CN117833609A - Pulse radio frequency power supply system - Google Patents
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- CN117833609A CN117833609A CN202410016075.2A CN202410016075A CN117833609A CN 117833609 A CN117833609 A CN 117833609A CN 202410016075 A CN202410016075 A CN 202410016075A CN 117833609 A CN117833609 A CN 117833609A
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Abstract
The invention discloses a pulse radio frequency power supply system in the technical field of radio frequency power supplies, which comprises an AC/DC module for supplying power to each module; the main control module is used for receiving each sampling signal and providing a control signal for the lead receiving module; the receiving and leading module is used for receiving and processing sampling signals sent by the AC/DC module, the power amplification module and the cooling system module and sending the sampling signals to the main control module; the receiving and leading module is also used for receiving the control signal sent by the processing main control module; the receiving and leading module is also used for receiving and processing external radio frequency signals and sending the radio frequency signals to the power amplification module; the power amplifier module is used for receiving and amplifying the radio frequency signal sent by the receiving and leading module and outputting radio frequency power; the radio frequency power sampling module is used for sampling the radio frequency power value output by the power amplification module; the cooling system module is used for providing cooling for each module. The pulse radio frequency power supply system has the advantages of simple structure and low cost, and effectively reduces the production cost.
Description
Technical Field
The invention relates to the technical field of radio frequency power supplies, in particular to a pulse radio frequency power supply system.
Background
The radio frequency power supply system is a system for converting power frequency energy into radio frequency energy and is commonly applied to the fields of radio frequency sputtering, PECVD chemical vapor deposition, plasma etching and the like. One technical solution commonly adopted in the rf power supply system is a capacitively coupled plasma source (CCP), where the basic unit of the rf power supply system shown in fig. 1 includes: vacuum chamber, parallel plate capacitor, matcher and radio frequency power.
The radio frequency power supply can be divided into a continuous wave radio frequency power supply and a pulse radio frequency power supply, and is opposite to the traditional continuous wave radio frequency power supply. The pulsed radio frequency power supply has the following advantages: additional and flexible regulation windows (pulse frequency, duty cycle, modulation depth, etc.) are provided, and a more extensive and efficient regulation of plasma parameters (electron/ion energy, flux, active particle composition, etc.) can be achieved. As shown in fig. 2, the pulsed rf power supply can significantly improve the plasma induced damage (PlasmaInducedDamages, PIDs) common to continuous wave rf power supplies, such as sustained high energy ion bombardment, vacuum uv photon irradiation, and wafer surface localized charging effects.
However, the related products of the pulse radio frequency power supply existing in China at present have complex structures and high manufacturing cost, and are difficult to meet the control requirement of the production cost.
Disclosure of Invention
The pulse radio frequency power supply system solves the problems of complex structure and high manufacturing cost of related products of the pulse radio frequency power supply in the prior art, and achieves the technical effects of simple structure and low cost.
The embodiment of the application provides a pulse radio frequency power supply system, which comprises an AC/DC module, a main control module, a lead-in module, a power amplifier module, a radio frequency power sampling module and a cooling system module;
the AC/DC module is used for supplying power to the main control module, the cooling system module, the power amplifier module and the lead receiving module, and is also used for providing a sampling signal 31 for the lead receiving module and receiving a control signal 31 sent by the lead receiving module;
the main control module is used for receiving a sampling signal 33 sent by the power receiving module and a sampling signal 34 sent by the radio frequency power sampling module, the main control module is also used for providing a control signal 32 for the power receiving module, and the control signal 32 comprises analog and digital signals for controlling the AC/DC module, the power amplification module, the cooling system module and the power receiving module;
the lead receiving module is used for receiving and processing the sampling signals 31, 32 and 35 sent by the AC/DC module, the power amplifier module and the cooling system module, and sending the sampling signals 33 to the main control module; the lead receiving module is further used for receiving and processing the control signal 32 sent by the main control module and sending a control signal 31 to the AC/DC module; the receiving and leading module is also used for receiving and processing an external radio frequency signal 31 and sending a radio frequency signal 32 to the power amplification module; the connection module is also used for supplying power to the radio frequency power sampling module;
the power amplifier module is used for receiving and amplifying the radio frequency signal 32 sent by the receiving and leading module, and is also used for outputting radio frequency power;
the radio frequency power sampling module is used for sampling the radio frequency power value output by the power amplification module to obtain a sampling signal 36, and sending the sampling signal 34 to the main control module after processing;
the cooling system module is used for providing cooling for the AC/DC module, the main control module, the connection module and the power amplifier module respectively.
The beneficial effects of the above embodiment are that: the pulse radio frequency power supply system is provided with the leading module for processing sampling signals and control signals from other modules, and the receiving and transmitting functions are completed after the processing, so that the system structure is effectively simplified by combining the AC/DC module, the main control module, the power amplifier module and the cooling system module, and meanwhile, the radio frequency power sampling module is provided for sampling the radio frequency power value of the power amplifier module, and transmitting the sampling signals to the main control module after the processing, so that the closed-loop control of the power is completed. The pulse radio frequency power supply system has the advantages of simple structure and low cost, and effectively reduces the production cost.
Based on the above embodiments, the present application may be further improved, specifically as follows:
in one embodiment of the present application, the AC/DC module includes an AC/DC switching power supply 41 and an AC/DC switching power supply 42, where the AC/DC switching power supply 41 provides stable DC power for the main control module, the cooling system module and the power receiving module, and the AC/DC switching power supply 42 provides DC power with an adjustable output voltage for the power amplifier module. The AC/DC module comprises an AC/DC switching power supply 41 and an AC/DC switching power supply 42, and the AC/DC switching power supply 42 independently provides DC power supply with adjustable output voltage for the power amplifier module, so that different requirements of different modules are met.
In one embodiment of the present application, the sampling signal 31 includes an output voltage ready signal, an overvoltage alarm signal, an overcurrent alarm signal, an overtemperature alarm signal, and a phase-failure alarm signal, the sampling signal 32 includes an operating voltage, an operating current, and an operating temperature of the power amplifier module, and the sampling signal 35 includes an operating voltage, an operating current, and an operating temperature of the cooling system module. The working state of each module is sent to the main control module through the receiving module, and the main control module controls the working state of the system in real time.
In one embodiment of the present application, the control signal 31 includes an output level regulation signal and a remote control power switch signal.
In one embodiment of the application, the main control module comprises MCU, DSP, FPGA and a DDS chip, and the main control module completes signal exchange with external equipment through an RS485, ethercat or RS232 communication interface. And providing radio frequency signals for other devices through the CEX OUT interface, and receiving external inter-lock signals to complete electrical interlocking.
IN one embodiment of the present application, the receiving module includes a channel selection switch, a VGA, a fixed attenuator one, an adjustable attenuator, a low noise amplifier, and a fixed attenuator two, where the channel selection switch receives a radio frequency signal 51 sent out by a DDS chip IN the main control module and a radio frequency signal 52 fed by an external CEX IN, and selects a radio frequency signal to send to the VGA, the radio frequency signal modulated by the VGA enters the adjustable attenuator after being attenuated by the fixed attenuator, and the radio frequency signal modulated by the adjustable attenuator is finally sent to the power amplifier module as a radio frequency front-stage signal after being subjected to the low noise amplifier and the fixed attenuator. The radio frequency signals emitted by the DDS and the radio frequency signals fed by the CEX IN IN the main control module enter a channel selection switch of the receiving and leading module, one channel of the channel selection switch is selected between two channels of radio frequency signals to be sent to the VGA, the VGA is a variable gain amplifier, the control of the output power of a product can be completed by providing pulse control signals for a gain control port of the VGA and providing power signals for a high-precision adjustable attenuator, and the radio frequency pre-stage signals are namely radio frequency signals 32.
In one embodiment of the application, the power amplifier module comprises a VDMOS tube, a diode, an LDMOS, a power amplifier based on a GaN process, a power amplifier based on a GaAs process, an LC filter, a microstrip balun, an LC balun, a transformer balun, a power divider and an isolator.
In one embodiment of the present application, the rf power sampling module includes an operational amplifier, a diode, a T-type attenuator, a pi-type attenuator, a microstrip coupler, and a magnetic core coupler.
In one embodiment of the present application, the cooling system module includes a fan module, a heat sink, and a water tray.
One or more technical solutions provided in the embodiments of the present application at least have the following technical effects or advantages:
1. the pulse radio frequency power supply system is provided with the leading module for processing sampling signals and control signals from other modules, and the receiving and transmitting functions are completed after the processing, and the system structure is effectively simplified by combining the AC/DC module, the main control module, the power amplifier module and the cooling system module;
2. according to the pulse radio frequency power supply system, a pulse control signal is provided for a gain control port of the VGA, and a power signal is provided for a high-precision adjustable attenuator to finish accurate control of output power of a product.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. Like elements or portions are generally identified by like reference numerals throughout the several figures. In the drawings, elements or portions thereof are not necessarily drawn to scale.
FIG. 1 is a basic unit diagram of a radio frequency power supply system;
FIG. 2 is a graph of the effects of continuous wave RF and pulsed RF etching;
FIG. 3 is a block diagram of the pulsed RF power system of embodiment 1;
FIG. 4 is a block diagram showing the internal structure of the AC/DC module in embodiment 1;
FIG. 5 is a block diagram showing the internal structure of the connection module in embodiment 1;
FIG. 6 is a schematic diagram of the pulse modulation waveform of the lead module in embodiment 1;
fig. 7 is a schematic diagram of the internal structure of the power amplifier module in embodiment 2;
FIG. 8 is a schematic diagram illustrating the internal structure of the master control module in embodiment 2;
fig. 9 is a schematic diagram of the internal structure of the rf power sampling module in embodiment 2.
Detailed Description
The present invention is further illustrated below in conjunction with the specific embodiments, it being understood that these embodiments are meant to be illustrative of the invention only and not limiting the scope of the invention, and that modifications of the invention, which are equivalent to those skilled in the art to which the invention pertains, will fall within the scope of the invention as defined in the claims appended hereto.
The embodiment of the application solves the problems of complex structure and high manufacturing cost of related products of the pulse radio frequency power supply in the prior art by providing the pulse radio frequency power supply system, and achieves the technical effects of simple structure and low cost.
The technical scheme in the embodiment of the application aims to solve the problems, and the overall thought is as follows:
examples:
as shown in FIG. 3, a pulsed RF power system includes an AC/DC module, a main control module, a power amplifier module, an RF power sampling module, and a cooling system module.
The AC/DC module is used for supplying power to the main control module, the cooling system module, the power amplifier module and the lead receiving module, and is also used for providing a sampling signal 31 for the lead receiving module and receiving a control signal 31 sent by the lead receiving module;
the main control module is used for receiving the sampling signal 33 sent by the receiving module and the sampling signal 34 sent by the radio frequency power sampling module, the main control module is also used for providing a control signal 32 for the receiving module, and the control signal 32 comprises analog and digital signals for controlling the AC/DC module, the power amplification module, the cooling system module and the receiving module;
the receiving and leading module is used for receiving and processing the sampling signals 31, 32 and 35 sent by the AC/DC module, the power amplification module and the cooling system module, and sending the sampling signals 33 to the main control module; the lead receiving module is also used for receiving the control signal 32 sent by the processing main control module and sending the control signal 31 to the AC/DC module; the receiving and guiding module is also used for receiving and processing an external radio frequency signal 31 and sending a radio frequency signal 32 to the power amplification module; the connection and guide module is also used for supplying power to the radio frequency power sampling module;
the power amplifier module is used for receiving and amplifying the radio frequency signal 32 sent by the receiving and leading module, and is also used for outputting radio frequency power;
the radio frequency power sampling module is used for sampling the radio frequency power value output by the power amplification module to obtain a sampling signal 36, and sending the sampling signal 34 to the main control module after processing;
the cooling system module is used to provide cooling (cooling 31, 32, 33, 34) for the main control module, the power amplifier module, and the AC/DC module, respectively.
Further, as shown in fig. 4, the AC/DC module includes an AC/DC switching power supply 41 and an AC/DC switching power supply 42, where the AC/DC switching power supply 41 provides stable DC power for the main control module, the cooling system module, and the power receiving module, and the AC/DC switching power supply 42 provides DC power with an adjustable output voltage for the power amplifier module. The power supply requirements of different modules are met.
Further, the sampling signal 31 includes power supply related signals such as an output voltage ready signal, an overvoltage alarm signal, an overcurrent alarm signal, an overtemperature alarm signal, and a phase-failure alarm signal, the sampling signal 32 includes device status signals such as an operating voltage, an operating current, and an operating temperature of the power amplifier module, and the sampling signal 35 includes device status signals such as an operating voltage, an operating current, and an operating temperature of the cooling system module. The working state of each module is sent to the main control module through the receiving module, and the main control module controls the working state of the system in real time.
Further, the AC/DC module can dissipate heat by self-contained air cooling.
Further, the control signal 31 includes an output level regulation signal and a remote control power switch signal.
Further, the main control module comprises chips such as MCU, DSP, FPGA and DDS, and the main control module completes signal exchange with external equipment through an RS485, ethercat or RS232 communication interface. And providing radio frequency signals for other devices through the CEX OUT interface, and receiving external inter-lock signals to complete electrical interlocking.
Further, the lead receiving module comprises a radio frequency signal processing link, specifically, as shown in fig. 5, a channel selection switch, a VGA, a first fixed attenuator, a high-precision adjustable attenuator, a low-noise amplifier and a second fixed attenuator which are sequentially connected. The channel selection switch receives a radio frequency signal 51 sent by a DDS chip IN the main control module and a radio frequency signal 52 fed by an external CEX IN, selects one radio frequency signal to send to the VGA, the VGA is a variable gain amplifier, pulse modulation of the radio frequency signal can be completed by providing a pulse control signal to a gain control port of the VGA, and a final product outputs a radio frequency high-power pulse signal, wherein pulse modulation waveforms comprise but are not limited to pulse waveforms IN a form shown IN FIG. 6. If the gain control port of the VGA is supplied with a DC level, the final output of the product will be a continuous wave high power signal. The radio frequency signals after VGA modulation enter a high-precision adjustable attenuator after being attenuated by a fixed attenuator, and the adjustable attenuator comprises various adjustable attenuators such as an analog adjustable attenuator, a digital adjustable attenuator and the like. The control of the output power of the product can be completed by providing a power signal to the high-precision adjustable attenuator. The radio frequency signal regulated by the adjustable attenuator is finally transmitted to the power amplifier module as a radio frequency front-stage signal (namely, radio frequency signal 32) after being subjected to low noise amplification and fixed attenuator.
Furthermore, the pulse modulation mode of the connecting and guiding module can also be realized by keeping the gain control port of the VGA to be a fixed direct-current voltage and directly generating a pulse modulation radio frequency signal by the CEX IN port or the DDS.
Further, the power amplifier module receives the radio frequency signal 32 from the power amplifier module, amplifies the radio frequency signal by the internal multi-stage power amplifier, outputs radio frequency power, receives direct current power from the AC/DC module to supply power to internal devices, and receives cooling power from the cooling system module to realize stable operation of the power amplifier module.
Further, the power amplifier module comprises a VDMOS tube, a diode, an LDMOS, a power amplifier based on a GaN process, a power amplifier based on a GaAs process, an LC filter, a microstrip balun, an LC balun, a transformer balun, a power divider, an isolator and other functional units.
Further, the radio frequency power sampling module comprises an operational amplifier, a diode, a T-shaped attenuator, an n-shaped attenuator, a microstrip coupler and a magnetic core coupler.
Further, the cooling system module comprises a fan module, a radiator, a water tray and other heat dissipation parts. The cooling system provides cooling for the AC/DC module, the main control module, the connecting and guiding module and the power amplifier module, and realizes the stable work of the whole product.
The technical scheme in the embodiment of the application at least has the following technical effects or advantages:
1. the pulse radio frequency power supply system is provided with the leading module for processing sampling signals and control signals from other modules, and the receiving and transmitting functions are completed after the processing, and the system structure is effectively simplified by combining the AC/DC module, the main control module, the power amplifier module and the cooling system module;
2. according to the pulse radio frequency power supply system, a pulse control signal is provided for a gain control port of the VGA, and a power signal is provided for a high-precision adjustable attenuator to finish accurate control of output power of a product.
Example 2:
a 13.56mhz 1.5kw pulsed radio frequency power supply based on example 1:
for AC/DC modules: the AC/DC switching power supply 41 selects EPS-120-24 as a main control module, and the power-on module and the cooling system module provide stable 24V direct current power supply. The AC/DC switching power supply 42 selects NSP-3200-48 to provide 24-55V adjustable power supply voltage for the power amplifier module.
For the splicing module: the single pole double throw switch is selected to select the rf signal 52 and the rf signal 51 sent by CEX IN and DDS IN fig. 5. The VGA selects VCA821, and a gain control end of VCA821 applies a pulse signal of 0-2V to carry out pulse modulation of radio frequency signals. The high-precision adjustable attenuator selects HMC346AMS8GE, and the control end of the high-precision adjustable attenuator is applied with direct current voltage of-4V to 0V so as to realize high-precision power control of errors within the range of 1500W.
For a power amplifier module: as shown in fig. 7, the two-stage amplification circuits HTH7G14S030hb and HTH8G02P1K4H are selected, and the two-stage amplification circuits are supplemented with power splitters, combiners, attenuators, EMI filters and other radio-frequency devices, so that the radio-frequency low-power signal can be amplified to 1500W. Meanwhile, an NTC thermistor is selected, the working temperature near the power amplifier module is converted into a resistance value, and further, the resistance value is finally converted into a direct-current voltage value through circuit voltage division and is sent to the lead receiving module.
For the master control module: as shown in fig. 8, the main units of the master control module in this embodiment include a clock unit, a memory unit, an analog signal exchange unit and a digital signal exchange unit.
A clock unit and a storage unit: DS3231M+ is selected as a system clock, and W25Q128 is selected for initial power-on storage and system configuration parameter storage.
Analog signal exchange unit: the analog acquisition chip selects AD7606 with the accuracy of 1mv, and exchanges data with the MCU through the SPI bus, and the exchange signals comprise the sampling signal 34 in FIG. 3 and various analog signals transmitted by the connection module. The analog output chip selects DAC8562 for analog feedback and device control output, and is characterized in that the pulse control signal and the power control signal shown in figure 5 are output.
Digital signal exchange unit: the signals of the unit throughput comprise signals such as an RF_ON switch, FWD/LOAD mode selection, an interface, CEX selection, fan abnormality detection, moisture-proof detection, direct current power supply stability detection, standing wave protection, RF_ON feedback, AC_OK, over-temperature protection and the like. Meanwhile, a 9958 chip is selected to be used as the generation of the radio frequency continuous wave signal or the radio frequency pulse modulation signal.
For a radio frequency power sampling module: as shown in fig. 9, this module is used to monitor the device output/reflected power. Magnetic core parameters H31-18-15 and red copper wires are selected to complete winding of the magnetic core coil coupler, an incident/reflected coupling signal is converted into direct-current low voltage by adopting a BAS70 type diode, the direct-current low voltage is amplified by using a TL074 chip, and the direct-current low voltage is sent to a main control module for power monitoring.
The pulse radio frequency power supply has the following characteristics:
1. the working frequency band of the radio frequency signal is 10 MHz-100 MHz, the pulse modulation frequency band for modulating the radio frequency signal is 10 Hz-100 KHz, and the duty ratio of the pulse is 1% -99% adjustable; the pulse radio frequency power supply can be designed into a product with any power level of 0.1 KW-5 KW.
2. The conversion efficiency of the power frequency energy of the pulse radio frequency power supply for converting the power frequency energy is more than 60%; the absolute value of the relative error of the output power of the pulse radio frequency power supply relative to the set power is within 1 percent.
While embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the invention, and that variations, modifications, alternatives and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the invention.
Claims (9)
1. The pulse radio frequency power supply system is characterized by comprising an AC/DC module, a main control module, a connection module, a power amplifier module, a radio frequency power sampling module and a cooling system module;
the AC/DC module is used for supplying power to the main control module, the cooling system module, the power amplifier module and the lead receiving module, and is also used for providing a sampling signal 31 for the lead receiving module and receiving a control signal 31 sent by the lead receiving module;
the main control module is used for receiving a sampling signal 33 sent by the power receiving module and a sampling signal 34 sent by the radio frequency power sampling module, the main control module is also used for providing a control signal 32 for the power receiving module, and the control signal 32 comprises analog and digital signals for controlling the AC/DC module, the power amplification module, the cooling system module and the power receiving module;
the lead receiving module is used for receiving and processing the sampling signals 31, 32 and 35 sent by the AC/DC module, the power amplifier module and the cooling system module, and sending the sampling signals 33 to the main control module; the lead receiving module is further used for receiving and processing the control signal 32 sent by the main control module and sending a control signal 31 to the AC/DC module; the receiving and leading module is also used for receiving and processing an external radio frequency signal 31 and sending a radio frequency signal 32 to the power amplification module; the connection module is also used for supplying power to the radio frequency power sampling module;
the power amplifier module is used for receiving and amplifying the radio frequency signal 32 sent by the receiving and leading module, and is also used for outputting radio frequency power;
the radio frequency power sampling module is used for sampling the radio frequency power value output by the power amplification module to obtain a sampling signal 36, and sending the sampling signal 34 to the main control module after processing;
the cooling system module is used for providing cooling for the AC/DC module, the main control module, the connection module and the power amplifier module respectively.
2. The pulsed radio frequency power supply system of claim 1, wherein: the AC/DC module comprises an AC/DC switching power supply 41 and an AC/DC switching power supply 42, wherein the AC/DC switching power supply 41 provides stable direct current power supply for the main control module, the cooling system module and the lead receiving module, and the AC/DC switching power supply 42 provides direct current power supply with adjustable output voltage for the power amplifier module.
3. The pulsed radio frequency power supply system of claim 1, wherein: the sampling signal 31 includes an output voltage ready signal, an overvoltage alarm signal, an overcurrent alarm signal, an overtemperature alarm signal and a phase-failure alarm signal, the sampling signal 32 includes an operating voltage, an operating current and an operating temperature of the power amplifier module, and the sampling signal 35 includes an operating voltage, an operating current and an operating temperature of the cooling system module.
4. The pulsed radio frequency power supply system of claim 1, wherein: the main control module comprises MCU, DSP, FPGA and a DDS chip, and the main control module completes signal exchange with external equipment through an RS485, ethercat or RS232 communication interface.
5. The pulsed radio frequency power supply system of claim 4, wherein: the control signal 31 includes an output level regulation signal and a remote control power switch signal.
6. The pulsed radio frequency power supply system of claim 4, wherein: the receiving and guiding module comprises a channel selection switch, a VGA, a first fixed attenuator, an adjustable attenuator, a low-noise amplifier and a second fixed attenuator which are sequentially connected, wherein the channel selection switch receives a radio frequency signal 51 emitted by a DDS chip IN the main control module and a radio frequency signal 52 fed by an external CEX IN, and selects one radio frequency signal to send to the VGA, the radio frequency signal modulated by the VGA enters the adjustable attenuator after being attenuated by the fixed attenuator, and the radio frequency signal regulated and controlled by the adjustable attenuator is finally sent to the power amplifier module as a radio frequency front-stage signal after being subjected to the low-noise amplifier and the fixed attenuator.
7. The pulsed radio frequency power supply system of claim 1, wherein: the power amplifier module comprises a VDMOS tube, a diode, an LDMOS, a power amplifier based on a GaN process, a power amplifier based on a GaAs process, an LC filter, a microstrip balun, an LC balun, a transformer balun, a power divider and an isolator.
8. The pulsed radio frequency power supply system of claim 1, wherein: the radio frequency power sampling module comprises an operational amplifier, a diode, a T-shaped attenuator, an n-shaped attenuator, a microstrip coupler and a magnetic core coupler.
9. The pulsed radio frequency power supply system of claim 1, wherein: the cooling system module comprises a fan module, a radiator and a water tray.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202410016075.2A CN117833609A (en) | 2024-01-05 | 2024-01-05 | Pulse radio frequency power supply system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202410016075.2A CN117833609A (en) | 2024-01-05 | 2024-01-05 | Pulse radio frequency power supply system |
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| CN202410016075.2A Pending CN117833609A (en) | 2024-01-05 | 2024-01-05 | Pulse radio frequency power supply system |
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