CN117871970B - An electrostatic sensor device with active shielding circuit - Google Patents
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Abstract
Description
技术领域Technical Field
本发明属于静电传感器技术领域，尤其涉及一种具有有源屏蔽电路的静电传感器装置。The invention belongs to the technical field of electrostatic sensors, and in particular relates to an electrostatic sensor device with an active shielding circuit.
背景技术Background technique
静电传感器装置是一种可以感知静电场的传感器装置。它的工作原理是基于静电感应现象，即当一个带电体靠近传感器时，它会改变传感器周围的电场，从而在传感器内部产生电荷重新分布和电势变化。传感器通过测量这些变化来感知周围电场变化，将电场信号转化为电信号。An electrostatic sensor device is a sensor device that can sense electrostatic fields. Its working principle is based on the phenomenon of electrostatic induction, that is, when a charged body approaches the sensor, it changes the electric field around the sensor, resulting in charge redistribution and potential changes inside the sensor. The sensor senses changes in the surrounding electric field by measuring these changes and converts the electric field signal into an electrical signal.
静电传感器装置广泛应用于各种领域，如制造业、自动化控制、电子、医疗等。它的优点是灵敏度高、响应速度快、结构简单、可靠性高等。但也存在一些局限性，如易受振动、电磁干扰的影响。Electrostatic sensor devices are widely used in various fields, such as manufacturing, automation control, electronics, and medical treatment. Its advantages are high sensitivity, fast response speed, simple structure, and high reliability. However, there are also some limitations, such as being susceptible to vibration and electromagnetic interference.
静电传感器装置主要有探测电极、传输线缆和信号处理单元三部分组成。探测电极为良导体，用于敏感周围电场。传输线缆将探测电极感应出的电信号传输到信号处理单元，进行滤波放大处理。静电传感器装置采集的静电信号小，容易受到环境中电磁干扰的影响。传输线缆在振动的时候会引起足以淹没有效信号的噪声。The electrostatic sensor device mainly consists of three parts: detection electrode, transmission cable and signal processing unit. The detection electrode is a good conductor and is used to sense the surrounding electric field. The transmission cable transmits the electrical signal induced by the detection electrode to the signal processing unit for filtering and amplification. The electrostatic signal collected by the electrostatic sensor device is small and easily affected by electromagnetic interference in the environment. When the transmission cable vibrates, it will cause noise that is enough to drown out the effective signal.
发明内容Summary of the invention
针对上述现有技术中存在的问题，本发明提供了一种具有有源屏蔽电路的静电传感器装置，本发明要解决的技术问题是如何降低电磁干扰源对静电传感器测量值的影响，提高静电传感器测量准确度和灵敏度。In view of the problems existing in the above-mentioned prior art, the present invention provides an electrostatic sensor device with an active shielding circuit. The technical problem to be solved by the present invention is how to reduce the influence of electromagnetic interference sources on the measurement values of the electrostatic sensor and improve the measurement accuracy and sensitivity of the electrostatic sensor.
为解决上述技术问题，本发明提供了一种具有有源屏蔽电路的静电传感器装置，包括有源屏蔽探测电极、三轴线缆以及信号处理单元；To solve the above technical problems, the present invention provides an electrostatic sensor device with an active shielding circuit, comprising an active shielding detection electrode, a triaxial cable and a signal processing unit;
有源屏蔽探测电极、三轴线缆以及信号处理单元依次进行电连接；The active shielding detection electrode, the triaxial cable and the signal processing unit are electrically connected in sequence;
有源屏蔽探测电极包括探测电极片、绝缘层、有源屏蔽电极片和接地电极片，有源屏蔽电极片设置在探测电极片和接地电极片之间，探测电极片和有源屏蔽电极片之间设置有绝缘层，有源屏蔽电极片和接地电极片之间设置有绝缘层；The active shielding detection electrode comprises a detection electrode sheet, an insulating layer, an active shielding electrode sheet and a grounding electrode sheet, the active shielding electrode sheet is arranged between the detection electrode sheet and the grounding electrode sheet, an insulating layer is arranged between the detection electrode sheet and the active shielding electrode sheet, and an insulating layer is arranged between the active shielding electrode sheet and the grounding electrode sheet;
三轴线缆包括芯线、内屏蔽层和外屏蔽层，芯线的一端与探测电极片连接，芯线的另一端与信号处理单元连接；内屏蔽层的一端与有源屏蔽电极片连接，内屏蔽层的另一端与信号处理单元连接，外屏蔽层接地。The triaxial cable includes a core wire, an inner shielding layer and an outer shielding layer. One end of the core wire is connected to the detection electrode sheet, and the other end of the core wire is connected to the signal processing unit; one end of the inner shielding layer is connected to the active shielding electrode sheet, and the other end of the inner shielding layer is connected to the signal processing unit, and the outer shielding layer is grounded.
进一步的，信号处理单元包括电压跟随器，电压跟随器两端分别与芯线和内屏蔽层连接。Furthermore, the signal processing unit includes a voltage follower, and two ends of the voltage follower are respectively connected to the core wire and the inner shielding layer.
进一步的，信号处理单元包括电阻，芯线与电阻连接，电阻接地。Furthermore, the signal processing unit includes a resistor, the core wire is connected to the resistor, and the resistor is grounded.
进一步的，信号处理单元包括仪表运算放大器、ADC和MCU，芯线与仪表运算放大器、仪表运算放大器、ADC和MCU依次串联连接。Furthermore, the signal processing unit includes an instrument operational amplifier, an ADC and an MCU, and the core wire is connected in series with the instrument operational amplifier, the instrument operational amplifier, the ADC and the MCU in sequence.
本发明一种具有有源屏蔽电路的静电传感器装置，有源屏蔽探测电极由探测电极片、绝缘层、有源屏蔽电极片、绝缘层和接地电极片顺序拼接而成。相比于传统的静电探测电极，在探测电极片和接地电极片之间增加了有源屏蔽电极片。由于电压跟随器的两端分别与芯线和内屏蔽层连接，内屏蔽层又与有源屏蔽电极片连接，芯线与探测电极片连接，所以有源屏蔽电极片的电势和探测电极片的电势一致，显著降低了探测电极片和接地电极片之间的寄生电容，提高了静电传感器装置的灵敏度，降低了线缆振动引起的干扰；芯线和内屏蔽层之间几乎没有电势差，芯线的漏电流显著降低，漏电流降低有利于减小信号的基线漂移，提高静电传感器测量准确度。The present invention discloses an electrostatic sensor device with an active shielding circuit, wherein the active shielding detection electrode is sequentially spliced by a detection electrode sheet, an insulating layer, an active shielding electrode sheet, an insulating layer and a grounding electrode sheet. Compared with the traditional electrostatic detection electrode, an active shielding electrode sheet is added between the detection electrode sheet and the grounding electrode sheet. Since the two ends of the voltage follower are respectively connected to the core wire and the inner shielding layer, the inner shielding layer is connected to the active shielding electrode sheet, and the core wire is connected to the detection electrode sheet, the potential of the active shielding electrode sheet is consistent with the potential of the detection electrode sheet, which significantly reduces the parasitic capacitance between the detection electrode sheet and the grounding electrode sheet, improves the sensitivity of the electrostatic sensor device, and reduces the interference caused by cable vibration; there is almost no potential difference between the core wire and the inner shielding layer, and the leakage current of the core wire is significantly reduced. The reduction in leakage current is conducive to reducing the baseline drift of the signal and improving the measurement accuracy of the electrostatic sensor.
由于有源屏蔽电极片和接地电极片放置在探测电极片的一侧，能够降低有源屏蔽电极片这一侧电磁干扰源对静电传感器装置测量值的影响。有源屏蔽电极片和接地电极片使得探测电极片主要对探测电极片前侧的电场目标敏感，使得静电传感器装置有一定的方向性。Since the active shielding electrode sheet and the grounding electrode sheet are placed on one side of the detection electrode sheet, the influence of the electromagnetic interference source on the side of the active shielding electrode sheet on the measurement value of the electrostatic sensor device can be reduced. The active shielding electrode sheet and the grounding electrode sheet make the detection electrode sheet mainly sensitive to the electric field target on the front side of the detection electrode sheet, so that the electrostatic sensor device has a certain directionality.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1是一种具有有源屏蔽电路的静电传感器装置的结构示意图。FIG. 1 is a schematic structural diagram of an electrostatic sensor device having an active shielding circuit.
11-探测电极片；12-绝缘层；13-有源屏蔽电极片；14-接地电极片；20-三轴线缆；31-电阻；32-仪表运算放大器；33-电压跟随器。11-detection electrode; 12-insulating layer; 13-active shielding electrode; 14-grounding electrode; 20-triaxial cable; 31-resistance; 32-instrumentation operational amplifier; 33-voltage follower.
具体实施方式Detailed ways
为使本发明实施方式的目的、技术方案和优点更加清楚，下面将结合本发明实施方式中的附图，对本发明实施方式中的技术方案进行清楚、完整地描述，显然，所描述的实施方式是本发明一部分实施方式，而不是全部的实施方式。基于本发明中的实施方式，本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施方式，都属于本发明保护的范围。In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
因此，以下对在附图中提供的本发明的实施方式的详细描述并非旨在限制要求保护的本发明的范围，而是仅仅表示本发明的选定实施方式。基于本发明中的实施方式，本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施方式，都属于本发明保护的范围。Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
应注意到：相似的标号和字母在下面的附图中表示类似项，因此，一旦某一项在一个附图中被定义，则在随后的附图中不需要对其进行进一步定义和解释。It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not require further definition and explanation in the subsequent drawings.
为了更好地了解本发明的目的、结构及功能，下面结合附图，对本发明一种具有有源屏蔽电路的静电传感器装置进一步详细描述。In order to better understand the purpose, structure and function of the present invention, an electrostatic sensor device with an active shielding circuit of the present invention is further described in detail below with reference to the accompanying drawings.
实施例1：Embodiment 1:
如图1所示，本发明提供了一种具有有源屏蔽电路的静电传感器装置，包括有源屏蔽探测电极、三轴线缆20以及信号处理单元；As shown in FIG1 , the present invention provides an electrostatic sensor device with an active shielding circuit, including an active shielding detection electrode, a triaxial cable 20 and a signal processing unit;
有源屏蔽探测电极、三轴线缆20以及信号处理单元依次进行电连接；The active shielding detection electrode, the triaxial cable 20 and the signal processing unit are electrically connected in sequence;
有源屏蔽探测电极包括探测电极片11、绝缘层12、有源屏蔽电极片13和接地电极片14，有源屏蔽电极片13设置在探测电极片11和接地电极片14之间，探测电极片11和有源屏蔽电极片13之间设置有绝缘层12，有源屏蔽电极片13和接地电极片14之间设置有绝缘层12；The active shielding detection electrode comprises a detection electrode sheet 11, an insulating layer 12, an active shielding electrode sheet 13 and a grounding electrode sheet 14, the active shielding electrode sheet 13 is arranged between the detection electrode sheet 11 and the grounding electrode sheet 14, an insulating layer 12 is arranged between the detection electrode sheet 11 and the active shielding electrode sheet 13, and an insulating layer 12 is arranged between the active shielding electrode sheet 13 and the grounding electrode sheet 14;
三轴线缆20包括芯线、内屏蔽层和外屏蔽层，芯线的一端与探测电极片11连接，芯线的另一端与信号处理单元连接；内屏蔽层的一端与有缘屏蔽电极片13连接，内屏蔽层的另一端与信号处理单元连接，外屏蔽层接地。The triaxial cable 20 includes a core wire, an inner shielding layer and an outer shielding layer. One end of the core wire is connected to the detection electrode sheet 11, and the other end of the core wire is connected to the signal processing unit; one end of the inner shielding layer is connected to the active shielding electrode sheet 13, and the other end of the inner shielding layer is connected to the signal processing unit, and the outer shielding layer is grounded.
实施例2：Embodiment 2:
如图1所示，本发明提供了一种具有有源屏蔽电路的静电传感器装置，包括有源屏蔽探测电极、三轴线缆20以及信号处理单元；As shown in FIG1 , the present invention provides an electrostatic sensor device with an active shielding circuit, including an active shielding detection electrode, a triaxial cable 20 and a signal processing unit;
有源屏蔽探测电极、三轴线缆20以及信号处理单元依次进行电连接；The active shielding detection electrode, the triaxial cable 20 and the signal processing unit are electrically connected in sequence;
有源屏蔽探测电极包括探测电极片11、绝缘层12、有源屏蔽电极片13和接地电极片14，有源屏蔽电极片13设置在探测电极片11和接地电极片14之间，探测电极片11和有源屏蔽电极片13之间设置有绝缘层12，有源屏蔽电极片13和接地电极片14之间设置有绝缘层12；The active shielding detection electrode comprises a detection electrode sheet 11, an insulating layer 12, an active shielding electrode sheet 13 and a grounding electrode sheet 14, the active shielding electrode sheet 13 is arranged between the detection electrode sheet 11 and the grounding electrode sheet 14, an insulating layer 12 is arranged between the detection electrode sheet 11 and the active shielding electrode sheet 13, and an insulating layer 12 is arranged between the active shielding electrode sheet 13 and the grounding electrode sheet 14;
三轴线缆包括芯线、内屏蔽层和外屏蔽层，芯线的一端与探测电极片11连接，芯线的另一端与信号处理单元连接；内屏蔽层的一端与有缘屏蔽电极片13连接，内屏蔽层的另一端与信号处理单元连接，外屏蔽层接地。The triaxial cable includes a core wire, an inner shielding layer and an outer shielding layer. One end of the core wire is connected to the detection electrode sheet 11, and the other end of the core wire is connected to the signal processing unit; one end of the inner shielding layer is connected to the active shielding electrode sheet 13, and the other end of the inner shielding layer is connected to the signal processing unit, and the outer shielding layer is grounded.
本实施例与第一实施例不同之处在于：The difference between this embodiment and the first embodiment is that:
信号处理单元包括电阻31、仪表运算放大器32、电压跟随器33、ADC和MCU，芯线与仪表运算放大器32、仪表运算放大器32、ADC和MCU依次串联连接；芯线还与电阻31连接，电阻31接地；电压跟随器33两端分别与芯线和内屏蔽层连接。The signal processing unit includes a resistor 31, an instrument operational amplifier 32, a voltage follower 33, an ADC and an MCU. The core wire is connected in series with the instrument operational amplifier 32, the instrument operational amplifier 32, the ADC and the MCU in sequence; the core wire is also connected to the resistor 31, and the resistor 31 is grounded; the two ends of the voltage follower 33 are respectively connected to the core wire and the inner shielding layer.
芯线上的电压通过电压跟随器33施加到三轴线缆的内屏蔽层，进而施加到有源屏蔽电极片13 ，使静电传感器装置对安装有源屏蔽电极片13这一侧的电场变化不敏感。The voltage on the core wire is applied to the inner shielding layer of the triaxial cable through the voltage follower 33 and then applied to the active shielding electrode sheet 13, so that the electrostatic sensor device is insensitive to the electric field change on the side where the active shielding electrode sheet 13 is installed.
当探测电极片11处于变化的电场中，产生的感应电流流过电阻31，产生电压信号，电压信号通过仪表运算放大器32放大，MCU控制ADC采集放大后的电压信号。MCU存储并分析电压信号。When the detection electrode sheet 11 is in a changing electric field, the generated induced current flows through the resistor 31, generating a voltage signal, which is amplified by the instrumentation operational amplifier 32, and the MCU controls the ADC to collect the amplified voltage signal. The MCU stores and analyzes the voltage signal.
以上所述仅为本发明的优选实施例而已，并不用于限制本发明，对于本领域的技术人员来说，本发明可以有各种更改和变化。凡在本发明的精神和原则之内，所作的任何修改、等同替换、改进等，均包含在本发明的保护范围之内。The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention are included in the protection scope of the present invention.
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