CN117826307A - Intermediate infrared polarization converter based on metamaterial structure and preparation method thereof - Google Patents
Intermediate infrared polarization converter based on metamaterial structure and preparation method thereof Download PDFInfo
- Publication number
- CN117826307A CN117826307A CN202311800323.4A CN202311800323A CN117826307A CN 117826307 A CN117826307 A CN 117826307A CN 202311800323 A CN202311800323 A CN 202311800323A CN 117826307 A CN117826307 A CN 117826307A
- Authority
- CN
- China
- Prior art keywords
- metal block
- rectangular metal
- super
- layer
- polarization converter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010287 polarization Effects 0.000 title claims abstract description 100
- 238000002360 preparation method Methods 0.000 title claims description 10
- 239000002184 metal Substances 0.000 claims abstract description 111
- 229910052751 metal Inorganic materials 0.000 claims abstract description 111
- 239000010410 layer Substances 0.000 claims abstract description 48
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 42
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 21
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 21
- 239000002344 surface layer Substances 0.000 claims abstract description 15
- 229920002120 photoresistant polymer Polymers 0.000 claims description 9
- 238000007747 plating Methods 0.000 claims description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- 238000005566 electron beam evaporation Methods 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 5
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 239000003292 glue Substances 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims description 3
- 238000005406 washing Methods 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 abstract description 18
- 238000000034 method Methods 0.000 description 13
- 239000000463 material Substances 0.000 description 12
- 238000005516 engineering process Methods 0.000 description 7
- 230000005684 electric field Effects 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000011160 research Methods 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 230000007613 environmental effect Effects 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 4
- 239000002086 nanomaterial Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000003331 infrared imaging Methods 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 241001465754 Metazoa Species 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000001808 coupling effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000005431 greenhouse gas Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000004297 night vision Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
Abstract
The invention provides a middle infrared polarization converter based on a metamaterial structure, which comprises a metal substrate layer, a silicon dioxide layer prepared on the metal substrate layer and a super surface layer prepared on the silicon dioxide layer, wherein the metal substrate layer is a metal substrate layer; the super-surface layer comprises a plurality of super-surface structural units which are arranged periodically; each super-surface structure unit comprises a middle rectangular metal block which is obliquely arranged, and a first rectangular metal block and a second rectangular metal block which are obliquely arranged at two sides of the middle rectangular metal block; the first rectangular metal block, the second rectangular metal block and the middle rectangular metal block are parallel. The invention can realize efficient polarization conversion in the wave band of 3-5 mu m, and can flexibly change the working wavelength by adjusting the parameters of the structure.
Description
Technical Field
The invention relates to the technical field of surface plasmon nano photonics, in particular to a meta-material structure-based mid-infrared polarization converter and a preparation method thereof.
Background
An infrared polarization converter is a device capable of converting incident infrared radiation into a specific polarization state. In many applications, a specific polarization state is critical, for example in infrared imaging, optical communication and materials research. The super-surface technology can realize polarization conversion of infrared radiation by designing a microstructure, and compared with a traditional optical element, the super-surface technology has the advantages of small size, light weight, integration, adjustability and the like.
In terms of market background, the subsurface technology has attracted much research and commercial attention in its potentially broad application areas, with some potential aspects of the subsurface technology and its market background in terms of infrared polarization converters:
polarization state analysis: the infrared polarization converter can analyze the polarization state of light, i.e., the vibration direction of the light waves.
Analysis of optical properties of the material: including reflection, absorption, scattering, etc., to understand the structure and properties of the material, which is critical for many applications.
Infrared imaging: the infrared polarization converter may be used in an infrared imaging system and may provide additional information about the target, such as material properties, surface topography, etc.
Infrared polarization converters play a vital role in infrared night vision devices, enabling environmental monitoring and target identification in low light conditions. The device is used for detecting heat radiation of objects such as human bodies, animals, equipment and the like, and is widely applied to aspects such as military reconnaissance, search and rescue, security monitoring and the like. Environmental monitoring: in environmental science and meteorology, the infrared polarization detector can be used for detecting parameters such as greenhouse gases, humidity and the like in the atmosphere, and has important significance for environmental monitoring and weather forecast.
Common polarizers are typically made based on isotropic materials (e.g., platelet crystals, multilayer media, etc.). They rely on the crystalline structure of the material or the absorption and propagation characteristics of the multilayer medium to achieve selective transmission or absorption of a particular polarization state. The ordinary polarizer is typically a relatively thick and large-sized device such as a common glass polarizer. And its polarization properties are typically fixed and cannot be adjusted by external control. So, for both disadvantages of the general polarizer, research on the super surface polarizer is very important, because the super surface polarizer is generally composed of micro-or nano-scale structures, and control of light can be achieved in a very small size range, so that the size is much smaller than that of the general polarizer. In addition, the super-surface polaroid has adjustability, the polarization state of the super-surface polaroid can be changed by adjusting the structure of the super-surface, and the problem that the polarization property of the common polaroid cannot be adjusted is solved.
The background of research on the polarization of the super surface can be traced back to the 90 s of the 20 th century, and researchers at that time began to study how to implement polarization manipulation of incident light by designing tiny structural units. Early researches have focused on using structures such as metal films and nanopore arrays to achieve polarization control, but these methods have some limitations, such as narrow polarization control range and complex process. In recent years, with the continuous development of nano-processing technology and the appearance of metamaterials, the super-surface polarization technology has been rapidly developed. The super-surface polarization technology not only can realize polarization control of incident light, but also can realize highly directional adjustment of the phase and the amplitude of the light, and provides a brand new thought for the design and the manufacture of optical devices. By designing the nano structure, the effect of flexibly controlling the polarization direction of the reflected light is realized. The parameters of the designed micro-nano structure are adjusted, the working bandwidth and the working wavelength can be flexibly mastered, and the polarization conversion efficiency is far higher than that of the traditional method. Therefore, the metamaterial polarization converter has a wider application prospect.
Disclosure of Invention
In order to solve the technical problems of narrow polarization control range, complex process and the like of the super surface polarization in the prior art, one object of the invention is to provide a middle infrared polarization converter based on a metamaterial structure, wherein the middle infrared polarization converter comprises a metal substrate layer, a silicon dioxide layer prepared on the metal substrate layer and a super surface layer prepared on the silicon dioxide layer;
wherein the super-surface layer comprises a plurality of super-surface structural units which are periodically arranged; each super-surface structure unit comprises a middle rectangular metal block which is obliquely arranged, and a first rectangular metal block and a second rectangular metal block which are obliquely arranged at two sides of the middle rectangular metal block;
the first rectangular metal block, the second rectangular metal block and the middle rectangular metal block are parallel.
Preferably, the thickness of the metal substrate layer is 25nm, and the thickness of the silicon dioxide layer is 450nm.
Preferably, the period p=1500 nm of the plurality of supersurface structural units of the supersurface layer;
the length of the middle rectangular metal block is 1800nm, and the width of the middle rectangular metal block is 200nm; the length of the first rectangular metal block is 500nm, and the width of the first rectangular metal block is 200nm; the length of the second rectangular metal block is 500nm, and the width of the second rectangular metal block is 200nm.
The thicknesses of the first rectangular metal block, the second rectangular metal block and the middle rectangular metal block are 25nm.
Another object of the present invention is to provide a method for manufacturing a mid-infrared polarization converter based on a metamaterial structure, the method comprising:
s1, evaporating a metal film on a flat Si substrate by using an electron beam evaporation instrument to form a metal substrate layer;
s2, plating a silicon dioxide layer on the metal substrate layer by using magnetron sputtering;
s3, spin coating photoresist on the silicon dioxide layer; forming super-surface pattern grooves of the first rectangular metal block, the second rectangular metal block and the middle rectangular metal block on the photoresist through electron beam exposure processing;
s4, evaporating a gold plating film on the surface of the photoresist forming the super-surface pattern grooves of the first rectangular metal block, the second rectangular metal block and the middle rectangular metal block by using electron beam evaporation;
and washing residual glue at the unexposed position by using an acetone solution to form a super-surface structural unit with a first rectangular metal block, a second rectangular metal block and a middle rectangular metal block.
According to the intermediate infrared polarization converter based on the metamaterial structure and the preparation method thereof, the silicon dioxide layer is prepared on the metal substrate layer, the super surface layer is prepared on the silicon dioxide layer, the super surface layer is provided with a plurality of super surface structural units which are periodically arranged, the function of converting linearly polarized light into circularly polarized light is provided in an intermediate infrared (3-5 mu m) wave band, the volume of a polarizing element can be reduced, the quality of the element can be reduced on the premise of ensuring the quality of a light field, and the problem of overlarge volume of an intermediate infrared polarizing plate is solved.
The intermediate infrared polarization converter based on the metamaterial structure and the preparation method thereof can realize efficient polarization conversion in the wave band of 3-5um, have the advantages of high efficiency, easiness in processing, stable performance and the like, and solve the application problem of the polaroid in small-size devices.
According to the intermediate infrared polarization converter based on the metamaterial structure and the preparation method thereof, the intermediate infrared polarization converter can realize efficient polarization conversion in a 3-5 mu m wave band, and the working wavelength of the intermediate infrared polarization converter can be flexibly changed by adjusting parameters of the structure.
The invention provides a middle infrared polarization converter based on a metamaterial structure and a preparation method thereof. Each super-surface structural unit is provided with three metal blocks, and the metal substrate layer at the bottom layer can reflect incident infrared light and is a perfect reflector for the incident mid-infrared polarized light.
According to the intermediate infrared polarization converter based on the metamaterial structure and the preparation method thereof, plasmon resonance is induced by interaction of the super surface layer and incident polarized light, and field enhancement Ex and Ey with the same effect are generated in the xy direction. Assuming that the polarization of the incident light is in the y-direction, then the Ey electric field component will interfere with the electric field p y carried by the incident light and the Ex component will produce reflected light polarized in the x-direction. Thus, the linearly polarized light incident on the optical metamaterial is reflected and the polarization direction is changed by 90 degrees. In the process of multiple reflection, the polarization state of the electromagnetic wave can be changed to a certain extent, and finally, a homodromous polarized reflection component and an orthogonal polarized reflection component are formed. Assuming that the incident wave electric field is Ein, the reflected wave electric field can be obtained after the electromagnetic wave passes through the super-surface layer. The incident wave silicon dioxide layer is subjected to multiple reflections, the homodromous polarized reflection component is weakened by interference cancellation of the homodromous polarized reflection component, the orthogonal polarized reflection component is strengthened by coherent superposition of the orthogonal polarized reflection component, and then the efficient polarization conversion rate is generated.
The middle-infrared polarization converter based on the metamaterial structure and the preparation method thereof provided by the invention have the advantages that the working wave band of the middle-infrared polarization converter is a middle-wave infrared wave band, and the thickness of the three-layer structure is far smaller than the working wavelength. For y linear polarized light with the incidence angle of 0 degree, the circular polarization degree is as low as 96.89 percent and as high as 99.62 percent in a wave band of 3-5 um; the minimum circular polarization conversion rate exceeds 77.52 percent and the maximum circular polarization conversion rate can reach 87.87 percent.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
Fig. 1 schematically shows a three-dimensional structure of a mid-infrared polarization converter based on a metamaterial structure.
Fig. 2 shows a top view of a meta-material structure based mid-infrared polarization converter of the present invention.
FIG. 3 is a schematic diagram showing the phase difference of the mid-infrared polarization converter based on the metamaterial structure in the 3-5um working wavelength.
FIG. 4 shows a graph of circular polarization degree of a metamaterial-based mid-infrared polarization converter in an operating wavelength of 3-5 um.
FIG. 5 shows a graph of circular polarization conversion rate at 3-5um operating wavelength for a metamaterial-based mid-infrared polarization converter of the present invention.
Detailed Description
To further clarify the above and other features and advantages of the present invention, a further description of the invention will be rendered by reference to the appended drawings. It should be understood that the specific embodiments presented herein are for purposes of explanation to those skilled in the art and are intended to be illustrative only and not limiting.
Description of the principle.
The principle of the super surface is to utilize a series of sub-wavelength structures to realize highly customized control of electromagnetic waves by adjusting parameters such as geometric shapes, material properties, mutual distances and the like.
Super-surface polarization control is a special application of super-surfaces. The principle is that the sub-wavelength structure of the super-surface is utilized to carry out polarization control on electromagnetic waves, so that only electromagnetic waves with specific polarization directions can pass through the super-surface. In particular, sub-wavelength structures on the supersurface may be designed to reflect or transmit only electromagnetic waves of a particular polarization, while not reflecting or transmitting electromagnetic waves of other polarizations. The advantage of such super surface polarization is that it allows for efficient polarization control without the need for additional polarizing devices, thereby reducing the complexity and cost of the system. In addition, the response speed of the super-surface polarization is very fast, and the polarization of the electromagnetic wave is controlled in nanosecond level.
As shown in fig. 1 and 2 in combination, according to an embodiment of the present invention, there is provided a meta-material structure-based mid-infrared polarization converter including a metal substrate layer 3, a silicon dioxide layer 2 prepared on the metal substrate layer 3, and a super surface layer 1 prepared on the silicon dioxide layer 2.
The super surface layer 1 includes a plurality of super surface structure units 1-1 arranged periodically in the xy plane. Each of the super surface structure units 1-1 includes a middle rectangular metal block 1-2 arranged obliquely, and a first rectangular metal block 1-3 and a second rectangular metal block 1-4 arranged obliquely on both sides of the middle rectangular metal block 1-2.
The first rectangular metal block 1-3, the second rectangular metal block 1-4 and the middle rectangular metal block 1-2 are parallel.
A metal substrate layer 3 for causing incident light to strike the bottom of a metamaterial-based structure of the present invention and then reflect back.
According to an embodiment of the invention, the thickness of the metal substrate layer 3 is 25nm and the thickness of the silicon dioxide layer 2 is 450nm. The period p=1500 nm of the plurality of the super surface structural units 1-1 of the super surface layer 1.
The length of the middle rectangular metal block 1-2 is 1800nm, and the width is 200nm; the length of the first rectangular metal block 1-3 is 500nm, and the width is 200nm; the second rectangular metal block 1-4 has a length of 500nm and a width of 200nm.
The thicknesses of the first rectangular metal block 1-3, the second rectangular metal block 1-4 and the middle rectangular metal block 1-2 are 25nm.
In the wave band of 3-5um, the circular polarization degree of the invention is as low as 96.89 percent and as high as 99.62 percent; the minimum circular polarization conversion rate exceeds 77.52 percent and the maximum circular polarization conversion rate can reach 87.87 percent.
According to an embodiment of the present invention, there is provided a method for manufacturing a mid-infrared polarization converter based on a metamaterial structure, which is manufactured by an electron beam Exposure (EBL) technique and a plating process, including:
and S1, evaporating a metal film on the flat Si substrate by using an electron beam evaporation instrument to form a metal substrate layer 3. The metal substrate layer 3 acts as a mirror and the thickness of the metal substrate layer 3 is 25nm, so that it is ensured that the infrared light incident on the surface of the material can be totally reflected back.
And S2, plating a silicon dioxide layer 2 on the metal substrate layer 3 by using magnetron sputtering. The thickness of the silicon dioxide layer 2 was 450nm.
Step S3, spin coating photoresist on the silicon dioxide layer 2; and forming super-surface pattern grooves of the first rectangular metal block, the second rectangular metal block and the middle rectangular metal block on the photoresist through electron beam exposure processing.
Step S4, evaporating a gold plating film on the surface of the photoresist forming the super-surface pattern grooves of the first rectangular metal block, the second rectangular metal block and the middle rectangular metal block by using electron beam evaporation;
the residual glue at the unexposed position is washed away by acetone solution to form the super surface structure unit 1-1 with the first rectangular metal block 1-3, the second rectangular metal block 1-4 and the middle rectangular metal block 1-2.
The invention provides a middle infrared polarization converter based on a metamaterial structure, which relates to the control of polarization directions in a 3-5um wave band, and the polarization directions of linearly polarized light in the 3-5um wave band are controlled by utilizing a super surface structure unit 1-1 in the middle infrared wave band metamaterial polarization converter. When x (or y) polarized light is incident in the-z direction, the polarization direction of the reflected light is converted into the y (or x) direction through interaction with an electric field generated by plasmon resonance, so that the reflected light realizes efficient polarization conversion. In addition, the working wavelength of polarization conversion can be dynamically adjusted by dynamically changing the length and width of the three rectangular metal blocks. When linearly polarized light is incident on the surface of the material, electric field components carried by the linearly polarized light drive the three rectangular metal blocks to generate plasmon resonance, and the three rectangular metal blocks have strong coupling effect. The nano-structure surface of the mid-infrared metamaterial polarization converter can excite plasmon resonance of two modes, an electric dipole mode exists at a low frequency, and a magnetic dipole mode corresponds to a high frequency. Then, the thickness of the super-surface layer 1 can be adjusted to enable the two plasmon resonance modes to be polymerized together and overlapped into a wider working range.
To describe the performance of mid-infrared metamaterial polarization devices, the quality of reflected circularly polarized light was characterized using the degree of circular polarization DOP. In particular, the method comprises the steps of,
wherein I is c Representing the intensity of circularly polarized light in the reflected light, I r Representing the intensity of the total reflected light, S 0 And S is 3 Representing the total light intensity and the right-handed circularly polarized light component in the Stokes vector, R ij The incident polarized light having a polarization direction j becomes i by reflection polarization direction, and the reflection coefficient is R.
Because of the absorption phenomenon in the interaction process of the incident light and the metamaterial device, the device performance cannot be completely reflected only by using the duty ratio of circularly polarized light in the reflected light, and therefore the polarization conversion efficiency of the device is represented by using the polarization conversion rate PCR.
In particular, the method comprises the steps of,where Is represents the intensity of the incident light.
The three-dimensional electromagnetic simulation software COMSOL Multiphsics is utilized to simulate the intermediate infrared polarization converter based on the metamaterial structure, and incident light is taken as y polarized light to be incident on the surface of the device.
As shown in fig. 3, when the incident light is changed by 3-5 micrometers, the phase difference between the co-polarized component and the orthogonal polarized component of the reflected light is about-90 ° and 270 ° in the range of 3-5um, and it can be clearly seen that efficient polarization conversion is achieved in the range of 3-5 um.
As shown in FIG. 4, the circular polarization degree of the infrared metamaterial polarization converter in the range of 3-5um is 96.89% at the lowest and 99.62 at the highest.
As shown in fig. 4, it can be seen that the polarization conversion efficiency of the device is generally greater than 77.52% and up to 87.87% over the 3-5um wavelength range.
The experiment demonstrates that the intermediate infrared polarization converter based on the metamaterial structure provided by the invention can realize the efficient polarization conversion effect in the intermediate infrared band only by simply adjusting structural parameters, experimental conditions and the like. On the basis, the invention can be flexibly popularized to the wavelength ranges of terahertz, microwaves and the like.
While embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the invention, and that variations, modifications, alternatives and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the invention.
Claims (4)
1. A mid-infrared polarization converter based on a metamaterial structure, characterized in that the mid-infrared polarization converter comprises a metal substrate layer, a silicon dioxide layer prepared on the metal substrate layer, and a super-surface layer prepared on the silicon dioxide layer;
wherein the super-surface layer comprises a plurality of super-surface structural units which are periodically arranged; each super-surface structure unit comprises a middle rectangular metal block which is obliquely arranged, and a first rectangular metal block and a second rectangular metal block which are obliquely arranged at two sides of the middle rectangular metal block;
the first rectangular metal block, the second rectangular metal block and the middle rectangular metal block are parallel.
2. The mid-infrared polarization converter of claim 1, wherein the metal substrate layer has a thickness of 25nm and the silicon dioxide layer has a thickness of 450nm.
3. The mid-infrared polarization converter of claim 1, wherein the period P = 1500nm of the plurality of super surface structural units of the super surface layer;
the length of the middle rectangular metal block is 1800nm, and the width of the middle rectangular metal block is 200nm; the length of the first rectangular metal block is 500nm, and the width of the first rectangular metal block is 200nm; the length of the second rectangular metal block is 500nm, and the width of the second rectangular metal block is 200nm.
The thicknesses of the first rectangular metal block, the second rectangular metal block and the middle rectangular metal block are 25nm.
4. The preparation method of the mid-infrared polarization converter based on the metamaterial structure is characterized by comprising the following steps of:
s1, evaporating a metal film on a flat Si substrate by using an electron beam evaporation instrument to form a metal substrate layer;
s2, plating a silicon dioxide layer on the metal substrate layer by using magnetron sputtering;
s3, spin coating photoresist on the silicon dioxide layer; forming super-surface pattern grooves of the first rectangular metal block, the second rectangular metal block and the middle rectangular metal block on the photoresist through electron beam exposure processing;
s4, evaporating a gold plating film on the surface of the photoresist forming the super-surface pattern grooves of the first rectangular metal block, the second rectangular metal block and the middle rectangular metal block by using electron beam evaporation;
and washing residual glue at the unexposed position by using an acetone solution to form a super-surface structural unit with a first rectangular metal block, a second rectangular metal block and a middle rectangular metal block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311800323.4A CN117826307A (en) | 2023-12-26 | 2023-12-26 | Intermediate infrared polarization converter based on metamaterial structure and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311800323.4A CN117826307A (en) | 2023-12-26 | 2023-12-26 | Intermediate infrared polarization converter based on metamaterial structure and preparation method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117826307A true CN117826307A (en) | 2024-04-05 |
Family
ID=90518450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311800323.4A Pending CN117826307A (en) | 2023-12-26 | 2023-12-26 | Intermediate infrared polarization converter based on metamaterial structure and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117826307A (en) |
-
2023
- 2023-12-26 CN CN202311800323.4A patent/CN117826307A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Berkhout et al. | Perfect absorption and phase singularities in plasmon antenna array etalons | |
| CN107831607B (en) | Phase-change material-based adjustable broadband polarization conversion and dynamic geometric phase modulation device | |
| Zhu et al. | Optical metamaterial absorber based on leaf-shaped cells | |
| CN107340559A (en) | High efficiency and broad band circular polarization switching device and method based on super clever surface | |
| WO2017020792A1 (en) | Left-handed circular polarisation conversion metamaterial thin film | |
| Qu et al. | Microwave and acoustic absorption metamaterials | |
| US20140085693A1 (en) | Metasurface nanoantennas for light processing | |
| US20160252652A1 (en) | Methods and apparatus for broadband angular selectivity of electromagnetic waves | |
| CN109901257B (en) | Visible light metamaterial polarization converter | |
| Devarapu et al. | Broadband near-unidirectional absorption enabled by phonon-polariton resonances in SiC micropyramid arrays | |
| CN109193174B (en) | Metamaterial-based unidirectional non-reciprocal wave absorber and production method thereof | |
| CN111596399B (en) | Blue light wave band asymmetric metamaterial polarization regulator and manufacturing method thereof | |
| CN109411898A (en) | A method of the adjustable wave absorbing device of Terahertz double frequency-band based on graphene | |
| Cao et al. | Angular-asymmetric transmitting metasurface and splitter for acoustic waves: combining the coherent perfect absorber and a laser | |
| Chen et al. | Broadband spoof surface plasmon polariton couplers based on transmissive phase gradient metasurface | |
| Yu et al. | High-Q absorption in all-dielectric photonics assisted by metamirrors | |
| CN112130245A (en) | Broadband high-transmittance asymmetric metamaterial polarization regulator and manufacturing method thereof | |
| Luo | Subwavelength electromagnetics | |
| CN109324361B (en) | Ultra-wide waveband near-perfect absorber and manufacturing method thereof | |
| Bibbò et al. | Radiation-direction steerable nanoantennae | |
| JP2009223123A (en) | Polarization control element and polarization control device | |
| CN117826307A (en) | Intermediate infrared polarization converter based on metamaterial structure and preparation method thereof | |
| Dai et al. | Broadband two-dimensional photonic crystal wave plate | |
| CN107402418B (en) | Infrared broadband absorber based on multilayer grating structure | |
| Lv et al. | Broadband electromagnetically induced transparency to broadband electromagnetically induced absorption conversion with silicon based on metastructure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |