2, the cross beam 310 is in a shape of , that is, the front side of the cross beam 310 is provided with a groove 311, the groove 311 extends along the left-right direction, the rear sides of the two nut seats 513 are embedded into the groove 311, and meanwhile, the cross beam with a cross section in a shape of can bear larger bending and torsion loads, so that the bearing capacity of the bearing mechanism 300 is improved.

In some embodiments of the present invention, the securing mechanism 200 includes: a fastening part 210, the fastening part 210 is fixedly arranged on the evaporator base 20, and the fastening part 210 is fastened with the evaporator base 20; the fixing base 220, the fixing base 220 is disposed on the fastening portion 210, the fixing base 220 is detachably connected with the frame 100, and the fixing base 220 is used for supporting the frame 100.

In some embodiments of the present invention, the frame 100 is provided with a guiding portion 110, the guiding portion 110 is detachably connected to the fixing base 220, and the guiding portion 110 cooperates with the fixing base 220 to guide the assembling position of the frame 100 on the fixing base 220.

As shown in fig. 6, the fixing mechanism 200 includes a fastening portion 210 and a fixing base 220, the fixing base 220 is disposed on the fastening portion 210, a connecting hole is reserved in the fastening portion 210, and the fastening portion 210 is fastened to an edge of the evaporator base 20 and is stably connected to the evaporator base 20 through the connecting hole. The fixing base 220 is reserved with a connection hole site with the frame 100 so that the frame 100 can be rapidly assembled and disassembled with the fixing base 220 through bolts. Specifically, the upper end of the fastening portion 210 is in a rectangular folded plate shape, and is engaged with the edge of the evaporator base 20, and the fastening portion 210 is fastened to the evaporator base 20 in a hanging shape, and is used as a stress structure to support the weight of the frame 100 and the evaporator 10. Specifically, two fixing bases 220 are provided, and the two fixing bases 220 are respectively located at two ends of the bottom of the frame 100, and of course, three, four, five, or other fixing bases 220 may also be provided.

As shown in fig. 2, a guide part 110 is provided on the frame 100, two fixing seats 220 are provided between the guide part 110, the guide part 110 is connected with the two fixing seats 220 to guide the installation position of the frame 100 when the frame 100 and the fixing seats 220 are installed, and the guide part 110 is connected with the fixing seats 220 by bolts.

As shown in fig. 2, the frame 100 is further provided with two reinforcing plates 120, where the reinforcing plates 120 are disposed corresponding to the two guide rails 410, and the reinforcing plates 120 are disposed on opposite sides of the frame 100 and the guide rails 410, so that the strength of the frame 100 and the guide rails 410 can be increased, and the guide rails 410 can be kept disposed along the vertical direction.

In some embodiments of the present invention, two screw rods 511 are rotatably disposed on the frame 100, the screw rod 511 on the right side is in transmission connection with the servo motor, the screw rod 511 on the right side drives the screw rod 511 on the left side to rotate synchronously through a synchronous pulley 531, screw rod nuts 512 are sleeved on the screw rods 511 on the left side and the right side, nut seats 513 are sleeved on the two screw rod nuts 512, the two nut seats 513 are fixedly connected with the beam 310, two ends of the beam 310 are respectively fixedly connected with the sliding blocks 420 on the guide rails 410 on the left side and the right side of the frame 100, two claws are disposed on one surface of the beam 310 opposite to the sliding blocks 420, and the two claws are respectively located at two ends of the beam 310. The servo motor drives the right screw rod 511 to rotate, the right screw rod 511 drives the left screw rod 511 to rotate, the two screw rod nuts 512 and the two nut seats 513 sleeved on the two screw rods 511 drive the cross beam 310 to lift, the sliding blocks 420 on the left side and the right side slide along the guide rail 410 in the vertical direction, the cross beam 310 is kept in a horizontal state all the time, and the claws on the cross beam 310 lift or put down the evaporator 10 along with the driving of the screw rods 511. It should be noted that, in this embodiment, two adjusting devices of the evaporation machine 10 are required for lifting the evaporation machine 10, in which, the two adjusting devices of the evaporation machine 10 act on the front side and the rear side of the evaporation machine 10 respectively, and four claws of the two adjusting devices of the evaporation machine 10 jointly maintain the evaporation machine 10 in a horizontal state, so that the evaporation machine 10 is lifted stably in the horizontal state, and a large error in film thickness distribution during the evaporation process operation is avoided, thereby improving the quality and efficiency of evaporation and meeting the production process requirement of a screen.

The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of one of ordinary skill in the art without departing from the spirit of the present invention.

Claims (10)

1. A horizontal lifting device of an evaporation machine, comprising:

a frame (100);

the fixing mechanism (200) is connected with the rack (100), and the fixing mechanism (200) is fixedly connected with the evaporator base (20);

the bearing mechanism (300) is arranged on the frame (100) in a lifting manner, the bearing mechanism (300) comprises a cross beam (310), the cross beam (310) is horizontally arranged, the cross beam (310) is connected with the evaporator (10), and the cross beam (310) horizontally supports the evaporator (10);

the guide mechanism (400) is arranged on the frame (100), the guide mechanism (400) comprises two guide rails (410), the two guide rails (410) are arranged in the vertical direction, the two guide rails (410) are respectively positioned at two ends of the cross beam (310), the two guide rails (410) are respectively provided with sliding blocks (420) in a sliding manner, the two sliding blocks (420) are respectively fixedly connected with two ends of the cross beam (310), the two sliding blocks (420) and the cross beam (310) are positioned on the same horizontal line, the cross beam (310) is moved, and the two sliding blocks (420) synchronously lift in the vertical direction along the two guide rails (410), so that the cross beam (310) keeps a horizontal state and vertically lifts and drops;

the driving mechanism (500), the driving mechanism (500) is arranged on the frame (100), the driving mechanism (500) is in transmission connection with the bearing mechanism (300), and the driving mechanism (500) is used for driving the bearing mechanism (300) to ascend and descend.

2. The horizontal lifting device of a vapor deposition machine according to claim 1, further comprising a safety mechanism (600), wherein the safety mechanism (600) is arranged on the frame (100), the safety mechanism (600) is connected with the driving mechanism (500), and the safety mechanism (600) is used for preventing personnel accidents of operators during the lifting of the vapor deposition machine (10).

3. The horizontal lifting device of the vapor deposition machine according to claim 2, characterized in that the safety mechanism (600) comprises:

-an emitter (610), the emitter (610) being arranged at the bottom of the beam (310);

the receiver (620) is arranged at the bottom of the beam (310), the photoelectric track of the receiver (620) opposite to the emitter (610) is consistent with the extending direction of the beam (310), and the receiver (620) and the emitter (610) are lifted along with the lifting of the beam (310);

and the signal processor is connected with the driving mechanism (500), and is used for receiving and processing the photoelectric signals and outputting the photoelectric signals to the driving mechanism (500).

4. The horizontal lifting device of the vapor deposition machine according to claim 1, wherein the bearing mechanism (300) further comprises two supporting parts (320), the two supporting parts (320) are respectively arranged at two ends of the beam (310), the two supporting parts (320) are opposite to the two sliding blocks, the beam (310) directly bears the vapor deposition machine (10) through the supporting parts (320), and the direction of the acting force of the sliding blocks (420) on the vapor deposition machine (10) is vertical downward.

5. The horizontal lifting device of a vapor deposition machine according to claim 4, wherein an anti-collision block (321) is arranged on the supporting part (320), the anti-collision block (321) is arranged at one end of the supporting part (320) close to the vapor deposition machine (10), and the anti-collision block is used for preventing the outer surface of the vapor deposition machine (10) from being damaged in the moving process.

6. The horizontal lifting device of the vapor deposition machine according to claim 1, characterized in that the driving mechanism (500) comprises:

the screw rod assembly (510), the screw rod assembly (510) is arranged on the frame (100), the screw rod assembly (510) extends along the vertical direction, the cross beam (310) is arranged on the screw rod assembly (510) in a lifting manner, and the screw rod assembly (510) is in transmission connection with the cross beam (310);

the driving piece (520), driving piece (520) are arranged on the frame (100), driving piece (520) is in transmission connection with the lead screw assembly (510), driving piece (520) drives the lead screw assembly (510) to enable the cross beam (310) to ascend and descend at a stable speed, and therefore impact received by the evaporator (10) in the moving process is reduced.

7. The horizontal lifting device of an evaporation machine according to claim 1, characterized in that a sealing ring is arranged between the guide rail (410) and the slide block (420), the sealing ring being used for preventing dust and dirt from entering the contact surface between the guide rail (410) and the slide block (420).

8. The horizontal lifting device of the evaporator according to claim 1, wherein the cross beam (310) has a cross section of a shape of ".

9. The horizontal lifting device of the vapor deposition machine according to claim 1, wherein the fixing mechanism (200) includes:

a fastening part (210), wherein the fastening part (210) is fixedly arranged on the evaporator base (20), and the fastening part (210) is fastened with the evaporator base (20);

the fixing seat (220), fixing seat (220) is arranged on the buckling part (210), the fixing seat (220) is detachably connected with the frame (100), and the fixing seat (220) is used for supporting the frame (100).

10. The horizontal lifting device of the evaporation machine according to claim 9, wherein a guiding part (110) is arranged on the frame (100), the guiding part (110) is detachably connected with the fixing seat (220), and the guiding part (110) is matched with the fixing seat (220) to guide the assembling position of the frame (100) on the fixing seat (220).