CN117861493B - Stirring device and process for photoresist production - Google Patents
Stirring device and process for photoresist production Download PDFInfo
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- CN117861493B CN117861493B CN202410275816.9A CN202410275816A CN117861493B CN 117861493 B CN117861493 B CN 117861493B CN 202410275816 A CN202410275816 A CN 202410275816A CN 117861493 B CN117861493 B CN 117861493B
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- 238000003756 stirring Methods 0.000 title claims abstract description 93
- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 65
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 238000000034 method Methods 0.000 title claims abstract description 18
- 238000001914 filtration Methods 0.000 claims abstract description 19
- 239000002994 raw material Substances 0.000 claims abstract description 18
- 239000012528 membrane Substances 0.000 claims abstract description 8
- 230000002441 reversible effect Effects 0.000 claims abstract description 6
- 230000005540 biological transmission Effects 0.000 claims description 22
- 230000000670 limiting effect Effects 0.000 claims description 12
- 239000011347 resin Substances 0.000 claims description 6
- 229920005989 resin Polymers 0.000 claims description 6
- 239000002904 solvent Substances 0.000 claims description 6
- 239000011148 porous material Substances 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 210000002421 cell wall Anatomy 0.000 claims description 2
- 238000007599 discharging Methods 0.000 claims description 2
- 239000004744 fabric Substances 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 abstract description 11
- 239000008187 granular material Substances 0.000 abstract 1
- 238000002156 mixing Methods 0.000 description 5
- 238000007790 scraping Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 230000002829 reductive effect Effects 0.000 description 3
- 238000010030 laminating Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/80—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis
- B01F27/92—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis with helices or screws
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/80—After-treatment of the mixture
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/80—After-treatment of the mixture
- B01F23/808—Filtering the mixture
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/80—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis
- B01F27/86—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis co-operating with deflectors or baffles fixed to the receptacle
- B01F27/861—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis co-operating with deflectors or baffles fixed to the receptacle the baffles being of cylindrical shape, e.g. a mixing chamber surrounding the stirrer, the baffle being displaced axially to form an interior mixing chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/80—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis
- B01F27/92—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis with helices or screws
- B01F27/922—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis with helices or screws with two or more helices, e.g. with intermeshing helices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/80—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis
- B01F27/95—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis with stirrers having planetary motion, i.e. rotating about their own axis and about a sun axis
- B01F27/951—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis with stirrers having planetary motion, i.e. rotating about their own axis and about a sun axis with at least one stirrer mounted on the sun axis
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/80—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis
- B01F27/95—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis with stirrers having planetary motion, i.e. rotating about their own axis and about a sun axis
- B01F27/953—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis with stirrers having planetary motion, i.e. rotating about their own axis and about a sun axis using only helical stirrers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/10—Maintenance of mixers
- B01F35/12—Maintenance of mixers using mechanical means
- B01F35/123—Maintenance of mixers using mechanical means using scrapers for cleaning mixers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/181—Preventing generation of dust or dirt; Sieves; Filters
- B01F35/187—Preventing generation of dust or dirt; Sieves; Filters using filters in mixers, e.g. during venting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/75—Discharge mechanisms
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mixers Of The Rotary Stirring Type (AREA)
Abstract
The invention belongs to the technical field of photoresist production equipment, and particularly relates to a stirring device and a process for photoresist production. In the process of preparing photoresist, after the raw materials are stirred evenly, along with the reverse rotation of pivot, the spiral arch on movable roller surface can cooperate the sleeve pipe to carry the photoresist in the agitator tank constantly upwards, after the photoresist enters into the filter vat through the sheathed tube top, the filter vat can carry out coarse filtration to the impurity of great granule in the photoresist to reduce the impurity content in the photoresist, and then in the fine filtration in-process of follow-up, avoid impurity to block up the filter membrane, improve the fine filtration efficiency of photoresist.
Description
Technical Field
The invention belongs to the technical field of photoresist production equipment, and particularly relates to a stirring device and process for photoresist production.
Background
Photoresists, also known as photoresists, refer to etch-resistant thin film materials whose solubility is changed by irradiation or radiation of ultraviolet light, electron beams, ion beams, X-rays, or the like. The photosensitive liquid consists of photosensitive resin, sensitizer and solvent. Used as a corrosion resistant coating material during a photolithography process. When a semiconductor material is processed on a surface, a desired image can be obtained on the surface by using a photoresist with proper selectivity.
The existing photoresist is mainly prepared by adding photosensitive resin, sensitizer and solvent into a stirring tank for stirring and mixing during production. However, when the raw materials are put into the stirring tank for stirring, impurities are contained in the raw materials, so that the prepared photoresist is required to be filtered after the stirring is finished in order to improve the quality of the photoresist, but the filtering efficiency is low because the pore diameter of a filter membrane used for filtering is small, and when the prepared photoresist contains more impurities, the impurities can also block the filter membrane, so that the filtering efficiency of the photoresist is further influenced.
Therefore, it is necessary to provide a stirring device and process for photoresist production to solve the above problems.
Disclosure of Invention
In view of the above, the present invention provides a stirring device and process for photoresist production, so as to solve the problems set forth in the background art.
In order to achieve the above purpose, the present invention provides the following technical solutions:
The utility model provides a agitating unit is used in photoresist production, includes the agitator tank, the top lid of agitator tank has the tank cap, tank cap top center department rotates perpendicularly and runs through and peg graft there is the pivot, the top of pivot is connected with the motor, the bottom of pivot is connected with the bottom inner wall rotation of agitator tank, the surface of pivot is provided with multiunit puddler perpendicularly, the jack is seted up to the bottom of pivot, and is equipped with drive assembly in the jack, the side annular of pivot distributes and has a plurality of vertical sleeve pipes, the intraductal movable roller that has pegged graft of rotation of cover, the surface of movable roller is provided with spiral arch, and spiral protruding sheathed tube inner wall is pressed close to, a plurality of cup joint same annular filter vat between the sheathed tube top, and the bottom inner wall of filter vat is the screen cloth design, the bottom of filter vat is equipped with the carrier ring, carrier ring fixed connection is on the agitator tank inner wall, and the laminating of the bottom of filter vat and carrier ring, the movable roller runs through the grafting along its both ends direction has the connecting axle, the fixed one-way gear that has cup jointed on the top of connecting axle, and the idle running direction of one-way gear has the same direction with forward direction, can dismantle with the first tooth assembly and the second toothed assembly on the inner wall, the top is connected with the first toothed assembly and the second toothed assembly is dismantled respectively.
Further, multiunit puddler top-down evenly distributed is in the periphery of pivot, and the quantity of every puddler of group is a plurality of, the one end that the puddler is close to the pivot rotates and runs through the grafting in the jack, and the puddler is located the fixed first bevel gear that has cup jointed of one end in the jack, the puddler is located the outer surface fixedly connected with auger blade of pivot.
Further, the drive assembly includes the transmission shaft, the top of transmission shaft rotates perpendicularly and connects on jack top inner wall, the position that the transmission shaft is close to the bottom rotates and has cup jointed the limiting plate, limiting plate fixed connection is on the jack inner wall, the transmission shaft is located the fixed surface at limiting plate top and has cup jointed a plurality of second bevel gears, and is a plurality of the second bevel gears one-to-one distributes at the top of every puddler of group, and the equal meshing of a plurality of first bevel gears that the second bevel gear corresponds with its bottom, the connecting hole of rectangle has been seted up to the bottom of transmission shaft, the slip grafting has the connecting block in the connecting hole, the bottom and the agitator tank bottom inner wall fixed connection of connecting block.
Further, the first connecting assembly comprises a first connecting ring, the first connecting ring is rotatably sleeved on the positions, close to the tops, of the connecting shafts, a first fixing ring is arranged on the inner side of the first connecting ring, the first fixing ring is fixedly sleeved on the rotating shaft, and a plurality of first connecting rods are fixedly connected between the outer side of the first fixing ring and the inner side of the first connecting ring.
Further, the second coupling assembling includes the second go-between, the second go-between is located the bottom of a plurality of connecting axles, and the bottom rotation of a plurality of connecting axles is connected at the top of second go-between, the inboard of second go-between is equipped with the fixed ring of second, the fixed ring of second is fixed to be cup jointed in the pivot, and fixedly connected with a plurality of second connecting rods between the outside of the fixed ring of second and the inboard of second go-between.
Further, be equipped with a plurality of vertical scrapers in the filter vat, and the bottom of scraper blade and the laminating of the bottom inner wall of filter vat, the length of scraper blade is greater than the inboard width of filter vat, the scraper blade is close to the perpendicular fixedly connected with fixed axle in top of agitator tank inner wall one side, the top horizontally connected of fixed axle has the fixed block, the fixed block passes through torsion spring with the tie point of fixed axle and rotates to be connected together, and one side that the scraper blade is close to the pivot can be tightly pasted with the inboard cell wall of filter vat under torsion spring's effect, a plurality of fixedly connected with same swivel between the one end that the fixed block is close to the agitator tank inner wall, the swivel is rotated and is connected on the inner wall of agitator tank, the swivel can only unidirectional rotation, and the direction of rotation of swivel is the same when the pivot forward rotation.
Further, a notch is formed in the side face of the sleeve close to the bottom, and the direction of the notch is the same as the direction of the reverse rotation of the rotating shaft.
Further, the top of the tank cover is inserted with a hopper in a penetrating way, and the bottom of the stirring tank is connected with a discharging pipe.
The invention also provides a treatment process using the stirring device for photoresist production, which comprises the following steps:
Step one: adding the photosensitive resin, the sensitizer and the solvent into a stirring tank through a charging hopper;
Step two: starting a motor and enabling the motor to drive a stirring rod in the forward direction to stir and mix raw materials in the stirring tank;
Step three: after the raw materials in the stirring tank are uniformly mixed, the motor reversely rotates, so that the raw materials can enter the filter tank for preliminary coarse filtration under the cooperation of the sleeve and the spiral protrusions on the surface of the movable roller;
Step four: after the rough filtration, the discharge tube was opened, the prepared photoresist was discharged, and filtration was performed using a filter membrane having a pore size of 0.02 μm or less.
The invention has the technical effects and advantages that:
1. in the process of preparing the photoresist, after the raw materials are uniformly stirred, the spiral bulges on the surface of the movable roller can be matched with the sleeve to continuously convey the photoresist in the stirring tank upwards along with the reverse rotation of the rotating shaft, and when the photoresist enters the filter tank through the top of the sleeve, the filter tank can coarsely filter impurities with larger particles in the photoresist, so that the impurity content in the photoresist is reduced, and further, in the subsequent fine filtering process, the filter membrane is prevented from being blocked by impurities, and the fine filtering efficiency of the photoresist is improved;
2. In the rotating process of the rotating shaft, the first bevel gear on the stirring rod can move around the surface of the second bevel gear at the corresponding position on the transmission shaft, so that the stirring rod can start to rotate under the cooperation of the first bevel gear and the second bevel gear, and along with the rotation of the stirring rod, the stirring rod can stir photoresist in the horizontal direction, and simultaneously, the auger blades on the stirring rod can also push the photoresist to move and mix along the length direction of the stirring rod, so that the photoresist mixing efficiency is improved, and meanwhile, the photoresist mixing is more uniform;
3. after the photoresist is stirred, the rotating shaft is driven by the motor to reversely rotate, and the scraping plate can scrape the photoresist entering the filter tank, so that the photoresist can be uniformly distributed in the filter tank, and the filtering efficiency of the photoresist is further improved.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic perspective view of the agitator tank and all its internal components in the present invention;
FIG. 3 is a schematic perspective view of all structures inside the stirring tank in the present invention;
FIG. 4 is a schematic perspective view of a portion of the structure of FIG. 3 in accordance with the present invention;
FIG. 5 is a perspective view of a swivel, a scraper, and a stationary shaft in accordance with the present invention;
FIG. 6 is a perspective view showing the structure of a sleeve, a movable roller, a connecting shaft, a one-way gear, etc. in the present invention;
FIG. 7 is a perspective cross-sectional view of a stirred tank in accordance with the present invention;
Fig. 8 is a partial perspective cross-sectional view of a shaft in accordance with the present invention.
In the figure: 1. a stirring tank; 2. a can lid; 3. a rotating shaft; 4. a motor; 5. a stirring rod; 6. a sleeve; 7. a movable roller; 8. spiral bulges; 9. a filter tank; 10. a backing ring; 11. a connecting shaft; 12. a one-way gear; 13. a toothed ring; 14. a first bevel gear; 15. auger blades; 16. a transmission shaft; 17. a limiting plate; 18. a second bevel gear; 19. a connection hole; 20. a connecting block; 21. a first connection ring; 22. a first fixing ring; 23. a first connecting rod; 24. a second connecting ring; 25. a second fixing ring; 26. a second connecting rod; 27. a scraper; 28. a fixed shaft; 29. a swivel; 30. a hopper; 31. and a discharge pipe.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the embodiments.
The invention provides a stirring device for photoresist production, as shown in figures 1 to 8, comprising a stirring tank 1, wherein the top of the stirring tank 1 is covered with a tank cover 2, the center of the top of the tank cover 2 is vertically rotated and inserted with a rotating shaft 3, the top of the rotating shaft 3 is connected with a motor 4, the bottom of the rotating shaft 3 is rotationally connected with the inner wall of the bottom of the stirring tank 1, the surface of the rotating shaft 3 is vertically provided with a plurality of groups of stirring rods 5, the bottom of the rotating shaft 3 is provided with jacks, the jacks are internally provided with transmission components, the side surface of the rotating shaft 3 is annularly provided with a plurality of vertical sleeves 6, the position of the side surface of the sleeve 6 close to the bottom is provided with a notch, the direction of the notch is the same as the direction when the rotating shaft 3 reversely rotates, the sleeve 6 is rotationally inserted with a movable roller 7, the surface of the movable roller 7 is provided with spiral bulges 8, the inner walls of the sleeves 6 of the spiral bulges 8 are close to each other, the same annular filter tank 9 is sleeved between the tops of the sleeves 6, the inner wall of the bottom of the filter tank 9 is designed as a screen mesh, a supporting ring 10 is arranged at the bottom of the filter tank 9, the supporting ring 10 is fixedly connected to the inner wall of the stirring tank 1, the bottom of the filter tank 9 is attached to the top of the supporting ring 10, the movable roller 7 is penetrated and spliced with a connecting shaft 11 along the directions of the two ends of the movable roller, the top of the connecting shaft 11 is fixedly sleeved with a one-way gear 12, the idling direction of the one-way gear 12 is the same as the direction when the rotating shaft 3 positively rotates, a toothed ring 13 is detachably arranged on the inner wall of the stirring tank 1 and meshed with the one-way gear 12, a first connecting component and a second connecting component are respectively arranged at the top and the bottom of the connecting shaft 11, a feeding hopper 30 is penetrated and spliced at the top of the tank cover 2, the bottom of the stirring tank 1 is connected with a discharge pipe 31.
The first connecting assembly comprises a first connecting ring 21, the first connecting ring 21 is rotatably sleeved on the positions, close to the tops, of the connecting shafts 11, a first fixing ring 22 is arranged on the inner side of the first connecting ring 21, the first fixing ring 22 is fixedly sleeved on the rotating shaft 3, a plurality of first connecting rods 23 are fixedly connected between the outer side of the first fixing ring 22 and the inner side of the first connecting ring 21, the second connecting assembly comprises a second connecting ring 24, the second connecting ring 24 is positioned at the bottoms of the connecting shafts 11, the bottoms of the connecting shafts 11 are rotatably connected to the tops of the second connecting rings 24, a second fixing ring 25 is arranged on the inner side of the second connecting ring 24, the second fixing ring 25 is fixedly sleeved on the rotating shaft 3, and a plurality of second connecting rods 26 are fixedly connected between the outer side of the second fixing ring 25 and the inner side of the second connecting ring 24;
When preparing photoresist, photosensitive resin, sensitizer and solvent are added into the stirring tank 1 through the hopper 30, then the motor 4 is started, along with the forward rotation of the motor 4, the stirring rod 5 can stir and mix raw materials in the stirring tank 1 under the drive of the rotating shaft 3, meanwhile, along with the rotation of the rotating shaft 3, the plurality of sleeves 6, the connecting shaft 11 and the movable roller 7 rotate around the rotating shaft 3 under the drive of the first connecting ring 21 and the second connecting ring 24, along with the movement of the plurality of sleeves 6, the plurality of sleeves 6 can stir the raw materials in the stirring tank 1 by matching with the plurality of stirring rods 5, so that the stirring efficiency of the raw materials is improved, along with the movement of the connecting shaft 11, the unidirectional gear 12 can roll along teeth of the toothed ring 13 under the drive of the connecting shaft 11, but the idle direction of the unidirectional gear 12 is the same as that of the rotating shaft 3 during forward rotation, the unidirectional gear 12 can be kept still, and the movable roller 7 can be kept still, so that the idle resistance of the stirring rod 5 during stirring the raw materials is reduced;
after the raw materials are mixed, the motor 4 drives the rotating shaft 3 to reversely rotate, the unidirectional gear 12 can roll along teeth on the toothed ring 13 under the drive of the connecting shaft 11 along with the reverse rotation of the rotating shaft 3, at the moment, the unidirectional gear 12 can drive the movable roller 7 to rotate under the action of the toothed ring 13, the spiral bulges 8 on the surface of the movable roller 7 can be matched with the sleeve 6 to continuously convey the photoresist in the stirring tank 1 upwards along with the rotation of the movable roller 7, and when the photoresist enters the filter tank 9 through the top of the sleeve 6, the filter tank 9 can coarsely filter larger particles in the photoresist, so that the impurity content in the photoresist is reduced, and further, in the subsequent fine filtering process, the filter membrane is prevented from being blocked by impurities, and the fine filtering efficiency of the photoresist is improved;
In addition, during the reverse rotation of the rotating shaft 3, since the bottom of the sleeve 6 is provided with a notch, the photoresist in the stirring tank 1 can be pressed into the sleeve 6 through the notch along with the movement of the sleeve 6, thereby accelerating the speed of the photoresist entering the filter tank 9 through the sleeve 6.
As shown in the figure, the plurality of groups of stirring rods 5 are uniformly distributed on the periphery of the rotating shaft 3 from top to bottom, the number of each group of stirring rods 5 is a plurality, one end of each stirring rod 5 close to the rotating shaft 3 is rotatably inserted in the jack in a penetrating manner, one end of each stirring rod 5 positioned in the jack is fixedly sleeved with a first bevel gear 14, the surface of each stirring rod 5 positioned outside the rotating shaft 3 is fixedly connected with an auger blade 15, the transmission assembly comprises a transmission shaft 16, the top of the transmission shaft 16 is vertically and rotatably connected to the inner wall at the top of the jack, the position of each transmission shaft 16 close to the bottom is rotatably sleeved with a limiting plate 17, the limiting plate 17 is fixedly connected to the inner wall of the jack, the surface of each transmission shaft 16 positioned at the top of the limiting plate 17 is fixedly sleeved with a plurality of second bevel gears 18, the plurality of second bevel gears 18 are correspondingly distributed at the top of each stirring rods 5, the second bevel gears 18 are respectively meshed with the plurality of first bevel gears 14 corresponding to the bottom of the stirring rods, the bottom of each stirring rod 16 is provided with a rectangular connecting hole 19, the connecting hole 19 is in a sliding manner, the bottom of each connecting hole 19 is in a sliding manner is sleeved with a 20, and the bottom of the connecting block 1 is fixedly connected to the connecting block 1;
in the process of rotating the rotating shaft 3, since the bottom of the transmission shaft 16 is connected with the connecting block 20 on the inner wall of the bottom of the stirring tank 1 through the connecting hole 19, the transmission shaft 16 can keep relative static together with the stirring tank 1, and the plurality of stirring rods 5 are driven to rotate around the rotating shaft 3 along with the rotating shaft 3, the first bevel gears 14 on the stirring rods 5 can move around the surfaces of the second bevel gears 18 on the corresponding positions on the transmission shaft 16, so that the stirring rods 5 can start rotating under the cooperation of the first bevel gears 14 and the second bevel gears 18, and the stirring rods 5 can stir photoresist in the horizontal direction along with the rotation of the stirring rods 5, and simultaneously, the auger blades 15 on the stirring rods 5 can also push the photoresist to move and mix along the length direction of the stirring rods 5, so that the photoresist mixing efficiency is improved, and the photoresist mixing is more uniform.
As shown in the figure, a plurality of vertical scrapers 27 are arranged in the filter tank 9, the bottoms of the scrapers 27 are attached to the inner wall of the bottom of the filter tank 9, the length of each scraper 27 is larger than the inner width of the filter tank 9, the top of one side of each scraper 27, which is close to the inner wall of the stirring tank 1, is vertically and fixedly connected with a fixed shaft 28, the top of each fixed shaft 28 is horizontally connected with a fixed block, the connection points of the fixed blocks and the fixed shafts 28 are rotationally connected together through torsion springs, one side, which is close to the rotating shaft 3, of each scraper 27 can be tightly attached to the inner wall of the filter tank 9 under the action of the torsion springs, one rotating ring 29 is fixedly connected between one ends, which are close to the inner wall of the stirring tank 1, of each fixed block is rotationally connected to the inner wall of the stirring tank 1, each rotating ring 29 can only rotate unidirectionally, and the rotating direction of each rotating ring 29 is identical to the direction of the rotating shaft 3 in forward rotation.
By the scraper 27, when the rotating shaft 3 rotates positively, the plurality of sleeves 6, the connecting shafts 11 and the movable rollers 7 rotate around the rotating shaft 3 under the drive of the first connecting ring 21 and the second connecting ring 24, in the process, when the connecting shafts 11 are in contact with the scraper 27, the scraper 27 can keep relative static with the filter tank 9 under the limiting effect of the filter tank 9 due to the fact that the length of the scraper 27 is larger than the inner width of the filter tank 9, and the connecting shafts 11 can drive the rotating ring 29 to rotate together through the scraper 27 along with the continuous rotation of the connecting shafts 11 around the rotating shaft 3;
When the photoresist is stirred, the rotating shaft 3 is driven by the motor 4 to rotate reversely, the photoresist in the stirring tank 1 can be continuously conveyed into the filter tank 9 under the cooperation of the spiral bulges 8 on the surface of the movable roller 7 and the sleeve 6, the connecting shaft 11 can be contacted with the scraping plate 27 from the other side of the scraping plate 27 under the action of the rotating shaft 3, and when the connecting shaft 11 is contacted with the scraping plate 27, the rotating direction of the rotating ring 29 is the same as the rotating direction of the rotating shaft 3 when the rotating shaft 3 rotates positively, so that the rotating ring 29 can be kept stationary at the moment, along with the continuous movement of the connecting shaft 11, one side of the scraping plate 27 close to the rotating shaft 3 can deflect away from the rotating shaft 3 under the pushing of the connecting shaft 11, as the connecting shaft 11 continues to push the scraper 27, the scraper 27 can deflect further, and when the distance from one side of the scraper 27 close to the rotating shaft 3 to the inner side wall of the filter tank 9 is greater than the distance from the connecting shaft 11 to the inner side wall of the filter tank 9, the scraper 27 can be staggered with the connecting shaft 11 along with the continued movement of the connecting shaft 11, and after the scraper 27 is staggered with the connecting shaft 11, the scraper 27 can be restored to the original state under the action of a torsion spring and continuously scrapes the photoresist entering the filter tank 9 through the bottom of the scraper 27, so that the photoresist can be uniformly distributed in the filter tank 9, and the filtering efficiency of the photoresist is further quickened.
The invention also provides a treatment process using the stirring device for photoresist production, which comprises the following steps:
step one: adding a photosensitive resin, a sensitizer and a solvent into the stirring tank 1 through a hopper 30;
Step two: starting the motor 4 and enabling the motor 4 to drive the stirring rod 5 forward to stir and mix the raw materials in the stirring tank 1;
Step three: after the raw materials in the stirring tank 1 are uniformly mixed, the motor 4 is reversely rotated, so that the raw materials can enter the filter tank 9 for preliminary coarse filtration under the cooperation of the sleeve 6 and the spiral protrusions 8 on the surface of the movable roller 7;
step four: after the completion of the rough filtration, the discharge tube 31 was opened, and the prepared photoresist was discharged and filtered using a filter membrane having a pore size of 0.02 μm or less.
The above embodiments are only for illustrating the technical solution of the present invention, and are not limiting.
Claims (6)
1. Stirring device for photoresist production, comprising a stirring tank (1), and being characterized in that: the top of agitator tank (1) is covered with cover (2), cover (2) top center department rotates perpendicularly and runs through and peg graft there is pivot (3), the top of pivot (3) is connected with motor (4), the bottom of pivot (3) is rotated with the bottom inner wall of agitator tank (1) and is connected, the surface of pivot (3) is provided with multiunit puddler (5) perpendicularly, jack is seted up to the bottom of pivot (3), and is equipped with drive assembly in the jack, the side annular distribution of pivot (3) has a plurality of vertical sleeve pipes (6), sleeve pipe (6) rotation peg graft there is movable roller (7), the surface of movable roller (7) is provided with spiral protrusion (8), and spiral protrusion (8) are pressed close to with the inner wall of sleeve pipe (6), a plurality of cup joints same annular filter vat (9) between the top of sleeve pipe (6), and the bottom inner wall of filter vat (9) is the screen cloth design, the bottom of filter vat (9) is equipped with carrier ring (10), carrier ring (10) fixed connection is on agitator tank (1) inner wall (9) and filter vat (11) and the both ends of fixed connection top (11) have the fixed roller (11) to peg graft the direction along the fixed roller (11), the idling direction of the unidirectional gear (12) is the same as the direction of forward rotation of the rotating shaft (3), a toothed ring (13) is detachably arranged on the inner wall of the stirring tank (1), the toothed ring (13) is meshed with the unidirectional gear (12), and the top ends and the bottom ends of the connecting shafts (11) are respectively provided with a first connecting component and a second connecting component;
The first connecting assembly comprises a first connecting ring (21), the first connecting ring (21) is rotatably sleeved on the positions, close to the tops, of the connecting shafts (11), a first fixing ring (22) is arranged on the inner side of the first connecting ring (21), the first fixing ring (22) is fixedly sleeved on the rotating shaft (3), and a plurality of first connecting rods (23) are fixedly connected between the outer side of the first fixing ring (22) and the inner side of the first connecting ring (21);
The second connecting assembly comprises a second connecting ring (24), the second connecting ring (24) is positioned at the bottoms of the connecting shafts (11), the bottom ends of the connecting shafts (11) are rotationally connected to the top of the second connecting ring (24), a second fixing ring (25) is arranged on the inner side of the second connecting ring (24), the second fixing ring (25) is fixedly sleeved on the rotating shaft (3), and a plurality of second connecting rods (26) are fixedly connected between the outer side of the second fixing ring (25) and the inner side of the second connecting ring (24);
The side surface of the sleeve (6) is provided with a notch at a position close to the bottom, and the direction of the notch is the same as the direction of the rotating shaft (3) during reverse rotation.
2. The stirring device for photoresist production according to claim 1, wherein: the multiunit puddler (5) top-down evenly distributed is in the periphery of pivot (3), and the quantity of every puddler (5) of group is a plurality of, the one end that puddler (5) is close to pivot (3) rotates and runs through and peg graft in the jack, and the one end that puddler (5) is located the jack has fixedly cup jointed first bevel gear (14), surface fixed connection who puddler (5) are located the pivot (3) is outer has auger blade (15).
3. The stirring device for photoresist production according to claim 2, wherein: the transmission assembly comprises a transmission shaft (16), the top of the transmission shaft (16) is vertically and rotatably connected to the inner wall of the top of the jack, a limiting plate (17) is rotatably sleeved at the position, close to the bottom end, of the transmission shaft (16), the limiting plate (17) is fixedly connected to the inner wall of the jack, a plurality of second bevel gears (18) are fixedly sleeved on the surface of the top of the limiting plate (17) of the transmission shaft (16), the second bevel gears (18) are distributed at the top of each group of stirring rods (5) in a one-to-one correspondence manner, the second bevel gears (18) are meshed with a plurality of first bevel gears (14) corresponding to the bottom of the second bevel gears, rectangular connecting holes (19) are formed in the bottom of the transmission shaft (16), and connecting blocks (20) are slidably inserted in the connecting holes (19), and are fixedly connected with the inner wall of the bottom of the stirring tank (1).
4. A stirring apparatus for photoresist production according to claim 3, wherein: be equipped with a plurality of vertical scraper blades (27) in filter vat (9), and the bottom of scraper blade (27) is laminated with the bottom inner wall of filter vat (9), the length of scraper blade (27) is greater than the inboard width of filter vat (9), the top perpendicular fixedly connected with fixed axle (28) of scraper blade (27) near agitator tank (1) inner wall one side, the top level of fixed axle (28) is connected with the fixed block, the tie point of fixed block and fixed axle (28) is in the same place through torsion spring rotation, and one side that scraper blade (27) is close to pivot (3) can be tightly pasted with the inboard cell wall of filter vat (9) under torsion spring's effect, a plurality of fixedly connected with one swivel (29) between the one end that the fixed block is close to agitator tank (1) inner wall, swivel (29) rotation is connected on the inner wall of agitator tank (1), swivel (29) only can unidirectional rotation, and the direction of swivel (29) is the same with the direction when pivot (3) forward rotation.
5. The stirring device for producing photoresist according to claim 4, wherein: the top of the tank cover (2) is inserted with a charging hopper (30) in a penetrating way, and the bottom of the stirring tank (1) is connected with a discharging pipe (31).
6. A processing technology using the stirring device for photoresist production according to claim 5, characterized in that: the method comprises the following steps:
step one: adding a photosensitive resin, a sensitizer and a solvent into a stirring tank (1) through a charging hopper (30);
Step two: starting the motor (4) and enabling the motor (4) to drive the stirring rod (5) forward to stir and mix the raw materials in the stirring tank (1);
Step three: after the raw materials in the stirring tank (1) are uniformly mixed, the motor (4) is reversely rotated, so that the raw materials can enter the filter tank (9) for preliminary coarse filtration under the cooperation of the sleeve (6) and the spiral protrusions (8) on the surface of the movable roller (7);
Step four: after the completion of the rough filtration, the discharge tube (31) was opened, and the prepared resist was discharged and filtered with a filter membrane having a pore size of 0.02 μm or less.
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| CN202410275816.9A CN117861493B (en) | 2024-03-12 | 2024-03-12 | Stirring device and process for photoresist production |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202410275816.9A CN117861493B (en) | 2024-03-12 | 2024-03-12 | Stirring device and process for photoresist production |
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| CN117861493B true CN117861493B (en) | 2024-05-03 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN217614440U (en) * | 2022-06-13 | 2022-10-21 | 晋江市达利服装织造有限公司 | Production dyestuff agitating unit for pants |
| CN219463164U (en) * | 2023-03-28 | 2023-08-04 | 四川常鑫新材料科技有限公司 | Mixing device for waterproof material production |
| CN220026729U (en) * | 2023-06-08 | 2023-11-17 | 深泽县舒美日化有限公司 | Stirring device for processing liquid laundry detergent |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN217614440U (en) * | 2022-06-13 | 2022-10-21 | 晋江市达利服装织造有限公司 | Production dyestuff agitating unit for pants |
| CN219463164U (en) * | 2023-03-28 | 2023-08-04 | 四川常鑫新材料科技有限公司 | Mixing device for waterproof material production |
| CN220026729U (en) * | 2023-06-08 | 2023-11-17 | 深泽县舒美日化有限公司 | Stirring device for processing liquid laundry detergent |
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