CN117843376A - Preparation method of vacuum chuck for printing device - Google Patents
Preparation method of vacuum chuck for printing device Download PDFInfo
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- CN117843376A CN117843376A CN202311794456.5A CN202311794456A CN117843376A CN 117843376 A CN117843376 A CN 117843376A CN 202311794456 A CN202311794456 A CN 202311794456A CN 117843376 A CN117843376 A CN 117843376A
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- sucker
- molding
- vacuum chuck
- printing
- treatment
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- 238000007639 printing Methods 0.000 title claims abstract description 68
- 238000002360 preparation method Methods 0.000 title claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 97
- 238000000034 method Methods 0.000 claims abstract description 51
- 238000005245 sintering Methods 0.000 claims abstract description 48
- 238000011282 treatment Methods 0.000 claims abstract description 44
- 238000000465 moulding Methods 0.000 claims abstract description 39
- 229910010293 ceramic material Inorganic materials 0.000 claims abstract description 31
- 238000013461 design Methods 0.000 claims abstract description 31
- 230000008569 process Effects 0.000 claims abstract description 30
- 239000000843 powder Substances 0.000 claims abstract description 22
- 238000004458 analytical method Methods 0.000 claims abstract description 21
- 238000012795 verification Methods 0.000 claims abstract description 20
- 239000000654 additive Substances 0.000 claims abstract description 8
- 230000000996 additive effect Effects 0.000 claims abstract description 7
- 239000000203 mixture Substances 0.000 claims abstract description 7
- 238000011156 evaluation Methods 0.000 claims abstract description 5
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract description 4
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910001928 zirconium oxide Inorganic materials 0.000 claims abstract description 4
- 239000000919 ceramic Substances 0.000 claims description 58
- 238000009826 distribution Methods 0.000 claims description 34
- 238000001179 sorption measurement Methods 0.000 claims description 18
- 239000000126 substance Substances 0.000 claims description 17
- 238000012360 testing method Methods 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 239000002245 particle Substances 0.000 claims description 11
- 238000004140 cleaning Methods 0.000 claims description 9
- 239000002253 acid Substances 0.000 claims description 8
- 238000006386 neutralization reaction Methods 0.000 claims description 8
- 230000000694 effects Effects 0.000 claims description 7
- 238000002156 mixing Methods 0.000 claims description 6
- 238000003486 chemical etching Methods 0.000 claims description 5
- 238000003825 pressing Methods 0.000 claims description 5
- 238000005406 washing Methods 0.000 claims description 5
- 230000002378 acidificating effect Effects 0.000 claims description 4
- 238000005094 computer simulation Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000007689 inspection Methods 0.000 claims description 4
- 238000013178 mathematical model Methods 0.000 claims description 4
- 238000005293 physical law Methods 0.000 claims description 4
- 238000004321 preservation Methods 0.000 claims description 4
- 238000003908 quality control method Methods 0.000 claims description 4
- 239000003518 caustics Substances 0.000 claims description 3
- 238000002425 crystallisation Methods 0.000 claims description 3
- 230000008025 crystallization Effects 0.000 claims description 3
- 230000004927 fusion Effects 0.000 claims description 3
- 230000008901 benefit Effects 0.000 abstract description 7
- 238000002474 experimental method Methods 0.000 abstract 1
- 239000000243 solution Substances 0.000 description 13
- 239000011148 porous material Substances 0.000 description 10
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 241000252254 Catostomidae Species 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000006258 conductive agent Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000002592 echocardiography Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F21/00—Devices for conveying sheets through printing apparatus or machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B1/00—Producing shaped prefabricated articles from the material
- B28B1/08—Producing shaped prefabricated articles from the material by vibrating or jolting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B11/00—Apparatus or processes for treating or working the shaped or preshaped articles
- B28B11/08—Apparatus or processes for treating or working the shaped or preshaped articles for reshaping the surface, e.g. smoothing, roughening, corrugating, making screw-threads
- B28B11/0872—Non-mechanical reshaping of the surface, e.g. by burning, acids, radiation energy, air flow, etc.
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B3/00—Producing shaped articles from the material by using presses; Presses specially adapted therefor
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
- C04B38/04—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof by dissolving-out added substances
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/53—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone involving the removal of at least part of the materials of the treated article, e.g. etching, drying of hardened concrete
- C04B41/5338—Etching
- C04B41/5353—Wet etching, e.g. with etchants dissolved in organic solvents
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/91—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics involving the removal of part of the materials of the treated articles, e.g. etching
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3244—Zirconium oxides, zirconates, hafnium oxides, hafnates, or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/34—Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3418—Silicon oxide, silicic acids or oxide forming salts thereof, e.g. silica sol, fused silica, silica fume, cristobalite, quartz or flint
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3817—Carbides
- C04B2235/3826—Silicon carbides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/77—Density
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Structural Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Jigs For Machine Tools (AREA)
Abstract
The invention discloses a preparation method of a vacuum chuck for a printing device, which belongs to the technical field of printing equipment and has the technical key points that: the method comprises the following steps: step one: selecting a material, namely adding aluminum oxide and zirconium oxide into a ceramic material to obtain ceramic material powder for preparing a porous ceramic material; step two: the method comprises the steps of molding preparation, wherein the molding preparation comprises mold molding and sintering molding, and in the mold molding stage, a porous ceramic material is mixed with a proper additive, and then the mixture is placed into a mold to obtain a vacuum chuck through sintering molding; step three: performing porous treatment, namely forming a tiny and uniform hole structure on the surface of the sucker through special process treatment; step four: the structure design of the sucker, the vacuum sucker adopts the surface design of densely distributed micropores; and step five: stability verification, comprehensive experiment verification and theoretical analysis are carried out on the vacuum chuck, and stability evaluation of the vacuum chuck is obtained, so that the stability verification method has the advantages of solving the problems of instability and damage of fixation and improving printing quality and efficiency.
Description
Technical Field
The invention relates to the technical field of printing equipment, in particular to a preparation method of a vacuum chuck for a printing device.
Background
Printing apparatuses are one of apparatuses widely used in industrial production for printing patterns, characters, or images on the surfaces of various materials. Fixing the printed material is critical during printing, especially for thin and fragile materials such as paper, film, and other thin materials. Traditionally, printing devices use suction cups made of rubber or silicone for holding the printed material.
However, current suction cup technology presents some inherent problems in handling thin and fragile materials. First, the adsorption and fixation effect of the rubber or silicone suction cup on the thin material is not ideal. Because the surfaces of the suckers are not completely matched with the thin materials, the fixation is not firm, the position deviation is easy to occur, and even the materials are loose in the printing process, so that the printing accuracy and quality are affected. Second, these suction cups may not be uniform in contact with the material due to the applied pressure, which may result in sticking, damage or breakage. Even minor damage may affect the print quality and final appearance of the product due to the vulnerability of the thin material. These problems present a series of challenges to the printing process, affecting the quality and yield of the printed matter. Secondly, most of the conventional chucks are provided with lifting ejector rods, and a plurality of holes are formed in the surfaces of the suction cups through the ejector rod holes, so that the adsorption and fixing effects on thin materials are not ideal, or uneven spots are caused on the adsorbed materials, and the quality and the yield of printed matters are affected.
However, the prior art has the following disadvantages: the printing material is not fixed stably, and the rubber or silica gel sucker used in the traditional printing equipment has an unsatisfactory fixing effect when processing thin and fragile materials. The complete adhesion of the surface of the sucker and the thin material is insufficient, so that the fixation is unstable, the position deviation is easy to generate, and the printing accuracy is influenced; when the adhesive is adhered and damaged, and is contacted with a thin material, the traditional sucker can apply uneven pressure, so that the material is adhered and damaged, and even the surface of the material can be damaged, and the printing quality is affected; affecting print quality, these problems negatively impact print quality, including positional offset, damage or imperfections, reduce product accuracy and consistency, and increase scrap rate.
Disclosure of Invention
Aiming at the defects existing in the prior art, the embodiment of the invention aims to provide a preparation method of a vacuum chuck for a printing device, so as to solve the problems in the background art.
In order to achieve the above purpose, the present invention provides the following technical solutions:
a method of making a vacuum chuck for a printing device, comprising the steps of:
step one: selecting a material, namely selecting a ceramic material with high quality, wear resistance and high temperature resistance as a base material for manufacturing the sucker, and adding aluminum oxide and zirconium oxide into the ceramic material to obtain ceramic material powder for preparing a porous ceramic material;
step two: the method comprises the steps of molding and preparing, namely preparing the integral structure of the vacuum chuck by using a molding process, wherein the molding and preparing comprises mold molding and sintering molding, and in the mold molding stage, mixing a porous ceramic material with a proper additive, and then placing the mixture into a mold to obtain the vacuum chuck through sintering molding;
step three: performing porous treatment, namely forming a tiny and uniform hole structure on the surface of the sucker through special process treatment;
step four: the structural design of the sucker, the vacuum sucker adopts the surface design of densely distributed micropores, realizes uniform contact area and reduces the pressure on printing materials;
step five: and (3) verifying stability, namely performing comprehensive experimental verification and theoretical analysis on the vacuum chuck to obtain the stability evaluation of the vacuum chuck.
As a further aspect of the invention, the step two of mold forming includes mixing the selected ceramic material powder with a suitable additive, then placing the mixture into a mold, compressing the powder into a suction cup prototype of the desired shape using pressure, vibration, and the like.
As a further aspect of the present invention, the sintering molding in the second step includes:
preparing a molded prototype: in the molding stage, the ceramic powder is molded into the desired shape of the suction cup by pressing or other methods;
setting a sintering furnace: the sintering furnace is prepared and ensured to provide the required high temperature environment, temperature control is critical.
Preheating: placing the molded ceramic prototype in a sintering furnace for a preheating stage of slowly and gradually heating;
high-temperature sintering: once the preheating is completed, the temperature in the sintering furnace gradually rises to the design temperature, powder particles start to combine with each other, and crystallization and fusion are carried out at high temperature to form a compact ceramic structure;
constant temperature heat preservation: once the designed maximum temperature is reached, the temperature is maintained for a period of time to ensure a more secure particle bond;
and (3) a cooling stage: after sintering is completed, gradually reducing the temperature in the furnace to gradually cool the sucker;
taking out the sucker: after the suction cup is completely cooled, it can be taken out from the sintering furnace.
As a further aspect of the present invention, the step three of the porous treatment includes the steps of:
surface preparation: before porous treatment, the ceramic sucker needs to be cleaned;
chemical etching or acid washing treatment: selecting proper chemical corrosive agent or acid solution, and placing a sucker therein for treatment;
control the treatment time and concentration: the time of treatment and the concentration of the solution used need to be precisely controlled;
neutralization and cleaning: after reaching the preset treatment time, taking the sucker out of the chemical solution, carrying out neutralization treatment to neutralize residual acidic substances, and then thoroughly cleaning;
and (3) checking and controlling the quality: after the multi-well process is completed, the chuck typically requires inspection and quality control.
As a further scheme of the invention, the structural design of the sucker in the fourth step comprises the following steps:
surface design of densely distributed micropores: the surface of the porous ceramic sucker is designed into a structure with densely distributed micropores, and the micropores are uniformly distributed on the surface of the sucker, so that a large number of tiny holes are formed;
uniform force distribution: due to the microporous structure, the suction cup may provide a more uniform force distribution when the suction cup is in contact with the printing material.
As a further scheme of the invention, the stability verification in the step five comprises experimental verification, and the experimental verification comprises the following steps:
and (3) actual application test: carrying out practical printing application test on fragile printing materials with different types, shapes and thicknesses, and observing the fixing effect of the porous ceramic sucker;
pressure distribution test: measuring the pressure distribution exerted by the sucker on the printing material by using a sensor, and detecting whether excessive local pressure exists;
and (3) material breakage test: by simulating the pressure, whether the material fixed by the sucker is broken or crushed is tested.
As a further aspect of the present invention, the stability verification in the fifth step further includes a theoretical analysis, where the theoretical analysis includes the following steps:
finite element analysis: the fixity of the sucker is evaluated by using tools such as finite element analysis or computer simulation, the fixing process is simulated by software, the distribution of the adsorption force on the surface of the material is displayed, and a local high-pressure area is searched.
Theoretical pressure distribution model: and establishing a theoretical model based on a physical law, calculating and predicting the pressure distribution of the suction cup applied to the printing material according to the micropore structure of the suction cup surface and the applied pressure, and realizing the method by a theoretical equation or a mathematical model.
In summary, compared with the prior art, the embodiment of the invention has the following beneficial effects:
1. the key advantage of a porous ceramic chuck is its more uniform and stable distribution of the adsorption force. Compared with the traditional sucker, the porous ceramic sucker realizes more uniform adsorption force by utilizing a microporous structure, can firmly fix thin and fragile printing materials, and avoids the problems of position deviation and material loosening.
2. The special design of the porous ceramic suction cup helps to reduce damage and adhesion problems that may occur when in contact with materials. The porous ceramic material provides a more uniform pressure distribution, reduces uneven pressure generated when the suction cup is in contact with the printing material, and avoids possible damage or adhesion.
3. The present invention can significantly improve print quality by providing more stable fixing and reducing risk of damage. The porous ceramic sucker is beneficial to increasing the accuracy and consistency of printed matters, reducing the rejection rate and improving the consistency of the appearance of products because the position deviation can be reduced and the integrity of materials can be maintained.
4. Versatility and applicability in addition to application to printing equipment, porous ceramic suction cups also have a wider range of applicability. The special materials and designs thereof make it suitable for fixing various thin and fragile materials, including printing materials, and processing thin glass, thin film plastic and the like in the production of electronic products.
5. Unique technical advantages the porous ceramic chuck technology of the present invention provides unique technical advantages in the marketplace. The unique chuck design and process effectively solves the problems associated with conventional chucks and provides a more stable and efficient solution when handling thin, fragile printed materials.
The following specific examples are provided to illustrate the invention in more detail in order to more clearly illustrate the structural features and efficacy of the invention.
Detailed Description
The present invention will be described in further detail with reference to the following examples in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
Specific implementations of the invention are described in detail below in connection with specific embodiments.
In one embodiment, a method of preparing a vacuum chuck for a printing device includes the steps of:
step one: selecting a material, namely selecting a ceramic material with high quality, wear resistance and high temperature resistance as a base material for manufacturing the sucker, and adding aluminum oxide and zirconium oxide into the ceramic material to obtain ceramic material powder for preparing a porous ceramic material;
step two: the method comprises the steps of molding and preparing, namely preparing the integral structure of the vacuum chuck by using a molding process, wherein the molding and preparing comprises mold molding and sintering molding, and in the mold molding stage, mixing a porous ceramic material with a proper additive, and then placing the mixture into a mold to obtain the vacuum chuck through sintering molding;
step three: performing porous treatment, namely forming a tiny and uniform hole structure on the surface of the sucker through special process treatment;
step four: the structural design of the sucker, the vacuum sucker adopts the surface design of densely distributed micropores, realizes uniform contact area and reduces the pressure on printing materials; and
step five: and (3) verifying stability, namely performing comprehensive experimental verification and theoretical analysis on the vacuum chuck to obtain the stability evaluation of the vacuum chuck.
Further, the step two of molding includes mixing the selected ceramic material powder with a suitable additive, and then placing the mixture into a mold, compressing the powder into a suction cup prototype of a desired shape by means of pressure, vibration, and the like.
Further, the sintering and molding in the second step includes:
preparing a molded prototype: in the molding stage, the ceramic powder is molded into the desired shape of the suction cup by pressing or other methods;
setting a sintering furnace: the sintering furnace is prepared and ensured to provide the required high temperature environment, temperature control is critical.
Preheating: placing the molded ceramic prototype in a sintering furnace for a preheating stage of slowly and gradually heating;
high-temperature sintering: once the preheating is completed, the temperature in the sintering furnace gradually rises to the design temperature, powder particles start to combine with each other, and crystallization and fusion are carried out at high temperature to form a compact ceramic structure;
constant temperature heat preservation: once the designed maximum temperature is reached, the temperature is maintained for a period of time to ensure a more secure particle bond;
and (3) a cooling stage: after sintering is completed, gradually reducing the temperature in the furnace to gradually cool the sucker;
taking out the sucker: after the suction cup is completely cooled, it can be taken out from the sintering furnace.
Further, the step three of the multi-hole treatment comprises the following steps:
surface preparation: before porous treatment, the ceramic sucker needs to be cleaned;
chemical etching or acid washing treatment: selecting proper chemical corrosive agent or acid solution, and placing a sucker therein for treatment;
control the treatment time and concentration: the time of treatment and the concentration of the solution used need to be precisely controlled;
neutralization and cleaning: after reaching the preset treatment time, taking the sucker out of the chemical solution, carrying out neutralization treatment to neutralize residual acidic substances, and then thoroughly cleaning;
and (3) checking and controlling the quality: after the multi-well process is completed, the chuck typically requires inspection and quality control.
Further, the structural design of the sucker in the fourth step comprises the following steps:
surface design of densely distributed micropores: the surface of the porous ceramic sucker is designed into a structure with densely distributed micropores, and the micropores are uniformly distributed on the surface of the sucker, so that a large number of tiny holes are formed;
uniform force distribution: due to the microporous structure, the suction cup may provide a more uniform force distribution when the suction cup is in contact with the printing material.
Further, the stability verification in the fifth step includes an experimental verification, and the experimental verification includes the following steps:
and (3) actual application test: carrying out practical printing application test on fragile printing materials with different types, shapes and thicknesses, and observing the fixing effect of the porous ceramic sucker;
pressure distribution test: measuring the pressure distribution exerted by the sucker on the printing material by using a sensor, and detecting whether excessive local pressure exists;
and (3) material breakage test: by simulating the pressure, whether the material fixed by the sucker is broken or crushed is tested.
Further, the stability verification in the fifth step further includes a theoretical analysis, and the theoretical analysis includes the following steps:
finite element analysis: the fixity of the sucker is evaluated by using tools such as finite element analysis or computer simulation, the fixing process is simulated by software, the distribution of the adsorption force on the surface of the material is displayed, and a local high-pressure area is searched.
Theoretical pressure distribution model: and establishing a theoretical model based on a physical law, calculating and predicting the pressure distribution of the suction cup applied to the printing material according to the micropore structure of the suction cup surface and the applied pressure, and realizing the method by a theoretical equation or a mathematical model.
In the present embodiment, the porous ceramic has the advantages:
high porosity: an important feature is that the porous ceramic has a more uniform and controlled pore structure, including open pores and closed pores. The open pores have the function of filtering, absorbing, adsorbing and eliminating echoes, while the closed pores contribute to heat and sound insulation and to the barrier of liquids and solid particles.
Stability of physical and chemical properties: the porous ceramic material can resist acid-base corrosion, bear high temperature and high pressure, keep a clean state, and cannot cause secondary pollution, and is an environment-friendly functional material.
High strength and no dust pollution: porous ceramic materials are typically made by sintering metal oxides, silica, silicon carbide, and the like at high temperatures. These materials have high strength because boundary portions of raw material grains are melted and bonded during sintering to form a high strength ceramic.
Light weight characteristics: the porous ceramic contains a plurality of uniformly distributed micropores therein, and has a specific gravity of about 1.1-2.5g/cm 3 Is lighter than a metal adsorption platform.
Insulation and antistatic: the porous ceramic is usually made of alumina or silicon carbide, both of which are insulating materials, and a proper amount of conductive agent is added to effectively eliminate static electricity.
The method can be customized: vacuum chucks of different sizes, shapes, base and ceramic porosities and pore sizes can be customized according to the use requirements. The pore size is usually controlled within 0.1mm, and the porosity is usually controlled within 30-70%.
Porous ceramic sucker manufacturing process
The porous ceramic sucker is made of porous ceramic materials, and the specific manufacturing process comprises the following steps:
1. selecting materials: ceramic materials with high quality, wear resistance and high temperature resistance are selected as base materials for manufacturing the sucker. The material selection of the porous ceramic sucker is a key step. Typically, the porous ceramic material is composed of alumina, zirconia, or other ceramic materials. These materials have good wear resistance, high temperature stability and chemical stability, making them widely used in industrial fields. First, a material is selected, taking into consideration the characteristics that the suction cup needs to possess. Alumina is a common choice due to its high hardness, good wear resistance, and high temperature resistance. Zirconia is harder than alumina, has higher compressive strength and wear resistance, and is suitable for scenes with special requirements. The choice of suitable materials is particularly desirable depending on the needs of the application. These materials are typically prepared in powder form and then processed by molding and sintering processes. In selecting materials, stability of the materials, manufacturing costs, and desired performance characteristics need to be considered to ensure quality and function of the suction cup.
2. And (3) molding and preparing: the integral structure of the sucker is prepared by a molding process. Pressing, injection molding or other forming methods can be adopted to ensure that the shape and structure of the sucker meet the design requirements. The forming process of the porous ceramic sucker generally comprises the steps of mold forming, sintering and the like. In the mold forming stage, the selected ceramic material powder is mixed with the appropriate additives and then placed in a mold, and the powder is compressed into a suction cup prototype of the desired shape by means of pressure or vibration. The sintering process follows, which is a key step in the manufacture of porous ceramic chucks. Sintering is the process of placing the shaped prototype in a high temperature environment so that the material particles are mutually combined to form a compact ceramic structure. This process requires precise control of temperature and time to ensure that the suction cup attains the desired strength and stability. Sintering and forming are key steps for preparing the porous ceramic sucker, and the formed ceramic prototype is subjected to high-temperature treatment to enable powder particles to be combined into a compact ceramic structure. This process is very important because it directly affects the strength, stability and final functional performance of the suction cup.
The following steps are the sintering molding:
preparing a molded prototype: in the molding stage, the ceramic powder is molded into the desired shape of the suction cup by pressing or other methods. This prototype is typically kept at room temperature awaiting preparation prior to sintering.
Setting a sintering furnace: a sintering furnace is prepared and ensured to be able to provide the required high temperature environment. Temperature control is critical and is typically set within a specific temperature range depending on the materials used and the design requirements.
Preheating: and placing the molded ceramic prototype in a sintering furnace for a preheating stage of slowly and gradually heating. This stage is intended to eliminate moisture and other volatile substances that may be present, avoiding explosions or damages at high temperatures.
High-temperature sintering: once the preheating is completed, the temperature in the sintering furnace gradually increases to the design temperature. In this high temperature environment, the ceramic prototype begins to undergo chemical and physical changes. During this process, the powder particles begin to bond to each other and crystallize and fuse at high temperatures to form a dense ceramic structure.
Constant temperature heat preservation: once the designed maximum temperature is reached, the temperature is maintained for a period of time to ensure a more secure particle bond. This stage sometimes lasts several hours, depending on the materials used, the dimensions of the suction cup and the design.
And (3) a cooling stage: after sintering is completed, the temperature in the furnace is gradually reduced, so that the sucker is gradually cooled. This process needs to be slow to avoid sudden temperature changes leading to cracking of the chuck or the creation of internal stresses.
Taking out the sucker: after the suction cup is completely cooled, it can be taken out from the sintering furnace. At this point, the suction cup has formed a strong ceramic structure with the required strength and stability.
3. And (3) porous treatment: through special process treatment, tiny and uniform hole structures are formed on the surface of the sucker. These micropores help to achieve a more uniform vacuum adsorption force distribution. In the process of preparing porous ceramic suction cups, in order to enhance the adsorption capacity thereof, a porous treatment method is often adopted, wherein chemical etching or acid washing technology is a common mode. The main purpose of this step is to form a tiny pore structure on the surface of the ceramic suction cup, further increasing its surface area, thereby enhancing the suction performance of the suction cup.
The following steps are adopted:
surface preparation: the ceramic chuck needs to undergo cleaning and surface preparation steps prior to porous treatment. This ensures that the surface is free of dirt or impurities so that subsequent treatments can be carried out efficiently.
Chemical etching or acid washing treatment: the chuck is placed therein for treatment by selecting an appropriate chemical etchant or acidic solution. These solutions are generally capable of reacting with the ceramic material to form a tiny pore structure on its surface. The holes do not change the overall shape of the suction cup, but increase the surface area on a microscopic level, so that the contact surface of the suction cup is larger, thereby improving the suction force.
Control the treatment time and concentration: the time of treatment and the concentration of the solution used need to be precisely controlled. Too long a time or too high a solution concentration may lead to increased surface roughness and may even affect the overall quality of the chuck, with precise control of the process parameters being particularly important.
Neutralization and cleaning: after a predetermined treatment time is reached, the suction cup is taken out of the chemical solution and subjected to a neutralization treatment to neutralize the remaining acidic substances. A thorough cleaning is then performed to ensure that the suction cup surface is no longer any chemical residues.
And (3) checking and controlling the quality: after the multi-well process is completed, the chuck typically requires inspection and quality control. This includes testing the suction performance to ensure that the treated suction cup has the desired suction capacity and surface characteristics.
4. Sucker structure and working principle
Structural design: the porous ceramic sucker adopts a surface design with densely distributed micropores so as to realize a more uniform contact area and reduce the pressure on printing materials. This ensures a more uniform force distribution when fixing the material.
Working principle: the suction cup is connected to a vacuum system of the printing equipment, and when the system generates negative pressure, micropores on the surface of the porous ceramic form uniform adsorption force, so that the printing material is effectively fixed. Because of the micropore structure on the surface of the sucker, the adsorption force can be more uniformly applied to the surface of the material, and the damage and adhesion problems are reduced.
The structural design of the porous ceramic suction cup is important in that it achieves a more uniform contact area and reduced pressure on the printed material by:
surface design of densely distributed micropores: the surface of the porous ceramic sucker is designed into a structure with densely distributed micropores. The micropores are uniformly distributed on the surface of the sucker, so that a large number of tiny holes are formed. This design increases the surface area, enabling the suction cup to contact more of the surface of the printed material.
Uniform force distribution: due to the microporous structure, the suction cup may provide a more uniform force distribution when the suction cup is in contact with the printing material. This means that the suction force on the suction cup acts uniformly on the surface of the printed material, reducing the local pressure on the material and reducing the risk of damage.
Working principle: the porous ceramic suction cup is operated by a vacuum system connected to the printing apparatus. The working principle is as follows:
and (3) connecting a vacuum system: the porous ceramic suction cup is typically connected to a vacuum system of the printing apparatus, enabling this system to generate negative pressure.
Microporous adsorption force: when the vacuum system is activated and negative pressure is generated, the micro-pores of the suction cup surface become active. These micropores form a uniform adsorption force, effectively adsorbing and fixing the printing material.
Uniform force distribution: due to the microporous structure of the porous ceramic surface, the adsorption force can act on the material surface more uniformly. This ensures that the suction cups can hold the printed material securely while reducing the risk of damage and sticking problems.
5. Connection of suction cups to printing devices
Connection of vacuum system device to printing apparatus: the porous ceramic suction cup is coupled to the printing apparatus by special coupling means, which typically comprise a gas tube connection or the like. This connection means firmly connects the suction cup to the vacuum system or suction system of the printing apparatus.
The tracheal joint is firmly connected: the air pipe joint is a key component for connecting the porous ceramic sucker and the printing equipment. It ensures a tight connection between the suction cup and the device and enables the device to provide the suction cup with the required vacuum or air pressure. This connection is reliable and stable, ensuring that the suction cup is firmly secured to the device during operation.
Adapting to different sizes and types of printed materials: the connection means and the air pipe connection are usually designed to accommodate different sizes and types of printed material. Whether small or large materials, printing materials of different shapes or surface characteristics, the connecting devices and joints can be flexibly adapted, and the sucker can be effectively fixed in various different working scenes.
6. Advantages of the technical proposal
Stability verification
And (3) experimental verification:
and (3) actual application test: the fixing effect of the porous ceramic sucker is observed by carrying out practical printing application test on fragile printing materials with different types, shapes and thicknesses.
Pressure distribution test: the pressure distribution exerted by the suction cup on the printing material is measured by a sensor, and whether excessive local pressure exists is detected.
And (3) material breakage test: by simulating the pressure, whether the material fixed by the sucker is broken or crushed is tested.
Theoretical analysis:
finite element analysis: the fixity of the suction cup is evaluated using finite element analysis (Finite Element Analysis, FEA) or computer simulation or the like. The fixing process is simulated through software, the distribution of the adsorption force on the surface of the material is displayed, and a local high-pressure area is found.
Theoretical pressure distribution model: and establishing a theoretical model based on a physical law, calculating and predicting the pressure distribution of the suction cup applied to the printing material according to the micropore structure of the suction cup surface and the applied pressure, and realizing the method by a theoretical equation or a mathematical model.
Stability assurance
Designing a porous ceramic sucker: uniform adsorption force distribution: the design of the micropore structure ensures that the adsorption force uniformly acts on the surface of the printing material, reduces the local pressure and increases the stability.
Experimental and theoretical combination: the stability evaluation of the printing material which is thin and fragile and fixed by the sucker is provided by comprehensive experimental verification and theoretical analysis, and the design performance is ensured to be superior.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the invention.
Claims (7)
1. A method of making a vacuum chuck for a printing device, comprising the steps of:
step one: selecting a material, namely selecting a ceramic material with high quality, wear resistance and high temperature resistance as a base material for manufacturing the sucker, and adding aluminum oxide and zirconium oxide into the ceramic material to obtain ceramic material powder for preparing a porous ceramic material;
step two: the method comprises the steps of molding and preparing, namely preparing the integral structure of the vacuum chuck by using a molding process, wherein the molding and preparing comprises mold molding and sintering molding, and in the mold molding stage, mixing a porous ceramic material with a proper additive, and then placing the mixture into a mold to obtain the vacuum chuck through sintering molding;
step three: performing porous treatment, namely forming a tiny and uniform hole structure on the surface of the sucker through special process treatment;
step four: the structural design of the sucker, the vacuum sucker adopts the surface design of densely distributed micropores, realizes uniform contact area and reduces the pressure on printing materials;
step five: and (3) verifying stability, namely performing comprehensive experimental verification and theoretical analysis on the vacuum chuck to obtain the stability evaluation of the vacuum chuck.
2. A method of preparing a vacuum chuck for use with a printing apparatus according to claim 1 wherein in step two the mold forming comprises mixing a selected ceramic material powder with a suitable additive and then placing the mixture into a mold to compress the powder into a desired shaped chuck prototype using pressure and vibration.
3. The method of manufacturing a vacuum chuck for a printing apparatus according to claim 2, wherein the sintering molding in the step two includes:
preparing a molded prototype: in the molding stage, the ceramic powder is molded into the desired shape of the suction cup by pressing or other methods;
setting a sintering furnace: the sintering furnace is prepared and ensured to provide the required high temperature environment, temperature control is critical.
Preheating: placing the molded ceramic prototype in a sintering furnace for a preheating stage of slowly and gradually heating;
high-temperature sintering: once the preheating is completed, the temperature in the sintering furnace gradually rises to the design temperature, powder particles start to combine with each other, and crystallization and fusion are carried out at high temperature to form a compact ceramic structure;
constant temperature heat preservation: once the designed maximum temperature is reached, the temperature is maintained for a period of time to ensure a more secure particle bond;
and (3) a cooling stage: after sintering is completed, gradually reducing the temperature in the furnace to gradually cool the sucker;
taking out the sucker: after the suction cup is completely cooled, it can be taken out from the sintering furnace.
4. The method of manufacturing a vacuum chuck for a printing apparatus according to claim 1, wherein the porous treatment in the step three comprises the steps of:
surface preparation: before porous treatment, the ceramic sucker needs to be cleaned;
chemical etching or acid washing treatment: selecting proper chemical corrosive agent or acid solution, and placing a sucker therein for treatment;
control the treatment time and concentration: the time of treatment and the concentration of the solution used need to be precisely controlled;
neutralization and cleaning: after reaching the preset treatment time, taking the sucker out of the chemical solution, carrying out neutralization treatment to neutralize residual acidic substances, and then thoroughly cleaning;
and (3) checking and controlling the quality: after the multi-well process is completed, the chuck typically requires inspection and quality control.
5. The method for manufacturing a vacuum chuck for a printing device according to claim 1, wherein the chuck structural design in the fourth step comprises the steps of:
surface design of densely distributed micropores: the surface of the porous ceramic sucker is designed into a structure with densely distributed micropores, and the micropores are uniformly distributed on the surface of the sucker, so that a large number of tiny holes are formed;
uniform force distribution: due to the microporous structure, the suction cup may provide a more uniform force distribution when the suction cup is in contact with the printing material.
6. The method of manufacturing a vacuum chuck for a printing device according to claim 1, wherein the step five stability verification includes an experimental verification including the steps of:
and (3) actual application test: carrying out practical printing application test on fragile printing materials with different types, shapes and thicknesses, and observing the fixing effect of the porous ceramic sucker;
pressure distribution test: measuring the pressure distribution exerted by the sucker on the printing material by using a sensor, and detecting whether excessive local pressure exists;
and (3) material breakage test: by simulating the pressure, whether the material fixed by the sucker is broken or crushed is tested.
7. The method of claim 6, wherein the step five stability verification further comprises a theoretical analysis, the theoretical analysis comprising the steps of:
finite element analysis: the fixity of the sucker is evaluated by using tools such as finite element analysis or computer simulation, the fixing process is simulated by software, the distribution of the adsorption force on the surface of the material is displayed, and a local high-pressure area is searched.
Theoretical pressure distribution model: and establishing a theoretical model based on a physical law, calculating and predicting the pressure distribution of the suction cup applied to the printing material according to the micropore structure of the suction cup surface and the applied pressure, and realizing the method by a theoretical equation or a mathematical model.
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