CN117871970B - Electrostatic sensor device with active shielding circuit - Google Patents

Electrostatic sensor device with active shielding circuit Download PDF

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Publication number
CN117871970B
CN117871970B CN202410270945.9A CN202410270945A CN117871970B CN 117871970 B CN117871970 B CN 117871970B CN 202410270945 A CN202410270945 A CN 202410270945A CN 117871970 B CN117871970 B CN 117871970B
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China
Prior art keywords
electrode plate
active shielding
detection electrode
shielding
processing unit
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CN202410270945.9A
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CN117871970A (en
Inventor
李鹏斐
贺中正
陈曦
秦泗超
王伟
韩若愚
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Beijing Institute of Technology BIT
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Beijing Institute of Technology BIT
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/12Measuring electrostatic fields or voltage-potential
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/18Screening arrangements against electric or magnetic fields, e.g. against earth's field

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

The invention provides an electrostatic sensor device with an active shielding circuit, which belongs to the technical field of electrostatic sensors and comprises an active shielding detection electrode, a three-axis cable and a signal processing unit; the active shielding detection electrode comprises a detection electrode plate, an insulating layer, an active shielding electrode plate and a grounding electrode plate; the three-axis cable comprises a core wire, an inner shielding layer and an outer shielding layer, one end of the core wire is connected with the detection electrode plate, and the other end of the core wire is connected with the signal processing unit; one end of the inner shielding layer is connected with the active shielding electrode plate, the other end of the inner shielding layer is connected with the signal processing unit, and the outer shielding layer is grounded. The device remarkably reduces parasitic capacitance between the detection electrode plate and the grounding electrode plate, improves the sensitivity of the electrostatic sensor device and improves the measurement accuracy of the electrostatic sensor; the influence of electromagnetic interference sources on the side of the active shielding electrode plate on the measured value of the device is reduced.

Description

Electrostatic sensor device with active shielding circuit
Technical Field
The invention belongs to the technical field of electrostatic sensors, and particularly relates to an electrostatic sensor device with an active shielding circuit.
Background
An electrostatic sensor device is a sensor device that senses an electrostatic field. Its principle of operation is based on the phenomenon of electrostatic induction, i.e. when a charged body approaches the sensor, it changes the electric field around the sensor, thereby creating a charge redistribution and potential change inside the sensor. The sensor senses the surrounding electric field changes by measuring these changes, converting the electric field signal into an electrical signal.
Electrostatic sensor devices are widely used in various fields such as manufacturing, automation control, electronics, medical treatment, etc. Its advantages are high sensitivity, high response speed, simple structure and high reliability. There are also limitations such as susceptibility to vibration and electromagnetic interference.
The electrostatic sensor device mainly comprises three parts of a detection electrode, a transmission cable and a signal processing unit. The detection electrode is a good conductor for sensing surrounding electric fields. The transmission cable transmits the electric signal induced by the detection electrode to the signal processing unit for filtering and amplifying. The electrostatic sensor device collects small electrostatic signals and is easily influenced by electromagnetic interference in the environment. The transmission cable may cause noise when vibrating sufficient to drown out an unwanted signal.
Disclosure of Invention
The invention provides an electrostatic sensor device with an active shielding circuit, which aims to solve the technical problem of reducing the influence of an electromagnetic interference source on the measurement value of the electrostatic sensor and improving the measurement accuracy and sensitivity of the electrostatic sensor.
In order to solve the technical problems, the invention provides an electrostatic sensor device with an active shielding circuit, which comprises an active shielding detection electrode, a three-axis cable and a signal processing unit;
The active shielding detection electrode, the three-axis cable and the signal processing unit are electrically connected in sequence;
The active shielding detection electrode comprises a detection electrode plate, an insulating layer, an active shielding electrode plate and a grounding electrode plate, wherein the active shielding electrode plate is arranged between the detection electrode plate and the grounding electrode plate, the insulating layer is arranged between the detection electrode plate and the active shielding electrode plate, and the insulating layer is arranged between the active shielding electrode plate and the grounding electrode plate;
The three-axis cable comprises a core wire, an inner shielding layer and an outer shielding layer, one end of the core wire is connected with the detection electrode plate, and the other end of the core wire is connected with the signal processing unit; one end of the inner shielding layer is connected with the active shielding electrode plate, the other end of the inner shielding layer is connected with the signal processing unit, and the outer shielding layer is grounded.
Further, the signal processing unit comprises a voltage follower, and two ends of the voltage follower are respectively connected with the core wire and the inner shielding layer.
Further, the signal processing unit comprises a resistor, the core wire is connected with the resistor, and the resistor is grounded.
Further, the signal processing unit comprises an instrument operational amplifier, an ADC and an MCU, and the core wire is sequentially connected with the instrument operational amplifier, the ADC and the MCU in series.
The invention relates to an electrostatic sensor device with an active shielding circuit. Compared with the traditional electrostatic detection electrode, the active shielding electrode plate is added between the detection electrode plate and the grounding electrode plate. Because the two ends of the voltage follower are respectively connected with the core wire and the inner shielding layer, the inner shielding layer is connected with the active shielding electrode plate, and the core wire is connected with the detection electrode plate, the potential of the active shielding electrode plate is consistent with that of the detection electrode plate, the parasitic capacitance between the detection electrode plate and the grounding electrode plate is obviously reduced, the sensitivity of the electrostatic sensor device is improved, and the interference caused by cable vibration is reduced; almost no potential difference exists between the core wire and the inner shielding layer, the leakage current of the core wire is obviously reduced, the reduction of the leakage current is favorable for reducing baseline drift of signals, and the measurement accuracy of the electrostatic sensor is improved.
Because the active shielding electrode plate and the grounding electrode plate are arranged on one side of the detection electrode plate, the influence of an electromagnetic interference source on one side of the active shielding electrode plate on the measurement value of the electrostatic sensor device can be reduced. The active shielding electrode plate and the grounding electrode plate enable the detection electrode plate to be mainly sensitive to an electric field target at the front side of the detection electrode plate, and the electrostatic sensor device has certain directivity.
Drawings
Fig. 1 is a schematic diagram of a structure of an electrostatic sensor device having an active shielding circuit.
11-Detecting electrode plates; 12-an insulating layer; 13-active shielding electrode sheet; 14-grounding electrode plates; 20-triaxial cable; 31-resistance; 32-an instrumentation operational amplifier; 33-voltage follower.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, based on the embodiments of the invention, which are apparent to those of ordinary skill in the art without inventive faculty, are intended to be within the scope of the invention.
Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, based on the embodiments of the invention, which are apparent to those of ordinary skill in the art without inventive faculty, are intended to be within the scope of the invention.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
For a better understanding of the objects, structure and function of the invention, an electrostatic sensor device with an active shielding circuit according to the invention is described in further detail below with reference to the accompanying drawings.
Example 1:
As shown in fig. 1, the present invention provides an electrostatic sensor device with an active shielding circuit, comprising an active shielding detection electrode, a triaxial cable 20 and a signal processing unit;
the active shielding detection electrode, the triaxial cable 20 and the signal processing unit are electrically connected in sequence;
the active shielding detection electrode comprises a detection electrode plate 11, an insulating layer 12, an active shielding electrode plate 13 and a grounding electrode plate 14, wherein the active shielding electrode plate 13 is arranged between the detection electrode plate 11 and the grounding electrode plate 14, the insulating layer 12 is arranged between the detection electrode plate 11 and the active shielding electrode plate 13, and the insulating layer 12 is arranged between the active shielding electrode plate 13 and the grounding electrode plate 14;
The three-axis cable 20 comprises a core wire, an inner shielding layer and an outer shielding layer, one end of the core wire is connected with the detection electrode plate 11, and the other end of the core wire is connected with the signal processing unit; one end of the inner shielding layer is connected with the active shielding electrode plate 13, the other end of the inner shielding layer is connected with the signal processing unit, and the outer shielding layer is grounded.
Example 2:
As shown in fig. 1, the present invention provides an electrostatic sensor device with an active shielding circuit, comprising an active shielding detection electrode, a triaxial cable 20 and a signal processing unit;
the active shielding detection electrode, the triaxial cable 20 and the signal processing unit are electrically connected in sequence;
the active shielding detection electrode comprises a detection electrode plate 11, an insulating layer 12, an active shielding electrode plate 13 and a grounding electrode plate 14, wherein the active shielding electrode plate 13 is arranged between the detection electrode plate 11 and the grounding electrode plate 14, the insulating layer 12 is arranged between the detection electrode plate 11 and the active shielding electrode plate 13, and the insulating layer 12 is arranged between the active shielding electrode plate 13 and the grounding electrode plate 14;
the three-axis cable comprises a core wire, an inner shielding layer and an outer shielding layer, one end of the core wire is connected with the detection electrode plate 11, and the other end of the core wire is connected with the signal processing unit; one end of the inner shielding layer is connected with the active shielding electrode plate 13, the other end of the inner shielding layer is connected with the signal processing unit, and the outer shielding layer is grounded.
The present embodiment is different from the first embodiment in that:
the signal processing unit comprises a resistor 31, an instrument operational amplifier 32, a voltage follower 33, an ADC and an MCU, and the core wire is sequentially connected with the instrument operational amplifier 32, the ADC and the MCU in series; the core wire is also connected with a resistor 31, and the resistor 31 is grounded; the voltage follower 33 is connected to the core wire and the inner shield layer at both ends, respectively.
The voltage on the core wire is applied to the inner shielding layer of the triaxial cable and thus to the active shielding electrode sheet 13 via the voltage follower 33, rendering the electrostatic sensor device insensitive to electric field variations on the side where the active shielding electrode sheet 13 is mounted.
When the detection electrode plate 11 is in a changed electric field, the generated induced current flows through the resistor 31 to generate a voltage signal, the voltage signal is amplified by the instrument operational amplifier 32, and the MCU controls the ADC to collect the amplified voltage signal. The MCU stores and analyzes the voltage signal.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention are included in the protection scope of the present invention.

Claims (3)

1. An electrostatic sensor device with an active shielding circuit is characterized by comprising an active shielding detection electrode, a three-axis cable and a signal processing unit;
The active shielding detection electrode, the three-axis cable and the signal processing unit are electrically connected in sequence;
The active shielding detection electrode comprises a detection electrode plate, an insulating layer, an active shielding electrode plate and a grounding electrode plate, wherein the active shielding electrode plate is arranged between the detection electrode plate and the grounding electrode plate, the insulating layer is arranged between the detection electrode plate and the active shielding electrode plate, and the insulating layer is arranged between the active shielding electrode plate and the grounding electrode plate;
The three-axis cable comprises a core wire, an inner shielding layer and an outer shielding layer, one end of the core wire is connected with the detection electrode plate, and the other end of the core wire is connected with the signal processing unit; one end of the inner shielding layer is connected with the active shielding electrode plate, the other end of the inner shielding layer is connected with the signal processing unit, and the outer shielding layer is grounded;
the signal processing unit comprises a voltage follower, and two ends of the voltage follower are respectively connected with the core wire and the inner shielding layer.
2. The electrostatic sensor device with active shielding circuit of claim 1, wherein the signal processing unit comprises a resistor, the core wire being connected to the resistor, the resistor being grounded.
3. The electrostatic sensor device with active shielding circuit of claim 2, wherein the signal processing unit comprises an instrumentation operational amplifier, an ADC and an MCU, the core being serially connected in sequence with the instrumentation operational amplifier, the ADC and the MCU.
CN202410270945.9A 2024-03-11 2024-03-11 Electrostatic sensor device with active shielding circuit Active CN117871970B (en)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6037595A (en) * 1995-10-13 2000-03-14 Digirad Corporation Radiation detector with shielding electrode
CN102043555A (en) * 2009-10-21 2011-05-04 索尼公司 Electrostatic capacitance-type input device and input device-attached electro-optical apparatus
CN102973261A (en) * 2011-09-02 2013-03-20 中国科学院电子学研究所 Capacity coupling type electric field sensor used for dynamic electrocardiogram monitoring
CN216526055U (en) * 2021-10-28 2022-05-13 厦门盈趣科技股份有限公司 Static bracelet detects alarm device
CN115437524A (en) * 2021-06-04 2022-12-06 辛纳普蒂克斯公司 Sensor device for transcapacitive sensing with shielding
CN115530840A (en) * 2021-06-30 2022-12-30 西门子医疗有限公司 Layer structure of sensor for capacitive measurement of bioelectrical signals
CN117099073A (en) * 2021-04-30 2023-11-21 阿尔卑斯阿尔派株式会社 Proximity detection device

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6037595A (en) * 1995-10-13 2000-03-14 Digirad Corporation Radiation detector with shielding electrode
CN102043555A (en) * 2009-10-21 2011-05-04 索尼公司 Electrostatic capacitance-type input device and input device-attached electro-optical apparatus
CN102973261A (en) * 2011-09-02 2013-03-20 中国科学院电子学研究所 Capacity coupling type electric field sensor used for dynamic electrocardiogram monitoring
CN117099073A (en) * 2021-04-30 2023-11-21 阿尔卑斯阿尔派株式会社 Proximity detection device
CN115437524A (en) * 2021-06-04 2022-12-06 辛纳普蒂克斯公司 Sensor device for transcapacitive sensing with shielding
CN115530840A (en) * 2021-06-30 2022-12-30 西门子医疗有限公司 Layer structure of sensor for capacitive measurement of bioelectrical signals
CN216526055U (en) * 2021-10-28 2022-05-13 厦门盈趣科技股份有限公司 Static bracelet detects alarm device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
有源屏蔽电容探测器原理分析;程顺 等;装备指挥技术学院学报;20050831;第16卷(第4期);第88-90页 *

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